A vacuum coating device and a vacuum coating method

Abstract

The present invention relates to the field of vacuum coating technology, and discloses a vacuum coating device and a vacuum coating method. The vacuum coating device includes a coating mechanism and a film material carrier transport mechanism. The coating mechanism includes a coating chamber for coating and a first transport chamber for holding the film material carrier. The coating chamber and the first transport chamber are selectively connected through a first vacuum valve. A second placement position is also provided in the coating chamber, and the second placement position is used to accommodate the film material carrier. The film material carrier transport mechanism is provided in the first transport chamber, and includes a placement table, a grabbing module and a moving module. The placement table is used to accommodate the film material carrier, and a first operating position is provided thereon. The grabbing module is used to grab the film material carrier at the first operating position, and the moving module is used to drive the grabbing module to transport the film material carrier from the first operating position to the second placement position. The vacuum chamber of the vacuum coating device of the present invention occupies a small area and has high production efficiency, which reduces the manufacturing cost of the device and the energy consumption.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating, and in particular to a vacuum coating device and a vacuum coating method. Background Art

[0002] With the development of automation in vacuum coating equipment and the increasing demand for thin film processes, the demand for film materials in the evaporation source of coating equipment is also increasing. To solve the above problems, it is necessary to configure crucibles with larger loading capacities to meet the film forming needs. However, in order to accommodate large crucibles, the specifications of the vacuum chamber need to be expanded. Large vacuum chambers need to be equipped with vacuum pumps and related components that meet the requirements. At the same time, the space required for the layout of the entire equipment will also be larger. In addition, when the evaporation equipment continuously coats films for an extremely long time and the amount of material cannot meet the use requirements, filling can be performed. However, filling requires the equipment to break the vacuum, which is time-consuming and labor-intensive, and the equipment production efficiency is low.

[0003] Therefore, there is an urgent need for a vacuum coating device to solve the above problems. Summary of the Invention

[0004] Based on the above, the purpose of the present invention is to provide a vacuum coating device and a vacuum coating method, wherein the vacuum chamber of the device occupies a small area, has high production efficiency, and reduces the manufacturing cost and energy consumption of the device.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] A vacuum coating device, comprising:

[0007] The coating mechanism includes a coating chamber for coating and a first transport chamber for holding a film material carrier, wherein the coating chamber and the first transport chamber are selectively connected via a first vacuum valve, and a second operating position is further provided in the coating chamber for accommodating the film material carrier;

[0008] The film material carrier conveying mechanism is arranged in the first conveying chamber, and includes a placement table, a grabbing module and a moving module. The placement table is used to accommodate the film material carrier, and a first operating position is provided on it. The grabbing module is used to grab the film material carrier at the first operating position, and the moving module is used to drive the grabbing module to convey the film material carrier from the first operating position to the second operating position.

[0009] As a preferred solution of the vacuum coating device, a coating platform is provided in the coating chamber, and a plurality of second placement positions are provided on the coating platform, and the second placement position close to the first transport chamber is the second operating position.

[0010] As a preferred solution of the vacuum coating device, the coating platform is rotatably arranged, and a plurality of the second placement positions are arranged along the circumference of the coating platform.

[0011] As a preferred solution of the vacuum coating device, the film material carrier is a ring-shaped divided film material carrier.

[0012] As a preferred solution of a vacuum coating device, the film material carrier transport mechanism also includes a driving module, and a plurality of first placement positions are provided on the placement table. The driving module is used to drive the placement table to move so that one of the first placement positions is opposite to the first operating position.

[0013] As a preferred solution of a vacuum coating device, the film material carrier transporting mechanism also includes a lifting module for driving the film material carrier on the first placement position facing the first operating position to rise and fall, so that the film material carrier to be grasped is located on a grasping plane.

[0014] As a preferred solution of the vacuum coating device, the first placement position includes:

[0015] A placement plate is placed above the placement table, and the film material carrier is placed on the placement plate;

[0016] A guide rod is provided through the placement platform, one end of the guide rod is connected to the placement plate, and the other end is connected to the driving end of the lifting module.

