A needle detection device and method

Abstract

The application discloses a top pin detection device and a detection method, wherein the device comprises a measuring platform, a fixing mechanism on the measuring platform for clamping the top pin, wherein the top pin has a first end portion and a second end portion arranged oppositely in a direction away from the measuring platform, the second end portion is closer to the measuring platform than the first end portion, and the fixing mechanism is used for clamping the second end portion; and a focusing height measuring mechanism is used for measuring a current distance between a surface on a side away from the second end portion of the first end portion of the top pin and a surface on a side close to the second end portion of the measuring platform, and determining whether the position of the top pin meets preset requirements based on the current distance. Through the above manner, the position of the top pin and the coplanarity between the top pins are detected by using the focusing height measuring method, meanwhile, it is ensured that the top pin is perpendicular to the measuring platform during detection, and the detection precision is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor packaging, and in particular to a ejector pin detection device and method. Background Art

[0002] Ejector pins are essential tools used during the semiconductor chip packaging process to separate chips from UV film (ultraviolet light adhesion reduction film) or blue film. Their excellent coplanarity effectively prevents chip cracks. Ejector pins are also widely used in LCD screen demolding, mold opening, and workpiece demolding.

[0003] However, existing ejector pin coplanarity testing tools cannot ensure the levelness of the base used to test ejector pin coplanarity, nor can they ensure the perpendicularity between the ejector pin and the base. In other words, they cannot guarantee that the relative position of the ejector pin is fixed during coplanarity testing, which introduces errors in the test results and results in low detection accuracy. Furthermore, existing techniques for testing ejector pin coplanarity often rely on visually determining the ejector pin height difference or measuring it using a micrometer, resulting in low detection accuracy. In particular, for wafers that have not yet been packaged, their strength is relatively low, and the precision required for ejector pin coplanarity is high. Existing testing methods are difficult to achieve the required ejector pin coplanarity accuracy, increasing the risk of wafer cracking and breakage during the film removal process. Furthermore, when using a single ejector pin for film removal and other tasks, if the ejector pin becomes skewed or the end used for film removal becomes worn, the relative position of the ejector pin and the ejector pin holder will change. This, on the one hand, reduces the contact area between the ejector pin and the workpiece, preventing smooth film removal and other tasks, and on the other hand, may damage the workpiece, reducing the yield rate. Summary of the Invention

[0004] The main technical problem solved by this application is to provide a device and method for detecting ejector pins, which utilizes a focused height measurement method to detect the position of ejector pins and the coplanarity between ejector pins, thereby ensuring that the ejector pins are perpendicular to the measuring platform during detection and improving the detection accuracy.

[0005] To solve the above technical problems, a technical solution adopted in the present application is: to provide a pin detection device, comprising: a measuring platform; a fixing mechanism, located on the measuring platform, and used to clamp the pin; wherein, in a direction away from the measuring platform, the pin has a first end and a second end arranged opposite to each other, the second end is closer to the measuring platform relative to the first end, and the fixing mechanism is used to clamp the second end; a focused height measurement mechanism, used to measure, on a side close to the first end, a current distance between a surface of the first end of the pin facing away from the second end and a surface of the measuring platform close to the second end, and to determine whether the position of the pin meets a preset requirement based on the current distance.

[0006] To solve the above technical problems, another technical solution adopted in the present application is: providing a method for detecting an ejector pin, comprising: fixing at least one ejector pin in a fixing mechanism on a measuring platform; wherein, in a direction away from the measuring platform, the ejector pin has a first end and a second end, the second end is closer to the measuring platform relative to the first end, and the second end is clamped by the fixing mechanism; using a focusing height measurement mechanism to measure, on a side close to the first end, a current distance between a surface of the first end of the ejector pin facing away from the second end and a surface of the measuring platform close to the second end, and based on the current distance, determining whether the position of the ejector pin meets a preset requirement.

