Mirror device

Abstract

The mirror device of the present application includes a support portion, a movable portion (4), and a pair of torsion bars (7, 8) disposed on both sides of the movable portion (4) on the first axis (X). The movable portion (4) has a frame-shaped frame (42) to which the pair of torsion bars (7, 8) is connected and a mirror portion (41) disposed inside the frame (42). The mirror portion (41) is connected to the frame (42) at each of a pair of connection regions (40a, 40b) on both sides of the mirror portion (41) in a direction parallel to the second axis (Y). The regions between the mirror portion (41) and the frame (42) other than the pair of connection regions (40a, 40b) are spaces. In a case where the mirror device is viewed from a direction perpendicular to the first axis (X) and the second axis (Y), the outer edge of the mirror portion (41) and the inner edge of the frame (42) are connected in a continuously curved manner at each of the pair of connection regions (40a, 40b).

Description

[0001] This application was filed on [date]. August 3, 2018 Application number is 201880051445.9 The invention is named mirror device A divisional application of the patent application. Technical Field

[0002] The present invention relates to a mirror device configured as, for example, a MEMS (Micro Electro Mechanical Systems) device. Background Technology

[0003] As a MEMS device, a mirror device is known, comprising: a support portion; a movable portion on which the mirror portion is disposed; and a pair of torsion bars connecting the movable portion to the support portion so that the movable portion can swing about a predetermined axis. In such a mirror device, in order to suppress bending of the mirror portion when the movable portion swings at high speed (e.g., at the level of the resonant frequency of the movable portion (several kHz to tens of kHz)), the movable portion sometimes connects the mirror portion to a frame-like frame via a pair of connecting portions arranged on the aforementioned axis (for example, see Patent Document 1).

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: US Patent No. 7619802 Summary of the Invention

[0007] The problem that the invention aims to solve

[0008] In the aforementioned mirror device, since a pair of torsion bars and a pair of connecting parts are arranged on the same axis, if the movable part is made to swing at high speed, the stress generated at the pair of connecting parts will increase due to the torsion of the pair of torsion bars, and the movable part may be damaged at the connecting parts.

[0009] The purpose of this invention is to provide a mirror device that can suppress both bending of the mirror part and breakage of the movable part.

[0010] Technical means to solve the problem

[0011] According to one aspect of the present invention, a mirror device includes: a support portion; a movable portion; and a pair of torsion bars disposed on both sides of the movable portion on a first axis, connecting the movable portion to the support portion so that the movable portion can swing about the first axis as a center line. The movable portion has: a frame-shaped frame connected to the pair of torsion bars; and a mirror portion disposed inside the frame. The mirror portion is connected to the frame at each of a pair of first connecting regions on both sides of the mirror portion located in a direction parallel to a second axis perpendicular to the first axis. The area between the mirror portion and the frame other than the pair of first connecting regions is space. When viewed from a direction perpendicular to the first axis and the second axis, the outer edge of the mirror portion and the inner edge of the frame are connected in a manner of continuous curvature at each of the pair of first connecting regions.

[0012] In this mirror assembly, a pair of torsion bars connected to the frame are positioned on a first axis, and a pair of first connection areas connecting the mirror and the frame are located on either side of the mirror in a direction parallel to a second axis perpendicular to the first axis. Therefore, even when the movable part oscillates at high speed, compared to cases where only one pair of connection areas are located on the first axis, or where the mirror and the frame are connected in only one connection area, the stress generated in each of the pair of first connection areas is reduced due to the torsion of the pair of torsion bars. Furthermore, in this mirror assembly, when viewed from a direction perpendicular to both the first and second axes, the outer edge of the mirror and the inner edge of the frame are connected in a manner of continuous curvature in each of the pair of first connection areas. Therefore, stress is less likely to concentrate in each of the pair of first connection areas. As described above, according to this mirror assembly, both bending of the mirror and breakage of the movable part can be suppressed.

[0013] According to one aspect of the present invention, a mirror device includes: a support portion; a movable portion; and a pair of torsion bars disposed on both sides of the movable portion on a first axis, connecting the movable portion to the support portion so that the movable portion can swing about the first axis as a center line. The movable portion has: a frame-shaped frame connected to the pair of torsion bars; and a mirror portion disposed inside the frame. The mirror portion has a pair of first connecting regions on both sides of the mirror portion in a direction parallel to a second axis perpendicular to the first axis, and a pair of second connecting regions on both sides of the mirror portion in a direction parallel to the first axis connected to the frame. The area between the mirror portion and the frame, excluding the pair of first connecting regions and the pair of second connecting regions, is a space. When viewed from a direction perpendicular to the first axis and the second axis, the outer edge of the mirror portion and the inner edge of the frame are connected in a manner of continuous curvature in each of the pair of first connecting regions.

[0014] In this mirror assembly, a pair of torsion bars connected to a frame-like structure are positioned on a first axis. A pair of first connection regions, connecting the mirror and the frame-like structure, are located on either side of the mirror in a direction parallel to a second axis perpendicular to the first axis. Furthermore, a pair of second connection regions, also connecting the mirror and the frame-like structure, are located on either side of the mirror in a direction parallel to the first axis. Therefore, even when the movable part oscillates at high speed, compared to cases where only one pair of connection regions are located on the first axis, or where the mirror and the frame-like structure are connected in only one connection region, the stress generated in each of the pair of first connection regions and each of the pair of second connection regions is reduced due to the torsion of the pair of torsion bars. Furthermore, in this mirror assembly, when viewed from a direction perpendicular to both the first and second axes, the outer edge of the mirror and the inner edge of the frame are connected in a manner of continuous curvature in each of the pair of first connection regions. Therefore, stress is less likely to concentrate in each of the pair of first connection regions. As described above, according to this mirror assembly, both bending of the mirror and breakage of the movable part can be suppressed.

[0015] In one aspect of the mirror device of the present invention, when viewed from a direction perpendicular to the first axis and the second axis, the outer edge of the mirror and the inner edge of the frame are connected in a manner of continuous curvature in each of a pair of second connecting regions. This makes it difficult for stress to concentrate in each of the pair of second connecting regions.

[0016] In one aspect of the mirror device of the present invention, a pair of second connecting regions may be located on both sides of the mirror portion along the first axis. This reduces the moment of inertia of the movable portion about the first axis.

[0017] In one aspect of the mirror device of the present invention, a pair of first connecting regions may be located on both sides of the mirror portion on the second axis. This ensures sufficient distance between each of the pair of torsion bars and each of the pair of first connecting regions (the torsion of the pair of torsion bars does not easily affect the distance between the pair of first connecting regions). Therefore, the structure of the movable part can be simplified, while suppressing both bending of the mirror portion and breakage of the movable part.

[0018] In one aspect of the mirror device of the present invention, the frame may include a pair of first portions connected to a mirror portion and extending in a direction parallel to a first axis. The width of each of the pair of first portions decreases as it moves away from each of the pair of first connecting regions, in a direction parallel to a second axis. This allows the stress generated by the torsion of the pair of torsion bars to be distributed to the portions where the width decreases in the pair of first portions, further reducing the stress generated in each of the pair of first connecting regions. Furthermore, it ensures the connection strength in each of the pair of first connecting regions and reduces the moment of inertia of the movable part by the amount by which the width decreases in the pair of first portions. Reducing the moment of inertia of the movable part is advantageous for enabling the movable part to oscillate at high speeds.

[0019] In one aspect of the mirror device of the invention, the frame may further include a pair of second portions connected to a pair of torsion bars and extending in a direction parallel to the second axis. This allows the stress generated by the torsion of the pair of torsion bars to be dispersed towards the portion between the interconnected first and second portions, further reducing the stress generated in each of the pair of first connection regions.

[0020] In one aspect of the mirror device of the present invention, when viewed from a direction perpendicular to the first axis and the second axis, the inner edges of each of a pair of first portions and the inner edges of each of a pair of second portions are connected to each other in a manner of continuous curvature in each of the interconnected plurality of regions. This allows for the suppression of stress concentration in each of the plurality of regions where the inner edges of the first and second portions are interconnected.

[0021] In one aspect of the mirror device of the present invention, when viewed from a direction perpendicular to the first axis and the second axis, the outer edges of each of a pair of first portions and the outer edges of each of a pair of second portions are connected to each other in a manner of continuous curvature in each of the interconnected plurality of regions. This allows for the suppression of stress concentration in each of the plurality of regions where the outer edges of the first portions and the outer edges of the second portions are interconnected.

[0022] In one aspect of the mirror device of the present invention, the length of each of the pair of first portions in the direction parallel to the first axis may be longer than the length of each of the pair of second portions in the direction parallel to the second axis. This suppresses the increase in the rotational inertia of the movable part and ensures sufficient distance between each of the pair of torsion bars and each of the pair of first connecting regions (the torsion of the pair of torsion bars does not easily affect the distance between the pair of first connecting regions).

