A high-sensitivity and high-resolution full-spectrum optical system

Abstract

The present invention discloses a high-sensitivity and high-resolution full-spectrum optical system, which includes an optical slit, a concave grating, and a photoelectric sensor. The three are located on the circumference of the Rowland circle. The optical slit is arranged perpendicular to the meridian plane of the entire system, so that the original conical optical path forms an optical path perpendicular to the meridian plane after passing through the optical slit. The radius of curvature of the concave grating is the diameter of the Rowland circle, and it is arranged not only on the Rowland circle but also tangent to the Rowland circle, and the Rowland circle is inside the concave grating. After the light passes through the optical slit, it enters the concave grating at an incident angle of 42°, and undergoes lateral dispersion on the concave grating. Each small wavelength range after dispersion is collected by its respective photoelectric sensor. The optical system has a photoelectric sensor with high sensitivity, fast reading speed, high imaging quality and circuit integration, which can compress the light spot, reduce aberration and improve resolution.

Description

Technical Field

[0001] The present invention relates to the technical field of spectrometers, and particularly to a high-sensitivity and high-resolution full-spectrum optical system. Background Art

[0002] A spectrometer is also called a spectroscope. The most common one in the field of detection applications is the direct-reading spectrometer, whose English name is OES (Optical Emission Spectrometer), that is, atomic emission spectroscopy. The entire optical system of atomic emission spectroscopy mainly consists of three parts, namely an incident slit, a dispersion system, and an imaging system. However, for the light source, a common direct-reading spectrometer generally uses an electric spark, an electric arc, or a glow discharge method to vaporize the sample for excitation. Since the electrons of the atoms contained in the sample will cause energy changes during the transition between the ground state and the excited state, once the sample is excited by energy, the electrons of its atoms will form an energy transition in the state after being excited and be reflected in the form of light; then the formed spectrum is introduced into the spectrometer through an optical fiber for analysis. The spectrum first enters the condenser barrel, and the plano-convex lens in it focuses the light onto the slit. After the light of each wavelength passes through the slit, it immediately irradiates onto the holographic concave grating for dispersion. The incident angles of the light of each wavelength incident on the concave grating are all kept the same, but the diffraction angle will increase with the increase of the wavelength. In this way, the characteristic wavelengths of different wavelengths will be dispersed and separated, and the grating used is a spherical concave grating with a radius of curvature, which not only plays a role in dispersion but also can focus the dispersed light onto a point. This spherical concave grating has the effect of eliminating spherical aberration compared with a plane grating. According to the Rowland circle theorem, the image points finally focused after the dispersion of the light of these characteristic wavelengths are arranged in sequence on the side length of the Rowland circle. Then, by arranging the detectors in sequence on the Rowland circle, the relative positions and corresponding intensities of the image points of different wavelengths can be collected.

[0003] Common photoelectric sensors include photomultiplier tubes and CCD photoelectric sensors. Such sensors often have relatively low sensitivity, slow reading speed, poor imaging quality, and it is difficult to integrate the circuits equipped for them. This will result in the circuit board equipped for them being designed to be too large, which is very unfavorable for the miniaturization of the final equipment size.

[0004] From another perspective, for the photosensitive surfaces of various sensors, they are actually long and narrow planes. In theory, the imaging points of light of each characteristic wavelength are on the side length of the arc length of the Rowland circle. If a planar optoelectronic sensor instead of a curved surface is used for collection, it will lead to excessive defocus of the image spots on the sensor and an increase in the root mean square diameter of the image spots, thereby resulting in a decrease in resolution. And in this case, the resolution of the light of the wavelength of the image spot far from the central wavelength will be even worse, that is to say, the resolution of the diffracted light of the characteristic wavelength will be worse for the light farther from the central wavelength. Therefore, no matter how the CMOS or CCD optoelectronic sensors are placed, this situation cannot be avoided.

[0005] In addition, for most optoelectronic sensors on the current market, the length of their photosensitive surfaces is fixed. If they are arranged side by side in sequence on the arc length of the focal point on the Rowland circle surface, due to size problems, it is impossible to arrange multiple optoelectronic sensors side by side. Moreover, these sensors also contain a series of packages around the photosensitive surface, which makes the volume of the acquisition part of the module even larger. Therefore, it also makes the geometric and mechanical contradiction problem of the optoelectronic sensors that cannot be placed due to excessive quantity even more serious. Summary of the Invention

[0006] The object of the present invention is to provide a high-sensitivity and high-resolution full-spectrum optical system. This optical system has an optoelectronic sensor with high sensitivity, fast reading speed, high imaging quality and circuit integration, can compress the light spot, reduce aberration and improve resolution, and solve the problem that multiple optoelectronic sensors cannot be placed simultaneously on the image surface of the Rowland circle due to the structural size problem of the sensors.

