A coated substrate loading rack and a coating apparatus

Abstract

The application belongs to the technical field of vacuum coating and discloses a coating substrate loading rack and a coating equipment, which comprise a framework disc, an adjusting assembly and a loading plate, the framework disc comprises two installation discs which are arranged in parallel and at intervals, an external driving mechanism can drive the framework disc to rotate around the center line of the installation disc, the adjusting assembly comprises a fixed plate, at least one fixed plate is arranged on at least one installation disc, one of the fixed plate and the installation disc is provided with a plurality of mounting positions, when the fixed plate is mounted on the installation disc through different mounting positions, the fixed plate can be located at different mounting positions along the radial direction of the installation disc, the framework disc and the adjusting assembly are arranged in a process cavity, and the loading plate is used for loading a substrate and is connected to one end of the fixed plate which faces the inner wall of the process cavity. The coating substrate loading rack and the coating equipment are compatible with substrates with different curved curvatures and can reduce production cost.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating, in particular to a coating substrate loading rack and a coating device. BACKGROUND

[0002] At present, in order to meet the coating requirements of different electronic products such as smart phones and tablet computers, the structures of coating substrates are becoming more and more different, such as flat substrates, curved substrates and curved substrates, and the curvatures of curved substrates are different. Figures 1-6 As shown in the drawings, the top view and the front view of the first substrate 301 with a flat structure, the top view and the front view of the second substrate 302 with a first curvature, and the top view and the front view of the third substrate 303 with a second curvature are shown. The distances from the coating surfaces of the three substrates to the coating source are different due to the different curvatures.

[0003] At present, the application of automatic magnetron coating machines has become increasingly widespread, but in the prior art, as shown in the drawings, the automatic magnetron coating machine includes a substrate loading skeleton 100', which is arranged in a process chamber 200'. Since the substrate loading skeleton 100' and the process chamber 200' have a fixed structure, the distance between the coating substrate on the substrate loading skeleton 100' and the coating source in the process chamber 200' is a fixed value. Figure 7 When different curvature substrates need to be coated, if the existing fixed structure of the substrate loading skeleton 100' and the process chamber 200' is used, the distance between the substrate to be coated and the coating source may be different, which may affect the coating effect; or a suitable substrate loading skeleton 100' needs to be replaced to meet the coating requirements of the substrate with a specific curvature. That is, in the prior art, the compatibility of the substrate loading skeleton 100' is poor, and different curvature substrates need to be designed separately, which increases the production cost. SUMMARY

[0004] The present application aims to provide a coating substrate loading rack and a coating device that can accommodate substrates with different curvatures and reduce production costs.

[0005] To achieve this purpose, the present application adopts the following technical solutions:

[0006] On the one hand, a coating substrate loading rack is provided, which comprises:

[0007] The skeleton disc comprises two mounting discs arranged in parallel and spaced apart, and an external driving mechanism can drive the skeleton disc to rotate around the center line of the mounting disc;

[0008] The adjusting assembly comprises a fixing plate, at least one of the fixing plates is arranged on at least one of the mounting plates, a plurality of mounting positions are arranged on one of the fixing plate and the mounting plate, and the fixing plate can be arranged at different mounting positions along the radial direction of the mounting plate when the fixing plate is arranged on the mounting plate through different mounting positions, and the skeleton plate and the adjusting assembly are arranged in the process cavity.

[0009] The loading plate is arranged on the end of the fixing plate which is connected to the inner wall of the process cavity.

[0010] Optionally, the fixing plate comprises a first mounting plate and a second mounting plate arranged in an L shape, the first mounting plate is connected to the mounting plate, and the mounting positions are arranged on the first mounting plate, and the second mounting plate is connected to the loading plate.

[0011] Optionally, the fixing plate is a symmetrical structure, the second mounting plate is arranged perpendicular to the center line of symmetry of the first mounting plate,

[0012] The mounting positions comprise a plurality of adjusting holes arranged on the first mounting plate along the center line of symmetry of the first mounting plate, and a connecting hole is arranged on the mounting plate; or the mounting positions comprise a plurality of adjusting mounting holes arranged on the mounting plate along the radial direction, and an adjusting connecting hole is arranged on the first mounting plate.