[0023] In one aspect of the mirror device of the present invention, the distance between each of the pair of first connecting regions and one of the pair of second portions, and the distance between each of the pair of first connecting regions and the other of the pair of second portions, may be longer than the distance between the first axis and each of the pair of first portions. This suppresses the increase in the rotational inertia of the movable part, while ensuring sufficient distance between each of the pair of torsion bars and each of the pair of first connecting regions (the torsion of the pair of torsion bars does not easily affect the distance between the pair of first connecting regions).

[0024] In one aspect of the mirror device of the present invention, the shape of the mirror portion when viewed from a direction perpendicular to the first axis and the second axis may be elliptical, having a major axis along the first axis. This suppresses the increase in the rotational inertia of the movable part while ensuring a sufficient mirror area.

[0025] In one aspect of the mirror device of the present invention, the width of each of the pair of first connecting regions in the direction parallel to the first axis may be 30% or less of the width of the mirror portion in the direction parallel to the first axis. This allows for the simultaneous assurance of sufficient connection strength between the mirror portion and the frame, and of sufficient distance between each of the pair of torsion bars and each of the pair of first connecting regions.

[0026] The effects of the invention

[0027] According to the present invention, a mirror device can be provided that can suppress both bending of the mirror part and breakage of the movable part. Attached Figure Description

[0028] Figure 1 This is a top view of a mirror device according to one embodiment.

[0029] Figure 2 yes Figure 1 A top view of the movable part of the mirror device shown.

[0030] Figure 3 yes Figure 1 A top view of the torsion bar of the mirror device shown.

[0031] Figure 4 yes Figure 1 A bottom view of the main part of the mirror device shown.

[0032] Figure 5 (a) is a top view of the movable part of the comparative example. Figure 5 (b) is a top view of the movable part of the embodiment.

[0033] Figure 6 (a) is a top view of the movable part of the comparative example. Figure 6 (b) is a top view of the movable part of the embodiment.

[0034] Figure 7 (a) is a top view of the movable part of the first modified example. Figure 7 (b) is a top view of the movable part of the second modified example.

[0035] Figure 8 This is a top view of the movable part in the third variation. Detailed Implementation

[0036] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings. Furthermore, identical or equivalent parts are labeled with the same reference numerals in the drawings, and repeated descriptions are omitted.

[0037] [Structure of the mirror device]

[0038] like Figure 1 As shown, the mirror device 1 includes a base 2, a support 3, a movable part 4, a pair of torsion bars 5 and 6, a pair of torsion bars 7 and 8, and a magnetic field generating part 10. The base 2, support 3, movable part 4, pair of torsion bars 5 and 6, and pair of torsion bars 7 and 8 are formed as a single unit on an SOI (Silicon on Insulator) substrate. That is, the mirror device 1 is configured as a MEMS device. The magnetic field generating part 10 is, for example, composed of permanent magnets arranged in a Halbach configuration. In the mirror device 1, the movable part 4, on which the mirror part 41 is mounted, swings about the mutually orthogonal X-axis (first axis) and Y-axis (second axis perpendicular to the first axis). The mirror device 1 is used, for example, in optical switches for optical communication, optical scanners, etc.

[0039] Viewed from a direction perpendicular to the X and Y axes, the base 2 has, for example, a quadrilateral shape and is frame-shaped. The base 2 is disposed on one side of the magnetic field generating unit 10. Viewed from a direction perpendicular to the X and Y axes, the support 3 has, for example, an octagonal shape and is frame-shaped. The support 3 is disposed inside the base 2 in a state separate from the magnetic field generating unit 10. Viewed from a direction perpendicular to the X and Y axes, the movable part 4 has, for example, a quadrilateral shape. The movable part 4 is disposed inside the support 3 in a state separate from the magnetic field generating unit 10.

[0040] A pair of torsion bars 5 and 6 are positioned on both sides of the support portion 3 on the Y-axis. The torsion bars 5 and 6 connect the support portion 3 to the base 2, allowing the support portion 3 to swing about the Y-axis. To facilitate increased strength and adjustment of the torsion spring constant, each torsion bar 5 and 6 extends in a meandering manner. A pair of torsion bars 7 and 8 are positioned on both sides of the movable portion 4 on the X-axis. The torsion bars 7 and 8 connect the movable portion 4 to the support portion 3, allowing the movable portion 4 to swing about the X-axis. Each torsion bar 7 and 8 extends in a straight line along the X-axis.

[0041] The mirror device 1 also includes coils 9 and 11, multiple wirings 12, 13, 14, and 15, and multiple electrode pads 16, 17, 18, and 19. Coil 9 is disposed in the support portion 3. Coil 9 extends in a spiral shape, for example, embedded in the support portion 3. Coil 11 is disposed in the movable portion 4. Coil 9 extends in a spiral shape, for example, embedded in the movable portion 4. Each coil 9 and 11 is made of a metal material such as copper. Furthermore, the areas where each coil 9 and 11 is disposed are shaded in the accompanying drawings.

[0042] Multiple electrode pads 16, 17, 18, and 19 are disposed on the base 2. Each electrode pad 16, 17, 18, and 19 is exposed to the outside of the insulating layer 21 on the base 2. The insulating layer 21 is formed integrally to cover the surfaces of the base 2, the support portion 3, the movable portion 4, a pair of torsion bars 5 and 6, and a pair of torsion bars 7 and 8 (the surfaces opposite to the magnetic field generating portion 10). The insulating layer 21 is made of, for example, a silicon dioxide film or a silicon nitride film.

[0043] Wiring 12 electrically connects one end of coil 9 to electrode pad 16. Wiring 12 extends from one end of coil 9 to electrode pad 16 via torsion bar 5, embedded in insulation layer 21. Wiring 13 electrically connects the other end of coil 9 to electrode pad 17. Wiring 13 extends from the other end of coil 9 to electrode pad 17 via torsion bar 6, embedded in insulation layer 21. Each wiring 12 and 13 is made of a metal material such as aluminum.

[0044] Wiring 14 electrically connects one end of coil 11 to electrode pad 18. Wiring 14 extends from one end of coil 11 to electrode pad 18 via torsion bar 7, a portion of support 3, and torsion bar 5, with the wiring embedded in insulation layer 21. Wiring 15 electrically connects the other end of coil 11 to electrode pad 19. Wiring 15 extends from the other end of coil 11 to electrode pad 19 via torsion bar 8, a portion of support 3, and torsion bar 6, with the wiring embedded in insulation layer 21. The portions of wiring 14 and 15 passing through torsion bars 7 and 8 are made of, for example, a metal material such as tungsten, while the other portions are made of a metal material such as aluminum. As described later, due to the torsion generated by the resonance of movable part 4 at its natural vibration frequency in a pair of torsion bars 7 and 8, a greater load is applied to the portions of wiring 14 and 15 passing through torsion bars 7 and 8 than to the other portions. However, in the mirror device 1, because the portions of each wiring 14, 15 passing through each torsion bar 7, 8 are made of a metal material with a higher Vickers hardness than other portions, metal fatigue is less likely to occur in each wiring 14, 15 on each torsion bar 7, 8. Furthermore, the portions of each wiring 14, 15 passing through each torsion bar 7, 8 are shaded in the accompanying drawings.

[0045] In the mirror device 1 configured as described above, if a linear motion drive signal is input to coil 9 via electrode pads 16 and 17 and wiring 12 and 13, a Lorentz force is applied to coil 9 through interaction with the magnetic field generated by magnetic field generating unit 10. By utilizing the balance between this Lorentz force and the elastic force of the pair of torsion bars 5 and 6, the mirror 41 and the support 3 can move linearly around the Y-axis. On the other hand, if a resonance motion drive signal is input to coil 11 via electrode pads 18 and 19 and wiring 14 and 15, a Lorentz force is applied to coil 11 through interaction with the magnetic field generated by magnetic field generating unit 10. In addition to this Lorentz force, the resonance of movable part 4 at its natural vibration frequency is also utilized, thereby enabling the mirror 41 to resonate around the X-axis. Furthermore, the natural vibration frequency is determined based on the moment of inertia of movable part 4, the torsion spring constants of the pair of torsion bars 7 and 8, etc.

[0046] [Structure of each department]

[0047] like Figure 2 As shown, in addition to the mirror portion 41, the movable portion 4 also has a frame-shaped frame 42. A pair of torsion bars 7 and 8 are connected to the frame 42. The mirror portion 41 is disposed inside the frame 42. Each of the pair of connecting regions (first connecting regions) 40a and 40b on both sides of the mirror portion 41 in a direction parallel to the Y-axis (hereinafter referred to as the "Y-axis direction") is connected to the frame 42. More specifically, each of the pair of connecting regions 40a and 40b on both sides of the mirror portion 41 in the Y-axis direction is connected to the frame 42. The area between the mirror portion 41 and the frame 42 other than the pair of connecting regions 40a and 40b is space. That is, the mirror portion 41 and the frame 42 are connected to each other only in the pair of connecting regions 40a and 40b. The width (minimum width) W2 of each connecting region 40a, 40b in the direction parallel to the X-axis (hereinafter referred to as the "X-axis direction") is less than 30% of the width (maximum width) W1 of the mirror portion 41 in the X-axis direction.

