Coating apparatus

Abstract

The application discloses a coating equipment, which comprises a carrier conveying line, a loading and unloading system, a coating cavity system and a transfer system. The carrier conveying line is used for conveying a substrate carrier. The loading and unloading system is used for loading and unloading a substrate on the substrate carrier. The substrate coating cavity system is used for realizing double-sided coating of the substrate. The transfer system is connected with the substrate coating cavity system and is used for transferring the substrate carrier between the carrier conveying line and the substrate coating cavity system. The coating equipment realizes double-sided coating of the substrate in a continuous production line, has a high product yield, has a small equipment layout area and has a high workshop use efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, in particular to a coating equipment. BACKGROUND

[0002] The thin film / crystalline silicon heterojunction solar cell belongs to the third generation of high-efficiency solar cell technology, and the core coating equipment is an amorphous silicon thin film coating equipment, which is divided into a hot-wire chemical vapor deposition equipment and a plasma chemical vapor deposition equipment.

[0003] The above two kinds of equipment generally adopt a single-side coating method, and when the coating from the front side to the back side is converted, an automatic mechanism is needed to take the substrate out of the carrier plate, turn it over, and then load it on the carrier plate for the next process. When the substrate is turned over, it will be in contact with air, and water vapor, oxygen, dust and other substances in the air will cause the subsequent performance of the substrate to decrease. On the other hand, the existing equipment uses multiple production lines for production and an automatic turning mechanism outside the cavity, which occupies a large area and has low efficiency. SUMMARY

[0004] The purpose of the present application is to provide a coating equipment that can realize double-side coating of a substrate within a continuous production line, has a high product yield, occupies a small area, and has a high efficiency of factory use.

[0005] To achieve the above technical effects, the technical scheme of the present application is as follows:

[0006] The present application discloses a coating equipment, which comprises a carrier transport line for transporting a substrate carrier, a loading and unloading system connected with the carrier transport line and used for loading and unloading a substrate on the substrate carrier, a coating cavity system connected with the carrier transport line and used for realizing double-side coating of the substrate, and a transfer system connected with the substrate coating cavity system and used for transferring the substrate carrier between the carrier transport line and the substrate coating cavity system.

[0007] In some embodiments, the substrate coating cavity system comprises a first coating cavity module, a carrier plate conversion cavity module and a second coating cavity module connected in sequence, the first coating cavity module is used for coating a first side of the substrate, the carrier plate conversion cavity module is used for turning over the substrate carrier, and the second coating cavity module is used for coating a second side of the substrate.

[0008] In some specific embodiments, the first coating chamber module includes a loading and preheating chamber and at least one first coating working chamber arranged in sequence, and a first valve chamber is provided between the loading and preheating chamber and the first coating working chamber and between two adjacent first coating working chambers.

[0009] In some specific embodiments, the second coating chamber module includes at least one second coating working chamber and a unloading and heat dissipation chamber arranged in sequence, and a second valve chamber is provided between the unloading and heat dissipation chamber and the second coating working chamber and between two adjacent second coating working chambers.

[0010] In some specific embodiments, the coating equipment further includes a coating transport line, and is used to transport the substrate carrier so that the substrate carrier passes through the first coating chamber module, the carrier conversion chamber module and the second coating chamber module in sequence.

[0011] In some more specific embodiments, the substrate carrier includes a carrier frame and a substrate sub-plate installed on the carrier frame, and the substrate sub-plate is used to load multiple substrates; each of the coating transport lines includes multiple coating transport mechanisms, and the multiple coating transport mechanisms are respectively arranged in the first coating chamber module, the carrier conversion chamber module, and the second coating chamber module; each of the coating transport mechanisms includes a transport support component, a transport power component and a transport positioning component, the transport support component is used to support the carrier frame, the transport power component is used to drive the carrier frame to move along the transport direction of the coating transport line, and the transport positioning component is used to guide the carrier frame to slide.

[0012] In some optional embodiments, each of the coating transport lines includes multiple distance-changing mechanisms and multiple sliding mechanisms, and each of the coating transport mechanisms is arranged corresponding to the distance-changing mechanism and the sliding mechanism. The distance-changing mechanism is used to drive the coating transport mechanism to move in a direction perpendicular to the transport direction of the substrate carrier.

[0013] In some embodiments, the loading and unloading system includes a substrate loading system and a substrate unloading system; the substrate loading system is arranged in parallel with the carrier transport line, and is used to load the substrate onto the substrate carrier; the substrate unloading system is arranged in parallel with the carrier transport line, and is arranged colinearly with the substrate loading system, and the substrate unloading system removes the substrate after coating is completed from the substrate carrier.

