A column mechanism capable of lifting and rotating in sections and a vertical film forming device

Abstract

The present invention discloses a column mechanism and a vertical film forming device that can be lifted and rotated in sections, and relates to the field of semiconductor preparation technology. The reaction chamber lifting column includes a first driving structure and a central axis structure. The first driving structure drives the central axis structure to move axially along the central axis structure. The air inlet chamber lifting column includes a second driving structure, a rotating shaft and an outer cylinder of the rotating shaft. The rotating shaft is connected to the air inlet chamber body. The second driving structure drives the rotating shaft to move axially along the rotating shaft. The lower end of the rotating shaft extends from the upper end of the central axis structure into the central axis structure. The rotating shaft and the central axis structure can move relative to each other along the axial direction of the central axis structure. The outer cylinder of the rotating shaft is sleeved on the outside of the rotating shaft and is rotatably connected to the rotating shaft. The outer cylinder of the rotating shaft is connected to the reaction chamber body. The present invention can realize the separate lifting of the air inlet chamber body and the joint lifting of the air inlet chamber body and the reaction chamber body, which is convenient for the installation of equipment components and the cleaning of the interior of the chamber after continuous film formation, shortens the cleaning and maintenance time, and improves production efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor preparation, and in particular to a column mechanism capable of being lifted and rotated in sections and a vertical film-forming device. Background Art

[0002] In order to meet the needs of semiconductor wafer preparation, a large number of components need to be installed in the reaction chamber of the vertical film-forming device. In the film-forming process, the reaction gas reacts inside the device to form deposits, which adhere to the inner wall and hinder the normal progress of the subsequent film-forming process. The interior of the reaction chamber needs to be maintained and cleaned regularly to remove the deposits.

[0003] The existing vertical film-forming device is not provided with a lifting structure, which is time-consuming and labor-intensive when installing internal components and cleaning. Summary of the invention

[0004] The object of the present invention is to provide a column mechanism and a vertical film-forming device which can be lifted and rotated in sections, which can realize the separate lifting of the air inlet chamber body and the joint lifting of the air inlet chamber body and the reaction chamber body, facilitate the installation of equipment components and the cleaning of the interior of the chamber after continuous film forming, shorten the time required for cleaning and maintenance, and improve production efficiency.

[0005] To achieve the above object, the present invention provides the following solutions:

[0006] The present invention provides a column mechanism that can be lifted and rotated in sections, and the column mechanism that can be lifted and rotated in sections includes an air intake chamber lifting column and a reaction chamber lifting column, the air intake chamber lifting column is used to lift the air intake chamber body, the reaction chamber lifting column is used to lift the air intake chamber body and the reaction chamber body, the reaction chamber lifting column includes a first driving structure and a central axis structure, the first driving structure drives the central axis structure to move axially along the central axis structure, the air intake chamber lifting column includes a second driving structure, a rotating shaft and a rotating shaft outer cylinder, the rotating shaft is connected to the air intake chamber body, the second driving structure drives the rotating shaft to move axially along the rotating shaft, the lower end of the rotating shaft extends from the upper end of the central axis structure into the central axis structure, the rotating shaft and the central axis structure can move relative to each other along the axial direction of the central axis structure, the rotating shaft outer cylinder is sleeved on the outside of the rotating shaft and is rotatably connected to the rotating shaft, and the rotating shaft outer cylinder is connected to the reaction chamber body.

[0007] Preferably, the first driving structure includes a first screw driver, a first screw and a first nut, the power output end of the first screw driver is connected to the lower end of the first screw, the first nut is sleeved on the outside of the first screw and is threadedly connected to the first screw, and the first nut is connected to the lower end of the central axis structure.

[0008] Preferably, a central axis outer cylinder is provided on the outer side of the central axis structure, and the central axis structure and the central axis outer cylinder can move relative to each other along the axial direction of the central axis outer cylinder, the central axis outer cylinder is connected to the substrate below the reaction chamber body, and the side wall of the central axis outer cylinder is provided with a hollow area along the axial direction of the central axis outer cylinder, and two lower detection switches are provided on the central axis outer cylinder, and each of the lower detection switches is electrically connected to the monitoring feedback unit, one of the lower detection switches is located below the other lower detection switch, and the two lower detection switches are used to detect the lifting height of the reaction chamber body.

