Magnet System, Sputtering Equipment, and Housing Cover

Abstract

Relates to a magnet system, a sputtering device, and a housing cover. According to various embodiments, the magnet system (100) may include: a housing (406g) having an interior housing space (406h); a magnet carrier (102) disposed in the interior housing space (406h) and preferably supported relative to the housing position-fixed by means of the housing (406g); a housing cover (406d) that forms a fluid-tight chamber in a manner spliced together with the housing (406g); wherein the housing cover (406d) has a transmission stage (804), a generator (308), and a rotational feedthrough (850) that couples the transmission stage (804) to the generator (308).

Description

Technical Field

[0001] Various embodiments relate to magnet systems, sputtering apparatuses, and housing covers. Background Art

[0002] Generally, a workpiece or substrate can be processed by processes such as machining, cladding, heating, etching, and / or structural modification. A method for cladding a substrate is, for example, cathodic atomization (so-called sputtering), which is of the physical vapor deposition (PVD) type. For example, one or more layers can be deposited on the substrate by means of sputtering (i.e., by a sputtering process). For this purpose, a gas for forming a plasma can be ionized by means of a cathode, and the material to be deposited (target material) can be atomized by means of the plasma formed thereby. The atomized target material can then be guided to the substrate, where the target material can be deposited and form a layer.

[0003] A modification of cathodic atomization is sputtering by means of a magnetron, i.e., so-called magnetron sputtering, or so-called reactive magnetron sputtering. Here, the formation of the plasma can be supported by means of a magnetic field. The magnetic field can be generated by a magnet system and penetrate the cathode (also referred to as a magnetron cathode), such that an annular plasma channel, i.e., so-called tracks, can be formed at the target material surface (target surface), and a plasma can be formed in the plasma channel.

[0004] The spatial distribution of the plasma and the associated atomization rate depend very sensitively on the spatial distribution of the magnetic field. Therefore, the magnet system is of particular importance for various process characteristics, such as process stability, reproducibility, target utilization, and uniformity. In this context, there is a fundamental need for improvements, such as simplifying the magnet system and / or reducing disturbing effects. Summary of the Invention

[0005] One aspect of various embodiments can intuitively lie in providing an adjustable magnetic field. By adjusting the magnetic field, the atomization of the target material can be influenced, for example, such that as uniform as possible molecular sputtering and / or cladding can be performed.

[0006] In connection therewith, it has been intuitively recognized that components used for communication (such as signal transmission or drive control) and power supply (such as power generation or power transmission) increase the structural complexity of the magnet system, making its maintenance difficult and reducing its reliability.

[0007] According to various embodiments, a coherent component in the form of a housing cover is provided, which has a gear stage, a generator, and a rotary feedthrough, and optionally has a communication interface. This enables components for energy generation and optionally for signal transmission to be provided as a structural unit that can be replaced as a whole.

[0008] The transmission stage and the generator are used to generate energy internally, while the communication interface is used to transmit signals to a regulating device (which, for example, has a motor control device). In addition to reliable function implementation during operation, the housing cover can be removed or replaced as a complete component during maintenance without affecting or altering the remaining components of the magnet system. Description of the Drawings

[0009] The drawings show

[0010] Figure 1 、 Figure 2 and Figure 3a 、 Figure 5 and Figure 6 show magnet systems according to various embodiments in various views respectively;

[0011] Figure 4 and Figure 7 show sputtering devices according to various embodiments respectively, and Figure 3b shows the magnet system of the sputtering device;

[0012] Figure 8 and Figure 9 show housing covers according to various embodiments in various views respectively;

[0013] Figure 10 shows the signal transmission chain of the housing cover according to various embodiments in a similar schematic perspective view;

[0014] Figure 11 shows the generator side part of the dynamic chain of the housing cover according to various embodiments in a schematic perspective view; and

[0015] Figure 12 shows the transmission wheel on the drive side of the transmission stage according to various embodiments in a schematic perspective view. Detailed Description of the Invention

[0016] In the following detailed description, reference is made to the accompanying drawings, which form a part of the description, and in which specific embodiments in which the invention can be implemented are shown for illustration. In this regard, directional terms such as "upper", "lower", "front", "rear", "front part", "rear part", etc. are used with reference to the orientation of one (or more) of the described drawings. Since the components of the embodiments can be positioned in a plurality of different orientations, the directional terms are used for illustration and are not limited in any way. It should be understood that other embodiments can be used and structural or logical changes can be made without departing from the scope of the invention. It should be understood that the features of the different exemplary embodiments described herein can be combined with each other as long as they are not specifically stated otherwise. Therefore, the following detailed description should not be construed in a limiting sense, and the scope of the invention is defined by the appended claims.

[0017] Within the scope of this specification, the terms "connected", "coupled", and "joined" are used to describe direct and indirect connections (e.g., ohmic and / or conductive, e.g., conductive connection), direct or indirect couplings, and direct or indirect joins. In the drawings, where appropriate, the same or similar elements are provided with the same reference numerals.

[0018] According to various embodiments, the term "coupled" or "coupling" can be understood as (e.g., mechanical, hydrostatic, thermal, and / or electrical) e.g., direct or indirect connection and / or interaction. For example, a plurality of elements can be coupled to each other along an interaction chain, along which interactions can be exchanged, such as fluids (and thus also referred to as fluid-guided coupling). For example, two coupled elements can exchange interactions with each other, such as mechanical, hydrostatic, thermal, and / or electrical interactions. The coupling of a plurality of vacuum components (e.g., valves, pumps, chambers, etc.) to each other can include: they are fluid-guided coupled to each other. According to various embodiments, "joined" can be understood as mechanical (e.g., solid or physical) coupling, e.g., by direct solid contact. A joiner can be designed to: transmit mechanical interactions (e.g., forces, torques, etc.).

[0019] Here, the term "supporting device" denotes a device designed to support (e.g., position and / or hold in a guided manner) one or more components. The supporting device can, for example, have one or more support elements for each component that is supported by the supporting device to support (e.g., position and / or hold in a guided manner) the component. Each support element of the supporting device can be designed to provide one or more degrees of freedom (e.g., one or more translational degrees of freedom and / or one or more rotational degrees of freedom) for the component, according to which the component can move. Examples of support elements include: radial support elements, axial support elements, radial thrust support elements, linear support elements (also referred to as linear guides).