[0014] In some specific embodiments, the coating equipment further comprises a sub-plate conveying line arranged parallel to the carrier conveying line and used for conveying a substrate sub-plate, the substrate sub-plate being used for loading the substrate and capable of being loaded onto the substrate carrier, the substrate sub-plate being provided with a clamping point assembly used for clamping the substrate.

[0015] In some more specific embodiments, the substrate loading system comprises a loading guide plate mechanism, a substrate loading mechanism, a clamping point locking mechanism and a sub-plate loading mechanism, and the substrate unloading system comprises an unloading guide plate mechanism, a substrate unloading mechanism, a clamping point releasing mechanism and a sub-plate unloading mechanism.

[0016] In some optional embodiments, the sub-plate loading mechanism and the sub-plate unloading mechanism have the same structure and each comprises a sub-plate carrying robot and a sub-plate suction assembly arranged at the moving end of the sub-plate carrying robot, the sub-plate suction assembly comprising a plurality of sub-plate suction heads for suctioning the substrate sub-plate.

[0017] In some optional embodiments, the substrate loading mechanism and the substrate unloading mechanism have the same structure and each comprises a substrate suction assembly comprising a plurality of substrate suction heads for suctioning the substrate, a horizontal moving assembly and a lifting assembly connected with the substrate suction assembly for driving the substrate suction assembly to lift, the horizontal moving assembly being connected with the lifting assembly for driving the lifting assembly and the substrate suction assembly to reciprocate between the loading guide plate mechanism and the sub-plate conveying line or between the unloading guide plate mechanism and the sub-plate conveying line.

[0018] In some optional embodiments, the substrate sub-plate is provided with a plurality of substrate accommodating positions, the clamping point assemblies are provided in one-to-one correspondence with the plurality of substrate accommodating positions, each clamping point assembly comprises four clamping pieces arranged at the corners of the substrate accommodating position, the clamping pieces being rotatably arranged on the substrate sub-plate, the clamping pieces being provided with a stop portion used for locking the substrate and a driving portion matched with the clamping point locking mechanism or the clamping point releasing mechanism.

[0019] In some specific embodiments, the transfer system comprises two, one of which is used for receiving the substrate carrier output by the substrate loading system, and the other is used for carrying the substrate carrier to the substrate unloading system.

[0020] In some embodiments, the transfer system comprises: a transfer base; a horizontal moving mechanism, the horizontal moving mechanism comprising a horizontal moving driving assembly and a horizontal moving support, the horizontal moving driving assembly being arranged on the transfer base and being in transmission cooperation with the horizontal moving support to drive the horizontal moving support to move in a direction perpendicular to the transport direction of the carrier transport line; a rotating mechanism arranged on the horizontal moving support; and a carrier transfer transport mechanism arranged at the output end of the rotating mechanism, the carrier transfer transport mechanism being used to drive the substrate carrier to move in the transport direction of the carrier transport line.

[0021] The coating equipment has the following advantages: the substrate is always inside the substrate coating cavity system during the coating process, so that the substrate can be coated on both sides, and the coating yield is ensured without secondary exposure to air. Meanwhile, the feeding and discharging system, the carrier transport line, the transfer system and the substrate coating cavity system in the coating equipment can form a complete closed-loop assembly line, so that the coating process is fully automated, the layout area of the coating equipment is reduced, and the efficiency of the factory building is improved.

[0022] Additional aspects and advantages of the present application will be made apparent by the following description and the specific description. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is a structural schematic view of the coating equipment according to an embodiment of the present application;

[0024] Figure 2 is a structural schematic view of the clamping point locking mechanism of the coating equipment according to an embodiment of the present application;

[0025] Figure 3 is a structural schematic view of the sub-plate loading of the coating equipment according to an embodiment of the present application;

[0026] Figure 4 is a structural schematic view of the first coating working cavity of the coating equipment according to an embodiment of the present application;

[0027] Figure 5 is a structural schematic view of the second coating working cavity of the coating equipment according to an embodiment of the present application;

[0028] Figure 6 is a structural schematic view of the coating transport mechanism of the coating equipment according to an embodiment of the present application;

[0029] Figure 7 is a partial structural enlarged schematic view of the coating transport mechanism of the coating equipment according to an embodiment of the present application;

[0030] Figure 8is another partial structure enlarged schematic view of the film coating transport mechanism of the film coating equipment of the embodiment of the present application;

[0031] Figure 9 is another partial structure enlarged schematic view of the film coating transport mechanism of the film coating equipment of the embodiment of the present application;

[0032] Figure 10 is a structure schematic view of the first valve cavity of the film coating equipment of the embodiment of the present application;

[0033] Figure 11 is a structure schematic view of the variable distance mechanism of the film coating equipment of the embodiment of the present application;

[0034] Figure 12 is a structure schematic view of the transfer system of the film coating equipment of the embodiment of the present application;

[0035] Figure 13 is a partial structure schematic view of the transfer system of the film coating equipment of the embodiment of the present application;

[0036] Figure 14 is another partial structure schematic view of the transfer system of the film coating equipment of the embodiment of the present application;

[0037] Figure 15 is a structure schematic view of the base carrier of the film coating equipment of the embodiment of the present application;

[0038] Figure 16 is a structure schematic view of the clamping point assembly of the film coating equipment of the embodiment of the present application.

