Inspection device and method of inspecting a magnetic sensor

Abstract

The present invention provides an inspection apparatus comprising: a mounting stage having a mounting surface, a first magnetic field generator, and a second magnetic field generator. The first magnetic field generator is configured to be able to change its orientation and generate a first magnetic field independently. The second magnetic field generator is configured to be able to change its orientation and generate a second magnetic field independently. The first and second magnetic field generators are configured to cooperate in generating a composite magnetic field.

Description

Technical Field

[0001] This invention relates to an inspection apparatus and a method for inspecting magnetic sensors. Background Technology

[0002] In recent years, magnetic sensors utilizing magnetoresistive elements have been used in various applications. In systems incorporating magnetic sensors, it is sometimes desirable to detect magnetic fields perpendicular to the substrate surface (hereinafter referred to as vertical magnetic fields) using a magnetoresistive element disposed on a substrate. In such cases, the vertical magnetic field can be detected by using a soft magnetic material that converts the vertical magnetic field into a magnetic field parallel to the substrate surface, or by disposing the magnetoresistive element on an inclined surface formed on the substrate.

[0003] In order to ship magnetic sensors to the market, their output characteristics need to be checked during manufacturing or before shipment. During magnetic sensor inspection, a magnetic field, assuming the magnetic field of the object being detected, is applied to the magnetic sensor to check its output characteristics. In the case of magnetic sensors configured to detect perpendicular magnetic fields, a perpendicular magnetic field needs to be applied to the magnetic sensor during inspection.

[0004] Japanese Patent Application Publication No. 2021-67503 discloses an inspection device for a magnetic sensor having two symmetrical coils. In this inspection device, a magnetic field is generated by switching the energizing direction of the two coils in both the Z and X directions by using a relay.

[0005] Among the output characteristics of magnetic sensors, there are characteristics such as linearity or hysteresis, which are obtained based on the output of the magnetic sensor when the magnetic field is continuously changed. However, in the inspection device disclosed in Japanese Patent Application Publication No. 2021-67503, since the magnetic field cannot be changed continuously, characteristics such as linearity or hysteresis cannot be inspected. Summary of the Invention

[0006] The purpose of this invention is to provide an inspection device and a method for inspecting magnetic sensors that can continuously change the magnetic field.

[0007] The inspection apparatus of the present invention is an inspection apparatus for inspecting the output of a magnetic sensor by applying a magnetic field to the magnetic sensor. The inspection apparatus of the present invention comprises: a stage having a mounting surface for mounting the magnetic sensor; a first magnetic field generator and a second magnetic field generator, which are respectively arranged at a predetermined interval relative to the mounting surface in a direction perpendicular to the mounting surface.

[0008] The first magnetic field generator is configured to change its orientation and independently generate a magnetic field applied to the magnetic sensor, namely a first magnetic field tilted in a first direction relative to a direction perpendicular to the mounting surface. The second magnetic field generator is configured to change its orientation and independently generate a magnetic field applied to the magnetic sensor, namely a second magnetic field tilted in a second direction relative to a direction perpendicular to the mounting surface. The first and second magnetic field generators are configured to cooperatively generate a magnetic field applied to the magnetic sensor, namely a composite magnetic field including a component in a direction parallel to an imaginary plane perpendicular to the mounting surface.

[0009] In the inspection apparatus of the present invention, the first magnetic field generator and the second magnetic field generator may also be configured to cooperate in changing the direction of the composite magnetic field so that the direction of the composite magnetic field changes at an angle relative to a direction parallel to the mounting surface.

[0010] Furthermore, in the inspection device of the present invention, the first magnetic field generator and the second magnetic field generator can also respectively change their relative positions with respect to the magnetic sensor.

[0011] Furthermore, in the inspection apparatus of the present invention, the first magnetic field generator and the second magnetic field generator may also be magnets. In this case, the N pole and S pole of the magnet may also be arranged in a direction inclined relative to the direction perpendicular to the mounting surface.

[0012] Furthermore, in the inspection apparatus of the present invention, the magnetic sensor may also include: a substrate having a main surface composed of a plane, and a magnetic detection element. The magnetic detection element may also be configured to detect the object magnetic field including a component perpendicular to the main surface. The magnetic sensor may also be mounted on the mounting surface with the main surface parallel to the mounting surface.