[0013] The coated substrate loading frame further comprises a first fastener, the first fastener passes through the connecting hole and the adjusting hole to fix the first mounting plate to the mounting plate.

[0014] Optionally, the adjusting hole is a waist-shaped hole, a circular arc hole or a circular hole.

[0015] Optionally, a reinforcing rib is arranged on the fixing plate, and the reinforcing rib connects the first mounting plate and the second mounting plate.

[0016] Optionally, a plurality of groups of the adjusting assembly are arranged along the circumferential direction of the mounting plate, and a plurality of loading plates are arranged one by one on the plurality of groups of the adjusting assembly.

[0017] Optionally, the cross section of the first mounting plate is in the shape of a fan ring, and the outer contour line of the first mounting plate is arranged concentrically with the mounting plate.

[0018] Optionally, the adjusting assembly comprises two fixing plates, the two fixing plates are arranged on two mounting plates respectively, and the two first mounting plates of one group of the adjusting assembly are arranged on two sides of the two mounting plates away from each other respectively.

[0019] Optionally, the skeleton disc comprises:

[0020] a connecting disc, the external driving mechanism is connected to the connecting disc, and the connecting disc and the mounting disc are coaxial;

[0021] a plurality of spokes, connected to the connecting disc and one of the mounting discs;

[0022] a plurality of support bars, both ends of each of which are connected to two of the mounting discs.

[0023] In one aspect, a coating equipment is provided, which comprises the coating substrate loading rack described above.

[0024] The present application has the following advantages:

[0025] The coating substrate loading rack and the coating equipment provided by the present application can adjust the relative position of the fixing plate and the inner wall of the process chamber by installing the fixing plate on the mounting disc through different mounting positions, so as to adjust the distance between the surface to be coated of the loading plate and the coating source of the process chamber, and make the coating equipment compatible with substrates with different curvatures. Without replacing the skeleton disc, the coating equipment can be used to coat substrates with different curvatures in the same process chamber, thereby improving the applicability and reducing the production cost. When it is necessary to coat substrates with different curvatures, the fixing plate can be adjusted to be suitable for substrates with different curvatures, which is simple in structure and convenient to use. Specifically, the mounting position can be arranged on the fixing plate or the mounting disc, and the position of the fixing plate relative to the mounting disc can be adjusted along the radial direction. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 is a top view of a first substrate in the prior art;

[0027] Figure 2 is a front view of the first substrate in the prior art;

[0028] Figure 3 is a top view of a second substrate in the prior art;

[0029] Figure 4 is a front view of the second substrate in the prior art;

[0030] Figure 5 is a top view of a third substrate in the prior art;

[0031] Figure 6 is a front view of the third substrate in the prior art;

[0032] Figure 7 is a schematic view of the assembly structure of the mounting skeleton and the process chamber in the prior art;

[0033] Figure 8is a structure schematic view of the film-coated substrate loading rack without a loading plate provided by the embodiment of the present application;

[0034] Figure 9 is a structure schematic view of the film-coated substrate loading rack provided by the embodiment of the present application;

[0035] Figure 10 is a top view of the film-coated substrate loading rack provided by the embodiment of the present application;

[0036] Figure 11 is Figure 10 a sectional view of A-A of

[0037] Figure 12 is an enlarged view of I of Figure 8

[0038] in the figure:

[0039] 100', substrate loading skeleton; 200', process cavity;

[0040] 100, external driving mechanism; 200, inner wall of the process cavity; 301, first kind of substrate; 302, second kind of substrate; 303, third kind of substrate;

[0041] 1, skeleton disc; 11, mounting disc; 12, connecting disc; 13, spoke; 14, support strip; 15, annular connecting plate; 151, mounting hole; 16, support column;

[0042] 2, adjusting assembly; 21, fixed plate; 211, first mounting plate; 212, second mounting plate; 2121, adjusting hole; 213, reinforcing rib;

[0043] 3, loading plate;

[0044] 4, first fastener;

[0045] 5, second fastener. DETAILED DESCRIPTION

[0046] In order to make the technical problems solved by the present application, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the embodiments of the present application will be further described in detail below with reference to the drawings. Obviously, the described embodiments are only part of the embodiments of the present application, but not all the embodiments. The embodiments given by the present application belong to the field of vacuum coating, and can also be adopted in vacuum processing technologies such as vacuum etching, in addition to vacuum coating.

