Magneto-fluid-based Micro-displacement Centering Device

Abstract

The present invention discloses a micro-displacement centering device based on magnetic fluid, which includes a first centering component and a second centering component. The first centering component includes a first support table and a first base, and the second centering component includes a second support table and a second base. The first support table includes a first support portion and a first support table body. The first support portion is placed in the groove of the first base, and magnetic fluid is accommodated in the first gap between the first support portion and the side wall of the groove of the first base. The second support table includes a second support portion and a second support table body. The second support portion is placed in the groove of the second base, and magnetic fluid is accommodated in the second gap between the second support portion and the side wall of the groove of the second base. The first base includes a first front side wall, a first rear side wall, a first left side wall and a first right side wall, and the second base includes a second front side wall, a second rear side wall, a second left side wall and a second right side wall. Magnets are arranged on each side wall of the first base and the second base, and coils are wound around the magnets.

Description

Technical Field

[0001] The present invention relates to the technical field of micro-displacement alignment, and particularly to a micro-displacement alignment device based on magnetic fluid. Background Art

[0002] Precision machinery and precision instruments will perform precision machining or measurement, and micro-displacement adjustment is required. In special scenarios, alignment is needed. For example, ultra-precision machining tools and dies need to be aligned, and the emission source components and barrel components of electron microscopes need to be aligned, etc. Micro-displacement adjustment of an object, especially alignment, on the one hand requires high adjustment precision, and on the other hand is easily affected by micro-vibrations. Traditional micro-displacement adjustment mechanisms can be divided into mechanical and electromechanical types. The mechanical type uses mechanisms such as precision lead screws and spring diaphragms, and the electromechanical type applies piezoelectric ceramics, electromagnetic forces, etc. However, traditional micro-displacement adjustment, especially alignment devices, have the disadvantages of complex design, lack of general applicability, low adjustment precision, slow adjustment time, and large influence of artificial interference factors. Summary of the Invention

[0003] The present invention provides a micro-displacement alignment device based on magnetic fluid, which can solve the technical problems in the prior art.

[0004] The present invention provides a micro-displacement alignment device based on magnetic fluid, wherein the device includes a first alignment component and a second alignment component. The first alignment component includes a first support table and a first base with a groove. The second alignment component includes a second support table and a second base with a groove. The first support table and the second support table are used to set the object to be aligned.

[0005] The first support table includes a first support portion and a first support table body provided on the first support portion. The first support portion is placed in the groove of the first base, and magnetic fluid is accommodated in the first gap between the first support portion and the side wall of the groove of the first base.

[0006] The second support table includes a second support portion and a second support table body provided on the second support portion. The second support portion is placed in the groove of the second base, and magnetic fluid is accommodated in the second gap between the second support portion and the side wall of the groove of the second base. The mass of the magnetic fluid in the second gap is the same as that of the magnetic fluid in the first gap.

[0007] The first base includes a first front side wall, a first rear side wall, a first left side wall, and a first right side wall. The second base includes a second front side wall, a second rear side wall, a second left side wall, and a second right side wall. Magnets are provided on each side wall of the first base and each side wall of the second base. Coils are wound around the magnets. The coils wound around the magnets on the first front side wall and the coils wound around the magnets on the second front side wall are connected in series to form a first group. The coils wound around the magnets on the first rear side wall and the coils wound around the magnets on the second rear side wall are connected in series to form a second group. The coils wound around the magnets on the first left side wall and the coils wound around the magnets on the second right side wall are connected in series to form a third group. The coils wound around the magnets on the first right side wall and the coils wound around the magnets on the second left side wall are connected in series to form a fourth group.

[0008] Preferably, the device further includes a first power source, a second power source, a third power source, and a fourth power source. The first power source is used to supply power to the first group. The second power source is used to supply power to the second group. The third power source is used to supply power to the third group. The fourth power source is used to supply power to the fourth group.

[0009] Preferably, the device further includes a displacement detection unit and a current control unit. The detection unit is used to detect the positions of the first carrier and the second carrier. The current control unit is used to adjust the output currents of the first power source and the second power source or adjust the output currents of the third power source and the fourth power source according to the positions of the first carrier and the second carrier.

[0010] Preferably, the displacement detection unit is a laser displacement sensor.

[0011] Preferably, the magnet is a bar magnet.

