Position error compensation methods, devices, electronic equipment, and non-volatile storage media

Abstract

This application discloses a position error compensation method, apparatus, electronic device, and non-volatile storage medium. The method includes: obtaining a blank orthogonal compensation table corresponding to a target wafer, wherein each cell in the blank orthogonal compensation table corresponds to the position of each die on the target wafer; filling each cell in the blank orthogonal compensation table with a first compensation value to obtain a target orthogonal compensation table; calculating a second compensation value corresponding to the target position based on the target orthogonal compensation table, wherein the target position is any position that the host computer expects the moving component to move to; and compensating the actual movement position of the moving component based on the second compensation value, wherein the compensated actual movement position is the target position. This application solves the technical problem in related technologies where the moving component of a moving probe station has a positional deviation when moving to the target position indicated by the host computer, resulting in poor movement accuracy of the moving component.

Description

Technical Field

[0001] This application relates to the field of probe station positioning technology, and more specifically, to a position error compensation method, device, electronic device, and non-volatile storage medium. Background Technology

[0002] With the rapid development of integrated circuit technology, chip packaging and testing technology is also constantly evolving and innovating. Wafer testing is a crucial step in integrated circuit manufacturing. Accurate testing can promptly eliminate defective products, reduce waste in packaging and testing costs, and improve product yield. As a device used for wafer testing, the probe station's main function is to achieve precise alignment between the wafer pads and the probe card tips. The accuracy of this positional movement has a significant impact on the test results.

[0003] However, since the linear motor in the Stage section of the probe station is not perfectly horizontal mechanically, positional errors will occur when the motor controls the chuck to move from one position to another. This results in problems such as poor accuracy of moving parts, which in turn leads to low efficiency in chip packaging testing.

[0004] There is currently no effective solution to the above problems. Summary of the Invention

[0005] This application provides a position error compensation method, device, electronic device, and non-volatile storage medium to at least solve the technical problem of poor movement accuracy of the moving part of the moving probe station when it moves to the target position indicated by the host computer due to position deviation.

[0006] According to one aspect of the embodiments of this application, a position error compensation method is provided, comprising: obtaining a blank orthogonal compensation table corresponding to a target wafer, wherein each cell in the blank orthogonal compensation table corresponds to the position of each die on the target wafer; filling each cell in the blank orthogonal compensation table with a first compensation value to obtain a target orthogonal compensation table; calculating a second compensation value corresponding to a target position based on the target orthogonal compensation table, wherein the target position is any position that the host computer expects the moving part to move to; and compensating the actual moving position of the moving part based on the second compensation value, wherein the compensated actual moving position is the target position.

[0007] Optionally, filling each cell in the blank orthogonal compensation table with the first compensation value to obtain the target orthogonal compensation table includes: calibrating the data corresponding to the cells around the edge of the blank orthogonal compensation table as the first calibration value; determining the deviation value corresponding to each grain by traversing each grain on the target wafer, and if a deviation value exists, determining the deviation value as the first compensation value of the cell in the blank orthogonal compensation table corresponding to the grain; if no deviation value exists, calibrating the data of the cell in the blank orthogonal compensation table corresponding to the grain as the first calibration value; correcting the first calibration value in the blank orthogonal compensation table according to the first target rule, and determining the corrected blank orthogonal compensation table as the target orthogonal compensation table.

[0008] Optionally, correcting the first calibration value in the blank orthogonal compensation table according to the first target rule includes: determining the cell as the cell to be corrected when the data of the cell in the blank orthogonal compensation table is not less than the first threshold, wherein the first calibration value is not less than the first threshold; correcting the data of the cell to be corrected according to the data of the first auxiliary cell located at the target orientation of the cell to be corrected, wherein the target orientation includes at least one of the following: directly above the cell to be corrected, directly below the cell to be corrected, directly to the left of the cell to be corrected, and directly to the right of the cell to be corrected.

[0009] Optionally, correcting the data of the unit to be corrected based on the data of the first auxiliary unit located at the target orientation of the unit to be corrected includes: adding a first identifier to the first auxiliary unit when the data of the first auxiliary unit is less than a first threshold; correcting the data of the unit to be corrected according to the first correction rule in the first target rule when a preset condition is met, wherein the preset condition is that the first auxiliary unit corresponding to the unit to be corrected has one and only two first identifiers; and correcting the data of the unit to be corrected according to the second correction rule in the first target rule when the preset condition is not met.

[0010] Optionally, correcting the data of the unit to be corrected according to the first correction rule in the first target rule includes: when the data of the two first auxiliary units with first identifiers are both less than the second threshold, the data obtained by summing the data of the two first auxiliary units with first identifiers and then subtracting the second threshold is determined as the first compensation value of the unit to be corrected; when the data of the two first auxiliary units with first identifiers are not both less than the second threshold, the average value of the data of the two first auxiliary units with first identifiers is determined as the first compensation value of the unit to be corrected.

[0011] Optionally, correcting the data of the unit to be corrected according to the second correction rule in the first target rule includes: calculating the average value of the data of the first auxiliary unit with the first identifier in the first auxiliary unit corresponding to the unit to be corrected, and determining the average value as the first compensation value of the unit to be corrected; if there is no first identifier in the first auxiliary unit corresponding to the unit to be corrected, determining the data of the unit to be corrected as the first calibration value.

[0012] Optionally, after correcting the data of the unit to be corrected based on the data of the first auxiliary unit located at the target orientation of the unit to be corrected, the method further includes: adding a second identifier to the corrected unit to be corrected, wherein the second identifier is used to indicate that the data in the unit is obtained after correction.

[0013] Optionally, calculating the second compensation value corresponding to the target position based on the target orthogonal compensation table includes: if the target position is the position corresponding to a cell in the target orthogonal compensation table, determining the first compensation value of the cell as the second compensation value; if the target position is not the position corresponding to a cell in the target orthogonal compensation table, determining four second auxiliary cells in the target orthogonal compensation table corresponding to the target position, wherein the target position is located within the interval enclosed by the positions corresponding to the four second auxiliary cells; and determining the second compensation value corresponding to the target position based on the first compensation values ​​of the four auxiliary cells.

[0014] Optionally, the first compensation value includes: a longitudinal first compensation value and a lateral first compensation value; the second compensation value includes: a longitudinal second compensation value and a lateral second compensation value; determining the second compensation value corresponding to the target position based on the first compensation values ​​of the four auxiliary units includes: calculating the longitudinal second compensation value corresponding to the target position based on the position data corresponding to the four auxiliary units and the longitudinal first compensation value; and calculating the lateral second compensation value corresponding to the target position based on the position data corresponding to the four auxiliary units and the lateral first compensation value.

[0015] Optionally, the method further includes: when the host computer obtains the movement position of the moving part in the slave computer, compensating the real-time position data of the moving part returned by the slave computer according to the second compensation value.

[0016] Optionally, after obtaining the target orthogonal compensation table, the process further includes: verifying whether the target orthogonal compensation table is reliable; and sending an alarm message if the target orthogonal compensation table is determined to be unreliable.

