A method and device for calibrating a galvanometer

Abstract

The present invention discloses a calibration method and device for a galvanometer, which comprises the steps of obtaining the size of a calibration format, wherein the size of the calibration format is larger than the size of a workpiece to be processed; dividing the calibration format into N areas; selecting N calibration sheets, which correspond to the N areas one by one, and the size of each calibration sheet is larger than the size of its corresponding area; obtaining a preset overall pattern and a processing pattern on each calibration sheet according to the size of the calibration format and the way the calibration format is divided into areas; and the galvanometer uses the calibration sheets to calibrate the corresponding areas one by one according to the preset overall pattern. The present invention divides the calibration format into areas to form a plurality of small calibration formats, and each area is corrected by a calibration sheet, thereby completing the calibration of the entire calibration format, reducing the size limit of the calibration sheet, and eliminating the need to change the material of the calibration sheet and the calibration method of a single area, thereby effectively improving the calibration efficiency and effect.

Description

Technical Field

[0001] The invention relates to the field of lasers, and in particular to a calibration method and device for a galvanometer. Background Art

[0002] The laser processes the pattern of the workpiece through the high-speed scanning movement of the galvanometer. In order to ensure the accuracy of the graphic processing, the galvanometer needs to be calibrated. The existing calibration method is: turn on the laser, and use the galvanometer movement to make a dot matrix on the calibration sheet, such as 3×3, 15×15, 27×27 and other dot arrays, and then use the second element or similar detection instrument to detect the coordinate value of each point, and finally input the coordinate value into the calibration document of the galvanometer to achieve the purpose of calibrating the galvanometer. Because the above method has fewer reference points on the outer frame of the dot array, the edge accuracy after calibration is worse than the internal accuracy. In order to ensure the overall graphic accuracy of the workpiece, the size of the calibration sheet required for calibration must be larger than the size of the workpiece.

[0003] As the size of the workpiece is gradually increasing, the size of the existing correction sheet is limited and can no longer meet the correction requirements. Currently, there is a method of using a correction sheet of a different material for correction, but the correction effect of correction sheets of other materials is not good, so a better galvanometer correction method suitable for large-sized workpieces has not yet been found. Summary of the invention

[0004] The main purpose of the present invention is to provide a correction method and device for a galvanometer, which can improve the correction efficiency and effect.

[0005] The technical solution adopted by the present invention is: a correction method for a galvanometer,

[0006] Acquire the size of the correction format, where the size of the correction format is larger than the size of the workpiece to be processed;

[0007] Divide the correction area into N areas, where N is a natural number ≥ 2;

[0008] Selecting N calibration sheets corresponding to the N regions one by one, and the size of each calibration sheet is larger than the size of the corresponding region;

[0009] According to the size of the calibration format and the method of dividing the calibration format into regions, a preset overall pattern and a processing pattern on each calibration sheet are obtained;

[0010] The galvanometer uses the correction sheet to calibrate the corresponding areas one by one according to the preset overall pattern.

[0011] According to the above method, the processing pattern of each calibration sheet includes a portion that is repeated with the processing pattern of the adjacent calibration sheet, and the repeated portion corresponds to the same position in the preset overall pattern, and the same position is used as the overlap feature portion;

[0012] The step of using the correction sheets to correct the corresponding areas one by one is specifically as follows:

[0013] First, select a calibration film to calibrate the corresponding area;

[0014] Then, a calibration sheet corresponding to an adjacent area of ​​the calibrated area is selected, and the adjacent area of ​​the calibrated area is calibrated according to the overlapped characteristic portion;

[0015] Until all areas are calibrated.

[0016] According to the above method, the preset overall pattern is a marking point array, and the overlapping characteristic parts are at least two marking points in the marking point array.

[0017] According to the above method, the preset overall pattern is obtained by:

[0018] First, according to the contour of the calibration format, a limited number of marking points and their relative positions are preset as the contour of the preset overall pattern;

[0019] Then, according to the areas divided by the correction format, the outline of the preset overall pattern is divided into the same areas;

[0020] The N regions of the preset overall pattern correspond to the N calibration sheets one by one, and a portion of marking points are preset at the positions where adjacent regions of the N regions of the preset overall pattern are spliced ​​as overlapping feature parts;

[0021] The finite number of marking points and the marking points of the overlapping characteristic parts constitute the preset overall pattern as a whole;

[0022] According to all the marking points and relative positions of the preset overall pattern, the marking points included in each area of ​​the preset overall pattern are matched to each calibration sheet corresponding to each area, and the processed pattern of each calibration sheet is formed.

