Patch-type mode-switching microsphere multi-mode control device and method based on standing waves

Abstract

The present invention discloses a patch-type mode-switching microsphere multi-mode control device and method based on standing waves, the device includes a base, a vibrating body, a first fixing seat, a second fixing seat, a first fixing nut, a second fixing nut, a PDMS module, a sorting copper sheet and a piezoelectric drive module; the piezoelectric drive module includes five migrating piezoelectric ceramic sheets and a sorting piezoelectric ceramic sheet. The present invention enables the microspheres to migrate over long distances by stimulating the five migrating piezoelectric ceramic sheets to achieve mode switching, and in the process, the morphology of the microspheres is detected by a microscope, and the microspheres are sorted by the sorting piezoelectric ceramic sheets according to the detection results. The device of the present invention is simple and inexpensive, and can control the microspheres in a non-destructive and non-contact manner, avoiding secondary damage to the microspheres when positioning, moving and classifying them in a hard contact manner.

Description

Technical Field

[0001] The present invention relates to the field of micro-manipulation and rapid screening of microparticles, and in particular to a patch-type mode-switching microsphere multi-mode manipulation device and method based on standing waves. Background Art

[0002] Laser confinement fusion (ICF) uses high-power, high-energy-density lasers as the driving source, and uses spherical implosion pressurization technology to make the nuclear fuel in the spherical target reach the ignition condition, thereby forming a self-sustaining thermonuclear reaction. ICF is expected to provide clean and pollution-free energy for mankind. ICF experiments have strict requirements on the quality of hollow microspheres (target pellets) as nuclear fuel containers in terms of geometric parameters, surface defects, etc. The quality of the target pellets directly affects the success or failure of ICF target shooting experiments. The target pellets have the characteristics of small size (diameter 100~1000μm), fragile structure, and strong viscosity, which brings considerable challenges to the detection of the target pellets. At present, the detection equipment used to measure the geometric parameters of microspheres includes X-ray ray machines, white light interferometers, atomic force microscopes, etc. The measurement accuracy of these instruments is very high (can reach the micrometer level or even the nanometer level). Since the target pellet is spherical, it is necessary to move and flip the target pellet multiple times to achieve a complete characterization of the target pellet morphology. However, these detection devices all control the movement of the target pellet through a multi-degree-of-freedom mobile platform. This hard contact method is very likely to cause secondary damage to the surface of the target pellet when adjusting its posture, resulting in low detection efficiency and qualified rate of the target pellet. The micro-manipulation technology using sound waves as the driving source has the advantages of high biocompatibility and stable micro-scale manipulation, which means that micro-manipulation technology can be applied to the non-destructive detection and screening of microspheres to achieve complete morphological characterization of the target pellet through multiple positioning, and through the coordination and switching of different vibration modes, targets of different masses can be gathered in different areas, thereby meeting the needs of non-destructive and high-precision manipulation of the target pellet detection process. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide a patch-type mode-switching microsphere multi-mode control device and method based on standing waves in view of the defects involved in the background technology.

[0004] The present invention adopts the following technical solutions to solve the above technical problems:

[0005] A patch-type mode-switching microsphere multi-mode control device based on standing waves, comprising a base, a vibrating body, a first fixing seat, a second fixing seat, a first fixing nut, a second fixing nut, a PDMS module, a sorting copper sheet and a piezoelectric driving module;

[0006] The first fixing seat and the second fixing seat are both arranged on the base, have the same structure, and both include a base and a stud, wherein the base is a column, and the lower end surface is fixedly connected to the base; the lower end of the stud is vertically fixedly connected to the upper end surface of the base;

[0007] The vibrating body is a rectangular parallelepiped, and a first ear piece and a second ear piece are respectively provided at two ends of the vibrating body; a first through hole and a second through hole are respectively provided at the center of the first ear piece and the second ear piece to match the studs of the first fixing seat and the second fixing seat; the vibrating body is symmetrical about the line connecting the centers of the first through hole and the second through hole;