[0048] When viewed from a direction perpendicular to the X and Y axes, the shape of the mirror portion 41 is an ellipse centered at the intersection point O of the X and Y axes, having a major axis along the X axis and a minor axis along the Y axis. On the surface of the mirror portion 41 (the surface opposite to the magnetic field generating portion 10), a mirror surface 41a is formed by a metal film, for example, made of aluminum.

[0049] Viewed from directions perpendicular to the X and Y axes, frame 42 has, for example, a quadrilateral shape and is formed in a frame shape. More specifically, frame 42 is formed in a frame shape by a pair of first portions 43, 44 extending along the X-axis and a pair of second portions 45, 46 extending along the Y-axis. The length of each first portion 43, 44 in the X-axis direction is longer than the length of each second portion 45, 46 in the Y-axis direction. Furthermore, the length of each first portion 43, 44 in the X-axis direction can be understood as the length of the outer or inner edge of each first portion 43, 44 when viewed from directions perpendicular to the X and Y axes. The length of each second portion 45, 46 in the Y-axis direction can be understood as the length of the outer or inner edge of each second portion 45, 46 when viewed from directions perpendicular to the X and Y axes.

[0050] The distances between connecting region 40a and the second part 45, connecting region 40a and the second part 46, connecting region 40b and the second part 45, and connecting region 40b and the second part 46 are all longer than the distances between the X-axis and the first part 43 and the X-axis and the first part 44, respectively. Furthermore, the distance between connecting region 40a and the second part 45 can be understood as the distance along the X-axis from the outer edge of the second part 45 side of connecting region 40a to the inner edge of the second part 45 (maximum distance). The distance between connecting region 40a and the second part 46 can be understood as the distance along the X-axis from the outer edge of the second part 46 side of connecting region 40a to the inner edge of the second part 46 (maximum distance). The distance between connecting region 40b and the second part 45 can be understood as the distance along the X-axis from the outer edge of the second part 45 side of connecting region 40b to the inner edge of the second part 45 (maximum distance). The distance between the connecting region 40b and the second part 46 can be understood as the distance along the X-axis from the outer edge of the second part 46 side of the connecting region 40b to the inner edge of the second part 46 (maximum distance). The distance between the X-axis and the first part 43 can be understood as the distance along the Y-axis from the X-axis to the inner edge of the first part 43 (maximum distance). The distance between the X-axis and the first part 44 can be understood as the distance along the Y-axis from the X-axis to the inner edge of the first part 44 (maximum distance).

[0051] The mirror portion 41 is connected to the inner side 43a of the first portion 43 (mirror portion 41 side) and the inner side 44a of the first portion 44 (mirror portion 41 side). The torsion bar 7 is connected to the outer side 45b of the second portion 45 (opposite to the mirror portion 41). The torsion bar 8 is connected to the outer side 46b of the second portion 46 (opposite to the mirror portion 41).

[0052] The side surface 41b of the mirror portion 41 and the inner side surface 43a of the first portion 43 are connected in a manner of continuous curvature in the connecting region 40a. The side surface 41b of the mirror portion 41 and the inner side surface 44a of the first portion 44 are connected in a manner of continuous curvature in the connecting region 40b. That is, when viewed from a direction perpendicular to the X-axis and Y-axis, the outer edge of the mirror portion 41 and the inner edge of the frame 42 are connected in a manner of continuous curvature in each connecting region 40a, 40b. Furthermore, "connected in a manner of continuous curvature" means that there are no points of curvature discontinuity (e.g., the vertex of a sharp corner (including any of acute, right, or obtuse angles)) where the connection is made. Therefore, if there are no points of curvature discontinuity, the straight portion in each connecting region 40a, 40b can also be included in the outer edge of the mirror portion 41 and the inner edge of the frame 42 (the curvature value of the straight portion can be considered as 0).

[0053] The width of the first portion 43 in the Y-axis direction decreases as it moves closer to the torsion bar 7 along the X-axis from the connecting region 40a. Similarly, the width of the first portion 43 in the Y-axis direction decreases as it moves closer to the torsion bar 8 along the X-axis from the connecting region 40a. In other words, the width of the first portion 43 in the Y-axis direction decreases the further away from the connecting region 40a it is from the connecting region 40a, the closer it is to the connecting region 43. Here, the outer side 43b of the first portion 43 (opposite to the mirror portion 41) is a flat surface parallel to the X-axis, while the inner side 43a of the first portion 43 is a curved surface that curves concave towards the opposite side of the mirror portion 41, moving closer to the side 43b the further away from the connecting region 40a it is from the connecting region 40a. The width of the first portion 44 in the Y-axis direction decreases as it moves closer to the torsion bar 7 along the X-axis from the connecting region 40b. Similarly, the width of the first portion 44 in the Y-axis direction decreases as it moves closer to the torsion bar 8 along the X-axis from the connecting region 40b. That is, the width of the first portion 44 in the Y-axis direction decreases the further away from the connecting region 40b. Here, the outer side 44b of the first portion 44 (opposite to the mirror portion 41) becomes a flat surface parallel to the X-axis, and the inner side 44a of the first portion 44 becomes a curved surface that curves into a concave shape towards the opposite side of the mirror portion 41 in such a way that it gets closer to the side 44b the further away from the connecting region 40b.

[0054] When viewed from directions perpendicular to the X and Y axes, the inner side surface 43a of the first part 43 and the inner side surface 45a (mirror part 41 side) of the second part 45 are connected in a manner of continuous curvature in the areas where they connect. When viewed from directions perpendicular to the X and Y axes, the inner side surface 43a of the first part 43 and the inner side surface 46a (mirror part 41 side) of the second part 46 are connected in a manner of continuous curvature in the areas where they connect. When viewed from directions perpendicular to the X and Y axes, the inner side surface 44a of the first part 44 and the inner side surface 45a of the second part 45 are connected in a manner of continuous curvature in the areas where they connect. When viewed from directions perpendicular to the X and Y axes, the inner side surface 44a of the first part 44 and the inner side surface 46a of the second part 46 are connected in a manner of continuous curvature in the areas where they connect. That is, when viewed from a direction perpendicular to the X-axis and Y-axis, the inner edges of each of the first parts 43 and 44 and the inner edges of each of the second parts 45 and 46 are connected to each other in a manner of continuous curvature in the interconnected regions.

[0055] Viewed from directions perpendicular to the X and Y axes, the outer side surface 43b of the first part 43 and the outer side surface 45b of the second part 45 are connected in a manner of continuous curvature in their connecting regions. Viewed from directions perpendicular to the X and Y axes, the outer side surface 43b of the first part 43 and the outer side surface 46b of the second part 46 are connected in a manner of continuous curvature in their connecting regions. Viewed from directions perpendicular to the X and Y axes, the outer side surface 44b of the first part 44 and the outer side surface 45b of the second part 45 are connected in a manner of continuous curvature in their connecting regions. Viewed from directions perpendicular to the X and Y axes, the outer side surface 44b of the first part 44 and the outer side surface 46b of the second part 46 are connected in a manner of continuous curvature in their connecting regions. In other words, viewed from directions perpendicular to the X and Y axes, the outer edges of each of the first parts 43 and 44 and the outer edges of each of the second parts 45 and 46 are connected in a manner of continuous curvature in their respective connecting regions.

[0056] A slit 45c extending along the Y-axis is formed in the second part 45. When viewed from a direction perpendicular to both the X and Y axes, the slit 45c is located between the torsion bar 7 and the mirror part 41. A slit 46c extending along the Y-axis is formed in the second part 46. When viewed from a direction perpendicular to both the X and Y axes, the slit 46c is located between the torsion bar 8 and the mirror part 41.

[0057] Coil 11 extends along the outer sides 43b and 44b of each of the first portions 43 and 44. The center position (center position of width in the Y-axis direction) of the region where coil 11 extends in the first portion 43 is located further outward than the center position (center position of width in the Y-axis direction) of the first portion 43 (opposite side of connecting region 40a). The center position (center position of width in the Y-axis direction) of the region where coil 11 extends in the first portion 44 is located further outward than the center position (center position of width in the Y-axis direction) of the first portion 44 (opposite side of connecting region 40b).

[0058] Coil 11 extends along the inner sides 45a and 46a of each of the second portions 45 and 46. The center position (center position of width in the X-axis direction) of the area where coil 11 extends in the second portion 45 is located further inside than the center position (center position of width in the X-axis direction) of the second portion 45 (opposite side of torsion bar 7) (here, located further inside than slit 45c). The center position (center position of width in the X-axis direction) of coil 11 in the area where coil 11 extends in the second portion 46 is located further inside than the center position (center position of width in the X-axis direction) of the second portion 46 (opposite side of torsion bar 8) (here, located further inside than slit 46c).

