Vertical quartz tube and its processing technology

Abstract

This application relates to a vertical quartz furnace tube and its processing technology, belonging to the technical field of furnace tube equipment. A vertical quartz furnace tube includes a tube body. One end of the tube body is sealed and fixedly connected to a coupling tube communicating with the tube body. A vacuum pump is installed at the end of the tube body away from the coupling tube. A third flange is installed at the end of the vacuum pump near the tube body. The vacuum pump and the tube body are detachably connected via the third flange. A moving mechanism for mounting a crystal boat is provided at the end of the tube body near the vacuum pump. The moving mechanism includes a housing located at the end of the tube body and extending away from the tube body. The end of the housing near the tube body abuts against the side wall of the tube body, and a fixing component connecting to the tube body is provided on the outside of the housing. An installation component for driving the crystal boat to move closer to the interior of the tube body is provided at the end of the housing away from the tube body. This application has the effect of facilitating the rapid installation of the crystal boat in the furnace tube, improving installation efficiency.

Description

Technical Field

[0001] This application relates to the technical field of furnace tube equipment, and in particular to a vertical quartz furnace tube and its processing technology. Background Technology

[0002] In semiconductor heat treatment processes, vertical furnaces are widely used due to their advantages of small footprint and high processing efficiency. Vertical furnaces typically employ vertical crystal boats as carriers for the transfer and processing of wafers or chips. The furnace tubes and crystal boats are usually made of quartz or silicon carbide materials, suitable for heat treatment processes in different temperature zones.

[0003] Chinese Patent Publication No. CN114709134A discloses a semiconductor heat treatment method using a vertical furnace tube and the vertical furnace tube itself. The semiconductor heat treatment method using a vertical furnace tube includes: placing a wafer and a baffle plate inside a crystal boat in the vertical furnace tube, with the baffle plate located above and below the wafer; and staggeredly placing air intake plates in an air intake plate support bracket below the crystal boat. The vertical furnace tube includes: a crystal boat, in which a wafer and a baffle plate are placed, with the baffle plate located above and below the wafer; and an air intake plate support bracket located below the crystal boat, with staggeredly placed air intake plates inside the air intake plate support bracket. This method improves the technical problem of uneven film thickness in semiconductor products and increases product yield.

[0004] In related technologies, when installing a crystal boat in a furnace tube, the vertical axis of the crystal boat must be perfectly aligned with the vertical axis of the furnace tube before pushing the crystal boat into the furnace tube. This process can easily lead to a significant amount of time being wasted, affecting work efficiency. Summary of the Invention

[0005] To facilitate the rapid installation of crystal boats into furnace tubes and improve installation efficiency, this application provides a vertical quartz furnace tube and its processing technology.

[0006] In the first aspect, this application provides a vertical quartz furnace tube, which adopts the following technical solution:

[0007] A vertical quartz furnace tube includes a tube body, one end of which is sealed and fixedly connected to a coupling tube communicating with the tube body. A vacuum pump is installed at the end of the tube body away from the coupling tube, and a third flange is installed at the end of the vacuum pump near the tube body. The vacuum pump and the tube body are detachably connected through the third flange. A moving mechanism for mounting a crystal boat is provided at the end of the tube body near the vacuum pump. The moving mechanism includes a housing disposed at the end of the tube body and extending away from the tube body. The end of the housing near the tube body abuts against the side wall of the tube body, and a fixing component connecting the tube body is provided on the outside of the housing. An mounting component for driving the crystal boat to move closer to the interior of the tube body is provided at the end of the housing away from the tube body.

[0008] By adopting the above technical solution, when using a vertical quartz furnace tube, the vacuum pump is removed from the tube body, and the housing is installed on the end of the tube body away from the seal using a fixing assembly. At this time, the crystal boat is installed in the tube body using an installation assembly, and the housing is removed from the tube body using the installation assembly. The vacuum pump is then installed on the tube body through the third flange, at which point the crystal boat abuts against the upper side wall of the third flange on the vacuum pump. The vacuum pump evacuates the inside of the tube body, and gas is then introduced from the coupling tube, causing the gas to move along the length of the tube body towards the unsealed end of the tube body. This facilitates the coating of the wafer surface on the crystal boat. At this time, the installation assembly allows the crystal boat to quickly enter the tube body along the rotation axis of the tube body, reducing the possibility of aligning the rotation axis of the crystal boat with the rotation axis of the tube body during installation and improving installation efficiency.

[0009] Optionally, the mounting assembly includes slide rails disposed on both sides of the housing and arranged opposite to each other. Each of the two slide rails has a tray perpendicular to the length direction of the slide rail on one side that is close to each other. The crystal boat is placed on the tray. Each side of the tray is fixedly connected with a sliding block that is inserted into the slide rail and slidably connected to the slide rail. The housing is provided with a driving component that drives the sliding block to move closer to the inside of the tube.

[0010] By adopting the above technical solution, during the process of installing the crystal boat into the tube, the crystal boat is placed on the upper side of the tray. At this time, the tray supports the crystal boat, and the driving component drives the sliding block to move the tray towards the tube. The crystal boat moves with the tray until it enters the tube. At this time, the slide rail limits the sliding block, so that the crystal boat never contacts the side wall of the tube, which facilitates the quick installation of the crystal boat into the furnace tube and improves the installation efficiency.