[0023] According to the above method, firstly selecting a calibration film to calibrate the corresponding area specifically includes:

[0024] Selecting a first calibration sheet, and using a laser to engrave a corresponding processing pattern on the first calibration sheet under the control of a galvanometer;

[0025] The obtained processing pattern is measured under the second dimension, and the coordinates of all processing points constituting the processing pattern on the first calibration sheet are measured;

[0026] The coordinates of the processing points obtained by measurement are imported into the galvanometer calibration file to complete the calibration of the corresponding area of ​​the first calibration film;

[0027] The correcting of the adjacent area of ​​the corrected area according to the overlapping characteristic portion specifically includes:

[0028] Select a calibration sheet corresponding to an adjacent area of ​​the calibrated area, and use a laser to engrave a corresponding processing pattern on the calibration sheet under the control of a galvanometer;

[0029] The obtained processing pattern is measured under the two-dimensional element. Since the coordinates of the marking points of the overlapping feature parts in the calibrated area have been determined, the processing points engraved according to the overlapping feature parts are selected to establish a coordinate system, and the coordinates of all processing points on the calibration sheet are measured;

[0030] The coordinates of the processing points obtained by measurement are imported into the galvanometer calibration file to complete the calibration of the corresponding area of ​​the calibration sheet.

[0031] After completing the calibration of the corresponding area of ​​the calibration sheet according to the above method, the corresponding processing pattern is engraved again on the calibration sheet, and the coordinates of each processing point obtained by the second engraving are measured. After determining that the requirements are met, the calibration sheet is removed.

[0032] According to the above method, the workpiece is a rectangle, and the correction format is a rectangle larger than the workpiece;

[0033] The processing pattern is specifically: each calibration sheet is processed by laser to form a processing point array having at least two processing points in the horizontal direction and the vertical direction respectively, wherein the horizontal direction and the vertical direction are two directions perpendicular to each other in the same plane;

[0034] From the second calibration onwards, each calibration uses at least two marking points of the overlapping feature parts to establish a plane coordinate system for calibration.

[0035] According to the above method, the method further comprises:

[0036] After the corresponding areas are corrected one by one using the correction sheets, the overall graphic obtained by correction is scaled and adjusted so that the size accuracy of the overall graphic meets the requirements.

[0037] According to the above method, the calibration sheet and the workpiece are made of the same material.

[0038] A calibrating device for a galvanometer comprises a galvanometer control unit, wherein the galvanometer control unit is used to control the galvanometer to complete the calibrating method for the galvanometer.

[0039] The beneficial effects produced by the present invention are:

[0040] 1. By dividing the calibration format into several small calibration formats, each area corresponds to a calibration sheet for calibration, thus completing the calibration of the entire calibration format, reducing the size limit of the calibration sheet, and avoiding the problem of accuracy deviation caused by calibration sheets made of other materials and the repeated calibration work caused by calibration, effectively improving the calibration efficiency and effect.

[0041] 2. By establishing a correction sequence and reference benchmark between several correction films, that is, setting overlapping feature parts in the preset overall pattern, selecting correction films corresponding to adjacent areas of the corrected area, and correcting the adjacent areas of the corrected area according to the overlapping feature parts, the correction of the entire correction format is completed, avoiding errors and adjustment time between several corrections, and improving correction accuracy and efficiency.

[0042] 3. After all corrections are completed, the overall size accuracy of the graphics is further improved by scaling the graphics as a whole. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] The present invention will be further described below with reference to the accompanying drawings and embodiments, in which:

[0044] Figure 1 It is a schematic diagram of the overlap between the calibration format and the calibration sheet size in the first embodiment of the present invention.

[0045] Figure 2 It is a schematic diagram of the connection between the correction sheet and the dot matrix of each area of ​​the correction format in the first embodiment of the present invention.

[0046] Figure 3 It is a schematic diagram of a preset pattern in the first embodiment of the present invention.

[0047] Figure 4 It is a schematic diagram of the overlap between the calibration format and the calibration film size in the second embodiment of the present invention.

