Method and apparatus for analyzing damage cause of excimer laser window element

Abstract

The application discloses a kind of excimer laser window piece element damage reason analysis methods, by obtaining the damage information corresponding feature information of the window piece element to be analyzed determines the damage category of the window piece element to be analyzed, and determines the actual damage form of the window piece element to be analyzed, the damage category of the window piece element to be analyzed is previously using same or similar operation means, so it is in non-damage area, and the damage corresponding to the formation damage category is reproduced, the reproduced damage is compared with damage information, the information of damage is consistent with the damage information of the window piece element to be analyzed, then determine the damage reason of the window piece element to be analyzed is the same or similar operation means of the reason of forming damage category.The application determines the damage category of the window piece element to be analyzed, and reproduces damage in combination with the same or similar operation means of forming damage category, so as to accurately determine the cause of the damage category, and improve the stability of excimer laser operation.

Description

Technical Field

[0001] This application relates to the field of excimer laser technology, specifically to a method for analyzing the causes of damage to excimer laser window elements and a device for analyzing the causes of damage to excimer laser window elements. Background Technology

[0002] As the semiconductor industry places increasingly stringent demands on semiconductor chip manufacturing processes, the light source for lithography machines has evolved from the initial mercury lamp light source to the current deep ultraviolet (DUV) light source. While DUV light offers higher resolution, it also has higher single-photon energy, making it more susceptible to damage to optical components. To avoid problems such as photoinduced shrinkage and color centers caused by excessive absorption of the light source by optical components, existing DUV lasers use CaF2 (calcium fluoride), a material with extremely high transmittance for this wavelength, as the optical component, and protect the optical component through methods such as coating.

[0003] However, there is another special type of optical element in excimer lasers—the window element. This window element not only needs to have high transmittance for light of a specific wavelength or band, but also needs to isolate the external environment and protect the internal components. During the use of excimer lasers, the window element is subjected to light, force, and contaminants. These factors may cause photothermal effects, photomechanical effects, photochemical reactions, and other effects on the window element, thereby causing damage to it.

[0004] It is evident that there is more than one cause of damage to the window element. Therefore, accurately determining the cause of the damage to the window element in order to improve the stability of excimer laser operation has become an urgent problem to be solved by those skilled in the art. Summary of the Invention

[0005] This application provides a method for analyzing the causes of damage to the window element of an excimer laser, in order to solve the problem in the prior art of how to accurately determine the causes of damage to the window element, so as to improve the stability of excimer laser operation.

[0006] This application provides a method for analyzing the causes of damage to an excimer laser window element. The method involves acquiring damage information of the window element to be analyzed, obtaining characteristic information of the damage based on the damage information, determining the damage category of the window element based on the characteristic information, reproducing the damage in the non-damaged area of ​​the window element to be analyzed using a pre-set method similar to or identical to that used to form the damage category, collecting information on the reproduced damage, and comparing it with the damage information of the window element to be analyzed to determine the cause of the damage.

[0007] Optionally, obtaining damage information of the window element to be analyzed and obtaining characteristic information of the damage of the window element to be analyzed based on the damage information includes: determining the damage area of ​​the window element to be analyzed; obtaining the morphology information corresponding to the damage area; and obtaining characteristic information of the damage of the window element to be analyzed based on the morphology information.

[0008] Optionally, the characteristic information of the damage to the window element to be analyzed includes melting and ablation characteristic information, local brittle fracture or spalling characteristic information, and extended cracks without melting, local brittle fracture or spalling characteristic information;

[0009] Correspondingly, determining the damage category of the window element to be analyzed based on the feature information includes: determining the damage category of the window element to be analyzed based on the melting and ablation feature information; determining the damage category of the window element to be analyzed based on the local brittle fracture or spalling feature information; and determining the damage category of the window element to be analyzed based on the extended crack without melting, local brittle fracture or spalling feature information.

[0010] Optionally, the damage category of the window element to be analyzed determined based on the melting and ablation characteristic information and the damage category of the window element to be analyzed determined based on the local brittle fracture or spalling characteristic information respectively include contaminant-induced damage category; before reproducing the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same or similar to the one that forms the damage category, the method further includes: obtaining elemental information corresponding to the damaged area; comparing the elemental information with pre-set phase matrix information; if the elemental information is consistent with the pre-set phase matrix information, then determining the damage category of the window element to be analyzed as laser irradiation damage category; if there are different elements between the elemental information and the pre-set phase matrix information, then determining the damage cause of the window element to be analyzed corresponding to the contaminant-induced damage category of the window element to be analyzed as contaminant-induced damage cause.

[0011] Optionally, after determining that the damage category of the window element to be analyzed is laser irradiation damage, the step of reproducing the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same or similar to the one that forms the damage category includes: reproducing the first morphological features of the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set deep ultraviolet laser irradiation experiment that forms the laser irradiation damage category.

[0012] Correspondingly, the process of collecting the information on the reproduced damage and comparing it with the damage information of the window element to be analyzed to determine the cause of damage to the window element includes:

[0013] The first morphological feature is collected and compared with the damage information of the window element to be analyzed. If the morphological information in the damage information is consistent with the first morphological feature, the damage cause of the window element to be analyzed is determined to be laser irradiation damage.

[0014] Optionally, it also includes: if the morphological information in the damage information of the window element to be analyzed has distinguishing features from the first morphological feature, or if the first morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set deep ultraviolet laser irradiation experiment that forms the laser irradiation damage category, then the damage category of the window element to be analyzed is determined to be the metal contaminant damage category.

[0015] Optionally, after determining that the damage category of the window element to be analyzed is a metal contaminant damage category, the step of reproducing the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operating method that is the same as or similar to that used to form the damage category includes:

[0016] Determine whether the surface of the damaged area of ​​the window element to be analyzed is an inner surface. If so, reproduce the second morphological features of the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set metal contaminant-induced damage experiment that corresponds to the metal contaminant damage category.

[0017] Correspondingly, the process of collecting the information on the reproduced damage and comparing it with the damage information of the window element to be analyzed to determine the cause of damage to the window element includes:

[0018] The second morphological feature of the reproduced damage is collected and compared with the damage information of the window element to be analyzed. If the morphological information in the damage information of the window element to be analyzed is consistent with the second morphological feature, then the damage cause of the window element to be analyzed is determined to be electrode contaminant-induced damage.

[0019] If the morphological information in the damage information of the window element to be analyzed has distinguishable features from the second morphological feature, and according to the pre-set metal contaminant-induced damage experiment that forms the metal contaminant damage category, the second morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed, then the damage category of the window element to be analyzed is determined to be the contaminant and surface damage category, and the damage cause of the window element to be analyzed corresponding to the contaminant and surface damage category is determined to be the contaminant and surface damage cause.

[0020] Determine whether the surface of the damaged area of ​​the window element to be analyzed is an outer surface. If so, determine the damage category of the window element to be analyzed as contaminant and surface damage category, and determine the damage cause of the window element to be analyzed corresponding to the contaminant and surface damage category as contaminant and surface damage cause.

[0021] Optionally, to determine whether the surface of the damaged area of ​​the window element to be analyzed is an inner surface, if so, after determining that the cause of damage to the window element to be analyzed corresponding to the contaminant and surface damage category is not the contaminant and surface damage category, mechanical loading and temperature field loading are applied to the window element to be analyzed. The determination of the damage category of the window element to be analyzed based on the local brittle fracture or spalling characteristic information further includes: mechanical loading and metal contaminant damage category.

[0022] Correspondingly, damage is reproduced in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same or similar to the damage type, including: reproducing the third morphological features of damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set metal contaminant-induced damage experiment that is the same as the damage type that forms mechanical loading and metal contaminant damage.

[0023] Correspondingly, the process of collecting the information on the reproduced damage and comparing it with the damage information of the window element to be analyzed to determine the cause of damage to the window element includes:

[0024] The third morphological feature of the reproduced damage is collected and compared with the damage information of the window element to be analyzed. If the morphological information in the damage information of the window element to be analyzed is consistent with the third morphological feature, then the damage cause of the window element to be analyzed is determined to be electrode contaminant-induced damage and mechanical loading.

[0025] If the morphological information in the damage information of the window element to be analyzed has distinguishable features from the third morphological feature, and the third morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set metal contaminant-induced damage experiment that forms mechanical loading and metal contaminant damage categories, then the damage cause of the window element to be analyzed is determined to be contaminant-induced damage.

[0026] Optionally, after determining whether the surface of the damaged area of ​​the window element to be analyzed is an outer surface, if so, the determination of the damage category of the window element to be analyzed based on the local brittle fracture or spalling characteristic information further includes: gaseous pollutant damage category;

[0027] Correspondingly, the reproduction of damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method of the same or similar to the damage type includes: reproducing the fourth morphological feature of damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set gas pollutant-induced damage experiment of the same type as the gas pollutant damage.

[0028] Correspondingly, the process of collecting the information on the reproduced damage and comparing it with the damage information of the window element to be analyzed to determine the cause of damage to the window element includes:

[0029] The fourth morphological feature of the reproduced damage is collected and compared with the damage information of the window element to be analyzed. If the morphological information in the damage information of the window element to be analyzed is consistent with the fourth morphological feature, then the damage cause of the window element to be analyzed is determined to be gas pollutant-induced damage.

[0030] If the morphological information in the damage information of the window element to be analyzed has distinguishing features from the fourth morphological feature, and the fourth morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set gas pollutant-induced damage experiment that forms the gas pollutant damage category, then the damage category of the window element to be analyzed is determined to be the pollutant and surface damage category, and the damage cause of the window element to be analyzed corresponding to the pollutant and surface damage category is determined to be the pollutant and surface damage cause.

[0031] Optionally, if it is determined that the cause of damage to the window element to be analyzed corresponding to the contaminant and surface damage categories is not the contaminant and surface damage, then mechanical loading and temperature field loading are applied to the window element to be analyzed.

