Cleaning device and cleaning method for flexible glass substrate

Abstract

The embodiment of the present application discloses a cleaning device and a cleaning method for a flexible glass substrate. The cleaning device for cutting a flexible glass substrate includes a cleaning pool, a cleaning conveyor belt, a transfer bracket and an air flotation plate; the cleaning pool is used to contain cleaning liquid, and an ultrasonic generator is installed in the cleaning pool; the cleaning conveyor belt is used to adsorb the flexible glass substrate for cleaning in the cleaning pool; the transfer bracket is used to assist the flexible glass substrate to be transferred between the cleaning conveyor belt and a conveying unit adjacent to the cleaning pool; the air flotation plate is used to assist the flexible glass substrate to be transferred between the transfer bracket and a conveying unit adjacent to the cleaning pool. Therefore, the cleaning device and the cleaning method for a flexible glass substrate of the embodiment of the present application can be applied to the transfer and cleaning of a flexible glass substrate in a cleaning process, avoiding deformation, wrinkles, positional displacement and other problems.

Description

Technical Field

[0001] The present application relates to the technical field of glass substrate processing, and in particular to a cleaning device and a cleaning method for a flexible glass substrate. Background Art

[0002] With the continuous development of display technology, flexible display has become the next generation display technology with the most development potential due to its advantages such as light weight, thinness, durability and rollability. Developing flexible glass substrates with excellent comprehensive performance has become a key link in realizing flexible display.

[0003] Flexible glass substrates are mostly produced by direct hot forming process with overflow pull-down. Compared with traditional glass substrates with a thickness of about 300μm-1500μm, flexible glass substrates are usually less than 0.1mm thick and are bendable and can be rolled up like paper. Therefore, flexible glass substrates can be stored by rolling up after production.

[0004] Due to the unique ultra-thin, ultra-light and flexible deformable characteristics of the flexible glass substrate, it cannot support itself to form a fixed shape during the transmission process of the cleaning process, and is prone to deformation, wrinkles, position displacement and other problems.

[0005] In summary, the problem of how to smoothly transfer the flexible glass substrate to the cleaning process for cleaning processing needs to be solved urgently. Summary of the invention

[0006] In order to solve at least one of the problems mentioned in the background technology, the embodiments of the present application provide a cleaning device and a cleaning method for a flexible glass substrate, which can be applied to the conveying and cleaning of the flexible glass substrate in the cleaning process to avoid deformation, wrinkles, position displacement and other problems.

[0007] In order to achieve the above-mentioned object, in a first aspect, an embodiment of the present application provides a cleaning device for a flexible glass substrate, comprising a cleaning tank, a cleaning conveyor belt, a transfer bracket and an air flotation plate;

[0008] The cleaning pool is used to contain cleaning liquid, and an ultrasonic generator is installed in the cleaning pool;

[0009] The cleaning conveyor belt is used to adsorb the flexible glass substrate for cleaning in the cleaning tank; the cleaning conveyor belt includes a plurality of sub-cleaning conveyor belts that are relatively spaced and parallel to each other, each of the sub-cleaning conveyor belts is spanned between opposite side walls of the cleaning tank, and both ends of each sub-cleaning conveyor belt are located outside the cleaning tank; each of the sub-cleaning conveyor belts is provided with a plurality of vacuum adsorption holes, each of the vacuum adsorption holes is connected to a vacuum pumping pipeline, and the vacuum pumping pipeline is connected to a vacuum pumping device;

[0010] The transfer bracket is used to assist the flexible glass substrate in being transferred between the cleaning conveyor belt and the conveying unit adjacent to the cleaning tank; the transfer bracket is provided with two groups, and the two groups of transfer brackets are symmetrically arranged at both ends of the cleaning liquid conveyor belt; each group of the transfer brackets includes a plurality of sub-transfer brackets, and the sub-transfer brackets and the sub-cleaning conveyor belts are arranged alternately; the sub-transfer brackets include a lifting assembly, a transfer platform and a transfer conveyor belt, the lifting assembly is fixedly connected to the transfer platform, and the lifting assembly is used to drive the transfer platform to move up and down along the depth direction of the cleaning tank, and the transfer conveyor belt is installed on the transfer platform;

[0011] The air-floating plate is used to assist the flexible glass substrate in being transferred between the transfer bracket and the conveying unit adjacent to the cleaning pool; two air-floating plates are provided, and one air-floating plate is provided on a side of each transfer bracket away from the cleaning pool; the air-floating plate is provided adjacent to the transfer bracket, or the air-floating plate is provided adjacent to the processing unit adjacent to the cleaning pool; the air-floating plate includes a plate body, a nozzle and an air supply device, and the plate body is used to supplement at least part of the gap between the transfer conveyor belt and the conveying unit adjacent to the cleaning pool; a plurality of nozzles are provided on the plate body, and the exhaust end of the air supply device is connected to each nozzle, and the exhaust end of each nozzle is used to spray air toward the flexible glass substrate being transferred.

[0012] In one feasible embodiment, an opening is provided on the side wall of the cleaning tank;

[0013] The sub-cleaning conveyor belt comprises an upper conveying section located at the top and a lower conveying section located at the bottom, the upper conveying section passes through the opening, and the lower conveying section passes around the bottom of the cleaning pool;

[0014] The liquid level in the cleaning pool is higher than the conveying surface of the upper conveying section.

[0015] In an achievable embodiment, it further comprises a liquid level maintaining device, wherein the liquid level maintaining device is installed on the inner side wall of the cleaning tank;

[0016] The liquid level maintaining device includes a liquid cutting knife portion, which sprays cleaning liquid toward the sub-cleaning conveyor belt near the inner side of the opening to form a cleaning liquid curtain extending along the width direction of the sub-cleaning conveyor belt to isolate and seal the opening; and / or, the liquid level maintaining device includes an air cutting knife portion, which blows air toward the sub-cleaning conveyor belt near the inner side of the opening to form an isolation air curtain extending along the width direction of the sub-cleaning conveyor belt to isolate and seal the opening.

[0017] In a feasible implementation, baffles are provided at the edges of both sides of the sub-cleaning conveyor belt in the width direction, the baffles extend in the surrounding plane of the sub-cleaning conveyor belt, and the baffles are in sealing contact with the sub-cleaning conveyor belt.

[0018] In an achievable implementation, the height of the conveying unit adjacent to the cleaning pool is higher than the height of the cleaning conveyor belt, and the air flotation plate is fixedly installed at a position close to the conveying unit adjacent to the cleaning pool;

[0019] Along the height direction of the cleaning pool, the area of ​​the upper surface of the air floating plate is larger than the area of ​​the lower surface of the air floating plate.

