A vibration suppression method, a control board card, a device and a storage medium

Abstract

This invention discloses a vibration suppression method, control board, device, and storage medium. The invention relates to the field of vibration reduction technology for motion tables. The method includes: a first processor acquiring motion data of a support platform, preprocessing the motion data, and sending the preprocessed motion data to shared memory; a second processor acquiring motion data of the motion table and obtaining the preprocessed motion data from the shared memory; the second processor performing a Fourier transform on the motion data of the motion table and the preprocessed motion data of the support platform to obtain transformed data, and determining the resonance point of the motion table and the support platform based on the transformed data; the second processor determining the damping force of the motion table based on the resonance point of the motion table and the support platform, and using the damping force to counteract the force on the motion table to suppress the vibration generated by the motion table.

Description

Technical Field

[0001] The present invention relates to the field of vibration reduction technology for motion tables, and in particular to a vibration suppression method, control board, device and storage medium. Background Technology

[0002] With the continuous development of the integrated circuit manufacturing industry, micron and nanometer-level precision processing equipment, represented by semiconductor manufacturing, integrates cutting-edge technologies from multiple disciplines such as optics, mechanics, electronics, and control. However, the motion accuracy, yield, and other indicators of semiconductor processing equipment are strictly limited by the interference of external disturbance forces on the internal components.

[0003] Existing semiconductor manufacturing equipment typically employs a combination of passive and active vibration damping. Passive dampers, used to isolate high-frequency vibrations from the foundation, generally consist of a single spring or damper. Active dampers can attenuate most internal interference (mid-to-low frequencies).

[0004] Ideally, by introducing external energy, the natural frequency of a passive vibration damper can be suppressed to 0dB, meaning there is neither gain nor attenuation. However, in reality, due to the nonlinear factors of the entire electromechanical system, when the motion table is not involved in the motion, even if active vibration damping is activated, vibrations will still be transmitted from the external world, causing the motion table to vibrate. The active and passive vibration dampers installed between the internal and external worlds are difficult to significantly attenuate this disturbance force. Therefore, in practical applications, the vibration reduction effect is generally poor, making it difficult to apply to high-requirement equipment. Summary of the Invention

[0005] This invention provides a vibration suppression method, control board, device, and storage medium to solve the problem of low-frequency vibration caused by external disturbances to semiconductor manufacturing equipment.

[0006] According to one aspect of the present invention, a vibration suppression method is provided, comprising:

[0007] After the first processor acquires the motion data of the carrier platform, it preprocesses the motion data of the carrier platform and sends the preprocessed motion data of the carrier platform to the shared memory.

[0008] The second processor acquires the motion data of the motion platform and obtains the preprocessed motion data of the carrier platform through shared memory.

[0009] The second processor performs Fourier transform on the motion data of the motion platform and the preprocessed motion data of the support platform to obtain the transformed data, and determines the resonance point of the motion platform and the support platform based on the transformed data.

[0010] The second processor determines the damping force of the motion table based on the resonance point of the motion table and the support platform, and uses the damping force of the motion table to counteract the force on the motion table to suppress the vibration generated by the motion table.

[0011] According to another aspect of the present invention, a vibration suppression control board is provided, comprising: a shock absorber control sub-board, a motion table control sub-board, and an inter-core communication module;

[0012] The shock absorber control sub-board is equipped with a first processor for executing the shock absorber control algorithm and the vibration suppression method;

[0013] The motion table control sub-board is equipped with a second processor for executing the motion table control algorithm and the vibration suppression method.

[0014] The inter-core communication module is equipped with shared memory, and both the first processor and the second processor are connected to the shared memory to enable data sharing between the first processor and the second processor.

[0015] According to another aspect of the present invention, an electronic device includes:

[0016] First processor and second processor; and

[0017] A memory communicatively connected to the first processor and / or the second processor; wherein,

[0018] The memory stores a computer program that can be executed by the first processor and the second processor, and the computer program is executed by the first processor and the second processor to enable the first processor and the second processor to perform the vibration suppression method according to any embodiment of the present invention.

