Adsorption type loading and unloading machine for plastic tray loading substrate

Abstract

The application provides a kind of plastic tray loading substrate suction type feeding and discharging machine, including rack, trolley, bunker, bunker bearing, translation stage, tray jacking mechanism, mechanical arm, tray handling mechanism and tray storage mechanism;Trolley is used to transport tray;Bunker is used to store tray;Bunker bearing is used to lift the bunker to separate trolley;Translation stage is connected with the bunker that is lifted by bunker bearing;Tray jacking mechanism is used to lift tray;Mechanical arm is used to adsorb and transfer substrate on tray;Tray handling mechanism is used to transfer tray;Tray storage mechanism is used to store tray transferred by tray handling mechanism.The application can batch feed and discharge substrate by the cooperation of each structure, solves the problem of low efficiency when manually feeding and discharging, greatly improves work efficiency, reduces labor intensity of workers and effectively reduces production cost.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor processing, in particular, to a kind of plastic tray loading substrate suction type feeding and discharging machine. BACKGROUND

[0002] With the development of semiconductor technology and the increase of production demand, it is necessary to improve the production efficiency of substrate. In the production and processing of substrate, substrate needs to be transported from one station to another. The traditional tray loading substrate feeding and discharging is carried out by manual method, which requires workers to take out and put back the substrate in the tray one by one. When the workers manually operate the substrate feeding and discharging, the speed of the workers is fast or slow, the operation is time-consuming and labor-consuming, the work efficiency is very low, the labor intensity is large, the safety factor is low, and the substrate may be contaminated and the material may be leaked.

[0003] Therefore, the inventor believes that it is necessary to provide a tray loading substrate feeding and discharging machine, which can realize the taking out and putting back of substrate from the tray, and can batch transport the substrate, so as to improve the production efficiency, solve the problem of low efficiency when manually feeding and discharging, and solve the problem of possible material leakage when manually feeding and discharging. SUMMARY

[0004] In view of the defects in the prior art, the purpose of the present application is to provide a kind of plastic tray loading substrate suction type feeding and discharging machine.

[0005] According to the plastic tray loading substrate suction type feeding and discharging machine provided by the present application, the machine rack is used as the installation basis, the trolley is used for transporting the tray and can move to the inside of the machine rack, the hopper is installed on the trolley and used for storing the tray, the hopper carrier is installed on the machine rack and located below the hopper, used for lifting the hopper to separate from the trolley, the translation stage is installed on the machine rack and located above the hopper, connected with the hopper lifted by the hopper carrier, the tray lifting mechanism is installed on the machine rack and located below the hopper, tightly connected with the trolley, used for lifting the tray, the mechanical arm is installed on the tray lifting mechanism, used for sucking and transferring the substrate on the tray, the tray carrying mechanism is installed on the machine rack, used for transferring the tray, and the tray storage mechanism is installed on the machine rack, used for storing the tray transferred by the tray carrying mechanism.

[0006] Preferably, the hopper carrier comprises a mounting seat installed on the machine rack, a guide wheel installed on the mounting seat and slidingly matched with the outer side wall of the trolley, left and right carriers for placing and moving the hopper, a cam mechanism, the left and right carriers are installed on the cam mechanism, the cam mechanism is drivingly connected with the left and right carriers, and a motor connected with the cam mechanism as a power source.

[0007] Preferably, the top of the left and right bearing is mounted with a pulley, the bottom of the hopper is in sliding fit with the pulley, and the hopper can move left and right through the pulley.

[0008] Preferably, the tray jacking mechanism comprises a mounting plate mounted on the rack, a safety lock mounted on the mounting plate for locking the trolley, a brake mechanism mounted on the mounting plate for buffering braking the movement of the trolley, a slide rail vertically mounted on the mounting plate, a jacking platform mounted on the slide rail and provided with a nylon plate for lifting the tray, and a jacking drive mechanism mounted on the mounting plate for driving the jacking platform to move up and down.

