Full-automatic CVD tail gas neutralization device

Abstract

The application provides a full-automatic CVD tail gas neutralization device, which comprises a tail gas neutralization circulating system, an alkali liquor heat exchange circulating system, at least two alkali liquor barrels and a control device, the tail gas neutralization circulating system and the alkali liquor heat exchange circulating system are electrically connected with the control device respectively, and a filtering device is installed on each alkali liquor barrel; the tail gas neutralization circulating system comprises a pump frame and a water ring pump set, the water ring pump set is installed on the pump frame, an input end of the water ring pump set is communicated with a CVD device, and an output end of the water ring pump set is communicated with the filtering device; the alkali liquor heat exchange circulating system comprises a magnetic pump set and a heat exchanger set, an input end of the magnetic pump set is connected with the alkali liquor barrel, an output end of the magnetic pump set is connected with an input end of the heat exchanger set, and an output end of the heat exchanger set is connected with the alkali liquor barrel. Through the arrangement of the water ring pump set, the tail gas of multiple CVD devices can be treated simultaneously, the standby device can be automatically switched, the maintenance can be carried out without shutdown, and the production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of chemical vapor deposition, and particularly relates to a full-automatic CVD tail gas neutralization device. BACKGROUND

[0002] CVD is short for chemical coating furnace, which is a main equipment for producing hard alloy coated tools. The working principle of CVD is that process gas is chemically reacted at a rated temperature and pressure to cover a dense thin film on the surface of the tool, thereby improving the service life of the tool. When the coated tool is chemically reacted in the reaction chamber, part of the by-products and excess gas are generated, which must be discharged from the reaction chamber to ensure the film performance of the hard alloy coated tool. The tail gas discharged by CVD contains acidic gases such as hydrogen chloride and hydrogen sulfide, so the discharged tail gas needs to be neutralized by acid and alkali to ensure that the environment is not polluted. The CVD tail gas neutralization device is a special equipment for treating CVD tail gas neutralization.

[0003] The existing CVD tail gas neutralization device can only treat the tail gas of one CVD device, and when the key components such as alkali tank, valve and pump group fail, the device needs to be stopped for maintenance, which causes the CVD to be unable to operate normally.

[0004] Therefore, a new technical solution is needed to solve the above technical problems. SUMMARY

[0005] In view of the deficiencies in the prior art, the purpose of the present application is to provide a full-automatic CVD tail gas neutralization device, which can treat the tail gas of multiple CVD devices at the same time, and the key components can be automatically switched, so that maintenance can be carried out without stopping, thereby improving the production efficiency.

[0006] In order to achieve the above purpose, the present application provides a full-automatic CVD tail gas neutralization device, which comprises a tail gas neutralization circulation system, an alkali heat exchange circulation system, at least two alkali tanks and a control device, the tail gas neutralization circulation system and the alkali heat exchange circulation system are respectively electrically connected with the control device, and each alkali tank is provided with a filter device; the tail gas neutralization circulation system comprises a pump frame and a water ring pump group, the water ring pump group is installed on the pump frame, the input end of the water ring pump group is communicated with a CVD device, and the output end of the water ring pump group is communicated with the filter device; the alkali heat exchange circulation system comprises a magnetic pump group and a heat exchanger group, the input end of the magnetic pump group is connected with the alkali tank, the output end of the magnetic pump group is connected with the input end of the heat exchanger group, and the output end of the heat exchanger group is connected with the alkali tank.

[0007] Further technical solutions, the water ring pump group includes a first conveying pipeline and at least two water ring pumps, the input end of each water ring pump is communicated with a CVD equipment respectively, the output end of each water ring pump is communicated with the input end of the first conveying pipeline respectively, the first conveying pipeline is provided with a port corresponding to the number of filter devices, and the output end of the first conveying pipeline is connected with the filter devices through the port.

[0008] Further technical solutions, each water ring pump is provided with a nitrogen gas charging device, a first control valve is arranged between the filter device and the lye barrel, and the filter device and the first control valve are electrically connected with the control device respectively.

