An integrated circuit overlay error measurement method based on information fusion

By combining information fusion technology with multiple overlay error extraction methods, the problem of low reliability of overlay error measurement results was solved, and higher reliability and accuracy of overlay error measurement were achieved.

CN115981107BActive Publication Date: 2026-02-06NANJING UNIV OF AERONAUTICS & ASTRONAUTICS +1
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Patent Information

Application Number
CN202211641343.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-12-20
Publication Date
2026-02-06
Estimated Expiration
2042-12-20

AI Technical Summary

Technical Problem

In the existing technology, the reliability of the overlay error measurement results is low, and the influence of different overlay error extraction methods is not effectively integrated, resulting in insufficient reliability of the measurement results.

Method used

An information fusion-based approach is adopted, combining parametric modeling and electromagnetic field calculation. By combining various overlay error extraction methods and information fusion technology, the overlay error measurement results are optimized, including local and global fusion processing. Evidence theory and neural networks are used to improve the reliability of the measurement results.

Benefits of technology

While reducing the impact of extreme anomalies, it improves the reliability and accuracy of overlay error measurement. Through the fusion of multiple methods, it achieves higher reliability in overlay error measurement.

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Abstract

The application provides an integrated circuit overlay error measurement method based on information fusion, which is characterized in that, for a given diffraction or scattering type overlay error measurement mark, model-based overlay error measurement (MBO), experience-based overlay error measurement (EBO), model / model hybrid measurement (MBO+MBO) and model / experience hybrid measurement (EBO+MBO) are used to extract overlay error values. Based on the calculation of electromagnetic field simulation means, the measurement distribution and its uncertainty of different methods are estimated, the prior knowledge is provided to eliminate abnormal measurement results, and the fusion decision basis is provided. Further, the different measurement extraction calculation results obtained by the actual measurement signal are fused by using a hierarchical information fusion method to obtain the final overlay error result. The method provided by the application can realize high-credibility extraction and calculation of overlay error, and is suitable for overlay error measurement under non-ideal measurement conditions.
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