A process for coating a crystallizable ITO capacitive film

Abstract

The application provides a kind of easily crystallized ITO capacitive film coating process, comprising the following steps: step S1: selecting low temperature coating chamber, SiOx coating area and ITO coating area are arranged in low temperature coating chamber, wherein x is constant, and 0≦x≦2, PET substrate is placed in unwinding chamber;Step S2: a certain amount of argon is introduced into SiOx coating area, voltage control mode is used, mixed gas of argon and oxygen is introduced into ITO coating area respectively, and oxygen input amount is controlled by gas reaction controller, and the proportion of oxygen input amount in total gas input amount is 1.5-5%, step S3: PET substrate is sequentially passed through SiOx coating area and ITO coating area in unwinding chamber of low temperature coating chamber;Step S4: PET substrate after coating is collected, the application controls suitable coating speed, controls the proportion of oxygen input amount in total gas input amount, ITO target sputtering power and the proportion of In2O3 and SnO2 in ITO target material, and shortens heating aging time.

Description

Technical Field

[0001] This invention relates to the field of capacitor film coating technology, and in particular to an easy-crystallizing ITO capacitor film coating process. Background Technology

[0002] Coating: When light enters different transmission materials (such as from air into glass), approximately 5% is reflected. Optical sights contain many lenses and refractories, which together can cause a 30% to 40% loss of incident light. Modern optical lenses are typically coated with single or multiple layers of magnesium fluoride anti-reflective coating. A single-layer anti-reflective coating can reduce reflection to 1.5%, while a multi-layer coating can reduce it to 0.25%. Therefore, with proper coating, the light transmittance of the entire sight can reach 95%. Lenses coated with a single layer of anti-reflective coating are usually bluish-purple or red, while lenses coated with multiple layers are pale green or dark purple. The ITO capacitor film coating process requires the use of cryogenic sputtering technology.

[0003] Low-temperature magnetron sputtering is a coating technology currently widely used in production. It has advantages such as high film formation rate, low substrate temperature, and the ability to achieve large-area coating. Therefore, most flexible conductive films are produced using this technology. However, films produced using low-temperature magnetron sputtering have disadvantages such as loose film quality, poor resistance uniformity, and poor stability.

[0004] In the current technology, film sensor touch film functional sheets are mainly used in mobile phones, industrial control and other fields, with broad market prospects. ITO capacitor film is the main key material of film sensor. Because the ITO capacitor film deposited by low-temperature magnetron sputtering is an amorphous film, its resistance stability is poor. The existing mature low-temperature magnetron sputtering technology deposits ITO capacitor films that are amorphous and have poor stability. The current treatment method is to add a heating aging process, which requires heating and aging at 130-150℃ for 1 hour to achieve a crystalline ITO capacitor film with basically stable resistance to meet customer requirements. However, this increases the heating aging time and reduces the production efficiency of capacitor film deposition. Therefore, this invention proposes an easily crystallizable ITO capacitor film deposition process. Summary of the Invention

[0005] To address the shortcomings of existing technologies, the present invention aims to provide an easy-to-crystallize ITO capacitor film coating process. By controlling appropriate coating speed, the proportion of oxygen in the total gas flow, the ITO target sputtering power, and the ratio of In2O3 to SnO2 in the ITO target material, the present invention shortens the heating aging time while keeping the aging temperature constant, thereby achieving an ITO capacitor film that meets customer requirements.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a process for depositing easily crystallizable ITO capacitor film, comprising the following steps:

[0007] Step S1: Select a low-temperature coating chamber. The low-temperature coating chamber is equipped with a SiOx coating area and an ITO coating area, where x is a constant and 0 ≦ x ≦ 2. Place the PET substrate into the unwinding chamber.

[0008] Step S2: A certain amount of argon gas is introduced into the SiOx coating area. Using voltage control mode, the power of the SiOx coating area is set between 10 and 30 kW, and the power of the ITO coating area is set between 6 and 20 kW. A mixture of argon and oxygen gas is introduced into the ITO coating area, and the amount of oxygen introduced is controlled by the gas reaction controller. The proportion of oxygen introduced in the total amount of gas introduced is controlled to be 1.5 to 5%, that is, O2 / (Ar+O2) = 1.5 to 5%.