[0047] Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of the present application.

[0048] ​In the description of the present application, unless otherwise explicitly specified and limited, the term "substrate" should be understood in a broad sense, covering any shape of workpiece to be coated.

[0049] In the description of the present application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integrated; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, it can be the internal communication of two elements or the interaction relationship of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0050] In the present application, unless otherwise explicitly specified and limited, the first feature "on" or "under" the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "under", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0051] The embodiment provides a coating equipment, which comprises a coating substrate loading rack, a process cavity, a sputtering device and a driving mechanism. The coating substrate loading rack is arranged in the process cavity, the substrate is mounted on the coating substrate loading rack, the driving mechanism drives the coating substrate loading rack to rotate to drive the substrate to rotate in the process cavity, and the sputtering device works to make the substrate perform a coating process. In order to improve the compatibility of the coating equipment, the embodiment further provides a coating substrate loading rack.

[0052] Specifically, as shown in the figure, Figures 8-11 The coating substrate loading rack comprises a skeleton disc 1, an adjusting assembly 2 and a loading plate 3. Specifically, the skeleton disc 1 comprises two mounting discs 11 arranged in parallel and at intervals, and an external driving mechanism 100 can drive the skeleton disc 1 to rotate around the center line of the mounting disc 11. The adjusting assembly 2 comprises a fixed plate 21, at least one fixed plate 21 is arranged on at least one mounting disc 11, one of the fixed plate 21 and the mounting disc 11 has a plurality of mounting positions, and when the fixed plate 21 is mounted on the mounting disc 11 through different mounting positions, the fixed plate 21 can be located at different mounting positions along the radial direction of the mounting disc 11. The skeleton disc 1 and the adjusting assembly 2 are arranged in the process cavity. The loading plate 3 is used for loading the substrate, and one end of the loading plate 3 connected to the fixed plate 21 faces the inner wall 200 of the process cavity.

[0053] By setting the mounting disc 11 and the fixing plate 21, the fixing plate 21 can be adjusted to be installed at different mounting positions along the radial direction of the mounting disc 11, the relative position between the fixing plate 21 and the inner wall 200 of the process cavity, i.e. the coating source, is adjusted, the spacing between the loading plate 3 and the inner wall 200 of the process cavity, i.e. the coating source, is adjusted, the coating equipment can be compatible with substrates with different curved curvatures, and the same process cavity can be used to coat substrates with different curvatures without replacing the skeleton disc 1, thereby improving the applicability and reducing the production cost. When it is necessary to coat substrates with different curved curvatures, the fixing plate 21 can be adjusted to be suitable for substrates with different curved curvatures, which is simple in structure and convenient to use.

[0054] Specifically, the substrate can be mounted or attached on the side of the loading plate 3 facing the inner wall 200 of the process cavity, which can be referred to the prior art and will not be described here.

[0055] Specifically, the external driving mechanism 100 can be referred to the prior art and will not be described here.

[0056] Optionally, as shown in Figure 8 The skeleton disc 1 includes a connecting disc 12, a plurality of spokes 13 and a plurality of support bars 14. Specifically, the external driving mechanism 100 is connected to the connecting disc 12, and the connecting disc 12 and the mounting disc 11 are arranged on the same center line. The plurality of spokes 13 are connected to the connecting disc 12 and one mounting disc 11. The two ends of the plurality of support bars 14 are respectively connected to the two mounting discs 11. The two mounting discs 11 are connected by the support bars 14, and the two mounting discs 11 and the connecting disc 12 are connected by the spokes 13. The external driving mechanism 100 is connected to the connecting disc 12, so that the mounting disc 11 rotates with the connecting disc 12, thereby driving the adjusting assembly 2, the loading plate 3 and the substrate mounted on the loading plate 3 to rotate, which is simple in structure and light in weight. Further, the connecting disc 12, the spokes 13 and the support bars 14 are all provided with weight reduction holes to further reduce the weight of the skeleton disc 1. Further, the support bars 14 are connected by the annular connecting plate 15 to further improve the stability of the mounting structure. Specifically, the annular connecting plate 15 can be a whole structure or a split structure, which can be adjusted according to the actual situation. As shown in Figure 11 The two skeleton discs 1 are arranged along the Y direction, and the fixing plate 21 is arranged on the skeleton disc 1 along the X direction, wherein the X direction is the radial direction of the skeleton disc 1, and the Y direction is the vertical direction in this embodiment.