[0009] Preferably, the outer cylinder of the rotating shaft is connected to the reaction chamber body through at least one first connecting structure, and two first rotation detection switches are arranged on the central axis structure, and each of the first rotation detection switches is electrically connected to the monitoring feedback unit. The two first rotation detection switches are used to detect the rotation angle of the reaction chamber body. When the reaction chamber body is not rotating, one of the first rotation detection switches corresponds to the position of the first connecting structure.

[0010] Preferably, the second driving structure includes a second screw driver, a second screw and a second nut, the power output end of the second screw driver is connected to one end of the second screw, the second nut is sleeved on the outside of the second screw and is threadedly connected to the second screw, and the second nut is used to connect to the rotating shaft.

[0011] Preferably, the rotating shaft is connected to the air inlet chamber body through a second connecting structure, the second connecting structure includes a top connecting block, a connecting plate, a guide shaft and a limit block, the top connecting block is connected to the rotating shaft, the top connecting block is sleeved on the outside of the guide shaft and is slidably connected to the guide shaft, the connecting plate is respectively connected to the guide shaft and the air inlet chamber body, the limit block is respectively connected to the guide shaft and the connecting plate, the top connecting block is located between the connecting plate and the limit block, and when the air inlet chamber body is not lifted, there is a gap between the top connecting block and the connecting plate.

[0012] Preferably, it also includes a top plate, the second driving structure is connected to the top plate, the outer sleeve of the rotating shaft is provided with a sleeve, the top plate is connected to the sleeve, the sleeve is rotatably connected to the outer cylinder of the rotating shaft through a first bearing, a cover plate for shielding the first bearing is provided on the outer cylinder of the rotating shaft, the central axis structure is rotatably connected to the outer cylinder of the rotating shaft through a second bearing, and the sleeve is connected to the central axis structure through a pressure ring.

[0013] Preferably, two upper detection switches are provided on the top plate, each of the upper detection switches is electrically connected to the monitoring feedback unit, one of the upper detection switches is located below the other upper detection switch, and the two upper detection switches are used to detect the lifting height of the air intake chamber body.

[0014] Preferably, two second rotation detection switches are provided on the outer cylinder of the rotating shaft, each of the second rotation detection switches is electrically connected to the monitoring feedback unit, and the two second rotation detection switches are used to detect the rotation angle of the air intake chamber body. When the air intake chamber body is not rotating, one of the second rotation detection switches corresponds to the position of the second connecting structure.

[0015] The present invention also provides a vertical film-forming device, including a vertical film-forming reaction structure and a column mechanism that can be lifted and rotated in sections, wherein the vertical film-forming reaction structure includes an air inlet chamber body and a reaction chamber body, wherein the air inlet chamber body includes an air inlet chamber shell, wherein the reaction chamber body includes an upper shell, a middle shell, a lower shell and a bottom plate arranged from top to bottom, wherein the air inlet chamber shell, the upper shell, the middle shell, the lower shell and the bottom plate are detachably connected in sequence from top to bottom, and the air inlet chamber shell is An upper cover plate is provided at the upper end, an air inlet is provided on the upper cover plate, an air inlet chamber is formed inside the air inlet chamber shell, an upper cavity is formed inside the upper shell, a middle cavity is formed inside the middle shell, and a lower cavity is formed inside the lower shell, the upper cavity, the middle cavity and the lower cavity are connected in sequence to form a reaction chamber, a base is provided in the lower cavity, an exhaust port is provided on the bottom plate, and the air inlet, the air inlet chamber, the reaction chamber and the exhaust port are connected in sequence.