[0009] Step S3: The PET substrate is passed sequentially through the SiOx coating zone and the ITO coating zone in the unwinding chamber of the low-temperature coating chamber. The moving speed in the SiOx coating zone and the ITO coating zone is 1.5 to 6 m / min.

[0010] Step S4: Collect the PET substrate after coating is completed.

[0011] Furthermore, in step S1, the PET substrate is a transparent PET film or a PET film with an IM coating, and the thickness of the PET substrate is between 5μm and 200μm.

[0012] Furthermore, ITO targets are provided in both the SiOx coating area and the ITO coating area. The ITO targets are composed of In2O3 and SnO2, wherein In2O3 accounts for 90-97% of the total and SnO2 accounts for 10-3% of the total.

[0013] Furthermore, in step S1, the low-temperature coating chamber is provided with an unwinding chamber and a winding chamber outside. The unwinding chamber and the winding chamber are both equipped with guide rollers for driving the PET substrate. The winding chamber is equipped with a winding roller for collecting the PET substrate. The low-temperature coating chamber is equipped with a guide roller and a main roller for guiding the PET substrate. The winding chamber is equipped with a transmission component for driving the winding roller to rotate. The transmission component drives the winding roller to rotate, and the winding roller generates a pulling force on the PET substrate, causing the PET substrate to move along the guide roller.

[0014] Furthermore, the transmission component is a micro motor, and the take-up roller consists of a take-up sleeve and a transmission shaft. The transmission shaft is connected to the micro motor and is snap-fitted to the take-up sleeve. The micro motor is connected to a PLC controller, and the PLC controller model is S7-200.

[0015] Furthermore, the winding chamber is equipped with a calibration component for PET base film calibration. The calibration component includes a transmission frame, a fixed frame, and a transmission calibration film. Both the transmission frame and the fixed frame have lifting guide shafts that can move up and down within them. Guide rollers are mounted on the lifting guide shafts. Calibration film rolls are installed inside both the transmission frame and the fixed frame. A transmission calibration film is wound around the calibration film rolls, passing over two sets of guide rollers. Pressure sensors are installed inside the transmission frame and the fixed frame. One end of the transmission calibration film is wound around the calibration film roll inside the transmission frame, and the other end is wound around the calibration film roll inside the fixed frame.

[0016] Furthermore, a first calibration motor is installed inside the transmission frame, and the first calibration motor is connected to a calibration film roll inside the transmission frame. A second calibration motor is installed inside the fixed frame, and the second calibration motor is connected to a calibration film roll inside the fixed frame. Both the first and second transmission motors are connected to a PLC controller, and the pressure sensor data is connected to the PLC controller.

[0017] Furthermore, the lifting guide shaft has support grooves at both ends, which are formed inside the fixed frame and the transmission frame. The lifting guide shaft can slide up and down along the support grooves. A support spring is installed inside the support groove. The top of the support spring is connected to both ends of the lifting guide shaft. A connector is provided at the connecting end of the lifting guide shaft. The lifting guide shaft is rotatably connected to the connector through a bearing. An embedded groove connected to the support spring is opened on the surface of the connector. An arc-shaped fitting frame for pushing it to move downward is provided on the lifting guide shaft. A lifting screw is internally threaded onto the arc-shaped fitting frame. One set of the lifting screws passes through the fixed frame and is equipped with pulleys. Another set of lifting screws is connected to a transmission motor installed on the transmission frame. A mounting platform is fixed on the transmission frame. The transmission motor is installed inside the mounting platform and is equipped with pulleys. The two sets of pulleys are connected by a belt. The transmission motor is connected to a PLC controller.

[0018] Furthermore, the connection between the arc-shaped bonding frame and the guide film wheel is configured as an arc-shaped surface that fits with it. A sliding guide wheel is provided on the arc-shaped surface. The sliding guide wheel has an elastic structure inside, the surface of the sliding guide wheel is made of rubber material, and the inside is filled with expanding cotton. The surface bonding area is configured as a smooth structure.

