carrying module

Abstract

The application provides a bearing module suitable for coupling with a container, comprising a bearing table and a plurality of limiting block groups suitable for being fixed on the bearing table, wherein the limiting block group comprises a plurality of limiting blocks distributed at different positions of the bearing table, and the position of each limiting block group is suitable for matching a container of a corresponding size, and the size of the container matches the size of accommodated materials. By using the above scheme, a plurality of sizes of containers can be compatible, thereby effectively improving the utilization rate of the bearing module, reducing the cost, and facilitating management and implementation.

Description

Technical Field

[0001] The embodiments in this specification relate to the field of mechanical equipment, and more particularly to a load-bearing module. Background Technology

[0002] In the mechanical manufacturing process, materials need to go through multiple processes (such as processing and testing), and each process has corresponding processing equipment. Therefore, it is necessary to use a carrier module to transfer materials between different devices.

[0003] However, existing support modules are limited by their structure and are usually only suitable for supporting materials of a fixed size. Therefore, it is currently necessary to customize support modules of different sizes and structures for materials of different sizes. This results in low utilization of individual support modules. In addition, in order to meet the needs of materials of different sizes, a large number of support modules of different sizes are kept in reserve, which is costly and difficult to manage. Summary of the Invention

[0004] In view of this, the embodiments of this specification provide a carrier module that is compatible with containers of various sizes, thereby effectively improving the utilization rate of the carrier module, reducing costs, and facilitating management and implementation.

[0005] This specification provides a carrier module, comprising: a platform and a plurality of limiting block groups adapted to be fixed on the platform, wherein:

[0006] The limiting block group includes multiple limiting blocks distributed at different positions on the platform. The position of each limiting block group is adapted to match a container of a corresponding size, and the size of the container matches the size of the material it contains.

[0007] Optionally, the surface of the fixed limiting block group of the platform does not overlap with the space in the container that matches each limiting block group and is suitable for accommodating the material.

[0008] Optionally, the plurality of limiting block groups are arranged in a ring around the center of the platform.

[0009] Optionally, the carrier module further includes:

[0010] Multiple primary sensors are suitable for detecting the size of the container;

[0011] Multiple first sensor mounting plates are suitable for fixing the corresponding first sensors respectively;

[0012] Multiple first sensor brackets are provided for fixing the corresponding first sensor mounting plates.

[0013] Optionally, the first sensor includes a pressure sensor.

[0014] Optionally, the plurality of first sensors are divided into a plurality of first sensor groups, and the position of each first sensor group is adapted to match a container of a corresponding size.

[0015] Optionally, the height difference between the upper surfaces of at least some of the first sensor groups is different.

[0016] Optionally, the carrier module includes: a plurality of platforms adapted to be stacked and fixedly connected, the plurality of platforms having different sizes and / or shapes.

[0017] Optionally, the plurality of platforms include:

[0018] First platform;

[0019] The second platform is located above the first platform and is fixedly connected to the first platform. It is provided with a receiving groove, which is suitable for receiving the corresponding limiting block and the first sensor.

[0020] Optionally, the structure of each limiting block in the limiting block group is determined based on the size of the container matched by the limiting block group and the position of each limiting block itself and their relative positions.

[0021] Optionally, the plurality of limiting block groups includes a first limiting block group, which includes: a first limiting block, a second limiting block, a third limiting block, and a fourth limiting block, wherein:

[0022] Both the first limiting block and the second limiting block have right-angle openings and are symmetrically arranged;

[0023] Both the third limiting block and the fourth limiting block have protrusions and are arranged symmetrically.

[0024] Optionally, the plurality of limiting block groups further includes a second limiting block group, which includes: a fifth limiting block, a sixth limiting block, a seventh limiting block, and an eighth limiting block, wherein:

[0025] Both the fifth limiting block and the sixth limiting block have right-angle openings and are symmetrically arranged;

[0026] Both the seventh limiting block and the eighth limiting block are three-dimensional structures and are symmetrically arranged.

[0027] Optionally, the plurality of limiting block groups may further include a third limiting block group, which has the same structure as the second limiting block group but is distributed in a different position on the platform.