[0009] Further technical solutions, the water ring pump group and the lye barrel are provided with a second conveying pipeline, the second conveying pipeline is provided with a port corresponding to the number of lye barrels, the second conveying pipeline is connected with the lye barrel through the port, and each water ring pump is communicated with the second conveying pipeline.

[0010] Further technical solutions, a second control valve is arranged on the port of the second conveying pipeline, and a plurality of second control valves are electrically connected with the control device.

[0011] Further technical solutions, the lye barrel is provided with a stirring device and a PH value detection device, and the stirring device, the PH value detection device and the flow meter are electrically connected with the control device respectively.

[0012] Further technical solutions, the magnetic force pump group includes at least two magnetic force pumps and a third conveying pipeline, the output end of a plurality of magnetic force pumps is communicated with the input end of the heat exchanger group respectively, the input end of the third control pipeline is provided with a port corresponding to the number of lye barrels, the third control pipeline is connected with the lye barrel through the port, the output end of the third control pipeline is also provided with a port corresponding to the number of magnetic force pumps, the third control pipeline is communicated with the magnetic force pumps through the port, the input end of the magnetic force pump is provided with a third control valve, and the third control valve and each magnetic force pump are electrically connected with the control device respectively.

[0013] Further technical solutions, the heat exchanger group includes at least two heat exchangers and a fourth conveying pipeline, the input end of the fourth conveying pipeline is communicated with the output end of the magnetic force pump group, and the output end of the fourth conveying pipeline is provided with a port corresponding to the number of heat exchangers; the fourth conveying pipeline is communicated with the heat exchangers through the port.

[0014] Further technical solutions, the heat exchanger group further includes a fifth conveying pipeline, the input end of the fifth conveying pipeline is communicated with the heat exchanger, the output end of the fifth conveying pipeline is provided with a port corresponding to the number of the lye barrels, the fourth control valve is arranged on the port, the fifth conveying pipeline is communicated with the lye barrels through the port, the flow meter is installed on the fourth conveying pipeline, and the flow meter, the fourth control valve and each heat exchanger are electrically connected with the control device respectively.

[0015] Further technical solutions, the control device includes a control cabinet and a display screen, and the control cabinet is electrically connected with the CVD control cabinet.

[0016] Compared with the prior art, the present application has the following technical effects:

[0017] The full-automatic CVD tail gas neutralization device can process the tail gas of multiple CVDs simultaneously, and can automatically switch to a standby device when a key component fails or the lye barrel needs to be cleaned, so that maintenance can be carried out without stopping the machine, and the production efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed in the embodiments will be briefly introduced as follows, and it should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope, and for those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0019] Fig. 1 It is a structural schematic diagram of the present application.

[0020] Fig. 2 It is a top view of the present application.

[0021] Main element symbol explanation:

[0022] 1-tail gas neutralization circulating system, 11-pump frame, 12-water ring pump group, 121-water ring pump, 13-first conveying pipeline, 14-second conveying pipeline;

[0023] 2-lye heat exchange circulating system, 21-magnetic pump group, 211-magnetic pump, 22-heat exchanger group, 221-heat exchanger, 23-third control pipeline, 24-fourth conveying pipeline, 241-flow meter, 25-fifth conveying pipeline;

[0024] 3-lye barrel, 31-stirring device, 32-PH value detection device;

[0025] 4 - control device, 41 - first control valve, 42 - second control valve, 43 - third control valve, 44 - fourth control valve, 45 - control cabinet, 46 - display screen;

[0026] 5 - filtering device. DETAILED DESCRIPTION

[0027] Embodiments of the present application are described in detail below with reference to the attached drawings, which show by way of example, embodiments in which the same or similar elements have the same or similar reference numbers. The embodiments described below are examples only, and are not to be construed as limiting the present application.