[0011] Optionally, the ends of the sliding blocks that are far apart from each other pass through the slide rail and are slidably connected to the slide rail. The driving component includes a movable pulley rotatably connected to the end of the sliding block that passes through the slide rail. Fixed pulleys are rotatably connected to both sides of the outer wall of the housing near the end of the tube. A steel rope corresponding to the fixed pulley is provided on the outer side of the housing. The steel ropes all pass around the fixed pulleys and through the corresponding movable pulleys and are fixedly connected to the movable pulleys. A winch is installed at the end of each steel rope near the fixed pulley. A pushing component is provided at the end of the housing near the tube to push the crystal boat into the tube.

[0012] By adopting the above technical solution, when the sliding block moves the crystal boat closer to the tube, the winch continuously tightens both ends of the steel rope. At this time, the moving pulley, driven by the steel rope, moves the sliding block along the length of the slide rail closer to the tube. The slide rail limits the crystal boat, reducing the possibility of the crystal boat falling due to uneven force on both sides during the movement. When the sliding block moves the crystal boat to the point where the upper end of the crystal boat is inserted into the tube, the pusher continues to drive the tray to move the crystal boat until the crystal boat is completely inserted into the tube. This facilitates the quick installation of the crystal boat in the furnace tube and improves installation efficiency.

[0013] Optionally, the pushing component includes a gear corresponding to and fixedly connected to the fixed pulley, and racks adapted to the gears are fixedly connected to both sides of the tray. An abutment rod is fixedly connected to one end of each sliding block near the rack, and the rack is inserted into the abutment rod and slidably connected to the abutment rod.

[0014] By adopting the above technical solution, when the steel rope drives the moving pulley to move the crystal boat to the upper end of the rack and abuts and meshes with the corresponding gear, the winch continues to tighten both ends of the steel rope. At this time, the fixed pulley drives the gear to rotate, thereby driving the rack to move the crystal boat closer to the inside of the tube until the crystal boat is completely inside the tube. This facilitates the quick installation of the crystal boat in the furnace tube and improves the installation efficiency.

[0015] Optionally, the tube body is provided with a fixing member for fixing the crystal boat at one end near the shell. The fixing member includes a fixing ring perpendicular to the length direction of the tube body. The fixing ring is made of elastic material. The inner diameter of the fixing ring is equal to the diameter of the crystal boat. The fixing ring is provided with a connector that connects to the side wall of the tube body.

[0016] By adopting the above technical solution, when the steel rope drives the gear to rotate the rack, the upper end of the crystal boat is inserted into the fixing ring and continues to move towards the inside of the tube until the fixing ring abuts against the rack and, under the push of the rack, the crystal boat is completely inserted into the tube. At this time, the connector connects the fixing ring to the inner wall of the tube, thereby fixing the crystal boat in the tube, further achieving the effect of facilitating the quick installation of the crystal boat in the furnace tube and improving the installation efficiency.

[0017] Optionally, the fixing component includes a fixing frame fixedly connected to one end of the housing near the tube body. The two ends of the fixing frame are respectively located on both sides of the tube body and facing the tube body. Both ends of the fixing frame are slidably connected to a snap-fit ​​rod facing the tube body. The fixing frame is provided with a moving part that drives the snap-fit ​​rod to move in a direction closer to each other and presses the tube body against it.

[0018] By adopting the above technical solution, during the process of installing the housing onto the tube body using the mounting assembly, the housing is moved closer to the tube body until the upper end of the housing contacts the lower side wall of the tube body. At this time, the locking rods are located on both sides of the tube body. The locking rods are moved closer to each other by the moving component until the ends of the locking rods that are close to each other are pressed against the side wall of the tube body, thereby installing the housing onto the tube body. This facilitates the installation of the crystal boat into the tube body. After the crystal boat is installed, the locking rods are moved away from each other by the moving component and the housing is removed, which facilitates the vacuum pump to perform vacuum treatment on the inside of the tube body, thereby improving the installation efficiency without affecting the normal use of the tube body.

[0019] Optionally, the movable component includes a first hinge rod hinged to the opposite side of the fixed frame. The ends of the first hinge rods away from the hinge ends are inclined towards each other and hinged to a second hinge rod. The other ends of the second hinge rods are hinged to the side wall of the snap-fit ​​rod near the tube body. The connection between the first hinge rod and the second hinge rod is hinged to the same push rod. A cylinder is installed on the side of the fixed frame away from the push rod. The telescopic rod of the cylinder passes through the fixed frame and is fixedly connected to the push rod.

[0020] By adopting the above technical solution, when the driving latching rods approach each other, the cylinder drives the push rod to move towards the side closer to the latching rod. At this time, the two ends of the push rod drive the first hinge rod and the second hinge rod to move towards the side closer to the latching rod. At this time, the second hinge rod rotates and drives the latching rod to slide away from the first hinge rod until the ends of the latching rods approach each other are pressed against the side wall of the tube, thereby fixing the shell and the tube. This further facilitates the quick installation of the crystal boat in the furnace tube and improves the installation efficiency.

[0021] Optionally, a quartz ring is fixedly connected to one sealed end of the tube body, the pair tube is fixed to and connected to the quartz ring, and a top plate is fixedly connected to the end of the quartz ring away from the tube body. A plurality of evenly distributed sieve holes are opened in the area of ​​the sealed end of the tube body opposite to the top plate.

[0022] By adopting the above technical solution, during the process of gas entering the tube, the gas enters the quartz ring through the coupling tube. At this time, the gas first contacts the sealed end of the tube and then enters the tube after being evenly dispersed through the sieve holes at the sealed end of the tube. This facilitates uniform coating of the wafer on the crystal boat and improves the quality of wafer coating.

[0023] Secondly, this application provides a processing technology for a vertical quartz furnace tube, employing the following technical solution:

[0024] A processing technology for a vertical quartz furnace tube includes the following steps:

[0025] S1: Pretreatment involves soaking the tube body, top plate, quartz ring, and coupling tube in nitric acid and then rinsing them with pure water.