[0013] The method for inspecting a magnetic sensor according to the present invention includes: placing a magnetic sensor on a mounting surface of a mounting stage; arranging a first magnetic field generator at a predetermined interval relative to the mounting surface in a direction perpendicular to the mounting surface, the first magnetic field generator being configured to change its orientation and independently generate a magnetic field applied to the magnetic sensor, i.e., a first magnetic field in a first direction inclined relative to the direction perpendicular to the mounting surface; arranging a second magnetic field generator at a predetermined interval relative to the mounting surface in a direction perpendicular to the mounting surface, the second magnetic field generator being configured to change its orientation and independently generate a magnetic field applied to the magnetic sensor, i.e., a second magnetic field in a second direction inclined relative to the direction perpendicular to the mounting surface; coordinating the first and second magnetic field generators to generate a magnetic field applied to the magnetic sensor, i.e., a composite magnetic field including a component in the direction perpendicular to the mounting surface; and inspecting the output of the magnetic sensor.

[0014] The magnetic sensor inspection method of the present invention can also cause the first magnetic field generator and the second magnetic field generator to cooperate in changing the direction of the synthesized magnetic field, so that the direction of the synthesized magnetic field changes at an angle relative to a direction parallel to the mounting surface.

[0015] In addition, the inspection method of the magnetic sensor of the present invention may also include: changing the relative position of the first magnetic field generator and the second magnetic field generator relative to the magnetic sensor.

[0016] Alternatively, in the magnetic sensor inspection method of the present invention, the first magnetic field generator and the second magnetic field generator may each be a magnet. In this case, the magnetic sensor inspection method of the present invention may also include arranging the first magnetic field generator and the second magnetic field generator in such a way that the N pole and S pole of the magnet are arranged in a direction inclined relative to the direction perpendicular to the mounting surface.

[0017] Furthermore, in the inspection method of the magnetic sensor of the present invention, the magnetic sensor may also include: a substrate having a main surface composed of a plane, and a magnetic detection element. The magnetic detection element may also be configured to detect the target magnetic field including a component perpendicular to the main surface. In this case, the inspection method of the magnetic sensor of the present invention may also include: mounting the magnetic sensor on the mounting surface in such a way that the main surface is parallel to the mounting surface.

[0018] In the inspection apparatus of the present invention, a first magnetic field generator and a second magnetic field generator are configured to collaboratively generate a composite magnetic field. The first and second magnetic field generators are each capable of changing their orientation. Thus, according to the present invention, an inspection apparatus capable of continuously changing the magnetic field can be realized.

[0019] Furthermore, in the magnetic sensor inspection method of the present invention, a first magnetic field generator and a second magnetic field generator are used to collaboratively generate a composite magnetic field. The first and second magnetic field generators are each capable of changing their orientation. Therefore, according to the present invention, an inspection method capable of continuously changing the magnetic field can be realized.

[0020] Other objects, features and benefits of the present invention will become fully apparent from the following description. Attached Figure Description

[0021] Figure 1 This is an explanatory diagram showing the overall structure of an inspection device according to an embodiment of the present invention.

[0022] Figure 2 This is a top view showing the main parts of an inspection device according to an embodiment of the present invention.

[0023] Figure 3 This is a side view showing the main parts of an inspection device according to an embodiment of the present invention.

[0024] Figure 4 This is an explanatory diagram illustrating the operation of an inspection device according to an embodiment of the present invention.

[0025] Figure 5 This is an explanatory diagram illustrating the operation of an inspection device according to an embodiment of the present invention.

[0026] Figure 6 This is an explanatory diagram used to illustrate the synthetic magnetic field of an embodiment of the present invention.

[0027] Figure 7 This is a perspective view showing a first example of a magnetic sensor inspected by an inspection device according to an embodiment of the present invention.

[0028] Figure 8 This is a perspective view showing a second example of a magnetic sensor inspected by an inspection device according to an embodiment of the present invention.

