Flange for mounting a flare and exhaust treatment device

Abstract

The present application provides a kind of torch installation flange and waste gas treatment device.It includes flange main body, which is configured with through hole, inert gas passage and reaction gas passage, and the inert gas passage and reaction gas passage are respectively provided with inert gas inlet and reaction gas inlet.The through hole extends from the first side to the second side of the flange main body, the inert gas passage is provided with inert gas outlet in the through hole, and the reaction gas passage is provided with reaction gas outlet at the second side of the flange main body.The waste gas pipe is provided with waste gas passage, and the waste gas passage is communicated with the inert gas outlet and the second side of the flange main body through the through hole.The torch installation flange and waste gas treatment device provided by the present application can mix the waste gas with inert gas first to reduce its activity, prevent it from reacting in the waste gas passage or pipe opening to cause blockage, reduce the probability of explosion, and make the waste gas treatment process more stable and safe.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor waste gas treatment, and particularly relates to a flare mounting flange and a waste gas treatment device. BACKGROUND

[0002] With the increasing prosperity of the semiconductor industry, the production capacity is increasing, and various waste gases are generated in the production process. Most of these gases are harmful to the human body and the environment. The unorganized waste gas emitted into the atmosphere will deposit on the ground after spreading and reach a very high concentration, causing serious environmental pollution and endangering human health. If a fire source is encountered, a fire will occur, and even an explosion will occur. Therefore, the market demand for waste gas treatment equipment is very large. However, due to the different internal facilities and environments of semiconductor manufacturers, there is a great demand for various practical special devices for waste gas treatment equipment.

[0003] In order to prevent problems from occurring in waste gas emission, people usually collect and burn them to prevent future problems, but traditional waste gas treatment usually causes blockage due to the mixing reaction of high-concentration waste gas and air, and even causes explosion accidents, thereby reducing the stability and safety of the waste gas emission system. Therefore, a flare mounting flange and a waste gas treatment device are needed to solve the above problems. SUMMARY

[0004] The present application provides a flare mounting flange and a waste gas treatment device to solve the problem of explosion accidents caused by the mixing of high-concentration waste gas and air when the prior art processes the waste gas generated during the preparation of semiconductor materials.

[0005] The present application provides a flare mounting flange, comprising:

[0006] A flange body is configured with a through hole, an inert gas channel and a reaction gas channel, the inert gas channel and the reaction gas channel are respectively provided with an inert gas inlet and a reaction gas inlet on a first side of the flange body, the through hole extends from the first side to a second side of the flange body, the inert gas channel is provided with an inert gas outlet in the through hole, and the reaction gas channel is provided with a reaction gas outlet on the second side of the flange body.

[0007] A waste gas pipe is provided at one end in the through hole and located on the first side of the flange body, the waste gas pipe is provided with a waste gas channel, and the waste gas channel is in communication with the inert gas outlet and the second side of the flange body through the through hole.

[0008] According to the flare mounting flange provided by the present application, the waste gas pipe is provided with a dredging member, the dredging member is slidably arranged on the waste gas pipe and has a first state and a second state.

[0009] In the first state, the dredging member is at least partially slid into the exhaust passage;

[0010] In the second state, the dredging member is slid out of the exhaust passage.

[0011] According to the torch mounting flange provided by the application, the exhaust pipe is a Y-shaped pipe, which comprises a main pipe and a branch pipe.

[0012] The main pipe and the branch pipe are in communication, and the main pipe and the branch pipe are configured with the exhaust passage, the main pipe is provided with an opening in communication with the exhaust passage, and the dredging member is slidably arranged at the opening.

[0013] In the first state, the dredging member is at least partially slid into the exhaust passage through the opening; in the second state, the dredging member is slid to the opening.

[0014] According to the torch mounting flange provided by the application, the torch mounting flange further comprises a driving mechanism; the dredging member comprises a scraper and a dredging rod.

[0015] In the first state, the driving mechanism drives the scraper to be at least partially slid into the exhaust passage; in the second state, the driving mechanism drives the scraper to be slid out of the exhaust passage.