[0019] According to another aspect of the present invention, a computer-readable storage medium is provided, the computer-readable storage medium storing computer instructions for causing a processor to execute and implement the vibration suppression method according to any embodiment of the present invention.

[0020] The technical solution of this invention involves a first processor acquiring motion data of a support platform, preprocessing the motion data, and sending the preprocessed motion data to shared memory. A second processor acquires motion data of the motion platform and also acquires the preprocessed motion data of the support platform via shared memory. The second processor performs a Fourier transform on the motion data of the motion platform and the preprocessed motion data of the support platform to obtain transformed data, and determines the resonance point of the motion platform and the support platform based on the transformed data. The second processor determines the damping force of the motion platform based on the resonance point of the motion platform and the support platform, and uses the damping force to counteract the force on the motion platform to suppress vibrations. This technical solution allows the second processor to acquire both motion data of the motion platform and motion data of the support platform via shared memory, enabling simultaneous suppression of motion platform vibrations based on both motion data. This facilitates accurate and effective suppression of motion platform vibrations and improves the working accuracy of the motion platform.

[0021] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a flowchart of a vibration suppression method provided in Embodiment 1 of the present invention;

[0024] Figure 2 This is a schematic diagram of the structure of a semiconductor manufacturing equipment provided in Embodiment 1 of the present invention;

[0025] Figure 3 This is a flowchart of another vibration suppression method provided in Embodiment 2 of the present invention;

[0026] Figure 4 This is a schematic diagram of the structure of a vibration suppression control board provided in Embodiment 3 of the present invention;

[0027] Figure 5 This is a schematic diagram of a conventional vibration reduction architecture provided in Embodiment 3 of the present invention;

[0028] Figure 6This is a schematic diagram of an electronic device structure provided in Embodiment 4 of the present invention. Detailed Implementation

[0029] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0030] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0031] Example 1

[0032] Figure 1 This is a flowchart illustrating vibration suppression according to Embodiment 1 of the present invention. This embodiment is applicable to suppressing low-frequency vibrations in semiconductor manufacturing equipment caused by external disturbances. The method can be executed by a vibration suppression control board, which can be implemented in hardware and / or software and can be configured in an electronic device. For example, the electronic device can be a server or server cluster.

[0033] like Figure 1 As shown, the method includes:

[0034] Step 110: After the first processor obtains the motion data of the carrier platform, it preprocesses the motion data of the carrier platform and sends the preprocessed motion data of the carrier platform to the shared memory.

[0035] It should be noted that this application aims to suppress low-frequency vibrations of a motion stage, wherein the motion stage and the support platform are components in semiconductor manufacturing equipment. Figure 2 This is a schematic diagram of the structure of a semiconductor manufacturing equipment provided in Embodiment 1 of the present invention.

[0036] like Figure 2As shown, the semiconductor manufacturing equipment includes: an optical processing unit 201, an optical processing unit support platform 202, a motion platform 203, a support platform 204, a vibration damper sensor unit 205, a stiffness damping component 206, a vibration damper actuator unit 207, a foundation 208, and a stiffness damping component 209.

[0037] Specifically, the foundation 208 serves as the fixing device for the entire equipment and is connected to the ground. The support platform 204 is connected to the foundation 208 via stiffness damping components 206 and 209 and a vibration damper actuator unit 207. The stator of the motor in the vibration damper actuator unit 207 is mounted on the foundation 208, and the mover is mounted below the support platform 204 to counteract the reaction force from the moving platform. The vibration damper sensor unit 205 is installed between the foundation 208 and the support platform 204 to collect the velocity and displacement signals of the support platform 204, as well as the acceleration signal of the foundation. The support platform 204 supports the moving platform 203 and the optical processing unit, and the optical processing unit 201 is connected above the support platform 202.

[0038] The support platform can be a marble platform. The motion data of the support platform includes its displacement, position, velocity, and acceleration. Preprocessing includes low-pass filtering.