[0020] In a feasible implementation, along the width direction of the transfer conveyor belt, guide wheels for guiding and limiting the position of the flexible glass substrate are provided at intervals on the air floating plate.

[0021] In an achievable implementation, the conveying unit adjacent to the cleaning pool includes a substrate conveying belt, and the substrate conveying belt is used to convey the flexible glass substrate;

[0022] The sub-cleaning conveyor belt, the transfer conveyor belt and the substrate conveyor belt all include flexible conveyor belts.

[0023] In an achievable implementation, it further includes a lifting position sensor, an air floating position sensor, a transfer position sensor and a controller;

[0024] The lifting position sensor is located above and / or below the sub-transfer bracket, and is used to detect the height position of the sub-transfer bracket; the air floating position sensor is located on the upper and lower sides or the left and right sides of the air floating plate, and is used to detect the conveying position of the flexible glass substrate on the air floating plate; the transfer position sensor is located on the left and right sides of both ends of the cleaning conveyor belt, and is used to detect the conveying position of the flexible glass substrate on the cleaning liquid conveyor belt;

[0025] The controller is electrically connected to the lifting position sensor, the air floating position sensor, and the transfer position sensor, and the controller is electrically connected to the cleaning conveyor belt, the transfer conveyor belt, the lifting assembly, and the power parts of the conveying unit adjacent to the cleaning pool.

[0026] In a second aspect, an embodiment of the present application further provides a cleaning method for a flexible glass substrate, which is applied to the above-mentioned cleaning device for a flexible glass substrate. The cleaning method for a flexible glass substrate comprises the following steps:

[0027] The conveying surface of each transfer conveyor belt located at the input end of the cleaning conveyor belt is located in the same horizontal plane as the conveying surface of the conveying unit at the previous level; the flexible glass substrate on the conveying unit at the previous level is transferred to each transfer conveyor belt located at the input end of the cleaning conveyor belt; wherein the conveying unit at the previous level is the conveying unit at the input end adjacent to the cleaning conveyor belt, and the nozzle between the conveying unit at the previous level and each transfer conveyor belt located at the input end of the cleaning conveyor belt continuously sprays air toward the flexible glass substrate;

[0028] After the entire flexible glass substrate is transferred to each of the transfer conveyor belts located at the input end of the cleaning conveyor belt, the operation of each of the transfer conveyor belts located at the input end of the cleaning conveyor belt is turned off; the operation of the cleaning conveyor belt is turned off; and the conveying surface of each of the transfer conveyor belts located at the input end of the cleaning conveyor belt is located in the same horizontal plane as the conveying surface of the cleaning conveyor belt;

[0029] Starting a vacuuming operation on the vacuum adsorption hole located at the input end of the cleaning liquid conveyor belt and covered by the flexible glass substrate, so that the flexible glass substrate is adsorbed on the cleaning liquid conveyor belt;

[0030] Starting the operation of the cleaning liquid conveyor belt, allowing the cleaning liquid conveyor belt to absorb the flexible glass substrate into the cleaning tank, and performing ultrasonic cleaning on the flexible glass substrate in the cleaning tank;

[0031] Shut down the operation of each of the transfer conveyor belts at the output end of the cleaning conveyor belt, so that the conveying surface of each of the transfer conveyor belts at the output end of the cleaning conveyor belt is located in the same horizontal plane as the conveying surface of the cleaning conveyor belt;

[0032] The cleaning conveyor belt conveys the flexible glass substrate that has completed ultrasonic cleaning to an output end of the cleaning conveyor belt, and closes the vacuuming operation of the vacuum adsorption holes at the output end of the cleaning conveyor belt that are covered by the flexible glass substrate;

[0033] The conveying surface of each transfer conveyor belt located at the output end of the cleaning conveyor belt is located in the same horizontal plane as the conveying surface of the conveying unit of the next stage; the flexible glass substrate on each transfer conveyor belt located at the output end of the cleaning conveyor belt is transferred to the conveying unit of the next stage; wherein the conveying unit of the next stage is the conveying unit at the output end of the adjacent cleaning conveyor belt, and the nozzle between the conveying unit of the next stage and each transfer conveyor belt located at the output end of the cleaning conveyor belt continuously sprays air toward the flexible glass substrate.

[0034] The embodiment of the present application provides a positioning device and a cleaning method for a flexible glass substrate. The cleaning device for the flexible glass substrate includes a cleaning pool, a cleaning conveyor belt, a transfer bracket and an air flotation plate.

[0035] The cleaning pool is filled with cleaning liquid and is provided with an ultrasonic generating device, which can perform ultrasonic cleaning on the flexible glass substrate in a gentle cleaning manner without causing damage to the flexible glass substrate.

[0036] The cleaning conveyor belt vacuums the flexible glass substrate in and out of the cleaning tank. The stable and uniform adsorption force can prevent the flexible glass substrate from deformation, wrinkles, position shifting and other problems during the cleaning process.

[0037] The transfer bracket can transfer the flexible glass substrate between adjacent conveying units. When the flexible glass substrate is transferred between the two, the transfer conveyor belt and the conveying surface of the adjacent conveying unit are located in the same plane, and the air flotation plate is arranged between the transfer bracket and the adjacent conveying unit. The air flotation plate can fill part or all of the gap between the transfer bracket and the adjacent conveying unit. The nozzle of the air flotation plate continuously sprays air to the flexible glass substrate, so that the flexible glass substrate floats above the air flotation plate for transfer, thereby avoiding deformation, wrinkles, positional displacement and other problems that may occur due to the flexible glass substrate collapsing in the gap between the two.

[0038] The transfer bracket can transfer the flexible glass substrate between the cleaning conveyor belt. When the flexible glass substrate is transferred between the two, the conveying surfaces of the sub-cleaning conveyor belt and the sub-transfer bracket are located in the same plane. The flexible glass substrate can be supported by the transfer conveyor belt on the sub-transfer bracket. Alternatively, the vacuum adsorption holes on the sub-cleaning conveyor belt covered by the flexible glass substrate can be evacuated to adsorb the flexible glass substrate on the sub-cleaning conveyor belt. The flexible glass substrate is statically transferred between the cleaning conveyor belt and the transfer bracket, and the operation is simple and stable, and it is not easy to cause deformation, wrinkles, positional displacement and other problems of the flexible glass substrate.