[0017] Optionally, verifying the reliability of the target orthogonal compensation table includes: if there is data in the data corresponding to each cell in the target orthogonal compensation table that is not less than a third threshold, the target orthogonal compensation table is determined to be unreliable; if the data corresponding to each cell in the target orthogonal compensation table is less than the third threshold, the cell in the target orthogonal compensation table corresponding to the center position of the target wafer is determined, and the target orthogonal compensation table is divided into four target regions along the horizontal and vertical directions based on the cell corresponding to the center position of the target wafer; for any target region in the four target regions, if the number of target cells that are consecutively adjacent in the target direction and have a second identifier exceeds a fourth threshold, the target orthogonal compensation table is determined to be unreliable, wherein the second identifier is used to characterize that the data in the cell is obtained after correction, and the target direction includes at least one of the following: longitudinal and transverse.

[0018] Optionally, after determining the cell corresponding to the center position of the target wafer in the target orthogonal compensation table, the method further includes: determining whether the target distance between the compensated position and the center position of the target wafer is greater than the radius of the target wafer based on the position information corresponding to each cell in the target orthogonal compensation table and the first compensation value; if the target distance is not greater than the radius of the target wafer, determining that the compensated position is inside the target wafer, and determining that the cell corresponding to the compensated position is the target cell.

[0019] Optionally, the method further includes: covering a preset number of dies on the target wafer and re-executing the position error compensation method; and determining whether the target orthogonal compensation table generated when the target wafer is not covered is reliable based on whether an alarm message pops up.

[0020] According to another aspect of the embodiments of this application, a position error compensation method is also provided, comprising: calculating a second compensation value corresponding to a target position based on a target orthogonal compensation table, wherein the target position is any position that the host computer expects the moving part to move to, and the target orthogonal compensation table is obtained by filling in the first compensation value corresponding to each cell in the blank orthogonal compensation table corresponding to the target wafer; and compensating the actual moving position of the moving part based on the second compensation value, wherein the compensated actual moving position is the target position.

[0021] According to another aspect of the embodiments of this application, a position error compensation system is also provided, including: an image acquisition device, a moving component, a stage, and a host computer, wherein the image acquisition device is used to acquire data of a target wafer placed on the stage; the moving component is used to move its position by receiving instructions from the host computer; the host computer is used to obtain a blank orthogonal compensation table corresponding to the target wafer, wherein each cell in the blank orthogonal compensation table corresponds to the position of each die on the target wafer; fill in the first compensation value corresponding to each cell in the blank orthogonal compensation table to obtain a target orthogonal compensation table; calculate a second compensation value corresponding to the target position according to the target orthogonal compensation table, wherein the target position is any position that the host computer expects the moving component to move to; and compensate the actual moving position of the moving component according to the second compensation value, wherein the compensated actual moving position is the target position.

[0022] According to another aspect of the embodiments of this application, a position error compensation device is also provided, comprising: a generation module, configured to obtain a blank orthogonal compensation table corresponding to a target wafer, wherein each cell in the blank orthogonal compensation table corresponds to the position of each die on the target wafer; a filling module, configured to fill in the first compensation value corresponding to each cell in the blank orthogonal compensation table to obtain a target orthogonal compensation table; a calculation module, configured to calculate a second compensation value corresponding to a target position based on the target orthogonal compensation table, wherein the target position is any position that the host computer expects the moving part to move to; and a compensation module, configured to compensate the actual moving position of the moving part based on the second compensation value, wherein the compensated actual moving position is the target position.

[0023] According to another aspect of the embodiments of this application, an electronic device is also provided, including: a memory and a processor, the processor being configured to run a program stored in the memory, wherein the program executes a position error compensation method during runtime.

[0024] According to another aspect of the embodiments of this application, a non-volatile storage medium is also provided, the non-volatile storage medium including a stored computer program, wherein the device where the non-volatile storage medium is located executes a position error compensation method by running the computer program.

[0025] In this embodiment, a blank orthogonal compensation table corresponding to the target wafer is obtained, wherein each cell in the blank orthogonal compensation table corresponds to the position of each die on the target wafer; the first compensation value corresponding to each cell in the blank orthogonal compensation table is filled to obtain the target orthogonal compensation table; based on the target orthogonal compensation table, the second compensation value corresponding to the target position is calculated, wherein the target position is any position that the host computer expects the moving part to move to; based on the second compensation value, the actual moving position of the moving part is compensated, wherein the compensated actual moving position is the target position. The position data of each point on the wafer is collected by an external camera, and the deviation value corresponding to each position is calculated to generate the target orthogonal compensation table. The actual moving position of the moving part is compensated based on the target orthogonal compensation table, thereby improving the moving accuracy of the moving part. This solves the technical problem in related technologies where the moving part of the moving probe station has a positional deviation when moving to the target position indicated by the host computer, resulting in poor moving accuracy of the moving part. Attached Figure Description

[0026] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0027] Figure 1 This is a hardware structure block diagram of a computer terminal (or electronic device) for implementing a method for position error compensation according to an embodiment of this application;

[0028] Figure 2 This is a schematic diagram of a method for position error compensation provided according to an embodiment of this application;

[0029] Figure 3 This is a schematic diagram of a method for obtaining a target orthogonal compensation table by filling in a blank orthogonal compensation table according to an embodiment of this application;

[0030] Figure 4 This is a schematic diagram illustrating the acquisition of compensation values ​​according to an embodiment of this application;

[0031] Figure 5 This is a schematic diagram of a method flow for correcting the data of the correction unit based on the data of the first auxiliary unit, according to an embodiment of this application.

[0032] Figure 6 This is a schematic diagram of an orthogonal calibration method provided according to an embodiment of this application;

[0033] Figure 7 This is a schematic diagram of a lower-level machine motor compensation data provided according to an embodiment of this application;

[0034] Figure 8 This is a schematic diagram of X-axis motor compensation data provided by an embodiment of this application;

[0035] Figure 9 This is a schematic diagram of a method for verifying the reliability of a target orthogonal compensation table according to an embodiment of this application;

[0036] Figure 10 This is a schematic diagram of a method flow chart for orthogonal compensation verification according to an embodiment of this application;

[0037] Figure 11 This is a schematic diagram of another position error compensation method provided according to an embodiment of this application;

[0038] Figure 12 This is a schematic diagram of a position error compensation system according to an embodiment of this application;

[0039] Figure 13 This is a schematic diagram of a position error compensation device provided according to an embodiment of this application. Detailed Implementation

[0040] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0041] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0042] In related technologies, the moving parts of the mobile probe stage exhibit positional deviations when moving to the target position indicated by the host computer, resulting in poor movement accuracy. To address this issue, this application provides a solution, detailed below.

[0043] According to an embodiment of this application, a method embodiment for position error compensation is provided. It should be noted that the steps shown in the flowchart in the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions. Furthermore, although a logical order is shown in the flowchart, in some cases, the steps shown or described may be executed in a different order than that shown here.