[0028] Optionally, the orientation of some of the limiting blocks in the third limiting block group is different from the orientation of the corresponding limiting blocks in the second limiting block group.

[0029] Optionally, the first limiting block group, the second limiting block group, and the third limiting block group are symmetrically distributed along the same center line.

[0030] Optionally, each limit block is provided with a through hole.

[0031] Optionally, the carrier module further includes:

[0032] The second sensor is suitable for detecting the placement position of the contained material;

[0033] A second sensor bracket is adapted to fix the second sensor.

[0034] Optionally, the second sensor includes a light sensor.

[0035] The carrier module in the embodiments of this specification includes a platform and multiple limiting block groups. Since multiple limiting block groups fixed on the platform can limit containers of different preset sizes, it can carry materials of different sizes. Therefore, it can effectively improve the utilization rate of the carrier module, reduce costs, and facilitate management and implementation.

[0036] Furthermore, by ensuring that the surface of the fixed limiting block group on the platform does not intersect with the space in the container that matches each limiting block group suitable for containing the material, it is possible to prevent the surface of the material from being scratched by the limiting blocks.

[0037] Furthermore, by setting multiple limit block groups arranged in a ring around the center of the platform, the space on the platform can be fully utilized, the space utilization rate of the bearing module can be improved, and the overall volume of the bearing module can be reduced.

[0038] Furthermore, the carrier module may also be equipped with multiple first sensors, multiple first sensor mounting plates adapted to fix the corresponding first sensors respectively, and multiple first sensor brackets adapted to fix the corresponding first sensor mounting plates respectively. The size of the container can be detected by the multiple first sensors, so that the size of the material contained in the container can be accurately identified when the carrier module is compatible with containers of various sizes.

[0039] Furthermore, the first sensor may include a pressure sensor. Since the pressure sensor can detect the size of the container directly by sensing the pressure of the container, it does not require a lot of calculations, which not only makes the detection speed fast but also makes it easy to implement.

[0040] Furthermore, the plurality of first sensors are divided into a plurality of first sensor groups, and the position of each first sensor group is adapted to match the container of the corresponding size. Since a plurality of first sensors are assigned to the container of the corresponding size, the accuracy of the detection of the container size can be improved.

[0041] Furthermore, by setting different height differences between the upper surfaces of at least some of the first sensor groups, since the first sensor groups can be set on different planes, it is possible to make full use of the space on the platform while ensuring that each first sensor group only senses containers of the corresponding size, thereby further improving the accuracy of container size detection and reducing energy consumption.

[0042] Furthermore, by stacking multiple platforms of different sizes and / or shapes and fixing the multiple platforms together, it is possible to achieve different height differences between the upper surfaces of some of the first sensor groups, which is not only easy to implement but also very stable.

[0043] Furthermore, the plurality of platforms may include a first platform and a second platform, wherein the second platform may be located above the first platform and fixedly connected to the first platform. By providing a receiving groove on the second platform to receive the corresponding limiting block and the first sensor, and ensuring that a first sensor group only senses containers of the corresponding size, the accuracy of detecting the size of the container can be further improved.

[0044] Furthermore, by determining the structure of each limiting block in the limiting block group based on the size of the container matched by the limiting block group and the position of each limiting block itself and its relative positional relationship, the firmness of each limiting block group in limiting containers of the corresponding size can be ensured.

[0045] Furthermore, the plurality of limiting block groups may include a first limiting block group, which may include a first limiting block, a second limiting block, a third limiting block, and a fourth limiting block. The first limiting block and the second limiting block are both provided with right-angle openings and are symmetrically arranged; and the third limiting block and the fourth limiting block are both provided with protrusions and are symmetrically arranged. The above four limiting blocks cooperate with each other to limit the container of the corresponding size and have high firmness.

[0046] Furthermore, the plurality of limiting block groups may include a second limiting block group, which may include a fifth limiting block, a sixth limiting block, a seventh limiting block, and an eighth limiting block. The fifth and sixth limiting blocks are both designed with right-angled openings and are symmetrically arranged; and the seventh and eighth limiting blocks are both three-dimensional structures and are symmetrically arranged. The four limiting blocks cooperate with each other to limit containers of corresponding sizes and have high stability.