[0017] As a preferred embodiment of the vacuum coating device, the device further comprises a second transport chamber, wherein the coating chamber and the second transport chamber are selectively connected via a second vacuum valve, and the film material carrier transport mechanism is disposed in the second transport chamber;

[0018] The film material carrier transporting mechanism of the second transport chamber is used to transport the film material carrier to the coating chamber;

[0019] Alternatively, the film material carrier transporting mechanism of the second transport chamber is used to transport the film material carrier from the coating chamber to the second transport chamber.

[0020] As a preferred embodiment of the vacuum coating device, it also includes a vacuum pump group, which is connected to the first conveying chamber, so that when the first vacuum valve connects the coating chamber and the first conveying chamber, the vacuum degree of the coating chamber and the first conveying chamber is the same.

[0021] A vacuum coating method, using the vacuum coating device as described in any of the above solutions, the coating method includes:

[0022] When the vacuum levels of the coating chamber and the first transport chamber are the same, the first vacuum valve is opened, and the film material carrier transporting mechanism transports the film material carrier from the first operating position to the second operating position;

[0023] The first vacuum valve is closed, the coating chamber is coating, and only the first transport chamber is vacuumed and replenished with film material carriers.

[0024] The beneficial effects of the present invention are:

[0025] The present invention is used for vacuum coating by setting up a coating chamber; at the same time, a first vacuum valve and a first conveying chamber are set up to provide a film material carrier for the coating chamber; specifically, a film material carrier conveying mechanism is set up in the first conveying chamber to replenish the film material carrier into the coating chamber; a film material carrier for containing the film material is placed on the placement table of the film material carrier conveying mechanism, a grabbing module grabs the film material carrier in the first conveying chamber, and a moving module drives the grabbing module and the film material carrier to convey the film material carrier from the first operating position of the first conveying chamber to the second placement position of the coating chamber for coating the coating chamber; by setting up the first conveying chamber and the film material carrier conveying mechanism, on the one hand, the film material carrier is replenished for the coating chamber, which facilitates long-term coating work in the coating chamber, and on the other hand, the volume of the coating chamber is reduced, and the manufacturing cost and energy consumption of the device are reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in describing the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without any creative work.

[0027] Figure 1 This is a front view of a vacuum coating device provided in a specific embodiment of the present invention;

[0028] Figure 2 is a top view of a vacuum coating device provided in a specific embodiment of the present invention;

[0029] Figure 3 A schematic diagram of a film material carrier transport mechanism provided in a specific embodiment of the present invention;

[0030] Figure 4 Schematic diagram of a grabbing module of a film material carrier transport mechanism provided in a specific embodiment of the present invention;

[0031] Figure 5 1. It is a top view of the cooperation between the gripper and the film material carrier of the film material carrier conveying mechanism provided by a specific embodiment of the present invention;

[0032] Figure 6 It is a side view of the cooperation between the gripper and the film material carrier of the film material carrier conveying mechanism provided by a specific embodiment of the present invention;

[0033] Figure 7 It is a top view of a vacuum coating device provided with a second transfer chamber according to a specific embodiment of the present invention;

[0034] Figure 8 It is a top view of another vacuum coating device provided with a second transfer chamber provided in a specific embodiment of the present invention.

[0035] In the picture:

[0036] 100. Film material carrier transport mechanism;

[0037] 110, placement table; 111, first placement position; 112, first operating position; 113, guide rod; 114, positioning pin;

[0038] 120. Grabbing module; 121. Grabbing body; 122. Hand gripper; 1221. Flanging; 1222. Positioning protrusion; 123. Connecting rod; 124. Second driving member; 125. Second grabbing slider; 126. First driving member; 127. First grabbing slider; 128. Mounting block; 1281. Through hole; 129. Steel cable;

[0039] 130. Drive module;

[0040] 140. Lifting module;

