Portable in-situ stretching device for scanning electron microscopes

Abstract

This invention provides a portable in-situ stretching device for scanning electron microscopy, comprising: a fixed base; a loading assembly disposed on the fixed base; a sliding base located on one side of the loading assembly, the sliding base being movably disposed on the fixed base, the distance between the sliding base and the loading assembly being adjustable; and a stretching assembly detachably disposed on the sliding base, the stretching assembly including an adjusting part and two clamping parts, the two clamping parts being spaced apart along the length direction of the adjusting part, the two clamping parts being used to clamp the two ends of the sample to be tested, the adjusting part being drivenly connected to the two clamping parts to adjust the distance between the two clamping parts; the adjusting part having a first connecting end and a second connecting end disposed opposite to each other, the first connecting end being inserted into the end of the sliding base away from the loading assembly, and the second connecting end being detachably connected to the loading assembly.

Description

Technical Field

[0001] This invention relates to the field of material microstructure characterization technology, and more specifically, to a portable in-situ stretching device for scanning electron microscopy. Background Technology

[0002] Scanning electron microscopy (SEM) is a powerful tool for studying the microscopic realm of materials. Its principle involves using a nano-electron beam to scan a sample. Electrons interact with the material, exciting escape electrons carrying various information. These electrons are collected and analyzed by a detector to obtain relevant information about the material. An SEM typically consists of a transfer chamber and a sample chamber, usually separated by a partition. During the experiment, the transfer chamber door is first opened, and the sample is placed inside. After evacuating the transfer chamber, the partition is opened, and the sample is placed into the sample chamber. This setup significantly reduces the evacuation time required for the SEM.

[0003] In-situ tensile testing devices can apply loads or provide a certain strain to materials, and then scan the material with an electron beam using a scanning electron microscope. Various detectors are used to study how the material's microstructure changes with load or strain. This type of in-situ testing is of significant practical importance for exploring the plastic deformation and microstructure of materials. In-situ tensile testing devices typically include a loading assembly and a sample stretching assembly. The sample stretching assembly can clamp and stretch the sample to be tested, and the loading assembly is driven to stretch the sample.

[0004] In existing technologies, the loading and sample stretching components are typically integrated into a single structure. This design results in a large overall volume. During experiments, it is usually necessary to open the sample chamber flange and place the in-situ stretching component onto the sample stage through the flange. Since the sample chamber space is much larger than the transfer chamber space, opening the sample chamber flange significantly disrupts the vacuum state within the sample chamber, necessitating evacuation. This leads to prolonged evacuation time, reduces the efficiency of in-situ stretching tests, and the frequent opening and closing of the sample chamber severely impacts the lifespan of the scanning electron microscope, especially the electron gun. Summary of the Invention

[0005] This invention provides a portable in-situ stretching device for scanning electron microscopes, which solves the problems of large size of existing integrated in-situ stretching devices, low experimental efficiency and reduced lifespan of scanning electron microscopes caused by placing the integrated in-situ stretching device into the sample chamber through the sample chamber flange.

[0006] The present invention provides a portable in-situ stretching device for a scanning electron microscope, which includes: a fixed seat; a loading assembly, which is arranged on the fixed seat; a sliding seat, which is located on one side of the loading assembly, the sliding seat is movably arranged on the fixed seat, and the distance between the sliding seat and the loading assembly is adjustable; a stretching assembly, which is detachably arranged on the sliding seat, the stretching assembly includes an adjustment part and two clamping parts, the two clamping parts are arranged on the adjustment part at intervals along the length direction of the adjustment part, the two clamping parts are used to clamp the two end parts of a sample to be tested, the adjustment part is drivingly connected to the two clamping parts to adjust the distance between the two clamping parts; the adjustment part has a first connecting end and a second connecting end which are arranged opposite to each other, the first connecting end is plugged into and matched with an end of the sliding seat away from the loading assembly, and the second connecting end is detachably connected to the loading assembly.