[0020] The term "sputtering" denotes atomizing a material (also referred to as coating material or target material) by means of a plasma, which is provided as a so-called target material. Thus, the atomized components of the target material are separated from each other and can, for example, accumulate to form a layer. Sputtering can be carried out by means of a so-called sputtering device, which can have a magnet system (the sputtering device is then also referred to as a magnetron). For sputtering, the magnetron can be arranged in a vacuum processing chamber such that sputtering can be carried out in a vacuum. For this purpose, the ambient conditions (process conditions) in the vacuum processing chamber (e.g., pressure, temperature, gas composition, etc.) can be set or adjusted during sputtering. For example, the vacuum processing chamber can be designed to be airtight, dustproof, and / or vacuum-sealed such that a gas atmosphere with a predetermined composition or a predetermined pressure (e.g., according to a predetermined value) can be provided in the vacuum processing chamber. For example, an ion-forming gas (process gas) or a gas mixture (e.g., consisting of a process gas and a reactive gas) can be provided in the processing chamber. For example, in reactive magnetron sputtering, the atomized material can react with a reactive gas (e.g., having oxygen, nitrogen, and / or carbon), and the reaction products formed thereby (e.g., a dielectric) can be separated.

[0021] Sputtering can be carried out by means of a so-called tubular magnetron, in which a tubular target (also referred to as a tubular target or tubular cathode) having the target material rotates axially around the magnet system. The sputtering of the target material and thus the spatial distribution according to which the target material is stripped can be influenced by adjusting the magnet system or by changing the magnetic field generated thereby.

[0022] The tubular cathode and the magnet system can be supported by a supporting device (also referred to as a target supporting device), which can support the tubular cathode in a manner rotatable relative to the magnet system. The supporting device can, for example, have one or more end blocks, where each end block of the supporting device holds an end section of the tubular cathode or the magnet system. The supporting device (e.g., one or more of its end blocks) can also provide supply to the tubular cathode (e.g., supply of electrical power, rotational movement, and / or cooling fluid).

[0023] According to various embodiments, the end block of the sputtering device (and thus also referred to as the drive end block) can have a drive train for transferring rotational movement to the tubular cathode, and the drive train can be coupled to a driver, for example. Alternatively or additionally, the end block of the sputtering device (also referred to as the dielectric end block) can be designed to convey and discharge a cooling fluid (such as a water-based mixture), and the cooling fluid can be guided through the cathode.

[0024] However, it is also possible to use just one end block (also referred to as a compact end block) that has a drive train and fluid lines and thus jointly provides the functions of the drive end block and the dielectric end block. For example, the side of the tubular target opposite the compact end block can project freely (i.e., be freely suspended), which is referred to as a cantilever configuration, or be supported by means of a support block.

[0025] The magnet system can be multipolar, i.e., have multiple magnetic poles. The first magnetic pole (also referred to as the outer magnetic pole) among the multiple magnetic poles can extend along a self-closed path (also referred to as a circular path), and the second magnetic pole can be arranged within the region surrounded by the surrounding path (also referred to as the inner pole). For example, the circular path can be elliptical. Each magnetic pole can have multiple pole bodies arranged in sequence, such as magnets (and thus also referred to as a row of magnets or a magnet row), and each of the pole bodies is magnetized or has a magnetization portion. For example, each magnetic pole can have at least 10 (such as at least 100) pole bodies, such as magnets, per meter. For example, two or more magnet rows arranged between the end pieces of the magnet system can substantially provide the intermediate region of the magnet system (intuitively, a row of inner poles, with one magnet row on each side of the inner poles, and the outer poles). Generally, the outer pole and the inner pole can have a certain distance from each other and / or be different from each other in their magnetization direction and / or the number of their magnets.

[0026] Here, the term "pole body" refers to a body made of or formed from magnetic material (also referred to as magnetic material). The pole body can, for example, adjoin the magnetic pole or be a part of it. For example, the magnetic material can be ferromagnetic or ferrimagnetic. The magnetic material can have hard magnetic material and / or soft magnetic material, or be formed from hard magnetic material and / or soft magnetic material. The magnetic material can have a magnetic polarization, such as magnetization, so as to provide a dipole.

[0027] For example, the hard magnetic material can have a coercive strength greater than about 500 kiloamperes per meter (kA / m), such as greater than about 1000 kA / m. For example, the hard magnetic material can have neodymium-iron-boron (Nd2Fe 14 B) or samarium-cobalt (SmCo5 and Sm2Co 17) or formed therefrom. More generally, a magnet material having hard magnetism (e.g., the permanent magnet or each permanent magnet) may have a rare earth magnet material (e.g., neodymium iron boron (NdFeB) or samarium cobalt (SmCo)), a ferrite magnet material (e.g., a hard ferrite magnet) material, a bismuth alcohol magnet material, and / or an aluminum-nickel-cobalt magnet material or be formed therefrom.

[0028] For example, a magnet material having soft magnetism may have a coercive field strength of less than about 500 kA / m, such as less than about 100 kA / m, such as less than about 10 kA / m, such as less than about 1 kA / m. A magnet material having soft magnetism may, for example, have an alloy of iron, nickel, and / or cobalt, steel, a powder material, and / or a soft ferrite (e.g., having nickel tin and / or manganese tin) or be formed therefrom.

[0029] For example, a magnet material or a magnetic (e.g., soft magnetic and / or hard magnetic) material may have a permeability of about 10 or greater, such as about 100 or greater, such as about 10 3 or greater, such as about 10 4 or greater, such as about 10 5 or greater.

[0030] A magnet system, for example, its magnetic rod may optionally have a plurality of sequentially arranged and / or spatially separated (e.g., multipolar) segments (also referred to as a magnet system or a group of magnet systems), two of these segments (also referred to as reverse segments or end components) are arranged at the end sides of the magnet system (intuitively arranged at the ends of the magnet system), and one or more optional segments (also referred to as intermediate pieces) are arranged between the end components. Among them, with reference to a magnet system having a plurality of magnet system groups as an example, the description content in this regard may also be applicable to a non-segmented magnet system, or the description content about a magnet system group may be similarly applicable to a plurality of magnet system groups, and vice versa.

