Micro-part static pressure ultrasonic abrasive flow finishing device and method thereof

Abstract

The application discloses a kind of micro parts static pressure ultrasonic abrasive flow finishing device and method thereof, belong to abrasive flow finishing technical field, in the device: drainage plate is symmetrically arranged at the end face of shell head and tail, first protective cover is respectively arranged on the opposite side of two sides of drainage plate, and gland is respectively arranged on the outer end face of drainage plate;Axial ultrasonic vibrator is oppositely arranged on two sides of gland, and axial ultrasonic vibrator is sequentially penetrated into box, drainage plate from outside to inside and extends to first protective cover, the amplitude bar of axial ultrasonic vibrator is penetrated into the side wall of first protective cover and extends to shell, and the part to be finished is fixedly installed at the end of amplitude bar, and at least three circumferential ultrasonic vibrators are uniformly distributed on the outer side wall of middle part of shell in circumferential direction.The cavitation effect generated by multidirectional ultrasonic vibration in fluid abrasive carrier is used to remove micro burr, finish surface, improve surface stress, obtain better workpiece surface roughness and higher finishing efficiency.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of abrasive flow finishing, and particularly relates to a static pressure ultrasonic abrasive flow finishing device for micro parts and a method thereof. BACKGROUND

[0002] Various micro parts are being used in large quantities on micro sensors or biological bionic devices such as insects; after these parts are formed by machining processes such as cutting, laser or electric spark, they need to be finished by a finishing process to remove micro burrs and improve the surface quality of the parts, so as to improve the performance of the micro parts. The commonly used finishing methods at present mainly include electrochemical finishing, roll grinding technology and abrasive flow machining. Among them, electrochemical technology has good finishing effect, but it is not easy to control the precision of the parts, and even the dimensional accuracy of the parts may be reduced, affecting the performance of the parts; although the roll grinding technology has good machining efficiency, it is difficult to effectively finish the structure transition area of the micro parts due to the size limitation of the abrasive particles; the abrasive size of the abrasive flow machining can be as small as microns, which can effectively control the finishing accuracy of the micro parts while meeting the finishing requirements. However, the traditional abrasive flow machining must form a suitable flow channel between the clamp and the workpiece, and it is difficult to manufacture a clamp that meets the requirements for micro parts, especially for micro workpieces with particularly complex inner and outer surface shapes, the manufacturing difficulty of the clamp is greater, and the manufacturing cost of the clamp is also very high; moreover, in order to obtain higher finishing efficiency when machining micro parts, it is required to increase the interaction energy between the abrasive particles and the workpiece. New methods need to be adopted to realize the precise and efficient abrasive flow finishing of micro parts.

[0003] In the patent "An automatic device for electrochemical finishing of micro parts" (publication number: CN112123029A), the relevant machining parameters are set through the control panel, the motor is controlled to operate, the motor drives the link assembly to reciprocate, and the machining part is suspended on the link assembly. However, it is difficult to obtain high machining precision and machining stability when using electrochemical method to machine micro parts, and the stray corrosion phenomenon is more serious when using electrochemical machining, which cannot achieve good finishing efficiency and effect for the complex inner and outer surfaces of micro parts.

[0004] In the patent "A micro parts processing device" (publication number: CN105773548A), when finishing machining micro parts, the controller is used to control the sliding block, and then the sliding block drives the clamping device to fix the parts, and then the electric telescopic rod and the universal joint are started to drive the clamped workpiece to lift and rotate, so that the workpiece can be finished machined at various angles, greatly reducing the processing difficulty of the workers. However, the device has high requirements for the designed clamp during the finishing machining of the complex surface of the micro part, and the manufacturing cost of the clamp is high; at the same time, because the device needs to adjust the machining angle of the part in real time during finishing machining, it is not easy to ensure the accuracy of the machining angle and position when machining the workpiece with particularly complex inner and outer surface shapes, thereby reducing the machining effect. SUMMARY