[0041] 150, moving module; 151, lifting assembly; 1511, lifting drive; 1512, lifting block; 152, translation assembly; 1521, translation drive; 1522, translation guide rail; 1523, translation slider;

[0042] 200, membrane material carrier; 201, boss; 202, positioning notch;

[0043] 300, coating mechanism; 310, coating chamber; 311, coating platform; 3111, coating position; 3112, second operating position; 320, first transport chamber; 330, first vacuum valve; 340, second transport chamber; 350, second vacuum valve. DETAILED DESCRIPTION

[0044] To make the technical problems solved, the technical solutions adopted, and the technical effects achieved by the present invention more clearly understood, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. It is apparent that the described embodiments are only some of the embodiments of the present invention, not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.

[0045] like Figure 1-Figure 5 As shown, this embodiment provides a vacuum coating device, which includes a coating mechanism 300 and a film material carrier conveying mechanism 100. The coating mechanism 300 includes a coating chamber 310 for coating and a first conveying chamber 320 for holding the film material carrier 200. The coating chamber 310 and the first conveying chamber 320 are selectively connected through a first vacuum valve 330. A second placement position is also provided in the coating chamber 310, and the second placement position is used to accommodate the film material carrier 200; the film material carrier conveying mechanism 100 is provided in the first conveying chamber 320, and includes a placement table 110, a grabbing module 120 and a moving module 150. The placement table 110 is used to accommodate the film material carrier 200, and a first operating position is provided thereon. The grabbing module 120 is used to grab the film material carrier 200 at the first operating position, and the moving module 150 is used to drive the grabbing module 120 to convey the film material carrier 200 from the first operating position to the second placement position.

[0046] The coating chamber 310 is provided for vacuum coating. Meanwhile, a first vacuum valve 330 and a first transport chamber 320 are provided to provide the coating chamber 310 with a film material carrier 200. Specifically, a film material carrier transport mechanism 100 is provided in the first transport chamber 320 to replenish the film material carrier 200 in the coating chamber 310. The film material carrier 200 containing the film material is placed on the placement table 110 of the film material carrier transport mechanism 100. The grabbing module 120 grabs the film material carrier 200 in the first transport chamber 320. 0, the moving module 150 drives the grabbing module 120 and the film material carrier 200 to transport the film material carrier 200 from the first operating position of the first transport chamber 320 to the second placement position of the coating chamber 310 for coating the coating chamber 310; by setting the first transport chamber 320 and the film material carrier transport mechanism 100, on the one hand, the film material carrier 200 is replenished for the coating chamber 310, which facilitates long-term coating work in the coating chamber 310, and on the other hand, the volume of the coating chamber 310 is reduced, thereby reducing the manufacturing cost of the device and the energy consumption.

[0047] Specifically, a coating platform 311 is disposed within the coating chamber 310. The coating platform 311 is provided with a plurality of second placement positions. The second placement position proximate the first transport chamber 320 is designated as a second operating position 3112. The film carrier transport mechanism 100 is capable of transporting the film carrier 200 to the second operating position 3112. By defining the second placement position proximate the first transport chamber 320 as the second operating position 3112 and transporting the film carrier 200 to the second operating position 3112, the transport distance of the film carrier transport mechanism 100 is effectively reduced, thereby facilitating improved transport efficiency. Furthermore, a coating position 3111 is provided on the coating platform 311. The coating position 3111 is a position distinct from the second operating position 3112 and is used for coating. When the second placement position and the coating position 3111 overlap, coating is performed.

[0048] Furthermore, the coating platform 311 is rotatably arranged, and multiple second placement positions are arranged along the circumference of the coating platform 311. During transportation, the multiple second placement positions can be sequentially located at the second operating position 3112 for receiving the film material carrier 200; during coating, the multiple second placement positions can be sequentially located at the coating position 3111 for coating.

[0049] In this embodiment, the film material carrier 200 is a ring-shaped divided film material carrier 200. During transportation, the rotation angle of the coating platform 311 is the same as the angle of the ring-shaped divided film material carrier 200. This arrangement allows the coating platform 311 to rotate once when the ring-shaped divided film material carrier 200 is transported, and the transportation efficiency is higher.