[0059] like Figure 3 As shown, when viewed from directions perpendicular to the X and Y axes, the two side surfaces 7a of the torsion bar 7 and the outer side surface 45b of the second part 45 are connected to each other in a manner of continuous curvature in their respective connecting regions. That is, when viewed from directions perpendicular to the X and Y axes, the outer edges of the torsion bar 7 and the outer edges of the second part 45 are connected to each other in a manner of continuous curvature in their respective connecting regions. When viewed from directions perpendicular to the X and Y axes, the two side surfaces 7a of the torsion bar 7 and the inner side (mirror part 41 side) of the support 3 are connected to each other in a manner of continuous curvature in their respective connecting regions. That is, when viewed from directions perpendicular to the X and Y axes, the outer edge of the torsion bar 7 and the inner edge of the support 3 are connected to each other in a manner of continuous curvature in their respective connecting regions. The curvature of the outer edge of the torsion bar 7 in the region connected to the outer edge of the second part 45 is smaller than the curvature of the outer edge of the torsion bar 7 in the region connected to the inner edge of the support 3.

[0060] Similarly, when viewed from directions perpendicular to the X and Y axes, the two side surfaces of the torsion bar 8 and the outer side surface 46b of the second part 46 are connected to each other in a manner of continuous curvature in the interconnected regions (see reference). Figure 1 and Figure 2That is, when viewed from directions perpendicular to the X and Y axes, the outer edges of the torsion bar 8 and the outer edges of the second part 46 are connected to each other in a manner of continuous curvature in the respective interconnected regions. When viewed from directions perpendicular to the X and Y axes, the two side surfaces of the torsion bar 8 and the inner side surface 3a of the support 3 are connected to each other in a manner of continuous curvature in the respective interconnected regions (see reference). Figure 1 and Figure 2 That is, when viewed from directions perpendicular to the X and Y axes, the outer edge of the torsion bar 8 and the inner edge of the support portion 3 are connected to each other in a manner of continuous curvature in the interconnected regions. The curvature of the outer edge of the torsion bar 8 in the region connected to the outer edge of the second portion 46 is smaller than the curvature of the outer edge of the torsion bar 8 in the region connected to the inner edge of the support portion 3 (see reference). Figure 1 and Figure 2 ).

[0061] like Figure 3 As shown, coil 9 extends along side 3b of the outer side of support portion 3 (opposite to mirror portion 41). The center position (center of width in the X-axis direction) of the region where coil 9 extends in support portion 3 and is connected to torsion bar 7 is located outside (opposite to torsion bar 7) of the center position of that region. The center position (center of width in the X-axis direction) of the region where coil 9 extends in support portion 3 and is connected to torsion bar 8 is located outside (opposite to torsion bar 8) of the center position of that region (see reference). Figure 1 and Figure 2 ).

[0062] like Figure 4 As shown, a beam structure 31 is provided on the back side of the support portion 3 (the surface on the side of the magnetic field generating portion 10). When viewed from a direction perpendicular to the X and Y axes, the beam structure 31 extends in a ring shape along the frame-shaped support portion 3. The width of the portion of the beam structure 31 extending along the Y-axis (width in the X-axis direction) is smaller than the width of the portion of the beam structure 31 extending along the X-axis (width in the Y-axis direction). In the portion of the beam structure 31 extending along the X-axis, except for the middle portion that cuts across the Y-axis, multiple weight-reducing portions 31a are formed. The further away from the Y-axis, the larger the size of each weight-reducing portion 31a becomes.

[0063] The center position (center of width in the X-axis direction) of the portion of beam structure 31 extending along the Y-axis on the side of torsion bar 7 is located further outward (opposite to torsion bar 7) than the center position (center of width in the X-axis direction) of the portion of support 3 extending along the Y-axis and connected to torsion bar 7. Similarly, the center position (center of width in the X-axis direction) of the portion of beam structure 31 extending along the Y-axis on the side of torsion bar 8 is located further outward (opposite to torsion bar 8) than the center position (center of width in the X-axis direction) of the portion of support 3 extending along the Y-axis and connected to torsion bar 8.

[0064] Multiple beam structures 47, 48, and 49 are provided on the back side of the mirror section 41 (the surface on the side of the magnetic field generating section 10). When viewed from a direction perpendicular to the X and Y axes, beam structure 47 extends in a V-shape from the intersection point O toward the two edges of the connecting region 40a in the X-axis direction. When viewed from a direction perpendicular to the X and Y axes, beam structure 48 extends in a V-shape from the intersection point O toward the two edges of the connecting region 40b in the X-axis direction. When viewed from a direction perpendicular to the X and Y axes, beam structure 49 extends in an X-shape from the intersection point O toward both sides in the X-axis direction.

[0065] [Functions and Effects]

[0066] In the mirror assembly 1, a pair of torsion bars 7 and 8 connected to the frame 42 are positioned on the X-axis, and a pair of connection regions 40a and 40b connecting the mirror part 41 and the frame 42 are located on both sides of the mirror part 41 in the Y-axis direction. Therefore, even if the movable part 4 is made to swing at high speed around the X-axis, compared to the case where only a pair of connection regions 40a and 40b are located on the X-axis, or the case where the mirror part 41 and the frame 42 are connected only in one connection region 40a (or 40b), the stress generated in each connection region 40a and 40b is reduced due to the torsion of the pair of torsion bars 7 and 8. Furthermore, in the mirror assembly 1, when viewed from a direction perpendicular to both the X-axis and Y-axis, the outer edge of the mirror part 41 and the inner edge of the frame 42 are connected in a manner of continuous curvature in each connection region 40a and 40b. Therefore, stress is less likely to concentrate in each connection region 40a and 40b. As described above, according to the mirror device 1, both bending of the mirror part 41 and breakage of the movable part 4 can be suppressed.

[0067] In the mirror assembly 1, a pair of connecting regions 40a and 40b are located on both sides of the mirror portion 41 on the Y-axis. This ensures sufficient distance between each torsion bar 7 and 8 and each connecting region 40a and 40b (the torsion of the pair of torsion bars 7 and 8 does not easily affect the distance between the connecting regions 40a and 40b). Therefore, the structure of the movable part 4 is simplified, while suppressing both bending of the mirror portion 41 and breakage of the movable part 4.

[0068] In the mirror assembly 1, the frame 42 includes a pair of first portions 43 and 44 connected to the mirror portion 41 and extending along the X-axis. The width of each first portion 43 and 44 in the Y-axis direction decreases as it moves away from each connecting region 40a and 40b. This allows the stress generated by the torsion of the pair of torsion bars 7 and 8 to be distributed to the narrower portions of each first portion 43 and 44, further reducing the stress generated in each connecting region 40a and 40b. Furthermore, it ensures the connection strength in each connecting region 40a and 40b, reducing the moment of inertia of the movable part 4 when rotating around the X-axis by the amount of the narrower width in each first portion 43 and 44. Reducing the moment of inertia of the movable part 4 when rotating around the X-axis is advantageous for enabling the movable part 4 to swing at high speed around the X-axis. In particular, the inner side 43a of the first part 43 is a concave curved surface that bends toward the opposite side of the mirror part 41 in a manner that gets closer to the outer side 43b of the first part 43 as it moves away from the connecting region 40a. The inner side 44a of the first part 44 is a concave curved surface that bends toward the opposite side of the mirror part 41 in a manner that gets closer to the outer side 44b of the first part 44 as it moves away from the connecting region 40b. Therefore, the stress caused by the torsion of the pair of torsion bars 7 and 8 can be dispersed more reliably, and the stress concentration in each of the first parts 43 and 44 can be suppressed.

[0069] Figure 5 (a) is a top view of the movable part 4 in the comparative example. Figure 5 (b) is a top view of the movable part 4 (the movable part 4 described above) of the embodiment. Figure 6 (a) is a top view of the movable part 4 in the comparative example. Figure 6 (b) is a top view of the movable part 4 in the embodiment. Figure 5 In the movable part 4 of the comparative example shown in (a), the width of each of the first parts 43 and 44 in the Y-axis direction is constant, and the width of the movable part 4 in the Y-axis direction is... Figure 5 (b) The width of the movable part 4 in the embodiment shown is the same. Figure 6 In the movable part 4 of the comparative example shown in (a), the width of each of the first parts 43 and 44 in the Y-axis direction is constant, and the width of the movable part 4 in the Y-axis direction is greater than that of the first part 43 and 44. Figure 6 (b) The width of the movable part 4 in the embodiment shown is small.