[0005] The main purpose of the present application is to overcome the shortcomings in the prior art, and provide a micro part static pressure ultrasonic abrasive flow finishing machining device and method. The present application is suitable for finishing machining of complex surfaces of various micro parts. The ultrasonic vibration generator is arranged coaxially in pairs and distributed in a circular manner. On the one hand, the ultrasonic vibration makes the workpiece move slightly, and realizes the no-dead-angle finishing machining of the inner and outer surfaces in the pressure field. On the other hand, the ultrasonic vibration makes the abrasive particles in the fluid abrasive impact and extrude the inner and outer surfaces of the workpiece, thereby achieving higher finishing machining efficiency.

[0006] In order to achieve the above-mentioned purposes, the technical scheme adopted by the present application is as follows:

[0007] A micro part static pressure ultrasonic abrasive flow finishing machining device, which comprises a gland, a shell, a flow guide plate and an ultrasonic vibration generator. The ultrasonic vibration generator comprises an axial ultrasonic vibrator and a circumferential ultrasonic vibrator, wherein:

[0008] The shell is provided in a cylindrical shape, the drainage plates are symmetrically arranged on the end faces of the shell at the head and tail, a plurality of through holes are uniformly distributed on the drainage plates in the circumferential direction, first protective covers are respectively arranged on the opposite end faces of the two side drainage plates, the outer side end faces of the two side drainage plates are respectively provided with gland nuts, the cavities of the gland nuts and the cavity of the shell are communicated through the through holes, and the cavity of the shell on the fluid abrasive inlet side is provided as a fluid abrasive cavity, the cavity of the shell on the fluid abrasive outlet side is provided as a heat dissipation cavity, the fluid abrasive is discharged from the inlet port → the fluid abrasive cavity → the heat dissipation cavity → the outlet port and then dynamically circulates into the inlet port again; the axial ultrasonic vibrator is arranged on the two side gland nuts, the two axial ultrasonic vibrators are arranged in the order of the corresponding gland nut, the drainage plate and the first protective cover from the outside to the inside, and the amplitude rod of any side axial ultrasonic vibrator extends into the shell through the side wall of the first protective cover, the finishing workpiece is fixedly installed on the end of the amplitude rod, and the axial direction of the axial ultrasonic vibrator, the axial direction of the gland nut and the axial direction of the shell are arranged in the same line.

[0009] At least three circumferential ultrasonic vibrators are uniformly distributed in the middle part of the shell in the circumferential direction, second protective covers are arranged on the middle part of the inner side wall of the shell corresponding to the positions of the circumferential ultrasonic vibrators, and the circumferential ultrasonic vibrators extend into the second protective covers through the side wall of the shell.

[0010] Further, a pressure sensor is arranged on the side wall of the shell, and electromagnetic valves are arranged at the positions of the inlet and outlet ports, respectively, and the opening and closing of the electromagnetic valves are controlled by the signals of the pressure sensor. The working environment static pressure is realized by controlling the pressure sensor and the electromagnetic valve.

[0011] Further, a sealing ring is arranged at the position where the wave node of the amplitude rod of the axial ultrasonic vibrator contacts the gland nut.

[0012] Further, the circumferential ultrasonic vibrator is installed on the shell through a mounting plate, and the mounting plate is spherical surface matched at the position where it contacts the side wall of the shell. In this way, the processing angle can be adjusted more conveniently, and better processing effect can be obtained.

[0013] Further, the first protective cover and the second protective cover are both provided in a circular truncated cone shape, the large end faces of the first protective cover and the second protective cover are provided as fixed installation ends, and the small end faces of the first protective cover and the second protective cover are fixedly connected with the amplitude rod.

[0014] Further, a bevel groove is processed at the tapered surface of the amplitude rod of the mounting workpiece, and longitudinal torsional composite vibration is performed on the finishing workpiece.

[0015] Further, the power of the circumferential ultrasonic vibrator is 1 / 3-2 / 3 of the power of the axial ultrasonic vibrator.