[0012] Through the above technical solution, two devices to be aligned can be respectively placed on the first carrier and the second carrier. The coils on the specified side magnets are connected in series. By energizing the corresponding series-connected coils, the same distribution of the magnetorheological fluid on the corresponding side can be achieved, so that the same displacement of the two devices to be aligned on the two carriers can be realized, that is, the micro-displacement adjustment of the two devices is realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The accompanying drawings included are used to provide a further understanding of the embodiments of the present invention. They form a part of the description and are used to illustrate the embodiments of the present invention and, together with the written description, to explain the principles of the present invention. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0014] Figure 1Shows a schematic diagram of a micro-displacement centering device based on magnetic fluid according to an embodiment of the present invention;

[0015] Figure 2 Shows a schematic diagram of the magnet arrangement according to an embodiment of the present invention;

[0016] Figure 3 Shows the centering principle diagram according to an embodiment of the present invention. Detailed implementation manners

[0017] It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and in no way limits the present invention and its application or use. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts belong to the scope of the present invention.

[0018] It should be noted that the terms used herein are only for describing specific implementation manners and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless otherwise clearly specified in the context, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "include" and / or "comprise" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0019] Unless otherwise specifically stated, the relative arrangements of the components and steps set forth in these embodiments, numerical expressions, and values do not limit the scope of the present invention. At the same time, it should be understood that, for the sake of convenience of description, the sizes of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and devices should be regarded as part of the authorized specification. In all the examples shown and discussed here, any specific value should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0020] Among them, the micro-displacement centering device of the present invention can be applied to the micro-displacement adjustment of precision machinery and precision instruments. However, the present invention is not limited thereto and can also be widely applied to various devices that require centering and micro-displacement adjustment. The shape or size of the turntable can be adjusted according to actual needs.

[0021] As Figure 1 and 2 shown, an embodiment of the present invention provides a micro-displacement centering device based on magnetic fluid. Among them, the device includes a first centering component and a second centering component. The first centering component includes a first turntable 10 and a first base 12 with a groove. The second centering component includes a second turntable 20 and a second base 22 with a groove. The first turntable 10 and the second turntable 20 are used to set the object to be centered.

[0022] The first turntable 10 includes a first support portion 101 and a first turntable body 102 provided on the first support portion 101. The first support portion 101 is placed in the groove of the first base 12, and magnetic fluid is accommodated in the first gap between the first support portion 101 and the side wall of the groove of the first base 12.

[0023] The second turntable 20 includes a second support portion 201 and a second turntable body 202 provided on the second support portion 201. The second support portion 201 is placed in the groove of the second base 22, and magnetic fluid is accommodated in the second gap between the second support portion 201 and the side wall of the groove of the second base 22. The mass of the magnetic fluid in the second gap is the same as that of the magnetic fluid in the first gap.

[0024] The first base 12 includes a first front side wall 121, a first rear side wall 122, a first left side wall 123, and a first right side wall 124. The second base 22 includes a second front side wall 221, a second rear side wall 222, a second left side wall 223, and a second right side wall 224. Magnets 30 are provided on each side wall of the first base 12 and each side wall of the second base. Coils are wound around the magnets 30. The coils wound around the magnets 30 on the first front side wall 121 and the coils wound around the magnets 30 on the second front side wall 221 are connected in series as a first group. The coils wound around the magnets 30 on the first rear side wall 122 and the coils wound around the magnets 30 on the second rear side wall 222 are connected in series as a second group. The coils wound around the magnets 30 on the first left side wall 123 and the coils wound around the magnets 30 on the second right side wall 224 are connected in series as a third group. The coils wound around the magnets 30 on the first right side wall 124 and the coils wound around the magnets 30 on the second left side wall 223 are connected in series as a fourth group.

[0025] Through the above technical solution, the two devices to be aligned can be respectively placed on the first turntable and the second turntable. The coils on the specified side magnets are connected in series. By energizing the corresponding series-connected coils, the same distribution of the magnetic fluid on the corresponding side can be achieved, so that the same displacement of the two devices to be aligned on the two turntables can be realized, that is, the micro-displacement adjustment of the two devices is realized.