[0044] The methods and embodiments provided in this application can be executed on mobile terminals, computer terminals, or similar computing devices. Figure 1 A hardware block diagram of a computer terminal (or electronic device) for implementing a position error compensation method is shown. Figure 1 As shown, the computer terminal 10 (or electronic device 10) may include one or more processors 102 (shown as 102a, 102b, ..., 102n in the figure) 102 (processor 102 may include, but is not limited to, a microprocessor MCU or a programmable logic device FPGA, etc.), a memory 104 for storing data, and a transmission module 106 for communication functions. In addition, it may also include: a display, an input / output interface (I / O interface), a universal serial bus (USB) port (which may be included as one of the ports of a BUS bus), a network interface, a power supply, and / or a camera. Those skilled in the art will understand that... Figure 1 The structure shown is for illustrative purposes only and does not limit the structure of the aforementioned electronic device. For example, computer terminal 10 may also include... Figure 1 The more or fewer components shown, or having the same Figure 1 The different configurations shown.

[0045] It should be noted that the aforementioned one or more processors 102 and / or other data processing circuits are generally referred to herein as "data processing circuits". These data processing circuits may be embodied, in whole or in part, in software, hardware, firmware, or any other combination thereof. Furthermore, the data processing circuits may be a single, independent processing module, or may be integrated, in whole or in part, into any other element within the computer terminal 10 (or electronic device). As involved in the embodiments of this application, the data processing circuits serve as a processor control mechanism (e.g., selection of a variable resistor termination path connected to an interface).

[0046] The memory 104 can be used to store software programs and modules of application software, such as the program instructions / data storage device corresponding to the position error compensation method in this embodiment. The processor 102 executes various functional applications and data processing by running the software programs and modules stored in the memory 104, thereby realizing the aforementioned position error compensation method. The memory 104 may include high-speed random access memory, and may also include non-volatile memory, such as one or more magnetic storage devices, flash memory, or other non-volatile solid-state memory. In some instances, the memory 104 may further include memory remotely located relative to the processor 102, and these remote memories can be connected to the computer terminal 10 via a network. Examples of such networks include, but are not limited to, the Internet, corporate intranets, local area networks, mobile communication networks, and combinations thereof.

[0047] The transmission device 106 is used to receive or send data via a network. Specific examples of the network described above may include a wireless network provided by the communication provider of the computer terminal 10. In one example, the transmission device 106 includes a Network Interface Controller (NIC), which can connect to other network devices via a base station to communicate with the Internet. In another example, the transmission device 106 may be a Radio Frequency (RF) module, used for wireless communication with the Internet.

[0048] The display may be, for example, a touchscreen liquid crystal display (LCD) that allows the user to interact with the user interface of the computer terminal 10 (or electronic device).

[0049] Under the above operating environment, this application provides a position error compensation method. Figure 2 This is a schematic diagram of a position error compensation method according to an embodiment of this application, as shown below. Figure 2 As shown, the method includes the following steps:

[0050] Step S202: Obtain the blank orthogonal compensation table corresponding to the target wafer, wherein each cell in the blank orthogonal compensation table corresponds to the position of each grain on the target wafer;

[0051] Specifically, the method for obtaining the blank orthogonal compensation table is as follows: First, the XY position data of the entire wafer (i.e., the target wafer mentioned above) is collected by an image acquisition device. Then, the absolute position registered by the template is used as the compensation reference point (coordinate origin). The absolute position registered by the template is the position of a certain special-shaped grain. For example, the position of the grain located at the center of the wafer can be taken. At the initial moment, the template position coincides with the center position of the image acquired by the image acquisition device, and the compensation value is 0.

[0052] When the camera completes data acquisition for the entire wafer, a blank orthogonal compensation table is generated, as shown in the table below.

[0053]

[0054] The orthogonal compensation table uses the Y-axis interval of the entire wafer as the horizontal axis and the X-axis interval as the vertical axis. The X and Y intervals are incremented by using the size of the die on the wafer as the increment (the example in the table above is a die size of 10), thus completing the division of the horizontal and vertical coordinate intervals in the orthogonal compensation table.

[0055] Step S204: Fill in the first compensation value corresponding to each element in the blank orthogonal compensation table to obtain the target orthogonal compensation table;

[0056] Figure 3 This is a schematic diagram illustrating a method for obtaining a target orthogonal compensation table by filling in blank orthogonal compensation tables according to an embodiment of this application. Figure 3 As shown, the method includes the following steps:

[0057] Step S302: The data corresponding to the cells around the edge of the blank orthogonal compensation table are designated as the first calibration values;

[0058] Specifically, the outermost ring of the generated orthogonal compensation table is calibrated with all data as G (i.e., the first calibration value mentioned above). In this embodiment, G is taken as 999 for illustration.

[0059] Step S304: By traversing each grain on the target wafer, determine the deviation value corresponding to each grain, and if there is a deviation value, determine the deviation value as the first compensation value of the cell in the blank orthogonal compensation table corresponding to the grain.

[0060] Iterate through all grains, perform template matching, and output the deviation values ​​of the XY directions from the image center. Figure 4 This is a schematic diagram of a compensation value acquisition method according to an embodiment of this application. The deviation value acquisition process is as follows: Figure 4 As shown; if there is a deviation value (i.e., the first compensation value mentioned above), then fill it into the orthogonal compensation table.

[0061] Step S306: In the absence of any deviation value, the data of the cell in the blank orthogonal compensation table corresponding to the calibrated grain is the first calibration value;

[0062] Specifically, if there is no deviation value, the data is calibrated as G (i.e., the first calibration value mentioned above).

[0063] Step S308: Correct the first calibration value in the blank orthogonal compensation table according to the first target rule, and determine the corrected blank orthogonal compensation table as the target orthogonal compensation table.

[0064] When collecting deviation values ​​by traversing each die on the target wafer using an external camera (i.e., the aforementioned image acquisition device), there may be missing deviation value data for some dies. Therefore, it is necessary to correct this missing data. Correcting the first calibration value in the blank orthogonal compensation table according to the first target rule includes the following steps: if the data of a cell in the blank orthogonal compensation table is not less than a first threshold, the cell is determined as the cell to be corrected, wherein the first calibration value is not less than the first threshold; the data of the cell to be corrected is corrected based on the data of the first auxiliary cell located at the target orientation of the cell to be corrected, wherein the target orientation includes at least one of the following: directly above the cell to be corrected, directly below the cell to be corrected, directly to the left of the cell to be corrected, or directly to the right of the cell to be corrected.

[0065] Specifically, all data in the orthogonal compensation table are traversed. If the data is less than N (i.e., the first threshold mentioned above), no operation is performed; if the data is greater than N, then the four adjacent data (i.e., the first auxiliary unit mentioned above) are judged. In this embodiment, N is taken as 900 (i.e., the first threshold mentioned above) for illustration.

[0066] Figure 5 This is a schematic diagram of a method flow for correcting the data of the correction unit based on the data of the first auxiliary unit, according to an embodiment of this application. Figure 5 As shown, the process of correcting the data of the unit to be corrected based on the data of the first auxiliary unit located at the target orientation of the unit to be corrected includes the following steps:

[0067] Step S502: If the data in the first auxiliary unit is less than the first threshold, add the first identifier to the first auxiliary unit;

[0068] Specifically, if the data of the first auxiliary unit is less than N (i.e. the first threshold mentioned above), then the adjacent data flag bit of the unit is set to 1 (and the first identifier is added to the first auxiliary unit as mentioned above).

[0069] Step S504: Under the condition that the preset conditions are met, the data of the unit to be corrected is corrected according to the first correction rule in the first target rule. The preset condition is that the first auxiliary unit corresponding to the unit to be corrected has only two first identifiers.