[0039] Specifically, when external disturbances cause vibrations to the load platform 204 through the foundation 208, stiffness damping components 206 and 209, the first processor acquires motion data such as displacement and position of the load platform 204, performs low-pass filtering, and then sends the processed data to the shared memory.

[0040] The method further includes: after the first processor acquires the motion data of the support platform, it executes a vibration damper control algorithm based on the motion data of the support platform, and outputs motor force based on the calculation result of the algorithm to suppress the vibration of the support platform.

[0041] The damper control algorithm includes a closed-loop algorithm for damper speed and position, feedforward calculation, and decoupling matrix operation.

[0042] Specifically, the first processor performs a vibration damper control algorithm based on the motion data of the support platform, and the actuator outputs motor force to the support platform based on the calculation results of the first processor to counteract the external vibrations experienced by the support platform.

[0043] Step 120: The second processor acquires the motion data of the motion table and acquires the preprocessed motion data of the carrier platform through shared memory.

[0044] The motion data of the motion table includes its displacement, position, velocity, and acceleration.

[0045] Specifically, the motion stage is used in the semiconductor manufacturing process for tasks such as wafer transfer, focusing and leveling, silicon wafer alignment, mask alignment, and exposure. Its working accuracy is strictly limited by internal and external disturbances. Since the motion stage is located on a support platform, when the support platform is subjected to external disturbances, the motion stage will also be affected. When the motion stage is not in operation, external disturbances will cause vibrations. The second processor acquires the motion data of the motion stage and obtains the pre-processed motion data of the support platform transmitted by the first processor through the shared memory connected between the first and second processors.

[0046] After the first processor acquires the motion data of the carrier platform, it preprocesses the motion data of the carrier platform and sends the preprocessed motion data of the carrier platform to the shared memory; before the second processor acquires the motion data of the motion platform and acquires the preprocessed motion data of the carrier platform through the shared memory, the method further includes: sensors collecting the motion data of the carrier platform and the motion data of the motion platform.

[0047] Specifically, real-time motion data of the support platform and the motion platform can be collected by sensors, and then transmitted to the first processor and the second processor respectively through hardware connection.

[0048] Step 130: The second processor performs Fourier transform on the motion data of the motion stage and the preprocessed motion data of the support stage to obtain the transformed data, and determines the resonance point of the motion stage and the support stage based on the transformed data.

[0049] The second processor performs a Fourier transform on the motion data of the motion stage and the preprocessed motion data of the support platform to obtain transformed data, and determines the resonance point of the motion stage and the support platform based on the transformed data, including:

[0050] The second processor performs Fourier transform on the motion data of the motion platform and the preprocessed motion data of the support platform to obtain the velocity frequency domain data and displacement frequency domain data of the motion platform and the support platform; the second processor determines the resonance point of the motion platform and the support platform based on the velocity frequency domain data and the displacement frequency domain data.

[0051] In this step, motion data refers to velocity and displacement data. Resonance refers to the response of a system to external excitation, which manifests as large-amplitude vibrations, where the frequency of the external excitation is the same as or very close to the system's natural vibration frequency.

[0052] Specifically, the second processor performs Fourier transforms on the velocity and displacement data of the motion platform and the preprocessed velocity and displacement data of the support platform to obtain the velocity frequency domain data and displacement frequency domain data of the motion platform and the velocity frequency domain data and displacement frequency domain data of the support platform.

[0053] In determining the resonance point, a common method is to identify the resonance point when the response value (velocity, displacement) of the monitoring point is 6 dB (twice) greater than the control value (velocity, displacement) of the control point. Therefore, the resonance point can be automatically identified based on the velocity and displacement frequency domain data of the motion table and the bearing platform.

[0054] Step 140: The second processor determines the damping force of the motion table based on the resonance point of the motion table and the support platform, and uses the damping force of the motion table to counteract the force on the motion table to suppress the vibration generated by the motion table.

