A method, device and system for production control of a semiconductor product

Abstract

The application discloses a production control method, device and system of a semiconductor product, which is used for realizing the maximum number of passing products and the shortest time in the production process stage of the semiconductor product, so that the time-limited process of the semiconductor product is realized in the best way. The production control method of the semiconductor product provided by the application comprises the following steps: if a current process stage needs to be executed for a semiconductor product, determining the remaining available processing resources of each station in the current process stage, and determining the station with the minimum remaining available processing resources in the current process stage; if the station with the minimum remaining available processing resources in the current process stage meets the preset semiconductor product release condition, the semiconductor product is controlled to start executing the current process stage.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor, and particularly relates to a production control method, device and system of semiconductor products. BACKGROUND

[0002] In the current semiconductor industry, there are process requirements of time-limited processes. Specifically, there are positive time-limited processes and negative time-limited processes, wherein the positive time-limited process is a time-limited process phase (loop) of production, and the time accumulation of the loop cannot be longer than a certain threshold; the negative time-limited process is a time-limited process loop of production, and the time accumulation of the loop cannot be shorter than a certain threshold. That is to say:

[0003] The product processing is completed within a specified time: the positive time-limited process;

[0004] For example, the first step to the third step of the loop is processed within 12 hours.

[0005] The product processing can be processed outside the specified time: the negative time-limited process;

[0006] For example, the first step of the loop cannot be started to be processed within 6 hours. SUMMARY

[0007] Embodiments of the present application provide a production control method, device and system of semiconductor products, so as to realize the maximum number of passing products in the production process phase of semiconductor products, and the shortest time required, so as to realize the time-limited process of semiconductor products in the best way.

[0008] The production control method of semiconductor products provided by the embodiments of the present application comprises:

[0009] If a semiconductor product needs to execute a current process phase, the remaining available processing resources of each station in the current process phase are determined, and the station with the smallest remaining available processing resource in the current process phase is determined.

[0010] If the station with the smallest remaining available processing resource in the current process phase meets the preset semiconductor product release condition, the semiconductor product is controlled to start to execute the current process phase.

[0011] By the method, if there is a semiconductor product to be executed in the current process stage, the remaining available processing resources of each station in the current process stage are determined, and the station with the smallest remaining available processing resources in the current process stage is determined; if the station with the smallest remaining available processing resources in the current process stage meets the preset semiconductor product release condition, the semiconductor product is controlled to start executing the current process stage, so that the number of passing products in the production process stage of the semiconductor product is maximized, but the required time is minimized, so that the time-limited process of the semiconductor product is realized in the best way.

[0012] In some embodiments, the process stage includes a process stage that is required to be completed within a preset time length and a preset process flow.

[0013] In some embodiments, the determination of the remaining available processing resources of each station in the current process stage includes:

[0014] determining the available processing resources and the required processing resources of each station in the current process stage;

[0015] for each station, subtracting the required processing resources of the station from the available processing resources of the station to obtain the remaining available processing resources of the station.

[0016] In some embodiments, for each station, the available processing resources of the station are determined by:

[0017] for each device of the station, determining the available processing resources of the device;

[0018] summing the available processing resources of each device of the station to obtain the available processing resources of the station.

[0019] In some embodiments, the determination of the available processing resources of each device of the station includes:

[0020] multiplying the number of main reaction chambers of the device by the preset time length to obtain the available processing resources of the device.

[0021] In some embodiments, for each station, the required processing resources of the station are determined by:

[0022] for each station, multiplying the number of products that have arrived at the station by the preset standard processing time of each product to obtain the required processing resources of the station.

[0023] In some embodiments, for each station, the available processing resources of the station do not include deduction resources of the station, and the deduction resources include processing resources of devices scheduled for maintenance and processing resources of temporarily interrupted devices.

[0024] In some embodiments, the deduction resource of the station includes:

[0025] The number of chambers of the equipment of the station that cannot produce.

[0026] In some embodiments, the determining the remaining available processing resource of each station in the current process stage includes determining the remaining available processing resource of each station in the current process stage within a preset judgment period length, wherein the judgment period length is:

[0027] The sum of processing time of all stations in the current process stage + (the number of stations in the current process stage - 1) * standard transfer time.