[0026] S2: Mark the laser drilling positions on the tube body processed in step S1, soak it in nitric acid, and clean it with pure water.

[0027] S3: Determine the overall length of the tube after S2 treatment, anneal it, pickle it, and clean it with pure water.

[0028] S4: Polish and anneal the top plate, quartz ring, and coupler tube after S1 treatment, and the tube body after S3 treatment, then process them with an acid pickling machine, soak them in nitric acid, and clean them with pure water.

[0029] S5: Perform assembly welding, weld the top plate treated in S4 to the quartz ring and anneal fully, keep the temperature constant for one hour, cool with the furnace, and clean with pure water.

[0030] S6: Weld the quartz ring treated with S4 to the main body. The filler material should be full. After welding, perform full annealing and constant temperature for 2 hours. Machin the weld joint of the top plate, grind finely, and pickle twice. The first pickling is done by soaking in nitric acid and rinsing with pure water. The second pickling is done by soaking in hydrofluoric acid and rinsing with pure water.

[0031] S7: Polished top plate, fully annealed, kept at a constant temperature for one hour, treated by an acid pickling machine, and cleaned with pure water;

[0032] S8: Welded galvanic tube, fully annealed, kept at a constant temperature for one hour, treated by an acid pickling machine, and cleaned with pure water;

[0033] S9: Polish twice, anneal thoroughly, and keep at a constant temperature for one hour;

[0034] S10: The upper end of the moving mechanism abuts against the tube body after S9 and is detachably connected to the tube body.

[0035] By adopting the above technical solution, the quartz ring, top plate, and coupler tube are welded onto the tube body, and the moving mechanism is installed at the end of the tube body away from the top plate, which facilitates the rapid installation of the crystal boat in the furnace tube and improves the installation efficiency.

[0036] In summary, this application includes at least one of the following beneficial technical effects:

[0037] 1. Remove the vacuum pump from the tube body and install the housing on the end of the tube body away from the seal using the fixing assembly. Then, install the crystal boat in the tube body using the mounting assembly and remove the housing from the tube body using the mounting assembly. Install the vacuum pump on the tube body through the third flange. At this time, the crystal boat abuts against the upper side wall of the third flange on the vacuum pump. The vacuum pump evacuates the inside of the tube body. Then, introduce gas from the coupling tube and move the gas along the length of the tube body towards the unsealed end of the tube body, which facilitates the coating of the wafer surface on the crystal boat. At this time, the mounting assembly allows the crystal boat to quickly enter the tube body along the rotation axis of the tube body, reducing the possibility of aligning the rotation axis of the crystal boat with the rotation axis of the tube body when installing the crystal boat, thus improving the installation efficiency.

[0038] 2. The winch continuously tightens both ends of the steel rope. At this time, the moving pulley, driven by the steel rope, drives the sliding block to move along the length of the slide rail towards the tube body. The slide rail limits the crystal boat, reducing the possibility of the crystal boat falling off due to uneven force on both sides during the movement. When the sliding block drives the crystal boat to the point where the upper end of the crystal boat is inserted into the tube body, the pusher continues to drive the tray to move the crystal boat until the crystal boat is completely inserted into the tube body. This facilitates the quick installation of the crystal boat in the furnace tube and improves installation efficiency.

[0039] 3. When the drive latching rods approach each other, the cylinder drives the push rod to move towards the side closer to the latching rod. At this time, the two ends of the push rod drive the first hinge rod and the second hinge rod to move towards the side closer to the latching rod. At this time, the second hinge rod rotates and drives the latching rod to slide away from the first hinge rod until the ends of the latching rods approach each other are pressed against the side wall of the tube, thereby fixing the shell and the tube. This further facilitates the quick installation of the crystal boat in the furnace tube and improves the installation efficiency. Attached Figure Description

[0040] Figure 1 This is a schematic diagram of the overall structure of the tube in the embodiment of this application.

[0041] Figure 2 This is a structural schematic diagram illustrating the positional relationship between the pipe body and the second flange in an embodiment of this application.

[0042] Figure 3 This is a schematic diagram of the overall structure of the vertical quartz furnace tube in the embodiments of this application.

[0043] Figure 4 This is a structural schematic diagram illustrating the positional relationship between the tube body and the moving mechanism in the embodiments of this application.

[0044] Figure 5 This is a schematic diagram illustrating the positional relationship between the crystal boat and the shell in an embodiment of this application.

[0045] Figure 6This is a schematic diagram illustrating the positional relationship between the moving mechanism and the crystal boat in an embodiment of this application.

[0046] Figure 7 yes Figure 4 Enlarged view of the structure at point A in the middle.

[0047] Explanation of reference numerals in the attached drawings: 1. Crystal boat; 11. Insulation tank; 2. Pipe body; 21. Quartz ring; 22. Top plate; 23. Sieve hole; 24. Air inlet pipe; 241. First flange; 25. Coupler pipe; 26. Air outlet pipe; 27. Second flange; 3. Shell; 31. Waist-shaped hole; 4. Fixing assembly; 41. Snap-fit ​​rod; 411. Abutment groove; 42. Fixing frame; 43. Moving part; 431. First hinge rod; 432. Second hinge rod; 433. Push block; 434. Push rod; 435. Cylinder; 5. Mounting assembly; 51 51. Slide rail; 52. Tray; 53. Sliding block; 54. Driving component; 541. Moving pulley; 542. Fixed pulley; 543. Steel rope; 55. Support plate; 56. Pushing component; 561. Rack; 562. Gear; 563. Abutting rod; 5631. Insertion groove; 57. Fixing component; 571. Fixing ring; 5711. Cavity; 5712. Through hole; 572. Limiting plate; 573. First spring; 574. Fixing plate; 58. Connecting component; 581. Connecting rod; 582. Second spring; 583. Extension rod. Detailed Implementation

[0048] The present application will be further described in detail below with reference to the accompanying drawings.