[0016] Compared with the prior art, the present invention has achieved the following technical effects:

[0017] The present invention can realize the independent lifting of the air inlet chamber body and the joint lifting of the air inlet chamber body and the reaction chamber body, which is convenient for the installation of equipment components and the cleaning of the interior of the chamber after continuous film formation, shortens the time required for cleaning and maintenance, and improves production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a schematic structural diagram of the vertical film-forming device of the present invention in a normal state;

[0020] Figure 2 It is a structural schematic diagram of the column mechanism capable of lifting and rotating in sections of the present invention when lifting the air inlet chamber body and the reaction chamber body;

[0021] Figure 3 It is a structural schematic diagram of the column mechanism capable of lifting and rotating in sections of the present invention when lifting the air inlet chamber body;

[0022] Figure 4 It is an internal cross-sectional view of the column mechanism capable of segmented lifting and rotation of the present invention;

[0023] Figure 5 Figure 4 A local enlarged view of point A;

[0024] Figure 6 Figure 4 A partial enlarged view of point B;

[0025] Figure 7 It is an external schematic diagram of the column mechanism capable of segmented lifting and rotation of the present invention;

[0026] Among them: 1-intake chamber, 2-reaction chamber, 3-upper flange cover, 4-upper cavity, 5-middle cavity, 6-base, 7-lower cavity, 8-bottom plate flange, 9-base plate, 10-support frame, 11-connecting plate, 12-guide shaft, 13-crank handwheel, 14-upper detection switch, 15-rotating shaft, 16-cavity lifting block, 17-linear guide shaft, 18-cavity connecting block, 19-rotating shaft outer cylinder, 20-monitoring feedback unit, 21-support rod, 22-fixed flange, 23-lower detection switch, 24-first lead screw, 25 -Center axis structure, 26-first nut, 27-first screw driver, 28-second screw, 29-top connecting block, 30-top plate, 31-sleeve, 32-first bearing, 33-pressure ring, 34-cover plate, 35-limiting block, 36-center axis outer cylinder, 37-knob latch, 38-first rotation detection switch, 39-handwheel, 40-linear bearing, 41-first connecting cylinder, 42-second connecting cylinder, 43-third connecting cylinder, 44-upper center axis, 45-lower center axis, 46-limiting part, 47-second rotation detection switch. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] The purpose of the present invention is to provide a column mechanism that can be lifted and rotated in sections, which can realize the separate lifting of the air inlet chamber body and the joint lifting of the air inlet chamber body and the reaction chamber body, facilitate the installation of equipment components and the cleaning of the interior of the chamber after continuous film formation, shorten the time required for cleaning and maintenance, and improve production efficiency.

[0029] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] Embodiment 1

[0031] like Figures 1 to 7 As shown: This embodiment provides a column mechanism that can be lifted and rotated in sections, including an air inlet chamber lifting column and a reaction chamber lifting column. The air inlet chamber lifting column is used to lift the air inlet chamber body, and the reaction chamber lifting column is used to lift the air inlet chamber body and the reaction chamber body together. The reaction chamber lifting column includes a first driving structure and a central axis structure 25. The first driving structure drives the central axis structure 25 to move axially along the central axis structure 25. The air inlet chamber lifting column includes a second driving structure, a rotating shaft 15 and a rotating shaft outer cylinder 19. The rotating shaft 15 is connected to the air inlet chamber body. The second driving structure drives the rotating shaft 15 to move axially along the rotating shaft 15. The lower end of the rotating shaft 15 extends from the upper end of the central axis structure 25 into the central axis structure 25. The rotating shaft 15 and the central axis structure 25 can move relative to each other along the axial direction of the central axis structure 25. The rotating shaft outer cylinder 19 is sleeved on the outside of the rotating shaft 15 and is rotatably connected to the rotating shaft 15. The rotating shaft outer cylinder 19 is connected to the reaction chamber body.

[0032] Specifically, in this embodiment, the first driving structure includes a first screw driver 27, a first screw 24 and a first nut 26. The first screw driver 27 includes a first bevel gear. The power output end of the handwheel 39 is provided with a second bevel gear. The first bevel gear and the second bevel gear are meshed. The power output end of the first screw driver 27 is connected to the lower end of the first screw 24. The first nut 26 is sleeved on the outer side of the first screw 24 and is threadedly connected to the first screw 24. The first nut 26 is connected to the lower end of the central axis structure 25. By rotating the handwheel 39, the first nut 26 and the central axis structure 25 can move along the axial direction of the central axis structure 25, thereby realizing the common lifting and lowering of the reaction chamber body and the air inlet chamber body.