[0031] The term "non-magnetic" can be understood as being substantially magnetically neutral, for example, also slightly paramagnetic or diamagnetic. For example, the term "non-magnetic" can be understood as having a permeability of substantially 1, that is, within the range from about 0.9 to about 1.1. Examples of non-magnetic materials include: graphite, aluminum, platinum, copper, non-magnetic high-quality steel, ceramics (e.g., oxides).

[0032] Figure 1 The magnet system 100 according to various embodiments is schematically illustrated in detail. For example, it is illustrated in the following direction 101 (also referred to as the reference direction 101), and the magnet system 100 extends longitudinally along this direction. For example, the magnet system may have a length greater than about 0.5 m (meter) and / or less than about 6 m, such as within the range from about 2 m to about 5 m, and / or greater than 3 m (extension along the reference direction 101).

[0033] The magnet system 100 can have a plurality of magnets 104 and a carrier mechanism 160, which is designed to carry the magnets 104 of the magnet system 100. The carrier mechanism 160 can have at least one (i.e., one or more than one) carrier 102, 202 (also called magnet carrier), and the first carrier 102 (also called the first magnet carrier or system carrier) among the magnet carriers is designed to carry one or more than one magnet system group 150 (such as its magnet 104) of the magnet system 100.

[0034] The magnet system 100 can, for example, have one or more than one magnet system group 150 per system carrier 102, such as a plurality of magnet system groups 150 per system carrier 102. For example, the magnet system 100 (such as each system carrier 102) has two or more magnet system groups 150, such as three magnet system groups 150 or more. Each magnet system group 150 can have a plurality (such as three or more) of magnets 104 and can optionally be designed in an adjustable manner. At least two magnets 104 of each magnet system group 150 can be different from each other in their magnetization directions.

[0035] Each adjustably designed magnet system group 150 can have an adjustment device 150s, which is, for example, (partially) arranged between the system carrier 102 and / or the magnet 104 of the magnet system group 150 and / or couples them to each other. The adjustment device 150s can be designed to: change the spatial distribution of the magnetic field 120 generated by the magnet system group 150, for example, by changing the spatial distribution (such as position and / or alignment) of one / more magnets 104 of the magnet system group 150. For example, the adjustment device 150s can be a component of the carrier mechanism 160 and can be designed to change the spatial position and / or alignment of at least one magnet of the magnet system 100.

[0036] Exemplary components of the adjustment device 150s include: a support device 116 (also called a group support device) and / or an actuator 106. The adjustment device 150s (such as its group support device 116 and / or actuator 106) can couple the magnet 104 or each magnet 104 of the magnet system group 150 to the system carrier 102. The group support device 116 can provide one or more translational degrees of freedom 111 for the magnet 104, where the first translational degree of freedom 111 can be along a reference direction 101 and / or one or more than one second translational degree of freedom 111 can be transverse to the reference direction 101.

[0037] If one or more magnet system groups 150 of the magnet system 100 are designed to be adjustable or if the magnet system 100 has one or more adjustment devices 150s, the bearing mechanism 160 can have a second carrier 202 (also referred to as a second magnet carrier or group carrier), for example one second carrier 202 per magnet system group 150, which couples a plurality of magnets 104 (also see Figure 2 ) to each other and / or to the adjustment devices 150s. In this case, the group carrier or each group carrier 202 can be magnetic (thus providing a so-called return carrier) and the system carrier 102 can be non-magnetic. If the magnet system 100 does not have a group carrier 202, the system carrier 102 can be magnetic (thus providing a so-called return carrier). In some embodiments, the return carrier can be plate-shaped or have at least one plate (thus also referred to as a return plate).

[0038] The actuator 106 can be designed to mechanically move the magnets 104 (also referred to as the actuation process) according to the respective translational degree of freedom 111. For this purpose, the actuator 106 can be coupled to the magnets 104 and / or the system carrier 102 such that, when the actuator 106 is adjusted, the orientation (i.e., alignment and / or position) of the magnets 104 relative to the system carrier 102 can be changed, for example according to a target state.

[0039] To generate motion, the actuator 106 can have an electromechanical converter (e.g., an electric motor or a piezoelectric actuator). The electromechanical converter can be designed to: generate translational motion (e.g., in the case of a linear electric motor) or generate rotational motion (e.g., in the case of a rotary electric motor). To transfer the motion to the magnets 104, the actuator 106 can optionally have a transmission (also referred to as an actuator transmission).

[0040] To supply electrical power (also referred to as supply power) to the actuator 106 and / or to transmit communication signals to the actuator 106, the actuator 106 can be coupled to one or more electrical lines 108. In principle, the communication signals and the supply power can be transmitted together via the line 108, but this is not necessary. These communication signals and supply power can also be transmitted via separate lines 108 from each other.

[0041] Figure 2 The magnet system 100 according to various embodiments 200 is shown in a schematic perspective view.

[0042] According to various embodiments, the magnet system 100 has a plurality of magnet rows 204a, 204i spatially separated from each other, which are fixed (e.g., magnetically coupled) to a common group carrier 202. Each magnet row 204a, 204i may have a plurality of magnets arranged in a row in the same magnetization direction. At least the middle magnet row 204i, which is arranged between two magnets of the outer magnet row 204a, may extend longitudinally along the reference direction 101.

[0043] Figure 3a A sputtering device 300 according to various embodiments is shown in a schematic side view or cross-sectional view, and Figure 3b The magnet system 100 of the sputtering device 300 is schematically shown in detail as 300b.

[0044] The sputtering device 300 may have a support device 350 (also referred to as a target support device) for rotatably supporting a tubular target 302 (also referred to as a tube target). The target support device 350 may have one or more end blocks 312a, 312b, wherein the tubular target 302 is rotatably supported by means of the end blocks 312a, 312b, e.g., rotatable about a rotation axis 311, and / or may be supplied by means of the end blocks. For this purpose, the target support device 350 (e.g., each end block 312a, 312b) may have one or more corresponding rotary supports. For example, for each rotary support, a target coupler 301 (e.g., having a target interface flange) may be rotatably supported, and the tubular target 302 may be coupled to the target coupler. The rotation axis 311 may be along the reference direction 101.