[0016] According to the torch mounting flange provided by the application, the torch mounting flange further comprises a detection mechanism; the exhaust pipe is provided with a detection opening, and the detection mechanism is in communication with the detection opening.

[0017] In the process of detecting the state change of the exhaust pipe by the detection mechanism, the detection mechanism is used to control the scraper to be switched between the first state and the second state through the driving mechanism.

[0018] According to the torch mounting flange provided by the application, at least one of the inert gas passage and the reaction gas passage is filled with a heat insulation gas guiding layer.

[0019] According to the torch mounting flange provided by the application, a plurality of exhaust pipes are provided, a plurality of through holes are provided on the flange body, the through holes are arranged one by one corresponding to the exhaust pipes, and the inert gas outlet is arranged in each through hole.

[0020] According to the torch mounting flange provided by the application, the flange body comprises a first flange disc, a second flange disc and a third flange disc which are sequentially stacked from top to bottom.

[0021] The inert gas passage is configured between the first flange plate and the second flange plate, the reaction gas passage is configured between the second flange plate and the third flange plate, the through hole passes through the first flange plate, the second flange plate and the third flange plate in sequence, the first flange plate is provided with the inert gas inlet and the reaction gas inlet, and the third flange plate is provided with a reaction gas outlet.

[0022] According to the torch mounting flange provided by the application, the first flange plate or the second flange plate is provided with a first groove, the first groove forms the inert gas passage between the first flange plate and the second flange plate, the second flange plate or the third flange plate is provided with a second groove, and the second groove forms the reaction gas passage between the second flange plate and the third flange plate.

[0023] The application further provides a waste gas treatment device, which comprises the torch mounting flange.

[0024] The waste gas treatment device further comprises a heat source, and a heating end of the heat source is arranged on the second side of the flange body and passes through the mounting hole.

[0025] The torch mounting flange and the waste gas treatment device provided by the application can make the gas pass through the through hole to a designated position for reaction, the waste gas is mixed with the inert gas in the inert gas passage first, the activity of the waste gas is reduced, the mixed gas passes through the through hole to the bottom of the flange, the reaction gas passes through the reaction gas passage and enters the bottom of the flange, and the reaction treatment of the waste gas is performed at the bottom of the flange. BRIEF DESCRIPTION OF DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the application or prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are some embodiments of the application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0027] Figure 1 It is a schematic diagram of the overall structure of the torch mounting flange provided by the application.

[0028] Figure 2 It is a partial schematic diagram of the torch mounting flange provided by the application.

[0029] Figure 3 is a top view of the flare mounting flange provided by the present application;

[0030] Figure 4 is a bottom view of the flare mounting flange provided by the present application;

[0031] Figure 5 is a left view of the flare mounting flange provided by the present application;

[0032] Reference signs: 1, flange body; 11, through hole; 12, inert gas passage; 121, inert gas inlet; 122, inert gas outlet; 13, reaction gas passage; 131, reaction gas inlet; 132, reaction gas outlet; 2, exhaust pipe; 21, exhaust passage; 22, dredging piece; 221, scraper; 222, dredging rod; 23, main pipeline; 24, branch pipeline; 14, detection mechanism; 141, detection port; 15, first flange plate; 151, first groove; 152, second groove; 16, second flange plate; 17, third flange plate; 18, mounting hole. DETAILED DESCRIPTION

[0033] In order to make the objects, technical solutions and advantages of the present application clearer, the technical solutions in the present application will be described clearly and completely below in combination with the drawings in the present application. Obviously, the described embodiments are some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application.