[0039] Reference signs:

[0040] 1. carrier transport line;

[0041] 2. base material loading system; 21, loading guide piece mechanism; 22, base material loading mechanism; 23, clamping point locking mechanism; 231, clamping point mounting rack; 232, clamping point lifting driving piece; 233, adjusting mounting seat; 234, adjusting rod; 235, cam follower; 236, clamping point rotating driving piece; 24, sub-plate loading mechanism; 241, sub-plate carrying robot; 242, sub-plate adsorption assembly;

[0042] 3. base material film coating cavity system; 31, first film coating cavity chamber module; 311, loading preheating cavity; 312, first film coating working cavity; 313, first valve cavity; 32, carrier plate conversion cavity module; 33, second film coating cavity chamber module; 331, second film coating working cavity; 332, unloading heat dissipation cavity; 333, second valve cavity;

[0043] 4, Coating transport line; 41, Coating transport mechanism; 411, Transport support assembly; 4111, Support bracket; 4112, U-shaped wheel frame; 4113, Positioning wheel; 4114, Support wheel; 412, Transport power assembly; 4121, Power motor; 4122, Power gear; 413, Transport positioning assembly; 4131, Positioning bracket; 4132, Positioning fixed plate; 4133, Positioning rod; 4134, Positioning roller; 42, Variable distance mechanism; 421, Variable distance driving piece; 422, Magnetic fluid seal; 423, Bidirectional adjusting piece; 4231, Bidirectional support seat; 4232, Bidirectional screw rod; 4233, Screw rod nut; 43, Sliding mechanism; 431, Sliding bracket; 432, Sliding rail; 433, Slider;

[0044] 5, Base body blanking system; 51, Blanking guide piece mechanism; 52, Base body unloading mechanism; 53, Clamping point release mechanism; 54, Sub-board unloading mechanism;

[0045] 6, Transfer system; 61, Transfer base; 62, Horizontal movement mechanism; 621, Horizontal movement driving assembly; 622, Horizontal movement bracket; 63, Rotation mechanism; 64, Carrier transfer transport mechanism; 641, Carrier transfer frame; 642, Transfer support assembly; 643, Transfer positioning assembly; 644, Transfer power assembly;

[0046] 7, Base body carrier; 71, Carrier plate frame; 711, Hanging part; 712, Power rack; 713, Support bar;

[0047] 8, Sub-board transport line;

[0048] 9, Base body sub-board; 91, Clamping point assembly; 911, Clamping point piece; 9111, Stop part; 9112, Driving part;

[0049] 101, First heating piece; 102, First spray pipe; 103, Second heating piece; 104, Second spray pipe. DETAILED DESCRIPTION

[0050] In order to make the technical problems solved by the present application, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the present application will be further described below in combination with the drawings and through specific embodiments.

[0051] In the description of the present application, it is to be understood by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0052] In addition, the features defined as "first", "second" can explicitly or implicitly include one or more of the features for distinguishing the described features, without order, without light and heavy. In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0053] In the description of the present application, it should be noted that unless otherwise specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0054] The specific structure of the coating equipment according to the embodiments of the present application will be described below with reference to the accompanying drawings. Figures 1-16 The specific structure of the coating equipment according to the embodiments of the present application will be described below with reference to the accompanying drawings.

[0055] As Figure 1As shown, the coating equipment of the embodiment includes a carrier conveying line 1, a loading and unloading system, a substrate coating cavity system 3 and a transfer system 6. The carrier conveying line 1 is used to transport the substrate carrier 7. The loading and unloading system is connected with the carrier conveying line 1 and is used to load and unload the substrate on the substrate carrier 7. The substrate coating cavity system 3 is connected with the carrier conveying line 1 and is used to realize double-sided coating of the substrate. The transfer system 6 is used to transfer the substrate carrier 7 between the carrier conveying line 1 and the substrate coating cavity system 3. It can be understood that, in actual work process, the loading and unloading system can load the substrate in the flower basket onto the substrate carrier 7, and then transport the substrate carrier 7 to the transfer system 6 by the carrier conveying line 1. The transfer system 6 transfers the substrate carrier 7 into the substrate coating cavity system 3. After double-sided coating by the substrate coating cavity system 3, the substrate carrier 7 is transported to the transfer system 6. The transfer system 6 can transport the substrate carrier 7 to the carrier conveying line 1. The carrier conveying line 1 can transport the substrate carrier 7 to the loading and unloading system. The loading and unloading system can insert the substrate which has completed double-sided coating into the flower basket and transport it out. Since the substrate coating cavity system 3 is used to realize double-sided coating of the substrate, the substrate is always inside the substrate coating cavity system 3 during coating and is not exposed to air again, which ensures the coating yield. At the same time, in the coating equipment of the embodiment, the loading and unloading system, the carrier conveying line 1, the transfer system 6 and the substrate coating cavity system 3 can form a closed loop arrangement, which realizes full automation of the coating process, reduces the layout area of the coating equipment and improves the use efficiency of the factory building. In the embodiment, the carrier conveying line 1 can use an existing conveying line which can be used to transport the vertically placed substrate carrier 7. That is, the specific structure of the carrier conveying line 1 is prior art, which need not be described here.