[0007] The object of the present invention is achieved by the following technical solutions:

[0008] A high-sensitivity and high-resolution full-spectrum optical system, the system includes an optical slit, a concave grating and an optoelectronic sensor. The optical slit, the concave grating and the optoelectronic sensor are located on the circumference of the Rowland circle, where:

[0009] The placement method of the optical slit is perpendicular to the meridional plane of the whole system, so that the original conical light path forms an optical path perpendicular to the meridional plane after passing through the optical slit;

[0010] The radius of curvature of the concave grating is the diameter of the Rowland circle, and the placement position is not only on the Rowland circle but also tangent to the Rowland circle, and the Rowland circle is inside the concave grating;

[0011] After the light passes through the optical slit, it enters the concave grating at an incident angle of 42°, and undergoes lateral dispersion on the concave grating; each small wavelength range after dispersion is collected by its respective optoelectronic sensor;

[0012] The photoelectric sensors are arranged in the following manner:

[0013] First, the characteristic wavelengths of various elements to be measured by the target are arranged in sequence, divided into seven wavelength ranges in total. Each wavelength band has its own central wavelength, and the grouping of the wavelength bands is used for the overall optical distribution layout;

[0014] The placement position of the photoelectric sensors is set such that the photosensitive surface is perpendicular to the central wavelength of each wavelength band, and the centroid position of the photosensitive surface is the imaging point of the central wavelength of each wavelength band. The centroid position of this photosensitive surface coincides with the arc of the Rowland circle;

[0015] For the photoelectric sensors measuring the wavelength range of 150nm - 200nm in the first wavelength band, the photosensitive surface of the photoelectric sensors is used to collect in the form of being tangent to the Rowland circle; while for the second to seventh wavelength bands, the collection is carried out in the form of being perpendicular to the Rowland circle;

[0016] Finally, the light received by each is reflected crosswise to the corresponding photoelectric sensor, forming a cross - double - row full - spectrum acquisition.

[0017] It can be seen from the technical solution provided by the present invention described above that the above - mentioned optical system has a photoelectric sensor with high sensitivity, fast reading speed, high imaging quality and circuit integrability, which can compress the light spot, reduce aberration and improve resolution, and solve the problem that due to the structural size of the sensor, multiple photoelectric sensors cannot be placed simultaneously on the image plane of the Rowland circle, thereby ensuring the high - sensitivity, high - resolution and full - spectrum acquisition performance of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0019] Figure 1 It is a schematic structural diagram of a high - sensitivity and high - resolution full - spectrum optical system provided by an embodiment of the present invention;

[0020] Figure 2 It is a spot diagram of the final image of the example cited in the present invention;

[0021] Figure 3 It is a spot diagram finally collected on the photosensitive surface of the CMOS or CCD photoelectric sensor in the example cited in the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] Combined with the accompanying drawings in the embodiments of the present invention, the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments, which does not constitute a limitation to the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work belong to the protection scope of the present invention.

[0023] The high-sensitivity and high-resolution full-spectrum optical system provided by the embodiments of the present invention includes an optical slit, a concave grating, and a photoelectric sensor. The optical slit, the concave grating, and the photoelectric sensor are located on the circumference of the Rowland circle, where:

[0024] The placement of the optical slit is perpendicular to the meridian plane of the entire system, so that the originally conical optical path forms an optical path perpendicular to the meridian plane after passing through the optical slit;

[0025] The radius of curvature of the concave grating is the diameter of the Rowland circle, and its placement position is not only on the Rowland circle but also tangent to the Rowland circle, and the Rowland circle is inside the concave grating;

[0026] After the light passes through the optical slit, it enters the concave grating at an incident angle of 42°, and undergoes lateral dispersion on the concave grating; each small wavelength range after dispersion is collected by its respective photoelectric sensor;

[0027] The photoelectric sensor is placed in the following manner:

[0028] First, the characteristic wavelengths of various elements to be measured by the target are arranged in order, and are divided into seven wavelength ranges in total. Each wavelength band has its own central wavelength, and the grouping of the wavelength bands is used for the overall optical distribution layout;

[0029] The placement position of the photoelectric sensor is set so that the photosensitive surface is perpendicular to the central wavelength of each wavelength band, and the centroid position of the photosensitive surface is the imaging point of the central wavelength of each wavelength band, and the centroid position of the photosensitive surface coincides with the arc of the Rowland circle;

[0030] For the photoelectric sensor measuring the wavelength range of 150 nm to 200 nm in the first wavelength band, the photosensitive surface of the photoelectric sensor is used to collect in the form of being tangent to the Rowland circle; for the second to seventh wavelength bands, the form of being perpendicular to the Rowland circle is used for collection;

[0031] Finally, the light received by each is alternately reflected onto its corresponding photoelectric sensor to form an alternating double-row full-spectrum collection.

