Calibration method and system for direct current voltage measurement parameters of integrated circuit test system

Abstract

The application provides a DC voltage measurement parameter calibration method and system for an integrated circuit test system, comprising the following steps: connecting a calibration interface of a calibration device with a traceable interface of a traceable board; connecting a connection terminal of the traceable board with a DC signal source and a DC standard voltmeter through a connection cable in a parallel relationship; controlling the DC signal source to output a preset DC current signal, the DC current signal being related to the value of a voltage calibration point of the calibration device; obtaining a first measurement value of the calibration device on the traceable interface side when measuring a DC voltage signal, and obtaining a second measurement value of the DC standard voltmeter on the connection terminal side when measuring the DC voltage signal, so as to obtain the measurement error of the calibration device at the voltage calibration point; tracing the value of the calibration device based on the measurement error, and calibrating the DC voltage measurement parameter of the integrated circuit test system by using the calibration device after the tracing. The application can comprehensively and truly reflect the technical indexes of the DC voltage measurement parameter of the calibration device as a whole.

Description

Technical Field

[0001] This invention belongs to the field of microelectronic testing and measurement technology, and more specifically, relates to a method and system for calibrating DC voltage measurement parameters in an integrated circuit testing system. Background Technology

[0002] The DC voltage measurement parameters of an integrated circuit test system (hereinafter referred to as the test system) include parameters such as PMU voltage measurement. Currently, the calibration of DC voltage measurement parameters of the test system is mainly achieved by developing and establishing an integrated circuit test system calibration device (hereinafter referred to as the calibration device). The calibration device includes a calibration board and external instruments. During calibration, the calibration board is loaded onto the test system, and the external instruments are connected to the loading board. The external instruments are then controlled to measure various parameters of the test system, thereby completing the calibration. This method is quite effective in transmitting the values ​​from the calibration device down to the test system.

[0003] However, there is currently no dedicated method for tracing the values ​​of calibration devices upwards. Typically, the external instruments that make up the calibration device are sent separately to a metrology institute for instrument-level traceability. Other components of the calibration device, such as matrix switches, various cables, interfaces, and calibration software, all affect the calibration results. These components can influence the measurement uncertainty of DC voltage measurement parameters of the calibration device by more than 20%, indicating that they are non-negligible sources of uncertainty and constitute the main factors affecting uncertainty. Therefore, the true technical specifications of the calibration device cannot be directly obtained from the technical specifications of the external instruments. The overall technical specifications of the DC voltage measurement parameters of the calibration device are not currently fully and accurately reflected in the traceability process. Summary of the Invention

[0004] To address the shortcomings of existing technologies, the present invention aims to provide a calibration method and system for DC voltage measurement parameters in integrated circuit testing systems. This system addresses the problem that the overall technical indicators of DC voltage measurement parameters in existing calibration devices are not fully and accurately reflected in the traceability process, making it impossible to perform ideal and reliable calibration of DC voltage measurement parameters in integrated current testing systems.

[0005] To achieve the above objectives, in a first aspect, the present invention provides a method for calibrating DC voltage measurement parameters in an integrated circuit test system, comprising the following steps:

[0006] Connect the calibration interface of the calibration device to the traceability interface of the traceability board, wherein the positive terminal of the traceability interface is connected to the positive terminal of the calibration interface, and the negative terminal of the traceability interface is connected to the negative terminal of the calibration interface.

[0007] Connect the DC standard voltmeter and the DC signal source to the connection terminals of the traceability board; wherein, connect the positive and negative terminals of the DC standard voltmeter to the positive and negative terminals of the connection terminals respectively, and connect the positive and negative terminals of the DC signal source to the positive and negative terminals of the connection terminals respectively; the DC voltage measurement uncertainty of the DC standard voltmeter is less than or equal to one-third of the DC voltage measurement uncertainty of the calibration device;

[0008] The calibration device is controlled to enter the DC voltage measurement mode, and the DC signal source is controlled to output a preset DC current signal, which is related to the value of the voltage calibration point of the calibration device.

[0009] The system acquires a first measurement value obtained by measuring the DC voltage signal at the traceability interface side using the calibration device, and a second measurement value obtained by measuring the DC voltage signal at the connection terminal side using the DC standard voltage.

[0010] By comparing the first measured value with the second measured value, the measurement error of the calibration device at the voltage calibration point is obtained;

[0011] Based on the measurement error, the values ​​of DC voltage measurement parameters of the calibration device are traced back to their source, and then the DC voltage measurement parameters of the integrated circuit test system are calibrated based on the traced calibration device.