[0034] The present application provides a flare mounting flange, as shown in the drawings, Figures 1 to 5 The flare mounting flange includes a flange body 1 and an exhaust pipe 2. The flange body 1 is provided with a through hole 11, an inert gas passage 12 and a reaction gas passage 13. The inert gas passage 12 and the reaction gas passage 13 are respectively provided with an inert gas inlet 121 and a reaction gas inlet 131 on a first side of the flange body 1. The through hole 11 extends from the first side to a second side of the flange body 1. The inert gas passage 12 is provided with an inert gas outlet 122 in the through hole 11. The reaction gas passage 13 is provided with a reaction gas outlet 132 on the second side of the flange body 1. One end of the exhaust pipe 2 is arranged in the through hole 11. The exhaust pipe 2 is located on the first side of the flange body 1. The exhaust pipe 2 is provided with an exhaust passage 21. The exhaust passage 21 communicates with the inert gas outlet 122 and the second side of the flange body 1 through the through hole 11.

[0035] The torch mounting flange provided by the embodiment can avoid the reaction of the waste gas and air in the waste gas channel 21 or the pipe opening of the waste gas pipe 2 to generate waste material, dust or acidic substances to corrode the pipeline. Accordingly, after the waste gas is mixed with the inert gas, the reaction gas enters the reaction gas channel 13 through the reaction gas inlet 131, is discharged from the reaction gas outlet 132 on the second side of the flange body 1, and the discharged reaction gas is gathered on the second side of the flange body 1. Finally, the reaction gas can contact the mixed gas (waste gas and inert gas) on the second side of the flange body 1, so that the waste gas can react with the reaction gas at the bottom of the flange body 1, and the toxic and harmful substances in the waste gas are converted accordingly after the reaction, so that the treatment of the waste gas can be completed.

[0036] Among them, according to the different types of waste gas, the inert gas can be selected from nitrogen, argon or other rare gases.

[0037] The torch mounting flange and the waste gas treatment device provided by the application can make the waste gas, the inert gas and the reaction gas pass through the through hole 11 to reach the designated position for reaction, and can make the waste gas first pass through the waste gas channel 21 to enter the second side of the flange body 1 and mix with the inert gas to reduce the activity of the waste gas, and after the mixing is completed, the reaction gas in the reaction gas channel 13 is gathered on the second side of the flange body 1 through the through hole 11, and the reaction treatment is carried out on the second side of the flange body 1, so as to complete the treatment of the waste gas. The torch mounting flange and the waste gas treatment device provided by the application can first mix the waste gas with the inert gas to reduce the activity of the waste gas, prevent the waste gas from reacting in the waste gas channel 21 or the pipe opening to cause blockage, reduce the probability of explosion, and make the waste gas treatment process more stable and safe.

[0038] Among them, the number and position of the through hole 11 can be replaced according to the different types of waste gas. When the waste gas is more and the concentration is higher, the diameter of the through hole 11 can be increased to facilitate faster and safer waste gas treatment; when the waste gas is less and the concentration is lower, a smaller diameter through hole 11 is selected to save cost.

[0039] In an embodiment provided by the application, as Figures 1 to 5As shown, to prevent explosions caused by blockages inside the exhaust pipe, a clearing device 22 is provided on the exhaust pipe 2. The clearing device 22 is slidably mounted on the exhaust pipe 2 and has a first state and a second state. The clearing device 22 can switch freely between the first state and the second state depending on the condition of the exhaust pipe 2. When there is a large amount of dust or other blockages in the exhaust pipe 2, the clearing device 22 is in the first state, in which the clearing device 22 slides at least partially into the exhaust passage 21; when there is a small amount of blockage or no blockage in the exhaust pipe 2, the dust clearing device 22 is adjusted to the second state, in which the clearing device 22 slides outside the exhaust passage 21.