[0007] Different from the prior art, the present application has the following beneficial effects: the ejector pin detection device includes: a measuring platform, a fixing mechanism, and a focusing height measurement mechanism; the fixing mechanism is located on the measuring platform and is used to clamp the ejector pin; the ejector pin has a first end and a second end that are oppositely disposed in a direction away from the measuring platform, the second end being closer to the measuring platform relative to the first end, and the fixing mechanism is used to clamp the second end; the focusing height measurement mechanism is used to measure the current distance between the surface of the first end of the ejector pin facing away from the second end and the surface of the measuring platform near the second end on the side near the first end, and based on the current distance, determine whether the position of the ejector pin meets preset requirements. Through the above-mentioned device, the present application ensures that the relative position of the ejector pin is fixed during coplanarity detection, and uses a focusing method to test the ejector pin coplanarity, thereby improving the accuracy of detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without inventive efforts. Among them:

[0009] Figure 1 This is a structural diagram of an embodiment of the ejector pin detection device of the present application;

[0010] Figure 2 It is a structural schematic diagram of another embodiment of the ejector pin detection device of the present application;

[0011] Figure 3 yes Figure 1 A schematic structural diagram of an embodiment of a fixing mechanism;

[0012] Figure 4 yes Figure 3 A top view of an embodiment of the middle clamping member;

[0013] Figure 5 yes Figure 3A top view of another embodiment of the middle clamping member;

[0014] Figure 6 yes Figure 1 A structural diagram of another embodiment of the fixing mechanism;

[0015] Figure 7 yes Figure 3 A schematic structural diagram of an embodiment of the middle base including a lifting mechanism and movable parts;

[0016] Figure 8 yes Figure 7 A structural diagram of an embodiment of a jacking mechanism in FIG.

[0017] Figure 9 yes Figure 1 A structural diagram of an embodiment of a focusing height measurement mechanism;

[0018] Figure 10 It is a flow chart of the ejector pin detection method of the present application. DETAILED DESCRIPTION

[0019] The following will be combined with the accompanying drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of them. Based on the embodiments of this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0020] See also Figure 1 , Figure 1 This is a structural diagram of an embodiment of the ejector pin detection device of the present application, and the ejector pin detection device may include: a measuring platform 1, a fixing mechanism 2, and a focusing height measurement mechanism 3. Compared with the general micrometer height measurement, the focusing height measurement has higher accuracy in coplanarity detection and will not damage the second end N2 of the ejector pin. The fixing mechanism can make the ejector pin 4 be in a state perpendicular to the surface a2 of the measuring platform 1 on the side close to the ejector pin 4, ensuring that each time the focusing height measurement mechanism 3 measures the position of the ejector pin 4, the ejector pin 4 will not be skewed, thereby improving the measurement accuracy. The ejector pin 4 generally has a blunt end and a pointed end that are relatively set, wherein the side of the pointed end away from the blunt end can be a plane or a curved surface, and the pointed end can be used to separate the two parts that are bonded together. For example, in the chip packaging process, it can be used to separate the wafer from the UV film or blue film. Of course, its application is not limited to the above examples, and can also be applied to scenes such as LCD demolding, mold opening, and workpiece demolding.

[0021] The structures and functions of the measuring platform 1 , the fixing mechanism 2 and the focusing height measuring mechanism 3 will be described in detail below.

[0022] The surface a2 where the measuring platform 1 contacts the fixing mechanism 2 may be a horizontal plane, ensuring that the ejector pin 4 and the measuring platform 1 are in a vertical state during each measurement.

[0023] Fixing mechanism 2, located on measurement platform 1, can be used to clamp ejector pin 4. In a direction away from measurement platform 1, ejector pin 4 can have a first end N1 and a second end N2 disposed opposite each other. Second end N2 can be closer to measurement platform 1 relative to first end N1, and fixing mechanism 2 is used to clamp second end N2. Fixing mechanism 2 secures ejector pin 4 perpendicular to measurement platform 1, reducing measurement errors caused by tilting ejector pin 4, which can cause the focus of focusing height measurement mechanism 3 to deviate from surface a1, which is located away from first end N1 and second end N2.

[0024] In one application scenario, please refer to Figure 1 The fixing mechanism 2 can hold one ejector pin 4, and the focusing height measuring mechanism 3 can detect one ejector pin 4 separately to determine whether it is in the expected position. The expected position can be the position point or position range where the ejector pin normally completes the work of ejecting the film. Alternatively, multiple fixing mechanisms 2 can be used to detect different ejectors 4 respectively to determine the coplanarity of the surface a1 of the first end N1 of the multiple ejectors 4 away from the second end N2 when the surfaces b of the multiple fixing mechanisms 2 away from the ejector pin 4 are on the same plane.