[0008] The studs of the first fixing seat and the second fixing seat respectively pass through the first through hole and the second through hole and are connected with the first fixing nut and the second fixing nut correspondingly through threads, so as to fix the vibrating body on the base of the first fixing seat and the second fixing seat;

[0009] The base is fixed on the air floating platform so that the vibrating body is horizontal;

[0010] The upper end surface of the vibrating body is provided with a mounting groove for placing the PDMS module; the mounting groove comprises two rectangular stepped grooves of different depths, the two stepped grooves have the same width and are connected in the length direction, the depth of the stepped groove located upstream is greater than the depth of the stepped groove located downstream, and the mounting groove is symmetrical about the line connecting the centers of the first through hole and the second through hole;

[0011] The PDMS module has the same shape as the mounting groove, is made of PDMS material, and is fixed in the mounting groove by PDMS glue;

[0012] The upper surface of the PDMS is provided with a migration channel and a second outlet channel on a line connecting the centers of the first through hole and the second through hole, and a sorting channel is provided between the migration channel and the second outlet channel; the migration channel is located upstream of the second outlet channel; the sorting channel is perpendicular to the migration channel, one side is connected to the migration channel, and the other side is connected to the second outlet channel; the upper surface of the PDMS is also symmetrically provided with a first outlet channel and a third outlet channel on both sides of the second outlet channel, and the first outlet channel and the third outlet channel are respectively connected to the two ends of the sorting channel;

[0013] The lower surface of the vibrator is provided with first to fifth piezoelectric grooves in sequence from upstream to downstream along the length direction thereof; the first to fifth piezoelectric grooves are all perpendicular to the migration channel and are symmetrical about the straight line where the migration channel is located;

[0014] The piezoelectric driving module comprises first to fifth migrating piezoelectric ceramic sheets and a sorting piezoelectric ceramic sheet;

[0015] The first to fifth migratory piezoelectric ceramic sheets have the same structure, are arranged in the first to fifth piezoelectric grooves in a one-to-one correspondence, and are all polarized along the thickness direction. The first, second, and fifth migratory piezoelectric ceramic sheets have the same polarization direction, the third and fourth migratory piezoelectric ceramic sheets have the same polarization direction, and the first and third migratory piezoelectric ceramic sheets have opposite polarization directions;

[0016] The third migration piezoelectric ceramic piece is used to excite the first-order out-of-plane bending vibration mode of the vibration body in the length direction of the vibration body, or cooperates with the first and fifth migration piezoelectric ceramic pieces to excite the third-order out-of-plane bending vibration mode of the vibration body in the length direction of the vibration body; the second and fourth migration piezoelectric ceramic pieces are used to cooperate to excite the second-order out-of-plane bending vibration mode of the vibration body in the length direction of the vibration body; the third migration piezoelectric ceramic piece is simultaneously located at the antinode of the first-order out-of-plane bending vibration mode of the vibration body and the antinode of the third-order out-of-plane bending vibration mode of the vibration body; the second and fourth migration piezoelectric ceramic pieces are both located at the antinode of the second-order out-of-plane bending vibration mode of the vibration body; the first and fifth piezoelectric ceramic pieces are both located at the antinode of the third-order out-of-plane bending vibration mode of the vibration body;

[0017] The vibrator is provided with a rectangular through groove with the same width as the mounting groove below the sorting flow channel; the sorting copper sheet is pasted on the lower end surface of the PDMS module in the rectangular through groove;

[0018] The sorting piezoelectric ceramic sheet is pasted on the lower end surface of the sorting copper sheet, symmetrically about the line connecting the centers of the first through hole and the second through hole; the sorting piezoelectric ceramic sheet is polarized along its thickness direction to excite the first-order out-of-plane bending vibration mode of the sorting copper sheet in the width direction of the vibrating body.

[0019] As a further optimization solution of the patch-type mode-switching microsphere multi-mode control device based on standing waves of the present invention, the base is a rectangular plate, and through holes for fixing to the air floating platform are provided on the four corners of the base.

[0020] As a further optimization scheme of the patch-type mode-switching microsphere multi-mode control device based on standing waves of the present invention, the first to fifth piezoelectric grooves have the same structure, and the depths are all less than the thickness of the first migration piezoelectric ceramic sheet.