[0047] Furthermore, the plurality of limiting block groups may include a third limiting block group. By setting the third limiting block group to have the same structure as the second limiting block group but different distribution positions on the platform, containers of different sizes can be limited respectively, while making full use of the space on the platform.

[0048] Furthermore, by setting the orientation of some of the limiting blocks in the third limiting block group to be different from the orientation of the corresponding limiting blocks in the second limiting block group, based on the size of the container and the position of the limiting blocks on the platform, the stability of the container when limiting it can be improved.

[0049] Furthermore, by setting the first limiting block group, the second limiting block group, and the third limiting block group to be symmetrically distributed along the same center line, the utilization rate of the space on the platform can be further improved.

[0050] Furthermore, by providing through holes on each limiting block, it is easy to fix the limiting block to the platform, which is not only easy to implement but also provides a good fixing effect.

[0051] Furthermore, a second sensor and a second sensor bracket suitable for fixing the second sensor can be provided on the carrier module. The second sensor can detect the placement position of the material, thereby ensuring that the material is completely placed in the space suitable for containing the material in the container, thus avoiding damage to the material.

[0052] Furthermore, the second sensor can be an optical sensor. Since the optical sensor can detect the placement position of the material through light signals, the entire detection process does not require direct contact with the material. On the one hand, this avoids damage to the material caused by direct contact, and on the other hand, it does not cause secondary interference to the placement position of the material. Attached Figure Description

[0053] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0054] Figure 1 This specification shows a schematic diagram of the structure of a carrier module in a specific application scenario according to an embodiment of the present specification;

[0055] Figure 2 A schematic diagram of the structure of a carrier module in an embodiment of this specification is shown;

[0056] Figure 3 It shows Figure 2 The diagram shows a structural schematic of a carrier module from another perspective;

[0057] Figure 4 and Figure 5The diagram shows a structural schematic of a combination of a carrier module carrying a container of a certain size in an embodiment of this specification, viewed from different angles.

[0058] Figure 6 and Figure 7 The diagram shows a structural schematic of a combination of a carrier module carrying a container of another size, as illustrated in an embodiment of this specification, from different perspectives.

[0059] Figure 8 and Figure 9 The diagram shows a structural schematic of a combination of containers of another size carried by a carrier module in an embodiment of this specification, viewed from different angles. Detailed Implementation

[0060] As described in the background section, existing support modules are structurally limited and are typically only suitable for supporting materials of a fixed size. This results in low utilization of individual support modules. Furthermore, in order to meet the needs of materials of different sizes, a large number of support modules of different sizes are required, which is costly and difficult to manage.

[0061] To address the aforementioned issues, this specification provides a carrying module in its embodiments, comprising a platform and multiple limiting block groups. By fixing the multiple limiting block groups on the platform, containers of different preset sizes can be limited, thereby enabling the carrying of materials of different sizes. Thus, the utilization rate of the carrying module can be effectively improved, costs reduced, and management and implementation facilitated.

[0062] To enable those skilled in the art to better understand and implement the embodiments of this specification, the following describes in detail the concepts, schemes, principles, and advantages of the embodiments of this specification in conjunction with the accompanying drawings and specific application examples.

[0063] First, this specification provides a carrier module, which may include: a platform and a plurality of limiting block groups adapted to be fixed on the platform, wherein:

[0064] The limiting block group includes multiple limiting blocks distributed at different positions on the platform. The position of each limiting block group is adapted to match a container of a corresponding size, and the size of the container matches the size of the material it contains.

[0065] In this embodiment, by using multiple limiting block groups fixed on the platform, containers of different preset sizes can be limited, thereby enabling the carrying of materials of different sizes. Therefore, the utilization rate of the carrying module can be effectively improved, costs can be reduced, and management and implementation can be facilitated.