[0012] Optionally, the voltage measurement range of the DC standard voltmeter covers the voltage measurement range of the calibration device; the DC current output range of the DC signal source should meet the traceability requirements of the DC voltage measurement parameters of the calibration device.

[0013] In a second aspect, the present invention provides a DC voltage measurement parameter calibration system for an integrated circuit test system, comprising: a traceability board;

[0014] The traceability board includes: a connection terminal and a traceability interface, wherein the negative terminal of the connection terminal is connected to the negative terminal of the traceability interface, and the positive terminal of the connection terminal is connected to the positive terminal of the traceability interface.

[0015] The traceability interface of the traceability board is connected to the calibration interface of the calibration device, wherein the positive terminal of the traceability interface is connected to the positive terminal of the calibration interface, and the negative terminal of the traceability interface is connected to the negative terminal of the calibration interface.

[0016] The traceability board's connection terminals connect to a DC standard voltmeter and a DC signal source; wherein, the positive and negative terminals of the DC standard voltmeter are connected to the positive and negative terminals of the connection terminals, respectively, and the positive and negative terminals of the DC signal source are connected to the positive and negative terminals of the connection terminals, respectively; the DC voltage measurement uncertainty of the DC standard voltmeter is less than or equal to one-third of the DC voltage measurement uncertainty of the calibration device;

[0017] The traceability board is used to connect the calibration device, a DC standard voltmeter, and a DC signal source to trace the values ​​of DC voltage measurement parameters of the calibration device. This allows the traceable calibration device to be used to calibrate DC voltage measurement parameters of integrated circuit testing systems. The traceability process of the calibration device's values ​​is as follows: the calibration device is controlled to enter DC voltage measurement mode, and the DC signal source is controlled to output a preset DC current signal, which is related to the value of the voltage calibration point of the calibration device; then, a first measurement value obtained by the calibration device measuring the DC voltage signal at the traceability interface side is obtained, and a second measurement value obtained by the DC standard voltmeter measuring the DC voltage signal at the connection terminal side is obtained; the first measurement value and the second measurement value are compared to obtain the measurement error of the calibration device at the voltage calibration point; and the values ​​of the DC voltage measurement parameters of the calibration device are traced based on the measurement error.

[0018] Optionally, the traceability board is a PCB board; the positive and negative terminals of the connection terminal and the traceability interface are connected through PCB traces.

[0019] Optionally, the voltage measurement range of the DC standard voltmeter covers the voltage measurement range of the calibration device; the DC current output range of the DC signal source should meet the traceability requirements of the DC voltage measurement parameters of the calibration device.

[0020] In summary, the technical solutions conceived by this invention have the following beneficial effects compared with the prior art:

[0021] This invention provides a calibration method and system for DC voltage measurement parameters of an integrated circuit test system. (1) The calibration device is completely based on the normal calibration process of DC voltage measurement parameters of the calibration device for traceability of measurement values. The external instruments, cables and calibration software of the calibration device are configured in accordance with the normal calibration process. This can reflect the technical indicators of the calibration device under actual calibration working conditions and can perform ideal and reliable calibration of DC voltage measurement parameters of the integrated current test system. (2) The calibration device does not need to be adjusted in any software or hardware, which reduces the cost of adapting the calibration device. Attached Figure Description

[0022] Figure 1 A flowchart of a DC voltage measurement parameter calibration method for an integrated circuit test system provided in this embodiment of the invention;

[0023] Figure 2 This is a structural diagram of a DC voltage measurement parameter calibration system for an integrated circuit testing system provided in an embodiment of the present invention.

[0024] Figure 3 A flowchart of another DC voltage measurement parameter calibration method for an integrated circuit test system provided in an embodiment of the present invention. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present invention or its application or use. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of exemplary embodiments according to the invention. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0027] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of the invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific value should be interpreted as merely exemplary and not as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0028] In the description of this invention, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is generally based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this invention and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this invention. The directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0029] In the description of this invention, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0030] In the description of this invention, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0031] To address the current lack of a dedicated method for tracing the DC voltage measurement parameters of calibration devices, which currently only involves sending the external instruments constituting the calibration device to metrology institutions for instrument-level traceability, thus failing to fully and accurately reflect the overall technical specifications of the calibration device during the traceability process, this invention proposes a traceability method for DC voltage measurement parameters in integrated circuit testing system calibration devices. This invention is entirely based on the calibration process of the calibration device. The external instruments, cables, and calibration software of the calibration device are configured according to the normal calibration procedure. While ensuring the accuracy of the measurement results meets the traceability requirements, it can reflect the technical specifications of the DC voltage measurement parameters of the calibration device under actual calibration conditions, and no software or hardware adjustments are required on the calibration device side.