[0070] In some embodiments of this application, correcting the data of the unit to be corrected according to the first correction rule in the first target rule includes the following steps: when the data of the two first auxiliary units with first identifiers are both less than the second threshold, the data obtained by summing the data of the two first auxiliary units with first identifiers and then subtracting the second threshold is determined as the first compensation value of the unit to be corrected; when the data of the two first auxiliary units with first identifiers are not both less than the second threshold, the average value of the data of the two first auxiliary units with first identifiers is determined as the first compensation value of the unit to be corrected.

[0071] Step S506: If the preset conditions are not met, the data of the unit to be corrected is corrected according to the second correction rule in the first target rule.

[0072] In some embodiments of this application, correcting the data of the unit to be corrected according to the second correction rule in the first target rule includes the following steps: calculating the average value of the data of the first auxiliary unit with the first identifier in the first auxiliary unit corresponding to the unit to be corrected, and determining the average value as the first compensation value of the unit to be corrected; if there is no first identifier in the first auxiliary unit corresponding to the unit to be corrected, determining the data of the unit to be corrected as the first calibration value.

[0073] To more intuitively illustrate whether the data in the generated orthogonal compensation table has been modified, after the data of the first auxiliary unit located at the target orientation of the unit to be modified is modified, the following steps are also included: adding a second identifier to the modified unit to be modified, wherein the second identifier is used to characterize that the data in the unit is obtained after modification.

[0074] If the data in the orthogonal compensation table is changed from G (i.e., the first calibration value mentioned above) to other data values, a second identifier is added to indicate that it is the modified data. In this embodiment, the letter M is added as a suffix identifier (i.e., the second identifier mentioned above).

[0075] The position error compensation method in step S204 of this application embodiment will be further described below.

[0076] Figure 6 This is a schematic diagram of an orthogonal calibration method according to an embodiment of this application, as shown below. Figure 6 As shown, the method includes the following steps:

[0077] Step S602: Fill in the calibration blank orthogonal compensation table;

[0078] First, all the data in the outermost ring of the generated orthogonal compensation table are calibrated to G (i.e., the first calibration value mentioned above). In this embodiment, G is taken as 999 for example.

[0079] Then, all grains are traversed, and the deviation values ​​between the XY direction and the image center are output by template matching. If there is a deviation value (i.e. the first compensation value mentioned above), it is filled and calibrated into the orthogonal compensation table. If there is no deviation value, the data is calibrated as G (i.e. the first calibration value mentioned above).

[0080] Step S604, add the first identifier;

[0081] Specifically, all data in the orthogonal compensation table are traversed. If the data is less than N (i.e., the first threshold mentioned above), no operation is performed; if the data is greater than N, then the four adjacent data (upper, lower, left, and right, i.e., the first auxiliary unit mentioned above) are judged. In this embodiment, N (i.e., the first threshold mentioned above) 900 is used as an example. If the data of the first auxiliary unit is less than N (i.e., the first threshold mentioned above), then the adjacent data flag of the unit is set to 1 (i.e., the first identifier is added to the first auxiliary unit mentioned above); if the data of the first auxiliary unit is not less than N (i.e., the first threshold mentioned above), then the adjacent data flag of the unit is set to 0.

[0082] Step S606: Correct the data of each unit according to the preset rules;

[0083] Specifically, if the first auxiliary unit corresponding to the unit to be corrected has only two first identifiers, that is, only two adjacent data flag bits around the data are 1, then the relationship between the data values ​​corresponding to the two flag bits and a (i.e., the second threshold mentioned above) is determined: if both are less than a (i.e., the second threshold mentioned above), then the compensation value of the data Data is the sum of the data values ​​(first compensation value) corresponding to the two flag bits minus a (i.e., the second threshold mentioned above), and the resulting value is assigned to the unit to be corrected, which is used as the first compensation value of the unit; if the data values ​​corresponding to the two flag bits are both greater than a (i.e., the second threshold mentioned above), or one is greater than a and the other is less than a, then the first compensation value of the unit to be corrected is the average of the first compensation values ​​of the two first auxiliary units.

[0084] Specifically, if the first auxiliary unit corresponding to the unit to be corrected has one, two, or four first flags, meaning that only one, three, or four adjacent data flags around the data are 1, then the first compensation value of the unit to be corrected is the sum of the first compensation values ​​corresponding to the adjacent data flags divided by the number of flags, and the obtained average value is assigned to the unit to be corrected. If all adjacent data flags are 0, then the data Data is assigned the value G.

[0085] For example, suppose the data in the unit to be corrected is 999. First, determine its relationship with N (i.e., the first threshold mentioned above). 999 > 900, indicating that correction is needed. The data above, below, left, and right are 999, 100, 999, and 100, respectively. The four adjacent data flags are 0, 1, 0, and 1, respectively. The two adjacent data flags below and to the right are 1. Determine the relationship between the data values ​​of 100 below and 100 to the value of a, and calculate the compensation value to be assigned to the corresponding data in the unit to be corrected.

[0086] As an alternative implementation method, when correcting the data of the outermost ring of the orthogonal compensation table, it can be done by data fitting. By selecting four adjacent horizontal data points for fitting, the corresponding function expression can be obtained, thereby indirectly deriving the data compensation value of the outermost ring of the orthogonal compensation.

[0087] Step S608: Add a second identifier.

[0088] If the data in the orthogonal compensation table is changed from G (i.e., the first calibration value mentioned above) to other data values, a second identifier is added to indicate that it is the modified data. In this embodiment, the letter M is added as a suffix identifier (i.e., the second identifier mentioned above).

[0089] The target compensation table can be obtained by going through steps S602 to S608.

[0090] Step S206: Calculate the second compensation value corresponding to the target position according to the target orthogonal compensation table, where the target position is any position that the host computer expects the moving part to move to.

[0091] In some embodiments of this application, calculating the second compensation value corresponding to the target position based on the target orthogonal compensation table includes the following steps: when the target position is the position corresponding to the cell in the target orthogonal compensation table, the first compensation value of the cell is determined to be the second compensation value; that is, when the position that the host computer expects to move to is the coordinate position corresponding to the cell in the target orthogonal compensation table, compensation is directly performed based on the compensation value of the cell.

[0092] When the target position is not the position corresponding to the cell in the target orthogonal compensation table, that is, when the coordinates that the host computer expects to move are not the coordinate positions corresponding to the cells in the target orthogonal compensation table, but are only within the coordinate range of the orthogonal compensation table, four second auxiliary cells corresponding to the target position in the target orthogonal compensation table are determined, wherein the target position is within the range enclosed by the positions corresponding to the four second auxiliary cells; based on the first compensation value of the four auxiliary cells, the second compensation value corresponding to the target position is determined.

[0093] In some embodiments of this application, the first compensation value includes: a longitudinal first compensation value and a lateral first compensation value; the second compensation value includes: a longitudinal second compensation value and a lateral second compensation value; determining the second compensation value corresponding to the target position based on the first compensation values ​​of the four auxiliary units includes the following steps: calculating the longitudinal second compensation value corresponding to the target position based on the position data corresponding to the four auxiliary units and the longitudinal first compensation value; calculating the lateral second compensation value corresponding to the target position based on the position data corresponding to the four auxiliary units and the lateral first compensation value.