[0019] Furthermore, in step S2, a one-way valve is installed on the low-temperature coating chamber, connecting the SiOx coating area and the ITO coating area. The inlet of the one-way valve is sealed to a nozzle for introducing gas into the low-temperature coating chamber. The flow rate of argon gas can be calculated using the following formula:

[0020] The gas flow rate Q is selected based on the nozzle diameter D, resulting in the following formula: Q = (0.8 ~ 1.2)D.

[0021] Where Q is lower when D is smaller, Q is upper when D is larger;

[0022] The nozzle diameter is selected based on the tungsten electrode diameter: D = 2d + 4. After selecting the nozzle diameter, adjust the argon flow rate.

[0023] The diameter of the tungsten electrode is related to the allowable value of the welding current. If the selected current exceeds this allowable value during welding, the tungsten electrode will heat up, melt, or volatilize, causing arc instability and tungsten inclusions in the weld.

[0024] The nozzle is the source of gas protection for the welding torch. The shape of the nozzle has a great influence on the airflow. The two most common nozzle shapes are cylindrical and conical.

[0025] Furthermore, in step S4, after the coating is completed, the SiOx film layer on the surface of the PET substrate is 0.5-100 nm, and the ITO film layer on the surface of the PET substrate is 10-50 nm.

[0026] The beneficial effects of this invention are:

[0027] 1. This invention shortens the heating aging time while keeping the aging temperature constant by controlling the appropriate coating speed, the proportion of oxygen in the total gas flow, the ITO target sputtering power, and the ratio of In2O3 to SnO2 in the ITO target material, thereby achieving an ITO capacitor film that meets customer requirements.

[0028] 2. This invention uses low-temperature coating technology to prepare easily crystallizable ITO films. Under the conventional aging temperature of 130-150℃, the heating aging time is shortened from the original 1 hour to 20-40 minutes, which greatly improves production efficiency and reduces energy consumption.

[0029] 3. By setting a calibration component, the present invention can calibrate the ITO film after coating, and can perform neat winding, making winding simple and convenient, and improving winding convenience.

[0030] 4. This invention can detect whether the ITO film is shifted by setting a pressure sensor, and correct the direction by using the pressure information fed back by the pressure sensor after the shift. Attached Figure Description

[0031] Other features, objects, and advantages of the present invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0032] Figure 1 This is a structural diagram of the ITO capacitor film in an easily crystallizing ITO capacitor film coating process according to the present invention.

[0033] Figure 2This is a flowchart of a method for coating an easily crystallizing ITO capacitor film according to the present invention.

[0034] Figure 3 This is a schematic diagram of the structure of the calibration component in the easily crystallizing ITO capacitor film coating process of the present invention;

[0035] Figure 4 This is a right sectional view of the transmission frame in an easily crystallizing ITO capacitor film coating process according to the present invention.

[0036] In the diagram: 1. Transmission frame; 2. Mounting platform; 3. Transmission motor; 4. PLC controller; 5. Guide film roller; 6. First calibration motor; 7. Pressure sensor; 8. Second calibration motor; 9. Fixing frame; 10. Transmission calibration film; 11. Belt; 12. Calibration film roll; 13. Lifting screw; 14. Arc-shaped bonding frame; 15. Lifting guide shaft; 16. Support spring. Detailed Implementation

[0037] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0038] In this invention, please refer to Figures 1-4 A process for coating an easily crystallizing ITO capacitor film includes the following steps:

[0039] Step S1: Select a low-temperature coating chamber. The low-temperature coating chamber is equipped with a SiOx coating area and an ITO coating area, where x is a constant and 0 ≦ x ≦ 2. Place the PET substrate into the unwinding chamber.

[0040] The PET substrate is a transparent PET film or a PET film with an IM coating, etc., and the thickness of the PET substrate is between 5μm and 200μm. ITO targets are set in both the SiOx coating area and the ITO coating area. The ITO targets are composed of In2O3 and SnO2, with In2O3 accounting for 90% to 97% of the total and SnO2 accounting for 10% to 3% of the total.