[0033] In this embodiment, a central axis outer cylinder 36 is provided on the outer side of the central axis structure 25, and the central axis outer cylinder 36 includes a first connecting cylinder 41, a second connecting cylinder 42 and a third connecting cylinder 43 arranged from top to bottom, and the adjacent connecting surfaces of the first connecting cylinder 41, the second connecting cylinder 42 and the third connecting cylinder 43 are respectively connected by flanges. The central axis structure 25 includes an upper central axis 44 and a lower central axis 45 connected to each other, and the upper central axis 44 and the rotating shaft 15 realize axial relative movement along the rotating shaft 15 through a linear bearing 40. A limiting portion 46 is provided at the top end of the lower central axis 45 for limiting the lowest position of the central axis structure 25 when not lifted. The lower central axis 45 and the first connecting cylinder 41 realize axial relative movement along the central axis outer cylinder 36 through a linear bearing 40. The fixing flange 22 of the second connecting cylinder 42 is connected to the substrate 9 below the reaction chamber body, and the side wall of the third connecting cylinder 43 is opened along the axial direction of the third connecting cylinder 43. A hollow area is provided, and the upper central axis 44 and the lower central axis 45 are respectively connected to the support rod 21 through connecting blocks to ensure that the central axis structure 25 remains in a vertical state during the lifting process. The connecting block of the lower central axis 45 passes through the hollow area of ​​the third connecting tube 43. Two lower detection switches 23 are provided on the outer wall of the third connecting tube 43. Each lower detection switch 23 is electrically connected to the monitoring feedback unit 20. One of the lower detection switches 23 is located below the other lower detection switch 23. The two lower detection switches 23 detect the lifting height of the central axis structure 25 through the hollow area of ​​the third connecting tube 43, that is, detect the lifting height when the reaction chamber body and the air inlet chamber body are synchronously lifted, that is, the two lower detection switches 23 correspond to the highest lifting position and the position when not lifted of the reaction chamber body, respectively, and determine whether the position of the synchronous lifting of the reaction chamber body and the air inlet chamber body has reached a predetermined height through the two lower detection switches 23.

[0034] In this embodiment, the rotating shaft outer cylinder 19 is connected to the reaction chamber body through two first connecting structures, the first connecting structure includes a cavity lifting block 16, a linear guide shaft 17 and a cavity connecting block 18, the cavity lifting block 16 is connected to the reaction chamber body corresponding to the middle cavity 5, the cavity connecting block 18 is connected to the rotating shaft outer cylinder 19, and the cavity lifting block 16 and the cavity connecting block 18 are respectively nested and connected with the linear guide shaft 17.

[0035] When the air inlet chamber body and the reaction chamber body are lifted synchronously, the hand wheel 39 is turned, and the first nut 26 drives the central axis structure 25, the air inlet chamber lifting column, the first connecting structure, the second connecting structure, the reaction chamber body and the air inlet chamber body to move upward. At this time, the lower central axis 45 and the first connecting tube 41 move relative to each other along the axial direction of the lower central axis 45 to achieve synchronous lifting of the air inlet chamber body and the reaction chamber body. During this process, the central axis outer tube 36 remains fixed.

[0036] In this embodiment, two first rotation detection switches 38 are provided at the bottom end of the upper center axis 44. The angle between the two first rotation detection switches 38 is 90°. Each first rotation detection switch 38 is electrically connected to the monitoring feedback unit 20. The two first rotation detection switches 38 are used to detect the rotation angle of the reaction chamber body. When the reaction chamber body is not rotated, one of the first rotation detection switches 38 corresponds to the position of the first connecting structure up and down.

[0037] When the reaction chamber body rotates, the shaft outer cylinder 19 drives the first connecting structure and the reaction chamber body to rotate together. When rotating from the position of one first rotation detection switch 38 to the position of another first rotation detection switch 38, the knob pin 37 is inserted into the bottom end of the upper center shaft 44 and the mounting seat of the other first rotation detection switch 38 in sequence to achieve limiting and avoid rotational deviation.

[0038] In this embodiment, the second drive structure includes a second screw 28 driver, a second screw 28 and a second nut. The second screw 28 driver is preferably a crank handwheel 13. The power output end of the second screw 28 driver is connected to the upper end of the second screw 28. The second screw 28 is preferably a trapezoidal screw. The second nut is sleeved on the outside of the second screw 28 and is threadedly connected to the second screw 28.