[0032] In a specific implementation, a condenser system can also be added before the optical slit. The condenser system is a plano-convex lens with a fixed curvature, which is used to focus light onto the optical slit, and then the light diverges through the optical slit to ensure that most of the light passes through the slit. This is to prevent most of the light emitted from the light source from being absorbed by the blackened surface of the optical slit, and only a small amount of light passes through the optical slit, resulting in a weakening of the finally detected light intensity signal. The design of the condenser system can ensure that most of the light passes through the slit.

[0033] The characteristic wavelengths of various elements to be measured in the target are arranged in order as described above, and are divided into seven wavelength ranges in total. Each wavelength band has its own central wavelength. The specific process is as follows:

[0034] Taking the measurable spectral wavelength range of the entire optical vector from 150 nm to 520 nm as an example, the full-spectrum wavelengths to be detected are divided into 7 bands according to the characteristic wavelengths of the elements detected in the experiment;

[0035] If the number of characteristic wavelengths within the wavelength band is odd, the wavelength in the middle of the sequence is set as the central wavelength. The central wavelength is the centroid position where the wavelength passes through all glass components and the sensor;

[0036] If the number of characteristic wavelengths within the wavelength band is even, the weighted average of the diffraction angles of all even wavelengths within the wavelength band is taken, and the position where the obtained weighted average diffraction angle is located is defined as the virtual central wavelength, and the characteristic wavelengths of the actual elements are arranged on both sides of the virtual central wavelength in sequence.

[0037] In a specific implementation, the detected wavelength range from 150 - 520 nm can be extended to 120 - 1000 nm, which still falls within the protection scope of this application. For example, since the length of the photosensitive surface of the photoelectric sensor is limited, the diffracted light needs to be grouped, specifically according to the diffraction angles of the light of all characteristic wavelengths. The calculation formula for the diffraction angle of the grating is:

[0038] mλ=k(Sinα + Sinβ)

[0039] β=arcSin(mλ / (k·2400 - Sin42°)) -6 ·2400 - Sin42°)

[0040] In the formula, m is the grating order. In this embodiment, the grating order m of the grating is taken as 1; K is the grating constant 1 / 2400 of the grating used in this example; λ is the characteristic wavelength of the corresponding element to be measured; α is the incident angle of the grating; β is the diffraction angle of the characteristic wavelength λ to be measured after diffraction on the grating;

[0041] Using this formula, the corresponding diffraction angle is calculated based on the characteristic wavelength of the corresponding element to be measured. Then, the diffraction angles of all characteristic wavelengths are arranged from smallest to largest. Finally, all characteristic wavelengths are divided into 7 groups according to the diffraction angles of each wavelength and the simulation results:

[0042] The characteristic wavelengths included in the first group are 7 elements: P, S, B, Sb, As, Sn, and C. Since there are an odd number of characteristic wavelengths in this group, the middle Sb element is customized as the central wavelength of the first segment;

[0043] Next, the elements included in the second segment are Pb and Co elements. Since the number of characteristic wavelengths included in the second segment is even, in order to ensure the imaging quality of these two characteristic wavelengths, neither of them can be used as the central wavelength. Instead, the virtual characteristic wavelength represented by the diffraction angle calculated by taking the average of the diffraction angles of these two characteristic wavelengths is used as the central wavelength. In this way, the final imaging of the second segment of characteristic wavelengths will be closer to the center of the photosensitive surface, greatly reducing the phase difference and improving the imaging quality.

[0044] Using the above method, Si and Cr elements are grouped in the third segment of wavelengths, Mo and Mn elements are grouped in the fourth segment of wavelengths, Bi, V, and Nb elements are grouped in the fifth segment of wavelengths, Cu, Ti, and Ni elements are grouped in the sixth segment of wavelengths, and Ca, Al, and W elements are grouped in the seventh segment of wavelengths.