[0041] The low-temperature coating chamber is externally equipped with an unwinding chamber and a winding chamber. Both the unwinding and winding chambers are equipped with guide rollers for driving the PET substrate. The winding chamber contains a winding roller for collecting the PET substrate. The low-temperature coating chamber contains guide rollers and a main roller for guiding the PET substrate. The winding chamber is equipped with a transmission component that drives the winding roller to rotate. This transmission component drives the winding roller to rotate, and the winding roller exerts tension on the PET substrate, causing it to move along the guide rollers. The transmission component is a micro motor. The winding roller consists of a winding sleeve and a transmission shaft. The transmission shaft is connected to the micro motor and is snap-fitted to the winding sleeve. The micro motor is connected to a PLC controller 4 (model S7-200). The PLC controller 4 controls the operation of the micro motor. The rotation of the micro motor drives the transmission shaft to rotate, which in turn winds the coated PET substrate, allowing it to be driven along the guide rollers in the unwinding chamber. The PET substrate is coated sequentially along the SiOx coating area and the ITO coating area before entering the winding chamber for winding.

[0042] The winding chamber is equipped with a correction component for PET base film correction. The correction component includes a transmission frame 1, a fixed frame 9, and a transmission calibration film 10. Both the transmission frame 1 and the fixed frame 9 have lifting guide shafts 15 that can move up and down inside them. Guide rollers 5 are mounted on the lifting guide shafts 15. Calibration film rollers 12 are installed inside the transmission frame 1 and the fixed frame 9. The transmission calibration film 10, which passes around the two sets of guide rollers 5, is wound on the calibration film rollers 12. Pressure sensors 7 are installed inside the transmission frame 1 and the fixed frame 9. One end of the transmission calibration film 10 is wound on the calibration film roller 12 inside the transmission frame 1, and the other end is wound on the calibration film roller 12 inside the fixed frame 9. The lifting guide shaft 15 drives the guide rollers 5 to move along the inside of the fixed frame 9 and the transmission frame 1, and drives the transmission calibration film 10 to move up and down to correct the ITO film formed by coating the PET substrate. The transmission calibration film 10 is wound up by the calibration film rollers 12.

[0043] A first calibration motor 6 is installed inside the transmission frame 1, and the first calibration motor 6 is connected to the calibration film roll 12 inside the transmission frame 1. A second calibration motor 8 is installed inside the fixed frame 9, and the second calibration motor 8 is connected to the calibration film roll 12 inside the fixed frame 9. Both the first and second transmission motors 3 are connected to a PLC controller 4. The pressure sensor 7 is also connected to the PLC controller 4. When the pressure sensor 7 on the transmission frame 1 detects pressure information, it transmits the pressure information to the PLC controller 4. The PLC controller 4 receives the data information and controls the first transmission motor 3 to rotate. The rotation of motor 3 drives the calibration film roll 12 to rotate. When the calibration film roll 12 rotates, it winds up the transmission calibration film 10, causing the transmission calibration film 10 to move along the guide film wheel 5 to correct the ITO film. When the pressure sensor 7 on the fixing frame 9 detects pressure information, it transmits the pressure information to the PLC controller 4. The PLC controller 4 receives the data information and controls the second transmission motor 3 to rotate. The rotation of the second transmission motor 3 drives the calibration film roll 12 to rotate. When the calibration film roll 12 rotates, it winds up the transmission calibration film 10, causing the transmission calibration film 10 to move along the guide film wheel 5 to correct the ITO film.