[0039] The setting of the transfer bracket realizes the transfer of the flexible glass substrate between the cleaning conveyor belt and the adjacent conveying unit. The flexible glass substrate is supported by the conveying surface of the transfer conveyor belt on the sub-transfer bracket, avoiding the direct use of the vacuum cleaning conveyor belt to transport the flexible glass substrate, which may cause the flexible glass substrate to have problems such as position displacement, deformation, and wrinkles.

[0040] The transfer bracket is provided with a lifting component, which is not only applicable to the case where the conveying units adjacent to the cleaning tank and the cleaning conveyor belt are arranged in the same plane; it can also be applicable to the case where the conveying units adjacent to the cleaning tank and the cleaning conveyor belt have a height difference.

[0041] The transfer brackets are arranged at both ends of the cleaning conveyor belt, so that the flexible glass substrate is transferred from the transfer bracket to the cleaning conveyor belt at the end away from the cleaning tank, avoiding splashing problems caused by the cleaning liquid in the cleaning tank, and preventing the flexible glass substrate from position displacement, deformation, wrinkles and other problems.

[0042] The cleaning method for the flexible glass substrate is applied to the above-mentioned cleaning device for the flexible glass substrate and has the same beneficial effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0044] Figure 1 A schematic diagram of the structure of a cleaning device for a flexible glass substrate provided in an embodiment of the present application;

[0045] Figure 2 for Figure 1 A top view of

[0046] Figure 3 for Figure 1 AA view of the middle cleaning pool;

[0047] Figure 4 A schematic flow chart of a method for cleaning a flexible glass substrate provided in an embodiment of the present application.

[0048] Description of reference numerals:

[0049] 100-Cleaning device for flexible glass substrate;

[0050] 110-cleaning tank; 111-liquid level maintaining device; 112-ultrasonic generating device;

[0051] 120-sub-cleaning conveyor belt; 121-upper conveying section; 122-lower conveying section; 123-vacuum adsorption hole; 124-vacuum extraction pipeline; 125-transfer position sensor;

[0052] 130-sub-transfer bracket; 131-base; 132-lifting assembly; 133-transfer platform; 134-transfer conveyor belt; 135-air floating plate; 136-guide wheel; 137-air floating position sensor; 138-lifting position sensor;

[0053] 200-substrate conveyor belt;

[0054] 210- rack;

[0055] 300-Flexible glass substrate. Implementation

[0056] In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution in the embodiment of the present application will be described in more detail below in conjunction with the drawings in the embodiment of the present application. It is worth noting that the embodiments described in the drawings are only part of the embodiments of the present application, not all of the embodiments. That is, the embodiments described by the drawings are exemplary and are intended to be used to explain the present application, and cannot be understood as limiting the present application.

[0057] Figure 1 A schematic diagram of the structure of a cleaning device for a flexible glass substrate provided in an embodiment of the present application; Figure 2 for Figure 1 A top view of Figure 3 for Figure 1 AA view of the cleaning pool. Figure 1-Figure 2 Only the transfer bracket and the conveying unit at the input end are shown, and those skilled in the art can clearly see that the transfer bracket and the conveying unit at the output end on the other side can be set to the same structure.

[0058] The following will be combined Figure 1-Figure 3 A cleaning device 100 for a flexible glass substrate provided in an embodiment of the present application is described.

[0059] The present application embodiment provides a cleaning device 100 for a flexible glass substrate. Figure 1-Figure 3 As shown, it includes a cleaning pool 110, a cleaning conveyor belt, a transfer bracket and an air flotation plate 135.

[0060] The cleaning pool 110 is used to contain cleaning liquid, and an ultrasonic generating device 112 is installed in the cleaning pool 110 .

[0061] The cleaning pool 110 can be of any shape, and the cleaning liquid can be configured according to actual needs, which is not limited in the present embodiment. The ultrasonic generator 112 emits ultrasonic waves, and uses the cavitation, acceleration and straight flow effects of ultrasonic waves in the cleaning liquid to directly or indirectly act on the dirt on the flexible glass substrate 300, so that the dirt layer is dispersed, emulsified and peeled off to achieve the cleaning purpose. This cleaning method is gentle and will not cause damage to the flexible glass substrate 300.

[0062] The cleaning conveyor belt is used to absorb the flexible glass substrate 300 for cleaning in the cleaning tank 110. The cleaning conveyor belt includes a plurality of sub-cleaning conveyor belts 120 that are relatively spaced and parallel to each other, each of which is arranged across the opposite side walls of the cleaning tank 110, and both ends of each sub-cleaning conveyor belt 120 are located outside the cleaning tank 110. A plurality of vacuum adsorption holes 123 are opened on each sub-cleaning conveyor belt 120, each vacuum adsorption hole 123 is connected to a vacuum pumping pipeline 124, and the vacuum pumping pipeline 124 is connected to a vacuum pumping device.

[0063] Among them, along the conveying direction of the cleaning conveyor belt, the multiple sub-cleaning conveyor belts 120 have mutually aligned input ends and mutually aligned output ends. The gaps between adjacent sub-cleaning conveyor belts 120 are appropriate, not too dense to affect the staggered arrangement with the transfer conveyor belt 134 described below, and not too sparse to cause possible collapse of the flexible glass substrate 300. A power member is provided to drive the multiple sub-cleaning conveyor belts 120 to synchronously input and output actions.

[0064] Multiple vacuum lines 124 on the same sub-cleaning conveyor belt 120 can be connected to a vacuum device together. The end of the vacuum line 124 away from the vacuum adsorption hole 123 can be arranged near the center of the cleaning conveyor belt's winding path, and the vacuum line 124 is connected to the vacuum device through a rotary joint. In this way, the problem of winding during the rotation of the cleaning conveyor belt can be avoided. A control valve is arranged on each vacuum line 124, and each control valve is electrically connected to a controller. The controller controls the opening and closing of each control valve to individually control whether the corresponding vacuum adsorption hole 123 is vacuumed or not.

[0065] When the flexible glass substrate 300 covers the vacuum adsorption holes 123 of the cleaning conveyor belt, the vacuuming device vacuums the corresponding vacuum adsorption holes 123 through the vacuuming pipeline 124, so that the flexible glass substrate 300 is adsorbed on the cleaning conveyor belt. The cleaning conveyor belt adsorbs the flexible glass substrate 300 in and out of the cleaning tank 110, and the stable and uniform adsorption force can prevent the flexible glass substrate 300 from deformation, wrinkles, positional deviation and other problems during the cleaning process.