[0028] The standard transfer time is a preset product transfer time between adjacent stations.

[0029] Correspondingly, the embodiment of the present application provides a production control device of a semiconductor product, which comprises a memory and a processor, wherein the memory is used to store program instructions, and the processor is used to call the program instructions stored in the memory to execute the above-mentioned any one method according to the obtained program.

[0030] The embodiment of the present application provides a production control system of a semiconductor product, which comprises the production control device and an equipment maintenance planning system connected with the production control device, and the equipment maintenance planning system is used to provide information of equipment to be maintained to the production control device.

[0031] In some embodiments, further comprising a manufacturing execution system connected with the production control device.

[0032] In some embodiments, further comprising a database connected with the manufacturing execution system.

[0033] In addition, according to the embodiment, for example, a computer program product for a computer is provided, which comprises software code portions for performing the steps of the above-defined method when the product is running on the computer. The computer program product can comprise a computer-readable medium on which the software code portions are stored. Furthermore, the computer program product can be directly loadable into the internal memory of the computer and / or transmittable via a network by at least one of a upload process, a download process and a push process.

[0034] Another embodiment of the present application provides a computer readable storage medium, which stores computer executable instructions, and the computer executable instructions are used to make the computer execute the above-mentioned any one method. BRIEF DESCRIPTION OF DRAWINGS

[0035] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments description will be briefly introduced. Obviously, the drawings in the following description only represent some embodiments of the present application, and for those skilled in the art, other drawings can be obtained without creative effort based on these drawings.

[0036] Figure 1 The overall flowchart of the semiconductor product production control method provided by the embodiments of the present application is shown in the figure.

[0037] Figure 2 The schematic diagram of the wafer is provided by the embodiments of the present application.

[0038] Figure 3 The schematic diagram of the residual wafer provided by the embodiments of the present application is obtained at each site.

[0039] Figure 4 The specific flowchart of the semiconductor product production control method provided by the embodiments of the present application is shown in the figure.

[0040] Figure 5 The semiconductor product production control system architecture provided by the embodiments of the present application is shown in the figure.

[0041] Figure 6 The structure schematic diagram of the semiconductor product production control device provided by the embodiments of the present application is shown in the figure.

[0042] Figure 7 The structure schematic diagram of another semiconductor product production control device provided by the embodiments of the present application is shown in the figure. DETAILED DESCRIPTION

[0043] The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments only represent some embodiments of the present application, and not all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative effort belong to the scope of protection of the present application.

[0044] The embodiments of the present application provide a semiconductor product production control method, device and system, which are used to realize the maximum number of products passing through the production process stage of the semiconductor product with the shortest time, so as to realize the time-limited process of the semiconductor product in the best way.

[0045] The method and device are based on the same application concept. Since the principles of the method and device for solving problems are similar, the implementation of the device and the method can be referred to each other, and the repeated parts will not be described again.

[0046] The terms "first", "second", etc. (if any) in the specification and claims of the present application and in the above drawings are used to distinguish similar objects, and do not necessarily have to be used to describe a particular order or sequence. It should be understood that the data thus used can be interchanged, where appropriate, so that the embodiments described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "comprise" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or apparatus that includes a list of steps or units does not have to be limited to only those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to such processes, methods, products, or apparatuses.

[0047] The following examples and embodiments will be understood only as illustrative examples. Although the present specification can refer to "a", "an", or "some" example or embodiment at several places, this does not mean that each such reference is referring to the same example or embodiment, nor is it implying that the feature only applies to a single example or embodiment. Individual features of different embodiments can also be combined to provide other embodiments. In addition, the terms "comprise" and "include" should be understood as not limiting the described embodiments to only those features that have been mentioned; such examples and embodiments can also include features, structures, units, modules, etc. that have not been specifically mentioned.

[0048] The various embodiments of the present application will be described in detail below with reference to the accompanying drawings. It should be noted that the order of presentation of the embodiments of the present application only represents the order of the embodiments and does not represent the superiority or inferiority of the technical solutions provided by the embodiments.

[0049] Regarding the time-limited process Loop (process phase): a flow of multiple consecutive steps that starts to control time as soon as it enters the process phase.