[0025] In another application scenario, please refer to Figure 2 The fixing mechanism 2 can hold multiple ejector pins 4 at the same time, and the focusing height measuring mechanism 3 can focus on the multiple ejector pins 4 one by one, so as to determine whether each ejector pin 4 is at the expected position and the current position of each ejector pin 4 at the same time, and then detect the coplanarity of the surface a1 where the first end N1 of the multiple ejector pins 4 is away from the second end N2.

[0026] In one embodiment, please refer to Figure 1 and Figure 3 , Figure 3 for Figure 1 A schematic structural diagram of an embodiment of a fixing mechanism is shown. Fixing mechanism 2 may include a base 22 and a clamping member 21. Clamping member 21 has a third end N3 and a fourth end N4 disposed opposite each other. Third end N3 is connected to base 22, and fourth end N4 defines a first, variable-sized accommodating cavity R1 for clamping or releasing second end N2 of ejector pin 4. To avoid damaging the tip of ejector pin 4 during coplanarity measurement, second end N2 may be the blunt end of ejector pin 4, and first end N1 may be the pointed end. Furthermore, when first end N1 is a pointed end, after testing, fixing mechanism 2 and ejector pin 4 can be directly removed from measurement platform 1. Fixing mechanism 2 can then be used as an ejector pin holder to directly support ejector pin 4 for demolding and other tasks.

[0027] Furthermore, the inner wall of the first accommodating cavity R1 can match the outer wall of the second end N2, so that the ejector pins 4 with different shapes can be fixed and tested. Figure 4 , Figure 4 for Figure 3 In the top view of an embodiment of the middle clamping member, the second end portion N2 of the ejector pin 4 can be cylindrical, and accordingly, the inner wall of the first accommodating cavity R1 can be circular. In another embodiment, please refer to Figure 5 , Figure 5 for Figure 3 In the top view of another embodiment of the middle clamping member, the second end portion N2 of the ejector pin 4 may be a hexagonal prism, and the cross section of the inner wall of the first accommodating cavity R1 may be a regular hexagon.

[0028] In one application scenario, please refer to Figure 6 , Figure 6 for Figure 1 A schematic diagram of another embodiment of the fixing mechanism is shown. Each clamping member 21 may include at least two claws 211. The fixing mechanism 2 may also include a locking member 23, which is configured to fit around the periphery of the clamping member 21 to reduce the distance between adjacent claws 211, thereby reducing the size of the first accommodating cavity R1 to secure the second end N2. This locks the ejector pin 4 from the outside inward, ensuring that the ejector pin is perpendicular to the surface b of the fixing mechanism 2 away from the ejector pin 4 and improving detection accuracy. In one embodiment, the clamping member 21 may include a spring chuck and a locking nut. The claws 211 may be the jaws of the spring chuck, and the locking member 23 may be a matching locking nut. The base 22 may have external threads on the side adjacent to the clamping member 21, and the locking member 23 may have internal threads on the inside that match the external threads of the clamping member 21. In use, the spring chuck is placed into the base 22, the locking nut is inserted around the external threads of the base 22, and the locking nut is tightened to tighten the spring chuck. In this way, the ejector pin can be fixed manually, making it easier for the operator to observe the wear of the ejector pin.

[0029] In another application scenario, each clamping member 21 may include at least two claw clamps 211 and a driver that can control the claw clamps to gather toward the center of the clamping member. The closing and loosening of the claw clamps can be directly controlled by a program, providing the possibility for an automated process of adjusting the coplanarity of the ejector pins and replacing the ejector pins.

[0030] In one application scenario, please refer to Figure 7 , Figure 7 for Figure 3A schematic diagram of the structure of an embodiment of a central base including a lifting mechanism and movable parts. The base 22 may be provided with a second accommodating cavity R2, within which the third end N3 of the clamping member 21 may be located, thereby improving the stability of the clamping member 21. The detection device may further include a lifting mechanism 5, at least a portion of which is located within the second accommodating cavity R2. The lifting mechanism 5 abuts against the third end N3 and can move linearly in a direction D1 to change the distance between the third end N3 and the measuring platform 1. This allows the height of the first end of the ejector to be adjusted by adjusting the position of the lifting mechanism 5 while the fourth end N4 is holding the ejector.