[0094] Specifically, by switching the XY values ​​of the compensation table to absolutely orthogonal values, we check which interval of the generated target orthogonal compensation table the positions of DesPos (i.e., the target position mentioned above) and RealPos fall into. Here, DesPos represents the position that the host computer needs to move to, and RealPos represents the position of the motor shaft (i.e., the moving part mentioned above) sent by the slave computer in real time. Figure 7 This is a schematic diagram of lower-level machine motor compensation data provided according to an embodiment of this application, such as... Figure 7 As shown.

[0095] Assume the coordinates that the host computer needs to move (i.e. the target position mentioned above) are (DesPos.X, DesPos.Y), which are located between the intervals X1, X2 and Y1, Y2 in the orthogonal compensation table. Among them, the four coordinates (X1, Y1), (X2, Y1), (X1, Y2) and (X2, Y2) are known (i.e. the four second auxiliary units corresponding to the target position mentioned above); calculate the second compensation value for the X and Y directions (and the horizontal and vertical directions mentioned above) respectively.

[0096] Assuming the compensation values ​​(i.e., the first lateral compensation values ​​mentioned above) for the four second auxiliary units on the X-axis motor are Xa, Xb, Xc, and Xd respectively, then the required compensation value for DesPos.X (i.e., the second lateral compensation value mentioned above) can be obtained as follows:

[0097] (1) First, compensation should be made along the X-axis in the coordinate system (DesPos.X, Y1):

[0098] ValueX1=Xa+(Xb-Xa)(DesPos.X-X1) / (X2-X1)

[0099] (2) Secondly, compensation should be made along the X-axis in the coordinate system (DesPos.X, Y2):

[0100] ValueX2=Xc+(Xd-Xc)(DesPos.X-X1) / (X2-X1)

[0101] (3) Then, the compensation value for the X-axis motor (i.e., the second lateral compensation value mentioned above) in the coordinate system (DesPos.X, DesPos.Y) is as follows:

[0102] ValueX=ValueX1+(ValueX2-ValueX1)(DesPos.Y-Y1) / (Y2-Y1)

[0103] (4) The final return value is DesPos.X+ValueX, which is the actual position that the X-axis motor in the lower-level machine needs to move. ValueX is the second horizontal compensation value mentioned above.

[0104] Assuming the compensation values ​​(i.e., the aforementioned first longitudinal compensation values) of the four second auxiliary units on the Y-axis motor are Ya, Yb, Yc, and Yd respectively, then the required compensation value for DesPos.Y (i.e., the aforementioned second longitudinal compensation value) can be obtained as follows:

[0105] (1) First, compensation should be made along the Y-axis in the coordinate system (DesPos.X, Y1):

[0106] ValueY1=Ya+(Yb-Ya)(DesPos.X-X1) / (X2-X1)

[0107] (2) Secondly, compensation should be made along the Y-axis in the coordinate system (DesPos.X, Y2):

[0108] ValueY2=Yc+(Yd-Yc)(DesPos.X-X1) / (X2-X1)

[0109] (3) Then, the compensation value for the Y-axis motor (i.e., the second longitudinal compensation value mentioned above) in the coordinate system (DesPos.X, DesPos.Y) is as follows:

[0110] ValueY=ValueY1+(ValueY2-ValueY1)(DesPos.Y-Y1) / (Y2-Y1)

[0111] (4) The final return value is DesPos.Y+ValueY, which is the actual position that the Y-axis motor in the lower-level machine needs to move.

[0112] Therefore, when the host computer needs to move to position (DesPos.X, DesPos.Y), the actual position that the X-axis and Y-axis motors in the slave computer need to move to is (DesPos.X+ValueX, DesPos.Y+ValueY).

[0113] In order to enable the host computer to display the real-time positions of the X-axis and Y-axis motors in the slave computer, the method further includes the following steps: when the host computer obtains the movement position of the moving parts in the slave computer, the real-time position data of the moving parts returned by the slave computer is compensated according to the second compensation value.

[0114] Specifically, in order for the host computer to display the real-time positions of the X-axis and Y-axis motors in the slave computer, the slave computer also needs to perform orthogonal compensation before sending the real-time positions of the X-axis and Y-axis motors to the host computer interface for display. Figure 8 This is a schematic diagram of upper computer X-axis motor compensation data provided according to an embodiment of this application, such as... Figure 8 As shown, RealPos represents the X-axis and Y-axis motor positions sent in real time by the lower-level machine.

[0115] Assume the coordinates (i.e. the target position mentioned above) sent by the lower-level machine in real time are (RealPos.X, RealPos.Y). These coordinates are located between the intervals X1, X2 and Y1, Y2 in the orthogonal compensation table. The four coordinates (X1, Y1), (X2, Y1), (X1, Y2) and (X2, Y2) (i.e., the four second auxiliary units corresponding to the target position mentioned above) are known. The second compensation value is calculated for the X and Y directions (and the horizontal and vertical directions mentioned above) respectively.

[0116] Assuming the compensation values ​​(i.e., the first lateral compensation values ​​mentioned above) of the four second auxiliary units on the X-axis motor are Xa, Xb, Xc, and Xd respectively, then the compensation value of RealPos.X (i.e., the second lateral compensation value mentioned above) can be obtained as follows:

[0117] (1) First, obtain the X-axis compensation in the coordinate system (RealPos.X, Y1):

[0118] XComp1=Xa+(Xb-Xa)(RealPos.X-X1) / (X2-X1)

[0119] (2) Next, the X-axis compensation is obtained in the coordinate system (RealPos.X, Y2):

[0120] XComp2=Xc+(Xd-Xc)(RealPos.X-X1) / (X2-X1)

[0121] (3) Then, the compensation value of the X-axis motor (i.e., the second lateral compensation value mentioned above) can be obtained at coordinates (RealPos.X, RealPos.Y):

[0122] XComp=XComp1+(XComp2-XComp1)(ResPos.Y-Y1) / (Y2-Y1)

[0123] (4) The final return value is RealPos.X-XComp, which is the real-time position of the X-axis motor displayed in the host computer.

[0124] Similarly, assuming the compensation values ​​(i.e., the first longitudinal compensation values ​​mentioned above) of the four second auxiliary units on the Y-axis motor are Ya, Yb, Yc, and Yd respectively, then the compensation value of RealPos.Y (i.e., the second longitudinal compensation value mentioned above) can be obtained as follows:

[0125] (1) First, obtain the Y-axis compensation in the coordinate system (RealPos.X, Y1):

[0126] YComp1=Ya+(Yb-Ya)(RealPos.X-X1) / (X2-X1)

[0127] (2) Next, the Y-axis compensation is obtained in the coordinate system (RealPos.X, Y2):

[0128] YComp2=Yc+(Yd-Yc)(RealPos.X-X1) / (X2-X1)

[0129] (3) Then, the compensation value of the Y-axis motor (i.e., the second longitudinal compensation value mentioned above) can be obtained at the coordinates (RealPos.X, RealPos.Y):

[0130] YComp=YComp1+(YComp2-YComp1)(ResPos.Y-Y1) / (Y2-Y1)

[0131] (4) The final return value is ResPos.Y-YComp, which is the real-time position of the Y-axis motor displayed in the host computer.