[0048] Figure 5 It is a schematic diagram of the overlap between the calibration format and the calibration sheet size in the third embodiment of the present invention.

[0049] In the figure: 1-calibration format, 2-processing part, 3-calibration sheet. DETAILED DESCRIPTION

[0050] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0051] The present invention provides a method for calibrating a galvanometer, comprising the following steps:

[0052] S1. Obtain the size of the correction format. The size of the correction format 1 is larger than the size of the workpiece to be processed.

[0053] S2. Divide the calibration format into N regions, where N is a natural number ≥ 2. The N regions can be of the same size or can be determined according to actual conditions. For example, if the workpiece and the calibration format are both rectangular, then the divided regions can all be rectangular; if the workpiece is circular, the calibration format can be circular, a rectangle covering the workpiece, or other shapes, then the N regions can be a quarter circle, a rectangle, or a partial sector or partial rectangle.

[0054] S3. Select N calibration sheets corresponding to the N regions one by one, and the size of each calibration sheet is larger than the size of its corresponding region.

[0055] S4. According to the size of the calibration format and the method of dividing the calibration format into regions, a preset overall pattern and a processing pattern on each calibration sheet are obtained.

[0056] Among them, the preset overall pattern is usually preset in the industrial computer in advance. Since the size of each correction sheet is larger than the area of ​​the corresponding correction format, the processing pattern of each correction sheet contains a portion that repeats the processing pattern of the adjacent correction sheet. The repeated portion corresponds to the same position in the preset overall pattern, and the same position is used as the overlap feature portion. Generally speaking, the preset overall pattern is a dot array. For the convenience of distinguishing descriptions, it is a marking dot array in this application. The overlap feature portion is at least 2 marking points in the marking dot array. The marking points are cross lines or dots or other patterns with the same function.

[0057] More specifically, the preset overall pattern preset in the industrial computer is obtained in the following manner: first, according to the contour of the calibration format, a limited number of marking points and relative positions are preset as the contour of the preset overall pattern; then, according to the areas divided by the calibration format, the contour of the preset overall pattern is divided into the same areas;

[0058] The N regions of the preset overall pattern correspond to the N calibration sheets one by one, and a portion of marking points are preset at the positions where adjacent regions of the N regions of the preset overall pattern are spliced ​​as coincident feature parts;

[0059] The finite number of marking points and the marking points of the overlapping characteristic parts constitute the preset overall pattern as a whole.

[0060] After the preset overall pattern is obtained, the marking points included in each area of ​​the preset overall pattern are matched to each calibration sheet corresponding to each area according to all marking points and relative positions of the preset overall pattern, and the processing pattern of each calibration sheet is formed. The processing can be set on the calibration sheet by laser scanning or other methods.

[0061] S5. According to the preset overall pattern and the processed pattern, the corresponding areas are corrected one by one using the correction sheet, specifically:

[0062] S51, first select a calibration film to calibrate the corresponding area.

[0063] Select the first calibration sheet, use a laser to engrave the corresponding processing pattern on the first calibration sheet under the control of the galvanometer; measure the obtained processing pattern under the second dimension, and measure the coordinates of all processing points constituting the processing pattern on the first calibration sheet; import the coordinates of the processing points obtained by measurement into the galvanometer calibration file, and complete the calibration of the corresponding area of ​​the first calibration sheet. Specifically, after importing the coordinates of the processing points obtained by measurement into the galvanometer calibration file, the galvanometer can complete the calibration using its own algorithm, the purpose of which is to correct the coordinates of the processing points that deviate from the preset overall pattern to be consistent with the coordinates of the preset pattern marking points. This part of the content is the prior art and is not the focus of the present invention, so it will not be repeated.

[0064] S52, selecting a calibration film corresponding to an adjacent area of ​​the calibrated area, and calibrating the adjacent area of ​​the calibrated area according to the overlapping feature portion.

[0065] Select a calibration sheet corresponding to an adjacent area of ​​the calibrated area, and use a laser to engrave a corresponding processing pattern on the calibration sheet under the control of a galvanometer; measure the obtained processing pattern under the second dimension, and since the coordinates of the marking points of the overlapping feature parts in the calibrated area have been determined, select the processing points engraved according to the overlapping feature parts to establish a coordinate system, and measure the coordinates of all processing points on the calibration sheet; import the coordinates of the measured processing points into the galvanometer calibration file to complete the calibration of the corresponding area of ​​the calibration sheet.