[0007] Furthermore, the adjusting part can rotate relative to the sliding seat; the adjusting part includes a first threaded segment and a second threaded segment arranged sequentially along the length direction, the rotation direction of the first threaded segment and the rotation direction of the second threaded segment are opposite, the two clamping parts are threadedly connected to the first threaded segment and the second threaded segment respectively, and the loading component drives the adjusting part to rotate.

[0008] Furthermore, the loading component has an output shaft, which is detachably connected to and driven by the adjustment unit; the portable in-situ tensioning device further includes: a first axial limiting structure disposed between the first connecting end and the sliding seat, the first axial limiting structure being used to limit the movement of the adjustment unit relative to the sliding seat in a direction away from the loading component; a second axial limiting structure disposed between the second connecting end and the output shaft, the second axial limiting structure being used to limit the movement of the adjustment unit relative to the sliding seat in a direction closer to the loading component; the first axial limiting structure and the second axial limiting structure cooperate to limit the position of the adjustment unit relative to the sliding seat in the axial direction.

[0009] Furthermore, the sliding seat includes a stop portion and a bearing portion arranged sequentially along the length direction of the adjusting portion. The stop portion is located away from the loading component, and the bearing portion is used to place the tensioning component. The height of the stop portion is higher than that of the bearing portion. A first limiting hole is provided on the side of the stop portion near the bearing portion. The first limiting hole cooperates with the first connecting end stop, and the first connecting end can rotate relative to the first limiting hole. The first limiting hole forms a first axial limiting structure.

[0010] Furthermore, the portable in-situ stretching device also includes: a buffer part disposed in the first limiting hole, one end of the buffer part abutting and cooperating with the first limiting hole, and the other end of the buffer part abutting and cooperating with the first connecting end of the adjusting part, so as to buffer the adjusting part in the length direction of the adjusting part.

[0011] Furthermore, the portable in-situ tensioning device also includes: an anti-rotation structure disposed between the second connecting end and the output shaft. The anti-rotation structure is used to limit the relative position between the second connecting end and the output shaft in the circumferential direction so that the second connecting end and the output shaft rotate synchronously.

[0012] Furthermore, a second limiting hole is provided at one end of the output shaft near the sliding seat, and the second connecting end extends into the second limiting hole and engages with the second limiting hole for limiting, thus forming a second axial limiting structure.

[0013] Furthermore, the second limiting hole has a first sectional structure on its circumferential surface, and the second connecting end has a second sectional structure on its circumferential surface. The first sectional structure and the second sectional structure are in anti-rotation fit to prevent the second connecting end from rotating relative to the output shaft. The first sectional structure and the second sectional structure cooperate to form an anti-rotation structure.

[0014] Furthermore, the portable in-situ stretching device also includes: an operating handle, the axis of which is in the same direction as the sliding direction of the sliding seat, one end of which is threadedly connected to the fixed seat, and the other end of which is rotatably connected to the sliding seat to drive the sliding seat to move relative to the fixed seat.

[0015] Furthermore, the clamping part includes: a support block, the top surface of which is used to place the workpiece to be tested, and a connecting hole provided on the support block, the connecting hole penetrating the support block along the direction from the top surface to the bottom surface; a pressure block, used to press against the top surface of the support block; a connecting rod, provided on the bottom surface of the pressure block, the bottom end of the connecting rod passing through the connecting hole and protruding from the bottom surface of the pressure block; and a connecting nut, threadedly connected to the bottom end of the connecting rod. The pressure block, the connecting rod, and the connecting nut cooperate to fix the workpiece to be tested on the top surface of the support block.