[0057] Further, as shown in Figure 8 and Figure 12As shown, the skeleton disc 1 further comprises a support column 16, one end of which is fixed to the annular connecting plate 15, and the other end is connected to the loading plate 3, for supporting the loading plate 3 and preventing structural deformation of the loading plate 3 when the large substrate is installed, thereby improving the structural reliability. Specifically, the support column 16 can be connected to the loading plate 3 and the annular connecting plate 15 through concave-convex matching, or can be connected through clamping, insertion, fasteners, or adhesion, etc., without limitation; in the embodiment, the annular connecting plate 15 is provided with a mounting hole 151, and the loading plate 3 is provided with an insertion hole (not shown in the figure), and the two ends of the support column 16 are respectively inserted into the mounting hole 151 and the insertion hole; specifically, the mounting hole 151 and the insertion hole can be square holes, round holes, or holes of other shapes, which are adapted to the support column 16. Further, a plurality of support columns 16 can be provided, and when the fixing plate 21 is arranged at different positions, support columns 16 of corresponding lengths are selected for support, and preferably, the support column 16 can be provided as a telescopic structure, and when the fixing plate 21 is arranged at different positions, the length of the support column 16 is adjusted to adapt to the support, thereby avoiding disassembly and making use more convenient.

[0058] Alternatively, as Figure 9 shown, the fixing plate 21 comprises a first mounting plate 211 and a second mounting plate 212 arranged in an L shape, the first mounting plate 211 is connected to the mounting disc 11 and the mounting position is arranged on the first mounting plate 211, and the second mounting plate 212 is connected to the loading plate 3, and the first mounting plate 211 and the second mounting plate 212 are respectively connected to the mounting disc 11 and the loading plate 3, thereby avoiding structural interference.

[0059] Specifically, as Figure 11 shown, the adjusting assembly 2 comprises two fixing plates 21, and the two fixing plates 21 are respectively mounted on the two mounting discs 11, and the two first mounting plates 211 on one set of adjusting assemblies 2 are respectively mounted on the sides of the two mounting discs 11 away from each other, thereby avoiding Figure 9 the structural interference between the second mounting plate 212 and other connecting structures such as the support strip 14 between the two mounting discs 11 of the skeleton disc 1 when the first mounting plate 211 shown in the figure is adjusted in the radial direction of the mounting disc 11, and the space along the circumference of the mounting disc 11 can be fully utilized, thereby facilitating the layout. In other embodiments, the two first mounting plates 211 can also be respectively mounted on the sides of the two mounting discs 11 facing each other, and specifically, the first mounting plate 211 can be mounted between the two adjacent support strips 14 to prevent interference.

[0060] Optionally, the mounting position can be arranged on the fixing plate 21 or on the mounting disc 11, or the mounting position can be an intermediate connecting structure, the fixing plate 21 is fixed to the intermediate connecting structure, the intermediate connecting structure can be adjusted on the mounting disc 11, or the intermediate connecting structure is fixed to the mounting disc 11, and the fixing plate 21 can be adjusted relative to the intermediate connecting structure; the fixing plate 21 can be adjusted along the radial direction relative to the mounting disc 11, and no specific limitation is made.