[0050] In the embodiments of the present application, the entry point of the time-limited process phase is defined as the control point, i.e. the first step of the forward time limit.

[0051] The steps in the middle of the flow of the time-limited process phase are control steps;

[0052] The end point of the time-limited process phase, i.e. the end of control, enters the end point and the control ends.

[0053] The technical solutions provided by the embodiments of the present application are illustrated by taking the forward time-limited process phase and the form of piece-by-piece production from the start point to the end point as an example (but not limited to this), where the piece-by-piece production refers to steps relative to one-time batch production, and in the embodiments of the present application, one wafer is processed at a time, and the next wafer is processed after one wafer is processed.

[0054] The positive time limit process rule is that it cannot be greater than the threshold value once entering the process until the end point, so the best solution of such requirement is actually the shorter the production time of the lot (wafer group) is, rather than not more than (the makeshift solution). In reality, the WIP (wafer in process) level defined way (which can also be called the little rule, that is, the number of wafers waiting for process is within the preset range) is usually adopted to monitor that the number of WIP in the process is not less than the minimum value and not more than the maximum value, that is, within a range. However, the following problems exist in this way:

[0055] The cumulative time of production is not the minimum (because the target of the existing way is not more than, rather than the optimal);

[0056] There is often a contradiction between the production standby material and the time limit, that is, in order to ensure that the production equipment is not idle, more materials need to be put, and in order to ensure that the cycle time of production is not too long, the number of materials to be processed needs to be controlled, and the two requirements are in conflict;

[0057] The abnormal problems in the process, such as PM Down machine (including planned equipment maintenance and unplanned equipment maintenance), cause insufficient production capacity, and there is insufficient response and prediction ability.

[0058] Referring to Figure 1 , the embodiment of the present application provides a production control method of a semiconductor product, comprising:

[0059] S101, if there is a semiconductor product to be executed in the current process stage, for example, there is an activated wafer group "Active Lot", the remaining available processing resources of each station in the current process stage are determined, and the station with the smallest remaining available processing resource in the current process stage is determined;

[0060] It should be noted that the processing resource in the embodiment of the present application can be a resource combined with product quantity information and processing time information, specifically:

[0061] For example, the number of wafer slices and time (minutes) are equalized, that is, slice = minute, multiplied (slice * minute) to get a new unit: slice minute.

[0062] Regarding slice * minute, it can be understood that the number of slices is length and time is height, both units are length units, and multiplication is equal to "area". As shown in Figure 2 It can be seen that the larger the area of the rectangular frame in Figure 2 , the larger the resource, and the smaller the area, the smaller the resource.

[0063] S102. If the station with the smallest remaining available processing resources in the current process stage meets a preset semiconductor product release condition, then the semiconductor product is controlled to start executing the current process stage. The preset semiconductor product release condition, for example, means that the remaining available processing resources of the station with the smallest remaining available processing resources are greater than a preset value. When this condition is met, a batch of products can be released. The specific number released can be determined according to the actual situation, such as a preset number of wafer sets or releasing a corresponding number of wafer sets according to the remaining available processing resources.

[0064] The determination cycle length in this embodiment is: the sum of the recipe times of all stations in a process stage + (the number of stations in that process stage - 1) * standard transmission time. Here, recipe refers to the process procedure; recipe time refers to the time required to process that procedure. The standard transmission time is the transmission time between adjacent stations.

[0065] like Figure 3 As shown, the release point (i.e., the first station) has the smallest remaining available processing resources, which means it has the smallest remaining available slice area. Figure 3 The total area of ​​the small gray rectangles shown is the minimum area of ​​the release point, which is the station with the least remaining available processing resources.

[0066] In some implementations, the process stage includes a pre-specified process stage that requires the completion of a preset process flow within a preset time period, i.e., the aforementioned positive time-constrained process stage.

[0067] However, it should be noted that the embodiments of this application are not limited to this, and may also include the control of other process stages such as negative time-limited process stages.

[0068] In some implementations, determining the remaining available processing resources at each station in the current process stage includes:

[0069] Determine the available and required processing resources for each station in the current process stage;

[0070] For each of the aforementioned sites, the available processing resources of that site are subtracted from the required processing resources of that site to obtain the remaining available processing resources of that site.

