Semiconductor hydrogen sensor hydrogen identification method, device, system and storage medium

Abstract

The present invention discloses a semiconductor hydrogen sensor hydrogen identification method, device, system and storage medium, the method comprising: according to the size of the gas molecular weight, establishing a gas diffusion rate model and an adsorption equilibrium model related to the molecular weight; based on the measured cross-gas response data, determining the influence factors of different gases according to the gas diffusion rate model and the adsorption equilibrium model; in the process of the sensor collecting gas concentration, taking a section of data for curve fitting, and performing differential and integral processing on each data point; recursively performing differential and integral data and influence factors to obtain results. The present invention can greatly enhance the sensor's recognition rate of hydrogen, reduce the influence of interfering gas components, and improve the reliability of the sensor.

Description

Technical Field

[0001] The present invention relates to the field of sensor technology, and in particular to a hydrogen identification method, device, system and storage medium of a semiconductor hydrogen sensor. Background Art

[0002] In recent years, with the rapid development of the new energy industry, hydrogen, as a new type of renewable energy, has the advantages of being green, environmentally friendly and simple to prepare, and has gradually been commercialized and demonstrated in industries such as hydrogen energy vehicles and steel smelting. Hydrogen is the smallest molecule, is extremely easy to leak, is colorless and odorless, and is prone to explosion after leakage. Therefore, hydrogen leakage monitoring is extremely critical to the development of the entire hydrogen energy industry. Semiconductor gas sensors with metal or metal oxide semiconductors as sensitive layers are the earliest commercialized and most widely used gas sensors. This type of sensor generally uses tin oxide as a sensitive material. As a broad-spectrum sensitive material, tin oxide responds to almost all reducing gas components. By doping tin oxide with elements, the selectivity of the sensor for target gas recognition can be improved. However, this improvement in selectivity is relative, and its accuracy still has room for further improvement. Summary of the invention

[0003] The present invention is provided to solve the above problems existing in the prior art. Therefore, a semiconductor hydrogen sensor hydrogen identification method, device, system and storage medium are needed to match a specific method for the semiconductor sensor, which can greatly improve the accuracy of the sensor in identifying gas components.

[0004] According to a first scheme of the present invention, a method for hydrogen identification of a semiconductor hydrogen sensor is provided, the method comprising: establishing a gas diffusion rate model and an adsorption equilibrium model related to the molecular weight according to the size of the gas molecular weight; the gas comprises hydrogen and an interfering gas; based on the measured cross-gas response data, determining the influencing factors of different gases according to the gas diffusion rate model and the adsorption equilibrium model; in the process of the sensor collecting gas concentration, taking a section of data for curve fitting, and performing differentiation and integration processing on each data point; recursively performing differentiation and integration on the differentiated and integrated data and the influencing factors to obtain a result.

[0005] According to the second technical solution of the present invention, a semiconductor hydrogen sensor hydrogen identification device is provided, and the device includes: a model building module, configured to establish a gas diffusion rate model and an adsorption equilibrium model related to the molecular weight according to the size of the gas molecular weight; the gas includes hydrogen and interfering gas; an influence factor determination module, configured to determine the influence factors of different gases according to the gas diffusion rate model and the adsorption equilibrium model based on the measured cross-gas response data; a data processing module, configured to take a section of data for curve fitting during the process of the sensor collecting gas concentration, and to perform differentiation and integration processing on each data point; a recursive module, configured to recursively perform differentiation and integration of the data and influence factors to obtain a result.

[0006] According to a third technical solution of the present invention, a semiconductor hydrogen sensor hydrogen identification system is provided, the system comprising: a memory for storing a computer program; and a processor for executing the computer program to implement the method described above.

[0007] According to a fourth technical solution of the present invention, a non-transitory computer-readable storage medium storing instructions is provided. When the instructions are executed by a processor, the method described above is executed.

[0008] The semiconductor hydrogen sensor hydrogen identification method, device, system and storage medium according to each solution of the present invention have at least the following technical effects:

[0009] The present invention can greatly enhance the sensor's recognition rate of hydrogen, reduce the influence of interfering gas components, and improve the reliability of the sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] In the drawings, which are not necessarily drawn to scale, the same reference numerals may describe similar parts in different views. The same reference numerals with letter suffixes or different letter suffixes may represent different instances of similar parts. The accompanying drawings generally illustrate various embodiments by way of example and not limitation, and together with the specification and claims, are used to illustrate the embodiments of the invention. When appropriate, the same reference numerals are used throughout the drawings to refer to the same or similar parts. Such embodiments are illustrative and are not intended to be exhaustive or exclusive embodiments of the present apparatus or method.

[0011] Figure 1 A flow chart of a hydrogen identification method for a semiconductor hydrogen sensor according to an embodiment of the present invention is shown.

[0012] Figure 2 A schematic diagram of differentiation and integration processing according to an embodiment of the present invention is shown.

[0013] Figure 3A structural diagram of a hydrogen identification device of a semiconductor hydrogen sensor according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0014] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are further described in detail below in conjunction with the accompanying drawings and specific embodiments, but are not intended to limit the present invention. For the various steps described herein, if there is no necessity for a causal relationship between each other, the order in which they are described as examples herein should not be regarded as a limitation, and those skilled in the art should know that they can be adjusted in order, as long as the logic between them is not destroyed, resulting in the inability to implement the entire process.

[0015] The present invention provides a method for identifying hydrogen in a semiconductor hydrogen sensor. Figure 1 , is a flow chart of a method for identifying hydrogen in a semiconductor hydrogen sensor according to an embodiment of the present invention. The method comprises the following steps:

[0016] Step S100, establishing a gas diffusion velocity model and an adsorption equilibrium model related to the molecular weight according to the molecular weight of the gas; the gas includes hydrogen and interfering gas.

