Optical two-dimensional precision adjustment mechanism

Abstract

An optical two-dimensional precision adjusting mechanism comprises a base, a first direction adjusting assembly and a second direction adjusting assembly; the first direction adjusting assembly is arranged on the base and is reciprocally movable along a first direction; the second direction adjusting assembly is sleeved on the first direction adjusting assembly and is reciprocally movable along a second direction perpendicular to the first direction relative to the first direction adjusting assembly; an operating surface of the first direction adjusting assembly and an operating surface of the second direction adjusting assembly are located on the same operating surface of the base, so that the first direction adjusting assembly and the second direction adjusting assembly are operated based on the same operating surface of the base, and a to-be-adjusted optical element arranged on the second direction adjusting assembly is adjusted in translation along the first direction and the second direction based on the same operating surface of the base. The optical element and other devices are adjusted in two-dimensional translation through one operating position in a narrow operating space, and there is no interference phenomenon in the two-dimensional adjustment process, and the coupling is small during the adjustment.

Description

Technical Field

[0001] This invention relates to the field of photolithography technology, and more specifically to an optical two-dimensional precision adjustment mechanism. Background Technology

[0002] In a free-pupil illumination system, the space is limited, there are many lens groups, and the positional accuracy between each lens group is critical. After each lens group is installed in the optical path system, the machining accuracy cannot meet the coaxial requirements between the lens groups, so coaxial adjustment between the lens groups is necessary.

[0003] Regarding the two-dimensional translation adjustment of optical elements, the following existing technologies exist:

[0004] For example, CN213957707U discloses a two-dimensional precision adjustment device for an optical adjustment frame, comprising a device body with a limiting and fixing frame at the bottom, and front and rear threaded rods in the front and rear directions fixedly installed at the lower middle part of the front and rear walls of the limiting and fixing frame via bearings; front and rear adjustment blocks in the left and right directions are fixedly installed on the outer middle of the front and rear threaded rods, and adjustment knobs are fixedly installed at the front and rear ends of the front and rear threaded rods via bolts; vertical limiting and anti-detachment blocks in the upper middle of the top end face of the left and right side walls of the limiting and fixing frame are inserted from top to bottom, and left and right threaded rods in the left and right directions are fixedly installed at the upper part between the limiting and anti-detachment blocks via bearings. This solution can realize two-dimensional translational adjustment of optical components. However, its front, rear, left, and right threaded rods need to be adjusted in four directions, and its threaded rods occupy the central position, so this solution requires a large operating space.

[0005] For example, CN212947376U discloses a lens plane adjustment mechanism, including a lens, a lens mount, and a housing. The lens is mounted in the lens mount, and the lens mount is movably mounted in the housing. A moving component and a locking structure are mounted on the housing. The moving component includes a guide block, a positioning structure, and a pushing structure. The lens mount is connected to the guide block and is movably mounted on the housing via the guide block. The pushing structure acts on the lens mount, and the positioning structure cooperates with the pushing structure to perform planar positioning of the lens mount. The locking structure locks the guide block and the housing. This solution achieves precise movement of the lens in a plane. However, its adjustment orientation is limited to both the X and Y directions, and this structure requires a relatively large operating space.

[0006] Because the optical system of the free pupil illumination system is relatively long and has limited space, it can only be operated in one direction. The position adjustment between existing optical devices mostly relies on adjusting screws in the X and Y directions. This structure requires a large space and also requires a large operating space. At the same time, the two directions of adjustment will affect each other, resulting in low reliability and practicality. Furthermore, in high-precision illumination systems, adjustments need to be made repeatedly. Summary of the Invention

[0007] To address the problem that the limited space in the illumination system of a lithography machine prevents adjustment of the spatial position of optical components from all directions, this application provides a two-dimensional precision optical adjustment mechanism that enables two-dimensional translational adjustment of optical components and other equipment within a confined operating space through a single operating position.

[0008] The technical solution provided by this invention is as follows:

[0009] This invention provides an optical two-dimensional precision adjustment mechanism, which is used to perform two-dimensional translational adjustment of an optical element to be adjusted through an operating surface in a lithography machine illumination system. The optical two-dimensional precision adjustment mechanism includes: a base, a first direction adjustment component, and a second direction adjustment component.

