A heat treatment method for a carbon fiber tube for a semiconductor

Abstract

The present application relates to a kind of heat treatment methods of carbon fiber tube for semiconductor, the heat treatment method includes the following steps: (1) the carbon fiber tube to be treated is carried out first heat treatment, obtains first carbon fiber tube;(2) the first carbon fiber tube obtained in step (1) is carried out second heat treatment, obtains second carbon fiber tube.The heat treatment method provided by the present application can reduce the vibration recovery time of carbon fiber tube, reduce the deformation amount, improve the stability and mechanical properties of carbon fiber tube.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of carbon fiber pipes, in particular to a heat treatment method of a carbon fiber pipe for semiconductors. BACKGROUND

[0002] The carbon fiber pipe is the main material for supporting the semiconductor panel factory, which is equivalent to the most widely used automatic mechanical device in the field of robot technology. They have the common feature of accurately positioning to a certain point in three-dimensional (or two-dimensional) space for work by accepting instructions. The carbon fiber mechanical arm generally has three movements of stretching, rotating and lifting, among which the rotating and lifting movements are completed by the cross arm and the column. The basic function of the arm is to move the paw to the required position and bear the maximum weight of the grabbed workpiece and the weight of the arm itself. Therefore, the structure, working range, carrying capacity and action accuracy of the carbon fiber arm will directly affect the working performance of the whole machine.

[0003] The purpose of heat treatment of the cured carbon fiber pipe is to improve the organizational performance of the carbon fiber pipe. The carbon fiber pipe formed by heat pressing cannot achieve the target gram weight and vibration recovery time, and the product performance is unstable.

[0004] CN109454893A discloses a new carbon fiber pipe processing technology, which comprises a solution preparation process, a solution immersion process, a winding forming process and a curing process. In the curing process, the curing furnace is first cooled to room temperature after being heated at 150 DEG C for one hour, and then the curing furnace is formed into a vacuum state by a vacuum pump for secondary curing for one hour, so that the solvent is completely removed, and the strength after forming is avoided.

[0005] CN105128359A discloses a processing technology of a carbon fiber heating pipe, which comprises the following steps: braiding carbon fibers into long carbon fiber yarns; braiding the obtained carbon fiber yarns into carbon fiber strips by using a braiding machine; winding the obtained carbon fiber strips on a quartz tube in a staggered manner; performing forming treatment on the carbon fiber strips wound on the quartz tube; and performing curing treatment on the carbon fiber strips after the forming treatment.

[0006] Although the above method can obtain a carbon fiber pipe through curing treatment, the mechanical properties of the obtained carbon fiber pipe are difficult to meet the performance requirements of the semiconductor carrying support arm. Therefore, it is of great significance to provide a heat treatment method of a carbon fiber pipe for semiconductors. SUMMARY

[0007] In view of the above problems, the purpose of the present application is to provide a heat treatment method of a carbon fiber pipe for semiconductors. Compared with the prior art, the heat treatment method provided by the present application can reduce the vibration recovery time of the carbon fiber pipe, reduce the deformation amount, and improve the stability and mechanical properties of the carbon fiber pipe.

[0008] To achieve this objective, the present invention adopts the following technical solution:

[0009] This invention provides a heat treatment method for carbon fiber tubes used in semiconductors, the heat treatment method comprising the following steps:

[0010] (1) The carbon fiber tube to be processed is subjected to a first heat treatment to obtain a first carbon fiber tube;

[0011] (2) The first carbon fiber tube obtained in step (1) is subjected to a second heat treatment to obtain a second carbon fiber tube.

[0012] The heat treatment method provided by the present invention improves the microstructure of carbon fiber tubes through a first heat treatment and a second heat treatment, thereby increasing the stability of carbon fiber tubes, reducing vibration recovery time, and decreasing deformation.

[0013] Preferably, the first vibration recovery time is detected before the first heat treatment in step (1).

[0014] Preferably, the method for detecting the first vibration recovery time in step (1) includes: fixing one end of the carbon fiber tube to be treated and suspending a weight at the other end; then removing the weight to start detection until the carbon fiber tube to be treated stops vibrating, thereby obtaining the vibration recovery time of the carbon fiber tube to be treated.