[0066] In practical implementation, the carrier module provided in the embodiments of this specification can be widely applied to various mechanical manufacturing scenarios, such as semiconductor-related mechanical manufacturing scenarios, insulator-related mechanical manufacturing scenarios, and conductor-related mechanical manufacturing scenarios. Correspondingly, the carrier module provided in the embodiments of this specification can be coupled to various containers. For example, the container can be a flower basket or a box, and the contained material can be semiconductor material (such as bare dies, wafers, photomasks, etc.), or various insulating materials (such as glass, rubber, etc.), or various conductive materials (such as steel, iron, etc.). This specification does not specifically limit the specific application scenarios of the carrier module, the type of coupled container, or the type of material contained in the container. To enable those skilled in the art to better understand and implement it, the following describes the components of the carrier module in detail through specific examples in specific application scenarios.

[0067] In practice, to prevent the material surface from being scratched by the limiting blocks, the surface of the limiting block group fixed on the platform can be set so that it does not intersect with the space in the container that matches each limiting block group and is suitable for accommodating the material.

[0068] As a specific example, refer to Figure 1 The diagram shows a structural schematic of a carrier module in a specific application scenario. The carrier module A is coupled to a container B. In a specific implementation, the container B can be a basket suitable for accommodating a wafer C. The location of the groove B0 in the container B is a space suitable for accommodating the material. Figure 1 As shown, the last groove of container B has a non-intersecting space S between the surface of the limiting block group (including limiting block A0, other limiting blocks not shown) on the bearing module A, so that the material does not come into contact with the limiting block group, and the material surface is prevented from being scratched by the limiting blocks.

[0069] In practice, in order to make full use of the space on the platform and improve the space utilization rate of the bearing module, multiple limit block groups can be set up in a ring shape distributed along the center of the platform.

[0070] As a specific example, refer to Figure 2 The diagram shows a structural schematic of a support module. The support module M includes three limiting block groups, which are respectively fixed on the platform 01 and the platform 02, wherein:

[0071] The first limit block group includes: limit block 11, limit block 12, limit block 13 and limit block 14;

[0072] The second limit block group includes: limit block 21, limit block 22, limit block 23 and limit block 24;

[0073] The third limit block group includes: limit block 31, limit block 32, limit block 33 and limit block 34.

[0074] Using the above embodiments, the container matched by the first limiting block group is smaller in size, for example, the container size can be adapted to 4-inch materials. The container matched by the second limiting block group is larger in size than the container matched by the first limiting block group, for example, the container size can be adapted to 6-inch materials. The container matched by the third limiting block group is larger in size, for example, the container size can be adapted to 8-inch materials. The three limiting block groups are distributed in a ring shape from the inside to the outside along the center of the platform 01 according to the size of the matched container, thereby making full use of the space on the platform 01 and platform 02, improving the space utilization rate of the bearing module, and thus reducing the overall volume of the bearing module.

[0075] It is understood that the embodiments in this specification do not impose specific limitations on the size of the container compatible with the carrier module.

[0076] It should be noted that the embodiments in this specification do not impose specific limitations on the distribution of the plurality of limiting block groups on the platform. In some embodiments of this specification, the plurality of limiting block groups may also be distributed on the platform without intersecting.

[0077] In practical implementation, since the carrier module is compatible with containers of various sizes, in order to accurately identify the size of the material contained in the container, the carrier module M may further include:

[0078] Multiple primary sensors are suitable for detecting the size of the container;

[0079] Multiple first sensor mounting plates are suitable for fixing the corresponding first sensors respectively;

[0080] Multiple first sensor brackets are provided for fixing the corresponding first sensor mounting plates.

[0081] Using the above embodiments, the container placed on the carrier module will generate information sensing with the first sensor at the corresponding position, thereby determining the size of the container and thus being able to accurately identify the size of the material contained in the container.

[0082] In some embodiments of this specification, the first sensor may include a pressure sensor. Since the pressure sensor can detect the size of the container directly by sensing the pressure of the container, it does not require a lot of calculation, which not only makes the detection speed fast, but also makes it easy to implement.

[0083] It is understood that the embodiments of this specification do not impose specific limitations on the type of the first sensor, as long as it can achieve the detection of the container's size. For example, in some other embodiments of this specification, the first sensor may also include a ranging sensor.

