A heat shield device is disposed between a heat source and a heat-sensitive precision component

Abstract

A heat shield device disposed between a heat source and a heat-sensitive precision component, comprising a base proximate to the heat source, characterized in that the base has a heat shield assembly comprising a plurality of fins at a non-right angle to the plane of the base in the center of the base to block downward heat radiation.

Description

Technical Field

[0001] This invention relates to the field of vacuum heat treatment, and more particularly to a heat shielding device disposed between a heat source and a heat-sensitive precision component. Background Technology

[0002] The base of a bell-type high-temperature vacuum furnace needs to support not only the upper furnace body and the cylindrical heat shield, but also the bottom heat shielding device. The vacuum system of a bell-type high-temperature vacuum furnace (~1600℃) is generally located at the bottom and requires precision mechanical systems such as electric actuated valves and molecular pumps. Even after passing through the bottom heat shielding layer, the radiant heat still reaches very high temperatures (up to 200℃). During normal operation, the valves are open, and the molecular pump blades are exposed to the high temperature. The gap between the rotor and stator blades is very small, and prolonged exposure to high-temperature radiation can easily cause deformation of the aluminum alloy blades. Molecular pumps are precision high-speed rotating machines; damage to them can halt production, lead to lengthy repair times, and the cost of replacing parts, especially imported components. Traditional custom-designed cold trap structures require dedicated interfaces, occupy a large amount of space, and are unsuitable for ultra-high vacuum environments.

[0003] Therefore, it is necessary to install a heat insulation device between the aforementioned heat source (bell-type high-temperature vacuum furnace) and heat-sensitive precision components, such as electric actuators and molecular pumps, in order to protect the heat-sensitive precision components to the greatest extent. Summary of the Invention

[0004] To address the aforementioned technical problems, the following solutions are proposed:

[0005] A heat shielding device disposed between a heat source and a heat-sensitive precision component includes a base near the heat source, wherein the base has a heat shielding assembly at its center containing a plurality of fins not perpendicular to the plane of the base to block downward conduction of heat radiation.

[0006] Preferably, the base has an annular circulating first cooling water channel on its outer periphery.

[0007] Preferably, it also includes a conduit connected to the heat-sensitive precision component.

[0008] Preferably, the heat shield assembly further includes a connecting plate for fixing the fins and a circulating second cooling water channel connected to the connecting plate.

[0009] Preferably, the second cooling water channel is U-shaped and consists of a second inlet and a second outlet.

[0010] Preferably, the base has an annular circulating first cooling water channel on its outer periphery, the first cooling water channel including a first water inlet near the second water inlet and a first water outlet near the second water outlet.

[0011] According to a preferred embodiment of the present invention, a cover plate is provided between the first inlet and the first outlet, the two ends of the cover plate being connected to the pipe walls of the first inlet and the first outlet respectively, and a first baffle plate is provided on the cover plate to separate the inlet and outlet water.

[0012] Finally, a pipe coaxial with the center of the base is provided below the base, and a third cooling water channel is wrapped around the outer periphery of the pipe.

[0013] Preferably, the heat shield assembly further includes an annular shielding device welded to the pipe, which is circular in shape and further forms a vertical optical shield with the finned shield.

[0014] Preferably, the cooling water jacket includes an annular plate, an upper plate and a lower plate disposed on the upper and lower parts of the annular plate, a second baffle plate separating the water inlet and outlet, and a third water inlet and a third water outlet.

[0015] More preferably, the end of the pipe is provided with a sealing flange so that the heat-sensitive precision component can be connected through the sealing flange.

[0016] Repressurization refers to the process where a vacuum chamber was originally at atmospheric pressure, then evacuated and refilled with gas to achieve repressurization. This operation takes place before opening the vacuum chamber door or raising the bell jar.

[0017] This invention integrates multiple related and independent cooling structures, providing complete optical shielding in the vertical direction. The finned structure increases the shielding and heat absorption area, preventing heat leakage radiation from the hot zone from damaging precision components such as vacuum pumps and valves, thus ensuring the long-term reliable operation of the vacuum furnace. Simultaneously, the finned water-cooled tube ends and standard pipe fittings are cleverly integrated, serving to seal the vacuum, the water, and the water-cooled connection.

[0018] The base structure, while meeting strength requirements, is designed with cooling channels to maximize flow and protect the furnace body's sealing rings from high-temperature damage. All interfaces on the extraction pipe are welded through water jackets, further absorbing radiant heat and contributing to accurate measurement and extended component lifespan. All materials are made of high-quality stainless steel, free from impurities, and suitable for ultra-high vacuum environments.