[0016] A finishing method using the above device, comprising the following steps:

[0017] S1, install the workpiece to be processed:

[0018] First, the gland is fixedly installed on the outer side end face of the drainage plate, and the axial ultrasonic vibrator is installed on the gland and penetrates the drainage plate; secondly, the first protective cover is fixedly installed on the drainage plate, and the first protective cover covers the outside of the axial ultrasonic vibrator, and the amplitude rod of any axial ultrasonic vibrator extends to the outside of the first protective cover; thirdly, the workpiece to be finished is installed on the end of the amplitude rod, and the drainage plates on both sides are fixedly installed at the end faces of the head and tail of the shell; finally, at least three second protective covers are evenly distributed on the middle part of the inner side wall of the shell in the circumferential direction, and the circumferential ultrasonic vibrator penetrates the side wall of the shell and extends into the corresponding second protective cover;

[0019] S2, load the abrasive: open any side electromagnetic valve, so that the fluid abrasive enters the cavity of the gland from the liquid inlet below the gland, and flows into the cavity of the other side gland through the through hole. When the fluid abrasive fills the fluid abrasive cavity and the heat dissipation cavity, the fluid abrasive pressure is kept constant by adjusting the opening and closing of the electromagnetic valve. The workpiece to be finished is in an isostatic pressure field with fluid abrasive as the medium;

[0020] S3, open the axial ultrasonic vibrator and the circumferential ultrasonic vibrator, adjust the amplitude and frequency of the ultrasonic vibrator through the controller, increase or decrease the interaction force between the abrasive particles and the workpiece to be finished, and adjust the angle of the circumferential ultrasonic vibrator through the mounting plate to form a micro-rotating flow with the axis of the shell as the center, and the rotating direction is adapted to the surface of the workpiece. The workpiece to be processed is repeatedly vibrated in the fluid abrasive static pressure flow field in the shell for finishing.

[0021] The cavitation effect generated by the bidirectional ultrasonic vibration in the fluid abrasive carrier removes micro-burrs, finishes the surface, and improves the surface stress. At the same time, the circumferential ultrasonic vibration forms a turbulent energy field, enhances the interaction energy between the abrasive particles and the workpiece surface, and after the predetermined time of finishing, the new fluid abrasive cycle enters the gland from the liquid inlet below one side of the gland, and the temperature of the fluid abrasive in the shell remains in a small fluctuation state. During the whole processing vibration process, the fluid abrasive is always outside the protective cover for finishing the workpiece, and the protective cover protects the ultrasonic vibrator.

[0022] On the basis of the specific implementation method, the implementation of the circumferential ultrasonic vibrator is further described, three circumferential ultrasonic vibrators are uniformly distributed on the outer side wall of the middle part of the shell in the circumferential direction, that is, the included angle between adjacent circumferential ultrasonic vibrators is 120 degrees, so that the ultrasonic action of the circumferential ultrasonic vibrator realizes the diversification of the direction of the workpiece, enhances the action degree of the abrasive particles and the surface of the workpiece, and makes the machined micro parts have better workpiece surface roughness; in addition, the three circumferential ultrasonic vibrators are angle-adjusted through the connecting spherical surface at the joint, so that the fluid abrasive is formed into a trace rotating flow with the shell axis as the center, the rotating direction is adapted to the surface of the workpiece, thereby enhancing the action energy of the abrasive particles and the surface of the workpiece, and better finishing effect is obtained.

[0023] Further, in the step S3, after the finishing machining is performed for a predetermined time, new fluid abrasives are supplemented into the cavity of the gland from the liquid inlet below the gland, and the temperature of the fluid abrasives in the shell slightly fluctuates. In this way, the machining properties of the fluid abrasives can be maintained, and the ultrasonic vibrator will continue to work until the workpiece to be machined is finished.