[0028] In the description of the present application, it is to be understood that the orientations or positional relationships indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0029] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features referred to. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0030] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0031] In the present application, unless otherwise explicitly specified and limited, a first feature is "on" or "under" a second feature can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature is "over", "above" and "on top of" the second feature can be that the first feature is directly above or obliquely above the second feature, or only means that the first feature is horizontally higher than the second feature. The first feature is "under", "below" and "underneath" the second feature can be that the first feature is directly below or obliquely below the second feature, or only means that the first feature is horizontally lower than the second feature.

[0032] Embodiment

[0033] See Figs. 1-2 As shown in the figure, a full-automatic CVD tail gas neutralization device includes a tail gas neutralization circulating system 1, an alkali solution heat exchange circulating system 2, at least two alkali solution barrels 3 and a control device 4, the tail gas neutralization circulating system 1 and the alkali solution heat exchange circulating system 2 are respectively electrically connected with the control device 4, and each of the alkali solution barrels 3 is provided with a filter device 5; the tail gas neutralization circulating system 1 includes a pump frame 11 and a water ring pump group 12, the water ring pump group 12 is installed on the pump frame 11, an input end of the water ring pump group 12 is communicated with a CVD device, and an output end of the water ring pump group 12 is communicated with the filter device 5; the alkali solution heat exchange circulating system 2 includes a magnetic pump group 21 and a heat exchanger group 22, an input end of the magnetic pump group 21 is connected with the alkali solution barrel 3, an output end of the magnetic pump group 21 is connected with an input end of the heat exchanger group 22, and an output end of the heat exchanger group 22 is connected with the alkali solution barrel 3.

[0034] The working principle of the present application is that tail gas discharged by CVD reacts with hydrogen chloride and hydrogen sulfide gas in the CVD tail gas through alkali solution in the water ring pump group 12 to generate an acid-base neutralization chemical reaction:

[0035] HCl + NaOH → NaCl + H2O

[0036] H2S + 2NaOH → Na2S + 2H2O

[0037] After the reaction, salt substances generated are flowed to the alkali solution barrel with the alkali solution and are deposited at the bottom. Non-reacted gases such as nitrogen, carbon dioxide and hydrogen (trace amount) which are non-corrosive gases are discharged into the atmosphere through the filter. At the same time, the alkali solution in the alkali solution barrel is cooled and exchanged to ensure that the temperature of the alkali solution in the alkali solution barrel is stable.

[0038] The application can simultaneously treat the tail gas of multiple CVDs by setting the water ring pump set 12, that is, the tail gas of multiple CVDs is discharged into the water ring pump set 12 and chemically reacts with the lye in the water ring pump 121. By setting the multiple lye barrels 3, the magnetic pump set 21 and the heat exchanger set 22, when the components fail or the lye barrels 3 need to be cleaned, the standby device can be automatically switched, and the maintenance can be carried out without stopping the machine, thereby improving the production efficiency. It should be noted that the number of lye barrels 3 in the application is two, and in other specific embodiments, the number can also be three or four. When treating the tail gas, one lye barrel 3 works, and when the lye barrel 3 needs to be cleaned after working for a certain period of time, the other lye barrel 3 can be directly switched to work, and then cleaned.

[0039] In further specific embodiments, the water ring pump set 12 comprises a first conveying pipeline 13 and at least two water ring pumps 121, the input end of each water ring pump 121 is in communication with a CVD device, the output end of each water ring pump 121 is in communication with the input end of the first conveying pipeline 13, the first conveying pipeline 13 is provided with ports corresponding to the number of filter devices 5, and the output end of the first conveying pipeline 13 is connected with the filter devices 5 through the ports.