[0019] The positioning structure, used for circumferential positioning of the bottom thermal shield, prevents the furnace body from falling due to eccentricity and from interfering with thermal expansion, enabling rapid and accurate positioning and saving installation and adjustment time. The irregularly shaped cooling pipe circuit has six right-angle bends using a special process to prevent dead bends and ensure a large flow of cooling water. The cooling joints are centrally arranged for easy assembly and maintenance, resulting in an aesthetically pleasing overall appearance.

[0020] This invention effectively shields and absorbs radiant and conductive heat from the furnace body while providing reliable support. After being used in multiple devices, it can meet the requirements for high-temperature furnaces ranging from 1000℃ to 1600℃. Attached Figure Description

[0021] Figure 1 This is a three-dimensional view of the heat shield of the present invention.

[0022] Figure 2 This is a front view of the heat shielding device of the present invention;

[0023] Figure 3 This is a right view of the heat shielding device of the present invention;

[0024] Figure 4 Top view of the heat shielding device of the present invention;

[0025] Figure 5 A perspective view of the fins and second cooling channel of the present invention is shown, in which it can be seen that the water pipe in the channel has 6 right-angle bends;

[0026] Figure 6 A partial view shows the arrangement of the first, second, and third cooling channels at the inlet and outlet.

[0027] The relationship between the reference numerals and terms in the attached figures is as follows:

[0028] 1. Base

[0029] 2 First water-blocking plate

[0030] 3. Cover plate

[0031] 4 major pipelines

[0032] 5 First flange

[0033] 6. First and second cooling water connectors

[0034] 7. Circular plate

[0035] 8. Upper and lower boards

[0036] 9 pipelines

[0037] 10 small pipes

[0038] 11 Third Cooling Water Connector

[0039] 12 Second Flange

[0040] 13 Third Flange

[0041] 14 Second water-blocking plate

[0042] 15. Ring-shaped shielding device

[0043] 16 Finned Trap

[0044] 17. Heat shielding device

[0045] 18 Shielding components

[0046] 19 Valves

[0047] 20 molecular pumps

[0048] 21. Pressure-reducing valve

[0049] 22 Pre-extraction valve

[0050] 23 Vacuum gauge

[0051] 61 First Inlet

[0052] 62 First outlet

[0053] 1731 Second Inlet

[0054] 1732 Second outlet

[0055] 111 Third Inlet

[0056] 112 Third outlet

[0057] 171 Fins

[0058] 172 Connecting plate

[0059] 173 Second Cooling Channel Detailed Implementation

[0060] like Figure 1 As shown, the heat shielding device 100 of the present invention is disposed below a bell-shaped high-temperature vacuum furnace (not shown in the figure). The term "below" is merely for illustrative purposes and to illustrate the positional relationship in the accompanying drawings. The heat shielding device 100 is located above heat-sensitive components, such as electro-pneumatic valves and molecular pumps, in precision mechanical systems. The term "upper" is merely for illustrative purposes and to illustrate the positional relationship in the accompanying drawings. Heat is mainly concentrated in the upper part and tends to transfer from the upper part to the lower part. Figure 3 The diagram shows heat-sensitive components, including a molecular pump 20, a conventional valve 19, a repressurization valve 21 and a pre-evacuation valve 22, and a vacuum gauge 23.

[0061] like Figure 1 As shown, a heat shielding device 100 disposed between a heat source and a heat-sensitive precision component includes a base 1 near the heat source, and the base has a heat shielding assembly 17 in its center containing a plurality of fins 731 that are not perpendicular to the plane of the base in order to block heat radiation from being conducted downward. Figure 2 The finned trap 16 formed is shown in the figure.

[0062] like Figure 2 As shown, the base 1 has an annular circulating first cooling water channel on its outer periphery.

[0063] like Figure 2 and 6 As shown, a large pipe 4 is provided, connected to the heat-sensitive precision component. The heat shielding assembly 17 also includes a connecting plate 172 for fixing the fins and a circulating second cooling water channel 173 connected to the connecting plate. The second cooling water channel 173 is U-shaped, composed of water pipes, and includes a second inlet 1731 and a second outlet 1732. Figure 5 The diagram details the U-shaped pipe system, where the ends of the water pipes forming the second inlet 1731 and the second outlet 1732 are free ends. The second cooling water channel is symmetrical about the midline parallel to the two branches of the U-shape, and has three bends symmetrically arranged near the free ends.

[0064] Not shown in the figure, the base 1 has an annular circulating first cooling water channel 6 on its lower side and outer periphery. This first cooling water channel 6 includes a first inlet 61 near the second inlet 1731 and a first outlet 62 near the second outlet 1732. Figure 1 As shown, the base 1 has a circular channel in the center, and the heat shielding component 17 just blocks the circular channel.