[0045] In addition, in the system, a mirror with an aluminized surface is set at a position 10 mm before the diffraction angle of the light at the central wavelength of the seven bands reaches the Rowland circle arc length. All the mirrors are inside the Rowland circle;

[0046] The first-band mirror used to reflect the first band is consistent with the third-band mirror, the fifth-band mirror, and the seventh-band mirror in turn. They are all reflecting surfaces and are at an angle of 45° with the meridian plane of the entire light vector. The reflecting surface is arranged facing up;

[0047] The second-band mirror, the fourth-band mirror, and the sixth-band mirror are also at an angle of 45° with the meridian plane of the entire light vector. However, the difference is that the reflecting surfaces of these three mirrors face down. Overall, an interleaved double-row design is adopted, thus solving the problem that seven photoelectric sensors cannot be placed on the Rowland circle surface at the same time due to the packaging volume of the photoelectric sensors, perfectly solving the problem of mechanical size contradiction, and achieving wavelength non-fault full-spectrum acquisition.

[0048] In addition, in a specific implementation, a cylindrical lens is further disposed in front of the mirror of each wavelength band. The cylindrical lens is used to compress the image spot in the sagittal plane direction, thereby increasing the brightness of the collected area of the same area. In this embodiment, since there are mirrors of 7 wavelength bands, a total of 7 cylindrical lenses with different radius of curvature are included. The radius of curvature of the arc surface of each cylindrical lens is the optimal result obtained according to the wavelength range of the characteristic wavelength of the wavelength band where the cylindrical lens is located.

[0049] The above-mentioned concave grating can adopt a holographic concave grating. The holographic concave grating has a high number of rulings, has a high angular dispersion and linear dispersion ability, is suitable for high-resolution situations. At the same time, the holographic concave grating has no ghost lines, and the stray light is not as high as that of other types of gratings.

[0050] In addition, the seven photoelectric sensors of the system can select photoelectric sensors based on CMOS or CCD for optical acquisition, thereby improving the final imaging quality and enhancing the overall sensitivity.

[0051] In a specific implementation, for the positions of the sensors used to collect the fourth, fifth, and sixth wavelength bands, they will no longer be centered on the center wavelength of each segment, but will be moved towards both ends, and finally a suitable position is found to prevent the mechanical and physical contradictions caused by the external packaging of the photoelectric sensor and the external packaging of adjacent sensor devices.

[0052] For example, as Figure 1 shown is a schematic structural diagram of a high-sensitivity and high-resolution full-spectrum optical system provided by an embodiment of the present invention. The figure includes a plano-convex lens 1; an entrance slit 2; a Rowland circle 3; a holographic concave grating 4; a first wavelength band mirror 5; a first segment photoelectric sensor 6; a second wavelength band mirror 7; a second segment photoelectric sensor 8; a third wavelength band mirror 9; a third segment photoelectric sensor 10; a fourth wavelength band mirror 11; a fourth segment photoelectric sensor 12; a fifth wavelength band mirror 13; a fifth segment photoelectric sensor 14; a sixth wavelength band mirror 15; a sixth segment photoelectric sensor 16; a seventh wavelength band mirror 17; a seventh segment photoelectric sensor 18, wherein:

[0053] The entrance slit 2, the holographic concave grating 4, and the virtual image planes of all characteristic wavelength rays are all on the circumference of the Rowland circle 3;

[0054] Before the incident slit 2, a plano-convex lens 1 is set up to focus most of the light from the light source on the incident slit 2. After the light passes through the incident slit 2, it enters the holographic concave grating 4 at an incident angle of 42°. In this embodiment, the incident angle of 42° is selected mainly based on two aspects: the structure in the optical simulation and an optimal incident angle for the holographic concave grating 4. As for the optical simulation results, it is mainly considered that too large an incident angle will lead to too large a volume of the entire light vector, which is ultimately not conducive to the miniaturization of the device. If the incident angle is designed too small, the diffracted light of the light in the long wavelength band will overlap with the incident light. As for the second aspect considered, an optimal incident angle for the holographic concave grating 4 is mainly to make the dispersion effect of the holographic concave grating 4 reach a relatively good level. Finally, considering these two aspects, the incident angle is set at 42°;