[0040] As a preferred embodiment, the number of water ring pumps 121 in the application is four, that is, four water ring pumps 121 can respectively treat the tail gas of four CVDs, and in other specific embodiments, the number of water ring pumps 121 can also be three or four. The multiple water ring pumps 121 respectively convey the lye to the filter devices 5 through the first conveying pipeline 13, the tail gas chemically reacts with the lye at the water ring pumps 121, the unreacted gas such as nitrogen, carbon dioxide, hydrogen (trace amount) and other non-corrosive gas is discharged into the atmosphere at the filter devices 5, and the remaining lye containing harmful gas such as sodium chloride enters the lye barrels 3 through the filter devices 5.

[0041] In further specific embodiments, each water ring pump 121 is respectively provided with a nitrogen charging device, a first control valve 41 is arranged between the filter devices 5 and the lye barrels 3, and the filter devices 5 and the first control valve 41 are respectively electrically connected with the control device 4. By arranging the nitrogen charging device, the cavitation of the water ring pump 121 can be reduced. The control device 4 can control the opening or closing of the two lye barrels 3 and the two filter devices 5. It should be noted that under the normal flow, only one lye barrel 3 and the filter corresponding to the lye barrel 3 need to be opened to work. When the lye barrel 3 or the filter needs to be maintained, the control device 4 controls the lye barrel 3 and the filter to stop working, the first control valve 41 is closed, and the other standby lye barrel 3 and filter continue to work.

[0042] Further, in a specific embodiment, the water ring pump group 12 is provided with a second conveying pipeline 14, the second conveying pipeline 14 is provided with ports corresponding to the number of the alkali liquid barrels 3, the second conveying pipeline 14 is connected with the alkali liquid barrels 3 through the ports, and each water ring pump 121 is communicated with the second conveying pipeline 14.

[0043] The water ring pump 121 needs to be replenished with water during use, so it directly extracts alkali liquid from the alkali liquid barrel 3 to replenish, when it is necessary to switch to use the alkali liquid barrel 3, the control device 4 controls the ports on the second conveying pipeline 14 to close the communication with the alkali liquid barrel 3, and opens another port to enable another alkali liquid barrel 3 to work.

[0044] Further, in a specific embodiment, the alkali liquid barrel 3 is provided with a stirring device 31 and a PH value detection device 32, the stirring device 31, the PH value detection device 32 and the flow meter 241 are respectively electrically connected with the control device 4.

[0045] The PH value of the alkali liquid in the alkali liquid barrel 3 is between 12.5-15 when it is used for the first time, and it will continue to decrease after a long time of use, when it decreases to a certain extent, the alkali liquid in the alkali liquid barrel 3 needs to be replaced, the PH value detection device 32 monitors the alkali liquid and transmits data to the control device 4, when it reaches a set value, the control device 4 automatically switches the alkali liquid barrel 3 to work, and reminds the staff to replace the alkali liquid. It should be noted that the alkali liquid needs to be replaced when the PH value is lower than 11.

[0046] Further, in a specific embodiment, the magnetic pump group 21 includes at least two magnetic pumps 211 and a third conveying pipeline, the output ends of the plurality of magnetic pumps 211 are respectively communicated with the input ends of the heat exchanger group 22, the input end of the third conveying pipeline 23 is provided with ports corresponding to the number of the alkali liquid barrels 3, the third conveying pipeline 23 is connected with the alkali liquid barrels 3 through the ports, the output end of the third conveying pipeline 23 is also provided with ports corresponding to the number of the magnetic pumps 211, the third conveying pipeline 23 is communicated with the magnetic pumps 211 through the ports, the input ends of the magnetic pumps 211 are provided with third control valves 43, and the third control valves 43 and each magnetic pump 211 are respectively electrically connected with the control device 4.

[0047] As a preferred embodiment, the number of the magnetic force pumps 211 in the embodiment is two, and in other embodiments, the number of the magnetic force pumps 211 can also be three or four, and the user can increase the number of the magnetic force pumps 211 according to the actual use.

[0048] When the magnetic force pump 211 fails, the control device 4 can control one of the magnetic force pumps 211 to stop working and open another magnetic force pump 211 for use. That is, the port of the output end of the lye barrel 3 is opened or closed.