[0016] Applying the technical solution of this invention, the stretching assembly is used to clamp and stretch the sample to be tested. The stretching assembly is detachably connected to the loading assembly and the sliding seat. With this configuration, when performing in-situ scanning tests on the sample to be tested, only the relatively small stretching assembly needs to be placed into the transfer chamber through the transfer chamber door. Then, the small transfer chamber is evacuated. After evacuation, the stretching assembly is placed into the sample chamber through the partition. This configuration avoids the situation where the device, including the fixed seat, loading assembly, and sliding seat, is placed into the sample chamber through the sample chamber flange due to its large size, thus avoiding damage to the vacuum level of the sample chamber, thereby improving testing efficiency and saving testing costs. Specifically, when performing an in-situ tensile scanning test on the sample to be tested, the stretching assembly clamps the sample to be tested; then, the stretching assembly is placed on the sliding seat, and the first connecting end of the adjusting part is inserted into the end of the sliding seat away from the loading assembly; the distance between the sliding seat and the loading assembly is adjusted to a suitable position, and then the second end of the adjusting part is connected to the loading assembly; the loading assembly is activated, and the loading assembly applies a force to the adjusting part, so that the two clamping parts move away from each other and stretch the sample to be tested to complete the stretching operation. After the stretching is completed, the connection between the loading component and the adjustment unit is disconnected, and the sliding seat is moved away from the loading component. Then, the stretching component is removed from the sliding seat, and the stretched sample is scanned. Traditional in-situ stretching devices are integrally molded structures, resulting in large volumes. They can only be placed into the sample chamber through the sample chamber flange, requiring a long time for vacuuming. Compared to traditional solutions, the design of this application allows for the placement of a smaller stretching component into the sample chamber through the transfer chamber door, reducing the time required for vacuuming the transfer chamber and lowering costs. This improves the efficiency of in-situ scanning tests and reduces testing costs. In other words, the advantage of this in-situ stretching device lies in its separate loading and stretching components. The portable stretching component can be transferred to the sample chamber for scanning electron microscopy without disrupting the sample chamber vacuum. Furthermore, this testing device can be configured with multiple stretching components from a single loading component, allowing multiple users to share a single loading system without interference. This greatly increases the instrument's adaptability and lowers the barrier to entry and cost. Attached Figure Description

[0017] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings:

[0018] Figure 1 A schematic diagram of the structure of a portable in-situ stretching device for a scanning electron microscope provided in an embodiment of the present invention is shown.

[0019] Figure 2A top view of a portable in-situ stretching device for a scanning electron microscope provided in an embodiment of the present invention is shown;

[0020] Figure 3 A front view of a portable in-situ stretching device for scanning electron microscopes provided in an embodiment of the present invention is shown.

[0021] Figure 4 A side view of a portable in-situ stretching device for scanning electron microscope provided in an embodiment of the present invention is shown.

[0022] Figure 5 Shown Figure 4 A sectional view at point AA;

[0023] Figure 6 Shown Figure 4 A cross-sectional view at BB;

[0024] Figure 7 Shown Figure 6 A schematic diagram of the local structure at point A in the diagram;

[0025] Figure 8 A schematic diagram of the structure of the tensioning assembly provided in an embodiment of the present invention is shown.

[0026] The above drawings include the following reference numerals:

[0027] 10. Fixture;

[0028] 20. Loading component; 201. Output shaft; 2011. Second limiting hole;

[0029] 30. Sliding seat;

[0030] 31. Stop part; 311. First limiting hole;

[0031] 32. Bearing component;

[0032] 40. Tension assembly;

[0033] 41. Adjustment section;

[0034] 42. Clamping part; 421. Support block; 4211. Connecting hole; 422. Pressure block; 423. Connecting rod; 424. Connecting nut;

[0035] 50. Buffer section;

[0036] 60. Operating handle. Detailed Implementation

[0037] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present invention or its application or use. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0038] like Figures 1 to 8 As shown, this embodiment of the invention provides a portable in-situ stretching device for scanning electron microscopy, comprising a fixed base 10, a loading component 20, a sliding base 30, and a stretching component 40. The loading component 20 is disposed on the fixed base 10; the sliding base 30 is located on one side of the loading component 20 and is movably disposed on the fixed base 10, with an adjustable distance between the sliding base 30 and the loading component 20. The stretching component 40 is detachably disposed on the sliding base 30 and includes an adjusting part 41 and two clamping parts 42. The two clamping parts 42 are spaced apart along the length of the adjusting part 41 and are used to clamp the two ends of the sample to be tested. The adjusting part 41 is drivenly connected to the two clamping parts 42 to adjust the distance between the two clamping parts 42. The adjusting part 41 has a first connecting end and a second connecting end disposed opposite to each other. The first connecting end is inserted into the end of the sliding base 30 away from the loading component 20, and the second connecting end is detachably connected to the loading component 20.