[0032] Correspondingly, the determination of the damage category of the window element to be analyzed based on the local brittle fracture or fracture characteristic information also includes mechanical loading and gaseous contaminant damage categories;

[0033] Correspondingly, damage is reproduced in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same or similar to the damage type, including: the fifth morphological feature of the damage is reproduced in the non-damaged area of ​​the window element to be analyzed according to a pre-set gas contaminant-induced damage experiment that is the same as the damage type of mechanical loading and gas contaminant damage.

[0034] Correspondingly, the process of collecting the information on the reproduced damage and comparing it with the damage information of the window element to be analyzed to determine the cause of damage to the window element includes:

[0035] The fifth morphological feature of the reproduced damage is collected and compared with the damage information of the window element to be analyzed. If the morphological information in the damage information of the window element to be analyzed is consistent with the fifth morphological feature, then the damage cause of the window element to be analyzed is determined to be gas pollutant-induced damage and mechanical loading.

[0036] If the morphological information in the damage information of the window element to be analyzed has distinguishable features from the fifth morphological feature, and the fifth morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set gas pollutant-induced damage experiment that forms mechanical loading and gas pollutant damage categories, then the damage cause of the window element to be analyzed is determined to be a pollutant-induced damage cause.

[0037] Optionally, after determining the damage category of the window element to be analyzed based on the information of the extended crack and the absence of melting, local brittle fracture or spalling characteristics, the window element to be analyzed is subjected to mechanical loading and temperature field loading.

[0038] Correspondingly, the step of determining the damage category of the window element to be analyzed based on the information of the extended crack without melting, local brittle fracture or spalling characteristics also includes: the damage category of the loading operation;

[0039] Correspondingly, the damage is reproduced in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same or similar to the damage type that forms the damage, including: the sixth morphological feature of the damage reproduced in the non-damaged area of ​​the window element to be analyzed according to a pre-set loading damage experiment that forms the damage type of the loading operation.

[0040] Correspondingly, the process of collecting the information on the reproduced damage and comparing it with the damage information of the window element to be analyzed to determine the cause of damage to the window element includes:

[0041] The sixth morphological feature of the reproduced damage is collected and compared with the damage information of the window element to be analyzed. If the morphological information in the damage information of the window element to be analyzed is consistent with the sixth morphological feature, then the damage cause of the window element to be analyzed is determined to be laser irradiation damage and mechanical loading.

[0042] If the morphological information in the damage information of the window element to be analyzed has distinguishable features from the sixth morphological feature, and the sixth morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set loading damage experiment that forms the damage category of the loading operation, then the damage cause of the window element to be analyzed is determined to be the contaminant and surface damage cause corresponding to the initial state of the window element to be analyzed.

[0043] This application embodiment also provides a device for analyzing the causes of damage to an excimer laser window element, comprising: a feature information acquisition unit, used to acquire damage information of the window element to be analyzed, and obtain feature information of the damage to the window element to be analyzed based on the damage information; a damage category determination unit, used to determine the damage category of the window element to be analyzed based on the feature information; a damage reproduction unit, used to reproduce the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same or similar to the damage category; and a damage cause determination unit, used to collect information of the reproduced damage and compare it with the damage information of the window element to be analyzed to determine the cause of the damage to the window element to be analyzed.

[0044] Compared with the prior art, this application has the following advantages:

[0045] This application provides a method for analyzing the causes of damage to an excimer laser window element, comprising: acquiring damage information of the window element to be analyzed; obtaining characteristic information of the damage to the window element to be analyzed based on the damage information; determining the damage category of the window element to be analyzed based on the characteristic information; reproducing the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same as or similar to the damage category; collecting information on the reproduced damage and comparing it with the damage information of the window element to be analyzed to determine the cause of the damage to the window element to be analyzed.

[0046] This application embodiment obtains feature information corresponding to the damage information of the window element to be analyzed, thereby determining the damage category of the window element to be analyzed corresponding to the feature information. This damage category can be compared with a pre-set damage category to determine the actual damage form of the window element to be analyzed. The damage category of the window element to be analyzed is obtained by using the same or similar operating methods. Then, the damage corresponding to the damage category can be reproduced in the non-damaged area using the same or similar operating methods. Finally, the reproduced damage corresponding to the damage category is compared with the damage information of the window element to be analyzed. If the reproduced damage information is consistent with the damage information of the window element to be analyzed, then the cause of the damage to the window element to be analyzed is determined to be the use of the same or similar operating methods that formed the damage category. This application embodiment, by determining the damage category of the window element to be analyzed and combining it with the same or similar operating methods that formed the damage category to reproduce the damage, can accurately determine the cause of the damage category and improve the stability of excimer laser operation. Attached Figure Description

[0047] Figure 1 A flowchart of the method for analyzing the causes of damage to the excimer laser window element provided in the first embodiment of this application.

[0048] Figure 2 A flowchart illustrating a method for analyzing the causes of damage to an excimer laser window element, provided in the second embodiment of this application.

[0049] Figure 3 A flowchart illustrating another method for analyzing the causes of damage to excimer laser window elements provided in the second embodiment of this application.

[0050] Figure 4 A flowchart illustrating another method for analyzing the causes of damage to excimer laser window elements provided in the second embodiment of this application.

[0051] Figure 5 A schematic diagram of the device for analyzing the causes of damage to excimer laser window elements provided in the third embodiment of this application.

[0052] Figure 6 A schematic diagram of an electronic device provided in the fourth embodiment of this application. Detailed Implementation

[0053] Many specific details are set forth in the following description to provide a thorough understanding of the embodiments of this application. However, the embodiments of this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the embodiments of this application. Therefore, the embodiments of this application are not limited to the specific implementations disclosed below.

[0054] The first embodiment of this application provides a method for analyzing the causes of damage to the window element of an excimer laser, thereby solving the problem in the prior art of how to accurately determine the causes of damage to the window element and improve the operational stability of the excimer laser. The method includes the following steps:

[0055] Step S101: Obtain damage information of the window element to be analyzed, and obtain damage feature information of the window element to be analyzed based on the damage information.

[0056] Step S102: Determine the damage category of the window element to be analyzed based on the feature information.

[0057] Step S103: Reproduce the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operating method that is the same or similar to the damage type.

[0058] Step S104: Collect the information of the reproduced damage and compare it with the damage information of the window element to be analyzed in order to determine the cause of the damage to the window element to be analyzed.

[0059] The first embodiment of this application determines the damage category of the window element to be analyzed by acquiring feature information corresponding to the damage information of the window element to be analyzed. This damage category can be compared with a pre-set damage category to determine the actual damage form of the window element to be analyzed. The damage category of the window element to be analyzed is obtained by using the same or similar operating methods. Then, the damage corresponding to the damage category can be reproduced in a non-damaged area using the same or similar operating methods. Finally, the reproduced damage corresponding to the damage category is compared with the damage information of the window element to be analyzed. If the reproduced damage information matches the damage information of the window element to be analyzed, the cause of the damage to the window element is determined to be the use of the same or similar operating methods that formed the damage category. The first embodiment of this application, by determining the damage category of the window element to be analyzed and combining it with the same or similar operating methods used to form the damage category to reproduce the damage, can accurately determine the cause of the damage category.

[0060] The specific details of each step in the first embodiment of this application will be described below.

[0061] Step S101: Obtain damage information of the window element to be analyzed, and obtain damage feature information of the window element to be analyzed based on the damage information.

[0062] Specifically, in this step, when obtaining damage information of the window element to be analyzed, it is necessary to first determine the damaged area of ​​the window element to be analyzed. That is, the damage to the window element to be analyzed can be the entire window element or a part of the window element to be analyzed. After determining the damaged area of ​​the window element to be analyzed, the morphological information corresponding to the damaged area is obtained, and the characteristic information of the damage of the window element to be analyzed is obtained based on the morphological information. In the first embodiment of this application, the morphological information corresponding to the damaged area includes at least melting and ablation morphology, local brittle fracture or spalling morphology, and extended cracks without melting, local brittle fracture or spalling morphology. Correspondingly, the characteristic information of the damage of the window element to be analyzed includes melting and ablation characteristic information, local brittle fracture or spalling characteristic information, and extended cracks without melting, local brittle fracture or spalling characteristic information. Since the morphological information corresponding to the damaged area of ​​the window element to be analyzed is different, the characteristic information of the damage of the window element to be analyzed is also different.

[0063] Step S102: Determine the damage category of the window element to be analyzed based on the feature information.

[0064] After obtaining the characteristic information of the damage to the window element to be analyzed, the damage category of the window element to be analyzed can be determined based on the characteristic information. Corresponding to the above, the characteristic information of the damage to the window element to be analyzed includes melting and ablation characteristic information, local brittle fracture or spalling characteristic information, and extended cracks without melting, local brittle fracture or spalling characteristic information. Therefore, the damage category of the window element to be analyzed can be determined based on the melting and ablation characteristic information, the local brittle fracture or spalling characteristic information, and the extended cracks without melting, local brittle fracture or spalling characteristic information. Specifically, the damage category of the window element to be analyzed is determined based on the melting and ablation characteristic information; the damage category of the window element to be analyzed is determined based on the local brittle fracture or spalling characteristic information; and the damage category of the window element to be analyzed is determined based on the extended cracks without melting, local brittle fracture or spalling characteristic information.

[0065] It should be noted that the damage category of the window element to be analyzed, determined based on the various feature information, is not limited to one type. Furthermore, the damage category can be determined directly from the individual feature information, or it can be determined by combining the individual feature information with relevant information. For example, taking the determination of the damage category of the window element to be analyzed based on melting and ablation feature information as an example, the determined damage categories include contaminant-induced damage, laser irradiation damage, metal contaminant damage, and contaminant and surface damage. Specifically, the contaminant and surface damage categories refer to the initial state of the window element and the contaminant and surface damage categories corresponding to the same batch of window elements. The contaminant-induced damage and laser irradiation damage categories can be directly determined based on the melting and ablation feature information, while the metal contaminant damage and contaminant and surface damage categories can be determined based on the melting and ablation feature information combined with relevant information. See the description below for details.