[0026] According to an embodiment of the present invention, the device further includes a first power supply 40, a second power supply 50, a third power supply 60, and a fourth power supply 70. The first power supply 40 is used to supply power to the first group, the second power supply 50 is used to supply power to the second group, the third power supply 60 is used to supply power to the third group, and the fourth power supply 70 is used to supply power to the fourth group.

[0027] Among them, by energizing the two groups of coils through the first power supply and the second power supply respectively, since the series current is the same, the magnetic fields generated on the first rear side wall and the second rear side wall are the same, and then the magnetic fluid distributions are the same, so that the positions of the first turntable and the second turntable relative to the first rear side wall and the second rear side wall can be the same. Similarly, the positions of the first turntable and the second turntable relative to the first front side wall and the second front side wall are the same. By energizing the two groups of coils through the third power supply and the fourth power supply respectively, the position movement of the first turntable and the second turntable in the left-right direction can be realized.

[0028] The following describes the micro-displacement adjustment process of the micro-displacement alignment device based on magnetic fluid according to the present invention with reference to examples.

[0029] By passing the same current through the first power supply and the second power supply, the first turntable and the second turntable can be placed at the central positions of the front and rear side walls; and by passing the same current through the third power supply and the fourth power supply, the first turntable and the second turntable can be placed at the central positions of the left and right side walls.

[0030] By increasing the output current of the second power supply and decreasing the output current of the first power supply, the first turntable and the second turntable can be moved forward. Among them, the adjustment of the output currents of the first power supply and the second power supply can be realized, for example, by the following displacement detection unit and current control unit.

[0031] By decreasing the output current of the fourth power supply and increasing the output current of the third power supply, the first turntable and the second turntable can be synchronously moved to the central position to achieve alignment; by increasing the output current of the fourth power supply and decreasing the output current of the third power supply, the first turntable and the second turntable can be synchronously moved away from the central position (that is, synchronously moved to the left and right sides respectively) to realize the separation of the alignment device. Among them, the adjustment of the output currents of the third power supply and the fourth power supply can be realized, for example, by the following displacement detection unit and current control unit.

[0032] According to an embodiment of the present invention, the device further includes a displacement detection unit and a current control unit. The detection unit is used to detect the positions of the first support table 10 and the second support table 20, and the current control unit is used to adjust the output currents of the first power supply 40 and the second power supply 50 or adjust the output currents of the third power supply 60 and the fourth power supply 70 according to the positions of the first support table 10 and the second support table 20.

[0033] For example, the positions of the first support table and the second support table can be compared with the target positions, and then the output currents of the first power supply and the second power supply can be controlled according to the comparison results (for example, position deviations), or the output currents of the third power supply and the fourth power supply can be controlled.

[0034] By adjusting the output current through the displacement detection unit and the current control unit, high-precision centering can be achieved.

[0035] According to an embodiment of the present invention, the displacement detection unit is a laser displacement sensor.

[0036] According to an embodiment of the present invention, the magnet is a bar magnet.

[0037] As Figure 3 shown, the area between the support part (the first support part / the second support part) and the side wall is magnetic fluid. By passing the same current through the front and rear side walls, the magnetic field intensities of the front and rear side walls can be made consistent, and the distribution of the magnetic fluid can be the same. The first support table and the second support table are placed at the middle positions of the front and rear side walls. By reducing the output current of the fourth power supply and increasing the output current of the third power supply, the magnetic fields of the first right side wall and the second left side wall can be reduced, and the magnetic fluid is in a flat distribution. The magnetic fields of the first left side wall and the second right side wall are enhanced, and the magnetic fluid is in a convex distribution, thereby promoting the two support tables to move closer to the middle.

[0038] It can be seen from the above embodiments that the centering device of the present invention has the following advantages:

[0039] 1) The magnetic fluid has good magnetic response characteristics. Under the application of a specified magnetic field, the magnetic fluid will correspondingly generate a specified displacement. Place the two devices (precision machinery and precision instruments) to be centered on the two support tables of the micro-displacement centering device based on magnetic fluid. By connecting the coils on the specified side magnets in series, the same distribution of the magnetic fluid on the corresponding side can be achieved, and then the same displacement of the centering device on the support table can be achieved.

[0040] 2) The response speed of the magnetic fluid is high. As long as the frequency of the designed electric field intensity is certain, a corresponding magnetic field environment will be formed, and then the rapid response of the magnetic fluid can be achieved to complete the required displacement change.