[0039] Applying the technical solution of this invention, the stretching component 40 is used to clamp and stretch the sample to be tested. The stretching component 40 is detachably connected to the loading component 20 and the sliding seat 30. With this configuration, when performing in-situ scanning tests on the sample to be tested, only the relatively small stretching component 40 needs to be placed into the transfer chamber through the transfer chamber door. Then, the small transfer chamber is evacuated. After evacuation, the stretching component 40 is placed into the sample chamber through the partition. This configuration avoids the situation where the entire device, including the fixed seat 10, loading component 20, and sliding seat 30, is placed into the sample chamber through the sample chamber flange due to its large size. It also avoids the need to evacuate the large sample chamber, thereby improving testing efficiency and saving testing costs. In other words, the advantage of this in-situ stretching device is that it adopts a mode where the loading component 20 and the stretching component 40 are separated. The portable stretching component 40 can be transferred to the sample chamber through the transfer chamber for scanning electron microscopy experiments without breaking the vacuum of the sample chamber. Furthermore, this testing device can be configured with multiple tensile components 40 from a single loading component 20, allowing multiple people to share a single loading system without interfering with each other. This greatly increases the adaptability of the instrument and reduces the barrier to entry and cost of use.

[0040] Specifically, during the in-situ tensile scanning test of the sample, the sample is clamped by the tensile assembly 40. Then, the tensile assembly 40 is placed on the sliding seat 30, and the first connecting end of the adjusting part 41 is inserted into the end of the sliding seat 30 furthest from the loading assembly 20. The distance between the sliding seat 30 and the loading assembly 20 is adjusted to a suitable position, and then the second end of the adjusting part 41 is connected to the loading assembly 20. The loading assembly 20 is activated, applying a force to the adjusting part 41 to move the two clamping parts 42 away from each other and to stretch the sample to complete the tensile operation. After the stretching is completed, the connection between the loading assembly 20 and the adjusting part 41 is released, and the sliding seat 30 is moved away from the loading assembly 20. Then, the tensile assembly 40 is removed from the sliding seat 30, and the stretched sample is scanned. Traditional in-situ tensile testing devices are integrally molded structures, resulting in large volumes. They can only be placed into the sample chamber via a sample chamber flange, requiring significant time for vacuuming. Furthermore, frequent opening and closing of the sample chamber severely impacts the lifespan of the scanning electron microscope, particularly the electron gun, increasing testing costs. In contrast, the proposed design allows for the placement of a smaller tensile assembly 40 into the sample chamber via a transfer chamber door. This reduces the time required for vacuuming the transfer chamber, lowering costs and improving the efficiency of in-situ scanning tests while reducing costs. Moreover, this design enables multiple individuals to perform in-situ scanning tests simultaneously. Multiple tensile assemblies 40 are detachably connected to the sliding base 30 and the loading assembly 20, respectively. While one set of tensile assemblies 40 is performing a scanning test, other sets can be used to perform tensile tests on the sample under test, saving testing time. Additionally, the first connecting end is plugged into the sliding base 30, ensuring efficient assembly of the tensile assembly 40 and the sliding base 30.

[0041] Specifically, the adjusting part 41 is rotatable relative to the sliding seat 30. The adjusting part 41 includes a first threaded section and a second threaded section arranged sequentially along its length. The rotation directions of the first threaded section and the second threaded section are opposite. Two clamping parts 42 are threadedly connected to the first threaded section and the second threaded section, respectively. The loading assembly 20 drives the adjusting part 41 to rotate. When the sample to be tested is stretched, the loading assembly 20 drives the adjusting part 41 to rotate. The rotation of the adjusting part 41 drives the two clamping parts 42 to move away from each other, thereby stretching the sample to be tested. In this design, the threaded structure has a self-locking function. When the loading assembly 20 stops driving the adjusting part 41 to rotate, the two clamping parts 42 can remain in a relatively fixed position, ensuring the stability of the clamping of the sample to be tested.