[0066] Correspondingly, based on the local brittle fracture or spalling characteristic information, the damage category of the window element to be analyzed is determined, including contaminant-induced damage category, laser irradiation damage category, metal contaminant damage category, contaminant and surface damage category, mechanical loading and gaseous contaminant damage category, and mechanical loading and metal contaminant damage category. Specifically, the contaminant and surface damage category refers to the contaminant and surface damage categories corresponding to the initial state of the window element to be analyzed and those of window elements in the same batch. The contaminant-induced damage category and laser irradiation damage category can be directly determined based on the melting and ablation characteristic information. Other damage categories, such as metal contaminant damage category and contaminant and surface damage category, can be determined based on the melting and ablation characteristic information combined with relevant information, as described below.

[0067] Correspondingly, based on the information regarding the extended cracks and the absence of melting, localized brittle fracture, or spalling characteristics, the damage category of the window element to be analyzed is determined, including the damage category of the loading operation.

[0068] It should also be noted that, in the first embodiment of this application, the damage categories determined by the aforementioned feature information can be determined step by step after the damage category is determined and the cause of damage to the window element to be analyzed is determined. For example, taking the determination of the damage category of the window element to be analyzed based on melting and ablation feature information as an example, the damage category of the window element to be analyzed can first be determined as contaminant-induced damage based on the melting and ablation feature information. After determining the cause of damage to the window element to be analyzed corresponding to the contaminant-induced damage category, the damage category of the window element to be analyzed can be determined as laser irradiation damage. After determining the cause of damage to the window element to be analyzed corresponding to the laser irradiation damage category, the damage category of the window element to be analyzed can be determined as metal contaminant damage. After determining the cause of damage to the window element to be analyzed corresponding to the metal contaminant damage category, the damage category of the window element to be analyzed can be determined as contaminant and surface damage.

[0069] Correspondingly, taking the determination of the damage category of the window element to be analyzed based on the characteristics of local brittle fracture or spalling as an example, the damage category of the window element to be analyzed can first be determined as contaminant-induced damage based on the characteristics of local brittle fracture or spalling. After determining the cause of damage to the window element to be analyzed corresponding to the contaminant-induced damage category, the damage category of the window element to be analyzed can be determined as laser irradiation damage. After determining the cause of damage to the window element to be analyzed corresponding to the laser irradiation damage category, the damage category of the window element to be analyzed can be determined as metal contaminant damage. After determining the cause of damage to the window element to be analyzed corresponding to the metal contaminant damage category, the damage category of the window element to be analyzed can be determined as contaminant and surface damage. After determining the cause of damage to the window element to be analyzed corresponding to the contaminant and surface damage categories, the damage category of the window element to be analyzed can be determined as mechanical loading and metal contaminant damage. Furthermore, after determining the damage cause of the window element to be analyzed corresponding to the metal contaminant damage category, the damage category of the window element to be analyzed can be determined as the gaseous contaminant damage category. After determining the damage cause of the window element to be analyzed corresponding to the gaseous contaminant damage category, the damage category of the window element to be analyzed can be determined as the contaminant and surface damage category. After determining the damage cause of the window element to be analyzed corresponding to the contaminant and surface damage category, the damage category of the window element to be analyzed can be determined as the mechanical loading and gaseous contaminant damage category.

[0070] Correspondingly, taking the determination of the damage category of the window element to be analyzed based on the information of extended cracks without melting, local brittle fracture or spalling characteristics as an example, the damage category of the window element to be analyzed determined based on the information of extended cracks without melting, local brittle fracture or spalling characteristics can be the loading operation damage category, and the damage cause of the window element to be analyzed corresponding to the loading operation damage category can be determined.

[0071] As can be seen, in the first embodiment of this application, the specific methods of steps S103 and S104 are required in determining each damage category of the window element to be analyzed and determining the damage cause of the window element to be analyzed. Therefore, in the following description, each damage category can be explained in conjunction with the contents involved in steps S103 and S104 when determining the damage cause of the window element to be analyzed.

[0072] Step S103: Reproduce the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operating method that is the same as or similar to the damage type. Step S104: Collect information on the reproduced damage and compare it with the damage information of the window element to be analyzed to determine the cause of the damage to the window element.

[0073] Based on the above, it can be seen that the damage category of the window element to be analyzed, determined according to the melting and ablation characteristic information, and the damage category of the window element to be analyzed, determined according to the local brittle fracture or spalling characteristic information, have some identical damage categories. When using the methods of steps S103 and S104 for these identical damage categories, the step of determining the damage cause of the window element to be analyzed when both have partially identical damage categories can be represented as a single step. Specifically, as follows:

[0074] Specifically, the damage category of the window element to be analyzed determined based on the melting and ablation characteristic information and the damage category of the window element to be analyzed determined based on the local brittle fracture or spalling characteristic information respectively include contaminant-induced damage category, laser irradiation damage category, metal contaminant damage category, and contaminant and surface damage category. When analyzing these same damage categories, a method logic consisting of steps S103 and S104 can be used to characterize each of the same damage categories and the steps for determining the damage cause.

[0075] Specifically, in the first embodiment of this application, after determining that the damage category of the window element to be analyzed, determined based on the melting and ablation characteristic information, and that the damage category of the window element to be analyzed, determined based on the local brittle fracture or spalling characteristic information, includes contaminant-induced damage category, and before reproducing the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method identical or similar to that used to form the damage category, the method further includes: obtaining elemental information corresponding to the damage area, wherein the elemental information corresponding to the damage area includes at least Ca (calcium) and F (fluorine), comparing the elemental information with pre-set phase matrix information, and the comparison result has the following two results: if the elemental information is consistent with the pre-set phase matrix information, then the damage category of the window element to be analyzed is determined to be laser irradiation damage category; if the elemental information differs from the pre-set phase matrix information in elements, then the damage cause of the window element to be analyzed corresponding to the contaminant-induced damage category of the window element to be analyzed is determined to be contaminant-induced damage cause, that is, the damage cause of the window element to be analyzed is due to the presence of different elements.

[0076] After determining that the damage category of the window element to be analyzed, corresponding to the melting and ablation characteristic information and the local brittle fracture or spalling characteristic information, is a laser irradiation damage category, the damage can be reproduced in the non-damaged area of ​​the window element to be analyzed according to the laser irradiation damage category. Specifically, the first morphological characteristics of the damage are reproduced in the non-damaged area of ​​the window element to be analyzed according to a pre-set deep ultraviolet laser irradiation experiment that forms the laser irradiation damage category. The deep ultraviolet laser irradiation experiment specifically includes experiments using laser energy of 90%, 100%, and 200%, respectively, with an energy range of 80–160 mJ. That is, when using laser energy of 200%, the energy is 160 mJ. When conducting experiments at these three percentage laser energies, the first morphological characteristics of the damage will be reproduced in the non-damaged area of ​​the window element to be analyzed. After obtaining the first morphological features of the window element to be analyzed, the first morphological features of the reproduced damage are collected and compared with the damage information of the window element to be analyzed. If the morphological information in the damage information of the window element to be analyzed is consistent with the first morphological features of the reproduced damage, then the damage cause of the window element to be analyzed is determined to be laser irradiation damage. The main mechanism of laser irradiation damage is photothermal effect, where the laser energy exceeds the damage threshold of the CaF2 (calcium fluoride) window element. Correspondingly, to avoid this damage cause, CaF2 window elements with higher processing grades and lower defect content, or CaF2 materials with higher threshold values, should be used, or the laser beam path should be checked to see if it causes extremely uneven local energy distribution.

[0077] When comparing the first morphological feature with the damage information of the window element to be analyzed, the method further includes: if the morphological information in the damage information of the window element to be analyzed has distinguishing features from the first morphological feature, or if, according to a pre-set deep ultraviolet laser irradiation experiment that forms a laser irradiation damage category, the first morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed, then the damage category of the window element to be analyzed is determined to be the metal contaminant damage category. The first morphological feature of the damage not being reproduced in the non-damaged area of ​​the window element to be analyzed is the first morphological feature of the damage that is not reproduced after an experiment using laser energy of 200%.

[0078] After determining that the damage category of the window element to be analyzed, corresponding to the melting and ablation characteristic information and the local brittle fracture or spalling characteristic information, is a metal contaminant damage category, the step of reproducing the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same or similar to the damage category is included: determining whether the surface of the damaged area of ​​the window element to be analyzed is an inner surface; if so, reproducing the second morphological features of the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set metal contaminant-induced damage experiment that is the same as the damage category that is the metal contaminant damage category is formed. In this study, the inner surface of the damaged area of ​​the window element under analysis is the surface in contact with the inner cavity. When the damage is determined to occur on the inner surface, given that the excimer laser cavity has undergone multiple purification and passivation treatments, the melting point of CaF2 is approximately 1423℃, and the boiling point of copper is approximately 2562℃, with a melting point of approximately 1083℃. To reproduce the secondary morphological characteristics of the damage in the damaged area, electrode sputtering particles of different sizes are coated onto the undamaged area of ​​the window element to conduct metal contaminant-induced damage experiments. Specifically, laser energies of 90%, 100%, and 200% can be used for the experiments, with an energy irradiation range of 80–160 mJ (i.e., 160 mJ at 200% laser energy). The electrode sputtering particles can be 0.1 μm, 0.5 μm, or 1 μm in size. Experiments using various percentage laser energies will reproduce the secondary morphological characteristics of the damage in the undamaged area of ​​the window element under analysis. After obtaining the second morphological features of the window element to be analyzed, the reproduced damage's second morphological features are collected and compared with the damage information of the window element to be analyzed. If the morphological information in the damage information of the window element to be analyzed is consistent with the second morphological features, then the damage cause of the window element to be analyzed is determined to be electrode contaminant-induced damage. After determining that the damage cause of the window element to be analyzed is electrode contaminant-induced damage, the particle size range leading to the damage is determined according to the pre-set correlation between the second morphological features and the particle size, so as to specifically control and collect the particle size in the inner cavity of the laser to prevent the particle size from reaching the surface of the window element.