[0050] It is worth noting that the film material carrier 200 can be a crucible, and the gripping module 120 can grasp the crucible directly or the crucible table used to hold the crucible. In this embodiment, the annularly segmented film material carrier 200 is a crucible table, which contains multiple crucibles, and the film material is placed in the crucibles. During the evaporation process, the rotation angle of the coating platform 311 is the same as the spacing angle between two adjacent crucibles, so that each rotation of the coating platform 311 can accommodate a single evaporation.

[0051] Specifically, the film material carrier transport mechanism 100 further includes a drive module 130. A plurality of first placement positions 111 are provided on the placement platform 110. The drive module 130 is used to drive the placement platform 110 to move so that a first placement position 111 faces the first operating position. The plurality of first placement positions 111 can increase the number of film material carriers 200 that can be accommodated. The drive module 130 is used to drive the placement platform 110 so that one of the first placement positions 111 faces the first operating position, facilitating the gripping module 120 to grip the film material carrier 200 on a first placement position 111. It is worth noting that the plurality of first placement positions 111 are arranged along the circumference of the placement platform 110. The drive module 130 can drive the placement platform 110 to rotate so that the plurality of first placement positions 111 along the circumference of the placement platform 110 sequentially face the first operating position. The rotating placement platform 110 is more conducive to optimizing the structure and reducing the volume of the film material carrier transport mechanism 100.

[0052] Specifically, in order to enable the grabbing module 120 to grab the film material carrier 200, the grabbing module 120 includes a grabbing body 121 and two claws 122 slidably arranged on the grabbing body 121. The setting of the grabbing body 121 is used to realize the installation of the claws 122. The two claws 122 are driven by the first driving component to approach each other along the grabbing direction. When the two claws 122 approach each other, they are used to grab the film material carrier 200. The structure of the grabbing module 120 is simple and the grabbing is reliable.

[0053] For example, to improve gripping reliability, a boss 201 is provided on the upper edge of the film material carrier 200, and a flange 1221 is correspondingly provided on the inner side of the gripper 122. The flange 1221 abuts against the edge of the boss 201, effectively preventing the film material carrier 200 from falling off during gripping and handling, making gripping and handling more reliable. It is worth noting that the shape of the film material carrier 200 can be set according to actual needs. In this embodiment, the film material carrier 200 is configured as an annular split film material carrier 200. The annular split film material carrier 200 can hold more coating material and improve coating efficiency.

[0054] Adaptively, the shapes of the two claws 122 are adapted to the shape of the annular divided membrane material carrier 200, one of the claws 122 is convex on the inner side to match the concave part of the annular divided membrane material carrier 200; the other claw 122 is concave on the inner side to match the convex part of the annular divided membrane material carrier 200; the parts of the claws 122 that match the membrane material carrier 200 are tightly fitted to ensure the reliability of grasping.

[0055] Preferably, at least one gripper 122 is provided with a positioning protrusion 1222 , and correspondingly, the film material carrier 200 is provided with a positioning notch 202 , and the positioning protrusion 1222 can be placed in the positioning notch 202 for positioning when grasping the film material carrier 200 .

[0056] Furthermore, the first drive assembly includes two connecting rods 123 and a first drive member 126, and the two connecting rods 123 are connected to the two claws 122 one by one; the two connecting rods 123 are connected to the first drive member 126, and the first drive member 126 can drive the two connecting rods 123 to rotate, thereby driving the two claws 122 connected to the two connecting rods 123 to slide along the grasping body 121. When they slide to a position close to each other, they are used to grasp the film material carrier 200.

[0057] Optionally, the two grippers 122 are connected to the first grabbing slider 127 in a one-to-one correspondence, the first grabbing slider 127 is slidingly connected to the grabbing body 121, and the connecting rod 123 is connected to the first grabbing slider 127; the grippers 122 are detachably connected to the first grabbing slider 127 to replace the grippers 122 to adapt to different film material carriers 200, thereby improving the versatility of the film material carrier conveying mechanism 100.