[0049] When the lye barrel 3 needs to be overhauled, the control device 4 can also control the output port of the lye barrel 3 to be closed, and then open the output port of another lye barrel 3, so as to complete the switching of the lye barrel 3.

[0050] In further embodiments, the heat exchanger group 22 includes at least two heat exchangers 221 and a fourth conveying pipeline 24, the input end of the fourth conveying pipeline 24 is in communication with the output end of the magnetic force pump group 21, and the output end of the fourth conveying pipeline 24 is provided with ports corresponding to the number of heat exchangers 221, and the fourth conveying pipeline 24 is in communication with the heat exchangers 221 through the ports.

[0051] It should be noted that the neutralization of acid and alkali is an exothermic reaction, and the temperature will rise during the reaction. If the temperature is too high, the equipment will not meet the requirements for use, and therefore the heat exchanger 221 needs to be used to cool it. The temperature of the cold source in the heat exchanger 221 is 12-13℃, and the temperature of the lye after the exothermic reaction is between 20-30℃. After the cooling treatment of the heat exchanger 221, the temperature of the lye will be greatly reduced, thereby reducing the use pressure of the equipment.

[0052] As a preferred embodiment, the number of the heat exchangers 221 in the embodiment is two, and in other embodiments, the number of the heat exchangers 221 can also be three or four, and the user can increase the number of the heat exchangers 221 according to the actual use.

[0053] In further embodiments, the heat exchanger group 22 further includes a fifth conveying pipeline 25, the input end of the fifth conveying pipeline 25 is in communication with the heat exchangers 221, the output end of the fifth conveying pipeline 25 is provided with ports corresponding to the number of the lye barrels 3, the ports are provided with fourth control valves 44, the fifth conveying pipeline 25 is in communication with the lye barrels 3 through the ports, the fourth conveying pipeline 24 is provided with a flow meter 241, and the flow meter 241, the fourth control valves 44 and each heat exchanger 221 are electrically connected to the control device 4.

[0054] The flow meter 241 in the embodiment is an ultrasonic flow meter.

[0055] When the heat exchanger 221 in use fails, the control device 4 controls the heat exchanger 221 to stop working and another heat exchanger 221 to work, and the lye enters the other heat exchanger 221 through the fourth conveying pipeline 24 and is conveyed into the lye barrel 3 through the fifth conveying pipeline 25.

[0056] When the lye barrel 3 needs to be overhauled, the control device 4 controls the two fourth control valves 44 to open and close, closes the fourth control valve 44 at the lye barrel 3 to be overhauled, opens the fourth control valve 44 at the lye barrel 3 ready to work, and the heat exchanger 221 directly conveys the lye into the lye barrel 3 in work after cooling through the fifth conveying pipeline 25. It should be noted that when one of the lye barrels 3 needs to be overhauled or the lye needs to be replaced, the first control valve 41, the second control valve 42 and the fourth control valve 44 at the lye barrel 3 need to be closed at the same time.

[0057] In further specific embodiments, the control device 4 comprises a control cabinet 45 and a display screen 46, and the control cabinet 45 is electrically connected with the CVD control cabinet 45.

[0058] In order to ensure the normal operation of the CVD coating equipment, the control device 4 and the CVD control cabinet 45 are interlocked and controlled. Main parameters such as liquid level, lye PH value, water temperature in the lye barrel and the like are displayed on the display screen 46 of the CVD control cabinet 45 and loaded to the PLC of the CVD equipment, and the equipment will take corresponding measures according to the difference between the actual value and the set value of the parameters, so as to ensure the stability of the CVD equipment.

[0059] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. In addition, the different embodiments or examples described in the present specification and the features of the different embodiments or examples can be combined and combined by those skilled in the art without contradiction.

[0060] Although the embodiments of the present application have been shown and described above, it is to be understood that the above embodiments are merely exemplary, and are not to be understood as a limitation on the scope of the present application, and that changes, modifications, substitutions and variations can be made therein without departing from the spirit and scope of the present application, for example, different combinations of the specific embodiments, different combinations of the various technical features.