[0079] In the first embodiment of this application, if the morphological information in the damage information of the window element to be analyzed differs from the second morphological feature, and the second morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set metal contaminant-induced damage experiment that forms a metal contaminant damage category, then the damage category of the window element to be analyzed is determined to be the contaminant and surface damage category, and the damage cause of the window element to be analyzed corresponding to the contaminant and surface damage category is determined to be the contaminant and surface damage cause. Specifically, the contaminant and surface damage cause refers to the contaminant and surface damage cause in the initial state of the window element to be analyzed, and the contaminant and surface damage cause of window elements in the same batch. After determining the cause, the damaged area of ​​the window element to be analyzed can be cleaned and processed in a timely manner. Furthermore, the second morphological feature of the non-damaged area of ​​the window element to be analyzed that does not reproduce the damage is the second morphological feature of the damage that has not reproduced after an experiment using laser energy of 200%.

[0080] Corresponding to the above, after determining that the damage category of the window element to be analyzed is the metal contaminant damage category, the method further includes: determining whether the surface of the damaged area of ​​the window element to be analyzed is an outer surface; if so, determining that the damage category of the window element to be analyzed is the contaminant and surface damage category, and determining the damage cause of the window element to be analyzed corresponding to the contaminant and surface damage category as the contaminant and surface damage cause. Here, the outer surface of the damaged area is the surface of the window element that is in contact with the protective atmosphere. Since the outer surface of the window element is a gas protective environment that has been repeatedly purified, the gaseous substances absorbing deep ultraviolet laser-induced damage will not reach the melting point of CaF2 material to cause a melting morphology. The contaminants and surface defects of the same batch of windows, as well as the contaminants and surface damage of the window element to be analyzed in its initial state, are detected to determine that the damage category of the window element to be analyzed is the contaminant and surface damage category, and the damage cause of the window element to be analyzed corresponding to the contaminant and surface damage category is determined as the contaminant and surface damage cause. After determining the cause, the damaged area of ​​the window element to be analyzed can be cleaned and processed in a timely manner.

[0081] In the first embodiment of this application, the surface of the damaged area of ​​the window element to be analyzed is the inner surface. After determining that the cause of damage to the window element to be analyzed, corresponding to the contaminant and surface damage categories, is not the contaminant or surface damage, mechanical loading and temperature field loading are applied to the window element to be analyzed. Determining the damage category of the window element to be analyzed based on the local brittle fracture or spalling characteristic information further includes: mechanical loading and metal contaminant damage category. Correspondingly, the damage is reproduced in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same or similar to the damage category, including: reproducing the third morphological features of the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set metal contaminant-induced damage experiment that forms the mechanical loading and metal contaminant damage categories. Mechanical loading of the window element to be analyzed means applying an external force to the window element to be analyzed, which is provided by a mechanical component. Temperature field loading includes internal cavity temperature field loading, which can be completed by infrared laser irradiation or other methods, and the pressure difference between the inner and outer cavities can be completed by temperature field equivalence or other methods. Specifically, the metal contaminant-induced damage experiment can be conducted using laser energies of 90%, 100%, and 200%, with an energy irradiation range of 80–160 mJ. For example, using 200% laser energy results in 160 mJ of irradiation. When conducting experiments at various laser energy percentages, the third morphological characteristics of the damage are reproduced in the non-damaged area of ​​the window element under analysis. After obtaining the third morphological characteristics of the window element under analysis, the reproduced third morphological characteristics are collected and compared with the damage information of the window element under analysis. If the morphological information in the damage information of the window element under analysis matches the third morphological characteristics, then the damage cause of the window element under analysis is determined to be electrode contaminant-induced damage and mechanical loading. After determining that the damage to the window element to be analyzed is caused by electrode contaminant-induced damage, the particle size range and loading state that caused the damage are determined according to the pre-set correlation between the third morphological feature and the particle size and loading state. This allows for targeted control and collection of particle size within the laser cavity to prevent particles from reaching the surface of the window element, and appropriate adjustment of the mechanical loading state.

[0082] Furthermore, if the morphological information in the damage information of the window element to be analyzed has distinguishable features from the third morphological feature, and the third morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set metal contaminant-induced damage experiment that forms the mechanical loading and metal contaminant damage categories, then the damage cause of the window element to be analyzed is determined to be contaminant-induced damage cause.

[0083] In the first embodiment of this application, after determining that the surface of the damaged area of ​​the window element to be analyzed is the outer surface, the step of determining the damage category of the window element to be analyzed based on the local brittle fracture or spalling characteristic information further includes: a gaseous contaminant damage category. Correspondingly, the step of reproducing the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same or similar to the one that forms the damage category includes: reproducing the fourth morphological feature of the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set gaseous contaminant-induced damage experiment that forms the gaseous contaminant damage category. Since the outer surface of the window element is a gas-protected environment that has undergone multiple purifications, the gaseous contaminant-induced damage experiment is specifically a gaseous substance absorption deep ultraviolet laser-induced damage experiment. Specifically, laser energies of 90%, 100% to 200% can be used for the experiment. The gases include H2O, CO2, O2, and simulated small particles in the air. Through this experiment, the fourth morphological feature of the damage can be reproduced in the non-damaged area of ​​the window element to be analyzed. After obtaining the fourth morphological feature of the window element to be analyzed, the fourth morphological feature of the reproduced damage is collected and compared with the damage information of the window element to be analyzed. If the morphological information in the damage information of the window element to be analyzed is consistent with the fourth morphological feature, then the damage cause of the window element to be analyzed is determined to be gaseous pollutant-induced damage. To address this damage cause, one possible approach is to improve the purity of the gas protective environment.

[0084] Furthermore, if the morphological information in the damage information of the window element to be analyzed differs from the fourth morphological feature, and according to the pre-set gas pollutant-induced damage experiment that forms a gas pollutant damage category, the fourth morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed, then the damage category of the window element to be analyzed is determined to be the pollutant and surface damage category, and the damage cause of the window element to be analyzed corresponding to the pollutant and surface damage category is determined to be the pollutant and surface damage cause. Specifically, the pollutant and surface damage category refers to the pollutant and surface damage categories corresponding to the initial state of the window element to be analyzed and those corresponding to window elements in the same batch. Correspondingly, the pollutant and surface damage cause specifically refers to the pollutant and surface damage cause of the initial state of the window element to be analyzed and the pollutant and surface damage cause of window elements in the same batch. After determining the cause, the damaged area of ​​the window element to be analyzed can be cleaned and processed in a timely manner.

[0085] Furthermore, in the first embodiment of this application, if it is determined that the damage cause of the window element to be analyzed corresponding to the contaminant and surface damage categories is not due to contaminants and surface damage, then mechanical loading and temperature field loading are applied to the window element to be analyzed. Correspondingly, determining the damage category of the window element to be analyzed based on the local brittle fracture or spalling characteristic information also includes mechanical loading and gaseous contaminant damage categories. Temperature field loading includes internal cavity temperature field loading, which can be accomplished by infrared laser irradiation or other methods, and the pressure difference between the inner and outer cavities can be achieved by temperature field equivalence or other methods.

[0086] After determining that the damage category of the window element to be analyzed is mechanical loading and gaseous contaminant damage, the fifth morphological feature of the damage can be reproduced in the non-damaged area of ​​the window element according to a pre-set gaseous contaminant-induced damage experiment that forms the mechanical loading and gaseous contaminant damage categories. Since the outer surface of the window element is protected by a gas environment that has undergone multiple purification processes, the gaseous contaminant-induced damage experiment is specifically a gaseous substance absorption deep ultraviolet laser-induced damage experiment. Specifically, laser energies of 90%, 100%, and 200% can be used for the experiment. The gases include H2O, CO2, O2, and simulated small particles in the air. This experiment can reproduce the fifth morphological feature of the damage in the non-damaged area of ​​the window element to be analyzed. After obtaining the fifth morphological feature of the window element to be analyzed, the reproduced fifth morphological feature of the damage is collected and compared with the damage information of the window element to be analyzed. If the morphological information in the damage information of the window element to be analyzed is consistent with the fifth morphological feature, then the damage cause of the window element to be analyzed is determined to be gaseous contaminant-induced damage and mechanical loading.

[0087] After determining that the damage to the window element to be analyzed is caused by gas contaminant-induced damage and mechanical loading, the type, content and loading state of the gas contaminant causing the damage are determined according to the pre-set correlation between the fifth morphological feature and the type and content of gas contaminants and loading state. This allows for targeted control of gas purity within the laser cavity to prevent particle size from reaching the surface of the window element, and appropriate adjustment of the mechanical loading state.

[0088] Furthermore, if the morphological information in the damage information of the window element to be analyzed has distinguishing features from the fifth morphological feature, and the fifth morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set gas pollutant-induced damage experiment that forms mechanical loading and gas pollutant damage categories, then the damage cause of the window element to be analyzed is determined to be a pollutant-induced damage cause.

[0089] In the first embodiment of this application, after obtaining the damage characteristics of the window element to be analyzed as an extended crack without melting, local brittle fracture, or spalling characteristics based on the damage information, mechanical loading and temperature field loading are applied to the window element to be analyzed. The temperature field loading includes internal cavity temperature field loading, which can be accomplished by infrared laser irradiation or other methods, and the pressure difference between the inner and outer cavities can be achieved through temperature field equivalence or other methods.