[0010] The first direction adjustment component is reciprocally movable on the base along the first direction;

[0011] The second direction adjustment component is sleeved on the first direction adjustment component and reciprocates relative to the first direction adjustment component along a second direction perpendicular to the first direction;

[0012] The operating surfaces of the first and second direction adjustment components are both located on the same operating surface of the base. The first and second direction adjustment components are operated based on the same operating surface of the base, so that the optical element to be adjusted on the second direction adjustment component is translated in the first and second directions based on the same operating surface of the base.

[0013] More preferably, the base includes: a support plate, a fixing plate and an operating plate disposed along two adjacent sides of the support plate;

[0014] The fixed plate and the operating plate are perpendicular to each other, the first direction is perpendicular to the fixed plate, and the second direction is perpendicular to the operating plate;

[0015] The first direction adjustment component is adapted and installed to the support plate, the fixed plate and the operation plate respectively, and the first direction adjustment component reciprocates relative to the support plate along the first direction;

[0016] The second direction adjustment component is sleeved on the first direction adjustment component. The sleeved component causes the first direction adjustment component to reciprocate along the first direction, thereby driving the second direction adjustment component to reciprocate along the first direction, and causing the second direction adjustment component to reciprocate relative to the first direction adjustment component along a second direction perpendicular to the first direction.

[0017] The operating surfaces of the first direction adjustment component and the second direction adjustment component are both located on the operating plate, so that the first direction adjustment component and the second direction adjustment component can be operated based on the same operating plate.

[0018] More preferably, the first direction adjustment component includes: a first adjustment bracket, a first elastic part, a first driving part, and a first adjustment key;

[0019] The first adjusting bracket is disposed on the support plate;

[0020] The first elastic part, the first driving part, and the first adjusting key are disposed on the support plate, the fixed plate, and the operating plate in conjunction with the first adjusting bracket. The conjunction causes the first adjusting bracket to reciprocate along a first direction, wherein:

[0021] One end of the first elastic part is fixedly disposed on the fixed plate, and the other end is limited to one side of the first adjusting bracket;

[0022] The first driving part is opposite to the first elastic part, located on the other side of the first adjusting bracket and disposed on the support plate;

[0023] The first adjustment key is located on the operation panel and connected to the first drive unit.

[0024] More preferably, the first drive unit includes a connecting rod and a cam;

[0025] The cam is disposed on the support plate, and the edge of the cam contacts the side of the first adjusting bracket;

[0026] One end of the connecting rod is connected to the cam, and the other end is connected to the first adjustment key;

[0027] When the first adjustment key drives the connecting rod to rotate the cam in a first preset direction, the cam drives the first adjustment bracket to move toward the first elastic part; when the first adjustment key drives the connecting rod to rotate the cam in a second preset direction, the first elastic part drives the first adjustment bracket to move toward the cam.

[0028] More preferably, the first drive unit further includes a limiting pin, which is disposed on the support plate relative to the cam and is used to limit the rotation angle of the cam.

[0029] Further preferably, the first adjustment component further includes a first guide pin for guiding the first adjustment bracket to reciprocate along a first direction. The first guide pin is fixed to the support plate. The first adjustment bracket has a first guide groove that matches the first guide pin along the first direction. The matching allows the first guide pin to guide the first adjustment bracket to reciprocate along the first direction within the first guide groove, and to limit the first adjustment bracket in directions other than the first direction.

[0030] More preferably, the second direction adjustment component includes: a second adjustment bracket, a second elastic part, and a second drive part;

[0031] The second adjusting bracket is sleeved on the first adjusting bracket, and the second adjusting bracket has corresponding gaps relative to the installation positions of the first driving part and the first elastic part on the first adjusting bracket, so that the first driving part and the first elastic part can be installed with the first adjusting bracket through the corresponding gaps.