[0042] like Figure 1 and Figure 6As shown, the loading assembly 20 further includes an output shaft 201, which is detachably connected to and drives the adjustment part 41. The portable in-situ tensioning device also includes a first axial limiting structure and a second axial limiting structure. The first axial limiting structure is disposed between the first connecting end and the sliding seat 30, and restricts the adjustment part 41 from moving away from the sliding seat 30 relative to the loading assembly 20. The second axial limiting structure is disposed between the second connecting end and the output shaft 201, and restricts the adjustment part 41 from moving closer to the loading assembly 20 relative to the sliding seat 30. The first and second axial limiting structures cooperate to limit the position of the adjustment part 41 relative to the sliding seat 30 in the axial direction. The provision of the first and second axial limiting structures restricts the position of the adjustment part 41 relative to the sliding seat 30 in the axial direction, ensuring the stability of the driving process of the loading assembly 20 on the adjustment part 41.

[0043] like Figure 1 , Figure 6 and Figure 7 As shown, specifically, the sliding seat 30 includes a stop portion 31 and a support portion 32 arranged sequentially along the length direction of the adjusting portion 41. The stop portion 31 is located away from the loading component 20, and the support portion 32 is used to place the tensioning component 40. The height of the stop portion 31 is higher than that of the support portion 32. A first limiting hole 311 is provided on the top of the side of the stop portion 31 closest to the support portion 32. The first limiting hole 311 cooperates with the first connecting end stop, and the first connecting end can rotate relative to the first limiting hole 311. The first limiting hole 311 forms a first axial limiting structure. The first limiting hole 311 has a simple structure and facilitates the insertion and cooperation between the first connecting end of the adjusting portion 41 and the sliding seat 30. Furthermore, the fixed cooperation between the stop portion 31 and the support portion 32 can ensure the stability of the rotation of the adjusting portion 41 relative to the first limiting hole 311.

[0044] This design does not limit the specific cross-sectional shape of the first limiting hole 311 and the first connecting end of the adjusting part 41. In this embodiment, the cross-section of the first limiting hole 311 is circular, and the cross-section of the first connecting end of the adjusting part 41 is also circular, which are compatible with the first limiting hole 311. By setting the cross-sections of the first limiting hole 311 and the first connecting end of the adjusting part 41 to be circular, the adjusting part 41 can be inserted into the first limiting hole 311 in any state, improving the smoothness of the insertion between the adjusting part 41 and the sliding seat 30. Furthermore, the above arrangement ensures that the number of parts in the overall device is minimized, and guarantees the stability of the sliding seat 30.

[0045] Furthermore, the portable in-situ stretching device also includes a buffer section 50, which is disposed within the first limiting hole 311. One end of the buffer section 50 abuts against the first limiting hole 311, and the other end of the buffer section 50 abuts against the first connecting end of the adjusting section 41 to buffer the adjusting section 41 along its length. After placing the stretching assembly 40 on the bearing part 32 and passing the first connecting end of the adjusting section 41 through the first limiting hole 311, the sliding seat 30 is moved towards the loading assembly 20 until the second connecting end of the adjusting section 41 is connected to the loading assembly 20. During this process, the sliding seat 30 may get too close to the adjusting assembly, causing the end of the first connecting end of the adjusting section 41 to come into close contact with the bottom wall of the first limiting hole 311. This can cause wear on the first limiting hole 311 and the first connecting end of the adjusting section 41. Furthermore, the above-mentioned arrangement results in a large frictional force between the end face of the first connecting end and the bottom wall of the first limiting hole 311, which affects the smoothness of the rotation of the adjusting part 41. Therefore, in this embodiment, the buffer part 50 is a buffer spring, and the end of the buffer spring abuts against the end of the first connecting end. The contact area between the two is small, which can reduce the frictional force on the first connecting end and further ensure the smoothness and stability of the rotation process of the adjusting part 41.