[0009] Preferably, a code reader for reading the ID on the substrate and a straightening cylinder for straightening the tray are further mounted on the mounting plate.

[0010] Preferably, the translation stage comprises a platform drive mechanism, a platform, and a guide column, the platform drive mechanism is tightly mounted on the rack, the platform is mounted on the platform drive mechanism, and the guide column is mounted on the platform; a circular hole is formed on the hopper, and the guide column is in plug fit with the circular hole to fix the hopper and the translation stage.

[0011] Preferably, the mechanical arm comprises an end vacuum chuck and a three-axis mechanical arm, the translation mechanism of the three-axis mechanical arm is mounted on the mounting plate, and the end vacuum chuck is mounted at the end of the three-axis mechanical arm.

[0012] Preferably, the tray carrying mechanism comprises a transfer drive mechanism and a jaw mechanism, the transfer drive mechanism is mounted on the rack, the jaw mechanism is mounted on the transfer drive mechanism, and the transfer drive mechanism drives the jaw mechanism to move up and down; the jaw mechanism comprises a base, a sliding block, a slide rail, a cylinder, and a jaw, the sliding block and the cylinder are both mounted on the base, the jaw is mounted on the slide rail, and the cylinder drives the jaw to clamp and release; a first sensor assembly is arranged on the transfer drive mechanism for detecting the lifting position of the translation stage.

[0013] Preferably, the tray storage mechanism comprises a positioning device and a tray clamping mechanism, the tray clamping mechanism is tightly mounted on the rack; the tray clamping mechanism comprises a slide rail, a cylinder, a mounting base, and a jaw, the slide rail and the cylinder are both mounted on the mounting base, the jaw is mounted on the slide rail, the jaw is driven by the cylinder to fold and release the bottom of the tray, and the positioning device is mounted on the mounting base.

[0014] Preferably, a second sensor assembly is arranged on the positioning device to sense the height of the tray, and a third sensor assembly is arranged on the tray clamping mechanism to sense the position of the tray.

[0015] Compared with the prior art, the application has the following beneficial effects:

[0016] 1、The substrate feeding and discharging machine can batch feed and discharge substrates through the cooperation of various structures, realizes taking and returning the substrate from the tray through the cooperation of the mechanical arm and the tray jacking mechanism, realizes storing and transferring batch trays through the cooperation of the tray carrying mechanism and the tray storage mechanism, solves the low efficiency problem of manual feeding and discharging, solves the possible material leakage problem of manual feeding and discharging, averages the substrate feeding and discharging, greatly improves the work efficiency, reduces the labor intensity of workers, and effectively reduces the production cost.

[0017] 2、The substrate feeding and discharging machine has a compact mechanism inside the machine, simple structure, convenient installation and maintenance, small overall volume, can expand the production capacity while reducing the production cost, and is helpful to expand the application range. BRIEF DESCRIPTION OF DRAWINGS

[0018] Other features, objects and advantages of the application will become more apparent after reading the detailed description of non-limiting embodiments with reference to the following drawings:

[0019] Figure 1 The drawings show the structure of the plastic tray loading substrate adsorption type feeding and discharging machine;

[0020] Figure 2 The drawings show the internal structure of the plastic tray loading substrate adsorption type feeding and discharging machine;

[0021] Figure 3 The drawings show the structure of the material bin bearing;

[0022] Figure 4 The drawings show the local schematic view of the cam mechanism on the material bin bearing;

[0023] Figure 5 The drawings show the structure of the tray jacking mechanism;

[0024] Figure 6 The drawings show the structure of the translation stage;

[0025] Figure 7 The drawings show the structure of the mechanical arm;

[0026] Figure 8Structure diagram of tray carrying mechanism;

[0027] Figure 9 Structure diagram of tray storage mechanism.