[0084] In a specific implementation, the plurality of first sensors can be divided into a plurality of first sensor groups, and the position of each first sensor group is adapted to match the container of the corresponding size. Since a plurality of first sensors are assigned to the container of the corresponding size, the accuracy of the detection of the size of the container can be improved.

[0085] As a specific example, continue to refer to Figure 2 and Figure 3 ,in Figure 3 It shows Figure 2 The diagram shown is a structural schematic of a carrier module from another perspective. Figure 2 The carrier module M shown includes multiple first sensors, specifically, first sensor 15, first sensor 16, first sensor 25, first sensor 26, first sensor 35, and first sensor 36.

[0086] Among them, the first sensor 15 and the first sensor 16 form a first sensor group, which is positioned to match a container holding 4-inch material; the first sensor 25 and the first sensor 26 form another first sensor group, which is positioned to match a container holding 6-inch material; and the first sensor 35 and the first sensor 36 form yet another first sensor group, which is positioned to match a container holding 8-inch material.

[0087] In practical implementation, to facilitate sensor installation, a corresponding sensor mounting plate can be set up. For example, continue to refer to... Figure 3 The carrier module M also includes multiple first sensor mounting plates, specifically including first sensor mounting plate 151, first sensor mounting plate 161, first sensor mounting plate 251, first sensor mounting plate 261, first sensor mounting plate 351, and first sensor mounting plate 361, which are suitable for fixing first sensor 15, first sensor 16, first sensor 25, first sensor 26, first sensor 35, and first sensor 36 respectively.

[0088] Accordingly, continue to refer to Figure 3 The carrier module M also includes multiple first sensor brackets, specifically including first sensor bracket 152, first sensor bracket 162, first sensor bracket 252, first sensor bracket 262, first sensor bracket 352, and first sensor bracket 362, which are suitable for fixing first sensor mounting plate 151, first sensor mounting plate 161, first sensor mounting plate 251, first sensor mounting plate 261, first sensor mounting plate 351, and first sensor mounting plate 361 respectively.

[0089] Using the above embodiments, for example, the container is a basket suitable for holding wafers. The wafers can be of different sizes, and the basket is adapted to the corresponding wafer size. When used to transport 4-inch wafers, the basket on the carrier module M presses against the first sensor 15 and the first sensor 16. The first sensor 15 and the first sensor 16 can determine that the basket on the carrier module M is adapted to a 4-inch wafer based on the sensed pressure information. When used to transport 6-inch wafers, the container presses against the first sensor 25 and the first sensor 26. The first sensor 25 and the first sensor 26 can determine that the basket on the carrier module M is adapted to a 6-inch wafer based on the sensed pressure information. When used to transport 8-inch wafers, the container presses against the first sensor 35 and the first sensor 36. The first sensor 35 and the first sensor 36 can determine that the basket on the carrier module M is adapted to an 8-inch wafer based on the sensed pressure information.

[0090] In practice, to improve the accuracy of container size detection, the height difference between the upper surfaces of at least some of the first sensor groups can be set to be different. Since the first sensor groups can be set on different planes, the space on the platform can be fully utilized while ensuring that each first sensor group only senses containers of the corresponding size and reducing energy consumption.

[0091] In some embodiments of this specification, multiple platforms of different sizes and / or shapes can be stacked and fixedly connected to achieve different height differences between the upper surfaces of some of the first sensor groups. This is not only easy to implement, but also very stable.

[0092] As a specific example, continue to refer to Figure 2 The plurality of platforms may include:

[0093] First platform 01;

[0094] The second platform 02 is located above the first platform 01 and is fixedly connected to the first platform 01. It is provided with a receiving groove, which is suitable for receiving the corresponding limiting block and the first sensor.