[0040] It should be noted that, as Figure 1 and Figure 2 As shown, the exhaust pipe 2 is a Y-shaped pipe, which includes a main pipe 23 and a branch pipe 24. The main pipe 23 is a straight pipe. The branch pipe 24 forms a 45° angle with the main pipe 23. The branch pipe 24 is a corrugated pipe. The corrugated pipe has a thin wall and high sensitivity. It can compensate for and absorb the axial, lateral and angular thermal deformation of the pipe. It can also absorb equipment vibration and reduce the impact of equipment vibration on the pipe. During operation, the main pipe 23 is connected to the branch pipe 24. Both the main pipe 23 and the branch pipe 24 have exhaust gas passages 21. The main pipe 23 has an opening that communicates with the exhaust gas passage 21. A slidable unblocking component 22 is slidably installed at the opening. The unblocking component 22 switches between a first state and a second state according to the specific situation in the exhaust gas passage 21. When there is a large amount of dust or other blockages in the exhaust gas passage 21, the unblocking component 22 is in the first state. At this time, the unblocking component 22 slides at least partially into the exhaust gas passage 21 through the opening to push the blockages out of the exhaust gas passage 21. When there are a small amount of blockages or no blockages in the exhaust gas pipe 21, the unblocking component 22 is in the second state. At this time, the unblocking component 22 slides to the opening.

[0041] Furthermore, such as Figure 2 As shown, the unblocking component 22 includes a scraper 221 and a unblocking rod 222. The scraper 221 is located at one end of the unblocking rod 222, which drives the scraper 221 to remove blockages in the exhaust gas passage 21. The unblocking rod 222 is a cylindrical rod, the length of which is less than the length of the main pipe 23. The scraper 221 is a flat scraper, which can quickly clean dirt and blockages in the pipe.

[0042] In one embodiment provided in this application, such as Figure 1 and Figure 2As shown, the torch mounting flange further comprises a driving mechanism. In the embodiment of the present application, the driving mechanism is a cylinder. When there is a large amount of dust or other blockage in the waste gas passage 21, the dredging member 22 is in the first state, and the driving mechanism drives the scraper 221 to slide at least partially into the waste gas passage 21 to clean the blockage in the waste gas passage 21. When there is a small amount of blockage or no blockage in the waste gas passage 21, the dredging member 22 is in the second state, and the driving mechanism drives the scraper 221 to slide out of the waste gas passage 21.

[0043] In one embodiment provided in the present application, as shown in Figures 1 to 5 As shown, the torch mounting flange further comprises a detection mechanism 14, and the waste gas pipe 2 is provided with a detection port 141, and the detection mechanism 14 communicates with the detection port 141. In the process of detecting the state change of the waste gas pipe 2 by the detection mechanism 14, the detection mechanism 14 is used to control the scraper 221 to switch between the first state and the second state through the driving mechanism. The connection between the driving mechanism and the scraper 221 is threaded connection, which makes the installation and disassembly more simple and convenient. Among them, the corrugated pipe is used at the inlet of the waste gas pipe 2, and the detection port 141 is arranged at the upper end of the corrugated pipe. The use of the corrugated pipe has the function of expansion and contraction, and can also facilitate the compensation installation with the waste gas pipe. The detection port 141 is a sleeve detection port, which can be used to detect the temperature inside the waste gas passage 21. When the temperature in the waste gas passage 21 is much higher than the normal temperature, the dredging rod 222 drives the scraper 221 to move, and through the repeated up-down movement, the driving mechanism controls the scraper 221 to switch between the first state and the second state, to clean the blockage in the waste gas passage 21, until the temperature tends to be normal, the dredging rod 222 drives the scraper 221 to stop moving.

[0044] In another embodiment, the detection port 141 can also be used to detect the pressure inside the waste gas passage 21. When the pressure inside the waste gas passage 21 is much higher than the normal value, the scraper 221 moves up and down in the waste gas passage 21 under the driving force of the dredging rod 222, until the pressure stabilizes at the normal value, and the scraper 221 stops moving under the action of the dredging rod 222. Similarly, the detection port 141 can also be used to detect the flow rate inside the waste gas passage 21. When the flow rate in the waste gas passage 21 is smaller than the normal value, the scraper 221 moves up and down repeatedly in the waste gas passage 21 under the driving force of the dredging rod 222, until the flow rate in the waste gas passage 21 approaches the normal value, at which time the scraper 221 stops moving under the driving of the dredging member 22. By providing the detection port 141, the accidents such as explosion caused by blockage in the waste gas passage 21 can be greatly reduced.