Claims

1. A fully automatic CVD tail gas neutralization device, characterized in that: The tail gas neutralization circulation system and the lye heat exchange circulation system are electrically connected with the control device respectively, and each of the lye barrels is provided with a filtering device; The tail gas neutralization circulation system comprises a pump frame and a water ring pump group, the water ring pump group is installed on the pump frame, an input end of the water ring pump group is communicated with the CVD equipment, and an output end of the water ring pump group is communicated with the filtering device; The lye heat exchange circulation system comprises a magnetic force pump group and a heat exchanger group, an input end of the magnetic force pump group is connected with the lye barrel, an output end of the magnetic force pump group is connected with an input end of the heat exchanger group, and an output end of the heat exchanger group is connected with the lye barrel; The magnetic force pump group comprises at least two magnetic force pumps and a third conveying pipeline, output ends of the magnetic force pumps are respectively communicated with input ends of the heat exchanger group, an input end of the third conveying pipeline is provided with ports corresponding to the number of lye barrels, the third conveying pipeline is connected with the lye barrels through the ports, an output end of the third conveying pipeline is also provided with ports corresponding to the number of magnetic force pumps, the third conveying pipeline is communicated with the magnetic force pumps through the ports, input ends of the magnetic force pumps are provided with third control valves, and the third control valves and the magnetic force pumps are electrically connected with the control device respectively; The heat exchanger group comprises at least two heat exchangers and a fourth conveying pipeline, an input end of the fourth conveying pipeline is communicated with an output end of the magnetic force pump group, and an output end of the fourth conveying pipeline is provided with ports corresponding to the number of heat exchangers, the fourth conveying pipeline is communicated with the heat exchangers through the ports; The water ring pump group comprises a first conveying pipeline and at least two water ring pumps, input ends of the water ring pumps are respectively communicated with the CVD equipment, output ends of the water ring pumps are respectively communicated with an input end of the first conveying pipeline, the first conveying pipeline is provided with ports corresponding to the number of filtering devices, and an output end of the first conveying pipeline is connected with the filtering devices through the ports.

2. The full-automatic CVD tail gas neutralization device according to claim 1, characterized in that: Each of the water ring pumps is provided with a nitrogen gas charging device, a first control valve is arranged between the filtering device and the lye barrel, and the filtering device and the first control valve are electrically connected with the control device respectively.

3. The fully automatic CVD tail gas neutralization device according to claim 1, characterized in that: A second conveying pipeline is arranged between the water ring pump group and the lye barrel, the second conveying pipeline is provided with ports corresponding to the number of lye barrels, the second conveying pipeline is connected with the lye barrels through the ports, and each of the water ring pumps is communicated with the second conveying pipeline.

4. The fully automatic CVD tail gas neutralization device according to claim 3, characterized in that: Second control valves are arranged on the ports of the second conveying pipeline, and the second control valves are electrically connected with the control device.

5. The fully automatic CVD tail gas neutralization device according to claim 1, characterized in that: The lye barrel is provided with a stirring device and a pH value detection device, and the stirring device and the flow meter are electrically connected with the control device respectively.

6. The fully automatic CVD tail gas neutralization device according to claim 1, characterized in that: The heat exchanger group further comprises a fifth conveying pipe, an input end of the fifth conveying pipe being in communication with the heat exchanger, an output end of the fifth conveying pipe being provided with ports corresponding to the number of the lye barrels, the ports being provided with fourth control valves, the fifth conveying pipe being in communication with the lye barrels through the ports, a flow meter being installed on the fourth conveying pipe, the flow meter, the fourth control valves and each of the heat exchangers being electrically connected with the control device.

7. The fully automatic CVD tail gas neutralization device according to claim 1, characterized in that: The control device comprises a control cabinet and a display screen, the control cabinet being electrically connected with a CVD control cabinet.

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