[0049] This application discloses a vertical quartz furnace tube. (Refer to...) Figure 1 , Figure 2 and Figure 3 A vertical quartz furnace tube includes a tube body 2 for placing a crystal boat 1. The tube body 2 is vertical and cylindrical. The lower end of the crystal boat 1 is connected to an insulation barrel 11 by bolts. The upper end of the tube body 2 is sealed, and a vertical quartz ring 21 with a diameter smaller than the inner diameter of the tube body 2 is fixedly connected to the outer wall of the sealed end of the tube body 2. A top plate 22 for sealing the quartz ring 21 is abutted and fixedly connected to the inner wall of the end of the quartz ring 21 away from the tube body 2. A plurality of evenly distributed sieve holes 23 are opened in the area of ​​the sealed end of the tube body 2 opposite to the top plate 22.

[0050] A horizontal air inlet pipe 24 is fixedly connected to the outer wall of the pipe body 2 away from the sealing end. The air inlet pipe 24 is not connected to the inner wall of the pipe body 2. Two parallel pipes 25, which communicate with the inside of the air inlet pipe 24, are fixedly connected to the upper side of the air inlet pipe 24. The parallel pipes 25 are vertically arranged, and the upper ends of the parallel pipes 25 are bent towards the quartz ring 21 and fixedly connected to the side wall of the quartz ring 21. The parallel pipes 25 communicate with the inside of the quartz ring 21. A first flange 241 is installed at the end of the air inlet pipe 24 away from the pipe body 2. An air outlet pipe 26, which communicates with the inside of the pipe body 2, is fixedly connected to the side of the pipe body 2 that is close to the air inlet pipe 24 and away from the air inlet pipe 24. A first flange 241 is also installed at the end of the air outlet pipe 26 away from the pipe body 2. Control valves (not shown in the figure) are installed at both the air inlet pipe 24 and the air outlet pipe 26.

[0051] A vacuum pump (not shown in the figure) is installed at one end of the pipe body 2 near the air inlet pipe 24. A second flange 27 for mounting the vacuum pump is installed at the end of the pipe body 2 near the vacuum pump. A third flange (not shown in the figure) is installed at the end of the vacuum pump near the second flange 27. The pipe body 2 and the vacuum pump are fixed to each other by bolts to the second flange 27 and the third flange. The inner diameter of the third flange is smaller than the inner diameter of the second flange 27. When the crystal boat 1 and the insulation tank 11 are installed in the pipe body 2, the lower end of the insulation tank 11 abuts against the upper side wall of the third flange.

[0052] When using a vertical quartz furnace tube, align the crystal boat 1 and the insulation barrel 11 with the rotation axis of the tube body 2 and move them towards the inside of the tube body 2 until the crystal boat 1 and the insulation barrel 11 are completely inside the tube body 2. At this time, the lower side of the insulation barrel 11 is flush with the lower side of the second flange 27. Fix the third flange to the second flange 27 with bolts. At this time, close the inlet pipe 24 and the outlet pipe 26 through the control valve. The tube body 2 is now sealed. Evacuate the inside of the tube body 2 using a vacuum pump. Then, introduce gas into the coupling tube 25 from the inlet pipe 24.

[0053] Gas enters the quartz ring 21 through the coupling tube 25 and enters the tube body 2 through the sieve hole 23 at one sealed end of the tube body 2, thereby uniformly dispersing the gas and depositing it uniformly on the wafer surface on the crystal boat 1. As the gas continuously enters the tube body 2, the gas in the tube body 2 is discharged from the gas outlet 26. At this time, the vacuum pump keeps the tube body 2 in a low-pressure environment until the wafer deposition film is completed.

[0054] Reference Figure 3The pipe body 2 has a moving mechanism at one end near the second flange 27 to push the crystal boat 1 and the insulation barrel 11 into the pipe body 2. The moving mechanism includes a housing 3 whose upper side wall abuts against the lower side wall of the second flange 27. The upper end of the housing 3 is provided with a fixing component 4 that connects to the second flange 27, and the end of the housing 3 away from the second flange 27 is provided with a mounting component 5 that pushes the crystal boat 1 and the insulation barrel 11. The mounting component 5 includes two vertical slide rails 51 that are arranged opposite to each other and fixedly connected to the outer side wall of the housing 3. The side of the slide rails 51 away from the housing 3 and close to each other is provided with a tray 52 of the same level. The lower end of the insulation barrel 11 contacts the tray 52. ​​Two horizontal sliding blocks 53 are provided on both sides of the tray 52 and facing the slide rails 51. The sliding blocks 53 pass through the slide rails 51 and are slidably connected to the slide rails 51. The housing 3 is provided with a driving component 54 that drives the sliding blocks 53 to move the tray 52 upward to move the crystal boat 1 and the insulation barrel 11. The lower end of the slide rail 51 is fixedly connected to a support plate 55 of the same level. When the insulated bucket 11 is placed on the tray 52, the upper side of the support plate 55 abuts against the tray 52 and supports the tray 52.