[0090] Correspondingly, determining the damage category of the window element to be analyzed based on the information regarding the extended crack and the absence of melting, localized brittle fracture, or spalling characteristics includes a loading operation damage category. Correspondingly, reproducing the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation similar to the one that formed the damage category includes: reproducing the sixth morphological feature of the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set loading damage experiment that forms the loading operation damage category. The loading damage experiment includes deep ultraviolet laser irradiation experiments and mechanical loading experiments, specifically using laser energies of 90% and 100-200% respectively. When experiments are conducted at various percentage laser energies, the sixth morphological feature of the damage will be reproduced in the non-damaged area of ​​the window element to be analyzed. After obtaining the sixth morphological feature of the window element to be analyzed, the sixth morphological feature of the reproduced damage is collected and compared with the damage information of the window element to be analyzed. If the morphological information in the damage information of the window element to be analyzed is consistent with the sixth morphological feature, then the damage cause of the window element to be analyzed is determined to be laser irradiation damage and mechanical loading. Based on this damage cause, it can be determined that non-uniform loading occurred during mechanical loading, and the mechanical loading needs to be adjusted.

[0091] Furthermore, if the morphological information in the damage information of the window element to be analyzed differs from the sixth morphological feature, and the sixth morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set loading damage experiment corresponding to the damage category of the loading operation, then the cause of damage to the window element to be analyzed is determined to be contaminants and surface damage corresponding to the initial state of the window element to be analyzed. For this cause of damage, the initial state of the window element to be analyzed needs to be processed in a timely manner. Specifically, the sixth morphological feature of the damage not being reproduced in the non-damaged area of ​​the window element to be analyzed is the sixth morphological feature of the damage that has not been reproduced even after an experiment using laser energy of 200%.

[0092] The first embodiment of this application provides a method for analyzing the causes of damage to an excimer laser window element, comprising: acquiring damage information of the window element to be analyzed; obtaining characteristic information of the damage to the window element to be analyzed based on the damage information; determining the damage category of the window element to be analyzed based on the characteristic information; reproducing the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same as or similar to the damage category; collecting information on the reproduced damage and comparing it with the damage information of the window element to be analyzed to determine the cause of the damage to the window element to be analyzed.

[0093] The first embodiment of this application determines the damage category of the window element to be analyzed by acquiring feature information corresponding to the damage information of the window element to be analyzed. This damage category can be compared with a pre-set damage category to determine the actual damage form of the window element to be analyzed. The damage category of the window element to be analyzed is obtained by using the same or similar operating methods. Then, the damage corresponding to the damage category can be reproduced in the non-damaged area using the same or similar operating methods. Finally, the reproduced damage corresponding to the damage category is compared with the damage information of the window element to be analyzed. If the reproduced damage information is consistent with the damage information of the window element to be analyzed, the cause of the damage to the window element to be analyzed is determined to be the use of the same or similar operating methods that formed the damage category. By determining the damage category of the window element to be analyzed and reproducing the damage using the same or similar operating methods that formed the damage category, the first embodiment of this application can accurately determine the cause of the damage category and improve the stability of the excimer laser operation.

[0094] In the first embodiment described above, when using the methods of steps S103 and S104 for the same damage category, the step of determining the damage cause of the window element to be analyzed when both have partially identical damage categories can be represented as a single step. The second embodiment of this application determines the damage category of the window element to be analyzed based on the melting and ablation characteristic information; determines the damage category of the window element to be analyzed based on the local brittle fracture or spalling characteristic information; and determines the damage category of the window element to be analyzed based on the extended crack without melting, local brittle fracture, or spalling characteristic information, respectively, using the methods of steps S103 and S104. Specifically:

[0095] Combination Figure 2As shown, in the second embodiment of this application, firstly, step S200 is executed to obtain the characteristic information of the damage to the window element to be analyzed as melting and ablation characteristic information based on the damage information. Then, the damage category of the window element to be analyzed, determined based on the melting and ablation characteristic information, includes the contaminant-induced damage category. After determining that the damage category of the window element to be analyzed, determined based on the melting and ablation characteristic information, is the contaminant-induced damage category, and before reproducing the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same or similar to the one used to form the damage category, the following steps are also included: step S201, obtaining the element information corresponding to the damage area, comparing the element information with the pre-set phase matrix information, and determining whether the element information is consistent with the pre-set phase matrix information. The comparison result has two possible outcomes: if the element information is consistent with the pre-set phase matrix information, then the damage category of the window element to be analyzed is determined to be the laser irradiation damage category, and step S203 is executed. If the element information differs from the pre-defined phase matrix information, then step S202 is executed to determine that the cause of damage to the window element to be analyzed, which corresponds to the pollutant-induced damage category of the window element to be analyzed, is the cause of pollutant-induced damage, that is, the cause of damage to the window element to be analyzed is due to the presence of different elements.

[0096] After determining that the damage category of the window element to be analyzed, corresponding to the melting and ablation characteristic information, is a laser irradiation damage category, the damage can be reproduced in the non-damaged area of ​​the window element to be analyzed according to the laser irradiation damage category. Specifically, the first morphological features of the damage are reproduced in the non-damaged area of ​​the window element to be analyzed according to a pre-set deep ultraviolet laser irradiation experiment that forms the laser irradiation damage category. The deep ultraviolet laser irradiation experiment specifically includes experiments using laser energy of 90%, 100%, and 200%, respectively, with an energy range of 80–160 mJ. That is, when using laser energy of 200%, the energy is 160 mJ. When conducting experiments at these three percentage laser energies, the first morphological features of the damage will be reproduced in the non-damaged area of ​​the window element to be analyzed. After obtaining the first morphological features of the window element to be analyzed, step S204 is executed to collect the first morphological features of the reproduced damage and compare them with the damage information of the window element to be analyzed to determine whether the morphological information in the damage information of the window element to be analyzed is consistent with the first morphological features of the reproduced damage. If the morphological information in the damage information of the window element to be analyzed is consistent with the first morphological features of the reproduced damage, then step S205 is executed to determine that the damage cause of the window element to be analyzed is laser irradiation damage. The main mechanism of laser irradiation damage is photothermal effect, where the laser energy exceeds the damage threshold of the CaF2 (calcium fluoride) window element. To avoid this damage cause, CaF2 window elements with higher processing grades and lower defect content or CaF2 materials with higher thresholds should be used, or the laser beam path should be checked to see if it causes extremely uneven local energy distribution.

[0097] When comparing the first morphological feature with the damage information of the window element to be analyzed, the method further includes: if the morphological information in the damage information of the window element to be analyzed has distinguishing features from the first morphological feature, or if the first morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to a pre-set deep ultraviolet laser irradiation experiment that forms a laser irradiation damage category, then the damage category of the window element to be analyzed is determined to be a metal contaminant damage category, and step S206 is executed. The first morphological feature of the damage not being reproduced in the non-damaged area of ​​the window element to be analyzed is the first morphological feature of the damage that is not reproduced after an experiment using laser energy of 200%.

[0098] After determining that the damage category of the window element to be analyzed, corresponding to the melting and ablation characteristic information and the local brittle fracture or spalling characteristic information, is the metal contaminant damage category, step S206 is executed to determine whether the surface of the damaged area of ​​the window element to be analyzed is an inner surface. If so, step S207 is executed to reproduce the second morphological characteristics of the damage in the non-damaged area of ​​the window element to be analyzed according to the pre-set metal contaminant-induced damage experiment that forms the metal contaminant damage category. In this study, the inner surface of the damaged area of ​​the window element to be analyzed is the surface in contact with the inner cavity. When the damage is determined to occur on the inner surface, considering that the excimer laser cavity has undergone multiple purification and passivation treatments, the melting point of CaF2 is 1423℃, and the boiling point of copper is 2562℃, with a melting point of 1083℃. To reproduce the second morphological characteristics of the damage in the damaged area, electrode sputtering particles of different sizes are coated onto the undamaged area of ​​the window element to conduct metal contaminant-induced damage experiments. Specifically, laser energies of 90%, 100%, and 200% can be used for the experiments, with an energy irradiation range of 80–160 mJ (i.e., 160 mJ at 200% laser energy). When conducting experiments at various percentage laser energies, the second morphological characteristics of the damage will be reproduced in the undamaged area of ​​the window element to be analyzed. After obtaining the second morphological feature of the window element to be analyzed, step S208 is executed to collect the second morphological feature of the reproduced damage and compare it with the damage information of the window element to be analyzed to determine whether the morphological information in the damage information of the window element to be analyzed is consistent with the second morphological feature. If the morphological information in the damage information of the window element to be analyzed is consistent with the second morphological feature, then step S209 is executed to determine that the damage cause of the window element to be analyzed is electrode contaminant-induced damage. After determining that the damage cause of the window element to be analyzed is electrode contaminant-induced damage, the particle size range that causes the damage is determined according to the pre-set correlation between the second morphological feature and the particle size, so as to specifically control and collect the particle size in the inner cavity of the laser to prevent the particle size from reaching the surface of the window element.

[0099] In the second embodiment of this application, if the morphological information in the damage information of the window element to be analyzed differs from the second morphological feature, and the second morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set metal contaminant-induced damage experiment that forms a metal contaminant damage category, then the damage category of the window element to be analyzed is determined to be the contaminant and surface damage category, and step S210 is executed to determine the damage cause of the window element to be analyzed corresponding to the contaminant and surface damage category as the contaminant and surface damage cause. Specifically, the contaminant and surface damage cause refers to the contaminant and surface damage cause in the initial state of the window element to be analyzed, and the contaminant and surface damage cause of window elements in the same batch. After determining the cause, the damaged area of ​​the window element to be analyzed can be cleaned and processed in a timely manner. Furthermore, the second morphological feature of the non-damaged area of ​​the window element to be analyzed that does not reproduce the damage is the second morphological feature of the damage that has not reproduced after an experiment using 200% laser energy.