[0045] The first end block 312a of the target support device 350 may be designed as a drive end block 312a, i.e., having a drive system 302a for rotating the tubular target 302. The second end block 312b or the first end block 312a of the target support device 350 may be designed as a medium end block 312b, i.e., for transporting and discharging a cooling fluid (e.g., having water) and / or for supplying electrical power to the tubular cathode 302. The cooling fluid may be guided through the tubular target 302.

[0046] The drive system 302a may be coupled to or have a drive device (e.g., a motor) provided outside the drive end block 312a. Torque may be coupled into the tubular target 302 by means of the drive system 302a to drive the rotational movement of the tubular target 302.

[0047] Furthermore, the sputtering device 300 may have a magnet system 100, which is held by means of the support device 350, e.g., held in a position-fixed and / or anti-rotation manner relative to the direction of gravity. For example, a fixed alignment relative to the direction of gravity is retained when the tubular target 302 rotates (around the magnet system 100).

[0048] The support device 350 may have a rotatably supported target coupler 301 at each end block 312a, 312b, by means of which a tubular target 302 can be connected, for example to a drive train 302a and / or to a cooling fluid supply device (for example having one or more fluid lines). For example, the target coupler 301 may have a detachable connection, which enables the installation and removal of the tubular target 302. The target coupler 301 may also be penetrated by a fixed support member, by means of which the magnet system 100 can be supported.

[0049] In the part shown in detail at 300b, two magnet system groups 150 are shown by way of example, each magnet system group having a group carrier 202; having a plurality of magnets 104, which are coupled to one another (for example magnetically) by means of the group carrier 202; and having an electric actuator 106, which is designed to: adjust the orientation of the group carrier 202 or the magnets 104 relative to the system carrier 102 and / or relative to one another in response to an electrical communication signal supplied to the actuator 106. The actuator 106 has, for example, an electric motor 106m and an optional adjustment transmission 106g. The adjustment transmission 106g may couple the motor 106m to the group carrier 202.

[0050] In addition, the magnet system 100 may have a generator 308, which is designed to: supply electric power (also referred to as supply power) or a supply voltage to each actuator 106. For this purpose, the line 108 may have one or more supply lines 108b that couple the generator 308 to each actuator 106.

[0051] In addition, the line 108 may have one or more communication lines 108a, which are coupled to one of the end blocks by means of a communication interface. For example, a communication signal input from the end block may be coupled by means of the communication interface of the communication line 108a.

[0052] Figure 4 The magnet system 100 according to various embodiments 400 is shown in a schematic side view or cross-sectional view (viewed along the reference direction), wherein the magnet system 100 has a longitudinally extending magnetic bar 352 (also referred to as a magnetic strip).

[0053] The magnetic bar 352 has a bearing mechanism 160 and a plurality of magnets 104, for example the system carrier 102 and one magnet system group 150 or a plurality of magnet system groups 150 arranged one behind the other (along the reference direction 101 or the rotational axis 311).

[0054] As schematically shown, the system carrier 102 has or consists of a profile carrier, for example having a U-shaped profile, for example (as shown) a double U-shaped profile (also known as an H-shaped profile), etc. The U-shaped profile (or double U-shaped profile) enables high stability and provides sufficient structural space here for one or more additional components 402 of the magnet system 100.

[0055] Examples of the additional components 402 of the magnet system 100 include: an adjustment device 150s or at least its actuator 106 and / or at least its group of support devices 116, electrical components 450 (such as a processor or other circuitry, a generator 308, an inverter, etc.).

[0056] In some but not necessarily all embodiments, the magnet system 100 has a frame 414 (also known as a support frame 414) and one or more support devices 404. The support device 404 or each support device 404 can be mounted at the magnetic rod 352 (such as its system carrier 102) and can be joined together with the support frame 414 (such as in a way that engages with each other) to form a support for the magnetic rod 352 (such as a floating support).

[0057] According to various embodiments, the magnet system 100 includes: a housing 406g (intuitively a hollow body) having a housing interior space 406h, in which the magnetic rod 352 is arranged, and an optional cooling trap 408. The cooling trap 408 can be adjacent to the housing interior space 406h or at least partially (i.e., partially or completely) arranged therein and is designed to dry the housing interior space 406h. For example, the cooling trap 408 can have one or more fluid lines 408f, for example two or more (such as three, four, or more than four) fluid lines 408f, through which cooling fluid is conveyed to the target.

[0058] In a particularly simple and inexpensive embodiment, the housing 406g is tubular (for example, having a housing tube), which for example has a circular cross-section and / or is a circular tube. This increases the compactness and / or rigidity of the magnet system 100.

[0059] Figure 5A magnet system 100 according to different embodiments 500 is shown in a schematic side view or cross-sectional view, wherein the magnet system 100 includes a chamber 406 (also referred to as system chamber 406, for example fluid-sealed, for example vacuum-sealed), the chamber having a housing 406g and one or more than one lid 406d (also referred to as interface lid 406d or housing lid 406d). The lid 406d or each lid 406d can be designed to: enclose (for example fluid-seal, for example vacuum-seal) on the end side (for example from the direction of the reference direction 101 or along the reference direction 101). Optionally, at least one housing lid 406d of the system chamber 406 can be designed to supply (and thus also referred to as supply lid) the magnet system group or each magnet system group 150 of the magnet system 100, for example supply communication signals and / or supply power or supply voltage. For this purpose, the supply lid 406d can have a transmission stage, a generator 308, a communication interface and / or a rotary feedthrough, as will be described in more detail hereinafter.

[0060] Figure 6 A magnet system 100 according to various embodiments 600 is shown in a schematic side view or cross-sectional view (viewed along the reference direction 101). If the system chamber 406 is pieced together, the generator 308 can be electrically coupled to each magnet system group 150 in a manner arranged within the housing 406g. In addition, the generator 308 can be coupled to a transmission stage 804 (see Figure 8 ). Examples of components of the transmission stage include: planetary transmissions, internal gear rings, external gear rings and / or one or more than one other type of gear.

[0061] Generally speaking, the transmission stage herein represents a pair of wheels between two transmission wheels (also referred to as driving transmission wheel and driven transmission wheel), where the rotational speed or torque is changed at this pair of wheels. Among them, a pair of gears is used as an exemplary pair of wheels, and it can be understood that the related description content can be similarly applied to any other type of pair of wheels.