[0039] In this embodiment, the rotating shaft 15 is connected to the air inlet chamber body through a second connecting structure, and the second connecting structure includes a top connecting block 29, a connecting plate 11, a guide shaft 12 and a limit block 35. The top connecting block 29 is respectively connected to the rotating shaft 15 and the second nut. The top connecting block 29 is sleeved on the outer side of the guide shaft 12 and is slidably connected to the guide shaft 12. The connecting plate 11 is respectively connected to the guide shaft 12 and the upper flange cover 3 of the air inlet chamber body. The limit block 35 is respectively connected to the guide shaft 12 and the connecting plate 11. The top connecting block 29 is located between the connecting plate 11 and the limit block 35. When the air inlet chamber body is not lifted, there is a gap between the top connecting block 29 and the connecting plate 11 as a buffer. The limit block 35 is used to limit the downward movement distance of the top connecting block 29, and at the same time can prevent tilting during lifting.

[0040] This embodiment includes a top plate 30, which is located below the top connecting block 29. The second lead screw 28 of the second driving structure is rotatably connected to the top plate 30. The outer sleeve of the rotating shaft 15 is provided with a shaft sleeve 31. The top plate 30 and the shaft sleeve 31 are connected by bolts. The shaft sleeve 31 is rotatably connected to the rotating shaft outer cylinder 19 through a first bearing 32. A cover plate 34 for shielding the first bearing 32 is provided on the rotating shaft outer cylinder 19 to prevent pollutants such as dust from entering the bearing area and affecting the smooth rotation. The upper center shaft 44 is rotatably connected to the rotating shaft outer cylinder 19 through the second bearing, and the shaft sleeve 31 is connected to the upper center shaft 44 through a pressure ring 33.

[0041] In this embodiment, two upper detection switches 14 are provided on the top plate 30, and each upper detection switch 14 is electrically connected to the monitoring feedback unit 20. One of the upper detection switches 14 is located below the other upper detection switch 14. The two upper detection switches 14 are used to detect the lifting height of the air inlet chamber body, that is, the two upper detection switches 14 correspond to the highest lifting position and the position when not lifted of the air inlet chamber body, respectively. The two upper detection switches 14 are used to determine whether the lifting position of the reaction chamber body has reached the predetermined height.

[0042] When lifting the air intake chamber body alone, turn the crank handwheel 13, and the second nut drives the top connecting block 29 and the rotating shaft 15 to move upward. When the top connecting block 29 contacts the connecting plate 11, continue to turn the crank handwheel 13, and the second nut drives the second connecting structure, the rotating shaft 15 and the air intake chamber body to move upward. At this time, the rotating shaft 15 and the central axis structure 25 move relative to each other along the axial direction of the rotating shaft 15 to realize the lifting of the air intake chamber body. During this process, the top plate 30 remains fixed.

[0043] In this embodiment, two second rotation detection switches 47 are provided on the outer cylinder 19 of the rotating shaft, and the angle between the two second rotation detection switches 47 is 90°. Each second rotation detection switch 47 is electrically connected to the monitoring feedback unit 20. The two second rotation detection switches 47 are used to detect the rotation angle of the air intake chamber body. When the air intake chamber body is not rotated, one of the second rotation detection switches 47 corresponds to the second connecting structure position up and down.

[0044] When the air intake chamber body rotates alone, it pushes the top plate 30, and the top plate 30, the rotating shaft 15, the second connecting structure, and the air intake chamber body rotate together. When rotating from the position of one second rotation detection switch 47 to the position of another second rotation detection switch 47, the knob pin 37 is inserted into the mounting seat of the top plate 30 and the other second rotation detection switch 47 in turn to achieve limiting and avoid rotational deviation.

[0045] The air intake chamber lifting column and the reaction chamber lifting column are set with upper and lower limit reminders. The upper detection switch 14 and the lower detection switch 23 located at the top are used to limit the lifting height. The lower limit corresponding to the upper detection switch 14 and the lower detection switch 23 located at the bottom is the initial state before lifting, and is used to determine whether it is in place when descending and restoring.