[0032] The second elastic part and the second driving part are configured to cooperate with the second adjusting bracket, and the cooperation causes the second adjusting bracket to reciprocate along the second direction, wherein:

[0033] The second driving part is an adjusting screw, and the second adjusting bracket is provided with a threaded hole that matches the adjusting screw. One end of the adjusting screw is set on the operating plate, and the other end extends through the threaded hole to the first adjusting bracket.

[0034] The second elastic part is opposite to the adjusting screw and is fixedly disposed on the side of the second adjusting bracket, and the other end of the second elastic part is limited to the side of the first adjusting bracket;

[0035] When the adjusting screw moves spirally in the first preset direction, it drives the second adjusting bracket to move toward the second elastic part; when the adjusting screw moves spirally in the second preset direction, the second elastic part drives the second adjusting bracket to move toward the adjusting screw.

[0036] More preferably, the second adjustment component further includes a second guide pin for guiding the second adjustment bracket to reciprocate along a second direction. One end of the second guide pin is fixed to the bottom of the second adjustment bracket, and the other end extends toward the first adjustment bracket. The first adjustment bracket has a second guide groove that matches the second guide pin along the second direction. The matching causes the second guide pin to extend into the second guide groove to guide the second adjustment bracket to reciprocate along the second direction, and to limit the second adjustment bracket in directions other than the second direction.

[0037] More preferably, the cross-section of the second adjusting bracket along the second direction is U-shaped, and the cross-section of the first adjusting bracket along the second direction is Z-shaped.

[0038] More preferably, the top of the first adjustment bracket and the top of the second adjustment bracket are respectively provided with receiving ports for accommodating the optical element to be adjusted.

[0039] According to the optical two-dimensional precision adjustment mechanism of the above embodiment, since the operating surfaces of the first direction adjustment component and the second direction adjustment component are both located on the same surface of the base, the first direction adjustment component and the second direction adjustment component are operated based on the same surface of the base. This allows the optical element to be adjusted on the second direction adjustment component to be translated in the first and second directions based on the same surface of the base. This enables two-dimensional translation adjustment of the optical element and other equipment through an operating position within a narrow operating space.

[0040] Furthermore, through the structural design of the first direction adjustment component, the second direction adjustment component, and the base, the guide pin can not only guide the movement of the first direction adjustment component and the second direction adjustment component, but also limit other movement directions of the first direction adjustment component and the second direction adjustment component. This ensures that there is no interference between the first direction adjustment component and the second direction adjustment component during the two-dimensional adjustment process, and the coupling is small during adjustment.

[0041] Furthermore, by using a single operating position to perform two-dimensional translational adjustment of optical components and other equipment, compared with the existing method of adjusting optical components using multiple operating positions, the single operating position eliminates adjustment gaps during the adjustment process, resulting in high adjustment accuracy, good reliability, and good guidance. Attached Figure Description

[0042] Figure 1 This is a schematic diagram of an optical two-dimensional precision adjustment mechanism;

[0043] Figure 2 This is a schematic diagram of the base;

[0044] Figure 3 This is a schematic diagram showing the first direction adjustment component and its installation with the base.

[0045] Figure 4 for Figure 3 Another directional diagram;

[0046] Figure 5 This is a schematic diagram of the first direction adjustment component.

[0047] Figure 6 This is a schematic diagram of the assembly of the second-direction adjustment component;

[0048] Figure 7This is a schematic diagram of the guide for the second-direction adjustment component;

[0049] Figure 8 This is a schematic diagram of the second adjustment bracket;

[0050] Figure 9 This is a schematic diagram of the first adjustment bracket;

[0051] Figure 10 This is a schematic diagram showing the operational status of an optical two-dimensional precision adjustment mechanism. Detailed Implementation

[0052] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the specific implementation methods of the present invention will be described below with reference to the accompanying drawings. Obviously, the drawings described below are merely some embodiments of the present invention. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without any creative effort.

[0053] Because the free pupil illumination system of a lithography machine has a small space, it can only be operated in one direction. And most of the existing optical equipment position adjustments are made in the X and Y directions. Based on this, this embodiment provides an optical two-dimensional precision adjustment mechanism. This optical two-dimensional precision adjustment mechanism can realize two-dimensional translation adjustment of optical components and other equipment through one operating surface within the small operating space of the lithography machine illumination system.