[0071] In some implementations, for each of the sites, the available processing resources for that site do not include the site's offset resources, which include processing resources for equipment scheduled for maintenance and processing resources for equipment temporarily interrupted.

[0072] return Figure 3For example, regarding the available processing resources at a station: At the release point (the initial station, i.e., the first step of this forward time-constrained process phase), the available processing resources include 4 segments, i.e., 4 smaller rectangles; at process point 1, the available processing resources include 12 available segments, i.e., 6 larger gray rectangles. One larger gray rectangle is equivalent to the area of ​​two smaller rectangles. Therefore, if we take the smaller rectangles as the standard, i.e., 1 smaller rectangle is equivalent to 1 segment, then process point 1 is equivalent to having 12 available segments; similarly, process point 2 is equivalent to having 8 available segments; process point 3 is equivalent to having 16 available segments; and the end point is equivalent to having 8 available segments. Among them, equipment B2 in process point 1 has 4 deductible segments. The deductible segment of the equipment is, for example: (equipment planned PM start time - planned PM end time) * 1. In addition, the deductible segment also includes the deduction caused by temporary interruptions. Therefore, the deductible segment is the equipment's inability to produce * the number of chambers.

[0073] return Figure 3 For example, regarding the demand processing resources of a site: that is, the demand fragments of a site, which is the number of products that have arrived at the site multiplied by minutes, i.e., product recipe time (in minutes) * number of product fragments.

[0074] The recipe time refers to the product's preset standard processing time. Therefore, it can be concluded that:

[0075] At the release point, the available processing resources include 4 slices, with no demand for slices, leaving 4 available slices. At process point 1, the available processing resources include 12 slices, but there are 4 demand slices, therefore, 8 available slices remain. Similarly, process point 2 has 8 remaining available slices; process point 3 is equivalent to 12 remaining available slices; and the end point is equivalent to 6 remaining available slices. Therefore, the release point has the fewest remaining available slices, meaning it is the station with the fewest remaining available processing resources in that process stage.

[0076] In some implementations, the available processing resources for each of the said sites are determined in the following manner:

[0077] For each piece of equipment at this site, determine the available processing resources for that equipment;

[0078] The available processing resources of the site are summed up for each device.

[0079] Each site may include one or more devices. The available processing resources of each device, also known as individual available fragments, are calculated as follows:

[0080] Number of main reaction chambers in the equipment * calculation time period.

[0081] The single available wafer fraction refers to the number of wafers that each processing production unit needs at a time, or the number of wafers that can be processed. The reaction chamber is a unit that can complete one process for each device. The number of chambers of the current device varies from 2 to 24, and the chambers are in a substitution relationship and can be used in parallel. The calculation time period refers to the length of time for system calculation, that is, the preset time length, such as 1 day.

[0082] The single available wafer fraction can also be referred to as "single device available wafer fraction". The calculation time period refers to the available production time of the device. The number of main reaction chambers of the device refers to the capacity of the device, that is, the number of wafers that can be processed at the same time. The piece-by-piece production device can be installed with multiple equivalent production units.

[0083] Therefore, the available processing resources of the station, which can also be referred to as the site available wafer fraction, are calculated, for example, as the sum of all single available wafer fractions in the site.

[0084] Therefore, in some embodiments, for each device of the station, the available processing resources of the device are determined, including:

[0085] The number of main reaction chambers of the device (that is, the number of main chambers) is multiplied by the preset time length (that is, the calculation time period described above) to obtain the available processing resources of the device (that is, the single available wafer fraction described above).

[0086] In some embodiments, for each of the stations, the required processing resources of the station are determined in the following manner:

[0087] For each of the stations, the number of products that have arrived at the station is multiplied by the preset standard processing time of each product to obtain the required processing resources of the station (that is, the required wafer fraction described above).

[0088] That is, in the embodiments of the present application, the number of products flowing into the station (that is, the number of wafers arriving at the station) and the recipe time can be multiplied to obtain the "required wafer fraction".

[0089] In the embodiments of the present application, the site available area-demand area = available wafer fraction gap (that is, the remaining available wafer fraction) is used. The embodiments of the present application pursue site available wafer fraction gap = 0.