[0056] It should be noted that, in the embodiment, the substrate can be any one of a silicon wafer, a battery wafer, a die or a flexible material. The type of substrate can be limited according to actual needs. In the embodiment, the substrate coating cavity system 3 of the coating equipment provides a vacuum environment for coating of the substrate. Other gas atmosphere environments, such as inert gas environment, can also be provided according to the needs of substrate coating.

[0057] Reference Figure 1As shown, the loading and unloading system includes a substrate loading system 2 and a substrate unloading system 5. The substrate loading system 2 is arranged in parallel with the carrier transport line 1 and is used to load the silicon wafer in the flower basket onto the substrate carrier 7. The substrate unloading system 5 is arranged in parallel with the carrier transport line 1 and is arranged in line with the substrate loading system 2. The substrate unloading system 5 is used to load the silicon wafer on the substrate carrier 7 into the flower basket after film plating is completed. It can be understood that, in actual working process, if the loading and unloading system is one, the entire loading and unloading system also needs to be able to move along the transport direction of the carrier transport line 1, that is, in actual working process, the loading and unloading cannot be carried out at the same time, which restricts the production efficiency. In the embodiment, the loading and unloading system includes the substrate loading system 2 and the substrate unloading system 5, which can carry out loading and unloading at the same time, thereby improving the production efficiency.

[0058] Reference Figure 1 As shown, the transfer system 6 is two, one of which is used to transfer the substrate carrier 7 from the carrier transport line 1 to the substrate film plating cavity system 3, and the other is used to transfer the substrate carrier 7 from the substrate film plating cavity system 3 to the carrier transport line 1. In actual working process, the transfer system 6 is one, then in actual working process, the entire transfer system 6 also needs to be able to move along the transport direction of the carrier transport line 1, or multiple carrier transport lines 1 are arranged to realize the double-line flow of the carrier transport line 1 between the carrier transport line 1 and the substrate film plating cavity system 3, that is, in actual working process, the substrate carrier 7 is transferred from the carrier transport line 1 to the substrate film plating cavity system 3 and the substrate carrier 7 is transferred from the substrate film plating cavity system 3 to the carrier transport line 1. It may not be carried out at the same time, which restricts the production efficiency. In the embodiment, the transfer system 6 is two, and the substrate carrier 7 is transferred from the carrier transport line 1 to the substrate film plating cavity system 3 and the substrate carrier 7 is transferred from the substrate film plating cavity system 3 to the carrier transport line 1. It can be carried out at the same time, thereby improving the production efficiency.

[0059] Reference Figure 1 , Figure 4 and Figure 5The substrate film coating cavity system 3 comprises a first film coating cavity module 31, a carrier plate conversion cavity module 32 and a second film coating cavity module 33 connected in sequence, the first film coating cavity module 31 is used for coating the first surface of the substrate, the carrier plate conversion cavity module 32 is used for overturning the substrate carrier 7, and the second film coating cavity module 33 is used for coating the second surface of the substrate. The film coating device further comprises two parallel film coating transport lines 4, the film coating transport lines 4 are parallel and used for transporting the substrate carrier 7 so that the substrate carrier 7 passes through the first film coating cavity module 31, the carrier plate conversion cavity module 32 and the second film coating cavity module 33 in sequence. It can be understood that in actual work, the two parallel film coating transport lines 4 can enable the film coating device of the embodiment to simultaneously coat the substrates on the two substrate carriers 7 in one work flow, improving the production efficiency. At the same time, when the film coating transport line 4 transports the substrate carrier 7 into the first film coating cavity module 31, the first film coating cavity module 31 can coat the first surface of the substrate, and when the first surface coating is completed, the film coating transport line 4 can transport the substrate carrier 7 into the carrier plate conversion cavity module 32, the carrier plate conversion cavity module 32 is provided with a conversion mechanism, the positions of the substrate carriers 7 on the two film coating transport lines 4 are replaced through the conversion mechanism, the film coating transport line 4 continues to transport the substrate carrier 7 and transports it to the second film coating cavity module 33 for second surface coating, so that the double-sided film coating of the substrate can be better completed. It should be noted that the specific type of the conversion mechanism can be a mechanical hand or a mechanical clamp according to actual needs, specifically, in actual work, there are two mechanical hands, the two mechanical hands first extract the substrate carriers 7 from the carrier transport line 1, then move to the specified position, and exchange the positions of the two substrate carriers 7. The specific structure of the mechanical hand is a prior art, which need not be repeated here.