[0031] In some embodiments, please refer again to Figure 7 A movable part 6 may be provided on the side surface of the base 22 near the fourth end N4, which may move back and forth in a straight line in the direction D1, and is used to adjust the position of the ejector pin to change the distance between the side surface of the first end of the ejector pin facing away from the second end and the side surface of the measuring platform 1 near the second end. The number of movable parts 6 may be the same as the number of ejector pins 4, and the movable part 6 may also have an ejector pin limiting structure, such as a protrusion or a groove. The height of the first end of the ejector pin may be adjusted by moving the movable part 6 without changing the position of the clamping part 21. In this way, the position of the clamping part 21 may be kept unchanged, and the position of the clamping part 21 does not need to be adjusted again after the ejector pin is replaced, thereby improving production efficiency. Of course, in some embodiments, the lifting mechanism 5 and the movable part 6 may be adjusted simultaneously to adjust the position of the ejector pin more accurately.

[0032] In some embodiments, see Figure 7 and Figure 8 , Figure 8 for Figure 7 The schematic diagram of the structure of an embodiment of the lifting mechanism in FIG. The lifting mechanism 5 may include: a first driving member 51 and a lifting member 52 connected to each other; the lifting member 52 is located in the second accommodating chamber R2, and is located between the measuring platform 1 and the third end N3, and abuts against the third end N3. The first driving member 51 can control the lifting member 52 to make a linear reciprocating motion along the direction D1 in the second accommodating chamber R2, so that the position of the ejector pin can be accurately adjusted by a program. In one embodiment, please refer to Figure 8 A limiting groove R3 is provided on the side of the lifting member 52 facing the third end N3 for accommodating the third end N3; wherein the inner wall of the limiting groove R3 can match the outer wall of the third end N3, thereby playing a clamping and limiting role on the third end N3, preventing the clamping member from being skewed or shifted during the process of the lifting member 52 controlling the movement of the clamping member. If the clamping member is skewed or shifted, on the one hand, it will affect the detection accuracy, and on the other hand, it may also cause damage to the clamped ejector pin.

[0033] In another embodiment, the lifting mechanism 5 can be connected to a limit switch, and the position of the lifting mechanism can be controlled by manually adjusting the position of the limit switch, which makes the adjustment more convenient.

[0034] In one application scenario, the detection device may further include a controller, which may be coupled to the focusing height measuring mechanism and the lifting mechanism. In response to the controller receiving a signal from the focusing height measuring mechanism that the position of the ejector does not meet the preset requirements, the lifting mechanism is controlled to move to change the current distance, thereby controlling the ejector to move to a position that meets the preset requirements. Without replacing the ejector, the current ejector can continue to be used for processes such as ejection of the film, thereby reducing the cost of raw materials.

[0035] Focus on the height measuring mechanism 3, please refer to Figure 9 , Figure 9 for Figure 1 A schematic diagram of an embodiment of a focused height measurement mechanism in FIG. This mechanism measures the current distance between a surface a1 of the ejector pin 4, facing away from the second end N2, and a surface a2 of the measuring platform 1, near the first end N2. Based on this distance, the mechanism determines whether the ejector pin 4's position meets preset requirements. Compared to conventional micrometer height measurement, focused height measurement offers greater accuracy for coplanarity testing and does not damage the ejector pin's second end N2.

[0036] In some embodiments, please refer to Figure 9 The focusing height measurement mechanism 3 includes a focusing assembly 31 and a focusing position sensor 32, wherein the focusing position sensor 32 is coupled to the focusing assembly 31. The focusing assembly 31 can be used to focus on a surface a1 on the side of the first end N1 of the ejector pin 4 facing away from the second end N2. In one embodiment, the focusing assembly 31 can include a lens 311 and a second driving member 312. The second driving member 312 is connected to the lens 311 and drives the lens 311 to move in a direction D1 perpendicular to a side surface of the measuring platform 1 near the first end. The focusing position sensor 32 is used to measure the displacement of the lens 311 and convert the displacement of the lens 311 into the current distance between the surface a1 on the side of the first end N1 of the ejector pin 4 facing away from the second end N2 and the surface a2 on the side of the measuring platform near the second end N2. In this way, the current position of the ejector pin 4 can be converted into a corresponding numerical value, which is conducive to controlling the position of a single ejector pin and the coplanarity of multiple ejectors, and provides a numerical basis for subsequent changes in the ejector pin position and the replacement of the ejector pin.