[0058] Preferably, the grabbing module 120 also includes a reset component, which is configured to enable the two claws 122 to have a tendency to move away from each other. When the grabbing module 120 grabs the film material carrier 200 and moves the film material carrier 200 to the second operating position 3112, the setting of the reset component can enable the two claws 122 to move away from each other to put down the film material carrier 200 for subsequent grabbing.

[0059] Furthermore, the reset assembly also includes a second grabbing slider 125, which is slidably arranged on the grabbing body 121, and the two first grabbing sliders 127 are respectively connected to the second grabbing slider 125 through the connecting rod 123; further, the first driving member 126 is a spring, one end of the spring is pressed against the grabbing body 121, and the other end is pressed against the second grabbing slider 125, and the spring is squeezed to make the two first grabbing sliders 127 approach each other, and then used for the two claws 122 to grab the film material carrier 200.

[0060] Illustratively, the reset assembly includes a second drive member 124 and a steel cable 129. The second drive member 124 drives the steel cable 129 to pull the second grabbing slider 125 to a position where the two claws 122 are separated, thereby further squeezing the first drive member 126, causing the two claws 122 to separate and lower the film carrier 200. Accordingly, the second grabbing slider 125 is also connected to a mounting block 128. The mounting block 128 is provided with a through hole 1281 for the steel cable 129 to pass through. Using the steel cable 129 to drive the second grabbing slider 125 simplifies the structure and reduces the space occupied by the grabbing module 120.

[0061] Furthermore, the film material carrier conveying mechanism 100 also includes a lifting module 140, which is used to drive the first placement position 111 located at the first operating position to rise and fall, so that the film material carrier 200 to be grasped on the first placement position 111 is located on the grasping plane, which is convenient for the grasping of the grasping module 120. The setting of the lifting module 140 enables the film material carrier 200 in the first placement position 111 to be lifted and lowered to the grasping plane to adapt to different models, especially film material carriers 200 of different heights, thereby improving the versatility of the film material carrier conveying mechanism 100. In addition, multiple film material carriers 200 can be stacked in the first placement position 111, and the lifting module 140 can drive the first placement position 111 located at the first operating position to rise and fall, so that the film material carriers 200 to be grasped on the first placement position 111 can be located in the grasping plane in turn, which is convenient for multiple grasping of the grasping module 120, simplifies the structure of the grasping module 120, reduces the number of times the driving module 130 is driven, and at the same time reduces the number of times the film material carriers 200 are replenished to the placement table 110, thereby improving the coating efficiency.

[0062] Specifically, the moving module 150 includes a lifting component 151 and a translation component 152, the lifting component 151 is configured to drive the grasping module 120 to lift and lower between the grasping plane and the translation plane, and the translation component 152 is configured to drive the grasping module 120 to translate within the translation plane, wherein the grasping position and the second operating position 3112 are both located on the grasping plane, and the translation plane is set higher than the grasping plane to avoid collision when the grasping module 120 grasps the film material carrier 200 and moves between the grasping position and the second operating position 3112.

[0063] Exemplarily, the translation assembly 152 includes a translation drive 1521, a translation guide rail 1522 and a translation slider 1523. The grabbing module 120 is arranged on the translation slider 1523. The translation drive 1521 can drive the translation slider 1523 to translate on the translation guide rail 1522, thereby realizing the translation of the grabbing module 120 on the translation slider 1523; the lifting assembly 151 includes a lifting drive 1511 and a lifting block 1512. The translation assembly 152 is arranged on the lifting block 1512. The lifting drive 1511 can drive the lifting block 1512 to drive, thereby realizing the lifting and lowering of the translation assembly 152 and the grabbing module 120 arranged on the translation assembly 152.