[0024] Compared with the prior art, the beneficial effects of the present application are:

[0025] 1. The present application is suitable for the finishing machining of the inner and outer surfaces of various micro parts, and the micro parts are installed in an isostatic pressure field with fluid abrasives as the medium, so that the workpiece and the fluid abrasives are subjected to the action of the ultrasonic vibration generator to realize the finishing machining of the inner and outer surfaces of the workpiece. The present application changes and solves the problems of difficult clamping, high cost of clamps, time-consuming, laborious and low efficiency in the finishing machining process of complex surfaces of micro parts, thereby providing a method for quickly and efficiently finishing machining of micro parts.

[0026] 2. The present application especially does not need to design special clamps for workpieces with particularly complex inner and outer surface shapes, and utilizes the adaptability of fluid abrasives to the shape. On the one hand, the workpiece is subjected to ultrasonic vibration to move slightly, so that the inner and outer surfaces are finished without dead angle in the pressure field. On the other hand, the abrasive particles in the fluid abrasives impact and extrude the inner and outer surfaces of the workpiece through ultrasonic vibration, thereby further improving the finishing machining effect and efficiency.

[0027] 3. The present application especially arranges the ultrasonic vibration generators coaxially in pairs in the case of uniform pressure field, utilizes the cavitation effect generated in the fluid abrasive carrier by bidirectional ultrasonic vibration to remove micro burrs, finish the surface and improve the surface stress, thereby improving the surface performance of the micro parts, obtaining better workpiece surface roughness and higher finishing machining efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 is a schematic view of the main view of the static pressure ultrasonic abrasive flow finishing device for micro parts of the present application;

[0029] Figure 2 is Figure 1 A-A cross-sectional structure schematic diagram in the middle;

[0030] Figure 3 is Figure 2 A local enlarged structure schematic diagram in the circumferential ultrasonic vibrator position in the middle.

[0031] In the figure, 1 is a fluid abrasive inlet and outlet, 2 is an axial ultrasonic vibrator, 3 is a sealing ring, 4 is a gland, 5 is a through hole, 6 is an elastic washer, 7 is a first protective cover, 8 is a shell, 9 is a workpiece to be processed, 10 is a flow guide plate, 11 is a pressure sensor, 12 is an electromagnetic valve, 13 is a second protective cover, 14 is a circumferential ultrasonic vibrator, and 15 is a mounting plate. DETAILED DESCRIPTION

[0032] The application will be further described in detail below in combination with the drawings and examples.

[0033] As Figures 1 to 3 shown in a kind of micro parts static pressure ultrasonic abrasive flow finishing device, it includes gland 4, shell 8, flow guide plate 10 and ultrasonic vibration generator, the ultrasonic vibration generator includes axial ultrasonic vibrator 2 and circumferential ultrasonic vibrator 14, wherein:

[0034] The shell 4 is provided as cylindrical shape, flow guide plate 10 is symmetrically arranged at the end face of the head and tail of shell 4, a plurality of through holes 5 are uniformly distributed on the circumferential direction of flow guide plate 10, the opposite end faces of the flow guide plate on both sides are respectively provided with first protective cover 7, the outer end faces of the flow guide plate on both sides are respectively provided with gland 4, the lower side of gland 4 is respectively provided with inlet / outlet, the side wall of shell 8 is provided with pressure sensor 11, the position of inlet / outlet is respectively provided with electromagnetic valve 12, the opening and closing of electromagnetic valve 12 is controlled by the signal of pressure sensor 11;The cavity of gland 4 and the cavity of shell 8 are communicated through through hole 5, and the cavity of shell 8 and the cavity of gland 4 on the side of fluid abrasive inlet are provided as fluid abrasive cavity, the cavity of gland 4 on the side of fluid abrasive outlet is provided as heat dissipation cavity, fluid abrasive is discharged from inlet→fluid abrasive cavity→heat dissipation cavity→outlet and then dynamically circulates into inlet again;The axial ultrasonic vibrator 2 is oppositely arranged on the two sides of gland 4, the wave node of the amplitude bar on the axial ultrasonic vibrator 2 is provided with sealing ring 3 at the contact position of gland 4, the two axial ultrasonic vibrators 2 on both sides are respectively sequentially penetrated through corresponding gland 4, flow guide plate 10 and extend into first protective cover 7 from outside to inside, and the amplitude bar of any side axial ultrasonic vibrator 2 penetrates the side wall of first protective cover 7 and extends into shell 8, the workpiece 9 to be finished is fixedly installed at the end of the amplitude bar, and the axial direction of axial ultrasonic vibrator 2, the axial direction of gland 4 and the axial direction of shell 8 are arranged in line;