[0046] like Figure 1 , Figures 6 to 8 As shown, the portable in-situ tensioning device further includes an anti-rotation structure disposed between the second connecting end and the output shaft 201. The anti-rotation structure is used to limit the relative position of the second connecting end and the output shaft 201 in the circumferential direction, so that the second connecting end and the output shaft 201 rotate synchronously. The anti-rotation structure ensures that the adjusting part 41 rotates synchronously with the output shaft 201, and ensures the stability of the driving of the adjusting part 41 by the loading component 20.

[0047] Specifically, a second limiting hole 2011 is provided at one end of the output shaft 201 near the sliding seat 30, and the second connecting end extends into the second limiting hole 2011 and is limited and engaged with the second limiting hole 2011, forming a second axial limiting structure.

[0048] The second limiting hole 2011 has a simple structure and allows the second connecting end of the adjusting part 41 to be inserted into the output shaft 201.

[0049] In this embodiment, the first limiting hole 311 and the second limiting hole 2011 are coaxially arranged. After the stretching assembly 40 is placed on the sliding seat 30 and the first connecting end of the adjusting part 41 is inserted into the first limiting hole 311, the sliding seat 30 is moved towards the loading assembly 20 until the second connecting end of the adjusting part 41 is inserted into the second limiting hole 2011 and engages with the second limiting hole 2011 to prevent rotation. The loading assembly 20 is then activated, causing the loading assembly 20 to drive the adjusting part 41 to rotate, thus completing the stretching of the sample to be tested. The second limiting hole 2011 and the first limiting hole 311 engage to fix the position of the stretching assembly 40 relative to the sliding seat 30 in the axial direction. The structure is simple and facilitates the connection of the adjusting part 41 of the stretching assembly 40 to the sliding seat 30 and the output shaft 201 of the loading assembly 20, respectively.

[0050] Specifically, the second limiting hole 2011 has a first sectional structure on its circumferential surface, and the second connecting end has a second sectional structure on its circumferential surface. The first and second sectional structures are in a non-rotational fit to prevent the second connecting end from rotating relative to the output shaft 201. The first and second sectional structures cooperate to form a non-rotational structure. In this embodiment, the cross-section of the second limiting hole 2011 is a polygonal structure, and the shape of the second connecting end of the adjusting part 41 is adapted to the second limiting hole 2011. This configuration is simple, allowing the second limiting hole 2011 to both form a second axial limiting structure and provide a non-rotational fit to the second connecting end of the adjusting part 41, facilitating a detachable connection between the output shaft 201 and the adjusting part 41.

[0051] like Figure 1 and Figure 5 As shown, the portable in-situ stretching device further includes an operating handle 60. The axial direction of the operating handle 60 is the same as the sliding direction of the sliding seat 30. One end of the operating handle 60 is threadedly connected to the fixed seat 10, and the other end of the operating handle 60 is rotatably connected to the sliding seat 30 to drive the sliding seat 30 to move relative to the fixed seat 10. This configuration facilitates the adjustment of the position of the sliding seat 30. Furthermore, by manually adjusting the sliding seat 30, the degree to which the second connecting end of the adjusting part 41 is embedded in the second limiting hole 2011 and the degree to which the first connecting end of the adjusting part 41 is embedded in the first limiting hole 311 can be felt. This avoids over- or under-alignment of the adjusting part 41 with the first limiting hole 311 or the second limiting hole 2011, ensuring the smoothness and stability of the loading component 20's drive of the adjusting part 41.