[0066] The transfer bracket is used to assist the flexible glass substrate 300 in being transferred between the cleaning conveyor belt and the conveying unit adjacent to the cleaning tank 110. Two groups of transfer brackets are provided, and the two groups of transfer brackets are symmetrically arranged at both ends of the cleaning liquid conveyor belt. Each group of transfer brackets includes a plurality of sub-transfer brackets 130, and the sub-transfer brackets 130 and the sub-cleaning conveyor belt 120 are arranged alternately. The sub-transfer bracket 130 includes a lifting assembly 132, a transfer platform 133 and a transfer conveyor belt 134, the lifting assembly 132 is fixedly connected to the transfer platform 133, and the lifting assembly 132 is used to drive the transfer platform 133 to move up and down along the depth direction of the cleaning tank 110, and the transfer conveyor belt 134 is installed on the transfer platform 133.

[0067] The air flotation plate 135 is used to assist the flexible glass substrate 300 in being transferred between the transfer bracket and the conveying unit adjacent to the cleaning tank 110; two air flotation plates 135 are provided, and one air flotation plate 135 is provided on the side of each transfer bracket away from the cleaning tank 110. The air flotation plate 135 is provided adjacent to the transfer bracket, or the air flotation plate 135 is provided adjacent to the processing unit adjacent to the cleaning tank 110. The air flotation plate 135 includes a plate body, a nozzle and an air supply device, and the plate body is used to supplement at least part of the gap between the transfer conveyor belt 134 and the conveying unit adjacent to the cleaning tank 110. A plurality of nozzles are provided on the plate body, and the exhaust end of the air supply device is connected to each nozzle, and the exhaust end of each nozzle is used to spray air toward the flexible glass substrate 300 being transferred.

[0068] A base 131 may be provided on the ground, a lifting assembly 132 may be installed on the base 131 , the lifting assembly 132 may move up and down, and an upper end of the lifting assembly 132 may be connected to a transfer platform 133 .

[0069] The gaps between adjacent transfer conveyor belts 134 are appropriately set to fill the gaps between the multiple sub-cleaning conveyor belts 120, so that they are not too dense to affect the staggered arrangement with the sub-cleaning conveyor belts 120, nor too sparse to cause the possible collapse of the flexible glass substrate 300. A power member is set to drive the multiple transfer conveyor belts 134 to synchronously input and output actions.

[0070] The flexible glass substrate 300 can be transferred between the transfer bracket and the adjacent conveying unit. When the flexible glass substrate 300 is transferred between the two, the transfer conveyor belt 134 and the conveying surface of the adjacent conveying unit are located in the same plane, and the air-floating plate 135 is arranged between the transfer bracket and the adjacent conveying unit. The air-floating plate 135 can fill part or all of the gap between the transfer bracket and the adjacent conveying unit. The nozzle of the air-floating plate 135 continuously sprays air to the flexible glass substrate 300, so that the flexible glass substrate 300 floats above the air-floating plate 135 for transfer, thereby avoiding deformation, wrinkles, positional displacement and other problems that may occur due to the flexible glass substrate 300 collapsing in the gap between the two.

[0071] The flexible glass substrate 300 can be transferred between the transfer bracket and the cleaning conveyor belt. When the flexible glass substrate 300 is transferred between the two, the conveying surfaces of the sub-cleaning conveyor belt 120 and the sub-transfer bracket 130 are located in the same plane. The flexible glass substrate 300 can be supported by the transfer conveyor belt 134 on the sub-transfer bracket 130. Alternatively, the vacuum adsorption holes 123 on the sub-cleaning conveyor belt 120 covered by the flexible glass substrate 300 can be evacuated to adsorb the flexible glass substrate 300 on the sub-cleaning conveyor belt 120. The flexible glass substrate 300 is statically transferred between the cleaning conveyor belt and the transfer bracket, and the operation is simple and stable, and it is not easy to cause deformation, wrinkles, positional displacement and other problems of the flexible glass substrate 300.

[0072] The setting of the transfer bracket realizes the transfer of the flexible glass substrate 300 between the cleaning conveyor belt and the adjacent conveying unit. The flexible glass substrate 300 is supported by the conveying surface of the transfer conveyor belt 134 on the sub-transfer bracket 130, thereby avoiding the direct use of a vacuum cleaning conveyor belt to transport the flexible glass substrate 300, which may cause the flexible glass substrate 300 to have problems such as position displacement, deformation, and wrinkles.

[0073] The transfer bracket is provided with a lifting component 132, which is not only applicable to the case where the adjacent conveying units of the cleaning tank 110 and the cleaning conveyor belt are arranged in the same plane, but also applicable to the case where the adjacent conveying units of the cleaning tank 110 and the cleaning conveyor belt have a height difference.

[0074] The transfer brackets are arranged at both ends of the cleaning conveyor belt, so that the flexible glass substrate 300 is transferred from the transfer bracket to the cleaning conveyor belt at the end away from the cleaning tank 110, avoiding splashing and other problems caused by the cleaning liquid in the cleaning tank 110, and preventing the flexible glass substrate 300 from position displacement, deformation, wrinkles and other problems.

[0075] In a feasible implementation, an opening is provided on a side wall of the cleaning tank 110 .

[0076] Reference Figure 1 Combined with Figure 3 As shown, the sub-cleaning conveyor belt 120 includes an upper conveying section 121 located at the top and a lower conveying section 122 located at the bottom. The upper conveying section 121 passes through the opening, and the lower conveying section 122 passes around the bottom of the cleaning pool 110 .

[0077] The liquid level in the cleaning tank 110 is higher than the conveying surface of the upper conveying section 121 .

[0078] In this way, the flexible glass substrate 300 can be transferred between the upper conveying section 121 of the sub-cleaning conveyor belt 120 and the corresponding conveying surface of the transfer conveyor belt 134. During the process of being conveyed from the input end to the output end, the flexible glass substrate 300 can always be kept below the liquid level so as to be ultrasonically cleaned during the conveying process, or stay therein for ultrasonic cleaning.

[0079] Furthermore, only a portion of the cleaning conveyor belt 120 passes through the opening, which can avoid a significant impact on the liquid level of the cleaning tank 110 and facilitate maintaining the liquid level.

[0080] In some embodiments, the lower conveying section 122 passes through the opening, and the upper conveying section 121 passes around the top of the cleaning tank 110 , and the liquid surface of the cleaning tank 110 is flush with the conveying surface of the lower conveying section 122 .

[0081] Similarly, the flexible glass substrate 300 can be transferred between the lower conveying section 122 of the sub-cleaning conveyor belt 120 and the corresponding conveying surface of the transfer conveyor belt 134 , and can be ultrasonically cleaned during the conveying or stopping process.