[0015] Preferably, the mass of the weight used for the first vibration recovery time detection is 1.8-2.2 kg, for example, it can be 1.8 kg, 1.85 kg, 1.9 kg, 1.95 kg, 2 kg, 2.05 kg, 2.1 kg, 2.15 kg or 2.2 kg, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0016] Preferably, the vibration recovery time of the carbon fiber tube to be treated is 20-30s, for example, it can be 20s, 22s, 24s, 26s, 28s or 30s, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0017] Preferably, the temperature of the first heat treatment in step (1) is 40-50°C, for example, it can be 40°C, 42°C, 44°C, 46°C, 48°C or 50°C, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0018] The present invention preferably controls the temperature of the first heat treatment within a specific range, which can further improve the mechanical properties of the carbon fiber tube, enhance its stability, and prevent deformation.

[0019] Preferably, the time for the first heat treatment in step (1) is 20-30 min, for example, it can be 20 min, 22 min, 24 min, 26 min, 28 min or 30 min, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0020] The present invention preferably controls the time of the first heat treatment within a specific range, which can further improve the mechanical properties of the carbon fiber tube, enhance its stability, and prevent deformation.

[0021] Preferably, the temperature of the second heat treatment in step (2) is 70-90°C, for example, it can be 70°C, 72°C, 75°C, 78°C, 80°C, 82°C, 85°C, 88°C or 90°C, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0022] The present invention preferably controls the temperature of the second heat treatment within a specific range, which can further improve the mechanical properties of the carbon fiber tube, enhance its stability, and prevent deformation.

[0023] Preferably, the time for the second heat treatment in step (2) is 20-30 min, for example, it can be 20 min, 22 min, 24 min, 26 min, 28 min or 30 min, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0024] The present invention preferably controls the time of the second heat treatment within a specific range, which can further improve the mechanical properties of the carbon fiber tube, enhance its stability, and prevent deformation.

[0025] Preferably, in step (2), the second carbon fiber tube undergoes a second vibration recovery time detection.

[0026] Preferably, the method for detecting the second vibration recovery time in step (2) includes: fixing one end of the second carbon fiber tube and suspending a weight at the other end; then removing the weight to start the detection until the second carbon fiber tube stops vibrating, thereby obtaining the vibration recovery time of the second carbon fiber tube.

[0027] Preferably, the mass of the weight used for the second vibration recovery time detection is 1.8-2.2 kg, for example, it can be 1.8 kg, 1.85 kg, 1.9 kg, 1.95 kg, 2 kg, 2.05 kg, 2.1 kg, 2.15 kg or 2.2 kg, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0028] Preferably, the vibration recovery time of the second carbon fiber tube is 5-10s, for example, it can be 5s, 6s, 7s, 8s, 9s or 10s, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0029] As a preferred embodiment of the present invention, the heat treatment method includes the following steps:

[0030] (1) The carbon fiber tube to be treated is subjected to a first vibration recovery time detection. The method for detecting the first vibration recovery time includes: fixing one end of the carbon fiber tube to be treated and suspending a weight at the other end; then removing the weight and starting the detection until the carbon fiber tube to be treated stops vibrating, thereby obtaining the vibration recovery time of the carbon fiber tube to be treated.

[0031] Then, the carbon fiber tube to be treated is subjected to a first heat treatment at 40-50℃ for 20-30 minutes to obtain the first carbon fiber tube;

[0032] (2) The first carbon fiber tube obtained in step (1) is subjected to a second heat treatment at 70-90℃ for 20-30 minutes to obtain a second carbon fiber tube;

[0033] The second vibration recovery time detection method includes: fixing one end of the second carbon fiber tube and suspending a weight at the other end; then removing the weight to start the detection until the second carbon fiber tube stops vibrating, thereby obtaining the vibration recovery time of the second carbon fiber tube.

[0034] Compared with the prior art, the present invention has the following beneficial effects:

[0035] The heat treatment method provided by this invention can improve the microstructure of carbon fiber tubes, enhance their stability, reduce vibration recovery time, and decrease deformation. It can reduce the vibration recovery time of carbon fiber tubes to less than 19s, and under optimal conditions to less than 10s. It can also reduce the deformation of carbon fiber tubes to less than 12mm, and under optimal conditions to less than 7mm. Detailed Implementation

[0036] The technical solution of the present invention will be further illustrated below through specific embodiments. Those skilled in the art should understand that the embodiments described are merely illustrative of the present invention and should not be construed as limiting the invention in any way.

[0037] Example 1

[0038] This embodiment provides a heat treatment method for carbon fiber tubes used in semiconductors, the heat treatment method including the following steps:

[0039] (1) The carbon fiber tube to be treated is subjected to a first vibration recovery time test. The method for the first vibration recovery time test includes: fixing one end of the carbon fiber tube to be treated and suspending a 2kg weight at the other end; then removing the weight and starting the test until the carbon fiber tube to be treated stops vibrating, thereby obtaining the vibration recovery time of the carbon fiber tube to be treated; the vibration recovery time of the carbon fiber tube to be treated is 30s.