[0032] Figure 1 A flowchart of a DC voltage measurement parameter calibration method for an integrated circuit test system provided in this embodiment of the invention; as shown. Figure 1 As shown, it includes the following steps:

[0033] S101, connect the calibration interface of the calibration device to the traceability interface of the traceability board, wherein the positive terminal of the traceability interface is connected to the positive terminal of the calibration interface, and the negative terminal of the traceability interface is connected to the negative terminal of the calibration interface;

[0034] S102, connect the DC standard voltmeter and the DC signal source to the connection terminals of the traceability board; wherein, connect the positive and negative terminals of the DC standard voltmeter to the positive and negative terminals of the connection terminals respectively, and connect the positive and negative terminals of the DC signal source to the positive and negative terminals of the connection terminals respectively; the DC voltage measurement uncertainty of the DC standard voltmeter is less than or equal to one-third of the DC voltage measurement uncertainty of the calibration device;

[0035] The connection relationships of the calibration device, traceability board, DC standard voltmeter, and DC signal source are shown in [reference needed]. Figure 2 As shown.

[0036] S103, control the calibration device to enter the DC voltage measurement mode, and control the DC signal source to output a preset DC current signal, the DC current signal being related to the value of the voltage calibration point of the calibration device;

[0037] S104, acquire the first measurement value obtained by the calibration device measuring the DC voltage signal on the traceability interface side, and acquire the second measurement value obtained by the DC standard voltage measuring the DC voltage signal on the connection terminal side;

[0038] S105, compare the first measured value with the second measured value to obtain the measurement error of the calibration device at the voltage calibration point;

[0039] S106, based on the measurement error, trace the value of the DC voltage measurement parameters of the calibration device, and then calibrate the DC voltage measurement parameters of the integrated circuit test system based on the traced calibration device.

[0040] Optionally, the voltage measurement range of the DC standard voltmeter covers the voltage measurement range of the calibration device; the DC current output range of the DC signal source should meet the traceability requirements of the DC voltage measurement parameters of the calibration device.

[0041] In one specific embodiment, refer to Figure 2 The specific implementation of this invention is illustrated using the PMU voltage measurement of an integrated circuit test system calibration device with 50 calibration interface channels as an example. The flowchart is shown below. Figure 3 :

[0042] (1) In this embodiment, the DC signal source selected is Fluke's DC signal source 5520A. It is used as a DC current source when tracing the PMU voltage measurement of the calibration device. The function of 5520A is set to DC current. The two DC current output interfaces of 5520A are connected to the connection terminals of the traceability board through the connecting cable.

[0043] (2) In this embodiment, the DC standard voltmeter selected is the Keysight Digital Multimeter 3458A. It is used as a DC standard voltmeter when tracing the PMU voltage measurement of the calibration device. The function of the 3458A is set to DC voltage. The two DC voltage measurement interfaces of the 3458A are connected to the connection terminals of the traceability board through the connection cable and form a parallel relationship with the 5520A.

[0044] (3) Connect the traceability interface of the traceability board to the calibration interface of the calibration device. Through the above connection method, the DC signal source, digital multimeter, traceability board, and calibration device can be connected. The DC current signal output by the DC signal source can be output to the calibration interface of the calibration device through the traceability board.

[0045] (4) The front of the PCB board of the traceability board is equipped with connection terminals, which are banana plug sockets, used to connect in parallel with the DC current output interface of 5520A and the DC voltage measurement interface of 3458A through the banana plug connection wire. The front of the PCB board is also equipped with a traceability interface, which is an IDC50 socket, used to connect with the IDC50 plug of the calibration device. The connection terminals on the PCB board and the traceability interface are connected one-to-one through the PCB trace according to the positive and negative poles.

[0046] (5) Control the calibration device to enter the PMU voltage measurement mode, and then control the 5520A to output a DC current parameter value according to the traceability requirements of the PMU voltage measurement. At this time, control the calibration device to measure the DC voltage at the traceability interface and record the value as the PMU voltage measurement indication. Then, keep the calibration device in the DC voltage measurement state and control the 3458A to measure the DC voltage value at the connection terminal as the PMU voltage measurement standard value. Compare the standard value with the indication value to obtain the error of the PMU voltage measurement of the calibration device.