[0054] like Figure 1 As shown, the optical two-dimensional precision adjustment mechanism provided in this embodiment includes: a base 100, a first direction adjustment component 200, and a second direction adjustment component 300. The first direction adjustment component 200 is reciprocally movable on the base 100 along a first direction. The second direction adjustment component 300 is sleeved on the first direction adjustment component 200 and reciprocates relative to the first direction adjustment component 200 along a second direction perpendicular to the first direction. The operating surfaces of the first direction adjustment component 200 and the second direction adjustment component 300 are both located on the same operating surface of the base 100. The first direction adjustment component 200 and the second direction adjustment component 300 are operated based on the same operating surface of the base 100, so that the optical element to be adjusted on the second direction adjustment component 300 is translated in the first and second directions based on the same operating surface of the base 100.

[0055] This embodiment designs the structural cooperation between the base 100, the first direction adjustment component 200, and the second direction adjustment component 300 so that the operating surfaces of the first direction adjustment component 200 and the second direction adjustment component 300 are both located on the same operating surface of the base 100. This enables two-dimensional translational adjustment of the optical element based on the same operating surface of the base 100. The specific structure of the base 100, the first direction adjustment component 200, and the second direction adjustment component 300 and their cooperation will be described in detail below.

[0056] like Figure 2 As shown, the base 100 includes: a support plate 101, a fixing plate 102 and an operation plate 103 arranged along two adjacent sides of the support plate 101. The other two adjacent sides of the support plate 101 are empty, so that the optical two-dimensional precision adjustment mechanism can cooperate with the optical path of the free pupil illumination system of the lithography machine and cooperate with the entire lithography machine through the empty space. For example, the optical two-dimensional precision adjustment mechanism is installed on the corresponding position plate of the free pupil illumination system through the fixing plate 102. The optical two-dimensional precision adjustment mechanism communicates with the optical path of the free pupil illumination system through one empty space of the base 100, so that the light beam in the optical path of the free pupil illumination system enters the optical element adjusted by the optical two-dimensional precision adjustment mechanism, and communicates with the entire lithography machine through the other empty space.

[0057] Before describing the first direction adjustment component 200 and the second direction adjustment component 300, let's clarify the first and second directions: the first direction can be either the X or Y direction, and the second direction can be either the Y or X direction; in short, the first and second directions are two mutually perpendicular directions. However, for the sake of clarity in describing the first direction adjustment component 200 and the second direction adjustment component 300, in this embodiment, the first direction is the Y direction, and the second direction is the X direction. Please continue with the parameters. Figure 2 The fixed plate 102 and the operating plate 103 are perpendicular to each other. The first direction is perpendicular to the fixed plate 102, and the second direction is perpendicular to the operating plate 103. The optical two-dimensional precision adjustment mechanism of this embodiment realizes the translational adjustment of the optical element in the X and Y directions on one side of the operating plate 103.

[0058] Based on the structural design of the base 100, the first direction adjustment component 200 and the base 100 are installed in the following manner: Figure 3 and Figure 4As shown, the first direction adjustment component 200 is adapted and installed with the support plate 101, the fixed plate 102, and the operation plate 103 respectively. The first direction adjustment component 200 reciprocates relative to the support plate 101 along a first direction. Specifically, the first direction adjustment component 200 includes: a first adjustment bracket 201, a first elastic part 202, a first driving part 203, and a first adjustment key 204. The first adjustment bracket 201 is disposed on the support plate 101. The first elastic part 202, the first driving part 203, and the first adjustment key 204 cooperate with the first adjustment bracket 201 to be disposed on the support plate 101, the fixed plate 102, and the operation plate 103. This cooperation causes the first adjustment bracket 201 to reciprocate along the first direction, wherein:

[0059] One end of the first elastic part 202 is fixedly disposed on the fixed plate 102, and the other end is limited to one side of the first adjusting bracket 201;

[0060] The first driving part 203 is opposite to the first elastic part 202, located on the other side of the first adjusting bracket 201 and disposed on the support plate 101;

[0061] The first adjustment key 204 is located on the operation panel 103 and is connected to the first drive unit 203.