[0082] For convenience, the following description only describes that the upper conveying section 121 passes through the opening and the lower conveying section 122 passes around the bottom of the cleaning tank 110. Those skilled in the art can determine the situation that the lower conveying section 122 passes through the opening and the upper conveying section 121 passes around the top of the cleaning tank 110 according to the following description, and no further description is given here.

[0083] In one possible implementation, referring to Figure 2 and Figure 3 As shown, it also includes a liquid level maintaining device 111, which is installed on the inner wall of the cleaning tank 110.

[0084] The liquid level maintaining device 111 is used to maintain the liquid level in the cleaning tank 110 to prevent the cleaning liquid from being unable to contact the flexible glass substrate 300 for the cleaning process due to the height drop.

[0085] In some embodiments, the liquid level maintaining device 111 includes a liquid cutter portion, which sprays cleaning liquid toward the sub-cleaning conveyor belt 120 inside the opening to form a cleaning liquid curtain extending along the width direction of the sub-cleaning conveyor belt 120 to isolate and seal the opening.

[0086] The liquid cutter portion may be located on the inner wall just above the sub-cleaning conveyor belt 120 at the inner side of the opening, and extend to both sides of the sub-cleaning conveyor belt 120 along the width direction of the sub-cleaning conveyor belt 120. The liquid cutter portion just above the sub-cleaning conveyor belt 120 at the inner side of the opening is provided with a nozzle in a vertical plane to spray the cleaning liquid in a direction perpendicular to the sub-cleaning conveyor belt 120. The liquid cutter portions on both sides of the sub-cleaning conveyor belt 120 at the inner side of the opening are provided with nozzles in a vertical plane to spray the cleaning liquid in a direction obliquely pointing to the center of the conveying direction of the sub-cleaning conveyor belt 120. In this way, the liquid cutter portion forms a cleaning liquid curtain at the opening and on both sides thereof.

[0087] In some embodiments, the liquid cutting knife portion can also be set to two parts, which are symmetrically distributed on both sides of the width direction of the sub-cleaning conveyor belt 120 at the inner side of the opening, and both spray cleaning liquid in a vertical plane in a direction obliquely pointing to the center of the conveying direction of the sub-cleaning conveyor belt 120. Similarly, a cleaning liquid curtain can be formed at the opening and on both sides thereof.

[0088] The cleaning liquid sprayed by the liquid cutter extends along the width direction of the sub-cleaning conveyor belt 120, and can form a cleaning liquid curtain at the opening and seal the opening to prevent the cleaning liquid from overflowing along the opening and maintain the liquid level of the cleaning liquid.

[0089] In some embodiments, the liquid level maintaining device 111 includes an air cutting knife portion, which blows air toward the sub-cleaning conveyor belt 120 near the inner side of the opening to form an isolation air curtain extending along the width direction of the sub-cleaning conveyor belt 120 to isolate and seal the opening.

[0090] Similarly, the gas cutting knife part is arranged on the side wall above the opening in an integral structure or a split structure in a manner similar to the liquid cutting knife part, and an isolation air curtain is formed in a vertical plane by arranging a nozzle.

[0091] The air sprayed by the air cutting knife extends along the width direction of the sub-cleaning conveyor belt 120, and can form an isolation air curtain at the opening and seal the opening to prevent the cleaning liquid from overflowing along the opening and maintain the liquid level of the cleaning liquid.

[0092] In some embodiments, the liquid level maintaining device 111 may also include the above-mentioned liquid cutting knife part and gas cutting knife part. The liquid cutting knife part and gas cutting knife part may be distributed along the height direction of the side wall of the cleaning pool 110, one of which is located above the other, forming a double-layer sealing isolation of a cleaning liquid curtain and an isolation air curtain at the opening to prevent the cleaning liquid from overflowing along the opening and maintain the liquid level of the cleaning liquid.

[0093] In one possible implementation, referring to Figure 3As shown, baffles are provided at the edges of both sides of the sub-cleaning conveyor belt 120 in the width direction, the baffles extend in the surrounding plane of the sub-cleaning conveyor belt 120 , and wear-resistant sealing strips are provided at the sealing contact position between the baffles and the sub-cleaning conveyor belt 120 .

[0094] Among them, the main functions of setting up the baffle and sealing include: first, the baffle can support the sub-cleaning conveyor belt 120. Secondly, it is considered that the sub-cleaning conveyor belt 120 is connected to a vacuum pipeline 124. The vacuum pipeline 124 rotates around the center with the conveyance of the sub-cleaning conveyor belt 120 in the space where the sub-cleaning conveyor belt 120 passes through the path. The baffle is isolated between the cleaning pool 110 and the space where the sub-cleaning conveyor belt 120 passes through the path, which can prevent the cleaning liquid in the cleaning pool 110 from entering therein, and avoid the inability to maintain the liquid level due to the cleaning liquid entering the space. In addition, the baffle is sealed at the contact position with the sub-cleaning conveyor belt 120, which further improves the sealing of the space surrounded by the sub-cleaning conveyor belt 120.

[0095] It is worth noting that although the sub-cleaning conveyor belt 120 is provided with a vacuum adsorption hole 123, the vacuum adsorption hole 123 is connected to the vacuum pumping pipeline 124, and the control valve arranged on the vacuum pumping pipeline 124 can also prevent the infiltration of the cleaning liquid, thereby preventing the loss of the cleaning liquid from causing the change of the liquid level in the cleaning pool 110.

[0096] In the case of providing a baffle, the liquid level maintaining device 111 may only provide a liquid cutting knife portion and an air cutting knife portion on the upper surface of the upper conveying section 121 of the sub-cleaning conveyor belt 120 .

[0097] In one possible implementation, referring to Figure 1 As shown, the height of the conveying unit adjacent to the cleaning pool 110 is higher than the height of the cleaning conveyor belt, and the air flotation plate 135 is fixedly installed at a position close to the conveying unit adjacent to the cleaning pool 110 .

[0098] Along the height direction of the cleaning pool 110 , the area of ​​the upper surface of the air floating plate 135 is larger than the area of ​​the lower surface of the air floating plate 135 .

[0099] In this way, the air floating plate 135 is arranged at the output end of the conveying unit, and the area of ​​the upper surface of the air floating plate 135 is larger than the area of ​​the lower surface, so that the air floating plate 135 has a structure of being larger at the top and smaller at the bottom. During the lifting and lowering movement of the transfer conveyor belt 134, the lower small end of the air floating plate 135 will not hinder its lifting and lowering movement, and the upper large end of the air floating plate 135 can limit the transfer conveyor belt 134, and the air floating plate 135 can also fill the gap between the transfer conveyor belt 134 and the conveying unit as much as possible.