[0029] Figure 9 This is a flowchart illustrating an inspection method according to an embodiment of the present invention. Detailed Implementation

[0030] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. First, referring to... Figures 1 to 3 The structure of the inspection device 1 according to one embodiment of the present invention will be described. Figure 1 This is an explanatory diagram showing the overall structure of the inspection device 1. Figure 2 This is a top view showing the main parts of the inspection device 1. Figure 3 This is a side view showing the main parts of the inspection device 1.

[0031] The inspection device 1 in this embodiment is a device for inspecting the output of a magnetic sensor by applying a magnetic field to the magnetic sensor. For example... Figures 1 to 3 As shown, the inspection device 1 includes a stage 2, a first magnetic field generator 3, and a second magnetic field generator 4.

[0032] The stage 2 has a mounting surface 2a for mounting the magnetic sensor. Figures 1 to 3 In the text, symbol 10 represents the object to be inspected. The object to be inspected 10 is disposed on the mounting surface 2a. The object to be inspected 10 may be a wafer containing multiple magnetic sensors before slicing, or it may be a chip formed by monolithically integrating the magnetic sensors.

[0033] Here, as Figures 1 to 3 As shown, the X, Y, and Z directions are defined. The X, Y, and Z directions are orthogonal to each other. Furthermore, in this application, "orthogonal" means not only perfectly orthogonal at 90°, but also approximately orthogonal, meaning slightly deviating from 90°. In this embodiment, one direction perpendicular to the mounting surface 2a of the mounting platform 2 (in...) Figure 1In the table, the direction facing upwards is defined as the Z direction. Both the X and Y directions are parallel to the mounting surface 2a of the platform 2. Furthermore, the direction opposite to the X direction is defined as the -X direction, the direction opposite to the Y direction as the -Y direction, and the direction opposite to the Z direction as the -Z direction. Additionally, the position located at the front end of the Z direction relative to the reference position will be referred to as "above," and the position located on the opposite side of "above" relative to the reference position will be referred to as "below."

[0034] The first magnetic field generator 3 and the second magnetic field generator 4 are respectively arranged at a predetermined interval relative to the mounting surface 2a in a direction parallel to the Z direction. In this embodiment, in particular, the first magnetic field generator 3 and the second magnetic field generator 4 are respectively arranged above the mounting surface 2a. In addition, the first magnetic field generator 3 is arranged at the front end of the object to be inspected 10 in the -X direction. The second magnetic field generator 4 is arranged at the front end of the object to be inspected 10 in the X direction.

[0035] The first magnetic field generator 3 is configured to generate a magnetic field applied to the magnetic sensor, i.e., the object to be inspected 10, which is a first magnetic field in a first direction inclined relative to a direction parallel to the Z direction. The second magnetic field generator 4 is configured to generate a magnetic field applied to the magnetic sensor, i.e., the object to be inspected 10, which is a second magnetic field in a second direction inclined relative to a direction parallel to the Z direction.

[0036] In this embodiment, the first magnetic field generator 3 and the second magnetic field generator 4 are magnets. The magnets may also have a cylindrical shape. In this case, the cylindrical magnet constituting the first magnetic field generator 3 and the cylindrical magnet constituting the second magnetic field generator 4 are arranged in a symmetrical posture centered on the YZ plane intersecting the object under inspection 10. Furthermore, the cylindrical magnet has N and S poles symmetrically arranged centered on an imaginary plane containing the central axis of the cylinder. The central axis of the cylinder is inclined relative to a direction parallel to the Z direction. The N and S poles of the cylindrical magnet are arranged along a direction inclined relative to the direction parallel to the Z direction.

[0037] The first magnetic field generator 3 and the second magnetic field generator 4 are each configured to change their posture. Specifically, the inspection device 1 also includes a control device 7 that controls the posture of each of the first magnetic field generator 3 and the second magnetic field generator 4. The first magnetic field generator 3 and the second magnetic field generator 4 are respectively connected to columnar support members 5 and 6, which are connected to a drive device (not shown) such as an electric motor. The control device 7 controls the drive device (not shown). As a result, the posture of each of the first magnetic field generator 3 and the second magnetic field generator 4 changes.