[0062] More preferably, the first drive unit 203 includes a connecting rod 2031 and a cam 2032;

[0063] The cam 2032 is disposed on the support plate 101, and the edge of the cam 2032 contacts the side of the first adjusting bracket 201;

[0064] One end of the connecting rod 2031 is connected to the cam 2032, and the other end is connected to the first adjustment key 204;

[0065] When the first adjustment key 204 drives the connecting rod 2031 to rotate the cam 2032 in the first preset direction, the cam 2032 drives the first adjustment bracket 201 to move toward the first elastic part 202; when the first adjustment key 204 drives the connecting rod 2031 to rotate the cam 2032 in the second preset direction, the first elastic part 202 drives the first adjustment bracket 201 to move toward the cam 2032.

[0066] Please continue to refer to this. Figure 4In this embodiment, the connecting rod 2031 is a two-link structure with linkage, and the cam 2032 is provided with a limiting groove. Furthermore, the first driving part 203 also includes a limiting pin 2033, which is located in the limiting groove of the cam 2032 and disposed on the support plate 101. It is used to limit the rotation angle of the cam 2032. For example, the limiting pin 2033 limits the rotation angle of the cam 2032 to within a range of 60° and 80°. The limiting pin 2033 restricts the rotation angle of the cam 2032, preventing the cam 2032 from having a dead point or rotating in the opposite direction, ensuring the continuity of the adjustment process, and avoiding gaps.

[0067] In this embodiment, the first adjustment key 204 can be a handwheel, which is mounted on the operation panel 103. Adjusting the handwheel drives the first adjustment bracket 201 to move in the Y direction. Specifically, adjusting the rotation of the handwheel causes the connecting rod 2031 to move back and forth, which in turn drives the cam 2032 to rotate. The outer edge of the cam 2032 is in close contact with the first adjustment bracket 201. When the cam 2032 rotates counterclockwise, it presses against the first adjustment bracket 201, causing the first adjustment bracket 201 to move in the Y direction toward the first elastic part 202. When the cam 2032 rotates clockwise, the first adjustment bracket 201 moves toward the cam 2032 under the pressure of the first elastic part 202.

[0068] Furthermore, in order to allow the first adjustment bracket 201 to move smoothly within the confined space of the free pupil illumination system, such as Figure 5 As shown, the first adjustment assembly 200 further includes a first guide pin 205 for guiding the first adjustment bracket 201 to reciprocate along a first direction. The first guide pin 205 is fixed on the support plate 101. The first adjustment bracket has a first guide groove 2011 that matches the first guide pin 205 along the first direction of 201. This matching allows the first guide pin 205 to guide the first adjustment bracket 201 to reciprocate along the first direction within the first guide groove 2011, and to limit the first adjustment bracket 201 in other directions besides the first direction. For example, the first guide pin 205 guides the first adjustment bracket 201 to reciprocate along the Y direction within the first guide groove 2011, while limiting the first adjustment bracket 201 in the X direction.

[0069] The specific installation method of the second direction adjustment component 300 is as follows: Figure 6 As shown, the second direction adjustment component 300 is sleeved on the first direction adjustment component 200. This sleeved arrangement causes the second direction adjustment component 300 to reciprocate along the first direction when the first direction adjustment component 200 reciprocates along the first direction, and causes the second direction adjustment component 300 to reciprocate relative to the first direction adjustment component 200 in a second direction perpendicular to the first direction.

[0070] Specifically, the second direction adjustment component 300 includes: a second adjustment bracket 301, a second elastic part 302, and a second drive part 303;

[0071] The second adjustment bracket 301 is sleeved on the first adjustment bracket 201, and the second adjustment bracket 301 has corresponding gaps relative to the installation positions of the first driving part 203 and the first elastic part 202 on the first adjustment bracket 201, so that the first driving part 203 and the first elastic part 202 can be installed with the first adjustment bracket 201 through the corresponding gaps.