[0065] like Figure 2 and Figure 6 As shown, a cover plate 3 is provided between the first inlet 61 and the first outlet 62. The two ends of the cover plate 3 are respectively connected to the pipe walls of the first inlet 61 and the first outlet 62. A first baffle plate 2 is provided on the cover plate 3 to separate the inlet and outlet water. This allows fresh cold water to enter and hot water carrying away heat to be discharged, forming a closed-loop circulation pipeline.

[0066] like Figure 1-4 As shown, a large pipe 4 coaxial with the center of the base 1 is provided below the base 1, and a cooling water jacket is wrapped around the outer periphery of the large pipe 4. The cooling water jacket includes an annular plate 7, an upper plate and a lower plate 8 provided on the upper and lower parts of the annular plate 7, a second water baffle 14 separating the water inlet and outlet, and a connector 11, the connector including a third water inlet and a third water outlet.

[0067] The pipe end is provided with a first flange 5, which is a sealing flange, so that the heat-sensitive precision component can be connected through the sealing flange 5.

[0068] like Figure 1-4 As shown, the interface of the pressure relief valve 21 is welded together from the small pipe 10 and the third flange 13. The interface of the pre-extraction valve 22 and the vacuum gauge 23 is welded together from the middle pipe 9 and the second flange 12. The metal sealing flange 5 is welded to the large pipe 4. The valve 19 and the molecular pump 20 are installed through the first flange 5.

[0069] The function of the molecular pump 20 is to evacuate the vacuum chamber and reach the working pressure; the function of the pressure relief valve 21 is to introduce pressure relief gas into the vacuum chamber; the function of the pre-evacuation valve 22 is to connect the pre-evacuation vacuum pump and perform rough evacuation of the vacuum chamber; the function of the vacuum gauge 23 is to measure the pressure of the vacuum chamber in real time and provide feedback.

[0070] During normal operation, the bottom shielding assembly 18 is installed via the positioning structure of the base 1, serving as the first layer of shielding for the thermal field. The base 1 also acts as a support assembly for mounting other upper components. By sequentially opening the valves of the first, second, and third water inlets, cooling water flows out from the first, second, and third water outlets, respectively, thus cooling the aforementioned components. Radiant heat from the upper furnace is partially reflected by the fins in the heat shielding assembly 17, and partially absorbed by the base 1 and the fins in the heat shielding assembly 17. Most of the absorbed heat is carried away through the first and second cooling water channels. A small portion of the absorbed heat is conducted downwards through the large pipe 4 and carried away through the third cooling water channel.

[0071] The technical solutions of the present invention have been described above by way of example only. Without exceeding the protection scope of the claims of the present invention, all improved or combined technical solutions are within the protection scope of this patent.

Claims

1. A heat shielding device disposed between a heat source and a heat-sensitive precision component, comprising a base near the heat source, characterized in that, The base has a heat shield assembly at its center containing multiple fins that are not perpendicular to the plane of the base to block downward conduction of heat radiation. The fins in the heat shield assembly reflect some of the radiant heat and absorb some of the radiant heat. The base has an annular circulating first cooling water channel on its outer periphery and also includes a pipe connected to the heat-sensitive precision component. The heat shield assembly also includes a connecting plate that fixes the fins and a circulating second cooling water channel connected to the connecting plate.

2. The heat shielding device disposed between a heat source and a heat-sensitive precision component according to claim 1, characterized in that, The second cooling water channel is U-shaped and consists of a second inlet and a second outlet.

3. The heat shielding device disposed between a heat source and a heat-sensitive precision component according to claim 2, characterized in that, The base has an annular circulating first cooling water channel on its outer periphery, the first cooling water channel including a first water inlet near the second water inlet and a first water outlet near the second water outlet.

4. The heat shielding device disposed between a heat source and a heat-sensitive precision component according to claim 3, characterized in that, A cover plate is provided between the first inlet and the first outlet. The two ends of the cover plate are respectively connected to the pipe walls of the first inlet and the first outlet. A first baffle plate is provided on the cover plate to separate the inlet and outlet water.

5. The heat shielding device disposed between a heat source and a heat-sensitive precision component according to claim 4, characterized in that, A pipe coaxial with the center of the base is provided below the base, and a cooling water jacket is wrapped around the outer periphery of the pipe.

6. The heat shielding device disposed between a heat source and a heat-sensitive precision component according to claim 5, characterized in that, The cooling water jacket includes an annular plate, an upper plate and a lower plate disposed on the upper and lower parts of the annular plate, a second baffle plate that separates the water inlet and outlet, and a third water inlet and a third water outlet.

7. The heat shielding device disposed between a heat source and a heat-sensitive precision component according to claim 6, characterized in that, The pipe end is provided with a sealing flange so that the heat-sensitive precision component can be connected through the sealing flange.

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