[0046] The signals detected by the upper detection switch 14, the lower detection switch 23, the first rotation detection switch 38 and the second rotation detection switch 47 are transmitted to the monitoring feedback unit 20 for regulation, and serve as a warning reminder when the upper limit of lifting and the limit of 90° rotation are reached. The reaction chamber 2 can only carry out process operations when all lifting and rotation actions are restored to their original positions.

[0047] Embodiment 2

[0048] like Figures 1 to 3 As shown, the vertical film-forming device of this embodiment includes a vertical film-forming reaction structure and a column mechanism that can be lifted and rotated in sections of the first embodiment. The vertical film-forming reaction structure includes an air inlet chamber body and a reaction chamber body. The air inlet chamber body includes an air inlet chamber shell. The reaction chamber body includes an upper shell, a middle shell, a lower shell and a bottom plate arranged from top to bottom. The air inlet chamber shell, the upper shell, the middle shell, the lower shell and the bottom plate are detachably connected in sequence from top to bottom. An upper cover plate is provided at the upper end of the air inlet chamber shell, and an air inlet is opened on the upper cover plate. An air inlet chamber 1 is formed inside the air inlet chamber shell, an upper cavity 4 is formed inside the upper shell, a middle cavity 5 is formed inside the middle shell, and a lower cavity 7 is formed inside the lower shell. The upper cavity 4, the middle cavity 5 and the lower cavity 7 are connected in sequence to form a reaction chamber 2. An exhaust port is provided on the bottom plate, and the air inlet, the air inlet chamber 1, the reaction chamber 2 and the exhaust port are connected in sequence.

[0049] The cross-sectional area difference between the air inlet chamber 1 and the upper cavity 4 is large, and the upper flange cover 3 is installed between the air inlet chamber 1 and the upper cavity 4 for transition. The flange surfaces of the upper cavity 4, the middle cavity 5 and the lower cavity 7 are tightly attached and bolted in sequence. A bottom plate flange 8 is installed at the bottom of the lower cavity 7, and the base 6 is located in the area of ​​the lower cavity 7 and installed on the bottom plate flange 8. The bottom plate flange 8 is fixedly connected to the base plate 9. The support frame 10 below the base plate 9 raises the overall height and reserves sufficient installation space for the column mechanism that can be lifted and rotated in sections.

[0050] The present specification uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A column mechanism capable of lifting and rotating in sections, characterized in that: It comprises an air inlet chamber lifting column and a reaction chamber lifting column, the air inlet chamber lifting column is used to lift the air inlet chamber body, the reaction chamber lifting column is used to lift the air inlet chamber body and the reaction chamber body, the reaction chamber lifting column comprises a first driving structure and a central axis structure, the first driving structure drives the central axis structure to move axially along the central axis structure, the air inlet chamber lifting column comprises a second driving structure, a rotating shaft and a rotating shaft outer cylinder, the rotating shaft is connected to the air inlet chamber body, the second driving structure drives the rotating shaft to move axially along the rotating shaft, the lower end of the rotating shaft extends from the upper end of the central axis structure into the central axis structure, the rotating shaft and the central axis structure can move relative to each other along the axial direction of the central axis structure, the rotating shaft outer cylinder is sleeved on the outer side of the rotating shaft and is rotatably connected to the rotating shaft, and the rotating shaft outer cylinder is connected to the reaction chamber body; A central axis outer cylinder is arranged on the outer side of the central axis structure, and the central axis structure and the central axis outer cylinder can move relative to each other along the axial direction of the central axis outer cylinder, the central axis outer cylinder is connected to the substrate below the reaction chamber body, the side wall of the central axis outer cylinder is provided with a hollow area along the axial direction of the central axis outer cylinder, two lower detection switches are arranged on the central axis outer cylinder, each of the lower detection switches is electrically connected to the monitoring feedback unit, one of the lower detection switches is located below the other lower detection switch, and the two lower detection switches are used to detect the lifting height of the reaction chamber body.

2. The column mechanism capable of segmented lifting and rotation according to claim 1 is characterized in that: The first driving structure includes a first screw driver, a first screw and a first nut. The power output end of the first screw driver is connected to the lower end of the first screw. The first nut is sleeved on the outside of the first screw and is threadedly connected to the first screw. The first nut is connected to the lower end of the central axis structure.