[0095] Using the above embodiments, when applied to the transfer of 4-inch wafers, the basket carried on the carrier module M will press on only the first sensor 15 and the first sensor 16. When applied to the transfer of 6-inch wafers, the basket carried on the carrier module M will press on only the first sensor 25 and the first sensor 26. However, when applied to the transfer of 8-inch wafers, in order to make full use of the space on the stage, multiple limiting block groups suitable for matching baskets of corresponding sizes are sequentially distributed in a ring along the center of the stage. In this case, if the upper surface of the first sensor group composed of the first sensor 35 and the first sensor 36 is on the same plane as the upper surface of the first sensor group composed of the first sensor 25 and the first sensor 26, the basket will press on the first sensor 25, the first sensor 26, the first sensor 35, and the first sensor 36 simultaneously, thus failing to correctly detect the size of the container.

[0096] In this embodiment, by stacking and fixing the first platform 01 and the second platform 02, the limiting block group suitable for matching 4-inch and 6-inch flower baskets, as well as the first sensor 15, the first sensor 16, the first sensor 25 and the first sensor 26, are fixed on the first platform 01 and placed in the receiving groove of the second platform 02. Then, the limiting block group suitable for matching 8-inch wafers, as well as the first sensor 35 and the first sensor 36, are fixed on the second platform 02. This creates a height difference between the upper surfaces of the first sensor group composed of the first sensor 35 and the first sensor 36 and the first sensor group composed of the first sensor 25 and the first sensor 26. This ensures that when used to transport 8-inch wafers, the flower basket carried on the carrier module M will press on the first sensor 35 and the first sensor 36 only, thus accurately detecting the size of the container. Therefore, by adopting the above embodiments, not only can the space on the first stage and the second stage be fully utilized at the same time, but it can also ensure that a first sensor group only senses containers of the corresponding size, thereby further improving the accuracy of container size detection and reducing energy consumption.

[0097] It is understood that the embodiments in this specification do not specifically limit the specific implementation of different height differences between the upper surfaces of some of the first sensor groups. In specific implementations, the height difference can also be formed by directly increasing the height of the first sensor itself.

[0098] In specific implementation, we will continue to refer to Figure 2 By setting through holes M0 on each platform, a fixed connection between platforms can be achieved, which is not only easy to implement but also has a good fixing effect.

[0099] It is understood that the embodiments in this specification do not impose specific restrictions on the fixed connection method between the platforms, as long as a fixed connection between the two can be achieved.

[0100] In practice, in order to ensure that each limiting block group can securely limit the container of the corresponding size, the structure of each limiting block in the limiting block group can be determined based on the size of the container matched by the limiting block group and the position of each limiting block itself and the positional relationship between them.

[0101] In some embodiments of this specification, reference continues to be made to... Figure 2 The plurality of limiting block groups may include a first limiting block group, which may include: a first limiting block 11, a second limiting block 12, a third limiting block 13, and a fourth limiting block 14, wherein:

[0102] Both the first limiting block 11 and the second limiting block 12 have right-angle openings and are symmetrically arranged;

[0103] Both the third limiting block 13 and the fourth limiting block 14 have protrusions and are arranged symmetrically.

[0104] To enable those skilled in the art to better understand and implement this method, the following detailed description is provided through specific examples and application scenarios.

[0105] As a specific example, refer to Figure 4 and Figure 5 The diagram shows a structural schematic of a combination of containers of a certain size supported by a carrier module, viewed from different angles. Container O1 is a basket suitable for accommodating a 4-inch wafer. First limiting block 11, second limiting block 12, third limiting block 13, and fourth limiting block 14 are adapted to limit the movement of container O1. First limiting block 11 restricts movement of container O1 along the positive X-axis, and second limiting block 12 restricts movement along the negative X-axis. Therefore, first limiting block 11 and second limiting block 12 can be symmetrically arranged, and right-angle openings are provided on them. Third limiting block 13 and fourth limiting block 14 restrict movement of container O1 along the positive Y-axis. Therefore, third limiting block 13 and fourth limiting block 14 can be symmetrically arranged, and both have protrusions.

[0106] In other embodiments of this specification, the plurality of limiting block groups may further include a second limiting block group, which may include: a fifth limiting block 21, a sixth limiting block 22, a seventh limiting block 23, and an eighth limiting block 24, wherein:

[0107] Both the fifth limiting block 21 and the sixth limiting block 22 have right-angle openings and are symmetrically arranged;

[0108] Both the seventh limiting block 23 and the eighth limiting block 24 are three-dimensional structures and are symmetrically arranged.