[0066] Optionally, after completing the calibration of the corresponding area of ​​the calibration sheet, the corresponding processing pattern is engraved again on the calibration sheet, and the coordinates of each processing point in the processing point array obtained by the second engraving are measured. After determining that the requirements are met, the calibration sheet is removed, and then the calibration of the next adjacent area is performed.

[0067] Until all areas are calibrated.

[0068] Specifically, if the workpiece is a rectangle and the correction format is a rectangle larger than the workpiece, then the processing pattern can be: each correction sheet is processed by laser to form a processing point array with at least 2 processing points in the horizontal and vertical directions respectively, and the horizontal and vertical directions are two directions perpendicular to each other in the same plane.

[0069] Then, after the first calibration, based on the calibrated area, from the second calibration onwards, each calibration uses at least two marking points of the overlapping feature parts to establish a plane coordinate system (starting from the second calibration, the points for establishing the coordinate system are carved out based on at least two marking points of the overlapping feature parts. Here, using at least two marking points of the overlapping feature parts to establish a plane coordinate system actually means establishing a coordinate system based on the processing points carved out based on at least two marking points of the overlapping feature parts) to perform calibration. Since the processing points carved based on the overlapping feature parts are in the horizontal or vertical direction, the plane rectangular coordinate system can be obtained based on the line connecting the two processing points and the direction perpendicular to the line connecting the two processing points.

[0070] Since there may be partial errors in size during the first calibration, and the subsequent calibration is based on the calibrated area, after all calibrations are completed, there may also be partial errors in the size of the overall graphic. Therefore, preferably, the method may further include: S6, after calibrating the corresponding areas one by one using the calibration sheet, scaling and adjusting the overall graphic obtained by calibration so that the size accuracy of the overall graphic meets the requirements.

[0071] By adopting the method of the present invention, a correction sheet with the same material as the workpiece can be used, and each piece is corrected using mature correction technology, thereby reducing the restrictions on the material and size of the correction sheet.

[0072] The present invention also provides a galvanometer correction device, comprising a galvanometer control unit, wherein the galvanometer control unit is used to control the galvanometer to complete the galvanometer correction method. Specific embodiment:

[0074] Embodiment 1:

[0075] A detailed description is given by taking N=4 and the workpiece being a rectangular sheet material as an example.

[0076] like Figures 1 to 3 As shown, select a calibration format 1 larger than the workpiece 2, and divide the calibration format 1 into 4 small rectangles, namely A, B, C, and D areas; take 4 calibration sheets 3 made of the same material as the workpiece, and name them as A, B, C, and D calibration sheets for the convenience of description, which correspond to A, B, C, and D areas respectively. Figure 2 The workpiece 2 shown in the figure does not need to be placed on the calibration platform during the calibration process. Figure 2 The workpiece 2 is placed only to facilitate the relative size of the workpiece and the calibration sheet. 2. The four calibration sheets 3, A, B, C, and D in the figure are not placed on the calibration platform at the same time. During the calibration process, only one calibration sheet 3 is placed at a time to calibrate one area, that is, when calibrating an area, only the calibration sheet corresponding to that area is placed. Figure 2As shown, all the calibration sheets 3 are placed in order to conveniently represent the connection between the dot arrays of each area); wherein, there are no special requirements for the relative positions of the calibration sheets 3 placed on the calibration platform, and it is only necessary to ensure that all the marking points in each area can be processed onto the calibration sheet 3 of the corresponding area.

[0077] First of all, the working principle of the galvanometer is to control the laser to scan the workpiece according to the processing pattern preset in the industrial computer. The above-mentioned preset overall pattern is the pattern preset in the industrial computer, and the galvanometer controls the laser to punch the processing points for calibration on the calibration sheet according to this preset pattern. Therefore, in order to facilitate the subsequent calibration, the patterns (including their relative positions) required to be processed on the four calibration sheets during the calibration process are preset in advance to the industrial computer, and the processing pattern used here is a dot array.