[0055] When using a vertical quartz furnace tube, remove the vacuum pump from the tube body 2 and install the housing 3 on the end of the tube body 2 away from the seal via the fixing assembly 4. Place the crystal boat 1 on the upper side of the tray 52, at which time the tray 52 supports the crystal boat 1. The driving component 54 drives the sliding block 53 to move the tray 52 towards the tube body 2. At this time, the crystal boat 1 moves with the tray 52 until it enters the tube body 2. Then, remove the housing 3 from the tube body 2 via the mounting assembly 5. Install the vacuum pump on the tube body 2 via the third flange. At this time, the crystal boat 1 abuts against the upper side wall of the third flange on the vacuum pump. The vacuum pump evacuates the inside of the tube body 2. At this time, the gas is introduced from the coupling tube 25 and moves along the length of the tube body 2 towards the end near the housing 3, thereby facilitating the coating of the wafer surface on the crystal boat 1.

[0056] Reference Figure 3 , Figure 4 and Figure 5 The driving component 54 includes two sliding blocks 53 rotatably connected to the same side of the tray 52, with movable pulleys 541 on the side away from the tray 52 and close to each other. Fixed pulleys 542 are inserted into and rotatably connected to the end of the slide rail 51 near the housing 3. Each fixed pulley 542 is equipped with a steel rope 543. One end of the steel rope 543 is located on the side of the fixed pulley 542 away from the slide rail 51, and the other end wraps around the fixed pulley 542 and is wound and fixedly connected to the movable pulley 541. A winch (not shown in the figure) for winding the steel rope 543 is installed at one end of the steel rope 543 located on the side of the fixed pulley 542 away from the slide rail 51. The housing 3 is equipped with a pushing component 56 that pushes the crystal boat 1 and the insulation barrel 11 further towards the interior of the tube body 2.

[0057] When the sliding block 53 drives the crystal boat 1 to move closer to the tube body 2, the winch continuously tightens the steel rope 543. At this time, the movable pulley 541, driven by the steel rope 543, drives the sliding block 53 to move closer to the tube body 2 along the length of the slide rail 51. At this time, the slide rail 51 limits the crystal boat 1, reducing the possibility of the crystal boat 1 falling due to uneven force on both sides during the movement. When the sliding block 53 drives the crystal boat 1 to the point where the upper end of the crystal boat 1 is inserted into the tube body 2, the pusher 56 continues to drive the tray 52 to move the crystal boat 1 until the crystal boat 1 is completely inserted into the tube body 2, completing the installation of the crystal boat 1 and the insulation barrel 11.

[0058] Reference Figure 3 and Figure 5 The pusher 56 includes a vertical rack 561 fixedly connected to both sides of the tray 52. ​​The upper end of the rack 561 is higher than the upper end of the tray 52. ​​A gear 562 that meshes with the rack 561 is fixedly connected to one side of the movable pulley 541. The sliding block 53 located on the same side of the tray 52 is fixedly connected to the same vertical abutment rod 563 at one end near the tray 52. ​​The abutment rod 563 has a vertical insertion groove 5631 with an upward opening. The rack 561 is inserted into the insertion groove 5631 and abuts against the abutment rod 563.

[0059] When the steel rope 543 drives the pulley 541 to move the crystal boat 1 to the upper end of the rack 561 and engage with the corresponding gear 562, the winch continues to tighten both ends of the steel rope 543. At this time, the fixed pulley 542 drives the gear 562 to rotate, thereby driving the rack 561 to move the crystal boat 1 further towards the inside of the tube 2 until the crystal boat 1 is completely inside the tube 2, completing the installation of the crystal boat 1 and the insulation barrel 11.

[0060] Reference Figure 4 and Figure 6 The housing 3 is equipped with a fixing member 57 for fixing the crystal boat 1 and the insulation barrel 11 to the tube body 2. The fixing member 57 includes a horizontal fixing ring 571 disposed inside the housing 3 and near one end of the tube body 2. A V-shaped limiting plate 572 is provided on one side of the housing 3. One end of the limiting plate 572 is horizontal and passes through the side wall of the housing 3 and is slidably connected to the side wall of the housing 3. A vertical oblong hole 31 is opened on the housing 3 for the other end of the limiting plate 572 to pass through. The other end of the limiting plate 572 is inclined and passes through the oblong hole 31 and is slidably connected to the side wall of the housing 3. On the other side of the housing 3 near the end of the limiting plate 572, a limiting plate 572 is installed in the same manner, and the sides of the limiting plates 572 that are far apart from each other pass through the slide rail 51 and are fixedly connected to a horizontal first spring 573. The limiting plate 572 is slidably connected to the slide rail 51. A vertical fixing plate 574 is fixedly connected to the second flange 27. The other end of the first spring 573 is fixedly connected to the fixing plate 574. (Refer to...) Figure 4 , Figure 5 and Figure 7 The fixing ring 571 has connecting parts 58 on both sides of the connecting tube body 2.

[0061] When the steel rope 543 drives the gear 562 to rotate the rack 561, the upper end of the crystal boat 1 is inserted into the fixing ring 571 and continues to move towards the inside of the tube 2. At this time, the limiting plate 572 restricts the movement of the fixing ring 571, so that the fixing ring 571 gradually fits onto the upper end of the insulation barrel 11 as the crystal boat 1 moves upward. At this time, the crystal boat 1 and the insulation barrel 11 continue to move upward. At this time, the abutment rods 563 on both sides of the tray 52 press the limiting plate 572 and push the limiting plate 572 to slide away from each other until the fixing ring 571 abuts against the rack 561 and, under the push of the rack 561, completely enters the tube 2 with the crystal boat 1. At this time, the connector 58 connects the fixing ring 571 to the inner wall of the tube 2, thereby fixing the crystal boat 1 in the tube 2 and completing the installation of the crystal boat 1 and the insulation barrel 11.