[0028] As shown in the figure:

[0029] Frame 1 Trolley 2 Bin 3

[0030] Bin carrier 4 Translation stage 5 Mechanical arm 6

[0031] Tray carrying mechanism 7 Tray storage mechanism 8 Tray jacking mechanism 9

[0032] Code reader 10 Mounting seat 41 Guide wheel 42

[0033] Left and right carriers 43 Cam mechanism 44 Motor 45

[0034] Platform driving mechanism 51 Platform 52 Guide column 53

[0035] End vacuum chuck 61 Three-axis mechanical arm 62 Load transfer driving mechanism 71

[0036] Claw mechanism 72 Positioning device 81 Tray clamping mechanism 82

[0037] Mounting plate 91 Safety lock 92 Jacking platform 93

[0038] Braking mechanism 94 Slide rail 95 Jacking driving mechanism 96 DETAILED DESCRIPTION

[0039] The present application will be described in detail below with specific embodiments. The following examples will help those skilled in the art to further understand the present application, but do not limit the present application in any form. It should be noted that for those skilled in the art, without departing from the concept of the present application, a number of changes and improvements can be made. These all belong to the protection scope of the present application.

[0040] As Figure 1 and 2As shown, according to the application, a plastic tray loading substrate adsorption type feeding and discharging machine is provided, which comprises a rack 1, a trolley 2, a bin 3, a bin bearing 4, a translation stage 5, a tray jacking mechanism 9, a mechanical arm 6, a tray carrying mechanism 7 and a tray storage mechanism 8. The rack 1 serves as a mounting base; the trolley 2 is used for transporting trays and can move into the interior of the rack 1; the bin 3 is installed on the trolley 2 and is used for storing trays; the bin bearing 4 is installed on the rack 1 and is located below the bin 3 and is used for jacking up the bin 3 to separate it from the trolley 2; the translation stage 5 is installed on the rack 1 and is located above the bin 3 and is connected with the bin 3 jacked up by the bin bearing 4; the tray jacking mechanism 9 is installed on the rack 1 and is located below the bin 3 and is tightly connected with the trolley 2 and is used for lifting the tray; the mechanical arm 6 is installed on the tray jacking mechanism 9 and is used for adsorbing and transferring the substrate on the tray; the tray carrying mechanism 7 is installed on the rack 1 and is used for transferring the tray; and the tray storage mechanism 8 is installed on the rack 1 and is used for storing the tray transferred by the tray carrying mechanism 7.

[0041] The application can realize the taking out and returning of the substrate from the tray, can batch carry the substrate, and can read the ID and count the substrate during the conveying process, improve the production efficiency, can solve the problem of low efficiency when manually feeding and discharging, and can solve the problem of possible material leakage when manually feeding and discharging.

[0042] As shown in Figure 3 and 4 The bin bearing 4 comprises a mounting seat 41, a guide wheel 42, left and right bearings 43, a cam mechanism 44 and a motor 45. The mounting seat 41 is installed on the rack 1. The guide wheel 42 is installed on the mounting seat 41 and is in sliding fit with the outer side walls of the two sides of the trolley 2 and is used for guiding the trolley 2. The left and right bearings 43 are used for placing and moving the bin 3; the left and right bearings 43 are installed on the cam mechanism 44, the cam mechanism 44 is in transmission connection with the left and right bearings 43; the motor 45 is connected with the cam mechanism 44 and serves as a power source, and the bin bearing 4 can jack up the bin 3 through the driving of the motor 45. The top of the left and right bearings 43 is provided with a pulley, and the bottom of the bin 3 is in sliding fit with the pulley, so that the bin 3 can move left and right under the driving of the pulley of the left and right bearings 43.

[0043] As shown in Figure 5As shown, the tray lifting mechanism 9 comprises a mounting plate 91, a safety lock 92, a brake mechanism 94, a slide rail 95, a lifting platform 93 and a lifting driving mechanism 96. The mounting plate 91 is mounted on the rack 1; the safety lock 92 is mounted on the mounting plate 91 and used to lock the trolley 2, which can be locked by a lock tongue on the trolley 2; the brake mechanism 94 is mounted on the mounting plate 91 and used as a buffer when the trolley 2 hits the mounting plate 91; the slide rail 95 is vertically mounted on the mounting plate 91; the lifting platform 93 is mounted on the slide rail 95 and provided with a nylon plate for lifting the tray; and the lifting driving mechanism 96 is mounted on the mounting plate 91 and used to drive the lifting platform 93 to move up and down. A code reader 10 and a straightening cylinder are also mounted on the mounting plate 91, the code reader 10 is used to read the ID on the substrate, and the straightening cylinder is used to straighten the tray.

