Method and device for manufacturing suspension for magnetic disk device

Abstract

In a method for manufacturing a suspension for a magnetic disk device according to one embodiment, a first position at which the outrigger of a flexure of the suspension is bent in a thickness direction to form a curved portion is determined by irradiating a first laser onto the outrigger. When the outrigger forms the curved portion at the first position, predicted values of the pitch angle and roll angle of the tongue-shaped member on the flexure are calculated. A second position at which a second laser is applied to the outrigger so as to bring the predicted values close to a predetermined target value is determined. While the first position is irradiated with the first laser to form the curved portion, the second position is irradiated with a second laser.

Description

[0001] Cross-reference (reference to related applications)

[0002] This application claims priority based on Japanese patent application No. 2021-171800 filed on October 20, 2021, the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present invention relates to a method and apparatus for manufacturing a suspension for a magnetic disk device such as a hard disk drive. Background Art

[0004] Hard disk drives (HDDs) are used in information processing devices such as personal computers. They consist of a magnetic disk that rotates around a spindle and a carriage that pivots around a pivot. The carriage has an actuator arm and is rotated about the pivot in the direction of the magnetic disk's track width by a positioning motor such as a voice coil motor.

[0005] The actuator arm is provided with a suspension for a magnetic disk device (hereinafter referred to as the suspension). The suspension includes a load beam and a flexure superimposed on the load beam. A slider constituting a magnetic head is provided on a universal joint portion formed near the front end of the flexure. The slider has an element (converter) for accessing, such as reading or writing data. These load beams, flexures, and sliders constitute a magnetic head universal joint assembly.

[0006] The universal joint assembly comprises a tongue-shaped member for receiving a slider and a pair of outriggers formed on either side of the tongue. These outriggers are arranged to protrude outward from the flexure. Each outrigger is secured to the load beam near its longitudinal end, for example, by laser welding. Each outrigger is spring-like in its thickness, playing a crucial role in ensuring universal joint motion of the tongue.

[0007] To increase disk recording density, the head gimbal assembly needs to be made more compact, and the slider needs to be positioned with greater precision on the disk's recording surface. Therefore, it is necessary to ensure the required gimbal motion of the head gimbal assembly while minimizing flexure vibration. As described in JP2010-866630A, it is known to locally dispose damping material on the gimbal to suppress flexure vibration.

[0008] As the disk rotates, the slider floats above the disk at a predetermined interval. To maintain a stable slider posture during this period, high precision is required for the pitch and roll angles of the tongue or slider. For example, JP2007-66427A discloses a technique for correcting the pitch and roll angles to appropriate values by irradiating a flexure with laser light.

[0009] By attaching damping material to the flexure, the vibration of the flexure can be suppressed, but the rigidity of the flexure will change, which will have an adverse effect on the movement of the universal joint.

[0010] Furthermore, when measures such as attaching a damping material or correcting the pitch angle and the roll angle are taken to suppress vibration of the flexure, the number of steps required to manufacture the suspension needs to increase, which may result in an increase in the manufacturing cost of the suspension. Summary of the Invention

[0011] An object of the present invention is to provide a manufacturing method and a manufacturing apparatus capable of effectively suppressing vibration of a flexure and efficiently manufacturing a suspension.

[0012] In a method for manufacturing a suspension for a magnetic disk device according to one embodiment, a first position is determined where the outrigger is bent in the thickness direction to form a curved portion by applying a first laser to an outrigger of a flexure of the suspension. When the outrigger forms the curved portion at the first position, predicted values of the pitch angle and roll angle of the tongue-shaped member of the flexure are calculated. A second position of the outrigger is determined where a second laser is applied to bring the predicted value close to a preset target value. While the first position is irradiated with the first laser to form the curved portion, the second position is irradiated with a second laser.

[0013] Initial values of the pitch angle and the roll angle of the suspension are measured before irradiation with the first laser and the second laser, and the predicted value is calculated based on the predicted changes in the pitch angle and the roll angle before and after the bending portion is formed at the first position and the initial values.

[0014] The predicted change amount may be determined by measuring the pitch angle and the roll angle of a plurality of samples of the suspension before and after forming a bent portion.

[0015] The second position at which the predicted value is brought close to the target value can be determined by using correction data defining a relationship between the pitch angle and the roll angle that deviate from the target value and the second position at which these pitch angles and roll angles are brought close to the target value.

[0016] For a specific vibration mode, the first gain of the flexure is measured when the bending portion is not formed in the outrigger, and for a vibration mode, the second gain of the flexure is measured when the bending portion is formed in each of a plurality of positions in the outrigger, and the position at which the second gain less than the first gain is obtained from the plurality of positions is determined as the first position.

[0017] The first position may be determined by a first region of the outrigger, and the second position may be determined by a second region of the outrigger that is different from the first region.

[0018] The load beam and flexure in the suspension may be fixed at a first fixing portion and a second fixing portion closer to the front end of the load beam than the first fixing portion. Furthermore, the first region may be located between a recess in the load beam and the first fixing portion in the longitudinal direction of the load beam.

[0019] According to one embodiment, a manufacturing apparatus for a magnetic disk device suspension includes a laser irradiation device for irradiating an outrigger of a flexure in the suspension with a first laser beam and a second laser beam, and a controller for controlling the laser irradiation device. The controller is configured to calculate predicted values of the pitch and roll angles of the tongue when a curved portion, curved in the thickness direction, is formed at a first position of the outrigger, and to determine a second position of the outrigger to irradiate the second laser beam so that the predicted values approach a preset target value. The laser irradiation device irradiates the first position with the first laser beam to form the curved portion while simultaneously irradiating the second position with the second laser beam.

[0020] The manufacturing apparatus may further include an angle measuring device that measures initial values of the pitch angle and roll angle of the suspension before irradiation with the first laser beam and the second laser beam. In this case, the controller may calculate the predicted values based on predicted changes in the pitch angle and roll angle before and after forming the bent portion at the first position and the initial values.

[0021] The controller can determine the second position that brings the predicted value close to the target value by using correction data, and the correction data defines the relationship between the pitch angle and the roll angle that deviate from the target value and the second position that brings these pitch angles and roll angles close to the target value.

[0022] According to the present invention, it is possible to provide a manufacturing method and a manufacturing apparatus that can effectively suppress vibration of a flexure and efficiently manufacture a suspension. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A side view showing an example of a magnetic disk device according to one embodiment.