[0109] As a specific example, refer to Figure 6 and Figure 7 The diagram shows a structural schematic of a combination of a carrier module carrying a container of another size, viewed from different angles. Container O2 is a basket suitable for accommodating a 6-inch wafer. The fifth limiting block 21, the sixth limiting block 22, the seventh limiting block 23, and the eighth limiting block 24 are used to limit the movement of container O2. Specifically, the fifth limiting block 21 can be used to restrict the movement of container O2 along the positive half-axis of the X-axis, and the sixth limiting block 22 can be used to restrict the movement of container O2 along the negative half-axis of the X-axis. Therefore, the fifth limiting block 21 and the sixth limiting block 22 can be symmetrically arranged, and right-angle openings are provided on the fifth limiting block 21 and the sixth limiting block 22. The seventh limiting block 23 and the eighth limiting block 24 can be used to restrict the movement of container O2 along the positive half-axis of the Y-axis. Therefore, the seventh limiting block 23 and the eighth limiting block 24 can be symmetrically arranged, and both are cubic structures.

[0110] In other embodiments of this specification, the plurality of limiting block groups may further include a third limiting block group, which has the same structure as the second limiting block group but is distributed at a different position on the platform.

[0111] In practice, the orientation of some of the limiting blocks in the third limiting block group is different from the orientation of the corresponding limiting blocks in the second limiting block group.

[0112] As a specific example, refer to Figure 8 and Figure 9 The diagram shows a structural schematic of a combination of containers of another size supported by a carrier module, viewed from different angles. Container O3 is a basket suitable for accommodating an 8-inch wafer. The third limiting block group includes: a ninth limiting block 31, a tenth limiting block 32, an eleventh limiting block 33, and a twelfth limiting block 34, suitable for limiting the movement of container O3. The ninth limiting block 31 can be used to restrict the movement of container O3 along the positive X-axis, and the tenth limiting block 32 can be used to restrict the movement of container O3 along the negative X-axis. Therefore, the ninth limiting block 31 and the tenth limiting block 32 can be symmetrically arranged, and right-angle openings are provided on the ninth limiting block 31 and the tenth limiting block 32. The eleventh limiting block 33 and the twelfth limiting block 34 can be used to restrict the movement of container O3 along the positive Y-axis. Therefore, the eleventh limiting block 33 and the twelfth limiting block 34 can be symmetrically arranged, and both are cubic structures.

[0113] It is understood that the embodiments in this specification do not impose specific restrictions on the position or shape of the limiting block, as long as it can limit the container.

[0114] In specific implementation, we will continue to refer to Figure 2In order to further improve the utilization rate of the space on the platform, the first limiting block group, the second limiting block group and the third limiting block group can be symmetrically distributed along the same center line.

[0115] In specific implementation, we will continue to refer to Figure 2 By setting through holes M1 on each limiting block, each limiting block can be fixed to the platform, which is not only easy to implement, but also has a good fixing effect.

[0116] It is understood that the embodiments in this specification do not impose specific restrictions on the fixing method of each limiting block and the platform, as long as the fixing between the two can be achieved.

[0117] In a specific implementation, the carrier module may also include a second sensor and a second sensor bracket suitable for fixing the second sensor. The second sensor can detect the placement position of the material, thereby ensuring that the material is completely placed in the space suitable for containing the material in the container, thus avoiding damage to the material.

[0118] As a specific example, continuing with 2, the carrier module M also includes:

[0119] The second sensor 51 is suitable for detecting the placement position of the contained material;

[0120] The second sensor bracket 52 is adapted to fix the second sensor 51.

[0121] In some embodiments of this specification, the second sensor 51 may be a light sensor. Specifically, the light sensor detects the placement position of the contained material by emitting signal light. When the material exceeds the space in the container suitable for containing the material, the light is reflected. The end face of the emitting signal light is also provided with a signal receiving function. When the reflected light is received, it is determined that the material exceeds the space in the container suitable for containing the material, thereby allowing the placement position of the material to be adjusted to avoid damage to the material. Since the light sensor can detect the placement position of the material through light signals, the entire detection process does not require direct contact with the material. On the one hand, this avoids damage to the material caused by direct contact; on the other hand, it does not cause secondary interference to the placement position of the material.