[0038] "Change in posture" includes two cases. The first case is that the posture of the object under inspection 10 relative to the first magnetic field generator 3 and the second magnetic field generator 4 remains unchanged, but the postures of the first magnetic field generator 3 and the second magnetic field generator 4 change. The second case is that the posture of the object under inspection 10 relative to the first magnetic field generator 3 and the second magnetic field generator 4 changes simultaneously. For example, when the support members 5 and 6 are rotated about their respective axes by the control device 7, causing the magnets constituting the first magnetic field generator 3 and the second magnetic field generator 4 to rotate respectively, the posture of the object under inspection 10 relative to the magnets constituting the first magnetic field generator 3 and the second magnetic field generator 4 remains unchanged. However, for example, when the support members 5 and 6 are rotated about axes parallel to the Y direction by the control device 7, changing the orientation of the magnets constituting the first magnetic field generator 3 and the second magnetic field generator 4, the posture of the object under inspection 10 relative to the first magnetic field generator 3 and the second magnetic field generator 4 will change.

[0039] Furthermore, the first magnetic field generator 3 and the second magnetic field generator 4 are each capable of changing the relative position of the magnetic sensor, i.e., the object to be inspected, 10. Specifically, for example, the relative position can also be changed by moving the support members 5 and 6 in a predetermined direction by the control device 7. The predetermined direction can be at least one of the axial direction of each of the support members 5 and 6, a direction parallel to the X direction, and a direction parallel to the Z direction. Alternatively, the relative position can also be changed by moving the stage 2 in a predetermined direction.

[0040] Furthermore, the first magnetic field generator 3 and the second magnetic field generator 4 are configured to collaboratively generate a magnetic field applied to the magnetic sensor, i.e., the object being inspected 10, that is, a composite magnetic field containing a component parallel to an imaginary plane perpendicular to the mounting surface 2a. In this embodiment, in particular, the aforementioned imaginary plane is a plane parallel to the YZ plane.

[0041] The inspection device 1 also includes a data collection device 8. The data collection device 8 is configured to apply a specified power supply voltage to the magnetic sensor and input the detection signal output from the magnetic sensor. The magnetic sensor and the data collection device 8 are electrically connected to each other via multiple wirings.

[0042] Next, refer to Figures 4 to 6 The operation of the inspection device 1 and the composite magnetic field are described in detail. Figure 4 and Figure 5 This is an explanatory diagram used to illustrate the operation of the inspection device 1. Figure 6 This is an explanatory diagram used to illustrate the composite magnetic field. In Figure 4 and Figure 5In the diagram, the arrow with the symbol MFa represents the first magnetic field, and the arrow with the symbol MFb represents the second magnetic field. Figure 6 In the diagram, the symbol P represents an imaginary plane that intersects with the object under inspection 10 and is parallel to the YZ plane.

[0043] Figure 4 This indicates a state in which the N and S poles of the magnet constituting the first magnetic field generator 3 are arranged in a direction inclined from the Z direction to the X direction, and the N and S poles of the magnet constituting the second magnetic field generator 4 are arranged in a direction inclined from the Z direction to the -X direction. In this state, the direction of the first magnetic field MFa, i.e., the first direction, becomes a direction inclined from the Z direction to the X direction, and the direction of the second magnetic field MFb, i.e., the second direction, becomes a direction inclined from the Z direction to the -X direction.

[0044] The first magnetic field MFa is a magnetic field generated solely by the first magnetic field generator 3, and the second magnetic field MFb is a magnetic field generated solely by the second magnetic field generator 4. Figure 4 The direction of the first magnetic field MFa shown is the direction assuming that the second magnetic field generator 4 is not present. Figure 4 The direction of the second magnetic field MFb shown is the direction assuming the first magnetic field generator 3 is not present. In reality, the first magnetic field generator 3 and the second magnetic field generator 4 work together to generate a composite magnetic field MFc. The composite magnetic field MFc is equivalent to the magnetic field obtained by combining the first magnetic field MFa and the second magnetic field MFb. Figure 4 In this context, for convenience, the composite magnetic field MFc is represented as the magnetic field obtained by combining the first magnetic field MFa and the second magnetic field MFb.