[0060] Reference Figure 1 and Figure 4As shown, the first coating cavity module 31 includes a loading preheating cavity 311 and at least one first coating working cavity 312 arranged in sequence, and a first valve cavity 313 is arranged between the loading preheating cavity 311 and the first coating working cavity 312 and between adjacent two first coating working cavities 312. The first coating working cavity 312 is provided with a first heating member 101 and two first spray pipes 102, the two first spray pipes 102 are located on both sides of the first heating member 101, and the first heating member 101 and the first spray pipes 102 are located between the two coating transport lines 4. Thus, after the carrier transport line 1 transports the substrate carrier 7 into the loading preheating cavity 311, the substrate is preheated and then enters the first coating working cavity 312, the two first spray pipes 102 can respectively spray process gas towards the substrate carriers 7 on the two carrier transport lines 1, and the first heating member 101 is used for heating the first coating working cavity 312, so that the coating of the first surface of the substrate can be completed. According to the actual needs of coating, the number of the first coating working cavities 312 can be selected according to actual needs. At the same time, the added first valve cavity 313 can ensure that the substrate carrier 7 always moves in the first coating cavity module 31, avoiding the phenomenon that the substrate is exposed to air, and improving the coating yield.

[0061] Reference Figure 1 and Figure 5 As shown, the second coating cavity module 33 includes at least one second coating working cavity 331 and an unloading heat dissipation cavity 332 arranged in sequence, and a second valve cavity 333 is arranged between the unloading heat dissipation cavity 332 and the second coating working cavity 331 and between adjacent two second coating working cavities 331. The second coating working cavity 331 is provided with a second heating member 103 and two second spray pipes 104, the two second spray pipes 104 are located on both sides of the second heating member 103, and the second heating member 103 and the second spray pipes 104 are located between the two coating transport lines 4. Thus, the carrier transport line 1 transports the substrate carrier 7 into the second coating working cavity 331, the two second spray pipes 104 can respectively spray process gas towards the substrate carriers 7 on the two carrier transport lines 1, and the second heating member 103 is used for heating the second coating working cavity 331, so that the coating of the second surface of the substrate can be completed. According to the actual needs of coating, the number of the second coating working cavities 331 can be selected according to actual needs. After the coating is completed, the substrate carrier 7 enters the unloading heat dissipation cavity 332 for cooling under the transportation of the carrier transport line 1, avoiding the phenomenon that the overheated substrate after coating is directly exposed to air to cause waste pieces. At the same time, the added second valve cavity 333 can ensure that the substrate carrier 7 always moves in the second coating cavity module 33, avoiding the phenomenon that the substrate is exposed to air, and improving the coating yield.

[0062] Reference Figure 15As shown, the substrate carrier 7 comprises a carrier frame 71, the carrier frame 71 is provided with a hanging part 711, a power rack 712 and a support bar 713, the hanging part 711 is used to cooperate with the substrate sub-plate 9 loaded with a plurality of substrates, and the power rack 712 and the support bar 713 are arranged at the upper end of the carrier frame 71. Referring to Figure 6-Figure 9 As shown, each coating transport line 4 comprises a plurality of coating transport mechanisms 41, and the plurality of coating transport mechanisms 41 are arranged in the first coating chamber module 31, the carrier plate conversion chamber module 32 and the second coating chamber module 33 respectively. Each coating transport mechanism 41 comprises a transport support assembly 411, a transport power assembly 412 and a transport positioning assembly 413, the transport support assembly 411 comprises a support bracket 4111, a plurality of U-shaped wheel frames 4112, a positioning wheel 4113 and a support wheel 4114, the support bracket 4111 is arranged in the length direction of the substrate carrier 7, the plurality of U-shaped wheel frames 4112 are arranged in the length direction of the support bracket 4111 at intervals, the positioning wheel 4113 and the support wheel 4114 are arranged on the two vertical parts of each U-shaped wheel frame 4112 respectively, the support wheel 4114 cooperates with the support bar 713, and the positioning groove on the positioning wheel 4113 cooperates with the positioning protrusion on the power rack 712, the transport power assembly 412 comprises a power motor 4121 and a power gear 4122, the power motor 4121 is arranged on the support bracket 4111, the power gear 4122 is arranged on the motor shaft of the power motor 4121 and is engaged with the power rack 712, and the transport positioning assembly 413 comprises a positioning bracket 4131, a plurality of positioning fixed plates 4132, a positioning rod 4133 and a positioning roller 4134, the positioning bracket 4131 is arranged in the length direction of the substrate carrier 7 and is arranged in the vertical direction at intervals with the support bracket 4111, the plurality of positioning fixed plates 4132 are arranged on the positioning bracket 4131 at intervals in the length direction of the positioning bracket 4131, the two positioning rods 4133 arranged at intervals are arranged on each positioning fixed plate 4132, the positioning roller 4134 is arranged on one end of the positioning rod 4133, and the opposite two side walls of the substrate carrier 7 abut on the two positioning rollers 4134 on the same positioning fixed plate 4132 respectively.