[0072] The second elastic part 302 and the second driving part 303 are configured to cooperate with the second adjusting bracket 301. This cooperation causes the second adjusting bracket 301 to reciprocate along the second direction, wherein:

[0073] The second drive unit 302 is an adjusting screw, and the second adjusting bracket 301 is provided with a threaded hole that matches the adjusting screw. One end of the adjusting screw is set on the operating plate 103, and the other end extends through the threaded hole to the first adjusting bracket 201.

[0074] The second elastic part 302 is opposite to the adjusting screw and is fixedly disposed on the side of the second adjusting bracket 301. The other end of the second elastic part 302 is limited to the side of the first adjusting bracket 201.

[0075] When the adjusting screw moves spirally in the first preset direction, it drives the second adjusting bracket 301 to move toward the second elastic part 302; when the adjusting screw moves spirally in the second preset direction, the second elastic part 302 drives the second adjusting bracket 301 to move toward the adjusting screw. For example, when the adjusting screw is rotated counterclockwise, the second adjusting bracket 301 moves toward the second elastic part 302, and when the adjusting screw is rotated clockwise, the second adjusting bracket 301 moves toward the adjusting screw.

[0076] Depend on Figure 3 and Figure 6 It can be seen that the first adjusting bracket 201 moves in the opposite direction under the pressure applied by the first elastic part 202 when the first driving part 203 releases the driving force, and the second adjusting bracket 301 moves in the opposite direction under the pressure applied by the second elastic part 302 when the second driving part 303 releases the driving force. In this embodiment, the first elastic part 202 and the second elastic part 302 are specifically selected as compression springs, and the first adjusting bracket 201 and the second adjusting bracket 301 move in the opposite direction under the pressure of the corresponding compression springs.

[0077] Furthermore, in order to allow the second adjustment bracket 301 to move smoothly within the confined space of the free pupil illumination system, such as... Figure 7As shown, the second adjustment assembly 300 further includes a second guide pin 304 for guiding the second adjustment bracket 301 to reciprocate along a second direction. One end of the second guide pin 304 is fixed to the bottom of the second adjustment bracket 301, and the other end extends toward the first adjustment bracket 201. The first adjustment bracket 201 has a second guide groove 2012 along the second direction that matches the second guide pin 304. This matching allows the second guide pin 304 to extend into the second guide groove 2012 to guide the second adjustment bracket 301 to reciprocate along the second direction, and to limit the second adjustment bracket 302 in directions other than the second direction. For example, the second guide pin 304 guides the second adjustment bracket 301 to reciprocate along the X direction within the second guide groove 2012, while limiting the second adjustment bracket 301 in the Y direction.

[0078] In this embodiment, by designing a cooperative structure between the first adjusting bracket 201 and the second adjusting bracket 301, and by introducing the first guide pin 205 and the second guide pin 304, when the first adjusting bracket 201 moves along the first direction, the second adjusting bracket 301 is limited by the second guide pin 304, causing the second adjusting bracket 301 to move along the first direction as well. When the second adjusting bracket 301 moves along the second direction, the first adjusting bracket 201 is limited by the first guide pin 205, so only the second adjusting bracket 301 moves along the second direction. For example, when the first adjusting bracket 201 moves along the Y direction, the second adjusting bracket 201 is also moved along the Y direction by the second guide pin 304. When the second adjusting bracket 301 moves along the X direction, because the first adjusting bracket 201 is provided with the second guide groove 2012, the second adjusting bracket 301 moves along the second guide groove 2012, so the first adjusting bracket 201 is stationary. That is, through the cooperation of the first guide pin 205 and the second guide pin 304, there is no interference between the first adjustment bracket 201 and the second adjustment bracket 301 during the two-dimensional adjustment process, and the coupling is small during adjustment.