[0021] The present invention also discloses a control method of the patch-type mode-switching microsphere multi-mode control device based on standing waves, comprising the following steps:

[0022] Step 1), injecting a carrier fluid into the upstream of the migration channel and releasing the microspheres;

[0023] Step 2), applying a preset third simple harmonic voltage signal to the first, third and fifth migration pressure ceramic sheets to excite the third-order out-of-plane bending vibration mode of the vibrating body distorted in its length direction, and the microsphere moves along the straight migration channel with the fluid until it reaches the first node of the distorted third-order bending vibration, and is positioned at the node under the action of the acoustic radiation force and the drag force generated by the acoustic flow, and at this time, the first morphology detection of the microsphere is performed through a microscope;

[0024] Step 3), the first, third and fifth migration piezoelectric ceramic sheets are powered off, and a preset second simple harmonic voltage signal is applied to the second and fourth migration piezoelectric ceramic sheets to excite a second-order out-of-plane bending vibration mode in which the vibrating body is distorted in its length direction. The microsphere moves with the fluid in the straight migration flow channel to the first node of the distorted second-order bending vibration, and is positioned at the node under the action of the acoustic radiation force and the drag force generated by the acoustic flow. At this time, a second morphological detection of the microsphere is performed through a microscope;

[0025] Step 4), the second and fourth migration piezoelectric ceramic pieces are powered off, and a preset first simple harmonic voltage signal is applied to the third migration piezoelectric ceramic piece to excite a first-order out-of-plane bending vibration mode of the vibrating body in the length direction thereof. When the microsphere moves along with the fluid in the linear migration channel to the center of the sorting channel, the third migration piezoelectric ceramic piece is powered off to position the microsphere. At this time, the microsphere is subjected to a third morphology detection through a microscope;

[0026] Step 5), judging the surface quality of the microparticles based on the three test results, and sorting them according to their quality;

[0027] Step 5.1), if the microsphere is of inferior quality, a preset fourth simple harmonic voltage signal is applied to the sorting piezoelectric ceramic sheet to stimulate the first-order out-of-plane bending vibration mode of the sorting copper sheet in the width direction of the vibrating body, so that the microsphere moves to the entrance of the first outlet flow channel;

[0028] Step 5.2), if the microsphere is a medium-quality microsphere, a preset fifth simple harmonic voltage signal is applied to the sorting piezoelectric ceramic sheet to stimulate the first-order out-of-plane bending vibration mode of the sorting copper sheet in the width direction of the vibrating body, so that the microsphere moves to the entrance of the third outlet flow channel;

[0029] Step 5.3), if the microspheres are high-quality microspheres, the piezoelectric ceramic sheet is not driven for sorting, and the microspheres are located at the entrance of the second outlet flow channel;

[0030] Step 6) applying a preset first simple harmonic voltage signal to the third migrating piezoelectric ceramic piece, so that the microspheres continue to move to the corresponding outlet flow channel after sorting.

[0031] Compared with the prior art, the present invention adopts the above technical solution and has the following technical effects:

[0032] 1. The equipment is simple and cheap, which can reduce the cost of common screening systems;

[0033] 2. The piezoelectrically excited micromanipulator can realize non-destructive and contactless manipulation of microspheres. The manipulation methods include: positioning manipulation, migration manipulation, and sorting manipulation;

[0034] 3. While manipulating the microspheres to achieve different movements, a microscope is used to analyze the size, surface morphology and other parameters, thereby controlling the microspheres with different surface qualities to gather in different areas, so as to achieve efficient and high-precision screening of microspheres. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a schematic diagram of the structure of the present invention;

[0036] Figure 2 It is a schematic diagram of the structure of the base, the first fixing seat and the second fixing seat in the present invention;

[0037] Figure 3 is a top view of the PDMS module of the present invention;

[0038] Figure 4 It is a structural schematic diagram of the vibrating body in the present invention;

[0039] Figure 5 is a bottom view of the vibrating body of the present invention;