[0037] The device may also include a mechanical arm for automatically grabbing and releasing the ejector pin. When the ejector pin is severely damaged and cannot be used any more, the mechanical arm is controlled by a program to move the ejector pin, thereby realizing automatic replacement of the ejector pin.

[0038] For the ejector pin detection method of this application, please refer to Figure 1 、 Figure 2 and Figure 10 , Figure 10 The flowchart of the ejector pin detection method of the present application may include the following steps:

[0039] S101: At least one ejector pin 4 is fixedly mounted within a fixing mechanism 2 on a measuring platform 1. In the direction away from the measuring platform 1, the ejector pin 4 has a first end N1 and a second end N2. The second end N2 is closer to the measuring platform 1 than the first end N1 and is clamped by the fixing mechanism 2. This step ensures that the ejector pin 4 is perpendicular to the measuring platform 1 through the clamping mechanism, ensuring that the ejector pin 4 does not tilt each time the height measurement mechanism 3 focuses on the position of the ejector pin 4, thereby improving measurement accuracy.

[0040] S102: The focused height measurement mechanism 3 measures the current distance between a surface a1 of the first end N1 of the ejector pin 4 facing away from the second end N2 and a surface a2 of the measuring platform near the second end N2, near the first end N1. Based on this distance, a determination is made as to whether the position of the ejector pin 4 meets preset requirements. This determination can be used to determine whether the position of a single ejector pin meets preset requirements, or to determine the coplanarity of the surfaces a1 of the first end N1 of multiple ejector pins facing away from the second end N2. Compared to standard visual inspection and micrometer testing, the focused height measurement mechanism provides more accurate measurement without damaging the ejector pins.

[0041] In one application scenario, please refer to Figure 1 , one ejector pin 4 can be fixed in the fixing mechanism 2 on the measuring platform 1, and the focusing height measuring mechanism 3 can detect one ejector pin 4 separately to determine whether it is in the expected position; it is also possible to detect different ejectors 4 separately to determine the coplanarity of the surface a1 of the first end N1 of the ejector pin 4 away from the second end N2 when the surface b on the side of the fixing mechanism 2 away from the ejector pin 4 is on the same plane.

[0042] In another application scenario, please refer to Figure 2 , multiple ejector pins 4 can be fixed in the fixing mechanism 2 on the measuring platform 1, and the focusing height measuring mechanism 3 can determine whether the multiple ejector pins 4 are in the expected positions at the same time, that is, the coplanarity of the surface a1 of the first end N1 of the multiple ejector pins 4 away from the second end N2 can be detected.

[0043] In some embodiments, the step of determining whether the position of the ejector pin 4 meets preset requirements based on the current distance may include: obtaining the aforementioned current distance of the plurality of ejector pins 4; and determining whether the surfaces of the first ends of the plurality of ejector pins facing away from the second ends are located on the same plane based on the current distance of the plurality of ejector pins. That is, when a plurality of ejector pins are required to perform a process such as film ejection together, the coplanarity of the plurality of ejector pins can be detected to avoid directly using an ejector pin group with poor coplanarity for film ejection and other processes, thereby avoiding damage to the processed workpiece.

[0044] In one embodiment, after the step of determining whether the surfaces of the first ends of the plurality of ejector pins facing away from the second ends are located on the same plane based on the current distance between the plurality of ejector pins, the step may further include adjusting the positions of the ejector pins according to the difference between a preset requirement and the current distance until the preset requirement is met. Without replacing the ejector pins, the current ejector pins are continued to be used for processes such as ejection of the film, thereby reducing raw material costs.

[0045] In another embodiment, after the step of determining whether the surfaces of the first ends of the plurality of ejector pins facing away from the second ends are located on the same plane based on the current distance between the plurality of ejector pins, the step may further include replacing the ejector pins and adjusting the positions of the ejector pins until preset requirements are met. If an ejector pin is severely worn and cannot be used, a new ejector pin can be replaced to avoid damage to the workpiece being processed.