[0079] The second adjusting bracket 301 is sleeved on the first adjusting bracket 201, and when the first adjusting bracket 201 translates, it drives the second adjusting bracket 301 to translate as well. However, when the second adjusting bracket 301 translates, the first adjusting bracket 201 remains stationary. Based on this, this embodiment designs a matching structure for the first adjusting bracket 301 and the second adjusting bracket 201. Specifically, the cross-section of the second adjusting bracket 301 along the second direction is U-shaped, and the cross-section of the first adjusting bracket 201 along the second direction is Z-shaped. The structural shape of the second adjusting bracket 301 is as follows: Figure 8 As shown, the structural shape of the first adjusting bracket 301 is as follows: Figure 9 As shown in the diagram, please refer to the structural diagram of the second adjusting bracket 301 being fitted onto the first adjusting bracket 201. Figure 7 .

[0080] Furthermore, in order to install the optical element to be adjusted, the top of the first adjustment bracket 201 and the top of the second adjustment bracket 301 are respectively provided with receiving openings for accommodating the optical element to be adjusted; preferably, in order to accommodate optical elements to be adjusted at different heights, the support plate 101 is also provided with corresponding receiving openings so that the optical element to be adjusted can extend into the underside of the support plate 101 through the receiving openings.

[0081] According to practical applications, the optical element 400 to be adjusted is mounted on the top of the second adjustment bracket 301, and the structure after installation is shown in the figure below. Figure 10 As shown, since the first adjustment key 204 of the first direction adjustment component 200 and the second drive part 303 of the second direction adjustment component 300 are both located on the operation plate 103, the first direction adjustment component 200 and the second direction adjustment component 300 can be operated based on the same operation plate 103 to achieve two-dimensional translation adjustment of the optical element 400 to be adjusted on the same surface.

[0082] The optical two-dimensional precision adjustment mechanism provided in this embodiment has its operating surfaces of the first direction adjustment component and the second direction adjustment component both located on the same surface of the base. By operating the first and second direction adjustment components based on the same surface of the base, the optical element to be adjusted on the second direction adjustment component can be translated in the first and second directions based on the same surface of the base. This enables two-dimensional translation adjustment of optical elements and other equipment through a single operating position within a confined operating space.

[0083] Furthermore, through the structural design of the first direction adjustment component, the second direction adjustment component, and the base, the guide pin can not only guide the movement of the first direction adjustment component and the second direction adjustment component, but also limit other movement directions of the first direction adjustment component and the second direction adjustment component. This ensures that there is no interference between the first direction adjustment component and the second direction adjustment component during the two-dimensional adjustment process, and the coupling is small during adjustment.

[0084] Furthermore, by using a single operating position to perform two-dimensional translational adjustment of optical components and other equipment, compared with the existing method of adjusting optical components using multiple operating positions, the single operating position eliminates adjustment gaps during the adjustment process, resulting in high adjustment accuracy, good reliability, and good guidance.

[0085] The above examples illustrate the present invention only to aid in understanding it and are not intended to limit the scope of the invention. Those skilled in the art can make various simple deductions, modifications, or substitutions based on the principles of this invention.