[0040] Figure 6 It is a schematic diagram of the polarization direction of the first to fifth migratory piezoelectric ceramic sheets in the present invention;

[0041] Figure 7 It is a schematic diagram of the vibration mode and electrical signal application method of the first-order out-of-plane bending vibration of the distorted asymmetric vibration body with variable groove depth excited by the third migration piezoelectric ceramic piece in the present invention;

[0042] Figure 8 It is a schematic diagram of the vibration mode and the electrical signal application method of the second-order out-of-plane bending vibration of the vibration body excited by the second and fourth migration piezoelectric ceramic pieces in the present invention;

[0043] Fig. 9 It is a schematic diagram of the vibration mode and electrical signal application method of the third-order out-of-plane bending vibration of the vibration body excited by the first, third and fifth migrating piezoelectric ceramic pieces in the present invention;

[0044] Fig.10 It is a schematic diagram of the vibration mode and electrical signal application method of the first-order out-of-plane bending vibration of the sorted piezoelectric ceramic sheet exciting the sorted copper sheet in the present invention;

[0045] Fig.11 This is a schematic diagram of particle motion position after switching between even-order and odd-order modes under standard bending vibration mode;

[0046] Fig.12 A schematic diagram of particle motion positions after switching between even-order and odd-order modes under the distortion bending vibration mode of the present invention;

[0047] Fig.13 It is a schematic diagram of the principle of realizing multiple positioning, migration and classification of microspheres in the present invention.

[0048] In the figure, 1-base, 2-vibrating body, 3-PDSM module, 4-first fixing seat, 5-second fixing seat, 6-first fixing nut, 7-second fixing nut, 8-migration channel, 9-sorting channel, 10-first outlet channel, 11-second outlet channel, 13-third outlet channel, 14-sorting copper sheet, 15-sorting piezoelectric ceramic sheet. DETAILED DESCRIPTION

[0049] The technical solution of the present invention is further described in detail below in conjunction with the accompanying drawings:

[0050] The present invention can be implemented in many different forms and should not be considered to be limited to the embodiments described herein. On the contrary, these embodiments are provided to make this disclosure thorough and complete, and will fully express the scope of the present invention to those skilled in the art. In the accompanying drawings, components are enlarged for clarity.

[0051] It should be understood that although the terms first, second, third, etc. can be used here to describe various elements, components and / or parts, these elements, components and / or parts are not limited by these terms. These terms are only used to distinguish elements, components and / or parts from each other. Therefore, the first element, component and / or part discussed below can become the second element, component or part without departing from the teaching of the present invention.

[0052] like Figure 1 As shown, the present invention discloses a patch-type mode switching microsphere multi-mode control device based on standing waves, including a base, a vibrating body, a first fixing seat, a second fixing seat, a first fixing nut, a second fixing nut, a PDMS module, a sorting copper sheet and a piezoelectric driving module;

[0053] like Figure 2 As shown, the first fixing seat and the second fixing seat are both arranged on the base, and have the same structure, and both include a base and a stud, wherein the base is a column, and the lower end surface is fixedly connected to the base; the lower end of the stud is vertically fixedly connected to the upper end surface of the base;

[0054] The vibrating body is a rectangular parallelepiped, and a first ear piece and a second ear piece are respectively provided at two ends of the vibrating body; a first through hole and a second through hole are respectively provided at the center of the first ear piece and the second ear piece to match the studs of the first fixing seat and the second fixing seat; the vibrating body is symmetrical about the line connecting the centers of the first through hole and the second through hole;

[0055] The studs of the first fixing seat and the second fixing seat respectively pass through the first through hole and the second through hole and are connected with the first fixing nut and the second fixing nut correspondingly through threads, so as to fix the vibrating body on the base of the first fixing seat and the second fixing seat;

[0056] The base is fixed on the air floating platform so that the vibrating body is horizontal;

[0057] like Figure 4 As shown, the upper end surface of the vibrating body is provided with a mounting groove for placing the PDMS module; the mounting groove comprises two rectangular stepped grooves of different depths, the two stepped grooves have the same width and are connected in the length direction, the depth of the stepped groove located upstream is greater than the depth of the stepped groove located downstream, and the mounting groove is symmetrical about the line connecting the centers of the first through hole and the second through hole;