[0070] If Figure 5 (a) The movable part 4 of the comparative example shown is Figure 6 Comparing the movable part 4 of the comparative example shown in (a) with that of the comparative example, then in Figure 5 In the movable part 4 of the comparative example shown in (a), the moment of inertia of the movable part 4 increases when the X-axis is the axis of rotation. Figure 6In the movable part 4 of the comparative example shown in (a), the stress generated by the torsion of the pair of torsion bars 7 and 8 cannot be adequately mitigated. In contrast, with... Figure 5 Compared to the movable part 4 in the comparative example shown in (a), by... Figure 5 (b) and Figure 6 (b) The movable part 4 in the embodiment shown can reduce the moment of inertia of the movable part 4 when rotating around the X-axis. Furthermore, compared with... Figure 6 Compared to the movable part 4 in the comparative example shown in (a), by... Figure 5 (b) and Figure 6 (b) The movable part 4 of the embodiment shown can alleviate the stress caused by the torsion of a pair of torsion bars 7 and 8.

[0071] In the mirror device 1, in addition to the pair of first parts 43 and 44, the frame 42 also includes a pair of second parts 45 and 46 that are connected to a pair of torsion bars 7 and 8 and extend along the Y-axis. As a result, the stress generated by the torsion of the pair of torsion bars 7 and 8 can be dispersed to the portion between the connected first parts 43 and 44 and the connected second parts 45 and 46, thereby further reducing the stress generated in the connection regions 40a and 40b.

[0072] In the mirror device 1, when viewed from a direction perpendicular to the X and Y axes, the inner edges of each first portion 43, 44 and the inner edges of each second portion 45, 46 are connected to each other in a manner of continuous curvature in the interconnected regions. As a result, stress concentration can be suppressed in the regions where the inner edges of each first portion 43, 44 and the inner edges of each second portion 45, 46 are interconnected.

[0073] In the mirror device 1, when viewed from a direction perpendicular to the X and Y axes, the outer edges of each first portion 43, 44 and the outer edges of each second portion 45, 46 are connected to each other in a manner of continuous curvature in the interconnected regions. As a result, stress concentration can be suppressed in the regions where the outer edges of each first portion 43, 44 and the outer edges of each second portion 45, 46 are interconnected.

[0074] In the mirror device 1, the lengths of the first portions 43 and 44 in the X-axis direction are longer than the lengths of the second portions 45 and 46 in the Y-axis direction. This suppresses the increase in the moment of inertia of the movable part 4 when rotating around the X-axis, while ensuring sufficient distance between each torsion bar 7 and 8 and each connecting region 40a and 40b (the torsion of a pair of torsion bars 7 and 8 does not easily affect the distance between each connecting region 40a and 40b).

[0075] In the mirror device 1, the distances between the connecting region 40a and the second part 45, the distances between the connecting region 40a and the second part 46, the distances between the connecting region 40b and the second part 45, and the distances between the connecting region 40b and the second part 46 are all longer than the distances between the X-axis and the first part 43 and the X-axis and the first part 44. This suppresses the increase in the moment of inertia of the movable part 4 when rotating about the X-axis, while ensuring sufficient distance between each torsion bar 7, 8 and each connecting region 40a, 40b (the torsion of a pair of torsion bars 7, 8 does not easily affect the distance between each connecting region 40a, 40b).

[0076] In the mirror device 1, the shape of the mirror part 41 when viewed from a direction perpendicular to the X and Y axes is an ellipse having a major axis along the X axis. This suppresses the increase in the moment of inertia of the movable part 4 when rotating around the X axis, while ensuring a sufficient area of ​​the mirror surface 41a.

[0077] In the mirror assembly 1, the width of each connecting region 40a, 40b in the X-axis direction is less than 30% of the width of the mirror portion 41 in the X-axis direction. This ensures both sufficient connection strength between the mirror portion 41 and the frame 42, and sufficient distance between each torsion bar 7, 8 and each connecting region 40a, 40b.

[0078] In the mirror assembly 1, the coil 11 extends along the outer sides 43b and 44b of each of the first portions 43 and 44, and along the inner sides 45a and 46a of each of the second portions 45 and 46. Therefore, because the coil 11 is located away from the connecting regions 40a and 40b and the torsion bars 7 and 8, the stress generated in the coil 11 due to the torsion of the pair of torsion bars 7 and 8 is reduced. Thus, metal fatigue of the coil 11 can be suppressed. As described above, in each connecting region 40a and 40b, the stress is reduced to a level that prevents the mirror portion 41 from bending and the movable portion 4 from breaking, but stress that could lead to metal fatigue of the coil 11 may remain. Therefore, it is effective from a safety perspective to have the coil 11 extend along the outer sides 43b and 44b of each of the first portions 43 and 44, and to separate the coil 11 from each connecting region 40a and 40b.

[0079] In the mirror assembly 1, a slit 45c is formed in the first portion 43 between the torsion bar 7 and the mirror portion 41, and a slit 46c is formed in the first portion 44 between the torsion bar 8 and the mirror portion 41. Therefore, the torsion of the pair of torsion bars 7 and 8 is less likely to affect the coil 11. Thus, metal fatigue of the coil 11 can be suppressed. Furthermore, the torsion of the pair of torsion bars 7 and 8 is also less likely to affect the connecting areas 40a and 40b. Therefore, bending of the mirror portion 41 and breakage of the movable part 4 can be suppressed more reliably.

[0080] In the mirror device 1, the coil 9 extends along the side 3b outside the support portion 3. Therefore, because the coil 9 is far from each torsion bar 7, 8, the stress generated in the coil 9 due to the torsion of the pair of torsion bars 7, 8 is reduced. Thus, metal fatigue of the coil 9 can be suppressed.

[0081] In the mirror assembly 1, the curvature of the outer edge of the torsion bar 7 in the region connected to the outer edge of the second part 45 is smaller than the curvature of the outer edge of the torsion bar 7 in the region connected to the inner edge of the support part 3. Similarly, the curvature of the outer edge of the torsion bar 8 in the region connected to the outer edge of the second part 46 is smaller than the curvature of the outer edge of the torsion bar 8 in the region connected to the inner edge of the support part 3. By reducing the curvature of the outer edges of each torsion bar 7 and 8 in the region connected to the frame 42, the stress generated in the frame 42 due to the torsion of the pair of torsion bars 7 and 8 can be reduced. On the other hand, by increasing the curvature of the outer edges of each torsion bar 7 and 8 in the region connected to the support part 3, the length of each torsion bar 7 and 8 can be ensured, thereby reducing the stress generated by the torsion of the pair of torsion bars 7 and 8. Furthermore, regarding the stress generated by the torsion of the pair of torsion bars 7 and 8, it is more effective to reduce it on the side of the movable part 4, which performs linear movement, than to reduce it on the support part 3 side.

[0082] In the mirror device 1, a beam structure 31 extending in a ring along the frame-shaped support portion 3 is provided on the back side of the support portion 3. This helps to suppress deformation of the support portion 3. Furthermore, because the beam structure 31 is continuously formed, stress concentration is suppressed compared to cases where the beam structure 31 is discontinuously formed. Additionally, in the mirror device 1, the width (width in the X-axis direction) of the portion of the beam structure 31 extending along the Y-axis is smaller than the width (width in the Y-axis direction) of the portion extending along the X-axis. This reduces the moment of inertia of the support portion 3 when rotating around the Y-axis. Furthermore, in the mirror device 1, the dimensions of each weight-reducing portion 31a formed in the portion of the beam structure 31 extending along the X-axis increases the further away from the Y-axis. This further reduces the moment of inertia of the support portion 3 when rotating around the Y-axis. Also, in the mirror device 1, no weight-reducing portion 31a is formed in the middle portion of the beam structure 31 that cuts across the Y-axis. Therefore, the moment of inertia of the support portion 3 when rotating around the X-axis can be increased, suppressing the oscillation of the support portion 3 around the X-axis. Furthermore, in the mirror device 1, the center position of the portion of the beam structure 31 extending along the Y-axis is located further outward than the center position of the portion of the support portion 3 extending along the Y-axis. Therefore, because the portion of the beam structure 31 extending along the Y-axis on the side of the torsion bar 7 is far from the torsion bar 7, and the portion of the beam structure 31 extending along the Y-axis on the side of the torsion bar 8 is far from the torsion bar 8, the stress generated in the beam structure 31 due to the torsion of the pair of torsion bars 7 and 8 can be reduced.

[0083] In the mirror assembly 1, a beam structure 47 extending in a V-shape from the two edges of the connecting region 40a in the direction of intersection O toward the X-axis, and a beam structure 48 extending in a V-shape from the two edges of the connecting region 40b in the direction of intersection O toward the X-axis, are provided on the back side of the mirror part 41. As a result, the stress generated in each connecting region 40a and 40b due to the torsion of the pair of torsion bars 7 and 8 can be reduced.

[0084] [Variation Example]

[0085] This invention is not limited to the embodiments described above. For example, the materials and shapes of each part are not limited to those described above, and various materials and shapes can be used. As an example, if the frame 42 is formed in a frame shape, it can have a polygonal shape other than a quadrilateral when viewed from a direction perpendicular to the X and Y axes. In addition, the mirror surface 41a can be formed on at least a portion of the mirror part 41. In addition, the shape of the mirror part 41 when viewed from a direction perpendicular to the X and Y axes can also be a circular shape, etc. In addition, the driving method of the mirror device 1 is not limited to electromagnetic driving, but can also be electrostatic driving, piezoelectric driving, thermal driving, etc. In addition, the base 2 and the pair of torsion bars 5 and 6 may not be provided on the mirror device 1, and the support part 3 may function as the base.