[0090] In summary, the specific flow of the semiconductor product production control method provided by the embodiments of the present application is, for example Figure 4 as shown (the specific content is not described again), wherein the release checkpoint device, that is, the functional module provided at the release point for implementing the flow of the semiconductor product production control method provided by the embodiments of the present application.

[0091] That is, the embodiment of the present application can maximize the number of pieces passing through the loop and minimize the time, which is superior to the original industry that pursues the maximum passing capacity but not the minimum time. Moreover, once there is an abnormality in the equipment in the process stage, the embodiment of the present application can minimize the abnormality and can be incorporated into the PM plan.

[0092] However, the industry usually uses the little rule to set the water level of the material to be processed, thereby controlling the production cycle of each point in the loop. Since the material has multiple different processing procedures in one station, this algorithm is not accurate, so in reality, the water level of the inventory is always with a margin. Therefore, the production cycle time of the prior art is also with a margin. The target of the embodiment of the present application is to fill the producible area just enough based on the completely accurate area consumption, and will not fill the excess inventory. Therefore, there is no loss and no excess time. The positive time-limited process is better the shorter the time is, which contributes to the yield invisibly.

[0093] Referring to Figure 5 The production control system of the semiconductor product provided by the embodiment of the present application comprises a manufacturing execution system (MES), a database (storing historical records), a limited process scheduling system, and a device PM plan system (i.e., a device maintenance plan system, which is used to provide information of devices to be maintained to the production control device), wherein the above-mentioned method provided by the embodiment of the present application is applied to the limited process scheduling system shown in Figure 5 , that is, the production control device of the semiconductor product provided by the embodiment of the present application.

[0094] The following describes the device or apparatus provided by the embodiment of the present application, wherein the explanation or illustration of the same or corresponding technical features in the above-mentioned method will not be repeated.

[0095] Referring to Figure 6 The production control device of the semiconductor product provided by the embodiment of the present application comprises:

[0096] The processor 600 is used to read the program in the memory 620 and execute the following processes:

[0097] If there is a semiconductor product to be executed in the current process stage, the remaining available processing resources of each station in the current process stage are determined, and the station with the smallest remaining available processing resource in the current process stage is determined.

[0098] If the site with the least remaining available processing resource in the current process stage meets the preset semiconductor product release condition, the semiconductor product is controlled to start performing the current process stage.

[0099] In some embodiments, the process stage includes a process stage that is designated in advance to require a preset process flow to be completed within a preset time length.

[0100] In some embodiments, the determining of the remaining available processing resource of each site in the current process stage includes:

[0101] determining the available processing resource and the required processing resource of each site in the current process stage;

[0102] for each site, subtracting the required processing resource of the site from the available processing resource of the site to obtain the remaining available processing resource of the site.

[0103] In some embodiments, for each site, the available processing resource of the site is determined by:

[0104] for each device of the site, determining the available processing resource of the device;

[0105] summing the available processing resource of each device of the site to obtain the available processing resource of the site.

[0106] In some embodiments, the determining of the available processing resource of each device of the site includes:

[0107] multiplying the number of main reaction chambers of the device by the preset time length to obtain the available processing resource of the device.

[0108] In some embodiments, for each site, the required processing resource of the site is determined by:

[0109] for each site, multiplying the number of products that have arrived at the site by the preset standard processing time of each product to obtain the required processing resource of the site.

[0110] In some embodiments, for each site, the available processing resource of the site does not include the deduction resource of the site, and the deduction resource includes the processing resource of a device scheduled for maintenance and the processing resource of a temporarily interrupted device.

[0111] In some embodiments, the deduction resource of the site includes:

[0112] the non-production time of the device of the site multiplied by the number of chambers.

[0113] In some embodiments, the determining the remaining available processing resources of each station in the current process stage comprises determining the remaining available processing resources of each station in the current process stage within a preset judgment period, wherein the judgment period length is:

[0114] the sum of the processing time of all stations in the current process stage + (the number of stations in the current process stage - 1) * the standard transfer time;

[0115] wherein the standard transfer time is a preset product transfer time between adjacent stations.