[0058] The PDMS module has the same shape as the mounting groove, is made of PDMS material, and is fixed in the mounting groove by PDMS glue;

[0059] like Figure 3 As shown, a migration channel and a second outlet channel are provided on the upper surface of the PDMS on the line connecting the centers of the first through hole and the second through hole, and a sorting channel is provided between the migration channel and the second outlet channel; the migration channel is located upstream of the second outlet channel; the sorting channel is perpendicular to the migration channel, one side is connected to the migration channel, and the other side is connected to the second outlet channel; the upper surface of the PDMS is also symmetrically provided with a first outlet channel and a third outlet channel on both sides of the second outlet channel, and the first outlet channel and the third outlet channel are respectively connected to the two ends of the sorting channel;

[0060] like Figure 5 As shown, the lower surface of the vibrator is provided with first to fifth piezoelectric grooves in sequence from upstream to downstream along its length direction; the first to fifth piezoelectric grooves are perpendicular to the migration channel and symmetrical about the straight line where the migration channel is located;

[0061] The piezoelectric driving module comprises first to fifth migrating piezoelectric ceramic sheets and a sorting piezoelectric ceramic sheet;

[0062] like Figure 6 As shown, the first to fifth migration piezoelectric ceramic sheets have the same structure, are arranged in the first to fifth piezoelectric grooves one by one, and are polarized along the thickness direction. The polarization directions of the first, second, and fifth migration piezoelectric ceramic sheets are the same, the polarization directions of the third and fourth migration piezoelectric ceramic sheets are the same, and the polarization directions of the first and third migration piezoelectric ceramic sheets are opposite;

[0063] The third migration piezoelectric ceramic piece is used to excite the first-order out-of-plane bending vibration mode (such as Figure 7 As shown), or in combination with the first and fifth migration piezoelectric ceramic sheets to excite the third-order out-of-plane bending vibration mode of the vibration body in its length direction (as shown Fig. 9As shown); the second and fourth migration piezoelectric ceramic sheets are used to cooperate in exciting the second-order out-of-plane bending vibration mode of the vibration body in the length direction thereof (as shown Figure 8 As shown); the third migration piezoelectric ceramic piece is located at the antinode of the first-order out-of-plane bending vibration mode of the vibration body and the antinode of the third-order out-of-plane bending vibration mode of the vibration body; the second and fourth migration piezoelectric ceramic pieces are both located at the antinode of the second-order out-of-plane bending vibration mode of the vibration body; the first and fifth piezoelectric ceramic pieces are both located at the antinode of the third-order out-of-plane bending vibration mode of the vibration body;

[0064] like Figure 4 , Figure 5 As shown, the vibrator is provided with a rectangular through groove with the same width as the mounting groove below the sorting flow channel; the sorting copper sheet is pasted on the lower end surface of the PDMS module in the rectangular through groove;

[0065] The selected piezoelectric ceramic sheet is attached to the lower end surface of the selected copper sheet, symmetrically about the line connecting the centers of the first through hole and the second through hole; the selected piezoelectric ceramic sheet is polarized along its thickness direction to excite the first-order out-of-plane bending vibration mode of the selected copper sheet in the width direction of the vibrating body, such as Fig.10 shown.

[0066] The base is preferably a rectangular plate, and through holes for fixing to the air floating platform are provided on the four corners of the rectangular plate.

[0067] The first to fifth piezoelectric grooves have the same structure, and their depths are all less than the thickness of the first migrating piezoelectric ceramic sheet. This can not only realize the positioning of the migrating piezoelectric ceramic sheet when pasting the piezoelectric ceramic sheet, but also amplify the migrating piezoelectric ceramic sheet in d through the restraining effect of the grooves on the migrating piezoelectric ceramic sheet. 31 The deformation effect during mode vibration can achieve the effect of amplifying the amplitude.