[0052] In this embodiment, the fixed base 10 includes a base plate, a first support plate, and a second support plate. The first and second support plates are arranged parallel to each other and spaced apart along the length of the base plate. A sliding base 30 is located between the first and second support plates and slides along the length of the base plate. An operating handle 60 extends from the first support plate along its thickness direction and is threadedly connected to it. One end of the operating handle is rotatably connected to the end of the sliding base 30 furthest from the loading assembly 20. The loading assembly 20 is located on the side of the second support plate furthest from the first support plate. The output shaft 201 of the loading assembly 20 passes through the second support plate and connects to the second connecting end of the adjusting part 41.

[0053] like Figure 1 and Figure 8 As shown, specifically, the clamping part 42 includes a support block 421, a pressure block 422, a connecting rod 423, and a connecting nut 424. The top surface of the support block 421 is used to place the workpiece to be tested. A connecting hole 4211 is provided on the support block 421, extending through it from the top to the bottom surface. The pressure block 422 is used to press against the top surface of the support block 421. The connecting rod 423 is located on the bottom surface of the pressure block 422, with its bottom end passing through the connecting hole 4211 and protruding from the bottom surface of the pressure block 422. The connecting nut 424 is threadedly connected to the bottom end of the connecting rod 423. The pressure block 422, connecting rod 423, and connecting nut 424 cooperate to fix the workpiece to be tested on the top surface of the support block 421. This configuration minimizes the number of components in the tensile assembly 40, ensuring a simplified structure. This solution does not limit the number of connecting rods 423 connected to each pressure block 422. In this embodiment, each pressure block 422 has three connecting rods 423 at its bottom, that is, the support block 421 has three connecting holes 4211. The connecting holes 4211 and the connecting rods 423 are set one-to-one, and the line connecting the three connecting rods 423 forms a triangle. This arrangement allows the sample to be tested to have three through holes, which are used for the three connecting rods 423 to pass through. This allows the three connecting rods 423 to limit the ends of the sample to be tested, ensuring the stability of the sample during stretching.

[0054] In this embodiment, a threaded hole is provided on each side of the support block 421 along its length, with the length direction of the threaded hole being the same as that of the support block 421. Two adjusting parts 41 are spaced apart along the width direction of the support block 421, and each adjusting part 41 is threadedly connected to the two threaded holes of each support block 421. Two sets of loading components 20 are provided, with each set of loading components 20 being drivenly connected to one adjusting part 41. This arrangement ensures the stability of driving the two adjusting parts 41, guarantees the accuracy of the tensile length of the tensile component 40 on the sample under test, and ensures the accuracy of the test results.

[0055] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0056] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0057] In the description of this invention, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is generally based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this invention and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this invention; the directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0058] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0059] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore should not be construed as limiting the scope of protection of this invention.

[0060] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.

Claims

1. A portable in-situ stretching device for a scanning electron microscope, characterized in that, include: Fixture (10); Loading component (20) is mounted on the fixed base (10); A sliding seat (30) is located on one side of the loading component (20). The sliding seat (30) is movably disposed on the fixed seat (10). The distance between the sliding seat (30) and the loading component (20) is adjustable. A stretching assembly (40) is detachably mounted on the sliding seat (30). The stretching assembly (40) includes an adjusting part (41) and two clamping parts (42). The two clamping parts (42) are spaced apart on the adjusting part (41) along the length direction of the adjusting part (41). The two clamping parts (42) are used to clamp the two ends of the sample to be tested. The adjusting part (41) is driven to be connected to the two clamping parts (42) to adjust the distance between the two clamping parts (42). The adjusting part (41) has a first connecting end and a second connecting end that are disposed opposite to each other. The first connecting end is inserted into the end of the sliding seat (30) away from the loading assembly (20), and the second connecting end is detachably connected to the loading assembly (20).

2. The portable in-situ stretching device according to claim 1, characterized in that, The adjusting part (41) is rotatable relative to the sliding seat (30); the adjusting part (41) includes a first threaded segment and a second threaded segment arranged sequentially along the length direction, the rotation direction of the first threaded segment and the rotation direction of the second threaded segment are opposite, the two clamping parts (42) are threadedly connected to the first threaded segment and the second threaded segment respectively, and the loading component (20) drives the adjusting part (41) to rotate.