[0044] The lifting guide shaft 15 has support grooves at both ends, which are located inside the fixed frame 9 and the transmission frame 1. The lifting guide shaft 15 can slide up and down along the support grooves. A support spring 16 is installed inside the support groove. The top of the support spring 16 is connected to both ends of the lifting guide shaft 15. A connector is provided at the connecting end of the lifting guide shaft 15. The lifting guide shaft 15 is rotatably connected to the connector through a bearing. An embedded groove connected to the support spring 16 is provided on the surface of the connector. The guide roller 5 is provided with an arc-shaped bonding frame 14 for pushing it to move downward. The arc-shaped bonding frame 14 is internally threaded with a lifting screw 13. One set of lifting screws 13 passes through the fixed frame 9 and is equipped with a pulley. The other set of lifting screws 13 is connected to a transmission motor 3 installed on the transmission frame 1. A mounting platform 2 is fixed on the transmission frame 1. The transmission motor 3 is installed inside the mounting platform 2 and is equipped with a... Two sets of pulleys are connected by a belt 11. The drive motor 3 is connected to the PLC controller 4. The PLC controller 4 controls the drive motor 3 to rotate. The rotation of the drive motor 3 causes the lifting screw 13 inside the fixed frame 9 and the lifting screw 13 inside the drive frame 1 to rotate simultaneously through the drive belt 11. The rotation of the lifting screw 13 drives the arc-shaped bonding frame 14 to move up and down through the threaded connection. When the arc-shaped bonding frame 14 moves downward, it generates a downward thrust on the guide film wheel 5. The guide film wheel 5 generates a downward thrust on the lifting guide shaft 15. The lifting guide shaft 15 generates pressure on the support spring 16, causing the support spring 16 to contract. The lifting guide shaft 15 moves downward along the support groove. When the arc-shaped bonding frame 14 moves upward, the support spring 16 rebounds and pushes the lifting guide shaft 15 upward, so that the arc-shaped bonding frame 14 is always in contact with the guide film wheel 5.

[0045] The connection between the arc-shaped bonding frame 14 and the guide roller 5 is set as an arc-shaped surface that fits with it. A sliding guide roller is set on the arc-shaped surface. The sliding guide roller has an elastic structure inside. The surface of the sliding guide roller is made of rubber material and filled with expansion cotton. The surface bonding area is set as a smooth structure. The surface of the sliding guide roller is set as a smooth structure to reduce friction. The expansion sponge is set to prevent the ITO film from being damaged.

[0046] Step S2: A certain amount of argon gas is introduced into the SiOx coating area. Using voltage control mode, the power of the SiOx coating area is set between 10 and 30 kW, and the power of the ITO coating area is set between 6 and 20 kW. A mixture of argon and oxygen gas is introduced into the ITO coating area, and the amount of oxygen introduced is controlled by the gas reaction controller. The proportion of oxygen introduced in the total amount of gas introduced is controlled to be 1.5 to 5%, that is, O2 / (Ar+O2) = 1.5 to 5%.

[0047] A one-way valve is installed on the low-temperature coating chamber, connecting the SiOx coating area and the ITO coating area. The inlet of the one-way valve is sealed to a nozzle for introducing gas into the low-temperature coating chamber. The flow rate of argon gas can be calculated using the following formula:

[0048] The gas flow rate Q is selected based on the nozzle diameter D, resulting in the following formula: Q = (0.8 ~ 1.2)D.

[0049] Where Q is lower when D is smaller, Q is upper when D is larger;

[0050] The nozzle diameter is selected based on the tungsten electrode diameter: D = 2d + 4. After selecting the nozzle diameter, adjust the argon gas flow rate. The tungsten electrode diameter is related to the allowable value of the welding current. If the selected current exceeds this allowable value during welding, the tungsten electrode will heat up, melt, or volatilize, causing arc instability and tungsten inclusion in the weld. The nozzle is the source of gas protection for the welding torch. The nozzle shape has a great influence on the airflow. The commonly used nozzle shapes are cylindrical and conical.

[0051] Step S3: The PET substrate is passed sequentially through the SiOx coating zone and the ITO coating zone in the unwinding chamber of the low-temperature coating chamber. The moving speed in the SiOx coating zone and the ITO coating zone is 1.5 to 6 m / min.

[0052] Step S4: Collect the PET substrate after coating is completed.

[0053] After coating, the SiOx film on the PET substrate surface is 0.5-100 nm, and the ITO film on the PET substrate surface is 10-50 nm.