[0061] In this embodiment, as shown in Figure 9 and Figure 10 , the fixing plate 21 is a symmetrical structure, the second mounting plate 212 is arranged perpendicular to the symmetry center line of the first mounting plate 211, the mounting position includes a plurality of adjustment holes 2121 arranged along the symmetry center line of the first mounting plate 211, the mounting disc 11 is provided with a connecting hole, and the first fastener 4 passes through the connecting hole and the adjustment hole 2121 to fix the first mounting plate 211 to the mounting disc 11. Referring to Figure 11 , when the first mounting plate 211 is connected to the mounting disc 11 through the adjustment hole 2121 closest to the second mounting plate 212, the distance between the loading plate 3 and the inner wall 200 of the process cavity is the largest, which can be applied to the installation of the third substrate 303; when the second mounting plate 212 is connected to the mounting disc 11 through the adjustment hole 2121 farthest from the second mounting plate 212, the distance between the loading plate 3 and the inner wall 200 of the process cavity is the smallest, which can be applied to the installation of the second substrate 302; at the same time, by setting the opening positions of the two end holes of the adjustment hole 2121, any substrate between the maximum distance and the minimum distance can be coated, that is, when the substrate curvature is between the second substrate 302 and the third substrate 303, the coating substrate loading rack in this embodiment can be applied. Specifically, by setting the spacing of the two adjacent adjustment holes 2121, the position of the fixing plate 21 can be adjusted more accurately, and the coating thickness accuracy and the like can be improved. Specifically, the first fastener 4 can be a screw.

[0062] In this embodiment, as shown in Figure 9 , the adjustment hole 2121 is a circular arc hole, the circular arc hole is symmetrically arranged on the symmetry center line of the first mounting plate 211, the installation position of the first mounting plate 211 can be finely adjusted along the symmetry center line, the installation applicability is improved, and installation errors caused by machining errors of the adjustment hole 2121 are avoided, so that subsequent use is not possible; by analogy, the adjustment hole 2121 is a waist-shaped hole, and the waist-shaped hole is symmetrically arranged on the symmetry center line of the first mounting plate 211. In other embodiments, the adjustment hole 2121 is a circular hole, and the center line of the circular hole is arranged on the symmetry center line of the first mounting plate 211, so that the first mounting plate 211 is prevented from being skewed when being mounted on the mounting disc 11, and the mounting precision is improved.

[0063] Similarly, in other embodiments, the mounting position can also be a plurality of adjusting mounting holes arranged radially on the mounting disc 11, and the first mounting plate 211 is provided with an adjusting connecting hole, and the fastener can pass through the adjusting mounting hole and the adjusting connecting hole to connect the mounting disc 11 and the first mounting plate 211, and details are not repeated. Optionally, the adjusting hole is a circular arc hole, which is symmetrically arranged on the radial direction of the mounting disc 11; or the adjusting hole is a waist-shaped hole, which is symmetrically arranged on the center line of the mounting disc 11; or the adjusting hole is a circular hole, and the center line of the circular hole is arranged on the radial direction of the mounting disc 11, and details are not repeated.

[0064] Optionally, as shown in Figure 9 , the fixed plate 21 is provided with a reinforcing rib 213, the reinforcing rib 213 connects the first mounting plate 211 and the second mounting plate 212, and the structural strength of the fixed plate 21 is improved, and in the embodiment, two reinforcing ribs 213 are arranged symmetrically to make the structure bear force evenly and improve stability.

[0065] Optionally, as shown in Figures 8-10 , the adjusting assembly 2 is provided with a plurality of groups, the plurality of groups of adjusting assemblies 2 are arranged in the circumferential direction of the mounting disc 11, the loading plate 3 is provided with a plurality of groups, and the plurality of groups of loading plates 3 are one-to-one mounted on the plurality of groups of adjusting assemblies 2. A plurality of substrates can be simultaneously mounted on a plurality of loading plates 3, so that a plurality of substrates can be plated at the same time, and the plating efficiency is improved; a plurality of adjusting assemblies 2 can adjust the mounting position respectively, so that they can be used for plating different substrates at the same time, and are convenient to use. Specifically, during design, the size of the mounting disc 11 and the size and number of the fixed plate 21 can be adjusted according to the size and number of the substrate.

[0066] Optionally, as shown in Figures 8-10 , the cross section of the first mounting plate 211 is in the shape of a fan ring, and specifically, the outer contour line of the first mounting plate 211 is concentrically arranged with the mounting disc 11, so as to ensure that the two adjacent fixed plates 21 before and after adjustment will not interfere with the structure. Further, the width of the loading plate 3 is not greater than the width of the second mounting plate 212, so as to prevent structural interference.

[0067] Optionally, a guide structure is further arranged between the fixed plate 21 and the mounting disc 11 to ensure that the fixed plate 21 and the mounting disc 11 are adjusted in the radial direction. Specifically, the guide structure can be a sliding groove and a sliding table arranged on the fixed plate 21 and the mounting disc 11 respectively, or can be a guide rail and a sliding block structure, as long as the guide function is realized, and is not limited.