[0046] As can be seen from the above, the present invention uses a pin detection device to detect the position of the pin, and the detection device includes: a measuring platform; a fixing mechanism, located on the measuring platform, and used to clamp the pin; wherein, in the direction away from the measuring platform, the pin has a first end and a second end that are relatively arranged, the second end is closer to the measuring platform relative to the first end, and the fixing mechanism is used to clamp the second end; a focusing height measurement mechanism, which is used to measure the current distance between the surface of the first end of the pin facing away from the second end and the surface of the measuring platform closer to the second end on the side close to the first end, and based on the current distance, determine whether the position of the pin meets the preset requirements. In this way, the present application uses the focusing height measurement method to detect the position of the pin and the coplanarity between the pins, while ensuring that the pin is perpendicular to the measuring platform during detection, thereby improving the accuracy of detection.

[0047] The above is only an implementation method of the present application and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the description and drawings of this application, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A ejector pin detection device, characterized in that: include: Measuring platform; a fixing mechanism, located on the measuring platform, for clamping the ejector pin; wherein, in a direction away from the measuring platform, the ejector pin has a first end and a second end disposed opposite to each other, the second end being closer to the measuring platform than the first end, and the fixing mechanism is used to clamp the second end; a focused height measurement mechanism, configured to measure, on a side close to the first end, a current distance between a surface of the first end of the ejector facing away from the second end and a surface of the measuring platform close to the second end, and determine whether the position of the ejector meets a preset requirement based on the current distance; The fixing mechanism includes a base and a clamping member; the clamping member has a third end and a fourth end disposed opposite each other, the third end being connected to the base, and the fourth end forming a first accommodating cavity of variable size for clamping or releasing the second end; wherein the inner wall of the first accommodating cavity matches the outer wall of the second end; The base is provided with a second accommodating cavity, and the third end of the clamping member is located in the second accommodating cavity; wherein the detection device further includes a lifting mechanism, at least a portion of which is located in the second accommodating cavity, and the lifting mechanism abuts against the third end to change the distance between the third end and the measuring platform; a movable member is provided on a side surface of the base close to the fourth end for adjusting the position of the ejector pin to change the distance between a side surface of the first end facing away from the second end and a side surface of the measuring platform close to the second end; The focusing height measurement mechanism includes a focusing assembly and a focusing position sensor, wherein the focusing position sensor is coupled to the focusing assembly; the focusing assembly is used to focus on the side surface of the first end facing away from the second end, and includes a lens and a second driving member; the second driving member is connected to the lens and drives the lens to move in a direction perpendicular to the side surface of the measuring platform close to the first end; the focusing position sensor is used to measure the displacement of the lens and convert the displacement of the lens into the current distance.

2. The detection device according to claim 1, characterized in that Each of the clamping members includes at least two claw clamps; The fixing mechanism further includes a locking member, which is used to be sleeved on the periphery of the clamping member so as to reduce the distance between adjacent claw clamps and reduce the size of the first accommodating cavity to clamp the second end.

3. The detection device according to claim 1, characterized in that The lifting mechanism includes: a first driving member and a lifting member connected to each other; the lifting member is located in the second accommodating cavity, between the measuring platform and the third end, and abuts against the third end.

4. The detection device according to claim 3, characterized in that The lifting member is provided with a limiting groove on a side facing the third end portion, for accommodating the third end portion; Wherein, the inner wall of the limiting groove matches the outer wall of the third end.

5. The detection device according to claim 1, characterized in that Also includes: The controller is coupled to the focusing altimeter mechanism and the lifting mechanism, and controls the lifting mechanism to move so as to change the current distance in response to the controller receiving a signal from the focusing altimeter mechanism that the position of the ejector pin does not meet a preset requirement.

6. A method for detecting an ejector pin, characterized in that: The ejector pin detection device according to any one of claims 1 to 5, comprising: At least one ejector pin is fixedly disposed in a fixing mechanism on the measuring platform; wherein, in a direction away from the measuring platform, the ejector pin has a first end and a second end, the second end being closer to the measuring platform than the first end, and the second end being clamped by the fixing mechanism; A focusing height measurement mechanism is used to measure the current distance between a surface of the first end of the ejector facing away from the second end and a surface of the measuring platform near the second end on a side close to the first end, and based on the current distance, it is determined whether the position of the ejector meets the preset requirements.

7. The detection method according to claim 6, characterized in that The step of determining whether the ejector position meets preset requirements based on the current distance includes: Obtaining the current distances of the plurality of ejector pins; It is determined based on the current distance between the plurality of ejector pins whether surfaces of the first end portions of the plurality of ejector pins facing away from the second end portions are located on the same plane.

Images