[0064] In this embodiment, the first placement position 111 includes a placement plate and guide rods 113. The placement plate is placed above the placement platform 110, and the film material carrier 200 is placed on the placement plate. The guide rods 113 are installed through the placement platform 110, with one end connected to the placement plate and the other end connected to the driving end of the lifting module 140. The lifting module 140 drives the placement plate to rise and fall, thereby raising and lowering the film material carrier 200 on the placement plate. The guide rods 113 are provided to guide the placement plate when it is raised and lowered, making the lifting more stable and reliable.

[0065] Preferably, the placement platform 110 is provided with positioning pins 114 that can position the film carrier 200. It is worth noting that the positioning pins 114 on the placement platform 110 also mate with the positioning notches 202 on the film carrier 200, simplifying the structure of the film carrier 200. Furthermore, the positioning pins 114 extend in the lifting direction to ensure that they do not interfere with the lifting of the film carrier 200. The height of the positioning pins 114 can be adjusted based on the height of the film carrier 200 and is not specifically limited here.

[0066] The vacuum coating apparatus also includes a vacuum pump assembly connected to the first transfer chamber 320. This ensures that when the first vacuum valve 330 connects the coating chamber 310 and the first transfer chamber 320, the vacuum levels in the coating chamber 310 and the first transfer chamber 320 are the same. By providing a separate vacuum pump assembly connected to the first transfer chamber 320, the first transfer chamber 320 can be independently evacuated. This facilitates evacuating the first transfer chamber 320 after the vacuum is broken in the first transfer chamber 320 to replenish the film material carrier 200. This ensures that the vacuum levels in the coating chamber 310 and the first transfer chamber 320 are the same when the film material carrier 200 is transported between the two chambers, effectively reducing energy consumption. In this manner, the first vacuum valve 330 effectively maintains a vacuum environment in both the coating chamber 310 and the first transfer chamber 320, allowing for simultaneous coating and replenishment of the film material carrier 200, thereby improving coating efficiency.

[0067] In other embodiments, a vacuum pump group connected to the first transport chamber 320 may not be separately provided, but the vacuum pump group of the coating chamber 310 may be connected to the first transport chamber 320. In this case, since the first transport chamber 320 and the coating chamber 310 are connected, it is not possible to only break the vacuum in the first transport chamber 320 to replenish the film material carrier 200. Then, the first vacuum valve 330 can only isolate the coating chamber 310 and the first transport chamber 320 to avoid gas disturbance between the coating chamber 310 and the first transport chamber 320 and the influence of dust on the coating.

[0068] The vacuum coating apparatus also includes a second transfer chamber 340. The coating chamber 310 and the second transfer chamber 340 are selectively connected via a second vacuum valve 350. The second vacuum valve 350 functions similarly to the first vacuum valve 330. The second transfer chamber 340 can be equipped with a separate vacuum pump assembly or share a vacuum pump assembly with the first transfer chamber 320. When the second transfer chamber 340 is equipped with a vacuum pump assembly, the second vacuum valve 350 ensures the vacuum level in the coating chamber 310 when the vacuum in the second transfer chamber 340 is broken. When the second transfer chamber 340 is not equipped with a vacuum pump assembly, the second vacuum valve 350 prevents gas disturbances between the coating chamber 310 and the second transfer chamber 340, as well as the effects of dust on the coating. For example, both the first vacuum valve 330 and the second vacuum valve 350 can be configured as gate valves.

[0069] It is worth noting that when the vacuum coating apparatus is not equipped with a vacuum pump assembly, the first vacuum valve 330 and the second vacuum valve 350 can be replaced with baffles that can prevent gas disturbances and dust from affecting the coating. This replacement not only ensures normal coating but also helps reduce the cost of the vacuum coating apparatus. Furthermore, the baffles can be raised or lowered or rotated to prevent gas disturbances and dust from affecting the coating, or to provide a passage for transporting the film material carrier 200.