[0068] By arranging the migration channel, the sorting channel, and the first to third outlet channels on the upper surface of the PDSM module, the movement path of the microparticles is planned, and the problem of the inability to excite the required vibration mode caused by directly planning the channel on the vibrating body is avoided. At the same time, the bottom surface of the box body is a closed structure to prevent the leakage of the microparticle carrying liquid caused by the design of the sorting channel.

[0069] The present invention also discloses a control method of the patch-type mode-switching microsphere multi-mode control device based on standing waves, comprising the following steps:

[0070] Step 1), injecting a carrier fluid into the upstream of the migration channel and releasing the microspheres;

[0071] Step 2), applying a preset third simple harmonic voltage signal to the first, third and fifth migration pressure ceramic sheets to excite the third-order out-of-plane bending vibration mode of the vibrating body distorted in its length direction, and the microsphere moves along the straight migration channel with the fluid until it reaches the first node of the distorted third-order bending vibration, and is positioned at the node under the action of the acoustic radiation force and the drag force generated by the acoustic flow, and at this time, the first morphology detection of the microsphere is performed through a microscope;

[0072] Step 3), the first, third and fifth migration piezoelectric ceramic sheets are powered off, and a preset second simple harmonic voltage signal is applied to the second and fourth migration piezoelectric ceramic sheets to excite a second-order out-of-plane bending vibration mode in which the vibrating body is distorted in its length direction. The microsphere moves with the fluid in the straight migration flow channel to the first node of the distorted second-order bending vibration, and is positioned at the node under the action of the acoustic radiation force and the drag force generated by the acoustic flow. At this time, a second morphological detection of the microsphere is performed through a microscope;

[0073] Step 4), the second and fourth migration piezoelectric ceramic pieces are powered off, and a preset first simple harmonic voltage signal is applied to the third migration piezoelectric ceramic piece to excite a first-order out-of-plane bending vibration mode of the vibrating body in the length direction thereof. When the microsphere moves along with the fluid in the linear migration channel to the center of the sorting channel, the third migration piezoelectric ceramic piece is powered off to position the microsphere. At this time, the microsphere is subjected to a third morphology detection through a microscope;

[0074] Step 5), judging the surface quality of the microparticles based on the three test results, and sorting them according to their quality;

[0075] Step 5.1), if the microsphere is of inferior quality, a preset fourth simple harmonic voltage signal is applied to the sorting piezoelectric ceramic sheet to stimulate the first-order out-of-plane bending vibration mode of the sorting copper sheet in the width direction of the vibrating body, so that the microsphere moves to the entrance of the first outlet flow channel;

[0076] Step 5.2), if the microsphere is a medium-quality microsphere, a preset fifth simple harmonic voltage signal is applied to the sorting piezoelectric ceramic sheet to stimulate the first-order out-of-plane bending vibration mode of the sorting copper sheet in the width direction of the vibrating body, so that the microsphere moves to the entrance of the third outlet flow channel;

[0077] Step 5.3), if the microspheres are high-quality microspheres, the piezoelectric ceramic sheet is not driven for sorting, and the microspheres are located at the entrance of the second outlet flow channel;

[0078] Step 6) applying a preset first simple harmonic voltage signal to the third migrating piezoelectric ceramic piece, so that the microspheres continue to move to the corresponding outlet flow channel after sorting.

[0079] The particle motion position after switching between even-order and odd-order modes under standard bending vibration mode is as follows: Fig.11As shown, the mounting groove of the vibrator in the present invention includes two stepped grooves. This asymmetric structure can adjust the standard bending vibration mode of the vibrator to a distorted bending vibration mode, thereby achieving the misalignment of the antinode and node positions between vibration modes of different orders, such as Fig.12 shown.

[0080] The present invention manipulates microspheres with sizes ranging from micrometers to millimeters to achieve multiple positioning, long-distance migration and classification in the PDMS flow channel. After each positioning of the microspheres, the microscopic morphology of the microspheres is detected under the observation of a microscope. After the detection is completed, the microspheres are further moved to the flow channel outlet through mode switching. After reaching the last positioning node, the high-quality and low-quality microspheres are classified and manipulated according to the detection results of the microscope, so that microspheres of different qualities are gathered at different outlets, such as Fig.13 shown.