[0100] Corresponding to the above, after determining that the damage category of the window element to be analyzed is the metal contaminant damage category, the method further includes executing step S211 to determine whether the surface of the damaged area of ​​the window element to be analyzed is an outer surface. If so, the damage category of the window element to be analyzed is determined to be the contaminant and surface damage category, and step S210 is executed to determine the damage cause of the window element to be analyzed corresponding to the contaminant and surface damage category as the contaminant and surface damage cause. Here, the outer surface of the damaged area is the surface of the window element that is in contact with the protective atmosphere. Since the outer surface of the window element is a gas protective environment that has been repeatedly purified, the gaseous substances absorbing deep ultraviolet laser-induced damage will not reach the melting point of CaF2 material to cause a melting morphology. The contaminant and surface defect status of the same batch of windows, as well as the contaminant and surface damage status of the initial state of the window element to be analyzed, are detected to determine that the damage category of the window element to be analyzed is the contaminant and surface damage category, and the damage cause of the window element to be analyzed corresponding to the contaminant and surface damage category is determined to be the contaminant and surface damage cause. Once the cause is identified, the damaged area of ​​the window element to be analyzed can be cleaned and processed in a timely manner.

[0101] The above steps are as follows: after determining the damage categories of the window element to be analyzed based on the melting and ablation characteristic information, for each damage category, the damage is reproduced in the non-damaged area of ​​the window element to be analyzed according to the same or similar operating means as the damage category is formed; the information of the reproduced damage is collected and compared with the damage information of the window element to be analyzed in order to determine the damage cause of the window element to be analyzed.

[0102] Combination Figure 3As shown, in the second embodiment of this application, firstly, step S300 is executed to obtain the characteristic information of the damage of the window element to be analyzed as local brittle fracture or spalling characteristic information based on the damage information. Then, the damage category of the window element to be analyzed, determined based on the local brittle fracture or spalling characteristic information, includes the contaminant-induced damage category. After determining that the damage category of the window element to be analyzed is the contaminant-induced damage category based on the local brittle fracture or spalling characteristic information, and before reproducing the damage in the non-damaged area of ​​the window element to be analyzed according to the same or similar operation means as the formation of the damage category, the method further includes: step S301, obtaining the element information corresponding to the damage area, comparing the element information with the pre-set phase matrix information, and determining whether the element information is consistent with the pre-set phase matrix information. The comparison result has two possible outcomes. If the element information is consistent with the pre-set phase matrix information, then the damage category of the window element to be analyzed is determined to be the laser irradiation damage category, and step S303 is executed. If the element information differs from the pre-defined phase matrix information, then step S302 is executed to determine that the cause of damage to the window element to be analyzed, which corresponds to the pollutant-induced damage category of the window element to be analyzed, is the cause of pollutant-induced damage, that is, the cause of damage to the window element to be analyzed is due to the presence of different elements.

[0103] After determining that the damage category of the window element to be analyzed, corresponding to the local brittle fracture or spalling characteristics, is a laser irradiation damage category, the damage can be reproduced in the non-damaged area of ​​the window element to be analyzed according to the laser irradiation damage category. Specifically, the first morphological feature of the damage is reproduced in the non-damaged area of ​​the window element to be analyzed according to a pre-set deep ultraviolet laser irradiation experiment that forms the laser irradiation damage category. The deep ultraviolet laser irradiation experiment specifically includes conducting experiments with laser energies of 90%, 100%, and 200%, respectively. When conducting experiments with these three percentage laser energies, the first morphological feature of the damage will be reproduced in the non-damaged area of ​​the window element to be analyzed, respectively. After obtaining the first morphological feature of the window element to be analyzed, step S304 is executed to collect the reproduced first morphological feature of the damage and compare it with the damage information of the window element to be analyzed, determining whether the morphological information in the damage information of the window element to be analyzed is consistent with the reproduced first morphological feature of the damage. If the morphological information in the damage information of the window element to be analyzed is consistent with the first morphological feature of the reproduced damage, then step S305 is executed to determine that the damage cause of the window element to be analyzed is laser irradiation damage. The main mechanism of laser irradiation damage is photothermal effect, where the laser energy exceeds the damage threshold of the CaF2 (calcium fluoride) window element. Correspondingly, to avoid this damage cause, CaF2 window elements with higher processing grades and lower defect content, or CaF2 materials with higher threshold values, should be used, or the laser beam path should be checked to see if it causes extremely uneven local energy distribution.

[0104] When comparing the first morphological feature with the damage information of the window element to be analyzed, the method further includes: if the morphological information in the damage information of the window element to be analyzed has distinguishing features from the first morphological feature, or if, according to a pre-set deep ultraviolet laser irradiation experiment that forms a laser irradiation damage category, the first morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed, then the damage category of the window element to be analyzed is determined to be the metal contaminant damage category, and step S306 is executed. The first morphological feature of the damage not being reproduced in the non-damaged area of ​​the window element to be analyzed is the first morphological feature of the damage that is not reproduced after an experiment using laser energy of 200%.

[0105] After determining that the damage category of the window element to be analyzed, corresponding to the melting and ablation characteristic information and the local brittle fracture or spalling characteristic information, is a metal contaminant damage category, step S306 is executed to determine whether the surface of the damaged area of ​​the window element to be analyzed is an inner surface. If so, step S307 is executed to reproduce the second morphological characteristics of the damage in the undamaged area of ​​the window element to be analyzed according to the pre-set metal contaminant-induced damage experiment that forms the metal contaminant damage category. Here, the inner surface of the damaged area of ​​the window element to be analyzed is the surface in contact with the inner cavity. When it is determined that the damage occurs on the inner surface, since the excimer laser cavity has undergone multiple purification and passivation treatments, the melting point of CaF2 material is 1423℃, and the boiling point of copper material is 2562℃, with a melting point of 1083℃. To reproduce the second morphological characteristics of the damage in the damaged area, electrode sputtering particles of different particle sizes are coated on the undamaged area of ​​the window element to conduct a metal contaminant-induced damage experiment. Specifically, laser energies of 90% and 100% to 200% can be used for the experiment. During experiments with various percentage laser energies, the second morphological features of the damage are reproduced in the non-damaged area of ​​the window element to be analyzed. After obtaining the second morphological features of the window element to be analyzed, step S308 is executed to collect the reproduced second morphological features of the damage and compare them with the damage information of the window element to be analyzed to determine whether the morphological information in the damage information of the window element to be analyzed is consistent with the second morphological features. If the morphological information in the damage information of the window element to be analyzed is consistent with the second morphological features, then step S309 is executed to determine that the cause of damage to the window element to be analyzed is electrode contaminant-induced damage. After determining that the cause of damage to the window element to be analyzed is electrode contaminant-induced damage, the particle size range that caused the damage is determined according to the pre-set correlation between the second morphological features and the particle size, so as to specifically control and collect the particle size in the inner cavity of the laser to prevent the particle size from reaching the surface of the window element.

[0106] In the second embodiment of this application, if the morphological information in the damage information of the window element to be analyzed differs from the second morphological feature, and the second morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set metal contaminant-induced damage experiment that forms a metal contaminant damage category, then the damage category of the window element to be analyzed is determined to be the contaminant and surface damage category, and step S310 is executed to determine the damage cause of the window element to be analyzed corresponding to the contaminant and surface damage category as the contaminant and surface damage cause. Specifically, the contaminant and surface damage cause refers to the contaminant and surface damage cause in the initial state of the window element to be analyzed, and the contaminant and surface damage cause of window elements in the same batch. After determining the cause, the damaged area of ​​the window element to be analyzed can be cleaned and processed in a timely manner. Furthermore, the second morphological feature of the non-damaged area of ​​the window element to be analyzed that does not reproduce the damage is the second morphological feature of the damage that has not reproduced after an experiment using laser energy of 200%.

[0107] In the second embodiment of this application, to determine whether the surface of the damaged area of ​​the window element to be analyzed is an inner surface, if so, after determining that the cause of damage to the window element to be analyzed corresponding to the contaminant and surface damage categories is not the contaminant and surface damage categories, step S311 is executed to apply mechanical loading and temperature field loading to the window element to be analyzed. Determining the damage category of the window element to be analyzed based on the local brittle fracture or spalling characteristic information further includes: mechanical loading and metal contaminant damage categories, and step S312 is executed. Correspondingly, the damage is reproduced in the non-damaged area of ​​the window element to be analyzed according to a pre-set operating method identical or similar to that used to form the damage category, including: reproducing the third morphological features of the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set metal contaminant-induced damage experiment that forms the mechanical loading and metal contaminant damage categories. The temperature field loading includes internal cavity temperature field loading, which can be completed by infrared laser irradiation or other methods, and the pressure difference between the inner and outer cavities can be completed by temperature field equivalence or other methods. Specifically, the metal contaminant-induced damage experiment can be conducted using laser energies of 90%, 100%, and 200%. When conducting experiments at various laser energie percentages, the third morphological feature of the damage is reproduced in the non-damaged area of ​​the window element to be analyzed. After obtaining the third morphological feature of the window element to be analyzed, step S313 is executed to collect the reproduced third morphological feature of the damage and compare it with the damage information of the window element to be analyzed, determining whether the morphological information in the damage information of the window element to be analyzed is consistent with the third morphological feature. If the morphological information in the damage information of the window element to be analyzed is consistent with the third morphological feature, then step S314 is executed to determine that the damage cause of the window element to be analyzed is electrode contaminant-induced damage and mechanical loading. After determining that the damage to the window element to be analyzed is caused by electrode contaminant-induced damage, the particle size range and loading state that caused the damage are determined according to the pre-set correlation between the third morphological feature and the particle size and loading state. This allows for targeted control and collection of particle size within the laser cavity to prevent particles from reaching the surface of the window element, and appropriate adjustment of the mechanical loading state.

[0108] In addition, if the morphological information in the damage information of the window element to be analyzed has different features from the third morphological feature, and the third morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set metal contaminant-induced damage experiment that forms mechanical loading and metal contaminant damage categories, then step S315 is executed to determine that the damage cause of the window element to be analyzed is contaminant-induced damage cause.