[0040] Then the carbon fiber tube to be treated is subjected to a first heat treatment at 45°C for 25 minutes to obtain the first carbon fiber tube;

[0041] (2) The first carbon fiber tube obtained in step (1) is subjected to a second heat treatment at 80°C for 25 minutes to obtain a second carbon fiber tube;

[0042] The second vibration recovery time detection method includes: fixing one end of the second carbon fiber tube and suspending a 2kg weight at the other end; then removing the weight to start the detection until the second carbon fiber tube stops vibrating, thereby obtaining the vibration recovery time of the second carbon fiber tube.

[0043] Example 2

[0044] This embodiment provides a heat treatment method for carbon fiber tubes used in semiconductors, the heat treatment method including the following steps:

[0045] (1) The carbon fiber tube to be treated is subjected to a first vibration recovery time test. The method for the first vibration recovery time test includes: fixing one end of the carbon fiber tube to be treated and suspending a 2kg weight at the other end; then removing the weight and starting the test until the carbon fiber tube to be treated stops vibrating, thereby obtaining the vibration recovery time of the carbon fiber tube to be treated; the vibration recovery time of the carbon fiber tube to be treated is 30s.

[0046] Then the carbon fiber tube to be treated is subjected to a first heat treatment at 50°C for 20 minutes to obtain the first carbon fiber tube;

[0047] (2) The first carbon fiber tube obtained in step (1) is subjected to a second heat treatment at 70°C for 20 minutes to obtain a second carbon fiber tube;

[0048] The second vibration recovery time detection method includes: fixing one end of the second carbon fiber tube and suspending a 2kg weight at the other end; then removing the weight to start the detection until the second carbon fiber tube stops vibrating, thereby obtaining the vibration recovery time of the second carbon fiber tube.

[0049] Example 3

[0050] This embodiment provides a heat treatment method for carbon fiber tubes used in semiconductors, the heat treatment method including the following steps:

[0051] (1) The carbon fiber tube to be treated is subjected to a first vibration recovery time test. The method for the first vibration recovery time test includes: fixing one end of the carbon fiber tube to be treated and suspending a 2kg weight at the other end; then removing the weight and starting the test until the carbon fiber tube to be treated stops vibrating, thereby obtaining the vibration recovery time of the carbon fiber tube to be treated; the vibration recovery time of the carbon fiber tube to be treated is 30s.

[0052] Then the carbon fiber tube to be treated is subjected to a first heat treatment at 40°C for 30 minutes to obtain the first carbon fiber tube;

[0053] (2) The first carbon fiber tube obtained in step (1) is subjected to a second heat treatment at 90°C for 30 minutes to obtain a second carbon fiber tube;

[0054] The second vibration recovery time detection method includes: fixing one end of the second carbon fiber tube and suspending a 2kg weight at the other end; then removing the weight to start the detection until the second carbon fiber tube stops vibrating, thereby obtaining the vibration recovery time of the second carbon fiber tube.

[0055] Example 4

[0056] This embodiment provides a heat treatment method for carbon fiber tubes for semiconductors. The only difference from Embodiment 1 is that the temperature of the first heat treatment is 35°C.

[0057] Example 5

[0058] This embodiment provides a heat treatment method for carbon fiber tubes for semiconductors. The only difference from Embodiment 1 is that the first heat treatment time is 10 minutes.

[0059] Example 6

[0060] This embodiment provides a heat treatment method for carbon fiber tubes for semiconductors. The only difference from Embodiment 1 is that the temperature of the second heat treatment is 60°C.

[0061] Example 7

[0062] This embodiment provides a heat treatment method for carbon fiber tubes for semiconductors. The only difference from Embodiment 1 is that the second heat treatment time is 10 minutes.

[0063] The vibration recovery time and deformation of the second carbon fiber tube in Examples 1-7 were obtained using an infrared rangefinder and high-definition imaging, as shown in Table 1.

[0064] Table 1

[0065]

[0066]

[0067] The following points can be observed from Table 1:

[0068] (1) As can be seen from the data of Examples 1-7, the heat treatment method provided by the present invention can make the vibration recovery time of the carbon fiber tube less than 19s, and less than 10s under better conditions, and can make the deformation of the carbon fiber tube less than 12mm, and less than 7mm under better conditions.