[0024] Figure 2 yes Figure 1 A cross-sectional view of a magnetic disk device is shown.

[0025] Figure 3 It is a plan view of a suspension according to one embodiment.

[0026] Figure 4 is a plan view of a flexure according to one embodiment.

[0027] Figure 5 FIG. 1 is a cross-sectional view of an outrigger and a load beam including a curved portion according to one embodiment.

[0028] Figure 6 Side views of a flexure vibrating together with a load beam in (a) the first torsional mode, (b) the second torsional mode, and (c) the third torsional mode.

[0029] Figure 7 Side views of flexures vibrating in (a) the first torsional mode, (b) the second torsional mode, and (c) the third torsional mode.

[0030] Figure 8 This is a schematic diagram showing a specific example of the formation position of the bent portion of the suspension according to one embodiment.

[0031] Figure 9 This is a flowchart showing an example of a procedure for determining the formation position of a bent portion of a suspension according to one embodiment.

[0032] Figure 10 This is a diagram showing an example of measurement results of the first gain and the second gain of a suspension according to one embodiment.

[0033] Figure 11 This is a schematic diagram of an example of a suspension manufacturing apparatus according to one embodiment.

[0034] Figure 12 A schematic diagram showing an example of the relationship between the first position and the second position of a suspension according to one embodiment.

[0035] Figure 13 A flowchart showing an example of the steps for determining predicted changes in pitch angle and roll angle of a suspension according to one embodiment.

[0036] Figure 14 A flowchart showing an example of a method for manufacturing a suspension according to one embodiment is shown.

[0037] Figure 15 A graph showing a comparative example of pitch and roll angle correction for a suspension having no curved portion.

[0038] Figure 16 Graph showing an embodiment of pitch and roll correction for a suspension having a flexure. Specific embodiments

[0039] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0040] Figure 1This is a schematic side view of a magnetic disk device (HDD) 1. The magnetic disk device 1 includes a housing 2, a plurality of magnetic disks 4 that rotate about a spindle 3, a carriage 6 that pivots about a pivot 5, and a positioning motor (voice coil motor) 7 for driving the carriage 6. The housing 2 is sealed with a cover (not shown).

[0041] Figure 2 FIG. 1 shows a schematic cross-sectional view of a portion of the magnetic disk device 1. Figure 1 and Figure 2 As shown, the carriage 6 includes a plurality of arms (carriage arms) 8. A suspension 10 is mounted at the front end of each arm 8. A slider 11 constituting a magnetic head is provided at the front end of each suspension 10. When the magnetic disk 4 rotates at high speed, air flows between the magnetic disk 4 and the slider 11 to form an air bearing.

[0042] exist Figure 2 In the example shown in FIG. 1 , the suspension 10 includes a base plate 12 . The base plate 12 is formed with a boss portion 12 a that is inserted into the hole 8 a of the arm 8 .

[0043] When the carriage 6 is rotated by the positioning motor 7 , the suspension 10 moves in the radial direction of the magnetic disk 4 , thereby moving the slider 11 to a desired track on the magnetic disk 4 .

[0044] Figure 3 This is a schematic plan view of the suspension 10 according to this embodiment. The suspension 10 includes a load beam 20 and a flexure 30. In this embodiment, mutually orthogonal width directions X, Y, and Z are defined as shown in the figure. Furthermore, a sway direction S is defined as indicated by the arc-shaped arrow near the front end of the load beam 20. Each of the load beam 20, flexure 30, and suspension 10 has an elongated shape in the longitudinal direction Y.

[0045] The longitudinal direction Y is parallel to the central axis AX of the suspension 10. The load beam 20 and the flexure 30 have shapes that are substantially line-symmetrical with respect to the central axis AX.

[0046] The load beam 20 is made of a metal material and is shaped like a flat plate. A tab 21 is provided at the front end of the load beam 20. The load beam 20 has a planar shape that tapers toward the tab 21. The load beam 20 is connected to Figure 2 The substrate 12 is shown.

[0047] The flexure 30 is superimposed on the load beam 20. The flexure 30 has a metal base 31, a wiring layer 32, and an insulating layer 33. The metal base 31 is made of a metal material such as stainless steel, and faces the load beam 20 for the most part.

[0048] The thickness of the metal base 31 is smaller than that of the load beam 20. The thickness of the metal base 31 is preferably 12 to 25 μm, and in one example, is 20 μm. The thickness of the load beam 20 is in one example, 30 μm.

[0049] The load beam 20 and the metal base 31 are secured together by a pair of first securing portions 22L and 22R and a second securing portion 23. Laser spot welding, for example, can be used to secure these securing portions 22L, 22R, and 23. The first securing portions 22L and 22R are arranged side by side in the width direction X. The distance from the first securing portion 22L to the central axis AX is the same as the distance from the first securing portion 22R to the central axis AX. The second securing portion 23 is positioned closer to the tab 21 (the front end of the load beam 20) than the first securing portions 22L and 22R. The second securing portion 23 is located on the central axis AX.

[0050] The wiring layer 32 includes a plurality of wirings made of a highly conductive metal material such as copper, etc. The insulating layer 33 includes a plurality of layers including a base layer for each wiring and a layer covering each wiring, etc. These layers can be made of, for example, polyimide.

[0051] Most of the wiring layer 32 and the insulating layer 33 are formed on the metal base 31. Figure 3 In the illustrated example, the wiring layer 32 and the insulating layer 33 include portions that are not supported by the metal base 31 , such as a pair of aerial wiring portions 34L, 34R.

[0052] Figure 4 This is a schematic plan view of the flexure 30 viewed from the metal base 31 side. Figure 3 and Figure 4 As shown, the metal base 31 has a front end portion 40 and a base end portion 41 spaced apart in the longitudinal direction Y. Figure 3 As shown, the front end portion 40 is located near the contact piece 21 and is fixed to the load beam 20 via the second fixing portion 23 .

[0053] The flexure 30 further includes a tongue 42, a first outrigger 50L, and a second outrigger 50R. In most of the tongue 42, an insulating layer 33 is laminated on the metal base 31. Figure 3 and Figure 4 In the example of FIG, the outriggers 50L and 50R are formed of the metal base 31. That is, the outriggers 50L and 50R do not include the wiring layer 32 and the insulating layer 33.

[0054] The tongue 42 is located between the front end 40 and the base end 41 in the longitudinal direction Y. The outriggers 50L and 50R are respectively arranged on both sides of the tongue 42 in the width direction. In other words, the tongue 42 is located between the first outrigger 50L and the second outrigger 50R in the width direction X.