[0086] Furthermore, when a pair of torsion bars 7 and 8 are positioned on either side of the movable portion 4 on the first axis, a pair of connecting regions 40a and 40b can be located on either side of the mirror portion 41 in a direction parallel to the second axis perpendicular to the first axis. For example, when a pair of portions (parts forming opposite sides) of a polygonal frame 42 intersect the second axis, the pair of connecting regions 40a and 40b can be positioned within these portions. As with the above-described embodiment, the pair of connecting regions 40a and 40b can also be positioned within a pair of first portions 43 and 44. Alternatively, regardless of the shape of the frame 42, the pair of connecting regions 40a and 40b can be positioned in a region 45 degrees to 135 degrees in one direction centered on the intersection of the first and second axes, and in a region 45 degrees to 135 degrees in the other direction. Furthermore, each connecting region 40a and 40b can also be composed of multiple physically separate regions.

[0087] Furthermore, the width of the first portion 43 in the Y-axis direction decreases the further away from the connecting region 40a, the smaller it becomes. Figure 7 As shown in (a), the inner side 43a of the first portion 43 can also be a flat surface that slopes towards the outer side 43b of the first portion 43 as it moves away from the connecting region 40a. Similarly, if the width of the first portion 44 in the Y-axis direction decreases as it moves away from the connecting region 40b, then... Figure 7As shown in (a), the inner side 44a of the first part 44 can also be a flat surface that is inclined in such a way that it is closer to the outer side 44b of the first part 44 the further away from the connecting region 40b.

[0088] Furthermore, the width of the first portion 43 in the Y-axis direction decreases the further away from the connecting region 40a, the smaller it becomes. Figure 7 As shown in (b), the inner side 43a of the first portion 43 can also be a stepped curved surface that curves closer to the outer side 43b of the first portion 43 as it moves away from the connecting region 40a. Similarly, if the width of the first portion 44 in the Y-axis direction decreases further away from the connecting region 40b, then... Figure 7 As shown in (b), the inner side 44a of the first part 44 can also be a stepped curved surface that is bent closer to the outer side 44b of the first part 44 the further away from the connecting region 40b.

[0089] Furthermore, in the movable part 4 of the third modified example, such as Figure 8 As shown, the mirror portion 41 is connected to the frame 42 at each of a pair of connecting regions (first connecting regions) 40a and 40b on both sides of the mirror portion 41 in the Y-axis direction, and at each of a pair of connecting regions (second connecting regions) 40c and 40d on both sides of the mirror portion 41 in the X-axis direction. The area between the mirror portion 41 and the frame 42, excluding the pair of connecting regions 40a and 40b and the pair of connecting regions 40c and 40d, is space. That is, the mirror portion 41 and the frame 42 are connected to each other only at the pair of connecting regions 40a and 40b and the pair of connecting regions 40c and 40d.

[0090] The side surface 41b of the mirror portion 41 and the inner side surface 43a of the first portion 43 are connected in a manner of continuous curvature in the connecting region 40a. The side surface 41b of the mirror portion 41 and the inner side surface 44a of the first portion 44 are connected in a manner of continuous curvature in the connecting region 40b. That is, when viewed from a direction perpendicular to the X-axis and Y-axis, the outer edge of the mirror portion 41 and the inner edge of the frame 42 are connected in a manner of continuous curvature in each connecting region 40a, 40b.

[0091] The side surface 41b of the mirror portion 41 and the inner side surface 45a of the second portion 45 are connected in a manner of continuous curvature in the connecting region 40d. The side surface 41b of the mirror portion 41 and the inner side surface 46a of the second portion 46 are connected in a manner of continuous curvature in the connecting region 40c. That is, when viewed from a direction perpendicular to the X-axis and Y-axis, the outer edge of the mirror portion 41 and the inner edge of the frame 42 are connected in a manner of continuous curvature in each connecting region 40c, 40d.

[0092] The width of the first portion 43 in the Y-axis direction decreases the further away from the connecting region 40a. Here, the outer side surface 43b of the first portion 43 is a flat surface parallel to the X-axis, and the inner side surface 43a of the first portion 43 is a surface that gets closer to the side surface 43b the further away from the connecting region 40a. The width of the first portion 44 in the Y-axis direction decreases the further away from the connecting region 40b. Here, the outer side surface 44b of the first portion 44 is a flat surface parallel to the X-axis, and the inner side surface 44a of the first portion 44 is a surface that gets closer to the side surface 44b the further away from the connecting region 40b.

[0093] Furthermore, the inner side 43a of the first portion 43 can also be a flat surface that slopes towards the outer side 43b of the first portion 43 as it moves away from the connecting region 40a. Similarly, the inner side 44a of the first portion 44 can also be a flat surface that slopes towards the outer side 44b of the first portion 44 as it moves away from the connecting region 40b. Additionally, the inner side 43a of the first portion 43 can also be a curved surface that is bent into a stepped shape as it moves towards the outer side 43b of the first portion 43 as it moves away from the connecting region 40a. Similarly, the inner side 44a of the first portion 44 can also be a curved surface that is bent into a stepped shape as it moves towards the outer side 44b of the first portion 44 as it moves away from the connecting region 40b.

[0094] The width of the second portion 45 in the X-axis direction decreases the further away from the connecting region 40d. Here, the outer side surface 45b of the second portion 45 is a flat surface parallel to the Y-axis, and the inner side surface 45a of the second portion 45 is a surface that gets closer to side surface 45b the further away from the connecting region 40d. The width of the second portion 46 in the X-axis direction decreases the further away from the connecting region 40c. Here, the outer side surface 46b of the second portion 46 is a flat surface parallel to the Y-axis, and the inner side surface 46a of the second portion 46 is a surface that gets closer to side surface 46b the further away from the connecting region 40c.

[0095] Furthermore, the inner side 45a of the second part 45 can also be a flat surface that slopes towards the outer side 45b of the second part 45 as it moves away from the connecting region 40d. Similarly, the inner side 46a of the second part 46 can also be a flat surface that slopes towards the outer side 46b of the second part 46 as it moves away from the connecting region 40c. Additionally, the inner side 45a of the second part 45 can also be a curved surface that is bent into a stepped shape as it moves towards the outer side 45b of the second part 45 as it moves away from the connecting region 40d. Similarly, the inner side 46a of the second part 46 can also be a curved surface that is bent into a stepped shape as it moves towards the outer side 46b of the second part 46 as it moves away from the connecting region 40c.

[0096] In the mirror device 1 with the movable part 4 of the third variation, a pair of torsion bars 7 and 8 connected to the frame-like frame 42 are arranged on the X-axis, and a pair of connection regions 40a and 40b connecting the mirror part 41 and the frame-like frame 42 are located on both sides of the mirror part 41 in the Y-axis direction. Furthermore, a pair of connection regions 40c and 40d connecting the mirror part 41 and the frame-like frame 42 are located on both sides of the mirror part 41 in the X-axis direction. Therefore, even if the movable part 4 is made to swing at high speed around the X-axis, for example, compared to the case where only a pair of connection regions 40a and 40b are located on the X-axis, or the case where the mirror part 41 and the frame-like frame 42 are connected to each other in only one connection region 40a (or 40b), the stress generated in each connection region 40a, 40b, 40c, and 40d due to the torsion of the pair of torsion bars 7 and 8 will be smaller. Furthermore, in the mirror device 1 with the movable part 4 of the third modification, when viewed from directions perpendicular to the X and Y axes, the outer edge of the mirror part 41 and the inner edge of the frame 42 are connected in a manner of continuous curvature at each connection region 40a, 40b. Therefore, stress is less likely to concentrate at each connection region 40a, 40b. As described above, according to the mirror device 1 with the movable part 4 of the third modification, both bending of the mirror part 41 and breakage of the movable part 4 can be suppressed.

[0097] In the mirror device 1 with the movable part 4 of the third modified example, when viewed from a direction perpendicular to the X and Y axes, the outer edge of the mirror part 41 and the inner edge of the frame 42 are connected in a manner of continuous curvature at each connection region 40c and 40d. As a result, stress is less likely to concentrate at each connection region 40c and 40d.

[0098] In the mirror device 1 with the movable part 4 in the third modified example, a pair of connecting regions 40c and 40d are located on both sides of the mirror part 41 on the X-axis. As a result, the rotational inertia of the movable part around the X-axis can be reduced.