[0078] It should be noted that, since the correction is performed in different areas, in order to ensure that the patterns of two adjacent areas can be perfectly spliced ​​when the adjacent areas are processed by the galvanometer after correction, when the processing points are processed on the correction sheet, the adjacent areas on the adjacent correction sheet share at least two marking points preset in the industrial computer. These two points are located on the horizontal or vertical line (of course, it can also be 3, 4, 5...etc.) as overlapping feature parts.

[0079] Specifically, for a rectangular sheet material, after being divided into four regions, each region is still rectangular, then it is preferred to form an M*N processing point matrix on each calibration sheet by laser processing, where M and N represent the number of horizontal and vertical processing points, respectively, and both M and N are greater than or equal to 2. The more processing points there are, the more accurate the calibration result is. The number of horizontal and vertical processing points on each calibration sheet can be set according to actual conditions and does not have to be the same.

[0080] The following is an example of processing a 2*2 processing point matrix on each correction sheet for correction.

[0081] As mentioned above, the overlapping feature part requires at least 2 marking points, and each area includes a 2*2 marking point matrix, so the pattern preset in the industrial computer in advance is as follows Figure 3 The 3*3 marker point matrix shown.

[0082] Specifically, the positional relationship between the pattern in the industrial computer and the processing points on the calibration sheet is explained by taking the Ath calibration sheet, the Bth calibration sheet, and the Dth calibration sheet as examples. Figure 2 At the same time, it also shows the distribution of processing points on each calibration sheet. Figure 3 At the same time, it also represents the distribution of each marking point of the preset overall pattern. Figure 3 The number 7 in the Figure 2 A4 on the A correction sheet; Figure 3 The number 4 in the Figure 2 A3 on the Ath correction plate and D3 on the Dth correction plate; Figure 3 The number 8 in the Figure 2 A2 on the Ath correction plate and B2 on the Bth correction plate; Figure 3 The 5 in Figure 2 A1 on the Ath correction plate also corresponds to B1 on the Bth correction plate and D1 on the Dth correction plate; Figure 3 The number 9 in the Figure 2 B4 on the B correction plate; Figure 3 The number 1 in the Figure 2 D4 on the D correction plate, and so on for other areas.

[0083] The confirmation method of the 3*3 marking point matrix preset in the industrial computer is as follows:

[0084] It is known that the size of the correction format is actually the range that the galvanometer needs to correct. Considering that the laser can easily process a dot pattern on the correction sheet, the correction format is corresponded by a limited number of mark points preset in advance in the industrial computer. As mentioned above, when each area is selected as 2*2, the length and width of the rectangular frame formed by the four preset mark points 1, 3, 9, and 7 correspond to the length and width of the correction format obtained according to the size of the workpiece. The positions of the remaining 5 mark points that need to be preset can be set according to the length and width of each divided area. This is because the length and width of each area are the parts that are corrected by the two adjacent correction sheets, and it is more convenient and simple to set it directly. Here, you can also choose to set the mark points at other positions of the parts that are corrected by the two adjacent correction sheets.

[0085] The principle of the present invention is: determine the correction width of the galvanometer according to the large-sized workpiece. Because the correction width is larger than the size of the workpiece, completing the correction of the correction width is equivalent to completing the correction of the galvanometer when processing the large-sized workpiece. When correcting the width, first divide the correction width into N small areas, and then select the relatively small-sized correction sheet currently available to correct each area respectively. As long as the positions of the processing point matrices on the N correction sheets are corrected respectively, the galvanometer correction of the large-sized workpiece can be completed. In other words, for the N=4 areas in this embodiment, the positions of the processing points on the A, B, C, and D correction sheets are corrected correctly, that is, the galvanometer correction of the four areas A, B, C, and D corresponding to the large-sized workpiece is completed, and the entire correction is naturally completed.

[0086] Specifically, the correction process of the four areas A, B, C, and D is as follows:

[0087] 1. Select any area for calibration operation, starting with area A as an example; use the laser to engrave the calibration pattern on the A calibration sheet according to the area corresponding to the A calibration sheet in the preset overall pattern, forming the above-mentioned 2*2 processing dot matrix, where A1, A2, A3, and A4 are processed according to 5, 8, 4, and 7 preset in advance by the industrial computer, respectively. Measure the obtained dot matrix under the second dimension, select A1 and A2 to establish the coordinate system, and measure the coordinates of all the dot matrices on the A calibration sheet (currently there are only 4 points, if M and N are greater than 2, it is necessary to measure the coordinates of all other dot matrices, that is, it is also necessary to preset other dot matrices into the industrial computer in advance).