[0070] like Figure 7 As shown, a film material carrier conveying mechanism 100 is provided in the second conveying chamber 340. The film material carrier conveying mechanism 100 of the second conveying chamber 340 is used to convey the film material carrier 200 to the coating chamber 310. The film material carrier 200 is replenished into the coating chamber at the same time through the first conveying chamber 320 and the second conveying chamber 340, which is beneficial to increase the speed of replenishing the film material carrier 200.

[0071] or, as Figure 8 As shown, the film material carrier conveying mechanism 100 of the second conveying chamber 340 is used to convey the film material carrier 200 from the coating chamber 310 to the second conveying chamber 340. Different film material carrier conveying mechanisms 100 are used to replenish new film material carriers 200 to the coating chamber 310 and to convey old film material carriers 200 out of the coating chamber 310, which can effectively avoid cross contamination and thus help to ensure the coating effect. In addition, while replenishing new film material carriers 200 through one film material carrier conveying mechanism 100, another film material carrier conveying mechanism 100 is used to convey old film material carriers 200, thereby improving the conveying efficiency.

[0072] It is understandable that when the second transport chamber 340 is used to transport the film material carrier 200 , it is also necessary to ensure that the vacuum levels between the second transport chamber 340 and the coating chamber 310 are the same.

[0073] This embodiment also discloses a vacuum coating method, utilizing the vacuum coating apparatus described in any of the above embodiments. The coating method includes: when the vacuum levels of the coating chamber 310 and the first transfer chamber 320 are the same, the first vacuum valve 330 is opened, and the film material carrier 200 is transported by the film material carrier transport mechanism 100 from the first operating position to the second operating position 3112; the first vacuum valve 330 is closed, and the coating chamber 310 is coated, while only the first transfer chamber 320 is de-vacuumed and the film material carrier 200 is replenished. Using this coating method, the vacuum level of the first transfer chamber 320 can be de-vacuumed independently without affecting the normal coating of the coating chamber 310, thereby improving coating efficiency.

[0074] It is worth noting that when the first vacuum valve 330 is opened to prepare to transport the film material carrier 200 to the second operating position 3112, the vacuum degree of the coating chamber 310 and the first transport chamber 320 is the same. At this time, the coating chamber 310 and the first transport chamber 320 are both in a high vacuum state that can be used for coating, to ensure that after the film material carrier 200 is transported, the coating chamber 310 can directly carry out coating, which reduces the time for vacuuming the coating chamber 310 and improves the coating efficiency.

[0075] The process of using the film material carrier conveying mechanism 100 to convey the film material carrier 200 from the first operating position to the second operating position 3112 is as follows: the driving module 130 drives the placement table 110 so that a first placement position 111 is opposite to the first operating position; the lifting module 140 drives the first placement position 111 opposite to the first operating position to rise and fall, so that the film material carrier 200 to be grasped at the first placement position 111 is located on the grasping plane; the moving module 150 drives the grasping module 120 to the first operating position on the grasping plane, grasps the film material carrier 200 to be grasped, and moves to the second operating position 3112 in the translation plane.

[0076] Specifically, when only one film material carrier 200 is placed in the first placement position 111, the position of the film material carrier 200 in the vertical direction is adjusted by the lifting module 140 before grasping, so that the film material carrier 200 to be grasped on the first placement position 111 located in the first operating position is placed on the grasping plane to adapt to film material carriers 200 of different heights, so as to facilitate subsequent grasping by the grasping module 120. When multiple film material carriers 200 are stacked and placed at the first placement position 111, the placement plate is raised and lowered by the lifting module 140, so that different film material carriers 200 at the same first placement position 111 are placed at the grabbing position in turn and are grabbed by the grabbing module 120. After the grabbing module 120 grabs one film material carrier 200, the lifting module 140 continues to lift the next film material carrier 200 to facilitate the next grabbing. When the film material carrier 200 at the same first placement position 111 is grabbed, the lifting module 140 is reset, and the driving module 130 drives the placement platform 110 to rotate, so that the next first placement position 111 is facing the first operating position and continues to transport the film material carrier 200.