[0055] Specifically, when subjected to external disturbances, the motion table will experience disturbance forces through the support platform. The disturbance forces experienced by the motion table can be offset by adding damping forces to the motion table.

[0056] In this step, the second processor determines the damping force of the motion table based on the resonance point of the motion table and the support platform, including:

[0057] The second processor determines the vibration force on the motion table based on the frequency and phase of the resonance point of the motion table and the support platform; the second processor uses the force opposite in phase to the vibration force on the motion table as the damping force of the motion table.

[0058] Furthermore, the second processor determines the vibration force on the motion platform based on the frequency and phase of the resonance points of the motion platform and the support platform, including: if the frequency and phase of the resonance points of the motion platform and the support platform are consistent, the second processor determines the vibration force on the motion platform according to the vibration force calculation formula; if the frequency and phase of the resonance points of the motion platform and the support platform are inconsistent, the second processor takes the average value of the frequency and phase of the resonance points of the motion platform and the support platform, and determines the vibration force on the motion platform according to the average value and the vibration force calculation formula.

[0059] Specifically, the formula for calculating the vibration force is: F = sin(wt + a), where F is the vibration force on the motion table, wt is the frequency, and a is the phase.

[0060] In this embodiment, after the first processor acquires the motion data of the support platform, it preprocesses the motion data and sends the preprocessed motion data to shared memory. The second processor acquires the motion data of the motion platform and also acquires the preprocessed motion data of the support platform through shared memory. The second processor performs a Fourier transform on the motion data of the motion platform and the preprocessed motion data of the support platform to obtain transformed data, and determines the resonance point of the motion platform and the support platform based on the transformed data. The second processor determines the damping force of the motion platform based on the resonance point of the motion platform and the support platform, and uses the damping force to counteract the force on the motion platform to suppress the vibration generated by the motion platform. In this embodiment, the second processor, in addition to acquiring the motion data of the motion platform, can also acquire the motion data of the support platform through shared memory, enabling simultaneous suppression of the motion platform's vibration based on both motion data and support platform data. This facilitates accurate and effective suppression of the motion platform's vibration and improves the working accuracy of the motion platform.

[0061] Example 2

[0062] This invention provides a vibration suppression process. Figure 3 This is a flowchart of another vibration suppression method provided in Embodiment 2 of the present invention. This embodiment further refines the vibration suppression method based on the above embodiments. Figure 3 As shown, the method further includes:

[0063] Step 301: Determine whether the active vibration damper is activated.

[0064] Specifically, vibration reduction modes typically include passive and active vibration reduction. Passive vibration reduction can be achieved through passive dampers, which generally consist of a spring or damper and are used to isolate high-frequency vibrations of the foundation. Active vibration reduction can be achieved through active dampers, which can output damping force to attenuate low- and mid-frequency interference.

[0065] Step 302: If yes, input the displacement and velocity of the support platform and the motion platform.

[0066] Step 303: If not, return to the starting state.

[0067] Step 304: Perform Fourier transform on the input displacement and velocity respectively.

[0068] Step 305: Determine whether there is a resonance point between the two sets of data.

[0069] Step 306: If yes, calculate the frequency and phase of the resonance point.

[0070] Step 307: If not, return to step 304.

[0071] Step 308: Execute the motion table control algorithm on the frequency and phase of the resonance point to obtain the magnitude of the vibration force.

[0072] Step 309: Output a damping force that is opposite in phase to the vibration force, and adjust the motion table in real time through the damping force.

[0073] Step 310: Determine whether the vibration of the motion table has decayed to the threshold.

[0074] Step 311: If yes, end.

[0075] Step 312: If not, return to step 309.

[0076] Example 3

[0077] Figure 4 This is a schematic diagram of a vibration suppression control board according to Embodiment 3 of the present invention. The vibration suppression control board can be implemented in hardware and / or software, and can be used to execute the vibration suppression method of any of the above embodiments.

[0078] like Figure 4 As shown, 401 is the vibration suppression control board, which integrates two traditional boards into one board; 402 is the shock absorber control sub-board; 403 is the motion table control sub-board; and 404 is the inter-core communication module.