[0088] 2. Import the measured coordinates of the processing points into the galvanometer calibration file. The galvanometer uses its own algorithm to complete the calibration. Then, the processing point matrix is ​​engraved again. After measuring the coordinate values ​​of each processing point, it is found that the accuracy requirements can be met (the accuracy requirements are set according to the specific actual situation). After verifying that the accuracy of the processing point matrix of the A correction piece is met, the galvanometer calibration of area A is completed. Take away the A correction piece and calibrate the next area.

[0089] 3. The next area can choose the B correction piece or the D correction piece. Just make sure to calibrate it clockwise or counterclockwise. If you choose the B area, put in the B correction piece and carve a processing point matrix on it, then measure the dot matrix under the two-dimensional element, and use B1 and B2 on the B correction piece as the basis when establishing the coordinate system; if you choose the D area, put in the D correction piece and carve a processing point matrix on it, then measure the dot matrix under the two-dimensional element, and use D1 and D3 as the basis when establishing the coordinate system. In this way, it is ensured that the coordinate system is established based on the calibrated area, so that after the next area is calibrated, there is no angle and size deviation from the previous area, thereby ensuring the accuracy and size of the overall graphics after all areas are calibrated.

[0090] 4. Same as step 2, after verifying that the accuracy of the processing point matrix on the Bth correction sheet (or the Dth correction sheet) meets the standard (measure the coordinates of all the dot matrix on the Bth or Dth correction sheet, import the measured results into the galvanometer calibration file, and then engrave the processing point matrix again. After measuring the coordinate values ​​of each point, it is found that the accuracy requirements can be met) proceed to the next area calibration.

[0091] 5. After all areas have been calibrated in sequence, the galvanometer calibration is completed.

[0092] Furthermore, after all regions are corrected in step 5, the scaling of the graphics is adjusted so that the overall graphics accuracy meets the requirements. Specifically, each correction sheet may still have a slightly small correction error after correction, so the overall adjustment can be made again. Although the horizontal and vertical spacing between the processing points of each correction sheet is not limited, the horizontal and vertical spacing between adjacent regions can be the same, so the horizontal and vertical errors can be corrected as a whole. Through this fine-tuning, the correction accuracy can be further improved.

[0093] Embodiment 2:

[0094] The method and principle of this embodiment are basically the same as those of the first embodiment, except that: Figure 4 As shown, in this embodiment, the workpiece 2 is a circular sheet material, and the correction format 1 is a rectangle larger than the workpiece 2. The correction sheet can still be rectangular, and the processing pattern remains unchanged.

[0095] Embodiment three:

[0096] The method and principle of this embodiment are basically the same as those of the first embodiment, except that: Figure 5 As shown, in this embodiment, the workpiece 2 is a circular sheet material, and the correction format 1 is a circle with a size larger than the workpiece 2, divided into four quarter circles. The shape of the correction sheet is not limited, and here a rectangle with a size larger than a quarter circle is taken as an example, and the processing pattern is a processing point with a quarter circle as the outer contour (i.e., a quarter circle arc and two radius edges).

[0097] The present invention can complete all the calibration work without using substitute materials, avoiding the difference in laser processing accuracy caused by the different properties of the substitute materials themselves, thereby avoiding repeated calibration work caused by excessive accuracy deviation, and improving the calibration efficiency and effect. The method of the present invention uses the same calibration sheet as the workpiece, and at the same time, the size of the calibration sheet is not limited by the size of the workpiece. The single-piece calibration method can also use mature technology, which is convenient and reliable.

[0098] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the appended claims of the present invention.