[0062] The pair of gears of the transmission stage has two (for example meshing with each other) gears as transmission wheels (also referred to as the first gear and the second gear 708). The first gear can be arranged on the driving side and the second gear 708 (usually the generator wheel 708) can be arranged on the generator side. For example, the transmission stage can have an external gear ring or other type of gear as the generator wheel 708, which delivers torque to the generator 308. For example, the transmission stage (for example having at least 2 gears) can be designed as an internally toothed transmission stage, as will be described in more detail subsequently. The internally toothed transmission stage can have, for example, at least two gears, one of which is internally toothed and the other is externally toothed.

[0063] If the tubular target 302 is set in rotation, the rotational movement of the tubular target 302 can be coupled via a gear stage to the generator 308. The generator wheel 708 can be coupled to the rotor of the generator 308 (also referred to as the generator rotor) such that the coupled-in rotational movement is transferred to the generator rotor.

[0064] This gear stage or each gear stage of the magnet system 100 can be designed such that a higher rotational speed is provided on the generator side than is coupled into the gear stage on the drive side.

[0065] Figure 7 A sputtering device 300 according to various embodiments 700 is shown in a schematic interconnection diagram. Here, six actuators 106 of the magnet system 100 are schematically shown, where the number thereof can also be greater than or less than six. Optionally, the sputtering device 300 can have a control device 806 (for example for drive control), which generates communication signals.

[0066] It can be understood that communication can take place between the control device 806 and the actuators 106 of the magnet system 100 by means of the communication signals, for example bidirectionally (i.e., back and forth) or unidirectionally (i.e., only from the control device 806 to the actuators 106). In other words, the communication signals can be the carrier of the information transfer between the control device 806 and the actuators 106.

[0067] Intuitively, the communication signals can be electrical signals by means of which information (also referred to as communication) can be transmitted, such as instructions or control data, measurement data, requests and / or responses. The communication by means of the communication signals can take place on the physical level by means of an exchange of electrical power. The communication on the physical level can take place by means of a physical transmitter. The communication by means of the communication signals can take place on the logical level by means of an information exchange. The logical level of the communication can take place by means of data processing, which can be implemented and / or controlled, for example, by means of a processor and / or a program. For example, the exchange of electrical power between the transmitters can be modulated according to the information to be transmitted.

[0068] For example, according to a communication protocol (such as a network protocol), the communication can take place based on messages (i.e., message-based). For example, a fieldbus network protocol can be used as the communication protocol. For example, a USB bus network protocol (Universal Serial Bus - USB) can be used as the communication protocol. Of course, other communication protocols can also be used, and other communication protocols can be proprietary, for example.

[0069] The information transmitted from the control device 806 to the actuators 106 can represent, for example, the target state that the actuators 106 should assume. The information transmitted from the actuators 106 to the control device 806 can represent, for example, the actual state of the actuators 106 or a received confirmation.

[0070] The communication line 108a can be coupled to the communication interface 602. The communication interface 602 can be designed to exchange communication signals between the control device 806 and one or more actuators 106. In other words, the communication interface 602 can be designed to forward communication signals. This can generally be carried out by means of optical coupling, inductive coupling, and / or capacitive coupling. These couplings enable more reliable communication. Intuitively, the optical, inductive, and / or capacitive forwarding of communication signals can cause current isolation between the actuator 106 and the control device 806. This current isolation suppresses the electrical interference effects during the operation of the magnet system 100.

[0071] Optionally, the communication interface 602 can be designed such that one or more communication channels are interrupted (or disconnected) and established (i.e., closed) in the clock of the rotational movement of the tubular target, for example, alternately interrupted and established. This results in: communication in the form of clock pulses according to the rotational movement of the target (i.e., in the clock of the rotational movement). This clock pulse enables more reliable communication. Intuitively, therefore, the interference effects resulting from the rotational movement of the tubular target 302 can be systematic, which simplifies its filtering.

[0072] It can be understood that the communication with the clock pulse can be implemented at the physical level of the communication and / or at the logical level of the communication. For example, ohmic, optical, inductive, and / or capacitive couplings can be physically interrupted (i.e., disconnected) and re-established (i.e., closed) in the clock of the rotational movement of the tubular target, for example, alternately. Alternatively or additionally, the logical communication (e.g., the sending and / or receiving of data or the entire message) can be in the form of clock pulses such that the logical communication is interrupted and re-established.

[0073] The generator 308 can be designed to: generate a supply voltage during the operation of the tubular target 302 (e.g., at the rated rotational speed of the target). The supply voltage can be applied at all actuators 106, or individually applied at always only one of the actuators 106 that is being actuated by means of a multiplexer. If one of the actuators 106 is actuated, the actuator 106 can accordingly receive electrical power from the generator 308, and this electrical power is applied for regulating the magnetic field.

[0074] The magnet system 100 can optionally have one or more sensors 816, which are designed to: detect the sputtering process (e.g., coating process) provided by the sputtering device 300 and / or the actual state of the magnetic field of the magnet system 100 (also referred to as the process state). The control device 806 can be designed to: control the actuator 106 based on the process state. For example, the control of the actuator 106 can be carried out based on a preset target state such that, for example, the difference between the process state and the target state is reduced.

[0075] The sensor can be part of a measurement chain with a corresponding infrastructure (e.g., having a processor, storage medium, and / or bus system, etc.). The measurement chain can be designed to: control the corresponding sensor, process the measurement variables detected by the sensor as input variables and provide an electrical signal as an output signal based on this, and the output signal represents the actual state of the input variables at the detection time point. The measurement chain can be implemented, for example, by means of a control device 806 (e.g., a programmable control device - SBS) or through it.

[0076] In the following, various exemplary embodiments of the housing cover 406d are discussed, which simplify the embodiments of the power process and / or communication described herein.

[0077] Figure 8 A housing cover 406d of a magnet system 100 according to various embodiments 800 is shown in a schematic cross-sectional view. Intuitively, the housing cover provides a coherent component, which is designed for power supply and / or electronic communication, and which better takes into account the geometric characteristics of the provided structural space, maintenance requirements, and flow-related requirements.

[0078] Generally, the housing cover 406d has a (one-piece or multi-piece) mechanical carrier as a base body 802, which carries components for electronic communication and for electric power supply.