[0109] Corresponding to the above, after determining that the damage category of the window element to be analyzed is the metal contaminant damage category, the process further includes step S316, which determines whether the surface of the damaged area of ​​the window element to be analyzed is an outer surface. If so, based on the local brittle fracture or spalling characteristic information, the damage category of the window element to be analyzed also includes: gas contaminant damage category. Correspondingly, step S317 is executed, which reproduces the fourth morphological feature of the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set gas contaminant-induced damage experiment that forms the gas contaminant damage category. Since the outer surface of the window element is protected by a gas environment that has undergone multiple purifications, the gas contaminant-induced damage experiment is specifically a gaseous substance absorption deep ultraviolet laser-induced damage experiment. Specifically, laser energies of 90%, 100% to 200% can be used for the experiment. The gases include H2O, CO2, O2, and simulated small particles in the air. This experiment can reproduce the fourth morphological feature of the damage in the non-damaged area of ​​the window element to be analyzed. After obtaining the fourth morphological feature of the window element to be analyzed, step S318 is executed to collect the fourth morphological feature of the reproduced damage and compare it with the damage information of the window element to be analyzed to determine whether the morphological information in the damage information of the window element to be analyzed is consistent with the fourth morphological feature. If the morphological information in the damage information of the window element to be analyzed is consistent with the fourth morphological feature, then step S319 is executed to determine that the damage cause of the window element to be analyzed is gaseous pollutant-induced damage. A possible approach to address this damage cause is to improve the purity of the gas protective environment.

[0110] Furthermore, if the morphological information in the damage information of the window element to be analyzed differs from the fourth morphological feature, and according to the pre-set gas pollutant-induced damage experiment that forms a gas pollutant damage category, the fourth morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed, then the damage category of the window element to be analyzed is determined to be the pollutant and surface damage category, and step S320 is executed to determine the damage cause of the window element to be analyzed corresponding to the pollutant and surface damage category as the pollutant and surface damage cause. Specifically, the pollutant and surface damage category refers to the pollutant and surface damage categories corresponding to the initial state of the window element to be analyzed and those corresponding to the same batch of window elements. Correspondingly, the pollutant and surface damage cause specifically refers to the pollutant and surface damage cause of the initial state of the window element to be analyzed and the pollutant and surface damage cause of the same batch of window elements. After determining the cause, the damaged area of ​​the window element to be analyzed can be cleaned and processed in a timely manner.

[0111] Furthermore, in the second embodiment of this application, if step S321 is executed and it is determined that the damage cause of the window element to be analyzed corresponding to the contaminant and surface damage categories is not due to contaminants and surface damage, then step S322 is executed to apply mechanical loading and temperature field loading to the window element to be analyzed. Correspondingly, determining the damage category of the window element to be analyzed based on the local brittle fracture or spalling characteristic information also includes mechanical loading and gaseous contaminant damage categories, and step S323 is executed. The temperature field loading includes internal cavity temperature field loading, which can be accomplished by infrared laser irradiation or other methods, and the pressure difference between the inner and outer cavities can be accomplished by temperature field equivalence or other methods.

[0112] After determining that the damage category of the window element to be analyzed is mechanical loading and gaseous contaminant damage, step S323 is executed. According to a pre-set gaseous contaminant-induced damage experiment that forms the mechanical loading and gaseous contaminant damage categories, the fifth morphological feature of the damage is reproduced in the non-damaged area of ​​the window element to be analyzed. Since the outer surface of the window element is protected by a gas environment that has undergone multiple purification processes, the gaseous contaminant-induced damage experiment is specifically a gaseous substance absorption deep ultraviolet laser-induced damage experiment. Specifically, laser energies of 90%, 100%, and 200% can be used for the experiment. The gases include H2O, CO2, O2, and simulated small particles in the air. This experiment reproduces the fifth morphological feature of the damage in the non-damaged area of ​​the window element to be analyzed. After obtaining the fifth morphological feature of the window element to be analyzed, step S324 is executed. The reproduced fifth morphological feature of the damage is collected and compared with the damage information of the window element to be analyzed to determine whether the morphological information in the damage information of the window element is consistent with the fifth morphological feature. If the morphological information in the damage information of the window element to be analyzed is consistent with the fifth morphological feature, then step S325 is executed to determine that the damage cause of the window element to be analyzed is gaseous pollutant-induced damage and mechanical loading.

[0113] After determining that the damage to the window element to be analyzed is caused by gas contaminant-induced damage and mechanical loading, the type, content and loading state of the gas contaminant causing the damage are determined according to the pre-set correlation between the fifth morphological feature and the type and content of gas contaminants and loading state. This allows for targeted control of gas purity within the laser cavity to prevent particles from reaching the surface of the window element, and appropriate adjustment of the mechanical loading state.

[0114] In addition, if the morphological information in the damage information of the window element to be analyzed has different feature information from the fifth morphological feature, and the fifth morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set gas pollutant-induced damage experiment that forms mechanical loading and gas pollutant damage categories, then step S315 is executed to determine that the damage cause of the window element to be analyzed is a pollutant-induced damage cause.

[0115] The above steps are as follows: after determining the damage categories of the window element to be analyzed based on the local brittle fracture or spalling characteristic information, for each damage category, the damage is reproduced in the non-damaged area of ​​the window element to be analyzed according to the same or similar operating means as the damage category is formed; the information of the reproduced damage is collected and compared with the damage information of the window element to be analyzed in order to determine the damage cause of the window element to be analyzed.

[0116] Combination Figure 4 As shown, in the second embodiment of this application, firstly, step S400 is executed to obtain the damage characteristic information of the window element to be analyzed as an extended crack without melting, local brittle fracture, or spalling characteristics based on the damage information. Then, step S401 is executed to apply mechanical loading and temperature field loading to the window element to be analyzed. The temperature field loading includes internal cavity temperature field loading, which can be accomplished by infrared laser irradiation or similar methods, and the pressure difference between the inner and outer cavities can be achieved through temperature field equivalence or similar methods. Then, step S402 is executed to reproduce the sixth morphological feature of the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set loading damage experiment corresponding to the damage category formed by the loading operation. The loading damage experiment includes deep ultraviolet laser irradiation and mechanical loading experiments, specifically using laser energies of 90%, 100%, and 200%, respectively. When experiments are conducted with various percentages of laser energy, the sixth morphological feature of the damage will be reproduced in the non-damaged area of ​​the window element to be analyzed. After obtaining the sixth morphological feature of the window element to be analyzed, step S403 is executed to collect the sixth morphological feature of the reproduced damage and compare it with the damage information of the window element to be analyzed to determine whether the morphological information in the damage information of the window element to be analyzed is consistent with the sixth morphological feature. If the morphological information in the damage information of the window element to be analyzed is consistent with the sixth morphological feature, then step S404 is executed to determine that the damage cause of the window element to be analyzed is laser irradiation damage and mechanical loading. Based on this damage cause, it can be determined that non-uniform loading occurred during mechanical loading, and the mechanical loading needs to be adjusted.

[0117] Furthermore, if the morphological information in the damage information of the window element to be analyzed differs from the sixth morphological feature, and the sixth morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set loading damage experiment corresponding to the damage category of the loading operation, then step S405 is executed to determine that the damage cause of the window element to be analyzed is the contaminant and surface damage cause corresponding to the initial state of the window element to be analyzed. For this damage cause, the initial state of the window element to be analyzed needs to be processed in a timely manner. The sixth morphological feature of the damage not being reproduced in the non-damaged area of ​​the window element to be analyzed is the sixth morphological feature of the damage that has not been reproduced even after an experiment using laser energy of 200%.

[0118] The above steps are as follows: after determining the damage categories of the window element to be analyzed based on the information of the extended crack without melting, local brittle fracture or spalling characteristics, for each damage category, the damage is reproduced in the non-damaged area of ​​the window element to be analyzed according to the same or similar operation method as that that formed the damage category; the information of the reproduced damage is collected and compared with the damage information of the window element to be analyzed in order to determine the damage cause of the window element to be analyzed.

[0119] Corresponding to the method for analyzing the causes of damage to excimer laser window elements provided in the first embodiment of this application, the third embodiment of this application provides a device for analyzing the causes of damage to excimer laser window elements. Since the device embodiment is basically similar to the first embodiment, it is described simply; relevant details can be found in the description of the first embodiment. The device embodiments described below are merely illustrative.

[0120] Please refer to Figure 5 This is a schematic diagram of a device for analyzing the damage causes of an excimer laser window element according to a third embodiment of this application. The device includes: a feature information acquisition unit 501, used to acquire damage information of the window element to be analyzed and obtain feature information of the damage to the window element based on the damage information; a damage category determination unit 502, used to determine the damage category of the window element to be analyzed based on the feature information; a damage reproduction unit 503, used to reproduce the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same as or similar to the one that formed the damage category; and a damage cause determination unit 504, used to collect information of the reproduced damage and compare it with the damage information of the window element to be analyzed to determine the damage cause of the window element to be analyzed.

[0121] Corresponding to the analysis of the causes of damage to the excimer laser window element in the first and second embodiments of this application, the fourth embodiment of this application also provides an electronic device. For example... Figure 6As shown, Figure 6 This is a schematic diagram of an electronic device provided in the fourth embodiment of this application. The electronic device includes: a processor 601; and a memory 602 for storing a computer program, which is executed by the processor to perform the excimer laser window element damage cause analysis method of the first and second embodiments.

[0122] Corresponding to the excimer laser window element damage cause analysis method of the first and second embodiments of this application, the fifth embodiment of this application also provides a computer storage medium storing a computer program, which is executed by a processor to perform the excimer laser window element damage cause analysis method of the first and second embodiments.