[0054] In this invention, when coating a PET substrate, a roll of flexible PET substrate is placed on an unwinding roller. One end of the flexible PET substrate is pulled through a low-temperature coating chamber and wound onto a take-up roller. The PET substrate is then placed into the unwinding chamber. A certain amount of argon gas is introduced into the SiOx coating area. A voltage control mode is used, setting the power of the SiOx coating area to between 10 and 30 kW and the power of the ITO coating area to between 6 and 20 kW. A mixture of argon and oxygen gas is introduced into the ITO coating area, and the amount of oxygen introduced is controlled by a gas reaction controller. The proportion of oxygen introduced into the total amount of gas introduced is controlled to be 1.5 to 5%, i.e., O2 / (Ar+O2) = 1.5 to 5%. The PET substrate passes sequentially through the SiOx coating area and the ITO coating area in the unwinding chamber of the low-temperature coating chamber. The moving speed in the SiOx coating area and the ITO coating area is 1.5 to 6 m / min. After coating, the PET substrate enters the take-up chamber.

[0055] When the pressure sensor 7 on the transmission frame 1 detects pressure information, it transmits the pressure information to the PLC controller 4. The PLC controller 4 controls the transmission motor 3 to rotate. The rotation of the transmission motor 3 causes the lifting screw 13 inside the fixed frame 9 and the lifting screw 13 inside the transmission frame 1 to rotate simultaneously via the transmission belt 11. The rotation of the lifting screw 13 drives the arc-shaped bonding frame 14 to move up and down through the threaded connection. When the arc-shaped bonding frame 14 moves downward, it generates a downward thrust on the guide film wheel 5. The guide film wheel 5 generates a downward thrust on the lifting guide shaft 15. The lifting guide shaft 15 generates pressure on the support spring 16, causing the support spring 16 to contract. The lifting guide shaft 15 moves downward along the support groove. When the arc-shaped bonding frame 14 moves upward, the support spring 16 rebounds and pushes the lifting guide shaft 15 upward, so that the arc-shaped bonding frame 14 is always in contact with the guide film wheel 5, so that the transmission calibration film 10 is bonded to the PET substrate.

[0056] The PLC controller 4 receives data and controls the first drive motor 3 to rotate. The rotation of the first drive motor 3 drives the calibration film roll 12 to rotate. When the calibration film roll 12 rotates, it winds up the transmission calibration film 10, causing the transmission calibration film 10 to move along the guide film wheel 5 to correct the ITO film. When the pressure sensor 7 on the fixing frame 9 detects pressure information, it transmits the pressure information to the PLC controller 4. The PLC controller 4 receives data and controls the second drive motor 3 to rotate. The rotation of the second drive motor 3 drives the calibration film roll 12 to rotate. When the calibration film roll 12 rotates, it winds up the transmission calibration film 10, causing the transmission calibration film 10 to move along the guide film wheel 5 to correct the ITO film. After the coating is completed, the PET substrate is taken out from the winding roller.

[0057] Finally, it should be noted that the above-described embodiments are merely specific implementations of the present invention, used to illustrate the technical solutions of the present invention, and not to limit it. The scope of protection of the present invention is not limited thereto. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments within the technical scope disclosed in the present invention, or make equivalent substitutions for some of the technical features; and these modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention, and should all be covered within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A process for coating easily crystallizing ITO capacitor film, characterized in that, Includes the following steps: Step S1: Select the low-temperature coating chamber, which is equipped with a SiOx coating area and an ITO coating area. Place the PET substrate into the unwinding chamber. In step S1, an unwinding chamber and a winding chamber are provided outside the low-temperature coating chamber. Guide rollers for driving the PET substrate are installed inside both the unwinding chamber and the winding chamber. A winding roller for collecting the PET substrate is provided inside the winding chamber. A guide roller and a main roller for guiding the PET substrate are installed inside the low-temperature coating chamber. A transmission component for driving the winding roller to rotate is provided inside the winding chamber. The transmission component drives the winding roller to rotate. The winding roller generates a pulling force on the PET substrate, causing the PET substrate to move along the guide roller. The winding chamber is equipped with a calibration component for PET base film calibration. The calibration component includes a transmission frame (1), a fixed frame (9), and a transmission calibration film (10). The transmission frame (1) and the fixed frame (9) are both equipped with a lifting guide shaft (15) that can move up and down along its interior. A guide film wheel (5) is installed on the lifting guide shaft (15). A calibration film roller (12) is installed inside the transmission frame (1) and the fixed frame (9). A transmission calibration film (10) that passes around two sets of guide film wheels (5) is wound on the calibration film roller (12). A pressure sensor (7) is installed inside the transmission frame (1) and the fixed frame (9). One end of the transmission calibration film (10) is wound on the calibration film roller (12) inside the transmission frame (1), and the other end is wound on the calibration film roller (12) inside the fixed frame (9). Step S2: Introduce a certain amount of argon gas into the SiOx coating area. Using voltage control mode, set the power of the SiOx coating area to between 10 and 30 kW and the power of the ITO coating area to between 6 and 20 kW. Introduce a mixture of argon and oxygen gas into the ITO coating area, and control the amount of oxygen introduced through a gas reaction controller. Control the proportion of oxygen introduced in the total amount of gas introduced to be 1.5% to 5%. Step S3: The PET substrate is passed sequentially through the SiOx coating zone and the ITO coating zone in the unwinding chamber of the low-temperature coating chamber. The moving speed in the SiOx coating zone and the ITO coating zone is 1.5 to 6 m / min. Step S4: Collect the PET substrate after coating is completed.