[0063] It can be understood that, in actual work process, the power motor 4121 drives the power gear 4122 to rotate, thereby driving the power rack 712 to move, since the power rack 712 is arranged on the base carrier 7, the power rack 712 moves while driving the base carrier 7 to move. In the movement process of the base carrier 7, the positioning roller 4134 of the transportation positioning assembly 413 can guide the movement of the base carrier 7, avoiding the phenomenon that the base carrier 7 is skewed in the transportation process, ensuring that the coating process is stably carried out. The supporting wheel 4114 of the transportation supporting assembly 411 supports the whole base carrier 7, so that the base carrier 7 can be stably hung in the first coating cavity module 31, the carrier plate conversion cavity module 32 and the second coating cavity module 33, ensuring the stable transportation of the base carrier 7 in the first coating cavity module 31, the carrier plate conversion cavity module 32 and the second coating cavity module 33. The positioning wheel 4113 of the transportation supporting assembly 411 positions the power rack 712 on the base carrier 7, avoiding the phenomenon that the power rack 712 is deviated, thereby avoiding the phenomenon that the base carrier 7 is skewed in the transportation process.

[0064] Reference Figure 10-11As shown, each coating transport line 4 comprises a plurality of distance adjustment mechanisms 42 and a plurality of sliding mechanisms 43, each coating transport mechanism 41 is provided with two distance adjustment mechanisms 42 and two sliding mechanisms 43, the two distance adjustment mechanisms 42 are respectively used to drive the coating transport mechanism 41 to move in a direction perpendicular to the transport direction of the substrate carrier 7. The sliding mechanism 43 comprises a sliding support 431 installed on the bottom wall and the top wall of the first coating chamber module 31 and the second coating chamber module 33, the sliding support 431 is provided with a sliding rail 432 extending in a direction perpendicular to the transport direction of the substrate carrier 7, the sliding rail 432 is provided with a sliding block 433 connected with the support bracket 4111 or the positioning bracket 4131. The distance adjustment mechanism 42 comprises a distance adjustment drive 421, a magnetic fluid seal 422 and a bidirectional adjusting member 423, the distance adjustment drive 421 is arranged on the outer side wall of the first coating chamber module 31, the carrier plate conversion chamber module 32 and the second coating chamber module 33, the magnetic fluid seal 422 is arranged on the side wall of the first coating chamber module 31, the carrier plate conversion chamber module 32 and the second coating chamber module 33, and one end of the magnetic fluid seal 422 is connected with the output end of the distance adjustment drive 421, and the other end is matched with the bidirectional adjusting member 423, the bidirectional adjusting member 423 comprises a bidirectional support base 4231, a bidirectional screw rod 4232 and a screw nut 4233, the bidirectional support base 4231 is installed on the bottom wall and the top wall of the first coating chamber module 31 and the second coating chamber module 33, the two ends of the bidirectional screw rod 4232 are rotatably arranged on the bidirectional support base 4231, and the bidirectional screw rod 4232 is provided with two threads with opposite rotation directions, and each thread is matched with a screw nut 4233, and the two screw nuts 4233 are respectively connected with the two support brackets 4111 or the two positioning brackets 4131.

[0065] It can be understood that, in the actual coating process, the distance between the substrate carrier 7 and the first heating element 101, the second heating element 103, the first spray pipe 102 and the second spray pipe 104 can affect the coating effect, and in the carrier plate conversion chamber module 32, the greater the distance between the two substrate carriers 7, the more convenient the adjustment is, in the embodiment, the plurality of distance adjustment mechanisms 42 and the plurality of sliding mechanisms 43 can adjust the distance between the two substrate carriers 7, so that the distance between the substrate carrier 7 and the first heating element 101, the second heating element 103, the first spray pipe 102 and the second spray pipe 104 can also be adjusted, which on the one hand ensures the coating effect, and on the other hand facilitates the adjustment of the substrate carrier 7. In the working process of the distance adjustment mechanism 42, the distance adjustment drive 421 drives the bidirectional screw rod 4232 to rotate, so that the two screw nuts 4233 move towards each other or away from each other, thereby driving the two substrate carriers 7 to move. The sliding mechanism 43 can limit the movement direction of the substrate carrier 7 to avoid the skewing of the substrate carrier 7.