[0055] exist Figure 4 In the example shown, the tongue-shaped member 42 includes a first portion 42a, a second portion 42b, and a connecting portion 42c connecting the first portion 42a and the second portion 42b. The second portion 42b is located between the first portion 42a and the front end portion 40 in the longitudinal direction Y. The width of the connecting portion 42c is smaller than the widths of the first portion 42a and the second portion 42b.

[0056] like Figure 3 As shown, the slider 11 is mounted on the tongue 42. The tongue 42 has a plurality of terminals 42d for electrically connecting to the slider 11. These terminals 42d are provided on the second portion 42b.

[0057] The slider 11 has components such as MR elements that can convert magnetic signals and electrical signals. These components can be used to access the magnetic disk 4, such as writing or reading data. The slider 11, load beam 20, flexure 30, etc. constitute a head gimbal assembly.

[0058] like Figure 3 As shown, a recess 24 is formed near the front end of the load beam 20, protruding toward the tongue 42. The recess 24 is located on the central axis AX. The front end of the recess 24 contacts the tongue 42. The tongue 42 can swing about the front end of the recess 24 to perform the desired gimbal motion. The tongue 42, outriggers 50L and 50R, recess 24, and the like constitute the gimbal portion 43.

[0059] The first outrigger 50L includes a base end portion 51, a base end arm 52, a front end arm 53, and a connecting portion 54. The base end portion 51 is fixed to the load beam 20 via the first fixing portion 22L. The base end arm 52 extends from the base end portion 51 to the side of the tongue-shaped member 42. Figure 3 and Figure 4 In the example shown, the base arm 52 is inclined in the longitudinal direction Y so that it is farther away from the central axis AX as it approaches the tongue 42. One end of the front arm 53 is connected to the base arm 52, and the other end is connected to the front end portion 40. The connecting portion 54 is bent into a U shape and connects the front end of the base arm 52 to the first portion 42a of the tongue 42.

[0060] The second outrigger 50R has a shape that is line-symmetrical with the first outrigger 50L with respect to the central axis AX. That is, the second outrigger 51R has a base end 51, a base end arm 52, a front end arm 53, and a connecting portion 54. The base end 51 is fixed to the load beam 20 via the first fixing portion 22R. Figure 3 and Figure 4 As shown, the front end arms 53 of the outriggers 50L and 50R are integrally connected to the front end portion 40 on the central axis AX between the front end portion 40 and the tongue 42 .

[0061] The first outrigger 50L is bendable between the first fixing portion 22L and the second fixing portion 23 in the thickness direction Z. Similarly, the second outrigger 50R is bendable between the first fixing portion 22R and the second fixing portion 23 in the thickness direction Z. The tongue 42 is elastically supported by the outriggers 50L and 50R and is capable of swinging about the recess 24 as a fulcrum.

[0062] like Figure 3 and 4 As shown, the gimbal portion 43 is equipped with a pair of microactuator elements 44L and 44R. These microactuator elements 44L and 44R are both made of piezoelectric material and are arranged on both sides of the slider 11 in the width direction X. In the length direction Y, one end of the microactuator element 44L is connected to the first portion 42a of the tongue-shaped member 42, and the other end is connected to the second portion 42b of the tongue-shaped member 42. Similarly, one end of the microactuator element 44R in the length direction Y is connected to the first portion 42a, and the other end is connected to the second portion 42b.

[0063] The microactuator elements 44L and 44R have the function of causing the tongue 42 to swing in the swing direction S. Figure 3 and Figure 4 In the example shown, restricting members 45L and 45R are provided to suppress excessive swinging of the tongue 42. One end of the restricting member 45L is connected to the second portion 42b of the tongue 42, and the other end is connected to the front end arm 53 of the first outrigger 50L. One end of the restricting member 45R is connected to the second portion 42b of the tongue 42, and the other end is connected to the front end arm 53 of the second outrigger 50R. The restricting members 45L and 45R can be formed, for example, from the insulating layer 33.

[0064] The outriggers 50L and 50R are bent in the thickness direction Z at the bent portions 55, respectively. Figure 3 and 4 In the example of FIG. 5 , the bent portions 55 are respectively located on the base end arms 52 of the outriggers 50L and 50R.

[0065] Figure 5 This is a cross-sectional view of the first outrigger 50L (base arm 52) and the load beam 20, including the curved portion 55. The base arm 52 has a first surface F1 facing the load beam 20 and a second surface F2 opposite the first surface F1. At the curved portion 55, the first surface F1 of the base arm 52 is convexly curved. In other words, the base arm 52 is curved so as to convexly face the load beam 20.

[0066] The bend angle θ of the base arm 52 at the bend 55 can have various values, for example, from 0.5° to 3°. For example, the bend angle θ corresponds to the angle at which the first surface F1 or the second surface F2 changes in the bend 55. The base arm 52 may have a curvature in the bend so as to bend smoothly.

[0067] The curved portion 55 is not necessarily Figure 5 As shown, it must be set at a position opposite to the load beam 20. Figure 3 As shown, the bent portion 55 may be provided at a portion of the base arm 52 that protrudes laterally from the load beam 20. Furthermore, the bent portion 55 may be provided at a position different from that of the base arm 52, as with the distal arm 53.

[0068] The position and shape of the bent portion 55 in the second outrigger 50R are the same as those of the first outrigger 50L. That is, the bent portion 55 of the first outrigger 50L and the bent portion 55 of the second outrigger 50R are provided at the same position in the longitudinal direction Y.

[0069] The bent portions 55 of the outriggers 50L and 50R serve to suppress vibration (resonance) of the flexure 30. Various vibration modes may occur in the flexure 30. Representative examples of the vibration modes include a 1st torsional mode, a 2nd torsional mode, and a 3rd torsional mode.

[0070] Figure 6 and 7 1 and 2 are side views of the flexure 30 vibrating in (a) the first torsional mode, (b) the second torsional mode, and (c) the third torsional mode. Figure 6 The load beam 20 and the flexure 30 are shown. Figure 7 The load beam 20 is not shown.

[0071] exist Figure 6 In the first torsion mode shown in (a) and 7 (a), the outriggers 50L and 50R are deformed into a shape having a top (peak or valley). Figure 6 In (a), the first outrigger 50L is bent so that the center portion of the front arm 53 protrudes downward.