[0045] The detection port 141 can also be arranged at other positions, for example, the detection port can also be arranged at the edge of the through hole 11, and is also used for detecting the pressure change or flow change in the exhaust gas passage 21, and the scraper 221 cleans the blockage in the exhaust gas passage 21 under the driving force of the dredging piece 22. In order to save manpower, the scraper 221 can also be arranged to clean periodically, and a mechanical timing switch is arranged at the position where the detection port 141 is connected with the dredging rod 222, and a fixed time is set, so that the dredging piece 22 is driven to act periodically under the action of the timing switch, and the blockage in the exhaust gas passage 21 is cleaned periodically.

[0046] In an embodiment provided by the present application, as shown in Figures 1 to 2 At least one of the inert gas passage 12 and the reaction gas passage 13 is filled with a heat insulation gas guiding layer. For example, the heat insulation gas guiding layer is arranged in the inert gas passage 12, or the heat insulation gas guiding layer is arranged in the reaction gas passage 13, or the heat insulation gas guiding layer is arranged in both the reaction gas passage 13 and the inert gas passage 12.

[0047] In the embodiment of the present application, the material of the heat insulation gas guiding layer is heat insulation cotton, which has the functions of cooling the surface of the flange body 1 and dispersing gas. According to the different temperatures, one layer or two layers of the heat insulation cotton can be arranged. If the temperature of the reaction gas passage 13 is relatively high, the heat insulation cotton is arranged in both the reaction gas passage 13 and the inert gas passage 12. If the temperature is relatively low, one layer of the heat insulation cotton is arranged in at least one of the reaction gas passage 13 and the inert gas passage 12.

[0048] In an embodiment provided by the present application, as shown in Figures 1 to 5 The exhaust gas pipe 2 is provided with a plurality of exhaust gas pipes 2, and in the embodiment of the present application, the exhaust gas pipe 2 is provided with six exhaust gas pipes 2, and the inlets of the six exhaust gas pipes 2 are consistent. The flange body 1 is provided with a plurality of through holes 11, and the through holes 11 are arranged one by one corresponding to the exhaust gas pipes 2, and the inert gas passage 12 is provided with an inert gas outlet 122 in each through hole 11.

[0049] When multiple exhaust pipes 2 are provided, different exhaust gases can be introduced into each exhaust pipe 2. Due to the different types of exhaust gases, the flow rates of the exhaust pipes 2 can be adjusted accordingly. Different exhaust gases pass through the corresponding exhaust passages 21 and the through holes 11 in sequence to enter the second side of the flange body. At the same time, according to the different types of exhaust gases, the corresponding inert gases are introduced through the inert gas inlets 121. The inert gases pass through the inert gas passages 12 and are discharged through the inert gas outlets 122. The inert gases discharged through the inert gas outlets 122 mix with the exhaust gases through the through holes 11. The mixed gases then enter the second side of the flange body 1 through the through holes 11, so as to avoid the reaction of the exhaust gases with air in the exhaust passages 21 or at the openings of the exhaust pipes 2, which may produce waste materials, dust, or acidic substances that corrode the pipeline. Accordingly, after the exhaust gases mix with the inert gases, the reaction gases enter the reaction gas passages 13 through the reaction gas inlets 131. The reaction gases are discharged through the reaction gas outlets 132 on the second side of the flange body 1. The discharged reaction gases gather on the second side of the flange body 1. Finally, the reaction gases and the mixed gases (exhaust gases and inert gases) can contact on the second side of the flange body 1. Different types of exhaust gases can react with the corresponding reaction gases at the bottom of the flange body 1. After the reaction, the toxic and harmful substances in the exhaust gases are converted accordingly, so that the treatment of the exhaust gases can be completed.