[0079] The shock absorber control sub-board 402 is equipped with a first processor for executing the shock absorber control algorithm and the vibration suppression method;

[0080] The motion table control sub-board 403 is equipped with a second processor for executing the motion table control algorithm and the vibration suppression method;

[0081] The inter-core communication module 404 is equipped with shared memory, and both the first processor and the second processor are connected to the shared memory to realize data sharing between the first processor and the second processor.

[0082] It should be noted that in traditional vibration damping structures, the velocity and displacement of the bearing platform and the moving platform cannot be obtained simultaneously for the following reasons:

[0083] Figure 5 This is a schematic diagram of a traditional vibration reduction architecture provided in Embodiment 3 of the present invention. Figure 5As shown, the vibration damper controller board 501 runs the vibration damper control algorithm. Its inputs are the acceleration and position of the XY axes transmitted from the motion table via hardware connection, as well as the velocity and displacement of the marble collected by the velocity and position sensors. After executing the vibration damper velocity and position closed-loop algorithm, feedforward calculation, and decoupling matrix operation, it outputs motor force to suppress the vibration of the marble. The motion table control board 502 takes the axis velocity collected by the position sensors of each axis of the motion table as input, executes the motion control algorithm of the motion table, including position loop, velocity loop, and various filter algorithms, and outputs motor force to control the motion table. However, there is no hardwired connection between the vibration damper control board 501 and the motion table control board 502. Even if there were a hardwired connection, it would be difficult to achieve real-time communication of large amounts of data (thousands of bytes) based on the current bus communication bandwidth (the bandwidth of the SRIO bus is 30 bytes in the microsecond range). Therefore, the displacement and acceleration sensor signals in the vibration damper control board 501 cannot be transmitted to the motion table control board 502.

[0084] And in Figure 4 In the process, the motion stage control sub-board 403 can obtain the real-time speed and displacement data of the bearing stage through inter-core communication, thereby effectively suppressing vibration and improving the control accuracy of the motion stage in the semiconductor manufacturing process.

[0085] In this embodiment, after the first processor acquires the motion data of the support platform, it preprocesses the motion data and sends the preprocessed motion data to shared memory. The second processor acquires the motion data of the motion platform and also acquires the preprocessed motion data of the support platform through shared memory. The second processor performs a Fourier transform on the motion data of the motion platform and the preprocessed motion data of the support platform to obtain transformed data, and determines the resonance point of the motion platform and the support platform based on the transformed data. The second processor determines the damping force of the motion platform based on the resonance point of the motion platform and the support platform, and uses the damping force to counteract the force on the motion platform to suppress the vibration generated by the motion platform. In this embodiment, the second processor, in addition to acquiring the motion data of the motion platform, can also acquire the motion data of the support platform through shared memory, enabling simultaneous suppression of the motion platform's vibration based on both motion data and support platform data. This facilitates accurate and effective suppression of the motion platform's vibration and improves the working accuracy of the motion platform.

[0086] The vibration suppression control board provided in this embodiment of the invention can execute the method provided in any embodiment of the invention, and has the corresponding functional modules and beneficial effects for executing the method.

[0087] Example 4

[0088] Figure 6 This is a schematic diagram of an electronic device structure provided in Embodiment 4 of the present invention. The electronic device is intended to represent various forms of digital computers, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as personal digital processors, cellular phones, smartphones, wearable devices (such as helmets, glasses, watches, etc.), and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely illustrative and are not intended to limit the implementation of the invention described and / or claimed herein.

[0089] like Figure 6 As shown, the electronic device 610 includes: a first processor 611 and a second processor 612; and a memory communicatively connected to the first processor 611 and / or the second processor 612, such as a read-only memory (ROM) 613, a random access memory (RAM) 614, etc. The memory stores computer programs executable by at least one processor. The first processor 611 and the second processor 612 can perform various appropriate actions and processes based on the computer programs stored in the ROM 613 or loaded from storage unit 619 into the RAM 614. The RAM 614 can also store various programs and data required for the operation of the electronic device 610. The first processor 611, the second processor 612, the ROM 613, and the RAM 614 are interconnected via a bus 615. An input / output (I / O) interface 616 is also connected to the bus 615.