2. The easily crystallizable ITO capacitor film coating process according to claim 1, characterized in that, In step S1, the PET substrate is a transparent PET film with an IMPET substrate coating, and the thickness of the IMPET substrate is between 5μm and 200μm.

3. The coating process for an easily crystallizing ITO capacitor film according to claim 1, characterized in that, Both the SiOx coating area and the ITO coating area are provided with ITO targets. The ITO targets are composed of In2O3 and SnO2, with In2O3 accounting for 90-97% of the total and SnO2 accounting for 10-3% of the total.

4. The easily crystallizable ITO capacitor film coating process according to claim 1, characterized in that, The lifting guide shaft (15) has support grooves at both ends, which are formed inside the fixed frame (9) and the transmission frame (1). The lifting guide shaft (15) can slide up and down along the support grooves. A support spring (16) is installed inside the support groove. The top of the support spring (16) is connected to both ends of the lifting guide shaft (15). The lifting guide shaft (15) is provided with a connector at the connecting end. The lifting guide shaft (15) is rotatably connected to the connector through a bearing. The surface of the connector is provided with an embedding groove connected to the support spring (16). The guide wheel (5) is provided with a mechanism for pushing it downward. The arc-shaped bonding frame (14) has a lifting screw (13) internally threaded. One set of the lifting screws (13) passes through the fixed frame (9) and is equipped with pulleys. The other set of the lifting screws (13) is connected to the transmission motor (3) installed on the transmission frame (1). The transmission frame (1) is fixed with a mounting platform (2). The transmission motor (3) is installed inside the mounting platform (2). The transmission motor (3) is equipped with pulleys. The two sets of pulleys are connected by a belt (11). The transmission motor (3) is connected to the PLC controller (4).

5. The easily crystallizable ITO capacitor film coating process according to claim 4, characterized in that, The connection between the arc-shaped bonding frame (14) and the guide film wheel (5) is set as an arc-shaped surface that fits with it. A sliding guide wheel is provided on the arc-shaped surface. The sliding guide wheel has an elastic structure inside. The surface of the sliding guide wheel is made of rubber material and filled with expanding cotton. The surface bonding area is set as a smooth structure.

6. The coating process for an easily crystallizing ITO capacitor film according to claim 1, characterized in that, In step S2, a one-way valve is installed on the low-temperature coating chamber, connecting the SiOx coating area and the ITO coating area. The inlet of the one-way valve is sealed to a nozzle for introducing gas into the low-temperature coating chamber. The flow rate of argon gas can be calculated using the following formula: The gas flow rate Q is selected based on the nozzle diameter D, resulting in the following formula: Q = (0.8~1.2)D. Where Q is lower when D is smaller, Q is upper when D is larger; The nozzle diameter is selected based on the tungsten electrode diameter: D=2d+4. After selecting the nozzle diameter, adjust the argon flow rate.

7. The coating process for an easily crystallizing ITO capacitor film according to claim 1, characterized in that, In step S4, after the coating is completed, the SiOx film on the surface of the PET substrate is 0.5-100 nm, and the ITO film on the surface of the PET substrate is 10-50 nm.

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