[0077] Note that the above are only preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments, and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments and may include many other equivalent embodiments without departing from the concept of the present invention. The scope of the present invention is determined by the scope of the appended claims.

[0078] In the description of the present invention, it should be noted that the terms "center," "up," "down," "left," "right," "vertical," "horizontal," "inside," and "outside" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended only to facilitate the description of the present invention and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0079] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

Claims

1. A vacuum coating device, characterized in that: include: The coating mechanism (300) comprises a coating chamber (310) for coating and a first transport chamber (320) for accommodating a film material carrier (200); the coating chamber (310) and the first transport chamber (320) are selectively connected via a first vacuum valve (330); a second operating position (3112) is further provided in the coating chamber (310); the second operating position (3112) is used to accommodate the film material carrier (200); A film material carrier transport mechanism (100) is provided in the first transport chamber (320), comprising a placement table (110), a grabbing module (120) and a moving module (150); the placement table (110) is used to accommodate the film material carrier (200), and is provided with a first operating position; the grabbing module (120) is used to grab the film material carrier (200) at the first operating position; and the moving module (150) is used to drive the grabbing module (120) to transport the film material carrier (200) from the first operating position to the second operating position (3112); A coating platform (311) is provided in the coating chamber (310), and a plurality of second placement positions are provided on the coating platform (311), wherein the second placement position close to the first transport chamber (320) is the second operating position (3112).

2. The vacuum coating device according to claim 1, characterized in that: The coating platform (311) is rotatably arranged, and a plurality of the second placement positions are arranged along the circumference of the coating platform (311).

3. The vacuum coating device according to claim 2, characterized in that: The film material carrier (200) is a ring-shaped segmented film material carrier (200).

4. The vacuum coating device according to claim 1, wherein: The film material carrier transport mechanism (100) further includes a driving module (130), and a plurality of first placement positions (111) are provided on the placement platform (110). The driving module (130) is used to drive the placement platform (110) to move so that one of the first placement positions (111) faces the first operating position.

5. The vacuum coating device according to claim 4, characterized in that: The film material carrier transport mechanism (100) further comprises a lifting module (140) for driving the film material carrier (200) on the first placement position (111) facing the first operating position to lift and lower, so that the film material carrier (200) to be grasped is located on a grasping plane.

6. The vacuum coating device according to claim 5, characterized in that: The first placement position (111) includes: A placement plate is placed above the placement platform (110), and the film material carrier (200) is placed on the placement plate; A guide rod (113) is provided through the placement platform (110), one end of which is connected to the placement plate, and the other end of which is connected to the driving end of the lifting module (140).

7. The vacuum coating device according to claim 1, characterized in that: It also includes a second transport chamber (340), the coating chamber (310) and the second transport chamber (340) are selectively connected via a second vacuum valve (350), and the film material carrier transport mechanism (100) is arranged in the second transport chamber (340); The film material carrier transport mechanism (100) of the second transport chamber (340) is used to transport the film material carrier (200) to the coating chamber (310); Alternatively, the film material carrier transport mechanism (100) of the second transport chamber (340) is used to transport the film material carrier (200) from the coating chamber (310) to the second transport chamber (340).

8. The vacuum coating device according to claim 1, wherein: The invention also includes a vacuum pump group, which is connected to the first transport chamber (320) so that when the first vacuum valve (330) connects the coating chamber (310) and the first transport chamber (320), the vacuum degrees of the coating chamber (310) and the first transport chamber (320) are the same.

9. A vacuum coating method, characterized in that: Using the vacuum coating device according to any one of claims 1 to 8, the coating method includes: When the vacuum degrees of the coating chamber (310) and the first transport chamber (320) are the same, the first vacuum valve (330) is opened, and the film material carrier transport mechanism (100) transports the film material carrier (200) from the first operating position to the second operating position (3112); The first vacuum valve (330) is closed, the coating chamber (310) is coating, and only the first transport chamber (320) is vacuum-broken and replenishes the film material carrier (200).

Images