[0045] The composite magnetic field MFc is applied to the magnetic sensor, i.e., the object being inspected 10. The composite magnetic field MFc includes a component in the direction parallel to the imaginary plane P. This component in the direction parallel to the imaginary plane P can also be the dominant component of the composite magnetic field MFc. Alternatively, the composite magnetic field MFc may not include a component in the direction perpendicular to the imaginary plane P. In the following description, for convenience, it is assumed that the composite magnetic field MFc only includes a component in the direction parallel to the imaginary plane P, and does not include a component in the direction perpendicular to the imaginary plane P. Figure 4 In the state shown, the direction of the synthesized magnetic field MFc becomes the Z direction.

[0046] Figure 5 This indicates that the magnet constituting the first magnetic field generator 3 and the magnet constituting the second magnetic field generator 4 are respectively from Figure 4The state shown is the result of rotating the magnet 180°. In this state, the N and S poles of the magnet constituting the first magnetic field generator 3 are aligned in a direction inclined from -Z to -X, and the N and S poles of the magnet constituting the second magnetic field generator 4 are aligned in a direction inclined from -Z to X. In this state, the direction of the first magnetic field MFa (i.e., the first direction) becomes an inclination from -Z to -X, and the direction of the second magnetic field MFb (i.e., the second direction) becomes an inclination from -Z to X. The direction of the composite magnetic field MFc becomes the -Z direction.

[0047] like Figure 4 and Figure 5 As shown, the direction of the synthesized magnetic field MFc changes by changing the orientation of the first magnetic field generator 3 and the second magnetic field generator 4. Figure 6 In this embodiment, the symbol θ represents the angle between the direction of the synthesized magnetic field MFc and the Y direction. The first magnetic field generator 3 and the second magnetic field generator 4 are configured to cooperate in changing the direction of the synthesized magnetic field MFc, thereby changing the angle θ. In this embodiment, when the magnet constituting the first magnetic field generator 3 is rotated, the direction of the first magnetic field MFa rotates, and when the magnet constituting the second magnetic field generator 4 is rotated, the direction of the second magnetic field MFb rotates. As a result, the direction of the synthesized magnetic field MFc rotates. The angle θ varies within a range of 0° to 360°. The synthesized magnetic field MFc with its direction rotated is applied as a rotating magnetic field to the object under inspection 10.

[0048] Next, the first and second examples of magnetic sensors will be described. First, refer to... Figure 7 The first example of a magnetic sensor will be explained. Figure 7 The magnetic sensor 20 shown includes: a substrate 21 having a main surface 21a composed of a plane, and a magnetic detection element 22.

[0049] The magnetic detection element 22 is configured to detect the magnetic field of the object being detected by the magnetic sensor 20, specifically the object's magnetic field including a component perpendicular to the main surface 21a. In the first example, the substrate 21 also has a groove 21c opening in the main surface 21a. The groove 21c includes an inclined surface 21b that is inclined relative to the main surface 21a. The inclined surface 21b can be a plane or a curved surface. The magnetic detection element 22 is disposed on the inclined surface 21b.

[0050] In use Figures 1 to 3 When the inspection device 1 shown is used to inspect the magnetic sensor 20, the magnetic sensor 20 is placed on the mounting surface 2a with its main surface 21a parallel to the mounting surface 2a. Hereinafter, using... Figures 1 to 3The X, Y, and Z directions are also shown to illustrate the magnetic sensor 20. The principal surface 21a is a plane parallel to the XY plane. The component of the direction perpendicular to the principal surface 21a of the object's magnetic field is the component of the direction parallel to the Z direction.

[0051] Here, the direction that has been rotated α from the Z direction to the -X direction is defined as the U direction, and the direction opposite to the U direction is defined as the -U direction. The inclined surface 21b can also be a plane parallel to the UY plane.

[0052] The magnetic sensing element 22 can be a spin-valve type magnetoresistive effect element or an anisotropic magnetoresistive effect element. Hereinafter, the magnetoresistive effect element will be referred to as an MR element. Figure 7 In the example shown, the magnetic sensing element 22 is a spin-valve type MR element. A spin-valve type MR element has a magnetized fixed layer with a fixed magnetization direction, a free layer with a variable magnetization direction, and a non-magnetic layer disposed between the magnetized fixed layer and the free layer. The spin-valve type MR element can be a TMR element or a GMR element. In a TMR element, the non-magnetic layer is a tunneling barrier layer. In a GMR element, the non-magnetic layer is a non-magnetic conductive layer.