[0132] Therefore, when the lower-level machine is at position (ResPos.X, ResPos.Y), the actual positions of the X-axis and Y-axis motors displayed in its upper-level machine are (ResPos.X-XComp, ResPos.Y-YComp).

[0133] Step S208: Based on the second compensation value, compensate for the actual movement position of the moving part, wherein the compensated actual movement position is the target position.

[0134] To ensure the accuracy of the target orthogonal compensation table, the following steps are included after obtaining the target orthogonal compensation table: verifying whether the target orthogonal compensation table is reliable; and sending an alarm message if the target orthogonal compensation table is determined to be unreliable.

[0135] Figure 9 This is a schematic diagram of a method for verifying the reliability of a target orthogonal compensation table according to an embodiment of this application. Figure 9 As shown, verifying the reliability of the target orthogonal compensation table includes the following steps:

[0136] Step S902: If there is data in each unit of the target orthogonal compensation table that is not less than the third threshold, the target orthogonal compensation table is determined to be unreliable.

[0137] Step S904: When the data corresponding to each cell in the target orthogonal compensation table is less than the third threshold, determine the cell in the target orthogonal compensation table that corresponds to the center position of the target wafer, and divide the target orthogonal compensation table into four target regions along the horizontal and vertical directions based on the cell that corresponds to the center position of the target wafer.

[0138] In some embodiments of this application, after determining the cell corresponding to the center position of the target wafer in the target orthogonal compensation table, the following steps are further included: based on the position information corresponding to each cell in the target orthogonal compensation table and the first compensation value, it is determined whether the target distance between the compensated position and the center position of the target wafer is greater than the radius of the target wafer; if the target distance is not greater than the radius of the target wafer, it is determined that the compensated position is inside the target wafer, and the cell corresponding to the compensated position is determined to be the target cell.

[0139] Step S906: For any of the four target regions, if there are consecutive adjacent target units in the target direction and the number of target units with the second identifier exceeds the fourth threshold, the target orthogonal compensation table is determined to be unreliable. The second identifier is used to characterize that the data in the unit is obtained after correction. The target direction includes at least one of the following: longitudinal and transverse.

[0140] In some embodiments of this application, the method further includes: covering a preset number of dies on the target wafer and re-executing the position error compensation method; and determining whether the target orthogonal compensation table generated when the target wafer is not covered is reliable based on whether an alarm message pops up.

[0141] For example, within a defined area, you can block 2 chips and then 4 chips respectively to see if any alarms are triggered. If blocking 2 chips does not trigger an alarm, the target orthogonal compensation table is correct. If blocking 4 chips triggers an alarm, the target orthogonal compensation table is incorrect.

[0142] As an alternative implementation, verification can also be performed by covering a portion of the wafer.

[0143] For example, set the grain spacing to c on the orthogonal interface, select a black area of ​​a preset length to arbitrarily cover a certain position on the wafer, complete one orthogonal process, and check if an alarm is triggered. If an alarm is triggered when the length is d centimeters, the verification is successful. Adjust the preset length and repeat the step to perform repeated verifications multiple times.

[0144] As an optional implementation, two and three chips can be blocked at the boundaries of the two divided regions, respectively, to check for alarms. If no alarm is triggered when two chips are blocked, the generated orthogonal compensation table is correct. If an alarm is triggered when three chips are blocked, the generated orthogonal compensation table is incorrect.

[0145] The position error compensation method in step S208 of this application embodiment will be further described below.

[0146] Figure 10 This is a schematic diagram of a method flow diagram for orthogonal compensation verification according to an embodiment of this application, as shown below. Figure 10 As shown, the method includes the following steps:

[0147] Step S102: Determine the range of the compensation data values;

[0148] Specifically, all data in the target orthogonal compensation table is traversed. If the compensation data value corresponding to a unit in the orthogonal compensation table is greater than b (i.e., the third threshold mentioned above), an alarm operation is performed, that is, the generated orthogonal compensation table is determined to be unreliable. If all data in the orthogonal compensation table are less than b (i.e., the third threshold mentioned above), then the operation in step S104 is performed.

[0149] Step S104: Determine the number of modified data in the orthogonal compensation table.

[0150] Specifically, the center of the generated orthogonal compensation table is used as the coordinate center of the wafer (i.e., the center position of the target wafer mentioned above), and the generated orthogonal compensation table is divided into four regions (i.e., the four target regions mentioned above) (upper left, lower left, upper right and lower right respectively) based on the coordinate center of the wafer. At the same time, the compensation data values ​​are scanned in the four regions respectively.

[0151] Determine whether the target distance between the compensated position of each cell and the center position of the target wafer is greater than the radius of the target wafer; if the target distance is greater than the radius of the target wafer, the target orthogonal compensation table is deemed unreliable; if the compensated data value is located inside the wafer, further determine whether the number of cells with the second identifier in the four regions exceeds the fourth threshold; if it exceeds the fourth threshold, the target orthogonal compensation table is deemed unreliable.

[0152] As an optional implementation, the status of a preset number of compensation data points in the horizontal or vertical directions within the four regions can also be determined. Figure 10 The following example uses a preset quantity of 3. If all three horizontal or vertical compensation data are modified data (i.e., the data with the second identifier mentioned above) (the suffix "M" indicates modified data), then the generated orthogonal compensation table is unreliable and needs to be recalibrated.

[0153] Through the above steps, position data of each point on the wafer is collected by an external camera, and the deviation value corresponding to each position is calculated to generate a target orthogonal compensation table. The actual moving position of the moving part is compensated according to the target orthogonal compensation table, thereby improving the moving accuracy of the moving part. This solves the technical problem that the moving part of the moving probe station has a positional deviation when it moves to the target position indicated by the host computer, resulting in poor moving accuracy of the moving part.

[0154] The method of this application obtains a target orthogonal compensation table by filling and calibrating a blank compensation table; and can calculate the compensation value of any point based on the target orthogonal compensation table. This solves the problem that when the target position is within a certain interval of the compensation table, compensation cannot be directly performed using the data in the compensation table. Furthermore, this application also proposes a method for verifying the orthogonal compensation table. It should be noted that after generating the target orthogonal compensation table, the order of the steps for calculating the compensation value of any point and verifying the orthogonal compensation table is not limited and can be adjusted according to actual needs; the two steps can also be performed independently.

[0155] According to an embodiment of this application, an embodiment of a position error compensation method is also provided. Figure 11 This is a schematic diagram of another position error compensation method provided according to an embodiment of this application, as shown below. Figure 11 As shown, the method includes the following steps:

[0156] Step 112: Calculate the second compensation value corresponding to the target position based on the target orthogonal compensation table. The target position is any position that the host computer expects the moving part to move to. The target orthogonal compensation table is obtained by filling in the first compensation value corresponding to each cell in the blank orthogonal compensation table corresponding to the target wafer.

[0157] Step 114: Based on the second compensation value, compensate for the actual movement position of the moving part, wherein the compensated actual movement position is the target position.