[0100] In addition, by arranging the cleaning liquid pool at a relatively low position, the flexible glass substrate 300 can be transferred between the transfer bracket and the conveying unit at a relatively high position, avoiding the impact of the cleaning liquid in the cleaning liquid pool, etc. Moreover, it is also beneficial to arrange the lower conveying section 122 of the cleaning conveyor belt around the ground, reducing the conveying radius, reducing the volume, and reducing the occupied space.

[0101] In one possible implementation, referring to Figure 2 As shown, along the width direction of the transfer conveyor belt 134 , guide wheels 136 for guiding and limiting the position of the flexible glass substrate 300 are arranged at intervals on the air floating plate 135 .

[0102] The guide wheels 136 are located on both sides of the transmission direction of the flexible glass substrate 300 , and can limit and guide the sides of the flexible glass substrate 300 to prevent its position from being offset.

[0103] In one possible implementation, referring to Figure 1 and Figure 2 As shown, the conveying unit adjacent to the cleaning pool 110 includes a substrate conveying belt 200 , and the substrate conveying belt 200 is used to transport the flexible glass substrate 300 .

[0104] The sub-cleaning conveyor belt 120, the transfer conveyor belt 134 and the substrate conveyor belt 200 all include flexible conveyor belts. The sub-cleaning conveyor belt 120, the transfer conveyor belt 134 and the substrate conveyor belt 200 are all made of polyurethane (also called polyurethane or PU) or highly elastic polymer material (also called rubber).

[0105] Among them, a frame 210 may be provided to carry a substrate conveyor belt 200. The conveying unit also takes the form of a conveyor belt, which is convenient for conveying the flexible glass substrate 300. The conveyor belt made of flexible material can protect the surface of the flexible glass substrate 300 and prevent damage.

[0106] In one possible implementation, referring to Figure 1 and Figure 2 As shown, the cleaning device 100 for the flexible glass substrate further includes a lifting position sensor 138, an air floating position sensor 137, a transfer position sensor 125 and a controller.

[0107] The lifting position sensor 138 is located above and / or below the sub-transfer bracket 130, and is used to detect the height position of the sub-transfer bracket 130. The air-floating position sensor 137 is located on both sides of the upper and lower sides or the left and right sides of the air-floating plate 135, and is used to detect the conveying position of the flexible glass substrate 300 on the air-floating plate 135. The transfer position sensor 125 is located on both sides of the left and right sides of the two ends of the cleaning conveyor belt, and is used to detect the conveying position of the flexible glass substrate 300 on the cleaning liquid conveyor belt.

[0108] The controller is electrically connected to the lifting position sensor 138 , the air floating position sensor 137 , and the transfer position sensor 125 , and is also electrically connected to the cleaning conveyor belt, the transfer conveyor belt 134 , the lifting assembly 132 , and the power parts of the conveying unit adjacent to the cleaning pool 110 .

[0109] Among them, each sensor can use a laser ranging sensor to measure the target distance by recording and processing the time from the emission of the light pulse to the return reception.

[0110] Specifically, when the transfer bracket needs to be lifted to a set position (for example, when the transfer bracket needs to be located in the same plane as the conveying unit, or when the transfer bracket needs to be located in the same plane as the cleaning conveyor belt), the controller controls the lifting assembly 132 to move upward or downward, and the lifting position sensor 138 detects the current position of the transfer platform 133 and transmits the signal to the controller. When the lifting position sensor 138 detects that the transfer platform 133 has reached the set position, the controller receives the signal detected by the lifting position sensor 138 and controls the movement of the lifting assembly 132 to stop.

[0111] When the flexible glass substrate 300 needs to be transferred between the transfer bracket and the conveying unit (for example, it may include the transfer of the flexible glass substrate 300 between the conveying unit and the transfer bracket, or it may include the transfer of the flexible glass substrate 300 from the transfer bracket to the conveying unit), the controller controls the air supply device to make the air floating plate 135 continue to spray air to the flexible glass substrate 300. A measuring hole is preset on the air floating plate 135, and the transmitting end and the receiving end of the air floating position sensor 137 are installed on the upper and lower sides of the measuring hole. The controller determines the starting time and the ending time of the transfer of the flexible glass substrate 300 according to the signals of the transmitting end and the receiving end, and calculates and determines whether the flexible glass substrate 300 is completely moved to the transfer bracket or the conveying unit. When it is determined that the flexible glass substrate 300 is completely moved to the transfer bracket or the conveying unit, the controller controls the air supply device to stop supplying air to the air floating plate 135, and further opens and closes the conveying of the conveying unit, the transfer conveyor belt 134 and the cleaning conveyor belt. In some embodiments, sensors may be installed on the left and right sides or the top and bottom sides of the transfer conveyor belt 134 to measure the position of the flexible glass substrate 300 on the transfer conveyor belt 134 to assist in determining whether the flexible glass substrate 300 is completely moved to the transfer bracket or the conveying unit.

[0112] When the flexible glass substrate 300 needs to be transferred between the transfer bracket and the sub-cleaning conveyor belt 120, the transfer position sensor 125 measures the position of the flexible glass substrate 300 and transmits a signal to the controller. The controller determines the position of the vacuum adsorption hole 123 covered by the flexible glass substrate 300 according to the position of the flexible glass substrate 300, and controls the vacuuming equipment to open or close the corresponding vacuum adsorption hole 123 to vacuum or release the flexible glass substrate 300, and further open and close the conveyance of the cleaning conveyor belt.

[0113] Figure 4 A schematic flow chart of a method for cleaning a flexible glass substrate provided in an embodiment of the present application.

[0114] The following will be combined Figure 4 The cleaning method for a flexible glass substrate provided in an embodiment of the present application is described.

[0115] The present application embodiment provides a method for cleaning a flexible glass substrate, which is applied to the cleaning device 100 of the flexible glass substrate. Figure 4 As shown, the cleaning method for the flexible glass substrate comprises the following steps:

[0116] S1: The conveying surface of each transfer conveyor belt located at the input end of the cleaning conveyor belt is located in the same horizontal plane as the conveying surface of the upper conveyor unit. The flexible glass substrate on the upper conveyor unit is transferred to each transfer conveyor belt located at the input end of the cleaning conveyor belt. The upper conveyor unit is the conveyor unit at the input end of the adjacent cleaning conveyor belt, and the nozzle between the upper conveyor unit and each transfer conveyor belt 134 located at the input end of the cleaning conveyor belt continuously sprays air toward the flexible glass substrate 300.