[0053] In a spin-valve type MR element, the resistance value varies depending on the angle between the magnetization direction of the free layer and the magnetization direction of the magnetized fixed layer. The resistance is at its minimum at 0° and at its maximum at 180°. Figure 7 In the diagram, the black arrows indicate the magnetization direction of the magnetized fixing layer. Figure 7 In the example shown, the magnetization direction of the magnetized fixing layer is the -U direction.

[0054] The object's magnetic field can also be a magnetic field whose direction rotates within an imaginary plane parallel to the YZ plane. In this case, the object's magnetic field includes a component parallel to the Z direction and a component parallel to the Y direction. Here, the object's magnetic field is divided into a component parallel to the UY plane (in-plane component) and a component perpendicular to the UY plane (perpendicular component). The direction of the in-plane component varies according to the direction of the object's magnetic field. The magnetization direction of the free layer varies according to the direction of the in-plane component. The resistance value of the magnetic detection element 22, i.e., the MR element, varies according to the direction of the in-plane component. The magnetic sensor 20 outputs a signal corresponding to the resistance value of the MR element as a detection signal.

[0055] Next, refer to Figure 8 The second example of a magnetic sensor will be explained. Figure 8 The magnetic sensor 30 shown includes: a substrate (not shown) having a main surface composed of planes, and a magnetic detection element 31. In use... Figures 1 to 3When the inspection apparatus 1 shown is used to inspect the magnetic sensor 30, the magnetic sensor 30 is placed on the mounting surface 2a with the main surface of the substrate (not shown) parallel to the mounting surface 2a. Hereinafter, using... Figures 1 to 3 The X, Y, and Z directions are also shown to illustrate the magnetic sensor 30. The main surface of the substrate (not shown) is a plane parallel to the XY plane.

[0056] The magnetic detection element 31 is disposed above the main surface of a substrate (not shown). Figure 8 In the example shown, the magnetic detection element 31 is a spin valve type MR element. Figure 8 In the diagram, the black arrows indicate the magnetization direction of the magnetization fixation layer of the spin valve type MR element. Figure 8 In the example shown, the magnetization direction of the fixed magnetized layer is the X direction. The free layer exhibits shape anisotropy, with its easy magnetization axis aligned parallel to the Y direction.

[0057] The magnetic detection element 31 is configured to detect the magnetic field of the object being detected by the magnetic sensor 30, that is, the object's magnetic field including a component in the direction perpendicular to the main surface of the substrate (not shown), i.e., parallel to the Z-direction. In the second example, the magnetic sensor 30 also includes a lower magnetic yoke 32 and an upper magnetic yoke 33. The lower magnetic yoke 32 and the upper magnetic yoke 33 are each made of soft magnetic material. The lower magnetic yoke 32 and the upper magnetic yoke 33 each have a cuboid shape that is longer in the direction perpendicular to the Z-direction. The lower magnetic yoke 32 is positioned closer to the main surface of the substrate (not shown) than the magnetic detection element 31. The upper magnetic yoke 33 is positioned further away from the main surface of the substrate (not shown) than the magnetic detection element 31. When viewed from above, the magnetic detection element 31 is located between the lower magnetic yoke 32 and the upper magnetic yoke 33.

[0058] The lower yoke 32 and upper yoke 33 receive the Z-direction component of the target magnetic field and output the X-direction component of the magnetic field. Additionally, the lower yoke 32 and upper yoke 33 receive the -Z-direction component of the target magnetic field and output the -X-direction component of the magnetic field. The resistance value of the magnetic detection element 31, i.e., the MR element, varies according to the intensity of the output magnetic field component. The intensity of the output magnetic field component corresponds to the intensity of both the Z-direction and -Z-direction components. The magnetic sensor 30 outputs a detection signal corresponding to the resistance value of the MR element.