[0116] In some embodiments, the transceiver 610 is further included for receiving and transmitting data under the control of the processor 600.

[0117] wherein, in Figure 6 the bus architecture can include any number of interconnected buses and bridges, specifically linking various circuits of the one or more processors represented by the processor 600 and the memory represented by the memory 620. The bus architecture can also link various other circuits such as peripheral devices, voltage regulators, and power management circuits, which are well known in the art, and therefore, are not further described herein. The bus interface provides an interface. The transceiver 610 can be a plurality of elements, i.e., including a transmitter and a receiver, providing a unit for communicating with various other devices on a transmission medium.

[0118] In some embodiments, the user interface 630 is further included, which can be an interface capable of externally or internally connecting a required device, including but not limited to a keypad, a display, a speaker, a microphone, a joystick, etc.

[0119] The processor 600 is responsible for managing the bus architecture and general processing, and the memory 620 can store data used by the processor 600 in performing operations.

[0120] In some embodiments, the processor 600 can be a CPU (Central Processor), an ASIC (Application Specific Integrated Circuit), an FPGA (Field-Programmable Gate Array), or a CPLD (Complex Programmable Logic Device).

[0121] The production control device for semiconductor products provided in the embodiments of the present application can be a single control device, or can refer to the entire production equipment for semiconductor products, which comprises a functional module for implementing the production control method for semiconductor products provided in the embodiments of the present application.

[0122] Referring to Figure 7 The production control device for semiconductor products provided in the embodiments of the present application comprises:

[0123] The first unit 11 is configured to determine the remaining available processing resources of each station in the current process stage, and determine the station with the least remaining available processing resources in the current process stage, if there is a semiconductor product to be executed in the current process stage.

[0124] The second unit 12 is configured to control the semiconductor product to start executing the current process stage, if the station with the least remaining available processing resources in the current process stage meets the preset semiconductor product release condition.

[0125] In some embodiments, the process stage comprises a process stage that is designated in advance to require a preset process flow to be completed within a preset time length.

[0126] In some embodiments, the determination of the remaining available processing resources of each station in the current process stage comprises:

[0127] determining the available processing resources and the required processing resources of each station in the current process stage.

[0128] For each station, the available processing resources of the station are subtracted by the required processing resources of the station to obtain the remaining available processing resources of the station.

[0129] In some embodiments, for each station, the available processing resources of the station are determined by:

[0130] For each device of the station, the available processing resources of the device are determined.

[0131] The available processing resources of each device of the station are summed to obtain the available processing resources of the station.

[0132] In some embodiments, the determination of the available processing resources of each device of the station comprises:

[0133] The number of main reaction chambers of the device is multiplied by the preset time length to obtain the available processing resources of the device.

[0134] In some embodiments, for each station, the required processing resources of the station are determined by:

[0135] For each of the stations, the number of products that have arrived at the station is multiplied by a preset standard processing time of each product to obtain a required processing resource of the station.

[0136] In some embodiments, for each of the stations, the available processing resource of the station does not include a deduction resource of the station, the deduction resource including a processing resource of a device scheduled for maintenance and a processing resource of a temporarily interrupted device.

[0137] In some embodiments, the deduction resource of the station includes:

[0138] The number of chambers of the device of the station that cannot produce.

[0139] In some embodiments, the determining the remaining available processing resource of each station in the current process stage includes determining the remaining available processing resource of each station in the current process stage within a preset determination period, wherein the determination period is:

[0140] The sum of the processing time of all stations in the current process stage + (the number of stations in the current process stage - 1) * a standard transfer time;

[0141] The standard transfer time is a preset product transfer time between adjacent stations.

[0142] It should be noted that the division of units in the embodiments of the present application is illustrative, and is only a logical functional division. In actual implementation, there can be another division manner. In addition, each functional unit in each embodiment of the present application can be integrated in one processing unit, or each unit can be physically present alone, or two or more units can be integrated in one unit. The integrated unit can be realized in the form of hardware or in the form of a software functional unit.