Claims

1. An optical two-dimensional precision adjustment mechanism, used for two-dimensional translational adjustment of an optical element to be adjusted via an operating surface in a lithography machine illumination system, characterized in that, include: Base, first direction adjustment assembly, and second direction adjustment assembly; The base includes: a support plate, a fixed plate and an operating plate arranged along two adjacent sides of the support plate, wherein the fixed plate and the operating plate are perpendicular to each other; The first direction adjustment component is disposed on the base and is movable reciprocally along the first direction; The first direction adjustment component includes: a first adjustment bracket, a first elastic part, a first driving part, and a first adjustment key; The first adjustment bracket is mounted on the support plate; The first elastic part, the first driving part, and the first adjusting key are disposed on the support plate, the fixed plate, and the operating plate in conjunction with the first adjusting bracket, so that the first adjusting bracket can reciprocate along the first direction, wherein: One end of the first elastic part is fixedly mounted on the fixed plate, and the other end is limited to one side of the first adjusting bracket; The first driving part is opposite to the first elastic part, located on the other side of the first adjusting bracket and disposed on the support plate; The first adjustment key is located on the operation panel and connected to the first drive unit; The first drive unit includes a connecting rod and a cam; The cam is mounted on the support plate, and the edge of the cam contacts the side of the first adjusting bracket; One end of the connecting rod is connected to the cam, and the other end is connected to the first adjustment key; The second direction adjustment component is sleeved on the first direction adjustment component and reciprocates relative to the first direction adjustment component along a second direction perpendicular to the first direction; The second direction adjustment assembly includes: a second adjustment bracket, a second elastic part, and a second drive part; The second adjusting bracket is sleeved on the first adjusting bracket, and the second adjusting bracket has corresponding gaps relative to the mounting positions of the first driving part and the first elastic part on the first adjusting bracket, so that... The first driving part and the first elastic part are installed in conjunction with the first adjusting bracket through corresponding gaps; The second elastic part and the second driving part are configured in conjunction with the second adjusting bracket to cause the second adjusting bracket to reciprocate along the second direction, wherein: The second drive unit is an adjusting screw, and the second adjusting bracket is provided with a threaded hole that matches the adjusting screw. One end of the adjusting screw is set on the operating plate, and the other end extends through the threaded hole to the first adjusting bracket. The second elastic part is opposite to the adjusting screw and is fixedly installed on the side of the second adjusting bracket. The other end of the second elastic part is limited to the side of the first adjusting bracket. When the adjusting screw moves spirally in the first preset direction, it drives the second adjusting bracket to move toward the second elastic part; when the adjusting screw moves spirally in the second preset direction, the second elastic part drives the second adjusting bracket to move toward the adjusting screw. The operating surfaces of the first and second direction adjustment components are both located on the same operating surface of the base. By operating the first and second direction adjustment components on the same operating surface of the base, the optical element to be adjusted on the second direction adjustment component can be translated in the first and second directions based on the same operating surface of the base.

2. The optical two-dimensional precision adjustment mechanism as described in claim 1, characterized in that, The first direction is perpendicular to the fixed plate, and the second direction is perpendicular to the operating plate; The first direction adjustment component is adapted and installed to the support plate, the fixed plate and the operation plate respectively, and the first direction adjustment component reciprocates relative to the support plate along the first direction; The second direction adjustment component is sleeved on the first direction adjustment component. The sleeved component causes the first direction adjustment component to reciprocate along the first direction, thereby driving the second direction adjustment component to reciprocate along the first direction, and causing the second direction adjustment component to reciprocate relative to the first direction adjustment component along a second direction perpendicular to the first direction. The operating surfaces of the first direction adjustment component and the second direction adjustment component are both located on the operating plate, so that the first direction adjustment component and the second direction adjustment component can be operated based on the same operating plate.

3. The optical two-dimensional precision adjustment mechanism as described in claim 1, characterized in that, The first drive unit also includes a limiting pin, which is disposed on the support plate relative to the cam and is used to limit the rotation angle of the cam.

4. The optical two-dimensional precision adjustment mechanism as described in claim 1, characterized in that, The first direction adjustment assembly further includes a first guide pin for guiding the first adjustment bracket to reciprocate along a first direction. The first guide pin is fixed to the support plate. The first adjustment bracket has a first guide groove that matches the first guide pin along the first direction. The matching enables the first guide pin to guide the first adjustment bracket to reciprocate along the first direction within the first guide groove, and to limit the first adjustment bracket in other directions besides the first direction.

5. The optical two-dimensional precision adjustment mechanism as described in claim 1, characterized in that, The second direction adjustment assembly further includes a second guide pin for guiding the second adjustment bracket to reciprocate along the second direction. One end of the second guide pin is fixed to the bottom of the second adjustment bracket, and the other end extends toward the first adjustment bracket. The first adjustment bracket has a second guide groove that matches the second guide pin along the second direction. The matching causes the second guide pin to extend into the second guide groove to guide the second adjustment bracket to reciprocate along the second direction, and to limit the second adjustment bracket in directions other than the second direction.

6. The optical two-dimensional precision adjustment mechanism as described in claim 1, characterized in that, The top of the first adjustment bracket and the top of the second adjustment bracket are respectively provided with receiving ports for accommodating the optical element to be adjusted.

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