[0050] In an embodiment provided in the present application, as shown in Figures 1 to 5 The flange body 1 includes, from top to bottom, a first flange plate 15, a second flange plate 16, and a third flange plate 17. The inert gas passages 12 are formed between the first flange plate 15 and the second flange plate 16. The inert gases in the inert gas passages 12 flow out of the inert gas outlets 122 through Y-shaped pipes, which can slow down the reaction of the exhaust gases and prevent the reaction at the installation flange outlet, thereby avoiding the accumulation of dust generated by the reaction at the outlet, which may block the outlet and protect the torch installation flange. The reaction gas passages 13 are formed between the second flange plate 16 and the third flange plate 17. The through holes 11 pass through the first flange plate 15, the second flange plate 16, and the third flange plate 17 in sequence. The first flange plate 15 is provided with the inert gas inlets 121 and the reaction gas inlets 131. The third flange plate 17 is provided with the reaction gas outlets 132. According to the different types of exhaust gases, the reaction gases can be compressed air or oxygen. The reaction gases enter the reaction gas passages 13 through the reaction gas inlets 131. After the inert gases mix with the exhaust gases, the reaction gas passages 13 are opened. The reaction gases discharged through the reaction gas outlets 132 enter the second side of the flange body 1 through the through holes 11 to react with the mixed gases, so as to achieve the purpose of combustion treatment of the exhaust gases.

[0051] In an embodiment provided in the present application, as shown in Figures 1 to 5As shown, in order to adjust the flow, temperature and pressure of the exhaust gas, inert gas and reaction gas to make the gas more uniform through the through hole 11, the first flange 15 or the second flange 16 is provided with a first groove 151, and the first groove 151 forms an inert gas channel 12 between the first flange 15 and the second flange 16; the second flange 16 or the third flange 17 is provided with a second groove 152, and the second groove 152 forms a reaction gas channel 13 between the second flange 16 and the third flange 17, wherein the first groove 151 is used for uniform gas of the inert gas and the exhaust gas, and the second groove 152 is used for uniform gas of the mixed gas and the reaction gas.

[0052] In another aspect, the present application also provides a kind of exhaust gas treatment device, such as Figures 1 to 5 Figures 1 to 5 As shown, including, above-mentioned torch installation flange, flange main body 1 is provided with installation hole 18, installation hole 18 is extended from the first side to the second side of flange main body 1;Heat source, the heating end of heat source is arranged on the second side of flange main body 1 through installation hole 18, wherein, the torch installation flange provided by the present application can install different heat sources in the middle according to different exhaust gas, which includes but is not limited to plasma torch, methane combustion torch, electric heating rod and the like.The flange main body 1 is also provided with left and right fixing plates, and the fixing between the fixing plate and the flange main body 1 is fixed by screw, which is more convenient to install and disassemble than welding fixation, and the left and right fixing plates arranged on the flange main body 1 can converge the gas, which is convenient for treating the exhaust gas.

[0053] The torch installation flange provided by the embodiment in the working process, since a large amount of exhaust gas will be generated in the process of preparing semiconductor, the exhaust gas can enter the second side of the flange main body through the exhaust gas channel 21 and the through hole 11, at the same time, the inert gas is introduced through the inert gas inlet 121, the inert gas passes through the inert gas channel 12 and is discharged through the inert gas outlet 122, the inert gas discharged through the inert gas outlet 122 mixes with the exhaust gas through the through hole 11, and the mixed gas enters the second side of the flange main body 1 through the through hole 11, so as to avoid the reaction of the exhaust gas and air in the exhaust gas channel 21 or the exhaust gas pipe 2, and the generation of waste, dust or acidic substances corroding the pipeline. Accordingly, after the exhaust gas and the inert gas are mixed, the reaction gas enters the reaction gas channel 13 through the reaction gas inlet 131, is discharged through the reaction gas outlet 132 on the second side of the flange main body 1, and the discharged reaction gas converges on the second side of the flange main body 1. Finally, the reaction gas and the mixed gas (exhaust gas and inert gas) can contact on the second side of the flange main body 1, so that the exhaust gas can react with the reaction gas at the bottom of the flange main body 1, the toxic and harmful substances in the exhaust gas are converted correspondingly after the reaction, and the treatment of the exhaust gas can be completed.