[0143] The integrated unit, if implemented in the form of a software function unit and sold or used as an independent product, can be stored in a computer readable storage medium. Based on such understanding, the technical solutions of the present application essentially or say the part that contributes to the prior art or the whole or part of the technical solutions can be embodied in the form of a software product. The computer software product is stored in a storage medium and includes a number of instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) or a processor to perform all or part of the steps of the methods described in various embodiments of the present application. The aforementioned storage medium includes: a U disk, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk, and various media that can store program codes.

[0144] The embodiments of the present application provide a computing device, which can be a desktop computer, a portable computer, a smart phone, a tablet computer, a personal digital assistant (PDA), etc. The computing device can include a central processing unit (CPU), a memory, an input / output device, etc. The input device can include a keyboard, a mouse, a touch screen, etc. The output device can include a display device, such as a liquid crystal display (LCD), a cathode ray tube (CRT), etc.

[0145] The memory can include a read-only memory (ROM) and a random access memory (RAM), and provide the processor with program instructions and data stored in the memory. In the embodiments of the present application, the memory can be used to store the programs of any of the methods provided in the embodiments of the present application.

[0146] The processor calls the program instructions stored in the memory, and the processor is used to execute any of the methods provided in the embodiments of the present application according to the obtained program instructions.

[0147] The embodiments of the present application further provide a computer program product or computer program, which comprises computer instructions stored in a computer readable storage medium. A processor of a computer device reads the computer instructions from the computer readable storage medium, and the processor executes the computer instructions to enable the computer device to perform any of the methods described in the above embodiments. The program product can adopt any combination of one or more readable media. The readable medium can be a readable signal medium or a readable storage medium. The readable storage medium may, for example, be but is not limited to an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, device or apparatus, or any combination of the above. More specific examples (non-exhaustive list) of the readable storage medium include an electrical connection having one or more wires, a portable disc, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disc read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above.

[0148] The embodiments of the present application provide a computer readable storage medium for storing computer program instructions for the apparatus provided in the above embodiments of the present application, which contains programs for executing any of the methods provided in the above embodiments of the present application. The computer readable storage medium can be a non-transitory computer readable medium.

[0149] The computer readable storage medium can be any available medium or data storage device that can be accessed by a computer, including but not limited to a magnetic storage (such as a floppy disk, a hard disk, a magnetic tape, a magneto-optical disk (MO), etc.), an optical storage (such as a CD, a DVD, a BD, a HVD, etc.), and a semiconductor storage (such as a ROM, an EPROM, an EEPROM, a non-volatile memory (NAND FLASH), a solid state disk (SSD)), etc.

[0150] It should be understood that:

[0151] The access technology via which entities in a communication network communicate traffic to and from each other can be any suitable current or future technology, such as WLAN (Wireless Local Access Network), WiMAX (Worldwide Interoperability for Microwave Access), LTE, LTE-A, 5G, Bluetooth, infrared, etc. can be used; in addition, embodiments can also apply wired technologies, for example, IP-based access technologies, such as wired networks or fixed lines.

[0152] Embodiments suitable for being implemented as software code or parts thereof and being run using a processor or processing functionality are independent of the software code and can be specified using any known or future developed programming language, such as a high-level programming language, such as objective-C, C, C++, C#, Java, Python, Javascript, other scripting languages, etc., or a low-level programming language, such as a machine language or assembler.

[0153] Embodiments are independent of hardware and can be implemented using any known or future developed hardware technology or any hybrid of these, such as a microprocessor or CPU (Central Processing Unit), MOS (Metal Oxide Semiconductor), CMOS (Complementary Metal-Oxide Semiconductor), BiMOS (Bipolar MOS), BiCMOS (Bipolar CMOS), ECL (Emitter Coupled Logic), and / or TTL (Transistor-Transistor Logic).

[0154] Embodiments can be implemented as a single device, apparatus, unit, component or function, or in a distributed manner as e.g. one or more processors or processing functionality can be used or shared in processing, or one or more processing segments or processing portions can be used and shared in processing, wherein one physical processor or more than one physical processor can be used for implementing one or more processing portions dedicated to specific processing as described.

[0155] The apparatus can be implemented by a semiconductor chip, a chipset, or a (hardware) module including such chip or chipset.

[0156] Embodiments can also be implemented as any combination of hardware and software, such as an ASIC (Application Specific IC (Integrated Circuit)) component, a FPGA (Field-Programmable Gate Array) or CPLD (Complex Programmable Logic Device) component or a DSP (Digital Signal Processor) component.