[0079] The components for electric power supply have a transmission stage 804, a generator 308, and a rotational feedthrough 850 that couples the transmission stage 804 (e.g., its generator wheel 708) to the generator 308. The components for electronic communication have a communication interface 602 and electrical interfaces 862 that are coupled to each other (e.g., conductively).

[0080] In the following, various exemplary embodiments of the components of the housing cover 406d are explained, which simplify the embodiments of the magnet system 100 described herein.

[0081] In an exemplary embodiment of the generator 308, the generator can extend longitudinally and / or extend away from the transmission stage 804. This improves the utilization of the structural space. In an alternative or exemplary embodiment of the generator 308, the generator can have an additional transmission stage 308s (see Figure 9 ), which improves the generator efficiency.

[0082] In an exemplary embodiment of the base body 802, the base body can have a flange 802p and a (e.g., bolt-shaped) support device 802v, and the support device 802v extends away from the flange 802p and / or is conductive. The support device 802v and the flange 802p can be coupled to each other, for example, rigidly and / or conductively.

[0083] The generator 308 can be rigidly connected, for example, at its end sides to the basic body 802, such as its flange 802p. Alternatively or additionally, the communication interface 602 can be rigidly connected to the basic body 802, such as its support device 802v.

[0084] The basic body 802 (also referred to as the cover basic body) is arranged at least partially (such as at least its flange 802p) between the transmission stage 804 and the generator 308. The rotary feedthrough 850 allows the exchange of rotational movement through a through-opening in the basic body 802 (such as its flange 802p).

[0085] In an exemplary embodiment of the electrical interface 862, the electrical interface can have one or more interface terminals and / or be coupled to one or more electrical communication lines 108a. Alternatively or additionally, the electrical interface 862 can be electrically coupled, preferably ohmically coupled, to the communication interface 602, for example, by means of the basic body 802 (such as its flange 802p and / or its support device 802v), preferably ohmically coupled.

[0086] The drive-side transmission wheel 718 can be supported at the basic body 802, such as at its support device 802v, by means of a rotary bearing 851. Alternatively or additionally, the rotary feedthrough 850 can have a shaft 850w, which is supported at the basic body 802, such as at its flange 802p, by means of a rotary bearing 851.

[0087] If the transmission stage is internally toothed, its drive-side transmission wheel 718 has an internal gear ring 718 (see also Figure 12 ). The internal gear ring 718 intuitively provides a void in which the generator wheel 708 can be arranged. This saves space.

[0088] Figure 9 The housing cover 406d of the magnet system 100 according to various embodiments 900 is shown in a schematic perspective view, where the cover basic body 802 has one or more mounting areas 904, 914.

[0089] In an exemplary embodiment, the flange 802p includes one or more first mounting areas 904, 914 (for example, each first mounting area has a through-opening). In an alternative or exemplary embodiment, the support device 802v has a second mounting area 914 or at least extends through the communication interface 602.

[0090] Each first mounting area 904 can be designed to match the housing 406g such that the cover body can be mounted (for axial fixation) to the housing 406g by means of the first mounting area 904 (e.g., fluid-tightly). For example, the cover body 802 can be screwed to the housing 406g by means of fixing screws 904s that extend through through-openings in the cover body 802. The cover body 802, e.g., its flange 802p, can also have a sealing surface 1002 facing the generator 308. The sealing surface 1002 (e.g., having a groove for receiving a seal) can, for example, abut an elastomeric seal that is, for example, received in the groove.

[0091] The second mounting area 914 can be designed to match the target support device 350 such that the cover body can be mounted (e.g., fluid-tightly) to the target support device 350 by means of the second mounting area 914, e.g., mounted anti-rotationally relative to the target support device.

[0092] In an exemplary embodiment, the communication interface 602 has electrodes 602p for capacitive communication (e.g., made of a conductive material such as metal), e.g., in the form of plate electrodes 602p and / or implemented in the form of capacitor plates. This reduces the need to route cables along the communication path to the terminal block and / or to fix the cables to each other for wiring. For example, the electrodes 602p (also referred to as communication electrodes) can be designed for non-contact communication with the terminal block.

[0093] The transmission stage 804 is designed to extract the rotational movement of the tubular target 302. For this purpose, the transmission stage 804 can have a torque strut 804d (e.g., a driver) on the drive side that is rigidly coupled to a transmission wheel 718 (also referred to as a first transmission wheel) on the drive side of the transmission stage 804. For example, the torque strut 804d can have or consist of a pin.

[0094] The torque strut 804d, e.g., its pin, can be designed to match the target coupler 301 or the target 302 such that they can engage with each other or at least exchange torque during operation.

[0095] The torque strut 804d, e.g., its pin, can extend away from the generator 308 and / or the flange 802p, e.g., past the communication interface 602. Alternatively or additionally, the torque strut 804d, e.g., its pin, can encircle the communication interface during operation.

[0096] The torque strut 804d, e.g., its pin, can have a spacing from the axis of rotation of the transmission wheel 718 on the drive side of the transmission stage 804 that is greater than half of the extent (e.g., diameter) of the communication interface 602. Alternatively or additionally, the transmission stage 804 can have a greater diameter than the communication interface 602. This reduces the space requirement of the components.

[0097] Figure 10 A signal transmission chain of a housing cover 406d according to various embodiments 1000 is shown in a schematic perspective view, and the signal transmission chain has a communication interface 602 and an electrical interface 862.

[0098] In an exemplary embodiment of the communication interface 602, the communication interface may have a plurality of spatially separated (e.g., plate-shaped and / or conductive) conductive sections on electrodes, such as plate electrodes. The plate electrode can be provided, for example, by means of a partitioned and / or disk-shaped plate.

[0099] In an alternative or exemplary embodiment of the communication interface 602, the communication interface may have a (and optionally partitioned and / or disk-shaped) communication electrode 602p (such as a plate electrode) and a dielectric in which the electrode is embedded. For example, the communication electrode 602p can be encapsulated in the dielectric. For example, the communication interface 602 can have a fixed, electrically insulating communication disk as a plate electrode, and the electrical transmission surface of the plate electrode is interrupted, for example.

[0100] The communication interface 602 is, for example, rigidly fixed to and / or penetrated by the metal support device 802v.