[0117] There are multiple flexible glass substrates 300 arranged at intervals on the upper conveying surface of the conveying unit. The flexible glass substrates 300 are transferred one by one from the upper conveying surface of the upper conveying unit to the upper conveying surface of the transfer conveyor belt 134. The upper conveying surfaces of the multiple transfer conveyor belts 134 jointly support the flexible glass substrates 300 to prevent collapse.

[0118] S2: After the entire flexible glass substrate is transferred to each transfer conveyor belt located at the input end of the cleaning conveyor belt, the operation of each transfer conveyor belt located at the input end of the cleaning conveyor belt is turned off. The operation of the cleaning conveyor belt is turned off. The conveying surface of each transfer conveyor belt located at the input end of the cleaning conveyor belt is located in the same horizontal plane as the conveying surface of the cleaning conveyor belt.

[0119] The flexible glass substrate 300 is lifted and carried to the input end of the cleaning conveyor belt by the transfer conveyor belt 134. The upper conveying surface of the transfer conveyor belt 134 is flush with the conveying surface of the upper conveying section 121 of the cleaning conveyor belt.

[0120] S3: starting the vacuuming operation on the vacuum adsorption hole located at the input end of the cleaning liquid conveyor belt and covered by the flexible glass substrate, so that the flexible glass substrate is adsorbed on the cleaning liquid conveyor belt.

[0121] The flexible glass substrate 300 is transferred from the upper conveying surface of the transfer conveyor belt 134 to the conveying surface of the upper conveying section 121 of the cleaning conveyor belt.

[0122] S4: starting the operation of the cleaning liquid conveyor belt, allowing the cleaning liquid conveyor belt to absorb the flexible glass substrate into the cleaning tank, and performing ultrasonic cleaning on the flexible glass substrate in the cleaning tank.

[0123] The flexible glass substrate 300 may be cleaned during the conveying process, or the cleaning conveyor belt may be controlled to stay in the cleaning pool 110 to clean the flexible glass substrate 300 .

[0124] S5: Close the operation of each transfer conveyor belt located at the output end of the cleaning conveyor belt, so that the conveying surface of each transfer conveyor belt located at the output end of the cleaning conveyor belt is located in the same horizontal plane as the conveying surface of the cleaning conveyor belt.

[0125] The upper conveying surface of the transfer conveyor belt 134 is flush with the conveying surface of the upper conveying section 121 of the cleaning conveyor belt.

[0126] S6: The cleaning conveyor belt conveys the flexible glass substrate that has completed ultrasonic cleaning to the output end of the cleaning conveyor belt, and the vacuuming operation of the vacuum adsorption holes at the output end of the cleaning conveyor belt that are covered by the flexible glass substrate is closed.

[0127] The flexible glass substrate 300 is transferred from the conveying surface of the upper conveying section 121 of the cleaning conveyor belt to the upper conveying surface of the transfer conveyor belt 134 .

[0128] S7: The conveying surface of each transfer conveyor belt at the output end of the cleaning conveyor belt is located in the same horizontal plane as the conveying surface of the conveying unit of the next level. The flexible glass substrate on each transfer conveyor belt at the output end of the cleaning conveyor belt is transferred to the conveying unit of the next level. The conveying unit of the next level is the conveying unit at the output end of the adjacent cleaning conveyor belt, and the nozzle between the conveying unit of the next level and each transfer conveyor belt 134 at the output end of the cleaning conveyor belt continuously sprays air toward the flexible glass substrate 300.

[0129] The transfer conveyor belt 134 is lifted and lowered to carry the flexible glass substrate 300 to the input end of the conveying unit of the next stage, and then the flexible glass substrate 300 is transferred from the upper conveying surface of the transfer conveyor belt 134 to the upper conveying surface of the conveying unit of the next stage.

[0130] The cleaning method for the flexible glass substrate 300 of the embodiment of the present application is applied to the above-mentioned cleaning device 100 for the flexible glass substrate 300, and has the same beneficial effects.

[0131] It should be noted that, unless otherwise clearly specified and limited, in the description of this application, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, or it can be an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0132] The orientations or positional relationships indicated by terms such as “upper”, “lower”, “front”, “back”, “vertical”, “horizontal”, “top”, “bottom”, “inside” and “outside” are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present application and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0133] The term "plurality" means two or more than two, unless otherwise specifically specified. The terms "first," "second," "third," "fourth," etc., if any, are used to distinguish similar objects and are not necessarily used to describe a particular order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of the present application described herein can include sequential implementations other than those illustrated or described herein.

[0134] The terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or apparatus that comprises a series of steps or elements is not necessarily limited to those steps or elements explicitly listed but may include other steps or elements not explicitly listed or inherent to such process, method, product, or apparatus.

[0135] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A cleaning device for a flexible glass substrate, characterized in that: It includes a cleaning pool, a cleaning conveyor belt, a transfer bracket and an air flotation plate; The cleaning pool is used to contain cleaning liquid, and an ultrasonic generator is installed in the cleaning pool; The cleaning conveyor belt is used to adsorb the flexible glass substrate for cleaning in the cleaning tank; the cleaning conveyor belt includes a plurality of sub-cleaning conveyor belts that are relatively spaced and parallel to each other, each of the sub-cleaning conveyor belts is spanned between opposite side walls of the cleaning tank, and both ends of each sub-cleaning conveyor belt are located outside the cleaning tank; each of the sub-cleaning conveyor belts is provided with a plurality of vacuum adsorption holes, each of the vacuum adsorption holes is connected to a vacuum pumping pipeline, and the vacuum pumping pipeline is connected to a vacuum pumping device; The transfer bracket is used to assist the flexible glass substrate in being transferred between the cleaning conveyor belt and the conveying unit adjacent to the cleaning tank; the transfer bracket is provided with two groups, and the two groups of transfer brackets are symmetrically arranged at both ends of the cleaning conveyor belt; each group of the transfer brackets includes a plurality of sub-transfer brackets, and the sub-transfer brackets and the sub-cleaning conveyor belts are arranged alternately; the sub-transfer brackets include a lifting assembly, a transfer platform and a transfer conveyor belt, the lifting assembly is fixedly connected to the transfer platform, and the lifting assembly is used to drive the transfer platform to move up and down along the depth direction of the cleaning tank, and the transfer conveyor belt is installed on the transfer platform; The air-floating plate is used to assist the flexible glass substrate in being transferred between the transfer bracket and the conveying unit adjacent to the cleaning pool; two air-floating plates are provided, and one air-floating plate is provided on a side of each transfer bracket away from the cleaning pool; the air-floating plate is provided adjacent to the transfer bracket, or the air-floating plate is provided adjacent to the processing unit adjacent to the cleaning pool; the air-floating plate includes a plate body, a nozzle and an air supply device, and the plate body is used to supplement at least part of the gap between the transfer conveyor belt and the conveying unit adjacent to the cleaning pool; a plurality of nozzles are provided on the plate body, and the exhaust end of the air supply device is connected to each nozzle, and the exhaust end of each nozzle is used to spray air toward the flexible glass substrate being transferred.