[0054] In other embodiments, the application can also be provided with a machine vision monitoring device at the edge of the exhaust passage 21, which mainly consists of a camera and a processor. The camera captures the initial situation in the exhaust passage 21, and transmits the collected pictures to the processor. When the camera collects real-time photos in the exhaust passage 21, the processor compares the collected pictures with the initial situation data. If the passage is found to be blocked, the processor sends a command, and the drive mechanism receives the first command from the processor, then starts the drive mechanism, and the drive mechanism drives the scraper 221 to clean the exhaust passage 21. When the blockage in the exhaust passage 21 is cleaned, the processor sends a second command, and the drive mechanism stops working.

[0055] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A torch mounting flange, characterized in that, include: The flange body has a through hole, an inert gas channel, and a reactive gas channel. The inert gas channel and the reactive gas channel are respectively provided with an inert gas inlet and a reactive gas inlet on the first side of the flange body. The through hole extends from the first side of the flange body to the second side. The inert gas channel is provided with an inert gas outlet in the through hole, and the reactive gas channel is provided with a reactive gas outlet on the second side of the flange body. An exhaust gas pipe has one end inserted into the through hole and located on the first side of the flange body. An exhaust gas passage is provided in the exhaust gas pipe, and the exhaust gas passage is connected to the inert gas outlet and the second side of the flange body through the through hole. The flange body includes: a first flange, a second flange, and a third flange stacked sequentially from top to bottom; An inert gas passage is formed between the first flange and the second flange, and a reaction gas passage is formed between the second flange and the third flange. The through hole passes through the first flange, the second flange and the third flange in sequence. The first flange is provided with an inert gas inlet and a reaction gas inlet, and the third flange is provided with a reaction gas outlet. The exhaust pipe is provided with a draining device, which is slidably disposed on the exhaust pipe and has a first state and a second state. In the first state, the unblocking component slides at least partially into the exhaust gas passage; In the second state, the unblocking component slides outside the exhaust gas passage; The exhaust pipe is a Y-shaped pipe, which includes a main pipe and a branch pipe. The main pipe is connected to the branch pipe, and the exhaust gas passage is constructed in the main pipe and the branch pipe. The main pipe is provided with an opening that communicates with the exhaust gas passage, and the unblocking component is slidably disposed at the opening. In the first state, the unblocking component slides at least partially into the exhaust gas passage through the opening; in the second state, the unblocking component slides to the opening.

2. The torch mounting flange according to claim 1, characterized in that, The torch mounting flange further includes a drive mechanism; the unblocking components include a scraper and an unblocking rod. In the first state, the drive mechanism drives the scraper to slide at least partially into the exhaust gas passage; in the second state, the drive mechanism drives the scraper to slide outside the exhaust gas passage.

3. The torch mounting flange according to claim 2, characterized in that, The torch mounting flange also includes: a detection mechanism; the exhaust pipe is provided with a detection port, and the detection mechanism is connected to the detection port; During the process of the detection mechanism detecting a change in the state of the exhaust pipe, the detection mechanism is used to control the scraper to switch between the first state and the second state through the drive mechanism.

4. The torch mounting flange according to claim 1, characterized in that, At least one of the inert gas channel and the reactive gas channel is filled with a heat-insulating gas-conducting layer.

5. The torch mounting flange according to claim 1, characterized in that, The exhaust gas pipe is provided in multiple ways, and the flange body is provided with multiple through holes. Each through hole corresponds to one of the exhaust gas pipes, and the inert gas channel is provided with an inert gas outlet in each of the through holes.

6. The torch mounting flange according to claim 1, characterized in that, The first flange or the second flange is provided with a first groove, which forms the inert gas passage between the first flange and the second flange; the second flange or the third flange is provided with a second groove, which forms the reactive gas passage between the second flange and the third flange.

7. A waste gas treatment device, characterized in that, include: The flare mounting flange is provided with any one of claims 1-6; the flange body is provided with mounting holes extending from a first side to a second side of the flange body; A heat source, the heating end of which passes through the mounting hole and is disposed on the second side of the flange body.

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