[0044] As shown in Figure 6 , the translation stage 5 comprises a platform driving mechanism 51, a platform 52 and a guide column 53, the platform driving mechanism 51 is tightly mounted on the rack 1, the platform 52 is mounted on the platform driving mechanism 51, and the guide column 53 is mounted on the platform 52. A circular hole is formed on the hopper 3, and when the hopper 3 is lifted by the hopper carrier 4, the guide column 53 is inserted into the circular hole to fix the hopper 3 and the translation stage 5.

[0045] As shown in Figure 7 , the mechanical arm 6 comprises an end vacuum chuck 61 and a three-axis mechanical arm 62, the translation mechanism of the three-axis mechanical arm 62 is mounted on the mounting plate 91, and the end vacuum chuck 61 is mounted at the end of the three-axis mechanical arm 62. One axis of the three-axis mechanical arm 62 is a linear movement in the Z direction, and the other two axes are rotation axes. Through the three-axis mechanical arm 62, the end vacuum chuck 61 can move horizontally in the X-Y plane and move in the Z direction.

[0046] As shown in Figure 8 , the tray carrying mechanism 7 comprises a transfer driving mechanism 71 and a gripper mechanism 72, the transfer driving mechanism 71 is mounted on the rack 1, and the gripper mechanism 72 is mounted on the transfer driving mechanism 71. The transfer driving mechanism 71 drives the gripper mechanism 72 to move up and down. The gripper mechanism 72 comprises a base, a sliding block, a slide rail, a cylinder and a gripper. The sliding block and the cylinder are both mounted on the base, and the gripper is mounted on the slide rail. The cylinder drives the gripper to clamp and release. The transfer driving mechanism 71 is provided with a first sensor assembly for detecting whether the translation stage 5 is lifted into position.

[0047] As shown in Figure 9As shown, the tray storage mechanism 8 comprises a positioning device 81 and a tray clamping mechanism 82, the tray clamping mechanism 82 is fastened on the rack 1; the tray clamping mechanism 82 comprises a slide rail, a cylinder, a mounting base and a clamping jaw, the slide rail and the cylinder are both mounted on the mounting base, the clamping jaw is mounted on the slide rail, the clamping jaw is driven to close and release the tray bottom by the cylinder, and the positioning device 81 is mounted on the mounting base. The second sensor assembly is arranged on the positioning device 81 for sensing the height of the tray, and the third sensor assembly is arranged on the tray clamping mechanism 82 for sensing the position of the tray. When the tray is sent to the designated position by the tray carrying mechanism 7, the clamping jaw closes to hold the tray bottom, the tray carrying mechanism 7 returns to the original position, and the positioning device 81 plays a positioning role on the tray sent up. When the tray carrying mechanism 7 continues to transport the tray to the designated position, the tray above is lifted off the clamping jaw, the clamping jaw is released, and then closes to hold the tray sent up. When the tray accumulates a certain number and reaches a certain height, the second sensor assembly on the positioning device 81 senses it, and the accumulated tray is put back to the trolley 2 by the tray carrying mechanism 7 and the tray jacking mechanism 9.

[0048] The present application can realize the functions of feeding and discharging.