[0047] It is understood that the aforementioned "indicated value" should be interpreted as the first measured value, and the "standard value" should be interpreted as the second measured value. This invention will not further elaborate on this point.

[0048] (6) Finally, the PMU voltage measurement of the calibration device can be corrected according to the above error value to ensure the reliability of the calibration device's measurement value.

[0049] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for calibrating DC voltage measurement parameters in an integrated circuit testing system, characterized in that, Includes the following steps: Connect the calibration interface of the calibration device to the traceability interface of the traceability board, wherein the positive terminal of the traceability interface is connected to the positive terminal of the calibration interface, and the negative terminal of the traceability interface is connected to the negative terminal of the calibration interface. Connect the DC standard voltmeter and the DC signal source to the connection terminals of the traceability board; wherein, connect the positive and negative terminals of the DC standard voltmeter to the positive and negative terminals of the connection terminals respectively, and connect the positive and negative terminals of the DC signal source to the positive and negative terminals of the connection terminals respectively; the DC voltage measurement uncertainty of the DC standard voltmeter is less than or equal to one-third of the DC voltage measurement uncertainty of the calibration device; The calibration device is controlled to enter the DC voltage measurement mode, and the DC signal source is controlled to output a preset DC current signal, which is related to the value of the voltage calibration point of the calibration device. The system acquires a first measurement value obtained by measuring the DC voltage signal at the traceability interface side using the calibration device, and a second measurement value obtained by measuring the DC voltage signal at the connection terminal side using the DC standard voltage. By comparing the first measured value with the second measured value, the measurement error of the calibration device at the voltage calibration point is obtained; Based on the measurement error, the values ​​of DC voltage measurement parameters of the calibration device are traced back to their source, and then the DC voltage measurement parameters of the integrated circuit test system are calibrated based on the traced calibration device.

2. The method according to claim 1, characterized in that, The voltage measurement range of the DC standard voltmeter covers the voltage measurement range of the calibration device; the DC current output range of the DC signal source should meet the traceability requirements of the DC voltage measurement parameters of the calibration device.

3. A DC voltage measurement parameter calibration system for an integrated circuit testing system, characterized in that, include: Traceability board; The traceability board includes: a connection terminal and a traceability interface, wherein the negative terminal of the connection terminal is connected to the negative terminal of the traceability interface, and the positive terminal of the connection terminal is connected to the positive terminal of the traceability interface. The traceability interface of the traceability board is connected to the calibration interface of the calibration device, wherein the positive terminal of the traceability interface is connected to the positive terminal of the calibration interface, and the negative terminal of the traceability interface is connected to the negative terminal of the calibration interface. The traceability board's connection terminals connect to a DC standard voltmeter and a DC signal source; wherein, the positive and negative terminals of the DC standard voltmeter are connected to the positive and negative terminals of the connection terminals, respectively, and the positive and negative terminals of the DC signal source are connected to the positive and negative terminals of the connection terminals, respectively; the DC voltage measurement uncertainty of the DC standard voltmeter is less than or equal to one-third of the DC voltage measurement uncertainty of the calibration device; The traceability board is used to connect the calibration device, a DC standard voltmeter, and a DC signal source to trace the values ​​of DC voltage measurement parameters of the calibration device. This allows the traceable calibration device to be used to calibrate DC voltage measurement parameters of integrated circuit testing systems. The traceability process of the calibration device's values ​​is as follows: the calibration device is controlled to enter DC voltage measurement mode, and the DC signal source is controlled to output a preset DC current signal, which is related to the value of the voltage calibration point of the calibration device; then, a first measurement value obtained by the calibration device measuring the DC voltage signal at the traceability interface side is obtained, and a second measurement value obtained by the DC standard voltmeter measuring the DC voltage signal at the connection terminal side is obtained; the first measurement value and the second measurement value are compared to obtain the measurement error of the calibration device at the voltage calibration point; and the values ​​of the DC voltage measurement parameters of the calibration device are traced based on the measurement error.

4. The system according to claim 3, characterized in that, The traceability board is a PCB board; the positive and negative terminals of the connection terminals and the traceability interface are connected through PCB traces.

5. The system according to claim 3, characterized in that, The voltage measurement range of the DC standard voltmeter covers the voltage measurement range of the calibration device; the DC current output range of the DC signal source should meet the traceability requirements of the DC voltage measurement parameters of the calibration device.

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