[0035] The power of the circumferential ultrasonic vibrator 14 is 1 / 3-2 / 3 of the power of the axial ultrasonic vibrator 2, at least three circumferential ultrasonic vibrators 14 are uniformly distributed in the middle of the side wall of the shell 8 in the circumferential direction, the circumferential ultrasonic vibrator 14 is installed on the shell 8 through the mounting plate 15, and the mounting plate 15 is spherically matched with the contact position of the side wall of the shell 8. The middle of the inner side wall of the shell 8 is provided with a second protective cover 13 corresponding to the position of the circumferential ultrasonic vibrator 14, and the circumferential ultrasonic vibrator 14 penetrates the side wall of the shell 8 and extends into the second protective cover 13. The two oppositely arranged axial ultrasonic vibrators 2 and the three circumferential ultrasonic vibrators 14 arranged in the circumferential direction can very effectively perform non-dead-angle finishing machining on the complex surfaces inside and outside the workpiece.

[0036] Further, the first protective cover 7 and the second protective cover 13 are both provided in the shape of a circular truncated cone, and the large end face of the first protective cover 7 and the second protective cover 13 is provided as a fixed mounting end, and the small end face of the first protective cover 7 and the second protective cover 13 is fixedly connected with the amplitude rod.

[0037] Further, a bevel groove is machined at the amplitude rod conical surface of the workpiece to be finished, and the workpiece to be finished is subjected to longitudinal torsional compound vibration.

[0038] A finishing machining method using the above device, comprising the following steps:

[0039] S1, installing the workpiece to be machined:

[0040] First, the gland 4 is fixedly installed on the outer end face of the flow guide plate 10, the axial ultrasonic vibrator 2 is installed on the gland 4 and penetrates the flow guide plate 10; secondly, the first protective cover 7 is fixedly installed on the flow guide plate 10, and the first protective cover 7 covers the outside of the axial ultrasonic vibrator 2, and the amplitude rod of any axial ultrasonic vibrator 2 extends to the outside of the first protective cover 7; thirdly, the workpiece to be finished 9 is installed on the end of the amplitude rod, and the flow guide plates 10 on both sides are fixedly installed on the end faces of the shell 8; finally, at least three second protective covers 13 are uniformly distributed in the middle of the inner side wall of the shell 8 in the circumferential direction, and the circumferential ultrasonic vibrator 14 penetrates the side wall of the shell 8 and extends into the corresponding second protective cover 13; S2, loading abrasive: opening any side electromagnetic valve 12, so that the fluid abrasive enters the cavity of the gland 4 from the liquid inlet below the gland 4, and flows into the cavity of the other side gland 4 through the through hole 5, and when the fluid abrasive fills the fluid abrasive cavity and the heat dissipation cavity, the fluid abrasive pressure is kept constant by opening and closing the electromagnetic valve 12, and the workpiece to be finished 9 is in an isostatic pressure field with fluid abrasive as the medium;

[0041] S3, the axial ultrasonic vibrator 2 and the circumferential ultrasonic vibrator 14 are turned on, the amplitude and frequency of the ultrasonic vibrator are adjusted by the controller, the interaction force between the abrasive particles and the workpiece 9 to be finished is increased or decreased, the circumferential ultrasonic vibrator 14 is angularly adjusted by the mounting plate 15, the fluid abrasive particles are formed into a micro-rotational flow with the axis of the shell 8 as the center, and the rotational direction is adapted to the surface of the workpiece, and the workpiece to be processed is repeatedly vibrated in the fluid abrasive static pressure flow field in the shell for finishing.