[0017] The interfering gases include but are not limited to alcohol and methane.

[0018] Step S300, based on the measured cross-gas response data, determining the influence factors of different gases according to the gas diffusion velocity model and the adsorption equilibrium model.

[0019] In this step, the cross-gas response data is measured by the corresponding gas sensor on the mixed gas. For example, when the interfering gas includes alcohol and methane, in addition to detecting the hydrogen concentration, the gas concentrations of alcohol and methane must also be detected. When the accurate hydrogen concentration is known, for example, a % hydrogen concentration, the influencing factor on the hydrogen concentration measured by the sensor is determined according to the gas concentrations of alcohol and methane of different concentrations, so as to prepare for subsequent data processing.

[0020] Step S300: In the process of the sensor collecting gas concentration, a section of data is taken for curve fitting, and each data point is differentiated and integrated.

[0021] In this step, a piece of data refers to the hydrogen concentration in a period of time. The hydrogen concentration is differentiated and integrated over time. The result can be referred to Figure 2 In this embodiment, when the differential value is greater than 3000, it can be determined to be hydrogen.

[0022] Step S400, recursively perform differential and integral data and influence factors to obtain a result.

[0023] It should be noted that the Fibonacci sequence can be used to solve the factorial by recursively transforming the differential and integral data and the influencing factors.

[0024] The present invention also provides a semiconductor hydrogen sensor hydrogen identification device, see Figure 3 , Figure 3 The structure diagram of a semiconductor hydrogen sensor hydrogen identification device according to an embodiment of the present invention is shown. The device 300 includes:

[0025] The model building module 301 is configured to build a gas diffusion velocity model and an adsorption equilibrium model related to the molecular weight according to the molecular weight of the gas; the gas includes hydrogen and interfering gas;

[0026] The influence factor determination module 302 is configured to determine the influence factors of different gases based on the measured cross-gas response data according to the gas diffusion velocity model and the adsorption equilibrium model;

[0027] The data processing module 303 is configured to take a section of data for curve fitting during the process of the sensor collecting gas concentration, and perform differentiation and integration processing on each data point;

[0028] The recursive module 304 is configured to recursively perform differential and integral data and influencing factors to obtain a result.

[0029] The semiconductor hydrogen sensor hydrogen identification device mentioned in the embodiment of the present invention belongs to the same technical concept as the method previously described, and the technical effects they achieve are basically the same, which will not be repeated here.

[0030] The embodiment of the present invention further provides a semiconductor hydrogen sensor hydrogen identification system, the system comprising:

[0031] Memory for storing computer programs;

[0032] A processor is used to execute the computer program to implement the method of any embodiment of the present invention.

[0033] An embodiment of the present invention further provides a non-transitory computer-readable medium storing instructions, and when the instructions are executed by a processor, the method according to any embodiment of the present invention is executed.

[0034] In addition, although exemplary embodiments have been described herein, the scope includes any and all embodiments based on the present invention with equivalent elements, modifications, omissions, combinations (e.g., various embodiments intersecting schemes), adaptations or changes. The elements in the claims will be interpreted broadly based on the language adopted in the claims, and are not limited to the examples described in this specification or during the implementation of this application, and the examples will be interpreted as non-exclusive. Therefore, this specification and examples are intended to be considered as examples only, and the true scope and spirit are indicated by the following claims and the full scope of their equivalents.

[0035] The above description is intended to be illustrative rather than restrictive. For example, the above examples (or one or more of them) can be used in combination with each other. For example, those of ordinary skill in the art can use other embodiments when reading the above description. In addition, in the above-mentioned specific embodiments, various features can be grouped together to simplify the present invention. This should not be interpreted as a feature of an invention that is not claimed for protection being necessary for any claim. On the contrary, the subject matter of the present invention may be less than all the features of the embodiments of a specific invention. Thus, the following claims are incorporated into the specific embodiments as examples or embodiments, wherein each claim is independently used as a separate embodiment, and it is considered that these embodiments can be combined with each other in various combinations or arrangements. The scope of the present invention should be determined with reference to the full scope of the equivalent forms of the attached claims and these claims.

Claims

1. A method for identifying hydrogen using a semiconductor hydrogen sensor, characterized in that: The method comprises: According to the molecular weight of the gas, a gas diffusion velocity model and an adsorption equilibrium model related to the molecular weight are established; the gas includes hydrogen and interfering gas; Based on the measured cross-gas response data, the influence factors of different gases are determined according to the gas diffusion velocity model and adsorption equilibrium model; When the sensor collects gas concentration, a section of data is taken for curve fitting, and each data point is differentiated and integrated; The differential and integral data and the influencing factors are recursively applied to obtain the results.

2. A semiconductor hydrogen sensor hydrogen identification device, characterized in that: The device comprises: A model building module is configured to build a gas diffusion velocity model and an adsorption equilibrium model related to the molecular weight according to the molecular weight of the gas; the gas includes hydrogen and an interfering gas; An influence factor determination module is configured to determine influence factors of different gases based on the measured cross-gas response data according to a gas diffusion velocity model and an adsorption equilibrium model; The data processing module is configured to take a section of data for curve fitting during the process of the sensor collecting gas concentration, and perform differentiation and integration processing on each data point; The recursive module is configured to recursively perform differential and integral data and influencing factors to obtain a result.

3. A semiconductor hydrogen sensor hydrogen identification system, characterized in that: The system comprises: Memory for storing computer programs; A processor, configured to execute the computer program to implement the method according to claim 1. 4 . A non-transitory computer-readable storage medium storing instructions, which, when executed by a processor, perform the method according to claim 1 .

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