[0066] Reference Figure 1 As shown in the figure, the coating equipment further comprises a sub-plate conveying line 8 arranged in parallel with the carrier conveying line 1 and used for conveying a base sub-plate 9 provided with a clamping point assembly 91 used for clamping a base; the base feeding system 2 comprises a feeding guide piece mechanism 21 used for taking out the base in the flower basket, a base loading mechanism 22 used for placing the base on the base sub-plate 9 on the sub-plate conveying line 8, a clamping point locking mechanism 23 arranged above the sub-plate conveying line 8 and used for driving the clamping point assembly 91 to a clamping position for clamping the base, and a sub-plate loading mechanism 24 used for loading the base sub-plate 9 loaded with the base onto the base carrier 7. It can be understood that generally, the size of the base carrier 7 is large, and if the base is taken out from the flower basket by the feeding guide piece mechanism 21 and then directly loaded onto the base carrier 7 by the base loading mechanism 22, the base loading mechanism 22 needs to load a large number of bases at one time to ensure the efficiency, which leads to a large size of the base loading mechanism 22, thereby increasing the floor area of the base feeding system 2. In the embodiment, the sub-plate conveying line 8 is arranged, and the size of the base sub-plate 9 is relatively small. The base loading mechanism 22 loads the base onto the base sub-plate 9, and the base sub-plate 9 loaded with the base is conveyed to the sub-plate loading mechanism 24 by the sub-plate conveying line 8, and then loaded into the base carrier 7 by the sub-plate loading mechanism 24. In this way, the size of each device is reduced under the condition of ensuring the efficiency of loading the base, and the structure of the feeding guide piece system is reduced. The feeding guide piece mechanism 21 can select a base inserting piece machine in the prior art according to actual needs, and no specific description is made herein.

[0067] Reference Figure 1 As shown in the figure, the base feeding system 2 comprises a feeding guide piece mechanism 21 used for taking out the base in the flower basket, a base loading mechanism 22 used for placing the base on the base sub-plate 9 on the sub-plate conveying line 8, a clamping point locking mechanism 23 arranged above the sub-plate conveying line 8 and used for driving the clamping point assembly 91 to a clamping position for clamping the base, and a sub-plate loading mechanism 24 used for loading the base sub-plate 9 loaded with the base onto the base carrier 7. It can be understood that generally, the size of the base carrier 7 is large, and if the base is taken out from the flower basket by the feeding guide piece mechanism 21 and then directly loaded onto the base carrier 7 by the base loading mechanism 22, the base loading mechanism 22 needs to load a large number of bases at one time to ensure the efficiency, which leads to a large size of the base loading mechanism 22, thereby increasing the floor area of the base feeding system 2. In the embodiment, the sub-plate conveying line 8 is arranged, and the size of the base sub-plate 9 is relatively small. The base loading mechanism 22 loads the base onto the base sub-plate 9, and the base sub-plate 9 loaded with the base is conveyed to the sub-plate loading mechanism 24 by the sub-plate conveying line 8, and then loaded into the base carrier 7 by the sub-plate loading mechanism 24. In this way, the size of each device is reduced under the condition of ensuring the efficiency of loading the base, and the structure of the feeding guide piece system is reduced. The feeding guide piece mechanism 21 can select a base inserting piece machine in the prior art according to actual needs, and no specific description is made herein.

[0068] It can be understood that the size of the substrate carrier 7 is usually large, and if the substrate in the substrate carrier 7 is directly unloaded by the substrate unloading mechanism 52, the substrate unloading mechanism 52 needs to unload a large number of substrates at a time to ensure efficiency, which will result in a large size of the substrate unloading mechanism 52, thereby increasing the floor area of the substrate unloading system 5. In the embodiment, after the substrate sub-plate 9 on the substrate carrier 7 is detached by the substrate sub-plate unloading mechanism 54 and transported to the substrate sub-plate conveying line 8, the substrate sub-plate 9 is released by the clamping point releasing mechanism 53, so that the substrate can be separated from the substrate sub-plate 9. The substrate unloading mechanism 52 detaches the substrate on the substrate sub-plate 9 and transports it to the substrate unloading guide piece mechanism 51. In this way, the volume of each device is reduced under the condition of ensuring the efficiency of unloading the substrate, and the structure of the substrate unloading guide piece mechanism 51 is reduced. The substrate unloading guide piece mechanism 51 can select a substrate unloading machine in the prior art according to actual needs, and no specific description is made to the substrate unloading guide piece mechanism 51.