[0122] It is understood that the above examples are merely illustrative. In practical applications, those skilled in the art can adaptively select, extend, and / or modify the above examples according to actual needs and application scenarios, thereby enabling the development of more implementation schemes. The embodiments in this specification do not limit these extended schemes.

[0123] It should be noted that the terms "first" and "second" in the embodiments of the present invention are used only for distinguishing descriptions and do not impose any restrictions on the model of the device.

[0124] While the embodiments of the present invention have been disclosed above, the present invention is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A carrier module suitable for coupling with a container, characterized in that, include: A platform and a plurality of limiting blocks adapted to be fixed on the platform, wherein: The limiting block group includes multiple limiting blocks distributed at different positions on the platform. The position of each limiting block group is adapted to match a container of a corresponding size, and the size of the container matches the size of the material to be contained. The plurality of limiting block groups are sequentially distributed in a ring shape along the center of the platform; The carrier module further includes: a plurality of first sensors adapted to detect the size of the container; the plurality of first sensors are divided into a plurality of first sensor groups, the position of each first sensor group being adapted to match the container of the corresponding size; at least some of the upper surfaces of the first sensor groups have different height differences; The platform includes: a plurality of platforms suitable for stacking and fixed connection, wherein the plurality of platforms have different sizes and / or shapes; The plurality of platforms includes: a first platform; The second platform is located above the first platform and is fixedly connected to the first platform. It is provided with a receiving groove, which is suitable for receiving the corresponding limiting block and the first sensor.

2. The carrier module according to claim 1, characterized in that, The surface of the fixed limiting block group of the platform does not intersect with the space in the container that matches each limiting block group and is suitable for accommodating the material.

3. The carrier module according to claim 1, characterized in that, Also includes: Multiple first sensor mounting plates are suitable for fixing the corresponding first sensors respectively; Multiple first sensor brackets are provided for fixing the corresponding first sensor mounting plates.

4. The carrier module according to claim 3, characterized in that, The first sensor includes a pressure sensor.

5. The carrier module according to claim 1, characterized in that, The structure of each limiting block in the limiting block group is determined based on the size of the container matched by the limiting block group and the position of each limiting block itself and their relative positions.

6. The carrier module according to claim 5, characterized in that, The plurality of limiting block groups includes a first limiting block group, which comprises: a first limiting block, a second limiting block, a third limiting block, and a fourth limiting block, wherein: Both the first limiting block and the second limiting block have right-angle openings and are symmetrically arranged; Both the third limiting block and the fourth limiting block have protrusions and are arranged symmetrically.

7. The carrier module according to claim 6, characterized in that, The plurality of limiting block groups further includes a second limiting block group, which comprises: a fifth limiting block, a sixth limiting block, a seventh limiting block, and an eighth limiting block, wherein: Both the fifth limiting block and the sixth limiting block have right-angle openings and are symmetrically arranged; Both the seventh limiting block and the eighth limiting block are three-dimensional structures and are symmetrically arranged.

8. The carrier module according to claim 7, characterized in that, The plurality of limiting block groups also includes a third limiting block group, which has the same structure as the second limiting block group but is distributed in a different position on the platform.

9. The carrier module according to claim 8, characterized in that, The orientation of some of the limiting blocks in the third limiting block group is different from the orientation of the corresponding limiting blocks in the second limiting block group.

10. The carrier module according to claim 9, characterized in that, The first limiting block group, the second limiting block group, and the third limiting block group are symmetrically distributed along the same center line.

11. The carrier module according to any one of claims 1-10, characterized in that, Each limit block is provided with a through hole.

12. The carrier module according to claim 11, characterized in that, Also includes: The second sensor is suitable for detecting the placement position of the contained material; A second sensor bracket is adapted to fix the second sensor.

13. The carrier module according to claim 12, characterized in that, The second sensor includes a light sensor.

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