[0042] Further, in the step S3, after the finishing is performed for a predetermined time, new fluid abrasive particles are supplied into the cavity of the gland 4 from the liquid inlet below the gland 4, and the temperature of the fluid abrasive particles in the shell 8 slightly fluctuates.

[0043] During the whole processing vibration process, the fluid abrasive particles are always outside the protective cover for finishing the workpiece, and the protective cover protects the ultrasonic vibrator.

[0044] On the basis of the specific implementation method, the implementation of the circumferential ultrasonic vibrator is further described, three circumferential ultrasonic vibrators 14 are uniformly distributed on the outer side wall of the middle part of the shell 8 in the circumferential direction, that is, the included angle between adjacent circumferential ultrasonic vibrators 14 is 120 degrees, the ultrasonic action of the circumferential ultrasonic vibrator 14 realizes direction diversification for the workpiece, enhances the action degree of the abrasive particles and the surface of the workpiece, and makes the machined micro parts 9 have better workpiece surface roughness; in addition, the three circumferential ultrasonic vibrators 14 are angularly adjusted by the connecting spherical surface at the joint, the fluid abrasive particles are formed into a micro-rotational flow with the axis of the shell 8 as the center, and the rotational direction is adapted to the surface of the workpiece 9, so as to enhance the action energy of the abrasive particles and the surface of the workpiece, and obtain better finishing effect.

[0045] The above is only a specific implementation method of the present application, but the protection scope of the present application is not limited thereto, any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A micro-part static pressure ultrasonic abrasive flow finishing device, comprising a gland (4), a shell (8), a flow guide plate (10) and an ultrasonic vibration generator, the ultrasonic vibration generator comprising an axial ultrasonic vibrator (2) and a circumferential ultrasonic vibrator (14), characterized in that: the shell (8) is arranged in a cylindrical shape, the flow guide plates (10) are symmetrically arranged on the end faces of the shell (4) at the head and tail, a plurality of through holes (5) are uniformly distributed on the flow guide plates (10) in the circumferential direction, first protective covers (7) are respectively arranged on the opposite end faces of the two flow guide plates, the outer end faces of the two flow guide plates are respectively provided with the glands (4), the cavities of the glands (4) are respectively provided with inlet / outlet ports below, the cavities of the glands (4) and the cavities of the shell (8) are communicated through the through holes (5), and the cavity of the gland (4) on the fluid abrasive inlet side and the cavity of the shell (8) are arranged as a fluid abrasive cavity, the cavity of the gland (4) on the fluid abrasive outlet side is arranged as a heat dissipation cavity, the fluid abrasive is discharged from the inlet port→the fluid abrasive cavity→the heat dissipation cavity→the outlet port and then dynamically circulates into the inlet port again; the axial ultrasonic vibrators (2) are oppositely arranged on the two glands (4), the two axial ultrasonic vibrators (2) respectively pass through the corresponding glands (4), flow guide plates (10) and extend into the first protective covers (7) from outside to inside in sequence, and the horn of any one side axial ultrasonic vibrator (2) extends into the shell (8) through the side wall of the first protective cover (7), the workpiece (9) to be finished is fixedly installed on the end of the horn, and the axial direction of the axial ultrasonic vibrator (2), the axial direction of the gland (4) and the axial direction of the shell (8) are arranged in line; At least three circumferential ultrasonic vibrators (14) are uniformly distributed in the middle part of the shell (8) in the circumferential direction, second protective covers (13) are arranged on the inner side wall of the shell (8) corresponding to the positions of the circumferential ultrasonic vibrators (14), and the circumferential ultrasonic vibrators (14) pass through the side wall of the shell (8) and extend into the second protective covers (13). A pressure sensor (11) is arranged on the side wall of the shell (8), and electromagnetic valves (12) are respectively arranged at the positions of the inlet / outlet ports, and the opening and closing of the electromagnetic valves (12) are controlled by the signals of the pressure sensor (11).