[0072] exist Figure 6 In the secondary torsion mode shown in (b) and 7(b), the outriggers 50L and 50R are deformed into a shape having two tops (peaks or valleys). Figure 6 In (b), the first outrigger 50L is bent so that the center of the base arm 52 protrudes upward and the center of the front arm 53 protrudes downward.

[0073] exist Figure 6In the third torsion mode shown in (c) and 7(c), the outriggers 50L and 50R are deformed into a shape having three tops (peaks or valleys). Figure 6 In (c), the first outrigger 50L is bent so that the center of the base arm 52 protrudes upward, the vicinity of the connecting portion 54 protrudes downward, and the center of the front arm 53 protrudes upward.

[0074] The specific positions at which the bent portions 55 are formed in the outriggers 50L and 50R can be determined by comprehensively considering various vibration modes including the first to third torsional modes.

[0075] Figure 8 1 is a schematic diagram showing a specific example of the formation position of the bent portion 55 of the suspension 10 according to this embodiment. Figure 1 Starting from, (a) is a graph showing the cross-sectional shape of the first outrigger 50L, (b) is a graph showing the displacement (amplitude) of the first outrigger 50L in the secondary torsion mode, and (c) is a graph showing the displacement (amplitude) of the first outrigger 50L in the tertiary torsion mode.

[0076] exist Figure 8 In the graph (a), the horizontal axis is the position in the length direction Y [mm] with the origin O as the reference (zero), and the vertical axis is the height from the slider 11 toward the recess 24 (from the tongue 42 to the recess 24). The origin O corresponds to the suspension 10 and Figure 1 The center of the connection between the arms 8 is shown. In one example, the origin O is the center of the raised portion 12a on the base plate 12 described above.

[0077] exist Figure 8 The graph (a) shows curves for the comparative example EX0 and the examples EX1, EX2, and EX3. These curves represent the shape of the first outrigger 50L along the line CL of the first outrigger 50L. Specifically, the comparative example EX0 corresponds to the shape of the first outrigger 50L without the bent portion 55, while the examples EX1, EX2, and EX3 correspond to the shape of the first outrigger 50L with the bent portions 55 provided at different positions.

[0078] exist Figure 8 In the graph (a), the change (scale) on the vertical axis is greater than the change (scale) on the horizontal axis, allowing the cross-sectional shape of the first outrigger 50L to be more clearly understood. As can be seen from the graph of Comparative Example EX0, when the flexure 30 is attached to the load beam 20, the first outrigger 50L is bent so that the area near the tongue 42 forms the top, even without the bent portion 55.

[0079] exist Figure 8In the graphs (b) and (c), the horizontal axis is Figure 8 (a) The vertical axis represents the amplitude of the first outrigger 50L during vibration at the same position in the longitudinal direction Y. These graphs show the vibration profile in each mode.

[0080] Figure 8 The amplitude of the secondary torsional mode shown in (b) has a top P21 at the base arm 52 and a top P22 at the front arm 53 . Figure 8 The amplitude of the third torsional mode shown in (c) has a top P31 at the base arm 52 , a top P32 near the connection portion 54 , and a top P33 near the end of the front arm 53 .

[0081] like Figure 8 As shown by the multiple dotted lines in the figure, positions A, B, C, D, E, and F, arranged sequentially in the longitudinal direction Y, are defined. Position A passes through the center of the first fixing portions 22L and 22R. Position B corresponds to the position of the top P31 in the amplitude of the third-order torsional mode. Position C corresponds to the position of the top P21 in the amplitude of the second-order torsional mode. Position C also overlaps with the position where the aerial wiring portions 34L and 34R are bent in a protruding manner in the width direction X.

[0082] Position D corresponds to the top P32 of the third torsional mode. Position D also overlaps with the boundary between tongue 42 and connecting portion 54, and the boundary between base arm 52 and distal arm 53. Position E passes through recess 24. Position F passes through second fixing portion 23.

[0083] In the suspension 10 according to this embodiment, the inventors studied the formation positions of the bent portions 55, taking into account various vibration modes. As a result, they found that by providing the bent portions 55 of the outriggers 50L and 50R, respectively, between positions A and E, the vibration of the flexure 30 can be effectively suppressed. Furthermore, if the bent portions 55 are provided between positions B and D, the vibration suppression effect can be further enhanced.

[0084] exist Figure 8 In Examples EX1, EX2, and EX3 shown in (a), the curved portion 55 is provided between position B and position D, more specifically, between position C and position D. The curved portion 55 in Example EX2 is closer to position D than the curved portion 55 in Example EX1. In addition, the curved portion 55 in Example EX3 is closer to position D than the curved portion 55 in Example EX2.

[0085] An example of a procedure for determining the formation position of the bent portion 55 will be described below.

[0086] Figure 9This flowchart illustrates an example of a procedure for determining the formation position of the curved portion 55. First, for the suspension 10 without the curved portion 55, the gains of the flexure 30 (outriggers 50L and 50R) in various vibration modes are measured (step S11). Hereinafter, the gain measured in step S11 will be referred to as the first gain.

[0087] Next, the gains of the flexure 30 (outriggers 50L and 50R) in multiple vibration modes are measured for the suspension 10 having the curved portion 55 (step S12 ). The gain measured in step S12 will be referred to as the second gain.

[0088] The measurements in steps S11 and S12 can be performed, for example, by simulation using a three-dimensional model of the suspension 10. These measurements can also be performed on a sample of an actually manufactured suspension 10. The vibration modes whose gains are measured in steps S11 and S12 are, for example, the aforementioned first-order torsional mode, second-order torsional mode, and third-order torsional mode.

[0089] In this embodiment, as an example, a plurality of three-dimensional models or samples with different formation positions and bending angles of the bent portion 55 are used to measure the second gain of each of the primary, secondary, and tertiary twist modes.

[0090] Figure 10 This figure is a diagram showing an example of the measurement results of the first gain and the second gain of the suspension 10 according to this embodiment. The figure shows the first and second gains measured in (a) the first torsional mode, (b) the second torsional mode, and (c) the third torsional mode, respectively.

[0091] exist Figure 10 In (a), 10(b) and 10(c), the horizontal axis represents the formation position [mm] of the bent portion 55 in the longitudinal direction Y, and Figure 8 (a) The origin O is used as the reference (zero). The vertical axis is gain [dB]. Figure 10 The range of the formation position shown in (a), 10(b) and 10(c) is equivalent to Figure 8 The part between positions B and D.