[0059] Next, refer to Figure 1 and Figure 9 The inspection method for the magnetic sensor in this embodiment will be described. Figure 9This is a flowchart illustrating a method for inspecting a magnetic sensor. In this method, firstly, the magnetic sensor, i.e., the object to be inspected 10, is placed on the mounting surface 2a of the stage 2 (step S1). Next, the first magnetic field generator 3 and the second magnetic field generator 4 are respectively positioned at predetermined locations (step S2). Specifically, the magnet constituting the first magnetic field generator 3 and the magnet constituting the second magnetic field generator 4 are respectively positioned at predetermined locations.

[0060] Next, the control device 7 controls the posture and position of the first magnetic field generator 3 (magnet) and the second magnetic field generator 4 (magnet) to generate a composite magnetic field MFc with a specified direction and intensity (step S3). Then, the data collection device 8 checks the output of the magnetic sensor (step S4).

[0061] In step S4, which checks the output of the magnetic sensor, the first magnetic field generator 3 and the second magnetic field generator 4 can also be made to cooperate in changing the direction of the synthesized magnetic field MFc, so that... Figure 6 The angle θ shown can vary continuously within a range of 0° to 360°. Furthermore, the direction of the composite magnetic field MFc can be fixed at a specified angle θ, such as 0°, 90°, 180°, or 270°.

[0062] Alternatively, in step S4 of checking the output of the magnetic sensor, the output of the magnetic sensor can be checked while changing the strength of the synthetic magnetic field MFc. The strength of the synthetic magnetic field MFc can be changed by altering the relative positions of the first magnetic field generator 3 and the second magnetic field generator 4 with respect to the magnetic sensor, i.e., the object being checked 10, or by changing the orientation of the magnet constituting the first magnetic field generator 3 and the magnet constituting the second magnetic field generator 4.

[0063] Furthermore, when the object to be inspected 10 is a wafer containing multiple magnetic sensors before slicing, multiple magnetic sensors can be inspected simultaneously or one by one in step S4, which involves inspecting the output of the magnetic sensors. When inspecting multiple magnetic sensors one by one, the positions of the first magnetic field generator 3 and the second magnetic field generator 4 can be fixed before inspection, or the inspection can be performed while changing the relative positions of the first magnetic field generator 3 and the second magnetic field generator 4 relative to the stage 2 for each magnetic sensor.

[0064] As described above, in the inspection apparatus 1 and the inspection method of the magnetic sensor in this embodiment, first and second magnetic field generators 3 and 4, which are capable of changing their orientation, are used to generate a synthetic magnetic field MFc applied to the magnetic sensor. Therefore, according to this embodiment, the synthetic magnetic field MFc can be continuously varied.

[0065] Furthermore, the present invention is not limited to the above-described embodiments and various modifications are possible. For example, the shape of each magnet constituting the first and second magnetic field generators 3 and 4 is not limited to cylindrical, but may also be elliptical cylindrical, prismatic, or rod-shaped. Alternatively, the first and second magnetic field generators 3 and 4 are not limited to magnets, but may also be magnetic field generators containing coils.

[0066] As can be seen from the above description, various modes or variations of the present invention can be implemented. Therefore, within the equivalent scope of the claims, the present invention can be implemented even in modes other than the preferred mode described above.

Claims

1. An inspection device, characterized in that, It is a testing device that applies a magnetic field to a magnetic sensor and checks the output of the magnetic sensor. have: A stage having a mounting surface for mounting the magnetic sensor; The first magnetic field generator and the second magnetic field generator are respectively arranged at a predetermined interval relative to the mounting surface in a direction perpendicular to the mounting surface; A control device that controls the respective postures of the first magnetic field generator and the second magnetic field generator; A columnar first support component is connected to the first magnetic field generator; as well as A columnar second support component is connected to the second magnetic field generator. The first magnetic field generator is configured to change its orientation and generate a first magnetic field in a first direction independently. This first magnetic field, as a magnetic field applied to the magnetic sensor, is tilted relative to a direction perpendicular to the mounting surface. The second magnetic field generator is configured to change its orientation and independently generate a second magnetic field in a second direction, the second magnetic field being an applied magnetic field to the magnetic sensor and tilted relative to a direction perpendicular to the mounting surface. The first magnetic field generator and the second magnetic field generator are configured to cooperatively generate a composite magnetic field, which serves as the magnetic field applied to the magnetic sensor and includes a component in a direction parallel to an imaginary plane perpendicular to the mounting surface. The first magnetic field generator and the second magnetic field generator are magnets whose central axes are inclined relative to a direction perpendicular to the mounting surface. The control device rotates the first magnetic field generator by rotating the first support member about an axis, and rotates the second magnetic field generator by rotating the second support member about an axis.