[0049] The feeding process is as follows: the trolley 2 loaded with trays reaches the designated position after being locked by the guide wheel 42, there is a magazine 3 for storing trays on the trolley 2, a magazine carrier 4 below the magazine 3 lifts the magazine 3 and separates it from the feeding trolley 2, the magazine carrier 4 is installed on the rack 1 and is connected with the translation stage 5 above the magazine 3, the translation stage 5 is installed on the rack 1. The magazine 3 is connected with the guide column 53 on the transmission mechanism through the round hole, and the left and right movement of the magazine 3 can be realized through the translation stage 5, and the large plate can be moved to the designated position. There is a tray jacking mechanism 9 below the magazine 3 for lifting the tray, after the tray loaded with the substrate is lifted to the designated position by the tray jacking mechanism 9, a whole column of cylinders will align the position of the tray, after the sensor detects that the tray reaches the designated position, the code reader 10 will be extended to read the ID on the substrate, after the reading is completed, the mechanical arm 6 will suck and move the substrate to the next working area, and the substrate will be transported to the next station on the flow channel. After the mechanical arm 6 completely leaves the working area of the tray jacking mechanism 9, the empty tray will be carried to the tray storage mechanism 8 at the top of the rack by the tray carrying mechanism 7, when a certain number is reached, the empty tray will be moved back to the magazine 3 by the tray carrying mechanism 7 and the tray jacking mechanism 9, and then the magazine 3 will be transported out together with the trolley 2.

[0050] The unloading process is as follows: basically the same as the feeding process, the only difference is that the feeding port of the unloading machine has an additional flow channel, the feeding trolley 2 loaded with empty trays passes through the guide wheel 42 of the rack 1 to reach the designated position and is locked, when the substrate passes through the flow channel to reach the designated position, the mechanical arm 6 rotates to the designated position to suck the substrate, at the same time, the translation stage 5 and the tray lifting mechanism 9 move the tray loaded with the substrate to the designated position, the substrate is placed in the empty tray loaded in the hopper 2, the whole column of cylinders arranges the tray position, the code reader 10 extends to take a photo, the mechanical arm 6 places the substrate on the tray, the tray is carried to the tray storage mechanism 8 by the tray carrying mechanism 7, when a certain number is reached, the tray loaded with the substrate is moved to the empty hopper 3 through the tray carrying mechanism 7 and the tray lifting mechanism 6, and then the hopper 3 is transported out together with the trolley 2.

[0051] The present application can realize automatic batch feeding and unloading of trays and substrates, effectively avoiding the low efficiency of manual feeding and unloading, and more avoiding the possibility of material leakage during manual feeding and unloading. The present application can realize batch feeding and unloading of substrates, and the feeding and unloading operation of the substrates in the tray only needs the worker to push the feeding trolley loaded with the tray in and out, the rest is completely automatic operation, which can greatly improve the work efficiency, reduce the labor intensity of workers, and at the same time, the feeding and unloading of the substrate is averaged, the internal mechanism of the machine is compact, the overall volume is small, and the production cost can be effectively reduced.

[0052] In the description of the present application, it should be understood that the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0053] The specific embodiments of the present application have been described above. It should be understood that the present application is not limited to the above specific embodiments, and those skilled in the art can make various changes or modifications within the scope of the claims, which does not affect the essential content of the present application. The embodiments of the present application and the features in the embodiments can be arbitrarily combined with each other without conflict.