[0090] Multiple components in electronic device 610 are connected to I / O interface 616, including: input unit 617, such as keyboard, mouse, etc.; output unit 618, such as various types of displays, speakers, etc.; storage unit 619, such as disk, optical disk, etc.; and communication unit 620, such as network card, modem, wireless transceiver, etc. Communication unit 620 allows electronic device 610 to exchange information / data with other devices through computer networks such as the Internet and / or various telecommunications networks.

[0091] The first processor 611 and the second processor 612 can be various general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of the first processor 611 and the second processor 612 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various special-purpose artificial intelligence (AI) computing chips, various processors running machine learning model algorithms, digital signal processors (DSPs), and any suitable processor, controller, microcontroller, etc. The first processor 611 and the second processor 612 perform the various methods and processes described above, such as vibration suppression methods.

[0092] In some embodiments, the vibration suppression method may be implemented as a computer program tangibly contained in a computer-readable storage medium, such as storage unit 619. In some embodiments, part or all of the computer program may be loaded and / or installed on electronic device 610 via ROM 613 and / or communication unit 620. When the computer program is loaded into RAM 614 and executed by first processor 611 and second processor 612, one or more steps of the vibration suppression method described above may be performed. Alternatively, in other embodiments, first processor 611 and second processor 612 may be configured to perform the vibration suppression method by any other suitable means (e.g., by means of firmware).

[0093] Various embodiments of the systems and techniques described above herein can be implemented in digital electronic circuit systems, integrated circuit systems, field-programmable gate arrays (FPGAs), application-specific integrated circuits (ASICs), application-specific standard products (ASSPs), systems-on-a-chip (SoCs), payload-programmable logic devices (CPLDs), computer hardware, firmware, software, and / or combinations thereof. These various embodiments may include implementations in one or more computer programs that can be executed and / or interpreted on a programmable system including at least one programmable processor, which may be a dedicated or general-purpose programmable processor, capable of receiving data and instructions from a storage system, at least one input device, and at least one output device, and transmitting data and instructions to the storage system, the at least one input device, and the at least one output device.

[0094] Computer programs used to implement the methods of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device, such that when executed by the processor, the computer programs cause the functions / operations specified in the flowcharts and / or block diagrams to be performed. The computer programs may be executed entirely on a machine, partially on a machine, or as a standalone software package, partially on a machine and partially on a remote machine, or entirely on a remote machine or server.

[0095] In the context of this invention, a computer-readable storage medium can be a tangible medium that may contain or store a computer program for use by or in conjunction with an instruction execution system, apparatus, or device. A computer-readable storage medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatus, or devices, or any suitable combination thereof. Alternatively, a computer-readable storage medium may be a machine-readable signal medium. More specific examples of machine-readable storage media include electrical connections based on one or more wires, portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fibers, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination thereof.

[0096] To provide interaction with a user, the systems and techniques described herein can be implemented on an electronic device having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and pointing device (e.g., a mouse or trackball) through which the user provides input to the electronic device. Other types of devices can also be used to provide interaction with the user; for example, feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including sound input, voice input, or tactile input).

[0097] The systems and technologies described herein can be implemented in computing systems that include backend components (e.g., as data servers), or middleware components (e.g., application servers), or frontend components (e.g., user computers with graphical user interfaces or web browsers through which users can interact with implementations of the systems and technologies described herein), or any combination of such backend, middleware, or frontend components. The components of the system can be interconnected via digital data communication of any form or medium (e.g., communication networks). Examples of communication networks include local area networks (LANs), wide area networks (WANs), blockchain networks, and the Internet.