[0055] As Figure 1 shown, the characteristic wavelengths of each element are diffracted within their respective wavelength bands, and finally diffracted onto their respective CMOS or CCD photoelectric sensors. Immediately afterwards, the diffracted light diffracted from the holographic concave grating 4 reaches the mirror located 10 mm away from the Rowland circle. It should be noted here that the mirror is located inside the Rowland circle. Since the mirror is designed with a structure that forms an angle of 45° with the meridian plane, and the first-band mirror 5 belonging to the first band is placed with its reflecting surface facing up at 45°, the second-band mirror 7 belonging to the second band is placed with its reflecting surface facing down at 45°, the third-band mirror 9 belonging to the third band is placed with its reflecting surface facing up at 45°, the fourth-band mirror 11 belonging to the fourth band is placed with its reflecting surface facing down at 45°, the fifth-band mirror 13 belonging to the fifth band is placed with its reflecting surface facing up at 45°, the sixth-band mirror 15 belonging to the sixth band is placed with its reflecting surface facing down at 45°, and the seventh-band mirror 17 belonging to the seventh band is placed with its reflecting surface facing up at 45°. According to the above placement method of the mirrors, finally, the photosensitive surfaces of the CMOS or CCD photoelectric sensors belonging to each band face the reflecting surfaces of the mirrors of their respective bands and are designed at a distance of 10 mm.

[0056] Since the number of characteristic wavelengths included in the 2nd, 3rd, 4th, 5th, 6th, and 7th bands is small and their imaging positions are all located near the imaging points of the central wavelengths of these bands, the final imaging quality of the characteristic wavelengths in the latter six bands is relatively good. Therefore, the placement methods of the photosensitive surfaces in the latter six bands are designed to be perpendicular to the central wavelengths of each band and at a distance of 10 mm from the central wavelengths at the reflection points of their respective mirrors, which can ensure that the brightness of each wavelength finally collected reaches the maximum. However, for the first band, the number of characteristic wavelengths included is large, and the P element is far from the central wavelength position, which will cause the actual imaging point of the P element to deviate greatly from the theoretical imaging point, increasing the phase difference of this element and finally reducing the final resolution of this element. Therefore, in order to optimize the imaging quality of each band in the first band, the photosensitive surface of the first-stage photoelectric sensor 6 in the embodiment of the present invention is designed in a form tangent to the Rowland circle. This design method can greatly reduce the defocus degree of several elements far from the central wavelength of the first band, thereby reducing the phase difference of the characteristic wavelengths in this band and improving the resolution.

[0057] As Figure 2 shown is the spot diagram of the final imaging of the example cited in the present invention. It is the image spot of the final imaging of all characteristic wavelengths within the wavelength of the first band. This series of image spots is a series of long strips and are parallel to each other. Obviously, the image spots of the characteristic wavelengths of the As and Sn elements, which are the most difficult to distinguish among all elements, have good resolution ability, and the width of each image spot is about 78 um, which is basically within the acceptable range. And the geometric radius of 8636.28 um in the spot diagram is actually the distance between the image spots of the characteristic wavelengths of the P element and the C element at the upper and lower ends. Moreover, this range is much smaller than the length of the CMOS or CCD photoelectric sensor, so it meets the requirements of the sensor used in the present invention.

[0058] In addition, since the width of the linear array CMOS or CCD photoelectric sensor used is relatively narrow, and most of the area of the image spot is outside the photosensitive surface of the sensor, this will cause the collected brightness to be greatly reduced. To solve this problem, the light spot must be compressed. As Figure 1 shown, in this embodiment, a cylindrical mirror 19 is designed in front of each mirror to compress the final light spot, thereby improving the brightness of the finally collected light spot.

[0059] As Figure 3The figure shows the dot matrix diagram finally collected on the photosensitive surface of the CMOS or CCD optoelectronic sensor in the example of the present invention. Since the image spot of each characteristic wavelength is much larger than the width of the photosensitive surface of the CMOS or CCD optoelectronic sensor, only the very center part of the entire image spot can be collected. Since this will result in a large loss of the brightness of the collected image spot, a cylindrical lens suitable for each wavelength band is used to compress the length of this light spot, thereby increasing the brightness of the collected area of the same area. Each cylindrical lens can basically compress the light spot to one-fifth of its original size. Therefore, compared with not using a cylindrical lens, the brightness of the collected effect after the cylindrical lens compresses the light spot is increased by five times.

[0060] It should be noted that the content not described in detail in the embodiments of the present invention belongs to the prior art well-known to those skilled in the art.

[0061] As described above, the above are only the preferred specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention should be covered by the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims. The information disclosed in the background art part of this article is only intended to deepen the understanding of the overall background art of the present invention, and should not be regarded as an admission or any form of suggestion that this information constitutes the prior art already known to those skilled in the art.