[0062] Reference Figure 4 , Figure 5 and Figure 7 The fixing ring 571 has cavities 5711 on both sides. The connecting member 58 includes connecting rods 581 that are horizontally disposed in the cavities 5711 and hinged to each other. A vertical second spring 582 is fixedly connected to the lower side of each connecting rod 581. A horizontal extension rod 583 is hinged to the opposite end of each connecting rod 581. The opposite end of each extension rod 583 passes through the fixing ring 571 and is slidably connected to the side wall of the fixing ring 571. The rack 561 has a tip at the upper end. The fixing ring 571 has vertical through holes 5712 on both sides that communicate with the cavities 5711. The through holes 5712 are directly opposite the hinged ends of the connecting rods 581. When the tip of the rack 561 is inserted into the through hole 5712, the hinged ends of the connecting rods 581 move towards the side closer to the tube body 2, and the extension rods 583 move towards each other until they are completely inserted into the fixing ring 571.

[0063] When the fixing ring 571 is installed on the upper side of the insulation barrel 11, the tip of the rack 561 is inserted into the through hole 5712. At this time, the tip of the rack 561 and the end of the connecting rod 581 that is hinged to each other abut against each other and push the hinge point to move closer to the tube body 2. At this time, the ends of the extension rods 583 that are far apart from each other are flush with the side wall of the fixing ring 571, and the inclined end of the limiting plate 572 abuts against the inclined surface of the upper end of the rack 561. The crystal boat 1 and the insulation barrel 11 continue to move closer to the tube body 2. At this time, the fixing ring 571 continues to move with the crystal boat 1 and the insulation barrel 11 until it enters the tube body 2. At this time, the lower side of the insulation barrel 11 is flush with the lower side of the second flange 27.

[0064] As the tray 52 moves downward, the tip of the rack 561 disengages from the through hole 5712, the second spring 582 recovers its deformation and pulls the connecting rod 581 towards the housing 3. At this time, the extension rod 583 gradually moves away from each other until the extension rod 583 located outside the fixing ring 571 abuts against the side wall of the tube 2, and the extension rod 583 located inside the fixing ring 571 abuts against the side wall of the insulation barrel 11. At this time, the housing 3 and the second flange 27 are released from the fixing assembly 4, and the vacuum pump is installed on the tube 2 through the third flange and the second flange 27. At this time, the lower side wall of the insulation barrel 11 abuts against the third flange, completing the installation of the crystal boat 1 and the insulation barrel 11.

[0065] Reference Figure 3 The fixing assembly 4 includes snap-fit ​​rods 41 disposed opposite to each other on both sides of the second flange 27. The outer diameter of the second flange 27 is larger than the outer diameter of the pipe body 2. The snap-fit ​​rod 41 has an abutment groove 411 at one end near the second flange 27. The side wall of the second flange 27 is inserted into the snap-fit ​​groove and abuts against the snap-fit ​​rod 41. A horizontal fixing frame 42 is fixedly connected to one end of the housing 3 near the pipe body 2. The fixing frame 42 is located on the side of the pipe body 2 near the outlet pipe 26 and is C-shaped. Both ends of the fixing frame 42 are opposite to the snap-fit ​​rods 41 and located on both sides of the second flange 27. Both ends of the fixing frame 42 are bent at right angles towards the pipe body 2. The ends of the snap-fit ​​rods 41 that are far apart from each other are inserted into the ends of the fixing frame 42 and are slidably connected to the fixing frame 42. The fixing frame 42 is provided with a moving part 43 that drives the snap-fit ​​rods 41 to move towards each other.

[0066] The movable component 43 includes first hinge rods 431 disposed opposite to each other at both ends of the fixed frame 42. One end of each first hinge rod 431 is hinged to the fixed frame 42, and the other end is inclined towards each other and has an inclined second hinge rod 432. The adjacent ends of the second hinge rods 432 are hinged to the lower side of the locking rod 41 near the end of the tube body 2. The adjacent ends of the first hinge rod 431 and the second hinge rod 432 on the same side of the tube body 2 are both hinged to the same pushing block 433, and the same horizontal pushing rod 434 is passed through and fixedly connected to the pushing blocks 433 on both sides of the tube body 2. Both ends of the pushing rod 434 abut against and are slidably connected to the side wall of the fixed frame 42. A horizontal cylinder 435 is installed in the middle of the side wall of the fixed frame 42 on the side of the pushing rod 434 away from the tube body 2. The telescopic rod of the cylinder 435 passes through the fixed frame 42 and is fixedly connected to the middle of the pushing rod 434.

[0067] When the housing 3 is fixed to the second flange 27, the housing 3 is moved closer to the pipe body 2 until the upper end of the housing 3 contacts the lower side wall of the pipe body 2. At this time, the locking rod 41 is located on both sides of the pipe body 2. The cylinder 435 drives the push rod 434 to move closer to the locking rod 41. At this time, the two ends of the push rod 434 drive the first hinge rod 431 and the second hinge rod 432 to move closer to the locking rod 41. At this time, the second hinge rod 432 rotates and drives the locking rod 41 to slide away from the first hinge rod 431 until the ends of the locking rods 41 that are close to each other are pressed against the side wall of the pipe body 2, thereby fixing the housing 3 to the pipe body 2.