[0158] According to an embodiment of this application, an embodiment of a position error compensation system is also provided. Figure 12 This is a schematic diagram of a position error compensation system provided according to an embodiment of this application. Figure 12As shown, the system includes: an image acquisition device 120, a moving part 122, a stage 124, and a host computer 126.

[0159] Image acquisition device 120 is used to acquire data from the target wafer placed on stage 124;

[0160] The moving part 122 is used to move its position by receiving instructions from the host computer;

[0161] The aforementioned moving component is a component in the probe station that moves in response to a movement command sent by the host computer to align the wafer pads with the probe card tips, thereby enabling wafer testing.

[0162] The host computer 126 is used to obtain a blank orthogonal compensation table corresponding to the target wafer, wherein each cell in the blank orthogonal compensation table corresponds to the position of each die on the target wafer; fill in the first compensation value corresponding to each cell in the blank orthogonal compensation table to obtain the target orthogonal compensation table; calculate the second compensation value corresponding to the target position based on the target orthogonal compensation table, wherein the target position is any position that the host computer 126 expects the moving part 122 to move to; and compensate the actual moving position of the moving part 122 based on the second compensation value, wherein the compensated actual moving position is the target position.

[0163] According to an embodiment of this application, an embodiment of a position error compensation device is also provided. Figure 13 This is a schematic diagram of a position error compensation device according to an embodiment of this application. Figure 13 As shown, the device includes:

[0164] The generation module 130 is used to obtain a blank orthogonal compensation table corresponding to the target wafer, wherein each cell in the blank orthogonal compensation table corresponds to the position of each grain on the target wafer.

[0165] Filling module 132 is used to fill in the first compensation value corresponding to each cell in the blank orthogonal compensation table to obtain the target orthogonal compensation table;

[0166] The calculation module 134 is used to calculate the second compensation value corresponding to the target position according to the target orthogonal compensation table, wherein the target position is any position that the host computer expects the moving part to move to.

[0167] The compensation module 136 is used to compensate the actual movement position of the moving part according to the second compensation value, wherein the compensated actual movement position is the target position.

[0168] It should be noted that each module in the above-mentioned position error compensation device can be a program module (for example, a set of program instructions to implement a certain function) or a hardware module. For the latter, it can be manifested in the following forms, but is not limited to them: each of the above modules is manifested as a processor, or the functions of each of the above modules are implemented by a processor.

[0169] It should be noted that the position error compensation device provided in this embodiment can be used to perform... Figure 2 The position error compensation method shown above is also applicable to the embodiments of this application, and will not be repeated here.

[0170] This application embodiment also provides a non-volatile storage medium, which includes a stored computer program. The device containing the non-volatile storage medium executes the following position error compensation method by running the computer program: obtaining a blank orthogonal compensation table corresponding to a target wafer, wherein each cell in the blank orthogonal compensation table corresponds to the position of each die on the target wafer; filling each cell in the blank orthogonal compensation table with a first compensation value to obtain a target orthogonal compensation table; calculating a second compensation value corresponding to the target position based on the target orthogonal compensation table, wherein the target position is any position that the host computer expects the moving component to move to; and compensating the actual movement position of the moving component based on the second compensation value, wherein the compensated actual movement position is the target position.

[0171] The sequence numbers of the embodiments in this application are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments.

[0172] In the above embodiments of this application, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0173] In the several embodiments provided in this application, it should be understood that the disclosed technical content can be implemented in other ways. The device embodiments described above are merely illustrative; for example, the division of units can be a logical functional division, and in actual implementation, there may be other division methods. For instance, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the displayed or discussed mutual coupling, direct coupling, or communication connection may be through some interfaces; the indirect coupling or communication connection between units or modules may be electrical or other forms.

[0174] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0175] Furthermore, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0176] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as a USB flash drive, read-only memory (ROM), random access memory (RAM), portable hard drive, magnetic disk, or optical disk.

[0177] The above description is only a preferred embodiment of this application. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. A method for compensating for position errors, characterized in that, include: Obtain a blank orthogonal compensation table corresponding to the target wafer, wherein each cell in the blank orthogonal compensation table corresponds to the position of each grain on the target wafer; Filling each cell in the blank orthogonal compensation table with the first compensation value to obtain the target orthogonal compensation table includes: calibrating the data corresponding to the cells around the edge of the blank orthogonal compensation table as the first calibration value; determining the deviation value corresponding to each grain by traversing each grain on the target wafer, and if the deviation value exists, determining the deviation value as the first compensation value of the cell in the blank orthogonal compensation table corresponding to the grain; if the deviation value does not exist, calibrating the data of the cell in the blank orthogonal compensation table corresponding to the grain as the first calibration value; correcting the first calibration value in the blank orthogonal compensation table according to the first target rule, and determining the corrected blank orthogonal compensation table as the target orthogonal compensation table; Based on the target orthogonal compensation table, the calculation of the second compensation value corresponding to the target position includes: when the target position is the position corresponding to the unit in the target orthogonal compensation table, determining the first compensation value of the unit as the second compensation value; when the target position is not the position corresponding to the unit in the target orthogonal compensation table, determining four second auxiliary units in the target orthogonal compensation table corresponding to the target position, wherein the target position is located within the interval enclosed by the positions corresponding to the four second auxiliary units; and based on the first compensation values ​​of the four auxiliary units, determining the second compensation value corresponding to the target position, wherein the target position is any position that the host computer expects the moving part to move to. Based on the second compensation value, the actual movement position of the moving part is compensated, wherein the compensated actual movement position is the target position.

2. The position error compensation method according to claim 1, characterized in that, The correction of the first calibration value in the blank orthogonal compensation table according to the first objective rule includes: If the data of the unit in the blank orthogonal compensation table is not less than the first threshold, the unit is determined to be a unit to be corrected, wherein the first calibration value is not less than the first threshold; The data of the unit to be corrected is corrected based on the data of the first auxiliary unit located at the target orientation of the unit to be corrected, wherein the target orientation includes at least one of the following: directly above the unit to be corrected, directly below the unit to be corrected, directly to the left of the unit to be corrected, or directly to the right of the unit to be corrected.

3. The position error compensation method according to claim 2, characterized in that, Correcting the data of the unit to be corrected based on the data of the first auxiliary unit located at the target orientation of the unit to be corrected includes: If the data in the first auxiliary unit is less than the first threshold, add a first identifier to the first auxiliary unit; Under the condition that the preset conditions are met, the data of the unit to be corrected is corrected according to the first correction rule in the first target rule, wherein the preset condition is that the first auxiliary unit corresponding to the unit to be corrected has one and only two first identifiers. If the preset conditions are not met, the data of the unit to be corrected is corrected according to the second correction rule in the first target rule.

4. The position error compensation method according to claim 3, characterized in that, Correcting the data of the unit to be corrected according to the first correction rule in the first target rule includes: When the data of the two first auxiliary units with the first identifier are both less than the second threshold, the data obtained by summing the data of the two first auxiliary units with the first identifier and then subtracting the second threshold is determined as the first compensation value of the unit to be corrected. If the data of the two first auxiliary units with the first identifier are not both less than the second threshold, the average value of the data of the two first auxiliary units with the first identifier is determined as the first compensation value of the unit to be corrected.