3. The portable in-situ stretching device according to claim 2, characterized in that, The loading component (20) has an output shaft (201), which is detachably connected to the adjustment part (41) and drives the adjustment part (41); the portable in-situ stretching device further includes: A first axial limiting structure is disposed between the first connecting end and the sliding seat (30). The first axial limiting structure is used to restrict the adjustment part (41) from moving away from the loading component (20) relative to the sliding seat (30). The second axial limiting structure is disposed between the second connecting end and the output shaft (201). The second axial limiting structure is used to limit the movement of the adjusting part (41) relative to the sliding seat (30) toward the loading component (20). The first axial limiting structure and the second axial limiting structure cooperate to limit the position of the adjusting part (41) relative to the sliding seat (30) in the axial direction.

4. The portable in-situ stretching device according to claim 3, characterized in that, The sliding seat (30) includes a stop (31) and a support (32) arranged sequentially along the length of the adjusting part (41). The stop (31) is located away from the loading component (20). The support (32) is used to place the tensioning component (40). The height of the stop (31) is higher than that of the support (32). A first limiting hole (311) is provided on the side of the stop (31) near the support (32). The first limiting hole (311) cooperates with the first connecting end stop, and the first connecting end can rotate relative to the first limiting hole (311). The first limiting hole (311) forms the first axial limiting structure.

5. The portable in-situ stretching device according to claim 4, characterized in that, The portable in-situ stretching device also includes: A buffer section (50) is disposed inside the first limiting hole (311). One end of the buffer section (50) abuts against the first limiting hole (311), and the other end of the buffer section (50) abuts against the first connecting end of the adjusting section (41) to buffer the adjusting section (41) in the length direction of the adjusting section (41).

6. The portable in-situ stretching device according to claim 3, characterized in that, The portable in-situ stretching device also includes: An anti-rotation structure is disposed between the second connecting end and the output shaft (201). The anti-rotation structure is used to limit the relative position of the second connecting end and the output shaft (201) in the circumferential direction so that the second connecting end and the output shaft (201) rotate synchronously.

7. The portable in-situ stretching device according to claim 6, characterized in that, A second limiting hole (2011) is provided at one end of the output shaft (201) near the sliding seat (30). The second connecting end extends into the second limiting hole (2011) and is limited and engaged with the second limiting hole (2011). The second limiting hole (2011) forms the second axial limiting structure.

8. The portable in-situ stretching device according to claim 7, characterized in that, The second limiting hole (2011) has a first sectional structure on its circumferential surface, and the second connecting end has a second sectional structure on its circumferential surface. The first sectional structure and the second sectional structure are anti-rotationally engaged to prevent the second connecting end from rotating relative to the output shaft (201). The first sectional structure and the second sectional structure are engaged to form the anti-rotation structure.

9. The portable in-situ stretching device according to claim 1, characterized in that, The portable in-situ stretching device also includes: An operating handle (60) is provided, the axis of which is in the same direction as the sliding direction of the sliding seat (30). One end of the operating handle (60) is threadedly connected to the fixed seat (10), and the other end of the operating handle (60) is rotatably connected to the sliding seat (30) to drive the sliding seat (30) to move relative to the fixed seat (10).

10. The portable in-situ stretching device according to claim 1, characterized in that, The clamping part (42) includes: A support block (421) is provided. The top surface of the support block (421) is used to place the part to be tested. A connecting hole (4211) is provided on the support block (421). The connecting hole (4211) is provided through the support block (421) along the direction from the top surface to the bottom surface of the support block (421). A pressure block (422) is used to press against the top surface of the support block (421); A connecting rod (423) is provided on the bottom surface of the pressure block (422), and the bottom end of the connecting rod (423) passes through the connecting hole (4211) and protrudes from the bottom surface of the pressure block (422). A connecting nut (424) is threaded to the bottom end of the connecting rod (423). The pressure block (422), the connecting rod (423), and the connecting nut (424) cooperate to fix the test piece on the top surface of the support block (421).

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