[0092] exist Figure 10 In (a), 10(b) and 10(c), the squares superimposed on the vertical axis represent the first gain, the white circles represent the second gain when the bending angle θa is 1°, and the black circles represent the second gain when the bending angle θa is 2°.

[0093] The bending angle θa represents the angle of the bent portion 55 formed on the flexure 30 before being attached to the load beam 20. In the state where the flexure 30 is attached to the load beam 20, the outriggers 50L and 50R are as shown in FIG. Figure 8(a) is bent. Therefore, the bending angle θa is Figure 5 The bending angles θ shown vary only slightly.

[0094] from Figure 10 (a) It can be seen that in the first torsion mode, even if the formation position and bending angle θa of the bent portion 55 are changed, the second gain hardly changes. The second gain is substantially the same as the first gain at any formation position.

[0095] like Figure 10 As shown in (b), in the secondary torsional mode, the second gain is generally smaller than the first gain at bending angles θa of 1° and 2°. The second gain is minimum at a bending angle θa of 1°, near 9.1 mm. The second gain is minimum at a bending angle θa of 2°, near 8.8 mm.

[0096] like Figure 10 As shown in (c), in the third-order torsional mode, when the bending angle θa is 1°, the second gain is generally smaller than the first gain. However, when the bending angle θa is 2°, the second gain partially exceeds the first gain. The second gain is minimized at around 9.0 mm when the bending angle θa is 1°, and at around 9.2 mm when the bending angle θa is 2°.

[0097] exist Figure 9 After measuring the first and second gains in steps S11 and S12, the formation position and bending angle θa of the curved portion 55 in the actually manufactured suspension 10 are determined based on these gains (step S13). This determination can be made based on various conditions. In one example, the formation position and bending angle θa are selected so that the second gain is equal to or less than the first gain in at least one, and preferably most, of the vibration modes to be measured.

[0098] In obtaining Figure 10 In the cases of the first and second gains shown in (a), 10(b) and 10(c), since the fluctuation of the second gain is very small in the first torsion mode, the first torsion mode is not considered, and the formation position and bending angle θa are mainly determined based on the second gain in the second torsion mode and the third torsion mode.

[0099] For example, if it is necessary to specifically suppress vibration in the third-order torsional mode, the formation position can be determined at 9.0 mm, as indicated by the dashed box. Furthermore, at 9.0 mm, the second gain when the bending angle θa is 1° is smaller than the second gain when the bending angle θa is 2°, regardless of whether the flexure is in the second or third torsional mode. Therefore, the bending angle θa can be determined to be 1°. In this case, the second gain is smaller than the first gain even in the second-order torsional mode. Therefore, the bent portion 55 can reduce vibration of the flexure 30 in both the second and third torsional modes.

[0100] While the positions and bending angles θa of the bend 55 in the first, second, and third torsional modes have been considered above, the present invention is not limited thereto. When determining the positions and bending angles θa of the bend 55, other vibration modes of the flexure 30 may be considered in addition to or in place of these vibration modes. Furthermore, not only the vibration modes of the flexure 30 but also coupled modes with the vibration of the load beam 20 may be considered. The bending angle θa is not limited to 1° or 2°. In one example, the bending angle θa may be set within a range of 0.5° to 3°.

[0101] Next, the manufacturing device and manufacturing method of the suspension 10 will be described. In this embodiment, when manufacturing the suspension 10, Figure 3 The pitch angle θp and roll angle θr shown are corrected to appropriate values.

[0102] The pitch angle θp corresponds to the amount of twist from the reference posture of the slider 11 about an axis parallel to the width direction X. The roll angle θr corresponds to the amount of twist from the reference posture of the slider 11 about an axis parallel to the longitudinal direction Y (central axis AX).

[0103] The pitch angle θp can also be regarded as the amount of twisting about an axis parallel to the width direction X from the mounting surface of the tongue 42 on the slider 11. The roll angle θr can also be regarded as the amount of twisting about an axis parallel to the longitudinal direction Y from the mounting surface.

[0104] Figure 11 1 is a schematic diagram showing an example of a manufacturing apparatus 100 for the suspension 10. The manufacturing apparatus 100 includes a conveying device 110, an angle measuring device 120, a laser irradiation device 130, and a controller 140.

[0105] The transport device 110 includes a plurality of stages 111 and a transport line 112 for moving each stage 111 to a position corresponding to the angle measuring device 120 and the laser irradiation device 130. In the manufacturing process, the suspension 10 is fixed to each stage 111.

[0106] The angle measuring device 120 measures the pitch angle θp and roll angle θr of the suspension 10. While the measurement method is not particularly limited, in one example, the pitch angle θp and roll angle θr are detected based on reflected light from laser light irradiated from the mounting surface of the slider 11 of the tongue 42. Alternatively, the pitch angle θp and roll angle θr can be detected using an image obtained by irradiating the mounting surface.

[0107] The laser irradiation device 130 is used to irradiate the flexure 30 of the suspension 10 with a first laser beam to form the curved portion 55. Furthermore, the laser irradiation device 130 is used to irradiate the flexure 30 with a second laser beam to correct the pitch angle θp and roll angle θr. In this embodiment, both the outriggers 50L and 50R are irradiated with the first and second laser beams. While this embodiment assumes that the second laser beam is weaker than the first laser beam, the present invention is not limited to this example.

[0108] For example, the first laser beam and the second laser beam are irradiated onto the second surfaces F2 (see FIG. Figure 5 ). When the first laser is irradiated onto the second surface F2, the irradiated area is heated. Subsequently, as the irradiated area cools, the outriggers 50L and 50R deform so that the second surface F2 is concave (the first surface F1 is convex). The bending angles θ and θa can be adjusted by adjusting irradiation conditions such as the output power of the first laser and the irradiation time.

[0109] When the second surface F2 is irradiated with the second laser beam, the outriggers 50L and 50R are deformed in the same manner as with the first laser beam. However, since the second laser beam is weaker than the first laser beam, the amount of deformation of the outriggers 50L and 50R caused by the irradiation with the second laser beam is smaller than the amount of deformation of the outriggers 50L and 50R caused by the irradiation with the first laser beam.

[0110] The phrase "the second laser beam is weaker than the first laser beam" means, for example, that the output power of the second laser beam is less than the output power of the first laser beam, or that the irradiation time of the second laser beam is longer than the irradiation time of the first laser beam. In other words, the irradiation amount of the second laser beam can be said to be less than the irradiation amount of the first laser beam.