[0081] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as generally understood by those skilled in the art in the art to which the present invention belongs. It should also be understood that terms such as those defined in common dictionaries should be understood to have meanings consistent with the meanings in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless defined as herein.

[0082] The specific implementation methods described above further illustrate the objectives, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above description is only a specific implementation method of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A patch-type mode-switching microsphere multi-mode control device based on standing waves, characterized in that: It includes a base, a vibrating body, a first fixing seat, a second fixing seat, a first fixing nut, a second fixing nut, a PDMS module, a sorting copper sheet and a piezoelectric driving module; The first fixing seat and the second fixing seat are both arranged on the base, have the same structure, and both include a base and a stud, wherein the base is a column, and the lower end surface is fixedly connected to the base; the lower end of the stud is vertically fixedly connected to the upper end surface of the base; The vibrating body is a rectangular parallelepiped, and a first ear piece and a second ear piece are respectively provided at two ends of the vibrating body; a first through hole and a second through hole are respectively provided at the center of the first ear piece and the second ear piece to match the studs of the first fixing seat and the second fixing seat; the vibrating body is symmetrical about the line connecting the centers of the first through hole and the second through hole; The studs of the first fixing seat and the second fixing seat respectively pass through the first through hole and the second through hole and are connected with the first fixing nut and the second fixing nut correspondingly through threads, so as to fix the vibrating body on the base of the first fixing seat and the second fixing seat; The base is fixed on the air floating platform so that the vibrating body is horizontal; The upper end surface of the vibrating body is provided with a mounting groove for placing the PDMS module; the mounting groove comprises two rectangular stepped grooves of different depths, the two stepped grooves have the same width and are connected in the length direction, the depth of the stepped groove located upstream is greater than the depth of the stepped groove located downstream, and the mounting groove is symmetrical about the line connecting the centers of the first through hole and the second through hole; The PDMS module has the same shape as the mounting groove, is made of PDMS material, and is fixed in the mounting groove by PDMS glue; The upper surface of the PDMS module is provided with a migration channel and a second outlet channel on the line connecting the centers of the first through hole and the second through hole, and a sorting channel is provided between the migration channel and the second outlet channel; the migration channel is located upstream of the second outlet channel; the sorting channel is perpendicular to the migration channel, one side is connected to the migration channel, and the other side is connected to the second outlet channel; the upper surface of the PDMS module is also symmetrically provided with a first outlet channel and a third outlet channel on both sides of the second outlet channel, and the first outlet channel and the third outlet channel are respectively connected to the two ends of the sorting channel; The lower surface of the vibrator is provided with first to fifth piezoelectric grooves in sequence from upstream to downstream along the length direction thereof; the first to fifth piezoelectric grooves are all perpendicular to the migration channel and are symmetrical about the straight line where the migration channel is located; The piezoelectric driving module comprises first to fifth migrating piezoelectric ceramic sheets and a sorting piezoelectric ceramic sheet; The first to fifth migratory piezoelectric ceramic sheets have the same structure, are arranged in the first to fifth piezoelectric grooves in a one-to-one correspondence, and are all polarized along the thickness direction. The first, second, and fifth migratory piezoelectric ceramic sheets have the same polarization direction, the third and fourth migratory piezoelectric ceramic sheets have the same polarization direction, and the first and third migratory piezoelectric ceramic sheets have opposite polarization directions; The third migration piezoelectric ceramic piece is used to excite the first-order out-of-plane bending vibration mode of the vibration body in the length direction of the vibration body, or cooperates with the first and fifth migration piezoelectric ceramic pieces to excite the third-order out-of-plane bending vibration mode of the vibration body in the length direction of the vibration body; the second and fourth migration piezoelectric ceramic pieces are used to cooperate to excite the second-order out-of-plane bending vibration mode of the vibration body in the length direction of the vibration body; the third migration piezoelectric ceramic piece is simultaneously located at the antinode of the first-order out-of-plane bending vibration mode of the vibration body and the antinode of the third-order out-of-plane bending vibration mode of the vibration body; the second and fourth migration piezoelectric ceramic pieces are both located at the antinode of the second-order out-of-plane bending vibration mode of the vibration body; the first and fifth piezoelectric ceramic pieces are both located at the antinode of the third-order out-of-plane bending vibration mode of the vibration body; The vibrator is provided with a rectangular through groove with the same width as the mounting groove below the sorting flow channel; the sorting copper sheet is pasted on the lower end surface of the PDMS module in the rectangular through groove; The sorting piezoelectric ceramic sheet is pasted on the lower end surface of the sorting copper sheet, symmetrically about the line connecting the centers of the first through hole and the second through hole; the sorting piezoelectric ceramic sheet is polarized along its thickness direction to excite the first-order out-of-plane bending vibration mode of the sorting copper sheet in the width direction of the vibrating body.