5. The position error compensation method according to claim 3, characterized in that, Correcting the data of the unit to be corrected according to the second correction rule in the first target rule includes: Calculate the average value of the data of the first auxiliary unit with the first identifier in the first auxiliary unit corresponding to the unit to be corrected, and determine the average value as the first compensation value of the unit to be corrected; If the first identifier is not present in the first auxiliary unit corresponding to the unit to be corrected, the data of the unit to be corrected is determined as the first calibration value.

6. The position error compensation method according to claim 3, characterized in that, After correcting the data of the unit to be corrected based on the data of the first auxiliary unit located at the target orientation of the unit to be corrected, the method further includes: Add a second identifier to the corrected unit, wherein the second identifier is used to characterize that the data in the unit is obtained after correction.

7. The position error compensation method according to claim 1, characterized in that, The first compensation value includes: a longitudinal first compensation value and a lateral first compensation value; the second compensation value includes: a longitudinal second compensation value and a lateral second compensation value; determining the second compensation value corresponding to the target position based on the first compensation values ​​of the four auxiliary units includes: Based on the position data corresponding to the four auxiliary units and the first longitudinal compensation value, the second longitudinal compensation value corresponding to the target position is calculated. The second lateral compensation value corresponding to the target position is obtained by calculating based on the position data corresponding to the four auxiliary units and the first lateral compensation value.

8. The position error compensation method according to claim 1, characterized in that, The method further includes: When the host computer obtains the movement position of the moving part in the slave computer, the real-time position data of the moving part returned by the slave computer is compensated according to the second compensation value.

9. The position error compensation method according to claim 1, characterized in that, After obtaining the target orthogonal compensation table, it also includes: Verify the reliability of the stated target orthogonal compensation table; If the target orthogonal compensation table is determined to be unreliable, an alarm message is sent.

10. The position error compensation method according to claim 9, characterized in that, Verifying the reliability of the target orthogonal compensation table includes: If there is data in each unit of the target orthogonal compensation table that is not less than the third threshold, the target orthogonal compensation table is deemed unreliable. When the data corresponding to each cell in the target orthogonal compensation table is less than the third threshold, the cell in the target orthogonal compensation table corresponding to the center position of the target wafer is determined, and the target orthogonal compensation table is divided into four target regions along the horizontal and vertical directions based on the cell corresponding to the center position of the target wafer. For any of the four target regions, if the number of consecutive adjacent target units with a second identifier in the target direction exceeds a fourth threshold, the target orthogonal compensation table is determined to be unreliable. The second identifier is used to characterize that the data in the unit has been corrected. The target direction includes at least one of the following: longitudinal and transverse.

11. The position error compensation method according to claim 10, characterized in that, After determining the cell corresponding to the center position of the target wafer in the target orthogonal compensation table, the method further includes: Based on the position information corresponding to each unit in the target orthogonal compensation table and the first compensation value, it is determined whether the target distance between the compensated position and the center position of the target wafer is greater than the radius of the target wafer; If the target distance is not greater than the radius of the target wafer, it is determined that the compensated position is inside the target wafer, and the cell corresponding to the compensated position is identified as the target cell.

12. The position error compensation method according to claim 9, characterized in that, The method further includes: A predetermined number of grains on the target wafer are covered, and the position error compensation method described in any one of claims 1 to 11 is re-executed. Based on whether an alarm message pops up, it is determined whether the target orthogonal compensation table generated when the target wafer is not covered is reliable.

13. A position error compensation system, characterized in that, include: Image acquisition equipment, moving parts, stage, and host computer, among which, The image acquisition device is used to acquire data from the target wafer placed on the stage. The moving component is used to move its position by receiving instructions from the host computer; The host computer is used to obtain a blank orthogonal compensation table corresponding to the target wafer, wherein each cell in the blank orthogonal compensation table corresponds to the position of each die on the target wafer; filling the first compensation value corresponding to each cell in the blank orthogonal compensation table to obtain the target orthogonal compensation table includes: calibrating the data corresponding to the cells around the edge of the blank orthogonal compensation table as the first calibration value; determining the deviation value corresponding to each die by traversing each die on the target wafer, and if the deviation value exists, determining the deviation value as the first compensation value of the cell in the blank orthogonal compensation table corresponding to the die; if the deviation value does not exist, calibrating the data of the cell in the blank orthogonal compensation table corresponding to the die as the first calibration value; correcting the first calibration value in the blank orthogonal compensation table according to the first target rule, and determining the corrected blank orthogonal compensation table as the target. An orthogonal compensation table is used. Based on the target orthogonal compensation table, a second compensation value corresponding to the target position is calculated, including: when the target position is the position corresponding to a unit in the target orthogonal compensation table, determining the first compensation value of the unit as the second compensation value; when the target position is not the position corresponding to a unit in the target orthogonal compensation table, determining four second auxiliary units in the target orthogonal compensation table corresponding to the target position, wherein the target position is located within the interval enclosed by the positions corresponding to the four second auxiliary units; based on the first compensation values ​​of the four auxiliary units, determining the second compensation value corresponding to the target position, wherein the target position is any position that the host computer expects the moving component to move to; based on the second compensation value, compensating the actual movement position of the moving component, wherein the compensated actual movement position is the target position.

14. A position error compensation device, characterized in that, include: A generation module is used to obtain a blank orthogonal compensation table corresponding to the target wafer, wherein each cell in the blank orthogonal compensation table corresponds to the position of each grain on the target wafer; A filling module is used to fill in the first compensation value corresponding to each cell in the blank orthogonal compensation table to obtain the target orthogonal compensation table. This includes: calibrating the data corresponding to the cells around the edge of the blank orthogonal compensation table as first calibration values; determining the deviation value corresponding to each die on the target wafer by traversing each die, and if the deviation value exists, determining the deviation value as the first compensation value of the cell in the blank orthogonal compensation table corresponding to the die; if the deviation value does not exist, calibrating the data of the cell in the blank orthogonal compensation table corresponding to the die as the first calibration value; correcting the first calibration value in the blank orthogonal compensation table according to a first target rule, and determining the corrected blank orthogonal compensation table as the target orthogonal compensation table. The calculation module is used to calculate a second compensation value corresponding to a target position based on the target orthogonal compensation table, including: when the target position is the position corresponding to the unit in the target orthogonal compensation table, determining the first compensation value of the unit as the second compensation value; when the target position is not the position corresponding to the unit in the target orthogonal compensation table, determining four second auxiliary units in the target orthogonal compensation table corresponding to the target position, wherein the target position is located within the interval enclosed by the positions corresponding to the four second auxiliary units; and determining the second compensation value corresponding to the target position based on the first compensation values ​​of the four auxiliary units, wherein the target position is any position that the host computer expects the moving part to move to. The compensation module is used to compensate the actual movement position of the moving part based on the second compensation value, wherein the compensated actual movement position is the target position.

15. An electronic device, characterized in that, include: A memory and a processor, the processor being configured to run a program stored in the memory, wherein the program, when running, executes the position error compensation method according to any one of claims 1 to 12.

16. A non-volatile storage medium, characterized in that, The non-volatile storage medium includes a stored computer program, wherein the device containing the non-volatile storage medium executes the position error compensation method of any one of claims 1 to 12 by running the computer program.

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