[0098] A computing system can include clients and servers. Clients and servers are generally located far apart and typically interact through communication networks. The client-server relationship is created by computer programs running on the respective computers and having a client-server relationship with each other. The server can be a cloud server, also known as a cloud computing server or cloud host, which is a hosting product within the cloud computing service system to address the shortcomings of traditional physical hosts and VPS services, such as high management difficulty and weak business scalability.

[0099] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this invention can be achieved, and this is not limited herein.

[0100] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A vibration suppression method, characterized in that, include: After the first processor acquires the motion data of the carrier platform, it preprocesses the motion data of the carrier platform and sends the preprocessed motion data of the carrier platform to the shared memory. The second processor acquires the motion data of the motion platform and obtains the preprocessed motion data of the carrier platform through shared memory. The second processor performs Fourier transform on the motion data of the motion platform and the preprocessed motion data of the support platform to obtain the transformed data, and determines the resonance point of the motion platform and the support platform based on the transformed data. The second processor determines the damping force of the motion table based on the resonance point of the motion table and the support platform, and uses the damping force of the motion table to counteract the force on the motion table to suppress the vibration generated by the motion table; The second processor performs a Fourier transform on the motion data of the motion stage and the preprocessed motion data of the support platform to obtain transformed data, and determines the resonance point of the motion stage and the support platform based on the transformed data, including: The second processor performs Fourier transform on the motion data of the motion platform and the preprocessed motion data of the support platform to obtain the velocity frequency domain data and displacement frequency domain data of the motion platform and the support platform; The second processor determines the resonance point of the motion platform and the support platform based on the velocity frequency domain data and the displacement frequency domain data; The second processor determines the damping force of the motion table based on the resonance point of the motion table and the support platform, including: The second processor determines the vibration force on the motion table based on the frequency and phase of the resonance point between the motion table and the support platform; The second processor uses a force that is opposite in phase to the vibration force experienced by the motion table as the damping force of the motion table; The second processor determines the vibration force on the motion table based on the frequency and phase of the resonance point between the motion table and the support platform, including: If the frequency and phase of the resonance point of the motion table and the support table are consistent, the second processor determines the vibration force on the motion table according to the vibration force calculation formula; If the frequencies and phases of the resonance points of the motion platform and the support platform are inconsistent, the second processor takes the average value of the frequencies and phases of the resonance points of the motion platform and the support platform, and determines the vibration force on the motion platform according to the average value and the vibration force calculation formula.

2. The method according to claim 1, characterized in that, After the first processor acquires the motion data of the carrier platform, it preprocesses the motion data of the carrier platform and sends the preprocessed motion data of the carrier platform to the shared memory. Before the second processor acquires the motion data of the motion platform and acquires the preprocessed motion data of the carrier platform through shared memory, the method further includes: The sensor collects motion data of the support platform and the motion data of the motion table.

3. The method according to claim 1, characterized in that, The method further includes: After the first processor acquires the motion data of the support platform, it executes the vibration damper control algorithm based on the motion data of the support platform, and outputs the motor force according to the calculation result of the algorithm to suppress the vibration of the support platform.

4. A vibration suppression control board, characterized in that, include: Shock absorber control sub-board, motion table control sub-board, inter-core communication module; The shock absorber control sub-board is equipped with a first processor for executing the shock absorber control algorithm and the vibration suppression method as described in claim 1; The motion table control sub-board is equipped with a second processor for executing the motion table control algorithm and the vibration suppression method as described in claim 1; The inter-core communication module is equipped with shared memory, and both the first processor and the second processor are connected to the shared memory to enable data sharing between the first processor and the second processor.

5. An electronic device, characterized in that, The electronic device includes: First processor and second processor; and A memory communicatively connected to the first processor and / or the second processor; wherein, The memory stores a computer program that can be executed by the first processor and the second processor, the computer program being executed by the first processor and the second processor to enable the first processor and the second processor to perform the method of any one of claims 1-3.

6. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer instructions that are used to cause a processor to execute the method of any one of claims 1-3.

Images