[0111] Hereinafter, the position where the outriggers 50L and 50R are irradiated with the first laser beam, that is, the position where the bent portion 55 is formed, is referred to as a first position, and the position where the outriggers 50L and 50R are irradiated with the second laser beam is referred to as a second position.

[0112] The controller 140 is used to control the conveying device 110, the angle measuring device 120, and the laser irradiation device 130. In this embodiment, the various processes performed by the controller 140 are implemented, for example, by a processor executing a computer program.

[0113] The controller 140 stores correction data 141. Correction data 141 defines a combination of pitch angle θp and roll angle θr that deviates from target values, and a second position (irradiation line) at which the second laser beam is irradiated to bring the pitch angle θp and roll angle θr closer to the target values. Multiple second positions can be defined for each combination of pitch angle θp and roll angle θr. Correction data 141 can be created, for example, through experiments and simulations using multiple samples of the suspension 10. For example, correction data 141 can be similar to the correction recipe table disclosed in JP2007-66427A.

[0114] Figure 12 This is a schematic diagram illustrating an example of the relationship between the first position and the second position. In this embodiment, both the first position and the second position are located on the outriggers 50L and 50R. The first position is selected from the first region R1 of the outriggers 50L and 50R. The second position is selected from the second region R2 of the outriggers 50L and 50R.

[0115] For example, the first region R1 is set between the recess 24 and the first fixing portions 22L and 22R along the longitudinal direction Y. Preferably, the first region R1 is set Figure 8 Between positions A and E or between positions B and D as shown. Figure 12 In the example of FIG. 5 , the first region R1 is provided on the base end arms 52 of the outriggers 50L and 50R, respectively.

[0116] For example, the second region R2 is provided in the outriggers 50L and 50R at positions different from those of the first region R1. Figure 12 In the example, the second region R2 is respectively provided on the portion of the base end arm 52 of the outriggers 50L, 50R that does not overlap with the first region R1, the connecting portion 54 of the outriggers 50L, 50R, and the front end arm 53 of the outriggers 50L, 50R.

[0117] It should be noted that the first region R1 and the second region R2 do not necessarily need to be provided in different portions. That is, the first region R1 and the second region R2 may at least partially overlap.

[0118] Before manufacturing the suspension 10, perform Figure 9 Steps S11, S12, and S13 are shown to determine the first position and bending angle θa for forming the curved portion 55. At least one of steps S11, S12, and S13 can be performed in the manufacturing apparatus 100. Furthermore, a process is performed to specify the predicted changes in the pitch angle θp and the roll angle θr before and after forming the curved portion 55.

[0119] Figure 13This flowchart illustrates an example of a process flow for determining predicted changes in pitch angle θp and roll angle θr. Each step shown here is performed by manufacturing apparatus 100, for example, on a sample of an actually manufactured suspension 10. However, each step may also be performed by a device different from manufacturing apparatus 100. Furthermore, each step may be simulated using a three-dimensional model of suspension 10.

[0120] exist Figure 13 In the flowchart, the pitch angle θp and roll angle θr of the suspension 10 are first measured before the bend 55 is formed (step S21). Specifically, the conveyor 110 conveys the suspension 10 before the bend 55 is formed to the measurement position of the angle measuring device 120, and the angle measuring device 120 measures the pitch angle θp and roll angle θr of the suspension 10. Hereinafter, the pitch angle θp and roll angle θr measured in step S21 are referred to as the initial pitch angle θp1 and initial roll angle θr1, respectively.

[0121] After step S21, the bent portion 55 is formed on the outriggers 50L and 50R (step S22). At this time, first, the transport device 110 transports the suspension 10 to the laser irradiation device 130. The laser irradiation device 130 irradiates the first laser beam to the outriggers 50L and 50R. Figure 9 The first position determined in step S13 is formed. Thus, the bent portion 55 is formed at the first position. The irradiation conditions such as the output power and irradiation time of the first laser beam are adjusted so as to obtain the bending angle θa determined in step S13.

[0122] After forming the curved portion 55, the pitch angle θp and roll angle θr of the suspension 10 are measured again (step S23). Specifically, the transport device 110 transports the suspension 10 to the measurement position of the angle measuring device 120, and the angle measuring device 120 measures the pitch angle θp and roll angle θr of the suspension 10. The pitch angle θp and roll angle θr measured in step S23 are hereinafter referred to as the pitch angle θp2 and the roll angle θr2, respectively.

[0123] Subsequently, the controller 140 determines the predicted changes Δθp and Δθr of the pitch angle θp and roll angle θr before and after the bend 55 is formed (step S24). For example, the predicted change Δθp corresponds to the difference between the initial pitch angle θp1 and the pitch angle θp2. The predicted change Δθr corresponds to the difference between the initial roll angle θr1 and the roll angle θr2.

[0124] Preferably, the predicted changes Δθp and Δθr are determined based on the results of executing steps S21, S22, and S23 for multiple samples of the suspension 10. For example, the predicted change Δθp may be the average of the changes in the pitch angle θp before and after the bend 55 is formed, measured for the multiple samples of the suspension 10. Similarly, the predicted change Δθr may be the average of the changes in the roll angle θr before and after the bend 55 is formed, measured for the multiple samples of the suspension 10.

[0125] Figure 14 1 is a flowchart showing an example of a method for manufacturing the suspension 10. First, a pre-process including manufacturing the load beam 20, manufacturing the flexure 30, and assembling the same is performed (step S31). At this time, the bend 55 is not formed in the suspension 10.

[0126] After step S31, the pitch angle θp and roll angle θr of the suspension 10 that has undergone step S31 are measured (step S32). Specifically, the conveying device 110 conveys the suspension 10, before the curved portion 55 is formed, to the measurement position of the angle measuring device 120, where the angle measuring device 120 measures the pitch angle θp and roll angle θr of the suspension 10. The pitch angle θp and roll angle θr measured in step S32 are hereinafter referred to as the initial pitch angle θp3 and initial roll angle θr3, respectively.

[0127] Next, the controller 140 calculates predicted values θp4 and θr4 for the pitch angle θp and roll angle θr when the bend 55 is formed in the suspension 10 (step S33). For example, the predicted value θp4 is obtained by adding the predicted change Δθp to the initial pitch angle θp3 (θp4 = θp3 + Δθp). The predicted value θr4 is obtained by adding the predicted change Δθr to the initial roll angle θr3 (θr4 = θr3 + Δθr).