[0041] 3) The position deviation between two devices to be centered can be measured as an error and fed back to the current control terminal to respond to the position deviation, adjust the coil current, and further adjust the position of the device to be centered, ultimately achieving high-precision centering.

[0042] 4) The micro-displacement centering device based on magnetic fluid has no losses such as mechanical wear. The centering and micro-displacement adjustment accuracy only depends on the current control accuracy, so it can be used for a long time. Moreover, only magnetic fluid needs to be added regularly, and the maintenance is convenient.

[0043] 5) The magnetic fluid has a relatively high viscosity and has high load-bearing capacity and anti-vibration performance under the action of a magnetic field. Therefore, it can play a certain anti-vibration effect on the micro-vibration interference received by the platform where the centering device is located.

[0044] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by orientation words such as "front, back, up, down, left, right", "transverse, vertical, perpendicular, horizontal" and "top, bottom", etc. is usually based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description. Without contrary description, these orientation words do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the protection scope of the present invention; the orientation words "inside, outside" refer to the inside and outside relative to the contour of each component itself.

[0045] For the convenience of description, spatial relative terms such as "above...", "over...", "on the upper surface of...", "above" can be used here to describe the spatial positional relationship between a device or feature shown in the drawings and other devices or features. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation described in the drawings for the device. For example, if the device in the drawing is inverted, the device described as "above other devices or structures" or "over other devices or structures" will be positioned as "below other devices or structures" or "under other devices or structures" afterwards. Thus, the exemplary term "above..." can include both the orientations of "above..." and "below...". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and corresponding explanations are made for the spatial relative descriptions used here.

[0046] In addition, it should be noted that using words such as "first", "second" to limit components is only for the convenience of distinguishing the corresponding components. Without otherwise stating, the above words have no special meaning. Therefore, it cannot be understood as a limitation on the protection scope of the present invention.

[0047] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A micro-displacement centering device based on magnetic fluid, characterized in that, The device includes a first centering component and a second centering component. The first centering component includes a first supporting platform and a first base with a groove. The second centering component includes a second supporting platform and a second base with a groove. The first supporting platform and the second supporting platform are used for setting the object to be centered. The first supporting platform includes a first supporting portion and a first supporting platform body arranged on the first supporting portion. The first supporting portion is placed in the groove of the first base, and a magnetic fluid is accommodated in the first gap between the first supporting portion and the side wall of the groove of the first base. The second supporting platform includes a second supporting portion and a second supporting platform body arranged on the second supporting portion. The second supporting portion is placed in the groove of the second base, and a magnetic fluid is accommodated in the second gap between the second supporting portion and the side wall of the groove of the second base. The mass of the magnetic fluid in the second gap is the same as that of the magnetic fluid in the first gap. The first base includes a first front side wall, a first rear side wall, a first left side wall and a first right side wall. The second base includes a second front side wall, a second rear side wall, a second left side wall and a second right side wall. Magnets are arranged on each side wall of the first base and each side wall of the second base. Coils are wound around the magnets. The coils wound around the magnets on the first front side wall and the coils wound around the magnets on the second front side wall are connected in series as a first group. The coils wound around the magnets on the first rear side wall and the coils wound around the magnets on the second rear side wall are connected in series as a second group. The coils wound around the magnets on the first left side wall and the coils wound around the magnets on the second right side wall are connected in series as a third group. The coils wound around the magnets on the first right side wall and the coils wound around the magnets on the second left side wall are connected in series as a fourth group.

2. The device according to claim 1, characterized in that, The device further includes a first power supply, a second power supply, a third power supply and a fourth power supply. The first power supply is used to supply power to the first group. The second power supply is used to supply power to the second group. The third power supply is used to supply power to the third group. The fourth power supply is used to supply power to the fourth group.

3. The device according to claim 2, characterized in that, The device further includes a displacement detection unit and a current control unit. The detection unit is used to detect the positions of the first supporting platform and the second supporting platform. The current control unit is used to adjust the output currents of the first power supply and the second power supply or adjust the output currents of the third power supply and the fourth power supply according to the positions of the first supporting platform and the second supporting platform.

4. The device according to claim 3, characterized in that The displacement detection unit is a laser displacement sensor.

5. The device according to any one of claims 1-4, characterized in that, The magnet is a bar magnet.

Images