[0101] The electrical interface 862 can be electrically coupled, preferably ohmically, to the communication electrode 602p of the communication interface 602, for example, by means of the support device 802v. Alternatively or additionally, one or more communication lines 108a can be electrically coupled, preferably ohmically, to the communication interface 602 (such as its electrodes) by means of the electrical interface 862.

[0102] Figure 11 A generator-side part of a torque transmission chain of a housing cover 406d according to various embodiments 1100 is shown in a schematic perspective view, wherein the torque transmission chain has a generator 308, a generator wheel 708, and a rotary feedthrough 850. Generally, the generator 308 can have an electromechanical converter 308w, which has, for example, a stator (also referred to as a generator stator) and a rotor (also referred to as a generator rotor).

[0103] The generator stator can be arranged or held in a position-fixed manner relative to the system carrier 102 and / or the basic body 802. If the generator rotor is placed in a rotational motion relative to the generator stator, the generator 308 can provide a supply voltage. The generator stator and / or the generator rotor can have a plurality of coils that generate the supply voltage (by means of induction). The respective other of the generator stator or the generator rotor can have a plurality of magnets that excite the induction.

[0104] In an exemplary embodiment of the generator 308, the generator can be designed as a transmission generator, i.e., it can have an additional transmission stage 308s (also referred to as the generator transmission stage), which couples the transmission stage 804 (e.g., its generator wheel 708) to the electromechanical converter 308w (e.g., its generator rotor). The generator transmission stage 308s can be designed to provide a greater rotational speed to the generator rotor than the coupled input to the generator transmission stage.

[0105] Alternatively or in addition to the generator transmission stage 308s, the generator 308 can have a generator coupler.

[0106] Figure 12 The transmission wheel 718 on the drive side according to various embodiments 1200 is shown in a schematic perspective view, wherein the transmission wheel 718 has a running disk 1202, which couples the torque strut 804d (e.g., a driver or a pin) to the internal gear ring 817 and is supported at the base body 802, e.g., at its support device 802v, by means of a rotary bearing 851. This reduces the required structural space.

[0107] The geometric properties of the available structural space within the housing 406g, for example, relate to the spatial relationships within the housing 406g, according to which the generator 308 imposes as few structural restrictions as possible on the magnetic rods 352 in terms of size and arrangement. The housing cover 406d is designed, for example, such that the internal transmission stage 308s (e.g., the generator transmission stage within the housing tube) and the external transmission stage 804 are designed such that the same position of the generator 308 is obtained; reliable energy acquisition is provided based on the target rotation; and a capacitor disk is provided for communication, which covers a large circular area, is waterproof, and is insulated outwardly; and in the case of maintenance, it is not necessary to disassemble the housing cover 406d or the components within the interior of the housing 406g, or the housing cover 406d can be replaced completely. This reduces the effort for the user in terms of the installation and testing process of the magnet system 100.

[0108] Various examples are described below, which are related to the above description and the content shown in the drawings.

[0109] Example 1a is a housing cover (preferably designed according to one of Examples 1 to 14), having: a first (e.g., non-magnetic) transmission wheel (preferably having a void), and a generator (e.g., having a transmission stage), a (non-magnetic) flange, which is penetrated by a through-opening, is arranged between the first transmission wheel and the generator and preferably has a sealing surface on the side facing the generator; wherein the generator (e.g., its stator) is preferably coupled to the flange at its end side and / or is rod-shaped; a second transmission wheel, which is coupled to the first transmission wheel (e.g., in contact therewith) and is preferably arranged in the void of the first transmission wheel; a rotary feedthrough (e.g., partially arranged in the through-opening), which couples the second transmission wheel to the generator or is at least designed to: couple the rotational movement of the second transmission wheel through the through-opening into the generator; wherein the generator preferably extends away from the flange (e.g., in the axial direction) and / or is rod-shaped; an optional support device, which is rigidly coupled to the flange and supports the first transmission wheel; wherein the first transmission wheel is preferably rotatably supported relative to the flange and / or the generator (and / or around it), e.g., by means of the optional support device; an optional electrical interface and an optional plate electrode, between which the flange and / or the first transmission wheel are arranged and which are electrically conductive, e.g., ohmically connected to each other (e.g., by means of the optional support device), wherein the electrical interface is optionally surrounded by the sealing surface; wherein the housing cover is preferably provided as a coherent assembly such that the assembly can be mounted as a whole to or disassembled from the housing.

[0110] Example 1 is a magnet system, comprising: a (e.g., non-magnetic) housing having a housing interior space; a (e.g., non-magnetic) magnet carrier, which is arranged in the housing interior space and is supported by the housing, preferably supported in a position-fixed manner relative to the housing; a (e.g., non-magnetic) housing cover (e.g., the housing cover according to Example 1a), which forms a fluid-tight chamber in a butted-together manner with the housing; wherein the housing cover has a transmission stage, a generator, and a rotary feedthrough that couples the transmission stage to the generator.

[0111] Example 2 is the magnet system according to Example 1, wherein the housing cover has a (e.g., non-magnetic) flange arranged between the transmission stage and the generator, and wherein the rotary feedthrough couples the transmission stage and the generator to each other through the flange.

[0112] Example 3 is the magnet system according to Example 2, wherein the housing cover has a rotary support member by means of which a transmission wheel (e.g., the first transmission wheel) on the drive side of the transmission stage is coupled to the flange.

[0113] Example 4 is a magnet system according to one of Examples 1 to 3, wherein the transmission stage has a transmission wheel on the generator side (e.g., a second transmission wheel) that contacts the transmission wheel on the drive side and / or the rotary feedthrough.

[0114] Example 5 is a magnet system according to Example 1 or 4, wherein the housing cover has a drive coupling on the drive side, the drive coupling being designed to: transmit torque to the transmission stage, and / or the drive coupling is carried by the transmission stage.

[0115] Example 6 is a magnet system according to Example 5, wherein the transmission wheel on the drive side of the transmission stage is rigidly coupled to the drive connector; and / or wherein the drive coupling has a torque strut (e.g., a driver) that is fixed at the transmission stage (e.g., its transmission wheel on the drive side).

[0116] Example 7 is a magnet system according to Example 6, wherein the torque strut extends away from the generator.

[0117] Example 8 is a magnet system according to Example 1 or 7, wherein the transmission stage has an internal gear ring as the transmission wheel on the drive side (or the first transmission wheel), and / or the transmission stage has an external gear ring as the transmission wheel on the generator side (or the second transmission wheel).