[0128] Furthermore, the controller 140 determines a second position for irradiating the second laser beam (step S34 ). Specifically, the controller 140 uses the correction data 141 to determine a second position that can bring the predicted values θp4 and θr4 close to the target values of the pitch angle θp and the roll angle θr, respectively.

[0129] After step S34, the curved portion 55 is formed and the pitch angle θp and the roll angle θr are corrected (step S35). At this time, first, the transport device 110 transports the suspension 10 to the laser irradiation device 130. Then, the laser irradiation device 130 Figure 9 The first position determined in step S13 is irradiated with the first laser beam, and the second position determined in step S34 is irradiated with the second laser beam. Thus, a curved portion 55 is formed at the first position. Furthermore, the pitch angle θp and roll angle θr of the suspension 10 having the curved portion 55 are corrected to be closer to the target values.

[0130] After step S35, the pitch angle θp and roll angle θr of the suspension 10 are measured again (step S36). Specifically, the transport device 110 transports the suspension 10 to the measurement position of the angle measuring device 120, and the angle measuring device 120 measures the pitch angle θp and roll angle θr of the suspension 10. The pitch angle θp and roll angle θr measured in step S36 are hereinafter referred to as the final pitch angle θp5 and the final roll angle θr5, respectively.

[0131] The controller 140 determines the quality of the suspension 10 based on the final pitch angle θp5 and the final roll angle θr5 (step S37). For example, if the difference between the target pitch angle θp and the final pitch angle θp5 is equal to or less than a predetermined first tolerance, and the difference between the target roll angle θr and the final roll angle θr5 is equal to or less than a predetermined second tolerance, the controller 140 determines that the suspension 10 is a good product (OK in step S37). At this point, the manufacturing process for the suspension 10 proceeds to the next step (step S38).

[0132] On the other hand, if the difference between the target pitch angle θp and the final pitch angle θp5 exceeds the first allowable value, or if the difference between the target roll angle θr and the final roll angle θr5 exceeds the second allowable value, the controller 140 determines that the suspension 10 is defective (NG in step S37). In this case, the suspension 10 is discarded (step S39). In step S39, the operator can be notified of the defective suspension 10 through audio output or visual display.

[0133] In addition, in the above flowchart, when the difference between the target value of the pitch angle θp and the predicted value θp4 is below the first allowable value, and the difference between the target value of the roll angle θr and the predicted value θr4 is below the second allowable value, the second position can be determined and the second laser irradiation can be performed.

[0134] Figure 14 The steps shown in the flowchart are used to manufacture one suspension 10. When a plurality of suspensions 10 of the same design are manufactured, each step shown in the flowchart is repeated. The formation positions and bending angles of the outriggers 50L and 50R of these plurality of suspensions 10 are the same. That is, the irradiation position and irradiation conditions (output power, irradiation time, irradiation amount, etc.) of the first laser in step S35 performed when manufacturing each suspension 10 are the same. The irradiation position and irradiation conditions of the second laser for correcting the pitch angle θp and the roll angle θr are determined based on steps S32, S33, and S34 for each suspension 10. That is, the irradiation position and irradiation conditions of the second laser may be different for each suspension 10.

[0135] According to the embodiment described above, by providing the outriggers 50L and 50R with the curved portions 55, a suspension 10 can be obtained that effectively suppresses vibrations around the gimbal portion 43. By adjusting the vibration characteristics using the curved portions 55 of the outriggers 50L and 50R in this manner, the stiffness of the flexure 30 and the like is less likely to change than, for example, when damping material is attached to the flexure 30. This improves the vibration characteristics while minimizing the effects on gimbal motion. Furthermore, since additional components such as damping material and the installation process are unnecessary, increases in the manufacturing costs of the suspension 10 can be minimized.

[0136] Furthermore, in this embodiment, since the pitch angle θp and the roll angle θr are corrected by providing the curved portion 55 , the quality of the suspension 10 can be improved and the yield rate can be increased.

[0137] In this embodiment, the second irradiation position of the second laser is determined to correct the pitch angle θp and the roll angle θr before forming the curved portion 55. This allows irradiation of the first and second laser beams in substantially the same process, thereby improving the manufacturing efficiency of the suspension 10.

[0138] like Figure 12 As shown, if the first region R1 and the second region R2 are located in different regions on the outriggers 50L and 50R, the irradiation positions of the first laser and the second laser do not overlap. Therefore, changes in the pitch angle θp and roll angle θr of the suspension 10 after each laser irradiation can be suppressed.

[0139] Besides, various advantageous effects can be obtained from this embodiment.

[0140] [Example]

[0141] The inventors aimed at Figure 3 The suspension 10 of the illustrated shape verifies the effect of modifying the pitch angle θp and the roll angle θr using the method disclosed in this embodiment.

[0142] Figure 15 Graphs showing comparative examples of the correction of the pitch angle θp and the roll angle θr for the suspension 10 not having the curved portion 55 . Figure 16 Graphs showing an embodiment of correcting the pitch angle θp and the roll angle θr of the suspension 10 having the curved portion 55 .

[0143] exist Figure 15 In the comparative example of , the initial pitch angle θp3 and the initial roll angle θr3 measured in step S32 are used as input values of the correction data 141 to determine the second position. Figure 16 In the embodiment, Figure 14 The curved portion 55 is formed and the pitch angle θp and the roll angle θr are corrected in the same steps as in the flowchart.

[0144] exist Figure 15 and Figure 16 In the graphs, the vertical axis is the pitch angle θp [deg], and the horizontal axis is the roll angle θr [deg]. The squares in these graphs represent the pitch angle θp and roll angle θr measured for the suspension 10 before correction. The circles in these graphs represent the pitch angle θp and roll angle θr measured for the suspension 10 after correction.

[0145] exist Figure 15 and 16 The table shows the number of samples (N) before and after correction of the pitch angle θp and roll angle θr, the average value (Ave.) of the pitch angle θp and roll angle θr of each sample, the standard deviation (Stdev.) of the pitch angle θp and roll angle θr, and the processing capability index (Cpk).

[0146] In addition, in these comparative examples and embodiments, the target value of the pitch angle θp is 2.37°, and the target value of the roll angle θr is 0°.

[0147] exist Figure 15 In the comparison example, the average values of the pitch angle θp and roll angle θr before correction were both lower than the target values, with a large standard deviation. However, the average values of the pitch angle θp and roll angle θr after correction were much closer to the target values, with a very small standard deviation. The engineering capability index also improved significantly after correction.