[0099] When a pair of torsion bars 7 and 8 are positioned on either side of the movable part 4 along the first axis, a pair of connecting regions 40c and 40d can be located on either side of the mirror part 41 in a direction parallel to the first axis. As an example, when a pair of portions (parts forming opposite sides) of a frame 42 formed as a polygonal frame intersect the first axis, the pair of connecting regions 40c and 40d can be positioned within these portions. In the case of the movable part 4 in the third variation, the pair of connecting regions 40c and 40d can also be positioned within a pair of second portions 45 and 46. Alternatively, regardless of the shape of the frame 42, the pair of connecting regions 40c and 40d can be positioned in a region 45 degrees to 135 degrees in one direction from the second axis, centered at the intersection of the first and second axes, and in a region 45 degrees to 135 degrees in the other direction from the second axis. Furthermore, each connecting region 40c and 40d can also be composed of multiple physically separate regions.

[0100] In the mirror device 1 with the movable part 4 of the third modified example, the width of each first portion 43, 44 in the Y-axis direction decreases the further away from each connecting region 40a, 40b, and the width of each second portion 45, 46 in the X-axis direction decreases the further away from each connecting region 40c, 40d. This allows the stress generated by the torsion of the pair of torsion bars 7, 8 to be distributed to the portions of each first portion 43, 44 and each second portion 45, 46 where the width decreases, further reducing the stress generated in each connecting region 40a, 40b, 40c, 40d. Furthermore, it ensures the connection strength in each connecting region 40a, 40b, 40c, 40d, while reducing the moment of inertia of the movable part 4 about the X-axis by the amount of width decrease in each first portion 43, 44 and each second portion 45, 46. However, it is also possible that the width of each second part 45, 46 in the X-axis direction is smaller the further away from each connecting region 40c, 40d.

[0101] In the mirror assembly 1 with the movable part 4 of the third modification, a slit 45c between the torsion bar 7 and the mirror part 41 is formed in the first part 43, and a slit 46c between the torsion bar 8 and the mirror part 41 is formed in the first part 44. Furthermore, the curvature of the outer edge of the torsion bar 7 in the region connected to the outer edge of the second part 45 is smaller than the curvature of the outer edge of the torsion bar 7 in the region connected to the inner edge of the support part 3. Similarly, the curvature of the outer edge of the torsion bar 8 in the region connected to the outer edge of the second part 46 is smaller than the curvature of the outer edge of the torsion bar 8 in the region connected to the inner edge of the support part 3. Therefore, in the mirror assembly 1 with the movable part 4 of the third modification, stable support of the mirror part 41 is achieved through the four connecting regions 40a, 40b, 40c, and 40d, and the torsion of a pair of torsion bars 7 and 8 does not easily affect the pair of connecting regions 40c and 40d.

[0102] The structures described in the above embodiments are also applicable to the mirror device 1 equipped with the movable part 4 of the third variation. For example, when viewed from a direction perpendicular to the X and Y axes, the inner edges of each first portion 43, 44 and the inner edges of each second portion 45, 46 are connected to each other in a manner of continuous curvature in their respective interconnected regions. Furthermore, when viewed from a direction perpendicular to the X and Y axes, the outer edges of each first portion 43, 44 and the outer edges of each second portion 45, 46 are connected to each other in a manner of continuous curvature in their respective interconnected regions. Additionally, the length of each first portion 43, 44 in the X-axis direction is longer than the length of each second portion 45, 46 in the Y-axis direction. Furthermore, the distances between the connecting region 40a and the second portion 45, the connecting region 40a and the second portion 46, the connecting region 40b and the second portion 45, and the connecting region 40b and the second portion 46 are all longer than the distances between the X-axis and the first portion 43 and the X-axis and the first portion 44, respectively. Furthermore, when viewed from a direction perpendicular to the X and Y axes, the shape of the mirror portion 41 is an ellipse having a major axis along the X-axis. Additionally, the width of each connecting region 40a, 40b in the X-axis direction is less than 30% of the width of the mirror portion 41 in the X-axis direction. Furthermore, the coil 11 extends along the outer sides 43b, 44b of each of the first portions 43, 44, and along the inner sides 45a, 46a of each of the second portions 45, 46. Additionally, the coil 9 extends along the outer side 3b of the support portion 3. Furthermore, a beam structure 31 extending in a ring along the frame-like support portion 3 is provided on the back side of the support portion 3. Additionally, a beam structure 47 extending in a V-shape from the intersection point O toward the two edges of the connecting region 40a in the X-axis direction, and a beam structure 48 extending in a V-shape from the intersection point O toward the two edges of the connecting region 40b in the X-axis direction are provided on the back side of the mirror portion 41.

[0103] In the mirror device 1 with the movable part 4 of the third variation, the materials and shapes of each part are not limited to those described above, and various materials and shapes can be used. As an example, if the frame 42 is formed in a frame shape, it can have a polygonal shape other than a quadrilateral when viewed from a direction perpendicular to the X and Y axes. In addition, the mirror surface 41a can be formed on at least a portion of the mirror part 41. Furthermore, the shape of the mirror part 41 when viewed from a direction perpendicular to the X and Y axes can also be a circular shape, etc.

[0104] In the above-described embodiments and variations, a coil 11 for swinging the movable part 4 is provided on the movable part 4, and a coil 9 for swinging the support part 3 is provided on the support part 3. However, the coil for swinging the movable part 4 and the coil for swinging the support part 3 may also be provided on the support part 3 respectively, or a single coil for swinging both the movable part 4 and the support part 3 may also be provided on the support part 3.

[0105] The structures in the above-described embodiment or variation can be arbitrarily applied to the structures in other embodiments or variations.

[0106] Explanation of symbols

[0107] 1…Mirror assembly, 3…Support part, 4…Modible part, 7, 8…Torsion bar, 40a, 40b…Connecting area (first connecting area), 40c, 40d…Connecting area (second connecting area), 41…Mirror part, 42…Frame, 43, 44…First part, 45, 46…Second part.

Claims

1. A mirror device, wherein, have: Support section; Movable parts; A pair of first torsion bars, disposed on both sides of the movable part on the first axis, connect the movable part to the support part so that the movable part can swing about the first axis as a center line. A mirror surface is provided on one surface of the movable part. A beam structure is provided on the other surface of the movable part. The beam structure includes: The first beam structure, when viewed from a direction perpendicular to the first axis and a second axis perpendicular to the first axis, extends in a V-shape from the intersection of the first axis and the second axis toward a direction parallel to the second axis. The second beam structure, when viewed from the direction perpendicular to the first axis and the second axis, extends in a V-shape from the intersection point toward the other side in the direction parallel to the second axis. as well as The third beam structure, when viewed from a direction perpendicular to the first axis and the second axis, extends in an X-shape from the intersection point toward both sides in a direction parallel to the first axis. The movable part has: A frame-like frame, to which the pair of first torsion bars are connected; The mirror portion is located inside the frame. The mirror portion is connected to the frame at each of a pair of first connection regions on both sides of the mirror portion in the direction parallel to the second axis. The mirror surface is disposed on one surface of the mirror portion. The beam structure is disposed on the other surface of the mirror portion. The first beam structure has a pair of first front ends located on one side of the direction parallel to the second axis relative to the intersection point. The second beam structure has a pair of second front ends located on the other side of the direction parallel to the second axis relative to the intersection point. The third beam structure has a pair of third front ends located on one side of the intersection point in a direction parallel to the first axis, and a pair of fourth front ends located on the other side of the intersection point in a direction parallel to the first axis. The width between the pair of first front ends and the width between the pair of second front ends in the direction parallel to the first axis are each less than the width between the pair of third front ends and the width between the pair of fourth front ends in the direction parallel to the second axis.

2. The mirror device according to claim 1, wherein, The first beam structure extends in a V-shape, sandwiching the second axis. The second beam structure extends in a V-shape, sandwiching the second axis.

3. The mirror device according to claim 1, wherein, The third beam structure extends in an X-shape, sandwiching the first axis.

4. The mirror device according to claim 2, wherein, The third beam structure extends in an X-shape, sandwiching the first axis.

5. The mirror device according to claim 1, wherein, The area between the mirror and the frame, excluding the pair of first connecting areas, is space.

6. The mirror device according to claim 2, wherein, The area between the mirror and the frame, excluding the pair of first connecting areas, is space.

7. The mirror device according to claim 3, wherein, The area between the mirror and the frame, excluding the pair of first connecting areas, is space.

8. The mirror device according to claim 4, wherein, The area between the mirror and the frame, excluding the pair of first connecting areas, is space.

9. The mirror device according to claim 1, wherein, The mirror portion is connected to the frame at each of the pair of first connecting regions and at each of the pair of second connecting regions on both sides of the mirror portion in the direction parallel to the first axis. The area between the mirror and the frame, excluding the pair of first connecting regions and the pair of second connecting regions, is a space.

10. The mirror device according to claim 2, wherein, The mirror portion is connected to the frame at each of the pair of first connecting regions and at each of the pair of second connecting regions on both sides of the mirror portion in the direction parallel to the first axis. The area between the mirror and the frame, excluding the pair of first connecting regions and the pair of second connecting regions, is a space.