Claims

1. A suction-type loading and unloading machine for loading substrates onto plastic pallets, characterized in that, include: Rack (1): serves as the mounting base; Trolley (2): used for transporting pallets and capable of moving into the frame (1); hopper (3): installed on the trolley (2) for storing the pallet; The hopper support (4) is installed on the frame (1) and located below the hopper (3) to lift the hopper (3) away from the trolley (2). Translation platform (5): Installed on the frame (1) and located above the hopper (3), and connected to the hopper (3) which is supported by the hopper support (4); Pallet lifting mechanism (9): Installed on the frame (1) and located below the hopper (3), and securely connected to the trolley (2), for lifting the pallet; Robotic arm (6): mounted on pallet lifting mechanism (9) for adsorbing and transferring substrates on the pallet; Pallet handling mechanism (7): mounted on the frame (1) for transferring the pallet; Pallet storage mechanism (8): Installed on the frame (1) for storing the pallets transferred by the pallet handling mechanism (7); The silo carrying (4) includes: Mounting base (41): mounted on the frame (1); Guide wheel (42): mounted on the mounting base (41) and slidingly engaged with the outer side wall of the trolley (2); Left and right loads (43): used for placing and moving the hopper (3); Cam mechanism (44): The left and right bearings (43) are mounted on the cam mechanism (44), and the cam mechanism (44) is connected to the left and right bearings (43) in a transmission manner; Motor (45): Connected to the cam mechanism (44) as a power source; The top of the left and right bearings (43) is equipped with pulleys, and the bottom of the hopper (3) is slidably engaged with the pulleys. The hopper (3) can move left and right through the pulleys. The pallet lifting mechanism (9) includes: Mounting plate (91): mounted on the frame (1): Safety lock (92): Installed on the mounting plate (91) for locking the trolley (2); Braking mechanism (94): mounted on the mounting plate (91) for cushioning the movement of the trolley (2); Slide rail (95); vertically mounted on the mounting plate (91); Lifting platform (93): Installed on the slide rail (95), on which a nylon plate is provided for lifting the pallet; Lifting drive mechanism (96): mounted on the mounting plate (91), used to drive the lifting platform (93) to move up and down; The translation platform (5) includes: a platform drive mechanism (51), a platform (52) and a guide column (53). The platform drive mechanism (51) is fixedly installed on the frame (1), the platform (52) is installed on the platform drive mechanism (51), and the guide column (53) is installed on the platform (52). The hopper (3) has a round hole, and the guide post (53) is inserted into the round hole to fix the hopper (3) and the translation platform (5).

2. The adsorption-type loading and unloading machine for loading substrates onto plastic pallets as described in claim 1, characterized in that, The mounting plate (91) is also equipped with a barcode reader (10) and an alignment cylinder. The barcode reader (10) is used to read the ID on the substrate, and the alignment cylinder is used to align the trays.

3. The adsorption-type loading and unloading machine for loading substrates onto plastic pallets as described in claim 1, characterized in that, The robotic arm (6) includes an end vacuum suction cup (61) and a three-axis robotic arm (62). The translation mechanism of the three-axis robotic arm (62) is mounted on the mounting plate (91), and the end vacuum suction cup (61) is mounted on the end of the three-axis robotic arm (62).

4. The adsorption-type loading and unloading machine for loading substrates onto plastic pallets as described in claim 1, characterized in that, The pallet handling mechanism (7) includes: a transfer drive mechanism (71) and a gripper mechanism (72). The transfer drive mechanism (71) is mounted on the frame (1), and the gripper mechanism (72) is mounted on the transfer drive mechanism (71). The transfer drive mechanism (71) drives the gripper mechanism (72) to perform lifting and lowering movements. The gripper mechanism (72) includes: a base, a slider, a slide rail, a cylinder and a gripper. The slider and the cylinder are both mounted on the base, and the gripper is mounted on the slide rail. The cylinder drives the gripper to clamp and release. The transfer drive mechanism (71) is equipped with a first sensor assembly for detecting the lifting position of the translation stage (5).

5. The adsorption-type loading and unloading machine for loading substrates onto plastic pallets as described in claim 1, characterized in that, The pallet storage mechanism (8) includes: a positioning device (81) and a pallet clamping mechanism (82), the pallet clamping mechanism (82) being fastened to the frame (1); The pallet clamping mechanism (82) includes a slide rail, a cylinder, a mounting base, and grippers. The slide rail and the cylinder are both mounted on the mounting base. The grippers are mounted on the slide rail. The grippers are driven by the cylinder to close and release the bottom of the pallet. The positioning device (81) is mounted on the mounting base.

6. The adsorption-type loading and unloading machine for loading substrates onto plastic pallets as described in claim 5, characterized in that, The positioning device (81) is provided with a second sensor assembly for sensing the height of the tray, and the tray clamping mechanism (82) is provided with a third sensor assembly for sensing the position of the tray.

Images