[0068] The implementation principle of a vertical quartz furnace tube in this application embodiment is as follows: When using a vertical quartz furnace tube, the vacuum pump is removed from the tube body 2, and the housing 3 is installed at the end of the tube body 2 away from the seal by means of the cylinder 435 driving the clamping rod 41 to press against the second flange 27. The crystal boat 1 is placed on the upper side of the tray 52, at which time the tray 52 supports the crystal boat 1. The steel rope 543 is continuously tightened by the winch. At this time, the movable pulley 541 drives the sliding block under the drive of the steel rope 543. 53. Move along the length of the slide rail 51 towards the tube body 2 until the upper end of the rack 561 abuts and meshes with the corresponding gear 562. Continue to tighten the steel rope 543. The tip of the rack 561 is inserted into the through hole 5712, and the inclined end of the limiting plate 572 abuts against the inclined surface of the upper end of the rack 561. Continue to move the crystal boat 1 and the heat preservation barrel 11 towards the tube body 2. At this time, the fixing ring 571 continues to move with the crystal boat 1 and the heat preservation barrel 11 until it enters the tube body 2.

[0069] The tray 52 is moved downwards. As the tip of the rack 561 disengages from the through hole 5712, the extension rod 583 gradually moves away from each other until the extension rod 583 located outside the fixing ring 571 abuts against the side wall of the tube 2, and the extension rod 583 located inside the fixing ring 571 abuts against the side wall of the insulation barrel 11. The shell 3 is removed from the tube 2 by the cylinder 435, and the vacuum pump is installed on the tube 2 by the third flange. At this time, the crystal boat 1 abuts against the upper side wall of the third flange on the vacuum pump. The vacuum pump evacuates the inside of the tube 2. At this time, the gas is introduced from the coupling tube 25 and moves along the length of the tube 2 towards the end closer to the shell 3 to complete the wafer surface coating.

[0070] This application also discloses a processing technology for a vertical quartz furnace tube. The processing technology for a vertical quartz furnace tube includes the following steps:

[0071] S1: Pretreatment involves soaking the pipe body 2, top plate 22, quartz ring 21, coupling tube 25, inlet pipe 24, outlet pipe 26, first flange 241, and second flange 27 in nitric acid, followed by soaking in hydrofluoric acid and rinsing with pure water.

[0072] S2: Machining, using a light-operated lathe to connect the pipe body 2 and the second flange 27, and using a dial indicator to determine concentricity and perpendicularity;

[0073] S3: Heat treatment, full annealing, constant temperature for one hour, and after furnace cooling, fine grinding of the second flange 27 and the interface of the second flange 27.

[0074] S4: Immerse the tube 2 treated in step S3 in nitric acid, clean it with pure water, and then mark the laser drilling positions.

[0075] S5: Immerse the tube 2 after laser drilling in step S4 in nitric acid and rinse it with pure water.

[0076] S6: The overall length of the tube body 2 after S5 treatment is determined by processing, annealing, pickling, and cleaning with pure water.

[0077] S7: Polish and anneal the top plate 22, quartz ring 21, twin tube 25, air inlet pipe 24, air outlet pipe 26, first flange 241 after S1 treatment and the tube body 2 after S6 treatment, then process them with an acid pickling machine and clean them with pure water.

[0078] S8: Perform assembly welding, weld the top plate 22 and quartz ring 21, anneal fully, keep the temperature constant for one hour, cool with the furnace, soak in hydrofluoric acid in a pickling machine, and clean with pure water.

[0079] S9: Weld quartz ring 21 to main body 2, the filler material should be full, after welding, perform full annealing, keep the temperature constant for one hour, turn the weld joint of top plate 22, grind finely, and pickle twice. The first pickling is done by soaking in nitric acid and rinsing with pure water. The second pickling is done by soaking in hydrofluoric acid and rinsing with pure water.

[0080] S10: Polished top plate 22, fully annealed, kept at a constant temperature for one hour, treated by an acid pickling machine, and cleaned with pure water;

[0081] S11: Welding the 25-piece welding tube, the inlet pipe 24 and the outlet pipe 26, fully annealing, holding the temperature for one hour, then treating with an acid pickling machine and cleaning with pure water.

[0082] S12: Weld the first flange 241 at the inlet pipe 24 and outlet pipe 26, anneal fully, keep at a constant temperature for one hour, treat with an acid pickling machine, and clean with pure water.

[0083] S13: Fire-blast twice, fully anneal, and keep at a constant temperature for one hour;

[0084] S14: The housing 3 is brought into contact with the lower side of the second flange 27. The telescopic rod of the cylinder 435 extends and pushes the push rod 434 to move closer to the snap-fit ​​rod 41. The push rod 434 drives the push block 433 to drive the first hinge rod 431 and the second hinge rod 432 to move closer to the snap-fit ​​rod 41. The second hinge rod 432 rotates and drives the snap-fit ​​rod 41 to slide away from the first hinge rod 431 until the ends of the snap-fit ​​rods 41 are close to each other and are pressed against the side wall of the pipe body 2. The housing 3 and the pipe body 2 are fixed, and the installation is completed.