[0118] Example 9 is a magnet system according to one of Examples 1 to 8, wherein the housing cover has a communication interface that is rigidly coupled to the generator, and the transmission stage is arranged between the generator and the communication interface.

[0119] Example 10 is a magnet system according to Example 9, wherein the communication interface has (preferably encapsulated and / or partitioned) plate electrodes or consists of them, which are preferably designed to: form a capacitive rotary contact; and / or wherein the housing cover has an electrical interface that is arranged towards the generator (e.g., on the side of the flange facing the generator) and is conductively, preferably ohmically, coupled to the communication interface (e.g., its plate electrodes).

[0120] Example 11 is a magnet system according to Example 10, wherein the plate electrodes are encapsulated by a dielectric (e.g., as part of the communication interface). This improves the service life.

[0121] Example 12 is a magnet system according to one of Examples 1 to 11, further comprising: an actuator that is powered by the generator and has a control input that is conductively coupled, preferably ohmically, to the housing cover (e.g., its flange, electrical interface, and / or communication interface).

[0122] Example 13 is a magnet system according to one of Examples 1 to 12, further comprising: at least one magnet which is coupled to a magnet carrier by means of an actuator and is arranged in an interior space of a housing, wherein the actuator is designed to: change the orientation of the magnet relative to the magnet carrier in response to an electrical communication signal fed to a control input by means of a rotary feedthrough.

[0123] Example 14 is a magnet system according to one of Examples 1 to 13, wherein the rotary feedthrough has a rotatably supported shaft which couples a generator-side transmission wheel of a transmission stage to a generator (e.g., rigidly).

[0124] Example 15 is a sputtering device, comprising: a support device which preferably has one or more end blocks and which is used to rotatably support a sputtering target; a magnet system according to one of Examples 1 to 13, which is supported in the sputtering target in a position-fixed manner (e.g., relative to the support device and / or relative to the direction of gravity) by means of the support device.

[0125] Example 16 is a sputtering device according to Example 15, wherein the support device further comprises: a fixed support for carrying the magnet system; and / or a rotary support for rotatably supporting the sputtering target.

[0126] Example 17 is a sputtering device according to Example 16, wherein the support device further has: a coupler rotatably supported by means of the rotary support for coupling the sputtering target, wherein the coupler has a through-opening into which the fixed support extends.

Claims

1. A magnet system (100), comprising: · A housing (406g), the housing having a housing interior space (406h); · A magnet carrier (102), the magnet carrier being disposed in the housing interior space (406h) and supported by the housing (406g) in a position-fixed manner relative to the housing; · A housing cover (406d), the housing cover forming a fluid-tight chamber in a butted-together manner with the housing (406g); · Wherein the housing cover (406d) has a transmission stage (804), a generator (308), and a rotational feedthrough (850) that couples the transmission stage (804) to the generator (308).

2. The magnet system (100) according to claim 1, wherein the housing cover (406d) has a flange (802p), the flange being disposed between the transmission stage (804) and the generator (308), wherein the rotational feedthrough (850) passes through the flange (802p) to couple the transmission stage (804) and the generator (308) to each other.

3. The magnet system (100) according to claim 2, wherein the housing cover (406d) has a rotational support, and a transmission wheel on the drive side of the transmission stage (804) is coupled to the flange (802p) by means of the rotational support.

4. The magnet system (100) according to claim 3, wherein the transmission stage (804) has a transmission wheel on the generator side, and the transmission wheel on the generator side contacts the transmission wheel on the drive side and / or the rotational feedthrough (850).

5. The magnet system (100) according to claim 1, wherein the housing cover (406d) has a drive-side drive coupler, the drive coupler being designed to: transfer torque to the transmission stage (804), and / or the drive coupler is carried by the transmission stage (804).

6. The magnet system (100) according to claim 5, wherein the drive coupler has a torque strut, the torque strut being fixed at the transmission stage (804) and extending away from the generator (308).

7. The magnet system (100) according to claim 1, wherein the transmission stage (804) has an internal gear ring as the transmission wheel on the drive side.

8. The magnet system (100) according to claim 1, wherein the housing cover (406d) has a communication interface, the communication interface being rigidly coupled to the generator (308), wherein the transmission stage (804) is disposed between the generator (308) and the communication interface.

9. The magnet system (100) according to claim 8, wherein the communication interface has a plate electrode, and the housing cover (406d) has an electrical interface, the electrical interface being disposed toward the generator (308) and conductively coupled to the plate electrode.

10. For the magnet system (100) according to claim 9, the electrical interface is ohmically coupled to the plate electrode.

11. The magnet system (100) according to any one of claims 1 to 10 further comprises: · An actuator (106) powered by means of the generator (308) and having a control input electrically coupled to the housing cover (406d); and · At least one magnet coupled to the magnet carrier (102) by means of the actuator (106) and arranged in the housing interior space (406h), · wherein the actuator (106) is designed to change the orientation of the magnet relative to the magnet carrier (102) in response to an electrical communication signal fed to the control input by means of the rotary feedthrough (850).

12. The magnet system (100) according to claim 11, wherein the control input is ohmically coupled to the housing cover (406d).

13. A sputtering device (300) comprising: · A support device (350) for rotatably supporting a sputtering target; · The magnet system (100) according to any one of claims 1 to 10, the magnet system being supported in a position-fixed manner in the sputtering target by means of the support device (350).

14. The sputtering device (300) according to claim 13, wherein the support device (350) has one or more end blocks.

15. A housing cover (406d) comprising: · A first transmission wheel (718) and a generator (308), · A flange (802p) penetrated by a through-opening, arranged between the first transmission wheel (718) and the generator (308) and having a sealing surface on the side facing the generator (308); · wherein the generator (308) is rigidly coupled to the flange (802p) on the end side; · A second transmission wheel coupled to the first transmission wheel (718); · A rotary feedthrough (850) designed to couple the rotational movement of the second transmission wheel through the through-opening to the generator (308); · wherein the housing cover (406d) is provided as a coherent assembly such that the assembly can be mounted as a whole to or disassembled from the housing (406g).

16. The housing cover (406d) according to claim 15, wherein the generator (308) extends away from the flange (802p).

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