Claims

1. A method for calibrating a galvanometer, characterized in that: Acquire the size of the correction format, where the size of the correction format is larger than the size of the workpiece to be processed; Divide the correction area into N areas, where N is a natural number ≥ 2; Selecting N calibration sheets corresponding to the N regions one by one, and the size of each calibration sheet is larger than the size of the corresponding region; According to the size of the calibration format and the method of dividing the calibration format into regions, a preset overall pattern and a processing pattern on each calibration sheet are obtained; The galvanometer uses the correction sheet to calibrate the corresponding areas one by one according to the preset overall pattern; The processing pattern of each calibration sheet includes a portion that is repeated with the processing pattern of an adjacent calibration sheet, and the repeated portion corresponds to the same position in the preset overall pattern, and the same position is used as the overlap feature portion; The step of using the correction sheets to correct the corresponding areas one by one is specifically as follows: First, select a calibration film to calibrate the corresponding area; Then, a calibration sheet corresponding to an adjacent area of ​​the calibrated area is selected, and the adjacent area of ​​the calibrated area is calibrated according to the overlapped characteristic portion; Until all areas are calibrated.

2. The galvanometer calibration method according to claim 1, characterized in that: The preset overall pattern is a marking point array, and the overlapping characteristic parts are at least two marking points in the marking point array.

3. The calibrating method for a galvanometer according to claim 2, characterized in that: The preset overall pattern is obtained by: First, according to the contour of the calibration format, a limited number of marking points and their relative positions are preset as the contour of the preset overall pattern; Then, according to the areas divided by the correction format, the outline of the preset overall pattern is divided into the same areas; The N regions of the preset overall pattern correspond to the N calibration sheets one by one, and a portion of marking points are preset at the positions where adjacent regions of the N regions of the preset overall pattern are spliced ​​as overlapping feature parts; The finite number of marking points and the marking points of the overlapping characteristic parts constitute the preset overall pattern as a whole; According to all the marking points and relative positions of the preset overall pattern, the marking points included in each area of ​​the preset overall pattern are matched to each calibration sheet corresponding to each area, and the processed pattern of each calibration sheet is formed.

4. The calibrating method for a galvanometer according to claim 3, characterized in that: The step of first selecting a calibration film to calibrate the corresponding area specifically includes: Selecting a first calibration sheet, and using a laser to engrave a corresponding processing pattern on the first calibration sheet under the control of a galvanometer; The obtained processing pattern is measured under the second dimension, and the coordinates of all processing points constituting the processing pattern on the first calibration sheet are measured; The coordinates of the processing points obtained by measurement are imported into the galvanometer calibration file to complete the calibration of the corresponding area of ​​the first calibration film; The correcting of the adjacent area of ​​the corrected area according to the overlapping characteristic portion specifically includes: Select a calibration sheet corresponding to an adjacent area of ​​the calibrated area, and use a laser to engrave a corresponding processing pattern on the calibration sheet under the control of a galvanometer; The obtained processing pattern is measured under the two-dimensional element. Since the coordinates of the marking points of the overlapping feature parts in the calibrated area have been determined, the processing points engraved according to the overlapping feature parts are selected to establish a coordinate system, and the coordinates of all processing points on the calibration sheet are measured; The coordinates of the processing points obtained by measurement are imported into the galvanometer calibration file to complete the calibration of the corresponding area of ​​the calibration sheet.

5. The calibrating method for a galvanometer according to claim 4, characterized in that: After completing the calibration of the corresponding area of ​​the calibration sheet, engrave the corresponding processing pattern on the calibration sheet again, measure the coordinates of each processing point obtained by the second engraving, and remove the calibration sheet after confirming that the requirements are met.

6. The galvanometer calibration method according to claim 3, 4 or 5, characterized in that: The workpiece is a rectangle, and the correction plane is a rectangle larger than the workpiece; The processing pattern is specifically: each calibration sheet is processed by laser to form a processing point array having at least two processing points in the horizontal direction and the vertical direction respectively, wherein the horizontal direction and the vertical direction are two directions perpendicular to each other in the same plane; From the second calibration onwards, each calibration uses at least two marking points of the overlapping feature parts to establish a plane coordinate system for calibration.

7. The galvanometer calibration method according to any one of claims 1 to 5, characterized in that: The method further comprises: After the corresponding areas are corrected one by one using the correction sheets, the overall graphic obtained by correction is scaled and adjusted so that the size accuracy of the overall graphic meets the requirements.

8. The galvanometer calibration method according to claim 1, characterized in that: The correction sheet is made of the same material as the workpiece.

9. A galvanometer calibration device, characterized in that: It comprises a galvanometer control unit, which is used to control the galvanometer to complete the galvanometer calibration method described in any one of claims 1 to 8.

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