[0157] Embodiments can also be implemented as a computer program product comprising a computer-readable storage medium having stored thereon a computer readable program code which adapts a processor to carry out processes as described in embodiments, wherein the computer-readable storage medium can be a non-transitory medium.

[0158] Those skilled in the art will appreciate that embodiments of the present application can be provided as a method, system, or computer program product. Accordingly, the present application can take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the present application can take the form of a computer program product on one or more computer-readable storage media (including, but not limited to, magnetic disks under a storage medium and optical storage media, etc.) embodying computer readable program code.

[0159] The computer program instructions can also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer-implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart block or blocks. Figure 1 one or more flow or blocks. Figure 1 one or more flow or blocks.

[0160] These computer program instructions can also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instructions which implement the function specified in the flowchart block or blocks. Figure 1 one or more flow or blocks. Figure 1 one or more flow or blocks.

[0161] The computer program instructions can also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer-implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart block or blocks. Figure 1 one or more flow or blocks. Figure 1 one or more flow or blocks.

[0162] Obviously, numerous modifications and variations of the present application are possible in light of the above teachings. It is therefore to be understood that within the scope of the appended claims and their equivalents, the application can be practiced otherwise than as specifically described.

Claims

1. A production control method of a semiconductor product, characterized by, The method comprises: If there is a semiconductor product to be executed in the current process stage, For each station in the current process stage, the wafer area obtained by multiplying the number of main reaction chambers of each device in the station by the preset time length is taken as the available processing resource of the device, and the available processing resources of the devices in the station are summed to obtain the available processing resource of the station; Determine the available processing resources of the stations in the current process stage; For each station in the current process stage, the wafer area obtained by multiplying the number of products that have arrived at the station by the preset standard processing time of each product is taken as the demand processing resource of the station; Determine the demand processing resources of the stations in the current process stage; For each station in the current process stage, the wafer area obtained by subtracting the demand processing resource of the station from the available processing resource of the station is taken as the remaining available processing resource of the station; Determine the remaining available processing resources of the stations in the current process stage; Determine the station with the smallest remaining available processing resource in the current process stage; If the remaining available processing resource in the station with the smallest remaining available processing resource in the current process stage is greater than a preset value, control the semiconductor product to start executing the current process stage.

2. The method according to claim 1, wherein the process stage comprises a process stage that requires a preset process flow to be completed within a preset time length.

3. The method according to claim 1, wherein for each station, the available processing resource of the station does not include deduction resources of the station, and the deduction resources include processing resources of devices scheduled for maintenance and processing resources of temporarily interrupted devices. The deduction resources of the station include: The number of chambers of the devices in the station that cannot produce.

4. The method of claim 3, wherein, 5. The method according to claim 1, wherein the determination of the remaining available processing resources of the stations in the current process stage comprises determining the remaining available processing resources of the stations in the current process stage within a preset judgment period, and the judgment period length is: The sum of the processing times of all stations in the current process stage + (the number of stations in the current process stage - 1) * the standard transfer time; Wherein, the standard transfer time is the preset product transfer time between adjacent stations. It comprises: A memory for storing program instructions; A processor for calling the program instructions stored in the memory to execute the method according to any one of claims 1 to 5.

6. A semiconductor product production control device characterized by comprising:

7. A semiconductor product production control system, comprising the production control device according to claim 6, and a device maintenance planning system connected to the production control device, wherein the device maintenance planning system is configured to provide information of devices scheduled for maintenance to the production control device. It further comprises: A manufacturing execution system connected to the production control device. It further comprises: A database connected to the manufacturing execution system.

8. The production control system according to claim 7, characterized by 10. A computer program product for a computer, comprising program instructions for causing the computer to perform the method according to any one of claims 1 to 5. ​ 9. The production control system according to claim 8, characterized in that, ​ ​ ​ comprising software code portions being means for performing the method according to any one of claims 1 to 5 when the product is run on the computer.

11. A computer-readable storage medium, characterized in that, the computer-readable storage medium has stored computer-executable instructions for causing the computer to perform the method according to any one of claims 1 to 5.

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