2. The device according to claim 1, wherein the device is characterized by: A sealing ring (3) is arranged at the position where the wave node of the horn of the axial ultrasonic vibrator (2) contacts the gland (4).

3. The device according to claim 1, wherein the device is characterized by: The circumferential ultrasonic vibrators (14) are installed on the shell (8) through mounting plates (15), and the mounting plates (15) are spherical surface matched with the contact positions of the side walls of the shell (8).

4. The device according to claim 1, wherein: The first protective cover (7) and the second protective cover (13) are both arranged in a circular truncated cone shape, the large end faces of the first protective cover (7) and the second protective cover (13) are arranged as fixed installation ends, and the small end faces of the first protective cover (7) and the second protective cover (13) are fixedly connected with the horn.

5. The device according to claim 1, wherein: The horn taper surface of the workpiece (9) to be finished is processed with an inclined groove, and the workpiece (9) to be finished is subjected to longitudinal torsional composite vibration.

6. The device according to claim 1, wherein: The power of the circumferential ultrasonic vibrator (14) is 1 / 3-2 / 3 of the power of the axial ultrasonic vibrator (2).

7. The device according to claim 1, wherein the device is characterized by: The steps include:

8. A method of finishing by using the apparatus according to any one of claims 1 to 7, characterized by, ​ S1, install the workpiece to be processed: First, the gland (4) is fixedly installed on the outer side end face of the flow guide plate (10), and the axial ultrasonic vibrator (2) is installed on the gland (4) and penetrates the flow guide plate (10); secondly, the first protective cover (7) is fixedly installed on the flow guide plate (10), and the first protective cover (7) covers the outside of the axial ultrasonic vibrator (2), and the horn of any axial ultrasonic vibrator (2) extends to the outside of the first protective cover (7); thirdly, the workpiece to be finished machining (9) is installed at the end of the horn, and the flow guide plates (10) on both sides are fixedly installed at the end faces of the first and second ends of the shell (8); finally, at least three second protective covers (13) are uniformly distributed on the middle part of the inner side wall of the shell (8) in the circumferential direction, and the circumferential ultrasonic vibrator (14) penetrates the side wall of the shell (8) and extends into the corresponding second protective cover (13); S2, fill the abrasive: open any side electromagnetic valve (12), so that the fluid abrasive enters the cavity of the gland (4) from the liquid inlet below the gland (4), and flows into the cavity of the other side gland (4) through the through hole (5). When the fluid abrasive fills the fluid abrasive cavity and the heat dissipation cavity, the fluid abrasive pressure is kept constant by opening and closing the electromagnetic valve (12), and the workpiece to be finished machining (9) is in the hydrostatic pressure field with fluid abrasive as the medium; S3, open the axial ultrasonic vibrator (2) and the circumferential ultrasonic vibrator (14), adjust the amplitude and frequency of the ultrasonic vibrator through the controller, increase or decrease the interaction force between the abrasive particles and the workpiece to be finished machining (9), and the circumferential ultrasonic vibrator (14) is angle-adjusted through the mounting plate (15), so that the fluid abrasive forms a slight rotational flow with the axis of the shell (8) as the center, and the rotation direction is adapted to the surface of the workpiece. The workpiece to be processed is repeatedly vibrated in the fluid abrasive static pressure flow field in the shell to finish machining.

9. The finishing method according to claim 8, characterized by: In step S3, after the workpiece is finished machining for a predetermined time, new fluid abrasive is supplemented into the cavity of the gland (4) from the liquid inlet below the gland (4), and the temperature of the fluid abrasive in the shell (8) fluctuates slightly.

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