Claims

1. A high-sensitivity and high-resolution full-spectrum optical system, characterized in that The system includes an optical slit, a concave grating, and a photoelectric sensor. The optical slit, the concave grating, and the photoelectric sensor are located on the circumference of the Rowland circle, where: The optical slit is arranged perpendicular to the meridian plane of the entire system, so that the originally conical light path forms an optical path perpendicular to the meridian plane after passing through the optical slit; The radius of curvature of the concave grating is the diameter of the Rowland circle. It is arranged not only on the Rowland circle but also tangent to the Rowland circle, and the Rowland circle is inside the concave grating; After the light passes through the optical slit, it enters the concave grating at an incident angle of 42°, and undergoes lateral dispersion on the concave grating; each small wavelength range after dispersion is collected by its respective photoelectric sensor; The photoelectric sensor is arranged in the following manner: First, the characteristic wavelengths of various elements to be measured are arranged in order, and are divided into seven wavelength ranges in total. Each wavelength band has its own central wavelength, and the band grouping is used for the overall optical distribution layout; The placement position of the photoelectric sensor is set so that the photosensitive surface is perpendicular to the central wavelength of each band, and the centroid position of the photosensitive surface is the imaging point of the central wavelength of each band. The centroid position of this photosensitive surface coincides with the arc of the Rowland circle; For the photoelectric sensor measuring the wavelength range of 150 nm to 200 nm in the first wavelength band, the photosensitive surface of the photoelectric sensor is used to collect light in a form that is tangent to the Rowland circle; while for the second to seventh wavelength bands, the light is collected in a form that is perpendicular to the Rowland circle; Finally, the light received by each is reflected to its corresponding photoelectric sensor in an interleaved manner, forming an interleaved double-row full-spectrum acquisition; In the system, a mirror with an aluminized surface is provided at a position 10 mm before the diffraction angle of the light at the central wavelengths of the seven bands reaches the arc length of the Rowland circle. All the mirrors are inside the Rowland circle; The first-band mirror used to reflect the first band is aligned with the third-band mirror, the fifth-band mirror, and the seventh-band mirror in sequence. They are all reflecting surfaces and are at 45° to the meridian plane of the entire light vector, with the reflecting surface facing upward; The second-band mirror, the fourth-band mirror, and the sixth-band mirror are also at 45° to the meridian plane of the entire light vector. However, the difference is that the reflecting surfaces of these three mirrors face downward, and an interleaved double-row design is generally adopted.

2. The high-sensitivity and high-resolution full-spectrum optical system according to claim 1, wherein A condenser system is added before the optical slit. The condenser system is a plano-convex lens with a fixed curvature, used to focus the light onto the optical slit, and then the light diverges through the optical slit to ensure that most of the light passes through the slit.

3. The high-sensitivity and high-resolution full-spectrum optical system according to claim 1, wherein, The process of arranging the characteristic wavelengths of various elements to be measured in order and dividing them into seven wavelength ranges in total, with each wavelength band having its own central wavelength, is as follows: Taking the measurable spectral wavelength range of 150 nm to 520 nm of the entire light vector as an example, the full-spectrum wavelengths to be detected are divided into 7 bands according to the characteristic wavelengths of the elements detected in the experiment; If the number of characteristic wavelengths within the wavelength band is odd, the wavelength in the middle of the sequence is set as the central wavelength, and the central wavelength is the centroid position where the wavelength passes through all glass components and the sensor. If the number of characteristic wavelengths within the wavelength band is even, the weighted average of the diffraction angles of all even wavelengths within the wavelength band is taken, and the position where the obtained weighted average diffraction angle is located is defined as the virtual central wavelength, while the characteristic wavelengths of the actual elements are arranged on both sides of the virtual central wavelength in sequence.

4. The high-sensitivity and high-resolution full-spectrum optical system according to claim 1, wherein A cylindrical mirror is further provided in front of the mirror in each wavelength band, and the cylindrical mirror is used to compress the image spot in the sagittal plane direction, thereby increasing the brightness of the same area collected.

5. The high-sensitivity and high-resolution full-spectrum optical system according to claim 1, wherein The concave grating is a holographic concave grating, and the holographic concave grating has a high number of rulings, thereby having a high angular dispersion and linear dispersion ability, and is suitable for high-resolution situations.

6. The high-sensitivity and high-resolution full-spectrum optical system according to claim 1, wherein The seven photoelectric sensors of the system are selected as photoelectric sensors based on CMOS or CCD for optical acquisition.

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