[0085] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A vertical quartz furnace tube, characterized in that: The system includes a tube body (2), one end of which is sealed and fixedly connected to a coupling tube (25) communicating with the tube body (2). A vacuum pump is installed at the end of the tube body (2) away from the coupling tube (25). A third flange is installed at the end of the vacuum pump near the tube body (2). The tube body (2) and the coupling tube (2) are detachably connected through the third flange. A moving mechanism for mounting a crystal boat (1) is provided at the end of the tube body (2) near the vacuum pump. The moving mechanism includes a housing (3) located at the end of the tube body (2) and extending away from the tube body (2). The end of the housing (3) near the tube body (2) abuts against the side wall of the tube body (2). The outer side of the housing (3) is provided with... There is a fixing assembly (4) connecting the tube body (2). The end of the housing (3) away from the tube body (2) is provided with a mounting assembly (5) for driving the crystal boat (1) to move closer to the inside of the tube body (2). The mounting assembly (5) includes slide rails (51) arranged on both sides of the housing (3) and arranged opposite to each other. Each side of the two slide rails (51) is provided with a tray (52) perpendicular to the length direction of the slide rail (51). The crystal boat (1) is placed on the tray (52). Each side of the tray (52) is fixedly connected with a sliding block (53) inserted into the slide rail (51) and slidably connected to the slide rail (51). The housing (3) is provided with a drive for the sliding block (53). A drive unit (54) moves closer to the interior of the tube body (2). The ends of the sliding blocks (53) that are far apart from each other pass through the slide rail (51) and are slidably connected to the slide rail (51). The drive unit (54) includes a movable pulley (541) rotatably connected to the end of the sliding block (53) that passes through the slide rail (51). Fixed pulleys (542) are rotatably connected to both sides of the outer wall of the housing (3) near the end of the tube body (2). A steel rope (543) corresponding to the fixed pulley (542) is provided on the outer side of the housing (3). The steel rope (543) passes around the fixed pulley (542) and through the corresponding movable pulley (541) and is fixedly connected to the movable pulley (541). A winch is installed on the end of the steel rope (543) near the fixed pulley (542). The end of the housing (3) near the tube (2) is provided with a pusher (56) to push the crystal boat (1) into the tube (2). The fixing assembly (4) includes a fixing frame (42) fixedly connected to the end of the housing (3) near the tube (2). The two ends of the fixing frame (42) are respectively located on both sides of the tube (2) and facing the tube (2). The two ends of the fixing frame (42) are slidably connected with a snap-fit ​​rod (41) facing the tube (2). The fixing frame (42) is provided with a moving part (43) that drives the snap-fit ​​rod (41) to move in a direction that brings them closer together and presses the tube (2) against each other.The movable component (43) includes a first hinge rod (431) hinged to the opposite side of the fixed frame (42). The ends of the first hinge rods (431) away from the hinge end are inclined towards each other and hinged with a second hinge rod (432). The other ends of the second hinge rods (432) are hinged to the side wall of the snap-fit ​​rod (41) near the tube body (2). The connection points of the first hinge rods (431) and the second hinge rods (432) are hinged with the same push rod (434). A cylinder (435) is installed on the side of the fixed frame (42) away from the push rod (434). The telescopic rod of the cylinder (435) passes through the fixed frame (42) and is fixedly connected to the push rod (434). The pusher (56) includes a gear (562) corresponding to and fixedly connected to the fixed pulley (542). Racks (561) adapted to the gears (562) are fixedly connected to both sides of the tray (52). An abutment rod (563) is fixedly connected to one end of each sliding block (53) near the rack (561). The rack (561) is inserted into the abutment rod (563) and slidably connected to it.

2. A vertical quartz furnace tube according to claim 1, characterized in that: The tube (2) is provided with a fixing member (57) for fixing the crystal boat (1) at one end near the shell (3). The fixing member (57) includes a fixing ring (571) perpendicular to the length direction of the tube (2). The fixing ring (571) is made of elastic material. The inner diameter of the fixing ring (571) is equal to the diameter of the crystal boat (1). The fixing ring (571) is provided with a connector (58) that connects to the side wall of the tube (2).

3. A vertical quartz furnace tube according to claim 1, characterized in that: A quartz ring (21) is fixedly connected to one sealed end of the tube (2). The coupler (25) is fixed and connected to the quartz ring (21). A top plate (22) is fixedly connected to one end of the quartz ring (21) away from the tube (2). A plurality of evenly distributed sieve holes (23) are opened in the area of ​​the sealed end of the tube (2) opposite to the top plate (22).

4. A processing method for a vertical quartz furnace tube as described in any one of claims 1-3, characterized in that, Includes the following steps: S1: Pretreatment, using nitric acid to soak the tube body (2), top plate (22), quartz ring (21) and coupling tube (25), and then cleaning with pure water; S2: Draw lines and laser drill holes in the tube (2) after the treatment in step S1, soak it in nitric acid, and clean it with pure water. S3: Determine the overall length of the tube (2) after S2 treatment, anneal it, pickle it, and clean it with pure water; S4: Polish and anneal the top plate (22), quartz ring (21), coupler tube (25) after S1 treatment and the tube body (2) after S3 treatment, then process them with an acid pickling machine, soak them in nitric acid, and clean them with pure water. S5: Perform assembly welding, weld the top plate (22) after S4 treatment to the quartz ring (21) and anneal fully, keep at a constant temperature for one hour, cool with the furnace, and clean with pure water. S6: Weld the quartz ring (21) after S4 treatment to the main body (2), the filler material should be full, after welding, perform full annealing, keep the temperature constant for 2 hours, turn the weld joint of the top plate (22), grind finely, and pickle twice. The first pickling is done by soaking in nitric acid and cleaning with pure water, and the second pickling is done by soaking in hydrofluoric acid and cleaning with pure water. S7: Polish the top plate (22), fully anneal, keep at a constant temperature for one hour, process with an acid pickling machine, and clean with pure water; S8: Welded galvanic tube (25), fully annealed, kept at a constant temperature for one hour, treated by an acid pickling machine, and cleaned with pure water; S9: Polish twice, anneal thoroughly, and keep at a constant temperature for one hour; S10: The upper end of the moving mechanism is abutted against the tube (2) after the processing in S9, and is detachably connected to the tube (2).

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