11. The mirror device according to claim 3, wherein, The mirror portion is connected to the frame at each of the pair of first connecting regions and at each of the pair of second connecting regions on both sides of the mirror portion in the direction parallel to the first axis. The area between the mirror and the frame, excluding the pair of first connecting regions and the pair of second connecting regions, is a space.

12. The mirror device according to claim 4, wherein, The mirror portion is connected to the frame at each of the pair of first connecting regions and at each of the pair of second connecting regions on both sides of the mirror portion in the direction parallel to the first axis. The area between the mirror and the frame, excluding the pair of first connecting regions and the pair of second connecting regions, is a space.

13. The mirror device according to any one of claims 5 to 12, wherein, The minimum width of each of the pair of first connecting regions in the direction parallel to the first axis is greater than the width between the pair of first front ends and the width between the pair of second front ends in the direction parallel to the first axis.

14. The mirror device according to any one of claims 1 to 12, wherein, The pair of first torsion bars each have a portion that is wider the closer it is to the movable part.

15. The mirror device according to claim 13, wherein, The pair of first torsion bars each have a portion that is wider the closer it is to the movable part.

16. The mirror device according to any one of claims 1 to 12, wherein, It also has: Base; and A pair of second torsion bars, disposed on both sides of the support portion on the second axis, connect the support portion to the base so that the support portion can swing about the second axis as the center line.

17. The mirror device according to claim 13, wherein, It also has: Base; and A pair of second torsion bars, disposed on both sides of the support portion on the second axis, connect the support portion to the base so that the support portion can swing about the second axis as the center line.

18. The mirror device according to claim 14, wherein, It also has: Base; and A pair of second torsion bars, disposed on both sides of the support portion on the second axis, connect the support portion to the base so that the support portion can swing about the second axis as the center line.

19. The mirror device according to claim 15, wherein, It also has: Base; and A pair of second torsion bars, disposed on both sides of the support portion on the second axis, connect the support portion to the base so that the support portion can swing about the second axis as the center line.

20. The mirror device according to claim 16, wherein, A fourth beam structure is provided in the support portion.

21. The mirror device according to claim 17, wherein, A fourth beam structure is provided in the support portion.

22. The mirror device according to claim 18, wherein, A fourth beam structure is provided in the support portion.

23. The mirror device according to claim 19, wherein, A fourth beam structure is provided in the support portion.

24. The mirror device according to claim 20, wherein, The support portion is frame-shaped. When viewed from a direction perpendicular to the first axis and the second axis, the fourth beam structure extends in a ring shape along the frame-shaped support portion.

25. The mirror device according to claim 21, wherein, The support portion is frame-shaped. When viewed from a direction perpendicular to the first axis and the second axis, the fourth beam structure extends in a ring shape along the frame-shaped support portion.

26. The mirror device according to claim 22, wherein, The support portion is frame-shaped. When viewed from a direction perpendicular to the first axis and the second axis, the fourth beam structure extends in a ring shape along the frame-shaped support portion.

27. The mirror device according to claim 23, wherein, The support portion is frame-shaped. When viewed from a direction perpendicular to the first axis and the second axis, the fourth beam structure extends in a ring shape along the frame-shaped support portion.

28. The mirror device according to claim 24, wherein, The width of the portion of the fourth beam structure extending in the direction parallel to the second axis is less than the width of the portion of the fourth beam structure extending in the direction parallel to the first axis.

29. The mirror device according to claim 25, wherein, The width of the portion of the fourth beam structure extending in the direction parallel to the second axis is less than the width of the portion of the fourth beam structure extending in the direction parallel to the first axis.

30. The mirror device according to claim 26, wherein, The width of the portion of the fourth beam structure extending in the direction parallel to the second axis is less than the width of the portion of the fourth beam structure extending in the direction parallel to the first axis.

31. The mirror device according to claim 27, wherein, The width of the portion of the fourth beam structure extending in the direction parallel to the second axis is less than the width of the portion of the fourth beam structure extending in the direction parallel to the first axis.

32. The mirror device according to claim 24, wherein, In the direction parallel to the first axis, the center position of the portion of the fourth beam structure extending in the direction parallel to the second axis is located on the opposite side of the center position of the portion of the support that extends in the direction parallel to the second axis and is connected to each of the pair of first torsion bars.

33. The mirror device according to claim 25, wherein, In the direction parallel to the first axis, the center position of the portion of the fourth beam structure extending in the direction parallel to the second axis is located on the opposite side of the center position of the portion of the support that extends in the direction parallel to the second axis and is connected to each of the pair of first torsion bars.

34. The mirror device according to claim 26, wherein, In the direction parallel to the first axis, the center position of the portion of the fourth beam structure extending in the direction parallel to the second axis is located on the opposite side of the center position of the portion of the support that extends in the direction parallel to the second axis and is connected to each of the pair of first torsion bars.

35. The mirror device according to claim 27, wherein, In the direction parallel to the first axis, the center position of the portion of the fourth beam structure extending in the direction parallel to the second axis is located on the opposite side of the center position of the portion of the support that extends in the direction parallel to the second axis and is connected to each of the pair of first torsion bars.

36. The mirror device according to claim 28, wherein, In the direction parallel to the first axis, the center position of the portion of the fourth beam structure extending in the direction parallel to the second axis is located on the opposite side of the center position of the portion of the support that extends in the direction parallel to the second axis and is connected to each of the pair of first torsion bars.

37. The mirror device according to claim 29, wherein, In the direction parallel to the first axis, the center position of the portion of the fourth beam structure extending in the direction parallel to the second axis is located on the opposite side of the center position of the portion of the support that extends in the direction parallel to the second axis and is connected to each of the pair of first torsion bars.

38. The mirror device according to claim 30, wherein, In the direction parallel to the first axis, the center position of the portion of the fourth beam structure extending in the direction parallel to the second axis is located on the opposite side of the center position of the portion of the support that extends in the direction parallel to the second axis and is connected to each of the pair of first torsion bars.

39. The mirror device according to claim 31, wherein, In the direction parallel to the first axis, the center position of the portion of the fourth beam structure extending in the direction parallel to the second axis is located on the opposite side of the center position of the portion of the support that extends in the direction parallel to the second axis and is connected to each of the pair of first torsion bars.

40. The mirror device according to claim 20, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

41. The mirror device according to claim 21, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

42. The mirror device according to claim 22, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

43. The mirror device according to claim 23, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

44. The mirror device according to claim 24, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

45. The mirror device according to claim 25, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

46. ​​The mirror device according to claim 26, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

47. The mirror device according to claim 27, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

48. The mirror device according to claim 28, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

49. The mirror device according to claim 29, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

50. The mirror device according to claim 30, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

51. The mirror device according to claim 31, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

52. The mirror device according to claim 32, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

53. The mirror device according to claim 33, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

54. The mirror device according to claim 34, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

55. The mirror device according to claim 35, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

56. The mirror device according to claim 36, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

57. The mirror device according to claim 37, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

58. The mirror device according to claim 38, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

59. The mirror device according to claim 39, wherein, It also has a coil, The coil is embedded in one side of the surface of the support portion. The fourth beam structure is disposed on the surface of the other side of the support portion.

60. The mirror device according to claim 16, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

61. The mirror device according to claim 17, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

62. The mirror device according to claim 18, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

63. The mirror device according to claim 19, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

64. The mirror device according to claim 20, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

65. The mirror device according to claim 21, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

66. The mirror device according to claim 22, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

67. The mirror device according to claim 23, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

68. The mirror device according to claim 24, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

69. The mirror device according to claim 25, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

70. The mirror device according to claim 26, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

71. The mirror device according to claim 27, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

72. The mirror device according to claim 28, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

73. The mirror device according to claim 29, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

74. The mirror device according to claim 30, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

75. The mirror device according to claim 31, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

76. The mirror device according to claim 32, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

77. The mirror device according to claim 33, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

78. The mirror device according to claim 34, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

79. The mirror device according to claim 35, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

80. The mirror device according to claim 36, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

81. The mirror device according to claim 37, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

82. The mirror device according to claim 38, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

83. The mirror device according to claim 39, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

84. The mirror device according to claim 40, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

85. The mirror device according to claim 41, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

86. The mirror device according to claim 42, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

87. The mirror device according to claim 43, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

88. The mirror device according to claim 44, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

89. The mirror device according to claim 45, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

90. The mirror device according to claim 46, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

91. The mirror device according to claim 47, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

92. The mirror device according to claim 48, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

93. The mirror device according to claim 49, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

94. The mirror device according to claim 50, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

95. The mirror device according to claim 51, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

96. The mirror device according to claim 52, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

97. The mirror device according to claim 53, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

98. The mirror device according to claim 54, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

99. The mirror device according to claim 55, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

100. The mirror device according to claim 56, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

101. The mirror device according to claim 57, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

102. The mirror device according to claim 58, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

103. The mirror device according to claim 59, wherein, The pair of first torsion bars extend in a straight line. The pair of second torsion bars extend in a meandering manner.

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