[0123] Although this application discloses preferred embodiments as described above, it is not intended to limit this application. Any person skilled in the art can make possible changes and modifications without departing from the spirit and scope of this application. Therefore, the scope of protection of this application should be determined by the scope defined in the claims of this application.

[0124] In a typical configuration, a computing device includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.

[0125] Memory may include non-persistent storage in computer-readable media, such as random access memory (RAM) and / or non-volatile memory, such as read-only memory (ROM) or flash RAM. Memory is an example of computer-readable media.

[0126] Computer-readable media includes both permanent and non-permanent, removable and non-removable media that can store information using any method or technology. Information can be computer-readable instructions, data structures, modules of programs, or other data. Examples of computer storage media include, but are not limited to, phase-change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technologies, CD-ROM, digital versatile optical disc (DVD) or other optical storage, magnetic tape, magnetic magnetic disk storage or other magnetic storage devices, or any other non-transferable medium that can be used to store information accessible by a computing device. As defined herein, computer-readable media does not include non-transitory computer-readable media, such as modulated data signals and carrier waves.

[0127] Those skilled in the art will understand that embodiments of this application can be provided as methods, systems, or computer program products. Therefore, this application can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this application can take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

Claims

1. A method for analyzing the causes of damage to excimer laser window elements, characterized in that, include: Obtain damage information of the window element to be analyzed, and obtain damage feature information of the window element to be analyzed based on the damage information; The damage category of the window element to be analyzed is determined based on the aforementioned feature information; Damage is reproduced in the non-damaged area of ​​the window element to be analyzed using the same or similar operating methods as the type of damage formed, according to a pre-set method. Information on the reproduced damage is collected and compared with the damage information of the window element to be analyzed in order to determine the cause of the damage to the window element to be analyzed.

2. The method for analyzing the causes of damage to excimer laser window elements according to claim 1, characterized in that, The step of acquiring damage information of the window element to be analyzed, and obtaining characteristic information of the damage of the window element to be analyzed based on the damage information, includes: Identify the damaged area of ​​the window element to be analyzed; Obtain the morphological information corresponding to the damaged area; Based on the morphological information, the damage characteristics of the window element to be analyzed are obtained.

3. The method for analyzing the causes of damage to excimer laser window elements according to claim 1 or 2, characterized in that, The characteristic information of the damage to the window element to be analyzed includes melting and ablation characteristic information, local brittle fracture or spalling characteristic information, and extended cracks without melting, local brittle fracture or spalling characteristic information; Correspondingly, determining the damage category of the window element to be analyzed based on the feature information includes: The damage category of the window element to be analyzed is determined based on the melting and ablation characteristic information; The damage category of the window element to be analyzed is determined based on the local brittle fracture or spalling characteristic information; The damage category of the window element to be analyzed is determined based on the information of the extended crack and the absence of melting, local brittle fracture, or spalling characteristics.

4. The method for analyzing the causes of damage to excimer laser window elements according to claim 3, characterized in that, The damage category of the window element to be analyzed, determined based on the melting and ablation characteristic information, and the damage category of the window element to be analyzed, determined based on the local brittle fracture or spalling characteristic information, respectively include contaminant-induced damage category; Before reproducing the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operating method that is the same as or similar to the damage type, the method further includes: Obtain the element information corresponding to the damaged area; The element information is compared with the preset phase matrix information. If the element information is consistent with the preset phase matrix information, the damage category of the window element to be analyzed is determined to be laser irradiation damage category. If there are differences between the element information and the pre-set phase matrix information, then the damage cause of the window element to be analyzed, corresponding to the pollutant-induced damage category of the window element to be analyzed, is determined to be the pollutant-induced damage cause.

5. The method for analyzing the causes of damage to excimer laser window elements according to claim 4, characterized in that, After determining that the damage category of the window element to be analyzed is laser irradiation damage, the step of reproducing the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same or similar to the one that forms the damage category includes: reproducing the first morphological features of the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set deep ultraviolet laser irradiation experiment that forms the laser irradiation damage category. Correspondingly, the process of collecting the information on the reproduced damage and comparing it with the damage information of the window element to be analyzed to determine the cause of damage to the window element includes: The first morphological feature is collected and compared with the damage information of the window element to be analyzed. If the morphological information in the damage information is consistent with the first morphological feature, the damage cause of the window element to be analyzed is determined to be laser irradiation damage.

6. The method for analyzing the causes of damage to excimer laser window elements according to claim 5, characterized in that, Also includes: If the morphological information in the damage information of the window element to be analyzed has distinguishing features from the first morphological feature, or if the first morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set deep ultraviolet laser irradiation experiment that forms the laser irradiation damage category, then the damage category of the window element to be analyzed is determined to be the metal contaminant damage category.

7. The method for analyzing the causes of damage to excimer laser window elements according to claim 6, characterized in that, After determining that the damage category of the window element to be analyzed is a metal contaminant damage category, the step of reproducing the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set operating method that is the same as or similar to the one that caused the damage category includes: Determine whether the surface of the damaged area of ​​the window element to be analyzed is an inner surface. If so, reproduce the second morphological features of the damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set metal contaminant-induced damage experiment that corresponds to the metal contaminant damage category. Correspondingly, the process of collecting the information on the reproduced damage and comparing it with the damage information of the window element to be analyzed to determine the cause of damage to the window element includes: The second morphological feature of the reproduced damage is collected and compared with the damage information of the window element to be analyzed. If the morphological information in the damage information of the window element to be analyzed is consistent with the second morphological feature, then the damage cause of the window element to be analyzed is determined to be electrode contaminant-induced damage. If the morphological information in the damage information of the window element to be analyzed has distinguishable features from the second morphological feature, and according to the pre-set metal contaminant-induced damage experiment that forms the metal contaminant damage category, the second morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed, then the damage category of the window element to be analyzed is determined to be the contaminant and surface damage category, and the damage cause of the window element to be analyzed corresponding to the contaminant and surface damage category is determined to be the contaminant and surface damage cause. Determine whether the surface of the damaged area of ​​the window element to be analyzed is an outer surface. If so, determine the damage category of the window element to be analyzed as contaminant and surface damage category, and determine the damage cause of the window element to be analyzed corresponding to the contaminant and surface damage category as contaminant and surface damage cause.

8. The method for analyzing the causes of damage to excimer laser window elements according to claim 7, characterized in that, To determine whether the surface of the damaged area of ​​the window element to be analyzed is an inner surface, if so, after determining that the cause of damage to the window element to be analyzed corresponding to the contaminant and surface damage category is not the contaminant and surface damage category, mechanical loading and temperature field loading are applied to the window element to be analyzed. The determination of the damage category of the window element to be analyzed based on the local brittle fracture or spalling characteristic information also includes: mechanical loading and metal contaminant damage category. Correspondingly, damage is reproduced in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same or similar to the damage type, including: reproducing the third morphological features of damage in the non-damaged area of ​​the window element to be analyzed according to a pre-set metal contaminant-induced damage experiment that is the same as the damage type that forms mechanical loading and metal contaminant damage. Correspondingly, the process of collecting the information on the reproduced damage and comparing it with the damage information of the window element to be analyzed to determine the cause of damage to the window element includes: The third morphological feature of the reproduced damage is collected and compared with the damage information of the window element to be analyzed. If the morphological information in the damage information of the window element to be analyzed is consistent with the third morphological feature, then the damage cause of the window element to be analyzed is determined to be electrode contaminant-induced damage and mechanical loading. If the morphological information in the damage information of the window element to be analyzed has distinguishable features from the third morphological feature, and the third morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set metal contaminant-induced damage experiment that forms mechanical loading and metal contaminant damage categories, then the damage cause of the window element to be analyzed is determined to be contaminant-induced damage.

9. The method for analyzing the causes of damage to excimer laser window elements according to claim 3, characterized in that, After determining the damage category of the window element to be analyzed based on the information of the extended crack and the absence of melting, local brittle fracture or spalling characteristics, the window element to be analyzed is subjected to mechanical loading and temperature field loading. Correspondingly, the step of determining the damage category of the window element to be analyzed based on the information of the extended crack without melting, local brittle fracture or spalling characteristics also includes: the damage category of the loading operation; Correspondingly, the damage is reproduced in the non-damaged area of ​​the window element to be analyzed according to a pre-set operation method that is the same or similar to the damage type that forms the damage, including: the sixth morphological feature of the damage reproduced in the non-damaged area of ​​the window element to be analyzed according to a pre-set loading damage experiment that forms the damage type of the loading operation. Correspondingly, the process of collecting the information on the reproduced damage and comparing it with the damage information of the window element to be analyzed to determine the cause of damage to the window element includes: The sixth morphological feature of the reproduced damage is collected and compared with the damage information of the window element to be analyzed. If the morphological information in the damage information of the window element to be analyzed is consistent with the sixth morphological feature, then the damage cause of the window element to be analyzed is determined to be laser irradiation damage and mechanical loading. If the morphological information in the damage information of the window element to be analyzed has distinguishable features from the sixth morphological feature, and the sixth morphological feature of the damage is not reproduced in the non-damaged area of ​​the window element to be analyzed according to the pre-set loading damage experiment that forms the damage category of the loading operation, then the damage cause of the window element to be analyzed is determined to be the contaminant and surface damage cause corresponding to the initial state of the window element to be analyzed.

10. A device for analyzing the causes of damage to excimer laser window elements, characterized in that, include: The feature information acquisition unit is used to acquire damage information of the window element to be analyzed, and to obtain the feature information of the damage of the window element to be analyzed based on the damage information. The damage category determination unit is used to determine the damage category of the window element to be analyzed based on the feature information. The damage reproduction unit is used to reproduce the damage in the non-damage area of ​​the window element to be analyzed according to the same or similar operating means as the damage type that was formed. The damage cause determination unit is used to collect information on the reproduced damage and compare it with the damage information of the window element to be analyzed in order to determine the damage cause of the window element to be analyzed.

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