2. The patch-type mode-switching microsphere multi-mode control device based on standing waves according to claim 1 is characterized in that: The base is a rectangular plate, and through holes for fixing to the air floating platform are arranged on the four corners of the base.

3. The patch-type mode-switching microsphere multi-mode control device based on standing waves according to claim 1, characterized in that: The first to fifth piezoelectric grooves have the same structure, and their depths are all smaller than the thickness of the first migration piezoelectric ceramic sheet.

4. The control method of the patch-type mode switching microsphere multi-mode control device based on standing wave according to claim 1 is characterized in that: The following steps are involved: Step 1), injecting a carrier fluid into the upstream of the migration channel and releasing the microspheres; Step 2), applying a preset third simple harmonic voltage signal to the first, third and fifth migration piezoelectric ceramic sheets to excite the third-order out-of-plane bending vibration mode of the vibrating body distorted in its length direction, and the microsphere moves along the straight migration channel with the fluid until it reaches the first node of the distorted third-order bending vibration, and is positioned at the node under the action of the acoustic radiation force and the drag force generated by the acoustic flow, and at this time, the first morphology detection of the microsphere is performed through a microscope; Step 3), the first, third and fifth migration piezoelectric ceramic pieces are powered off, and a preset second simple harmonic voltage signal is applied to the second and fourth migration piezoelectric ceramic pieces to excite a second-order out-of-plane bending vibration mode in which the vibrating body is distorted in its length direction. The microsphere moves with the fluid in the straight migration flow channel to the first node of the distorted second-order bending vibration, and is positioned at the node under the action of the acoustic radiation force and the drag force generated by the acoustic flow. At this time, a second morphological detection of the microsphere is performed through a microscope; Step 4), the second and fourth migration piezoelectric ceramic pieces are powered off, and a preset first simple harmonic voltage signal is applied to the third migration piezoelectric ceramic piece to excite a first-order out-of-plane bending vibration mode of the vibrating body in the length direction thereof. When the microsphere moves along with the fluid in the linear migration channel to the center of the sorting channel, the third migration piezoelectric ceramic piece is powered off to position the microsphere. At this time, the microsphere is subjected to a third morphology detection through a microscope; Step 5), judging the surface quality of the microspheres according to the three test results, and sorting them according to their quality; Step 5.1), if the microsphere is of inferior quality, a preset fourth simple harmonic voltage signal is applied to the sorting piezoelectric ceramic sheet to stimulate the first-order out-of-plane bending vibration mode of the sorting copper sheet in the width direction of the vibrating body, so that the microsphere moves to the entrance of the first outlet flow channel; Step 5.2), if the microsphere is a medium-quality microsphere, a preset fifth simple harmonic voltage signal is applied to the sorting piezoelectric ceramic sheet to stimulate the first-order out-of-plane bending vibration mode of the sorting copper sheet in the width direction of the vibrating body, so that the microsphere moves to the entrance of the third outlet flow channel; Step 5.3), if the microspheres are high-quality microspheres, the piezoelectric ceramic sheet is not driven for sorting, and the microspheres are located at the entrance of the second outlet flow channel; Step 6) applying a preset first simple harmonic voltage signal to the third migrating piezoelectric ceramic piece, so that the microspheres continue to move to the corresponding outlet flow channel after sorting.

Images