2. The inspection device according to claim 1, characterized in that, The first magnetic field generator and the second magnetic field generator are configured to cooperate in changing the direction of the composite magnetic field by changing the angle between the direction of the composite magnetic field and a direction parallel to the mounting surface.

3. The inspection device according to claim 1, characterized in that, The first magnetic field generator and the second magnetic field generator are respectively capable of changing their relative positions with respect to the magnetic sensor.

4. The inspection device according to claim 1, characterized in that, The first magnetic field generator and the second magnetic field generator are both magnets.

5. The inspection device according to claim 4, characterized in that, The N and S poles of the magnet are arranged in a direction that is inclined relative to the direction perpendicular to the mounting surface.

6. The inspection device according to claim 1, characterized in that, The magnetic sensor comprises: a substrate having a main surface composed of planes, and a magnetic detection element. The magnetic detection element is configured to detect the object's magnetic field, which includes a component perpendicular to the main surface. The magnetic sensor is mounted on the mounting surface with its main surface parallel to the mounting surface.

7. A method for inspecting a magnetic sensor, characterized in that, Include: The magnetic sensor is placed on the mounting surface of the mounting stage; A first magnetic field generator is arranged at a predetermined interval relative to the mounting surface in a direction perpendicular to the mounting surface. The first magnetic field generator is configured to change its orientation and generate a first magnetic field in a first direction independently. The first magnetic field is an magnetic field applied to the magnetic sensor and is tilted relative to the direction perpendicular to the mounting surface. The first magnetic field generator is a magnet connected to a first support member and whose central axis is tilted relative to the direction perpendicular to the mounting surface. The second magnetic field generator is arranged at a predetermined interval relative to the mounting surface in a direction perpendicular to the mounting surface. The second magnetic field generator is configured to change its orientation and generate a second magnetic field in a second direction independently. The second magnetic field is an magnetic field applied to the magnetic sensor and is tilted relative to the direction perpendicular to the mounting surface. The second magnetic field generator is a magnet connected to the second support member and whose central axis is tilted relative to the direction perpendicular to the mounting surface. The first magnetic field generator and the second magnetic field generator work together to generate a composite magnetic field, which serves as the magnetic field applied to the magnetic sensor and includes a component in the direction perpendicular to the mounting surface. The first magnetic field generator is rotated by rotating the first support member about the axis. The second magnetic field generator is rotated by rotating the second support member about the axis. as well as Check the output of the magnetic sensor.

8. The method for inspecting a magnetic sensor according to claim 7, characterized in that, Includes: coordinating the first magnetic field generator and the second magnetic field generator to change the direction of the synthesized magnetic field in such a way that the angle between the direction of the synthesized magnetic field and a direction parallel to the mounting surface changes.

9. The method for inspecting a magnetic sensor according to claim 7, characterized in that, Includes: changing the relative positions of the first magnetic field generator and the second magnetic field generator relative to the magnetic sensor.

10. The method for inspecting a magnetic sensor according to claim 7, characterized in that, The first magnetic field generator and the second magnetic field generator are both magnets. The method for inspecting the magnetic sensor includes: configuring the first magnetic field generator and the second magnetic field generator such that the N pole and S pole of the magnet are arranged in a direction inclined relative to the direction perpendicular to the mounting surface.

11. The method for inspecting a magnetic sensor according to claim 7, characterized in that, The magnetic sensor comprises: a substrate having a main surface composed of planes, and a magnetic detection element. The magnetic detection element is configured to detect the object's magnetic field, which includes a component perpendicular to the main surface. The method for inspecting the magnetic sensor includes placing the magnetic sensor on the mounting surface with the main surface parallel to the mounting surface.

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