[0068] Optionally, as shown in Figure 11 , the loading plate 3 is detachably connected to the fixed plate 21, which is convenient for disassembly and assembly, and specifically, the second fastener 5 can be used for fixation, and the second fastener 5 can be a screw or a hook, and is preferably a hook.

[0069] Obviously, the above embodiments of the present application are merely example for clearly explaining the present application, and are not intended to limit the embodiments of the present application. Based on the above description, other different forms of changes or variations can be made by those skilled in the art. Here, it is not necessary and also impossible to enumerate all the embodiments. Any modification, equivalent replacement and improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the claims of the present application.

Claims

1. A coated substrate loading rack, characterized by, The coating substrate loading frame comprises a skeleton disc (1), an adjusting assembly (2) and a loading plate (3). The skeleton disc (1) comprises two installation discs (11) arranged in parallel and at intervals, and an external driving mechanism (100) can drive the skeleton disc (1) to rotate around the center line of the installation disc (11). The adjusting assembly (2) comprises a fixed plate (21), at least one of the fixed plates (21) is arranged on at least one of the installation discs (11), one of the fixed plate (21) and the installation disc (11) is provided with a plurality of installation positions, and the fixed plate (21) can be arranged at different installation positions along the radial direction of the installation disc (11) when the fixed plate (21) is installed on the installation disc (11) through different installation positions. The loading plate (3) is used for loading a substrate, and the loading plate (3) is connected to one end of the fixed plate (21) facing the inner wall (200) of a process cavity. The fixed plate (21) comprises a first installation plate (211) and a second installation plate (212) arranged in an L shape, the first installation plate (211) is connected to the installation disc (11), and the installation position is arranged on the first installation plate (211); and the second installation plate (212) is connected to the loading plate (3). A plurality of adjusting assemblies (2) are arranged along the circumferential direction of the installation disc (11). The adjusting assembly (2) comprises two fixed plates (21), and the two fixed plates (21) are respectively installed on the two installation discs (11).

2. The coated substrate rack of claim 1, wherein, The fixed plate (21) is a symmetrical structure, and the second installation plate (212) is arranged perpendicular to the center line of symmetry of the first installation plate (211). The installation position comprises a plurality of adjusting holes (2121) arranged on the first installation plate (211) along the center line of symmetry of the first installation plate (211), and a connecting hole is arranged on the installation disc (11); or the installation position comprises a plurality of adjusting installation holes arranged on the installation disc (11) along the radial direction, and an adjusting connecting hole is arranged on the first installation plate (211). The coating substrate loading frame further comprises a first fastener (4), and the first fastener (4) passes through the connecting hole and the adjusting hole (2121) to fix the first installation plate (211) to the installation disc (11).

3. The coated substrate rack of claim 2, wherein, The adjusting hole (2121) is a waist-shaped hole, a circular arc hole or a circular hole.

4. The coated substrate rack of claim 3, wherein, The fixed plate (21) is provided with a reinforcing rib (213) connected to the first installation plate (211) and the second installation plate (212).

5. The coated substrate rack of claim 1, wherein, The loading plate (3) is provided with a plurality of loading plates (3), and the plurality of loading plates (3) are one-to-one corresponding to the plurality of adjusting assemblies (2).

6. The coated substrate rack of claim 5, wherein, The cross section of the first installation plate (211) is in the shape of a fan ring, and the outer contour line of the first installation plate (211) is concentrically arranged with the installation disc (11).

7. The coated substrate rack of claim 1, wherein, The two first installation plates (211) of one adjusting assembly (2) are respectively installed on the two installation discs (11) away from each other.

8. The coated substrate rack of any of claims 1-7, wherein, The skeleton disc (1) comprises: a connecting disc (12) to which the external driving mechanism (100) is connected, the connecting disc (12) and the mounting disc (11) being coaxial; a plurality of spokes (13) connected to the connecting disc (12) and one of the mounting discs (11); a plurality of support bars (14) connected at both ends to two of the mounting discs (11).

9. A coating apparatus, characterized by, The coated substrate loading rack comprises the skeleton disc (1) according to any one of claims 1-8.

Images