2. The cleaning device for a flexible glass substrate according to claim 1, characterized in that: An opening is provided on the side wall of the cleaning tank; The sub-cleaning conveyor belt comprises an upper conveying section located at the top and a lower conveying section located at the bottom, the upper conveying section passes through the opening, and the lower conveying section passes around the bottom of the cleaning pool; The liquid level in the cleaning pool is higher than the conveying surface of the upper conveying section.

3. The cleaning device for a flexible glass substrate according to claim 2, characterized in that: It also includes a liquid level maintaining device, which is installed on the inner wall of the cleaning tank; The liquid level maintaining device includes a liquid cutting knife portion, which sprays cleaning liquid toward the sub-cleaning conveyor belt near the inner side of the opening to form a cleaning liquid curtain extending along the width direction of the sub-cleaning conveyor belt to isolate and seal the opening; and / or, the liquid level maintaining device includes an air cutting knife portion, which blows air toward the sub-cleaning conveyor belt near the inner side of the opening to form an isolation air curtain extending along the width direction of the sub-cleaning conveyor belt to isolate and seal the opening.

4. The cleaning device for a flexible glass substrate according to claim 3, characterized in that: Baffles are arranged at the edges of both sides of the sub-cleaning conveyor belt in the width direction. The baffles extend in the surrounding plane of the sub-cleaning conveyor belt, and the baffles are in sealing contact with the sub-cleaning conveyor belt.

5. The cleaning device for a flexible glass substrate according to any one of claims 1 to 3, characterized in that: The height of the conveying unit adjacent to the cleaning pool is higher than the height of the cleaning conveyor belt, and the air flotation plate is fixedly installed at a position close to the conveying unit adjacent to the cleaning pool; Along the height direction of the cleaning pool, the area of ​​the upper surface of the air floating plate is larger than the area of ​​the lower surface of the air floating plate.

6. The cleaning device for a flexible glass substrate according to claim 5, characterized in that: Along the width direction of the transfer conveyor belt, guide wheels for guiding and limiting the position of the flexible glass substrate are arranged at intervals on the air floating plate.

7. The cleaning device for a flexible glass substrate according to any one of claims 1 to 3, characterized in that: The conveying unit adjacent to the cleaning pool includes a substrate conveying belt, and the substrate conveying belt is used to transport the flexible glass substrate; The sub-cleaning conveyor belt, the transfer conveyor belt and the substrate conveyor belt all include flexible conveyor belts.

8. The cleaning device for a flexible glass substrate according to any one of claims 1 to 3, characterized in that: It also includes a lifting position sensor, an air floating position sensor, a transfer position sensor and a controller; The lifting position sensor is located above and / or below the sub-transfer bracket, and is used to detect the height position of the sub-transfer bracket; the air-floating position sensor is located on the upper and lower sides or the left and right sides of the air-floating plate, and is used to detect the conveying position of the flexible glass substrate on the air-floating plate; the transfer position sensor is located on the left and right sides of both ends of the cleaning conveyor belt, and is used to detect the conveying position of the flexible glass substrate on the cleaning conveyor belt; The controller is electrically connected to the lifting position sensor, the air floating position sensor, and the transfer position sensor, and the controller is electrically connected to the cleaning conveyor belt, the transfer conveyor belt, the lifting assembly, and the power parts of the conveying unit adjacent to the cleaning pool.

9. A method for cleaning a flexible glass substrate, characterized in that: Applied to the cleaning device for a flexible glass substrate according to any one of claims 1 to 8, the cleaning method for a flexible glass substrate comprises the following steps: The conveying surface of each transfer conveyor belt located at the input end of the cleaning conveyor belt is located in the same horizontal plane as the conveying surface of the conveying unit at the previous level; the flexible glass substrate on the conveying unit at the previous level is transferred to each transfer conveyor belt located at the input end of the cleaning conveyor belt; wherein the conveying unit at the previous level is the conveying unit at the input end adjacent to the cleaning conveyor belt, and the nozzle between the conveying unit at the previous level and each transfer conveyor belt located at the input end of the cleaning conveyor belt continuously sprays air toward the flexible glass substrate; After the entire flexible glass substrate is transferred to each of the transfer conveyor belts located at the input end of the cleaning conveyor belt, the operation of each of the transfer conveyor belts located at the input end of the cleaning conveyor belt is turned off; the operation of the cleaning conveyor belt is turned off; and the conveying surface of each of the transfer conveyor belts located at the input end of the cleaning conveyor belt is located in the same horizontal plane as the conveying surface of the cleaning conveyor belt; Starting a vacuuming operation on the vacuum adsorption hole located at the input end of the cleaning conveyor belt and covered by the flexible glass substrate, so that the flexible glass substrate is adsorbed on the cleaning conveyor belt; Starting the operation of the cleaning conveyor belt, allowing the cleaning conveyor belt to absorb the flexible glass substrate into the cleaning tank, and performing ultrasonic cleaning on the flexible glass substrate in the cleaning tank; Shut down the operation of each of the transfer conveyor belts at the output end of the cleaning conveyor belt, so that the conveying surface of each of the transfer conveyor belts at the output end of the cleaning conveyor belt is located in the same horizontal plane as the conveying surface of the cleaning conveyor belt; The cleaning conveyor belt conveys the flexible glass substrate that has completed ultrasonic cleaning to an output end of the cleaning conveyor belt, and closes the vacuuming operation of the vacuum adsorption holes at the output end of the cleaning conveyor belt that are covered by the flexible glass substrate; The conveying surface of each transfer conveyor belt located at the output end of the cleaning conveyor belt is located in the same horizontal plane as the conveying surface of the conveying unit of the next stage; the flexible glass substrate on each transfer conveyor belt located at the output end of the cleaning conveyor belt is transferred to the conveying unit of the next stage; wherein the conveying unit of the next stage is the conveying unit at the output end of the adjacent cleaning conveyor belt, and the nozzle between the conveying unit of the next stage and each transfer conveyor belt located at the output end of the cleaning conveyor belt continuously sprays air toward the flexible glass substrate.

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