[0148] Likewise, in Figure 16 In the examples, the average values of the pitch angle θp and roll angle θr before correction were both lower than the target values, and the standard deviations were large. Some samples deviated significantly from the target values. However, the average values of the pitch angle θp and roll angle θr after correction were much closer to the target values, and the standard deviations were also very small. Similar to the comparative example, the engineering capability index was significantly improved after correction.

[0149] Based on the above embodiments, it can be confirmed that if the method disclosed in this embodiment is used to form the curved portion 55 and correct the pitch angle θp and roll angle θr, it is possible to suppress quality deviation and significantly improve the yield rate.

[0150] In addition, the above embodiment does not limit the scope of the present invention to the configuration disclosed in this embodiment. The present invention can be implemented by modifying the configuration disclosed in this embodiment into various forms.

[0151] For example, in the above embodiment, if Figure 5 The example shown in the figure shows the outriggers 50L and 50R in which the first surface F1 is curved convexly at the curved portion 55. However, if the vibration characteristics are satisfactorily improved, the outriggers 50L and 50R may be curved so that the second surface F2 is convex.

[0152] In the above embodiment, only one bent portion 55 is provided on the outriggers 50L and 50R. However, if vibration characteristics are improved, the bent portion 55 may be provided at a plurality of locations on each of the outriggers 50L and 50R.

[0153] The second laser beam does not necessarily need to be irradiated onto the second surface F2 of the outriggers 50L and 50R, but may be irradiated onto the first surface F1. Figure 3 In the suspension 10 shown, most of the front end arm 53 does not overlap with the load beam 20. It is easy to irradiate the first surface F1 with a laser beam in such a portion.

[0154] Furthermore, in the above-mentioned embodiment, it is shown that Figure 9 The adjustment method shown in the figure determines the position and bend angle θa of the bent portion 55. As another example, the bend angle θa can be predetermined, and the position of the bent portion 55 at that angle can be determined by the adjustment method. In this case, in step S12, the second gain when the bent portion 55 is formed is measured at multiple locations on the outriggers 50L and 50R in various vibration modes. Furthermore, in step S13, the position where the second gain is smaller than the first gain in at least one of the multiple vibration modes is determined as the position where the bent portion 55 of the actually manufactured suspension 10 is formed.

[0155] Alternatively, the location where the bent portion 55 is to be formed can be predetermined, and the bending angle θa can be determined by using an adjustment method based on the assumption that the bent portion 55 will be formed at that location. In this case, in step S12, the second gain when the bent portion 55 is formed at that location is measured for a plurality of bending angles θa in a variety of vibration modes. Furthermore, in step S13, the angle at which the second gain, which is smaller than the first gain, is obtained in at least one vibration mode of the plurality of bending angles θa is determined as the bending angle of the bent portion 55 of the suspension 10 to be actually manufactured.

Claims

1. A method for manufacturing a suspension for a magnetic disk device comprising a load beam having a recess, a tongue-shaped member opposing the recess, and a flexure including an outrigger connected to the tongue-shaped member, By applying a first laser to the outrigger, a first position at which the outrigger is bent in the thickness direction to form a curved portion is determined; When the outrigger forms the bent portion at the first position, predicted values of the pitch angle and the roll angle of the tongue are calculated, In order to make the predicted value close to a preset target value, before forming the bent portion by irradiation with the first laser beam, a second position at which the second laser beam is applied to the outrigger is determined. The first position is irradiated with the first laser beam to form the curved portion, and the second position is irradiated with the second laser beam simultaneously.

2. The manufacturing method according to claim 1, measuring initial values of the pitch angle and the roll angle of the suspension before irradiation with the first laser beam and the second laser beam, The predicted value is calculated based on the predicted change amounts of the pitch angle and the roll angle before and after the curved portion is formed at the first position, and the initial value. 3 . The manufacturing method according to claim 2 , wherein the predicted change amount is determined by measuring the pitch angle and the roll angle of a plurality of samples of the suspension before and after forming a bent portion.

4. The manufacturing method according to claim 1, preparing correction data that defines a relationship between the pitch angle and the roll angle that deviate from the target value and a second position for bringing the pitch angle and the roll angle closer to the target value, The second position at which the predicted value is brought closer to the target value is determined using the correction data.

5. The manufacturing method according to claim 1, For a specific vibration mode, a first gain of the flexure is measured when the bent portion is not formed on the outrigger. For the vibration mode, measuring a second gain of the flexure when the bend is formed at each of a plurality of positions in the outrigger, A position at which the second gain smaller than the first gain is obtained from among the plurality of positions is determined as the first position.

6. The manufacturing method according to any one of claims 1 to 5, wherein the first position is determined by a first region of the outrigger. The second position is determined by a second region of the outrigger that is different from the first region.

7. The manufacturing method according to claim 6, wherein the load beam and the flexure are fixed at a first fixing portion and a second fixing portion closer to the front end of the load beam than the first fixing portion. The first region is located between the recess and the first fixing portion in the longitudinal direction of the load beam.

8. A manufacturing apparatus for a suspension for a magnetic disk device comprising a load beam having a recess, a tongue-shaped member opposing the recess, and a flexure including an outrigger connected to the tongue-shaped member, comprising a laser irradiation device for irradiating a first laser and a second laser onto the outrigger, and a controller for controlling the laser irradiation device, The controller executes, for performing calculation of predicted values of the pitch angle and the roll angle of the tongue when a curved portion curved in the thickness direction is formed at a first position of the outrigger, and Before forming the curved portion by irradiating the first laser beam, determining a second position of the outrigger to be irradiated with the second laser beam so that the predicted value approaches a preset target value. The laser irradiation device irradiates the first position with the first laser beam to form a curved portion, and simultaneously irradiates the second position with the second laser beam.

9. The manufacturing apparatus according to claim 8, further comprising an angle measuring device for measuring initial values of the pitch angle and the roll angle of the suspension before irradiation with the first laser beam and the second laser beam. The controller calculates the predicted value based on the predicted change amounts of the pitch angle and the roll angle before and after the curved portion is formed at the first position and the initial value.

10. The manufacturing device according to claim 8 or 9, wherein the controller determines the second position that brings the predicted value close to the target value by using correction data, and the correction data defines the relationship between the pitch angle and the roll angle that deviate from the target value and the second position that brings these pitch angles and roll angles close to the target value.

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