3. The column mechanism capable of segmented lifting and rotation according to claim 1 is characterized in that: The outer cylinder of the rotating shaft is connected to the reaction chamber body through at least one first connecting structure. Two first rotation detection switches are arranged on the central axis structure. Each of the first rotation detection switches is electrically connected to the monitoring feedback unit. The two first rotation detection switches are used to detect the rotation angle of the reaction chamber body. When the reaction chamber body is not rotating, one of the first rotation detection switches corresponds to the position of the first connecting structure.

4. The column mechanism capable of being lifted and rotated in sections according to claim 1 is characterized in that: The second driving structure includes a second screw driver, a second screw and a second nut. The power output end of the second screw driver is connected to one end of the second screw. The second nut is sleeved on the outside of the second screw and is threadedly connected to the second screw. The second nut is used to connect to the rotating shaft.

5. The column mechanism capable of being lifted and rotated in sections according to claim 1 is characterized in that: The rotating shaft is connected to the air inlet chamber body through a second connecting structure, and the second connecting structure includes a top connecting block, a connecting plate, a guide shaft and a limit block. The top connecting block is connected to the rotating shaft, and the top connecting block is sleeved on the outside of the guide shaft and is slidably connected to the guide shaft. The connecting plate is respectively connected to the guide shaft and the air inlet chamber body, and the limit block is respectively connected to the guide shaft and the connecting plate. The top connecting block is located between the connecting plate and the limit block. When the air inlet chamber body is not lifted, there is a gap between the top connecting block and the connecting plate.

6. The column mechanism capable of being lifted and rotated in sections according to claim 1, characterized in that: It also includes a top plate, the second driving structure is connected to the top plate, the outer sleeve of the rotating shaft is provided with a sleeve, the top plate is connected to the sleeve, the sleeve is rotatably connected to the outer cylinder of the rotating shaft through a first bearing, a cover plate for shielding the first bearing is provided on the outer cylinder of the rotating shaft, the central axis structure is rotatably connected to the outer cylinder of the rotating shaft through a second bearing, and the sleeve is connected to the central axis structure through a pressure ring.

7. The column mechanism capable of being lifted and rotated in sections according to claim 6 is characterized in that: Two upper detection switches are arranged on the top plate, each of which is electrically connected to a monitoring feedback unit, wherein one of the upper detection switches is located below the other upper detection switch, and the two upper detection switches are used to detect the lifting height of the air inlet chamber body.

8. The column mechanism capable of being lifted and rotated in sections according to claim 5, characterized in that: Two second rotation detection switches are arranged on the outer cylinder of the rotating shaft, and each of the second rotation detection switches is electrically connected to the monitoring feedback unit. The two second rotation detection switches are used to detect the rotation angle of the air intake chamber body. When the air intake chamber body does not rotate, one of the second rotation detection switches corresponds to the position of the second connecting structure.

9. A vertical film forming device, characterized in that: It comprises a vertical film-forming reaction structure and a column mechanism that can be lifted and rotated in sections as described in any one of claims 1 to 8, wherein the vertical film-forming reaction structure comprises an air inlet chamber body and a reaction chamber body, wherein the air inlet chamber body comprises an air inlet chamber shell, and the reaction chamber body comprises an upper shell, a middle shell, a lower shell and a bottom plate arranged from top to bottom, wherein the air inlet chamber shell, the upper shell, the middle shell, the lower shell and the bottom plate are detachably connected in sequence from top to bottom, an upper cover plate is arranged at the upper end of the air inlet chamber shell, an air inlet port is opened on the upper cover plate, an air inlet chamber is formed inside the air inlet chamber shell, an upper cavity is formed inside the upper shell, a middle cavity is formed inside the middle shell, and a lower cavity is formed inside the lower shell, the upper cavity, the middle cavity and the lower cavity are connected in sequence to form a reaction chamber, a base is arranged in the lower cavity, an exhaust port is arranged on the bottom plate, and the air inlet port, the air inlet chamber, the reaction chamber and the exhaust port are connected in sequence.

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