[0069] (2) By comparing the data of Example 1 and Examples 4-5, it can be seen that the temperature of the first heat treatment in Example 1 is 45°C and the time is 25 min. Compared with the temperature of the first heat treatment in Example 4 is 35°C and the time of the first heat treatment in Example 5 is 10 min, the vibration recovery time and deformation in Example 1 in Table 1 are significantly lower than those in Examples 4-5. It can be seen that the present invention preferably controls the temperature and time of the first heat treatment, which can further improve the mechanical properties and stability of carbon fiber tubes.

[0070] (3) A comprehensive comparison of the data from Examples 1 and 6-7 shows that the temperature of the second heat treatment in Example 1 is 80°C and the time is 25 min. Compared with the temperature of the second heat treatment in Example 6 is 60°C and the time of the second heat treatment in Example 7 is 10 min, the vibration recovery time and deformation in Example 1 in Table 1 are significantly lower than those in Examples 6-7. Therefore, it can be seen that the present invention preferably controls the temperature and time of the second heat treatment, which can further improve the mechanical properties and stability of the carbon fiber tube.

[0071] In summary, the heat treatment method provided by this invention can improve the microstructure of carbon fiber tubes, enhance their stability, reduce vibration recovery time, and decrease deformation.

[0072] The applicant declares that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention fall within the protection and disclosure scope of the present invention.

Claims

1. A heat treatment method for carbon fiber tubes for semiconductors, characterized in that, The heat treatment method includes the following steps: (1) The carbon fiber tube to be treated is subjected to a first heat treatment to obtain a first carbon fiber tube; the temperature of the first heat treatment in step (1) is 40-50℃, and the time of the first heat treatment in step (1) is 20-30min. (2) The first carbon fiber tube obtained in step (1) is subjected to a second heat treatment to obtain a second carbon fiber tube. The temperature of the second heat treatment in step (2) is 70-90℃ and the time of the second heat treatment in step (2) is 20-30min.

2. The heat treatment method according to claim 1, characterized in that, Step (1) Before the first heat treatment, the first vibration recovery time is detected.

3. The heat treatment method according to claim 2, characterized in that, Step (1) The method for detecting the first vibration recovery time includes: fixing one end of the carbon fiber tube to be treated and suspending a weight at the other end; then removing the weight and starting the detection until the carbon fiber tube to be treated stops vibrating, thereby obtaining the vibration recovery time of the carbon fiber tube to be treated.

4. The heat treatment method according to claim 3, characterized in that, The mass of the weight used for the first vibration recovery time test is 1.8-2.2 kg.

5. The heat treatment method according to claim 3, characterized in that, The vibration recovery time of the carbon fiber tube to be treated is 20-30 seconds.

6. The heat treatment method according to claim 1, characterized in that, Step (2) The second carbon fiber tube is subjected to a second vibration recovery time detection.

7. The heat treatment method according to claim 6, characterized in that, Step (2) The method for detecting the second vibration recovery time includes: fixing one end of the second carbon fiber tube and suspending a weight at the other end; then removing the weight to start the detection until the second carbon fiber tube stops vibrating, and obtaining the vibration recovery time of the second carbon fiber tube.

8. The heat treatment method according to claim 7, characterized in that, The mass of the weight used for the second vibration recovery time test is 1.8-2.2 kg.

9. The heat treatment method according to claim 7, characterized in that, The vibration recovery time of the second carbon fiber tube is 5-10 seconds.

10. The heat treatment method according to claim 1, characterized in that, The heat treatment method includes the following steps: (1) The carbon fiber tube to be treated is subjected to a first vibration recovery time detection. The method for detecting the first vibration recovery time includes: fixing one end of the carbon fiber tube to be treated and suspending a weight at the other end; then removing the weight and starting the detection until the carbon fiber tube to be treated stops vibrating, thereby obtaining the vibration recovery time of the carbon fiber tube to be treated. Then, the carbon fiber tube to be treated is subjected to a first heat treatment at 40-50℃ for 20-30 minutes to obtain the first carbon fiber tube; (2) The first carbon fiber tube obtained in step (1) is subjected to a second heat treatment at 70-90℃ for 20-30 minutes to obtain a second carbon fiber tube; The second vibration recovery time detection method includes: fixing one end of the second carbon fiber tube and suspending a weight at the other end; then removing the weight to start the detection until the second carbon fiber tube stops vibrating, thereby obtaining the vibration recovery time of the second carbon fiber tube.

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