[0069] Reference Figure 3 As shown in the figure, the substrate sub-plate loading mechanism 24 and the substrate sub-plate unloading mechanism 54 have the same structure and both include a substrate sub-plate conveying robot 241 and a substrate sub-plate suction assembly 242. The substrate sub-plate suction assembly 242 is arranged at the movable end of the substrate sub-plate conveying robot 241 and includes a plurality of substrate sub-plate suction heads to suck the substrate sub-plate 9. Therefore, the substrate sub-plate loading mechanism 24 and the substrate sub-plate unloading mechanism 54 can purchase the same equipment, and different automatic control programs can be set to realize the function of interchangeable use of the substrate sub-plate loading mechanism 24 and the substrate sub-plate unloading mechanism 54, thereby reducing the cost of the entire film coating equipment.

[0070] Preferably, the substrate loading mechanism 22 and the substrate unloading mechanism 52 have the same structure and both include a substrate suction assembly, a horizontal movement assembly and a lifting assembly. The substrate suction assembly includes a plurality of substrate suction heads to suck the substrate. The lifting assembly is connected with the substrate suction assembly to drive the substrate suction assembly to lift. The horizontal movement assembly is connected with the lifting assembly to drive the lifting assembly and the substrate suction assembly to reciprocate between the substrate feeding guide piece mechanism 21 and the substrate sub-plate conveying line 8 or between the substrate unloading guide piece mechanism 51 and the substrate sub-plate conveying line 8. Therefore, the substrate loading mechanism 22 and the substrate unloading mechanism 52 can purchase the same equipment, and different automatic control programs can be set to realize the function of interchangeable use of the substrate loading mechanism 22 and the substrate unloading mechanism 52, thereby reducing the cost of the entire film coating equipment. The specific structure of the horizontal movement assembly and the lifting assembly can be selected according to actual needs, or a mechanical arm can be used instead of the horizontal movement assembly and the lifting assembly, that is, the specific structure of the horizontal movement assembly and the lifting assembly is the prior art, which can be purchased according to actual needs.

[0071] Reference Figure 15-16As shown, the base sub-plate 9 is provided with a plurality of base accommodation positions, and there are a plurality of card point assemblies 91, which are arranged one-to-one corresponding to the plurality of base accommodation positions. Each card point assembly 91 includes four card point members 911 located at the corners of the base accommodation positions. The card point members 911 are rotatably arranged on the base sub-plate 9. The card point members 911 are provided with a stopper 9111 for locking the base and a driving part 9112 that cooperates with the card point locking mechanism 23 or the card point release mechanism 53. Figure 2 As described above, the card point locking mechanism 23 and the card point releasing mechanism 53 have the same structure and both include a card point mounting frame 231, a card point lifting drive member 232, an adjustment mounting seat 233, an adjustment rod 234, a cam follower 235 and a card point rotation drive member 236. The card point lifting drive member 232 is mounted on the card point mounting frame 231, and the adjustment mounting seat 233 is connected to the power output end of the card point lifting drive member 232. The adjustment mounting seat 233 is provided with multiple groups of adjustment sleeves, and the multiple groups of adjustment sleeves are arranged at intervals. There are multiple adjustment rods 234, and the multiple adjustment rods 234 are arranged in a one-to-one correspondence with the multiple groups of adjustment sleeves, and are inserted into the adjustment sleeves. A card point rotation drive member 236 is provided at one end of each adjustment rod 234, and multiple cam followers 235 are provided on each adjustment rod 234. The multiple cam followers 235 are arranged in a one-to-one correspondence with the multiple driving parts 9112.

[0072] It is understood that during the actual operation process, after the substrate is installed on the substrate sub-plate 9, the sub-plate transport line 8 transports the substrate sub-plate 9 to the bottom of the card point locking mechanism 23. The card point lifting driver 232 drives the adjustment mounting seat 233 to descend, causing the cam follower 235 to cooperate with the driving portion 9112. The card point rotation driver 236 drives the adjustment rod 234 to rotate. The cam follower 235 can then drive the card point member 911 to rotate, causing the stopper 9111 to stop against the substrate, thereby locking the substrate. The working principle of the card point release mechanism 53 is exactly the same as that of the card point locking mechanism 23. The difference is that the card point rotation driver 236 drives the adjustment rod 234 to rotate. The cam follower 235 can then drive the card point member 911 to rotate, causing the stopper 9111 to disengage from the substrate, thereby releasing the substrate. In this way, multiple substrates on the substrate sub-plate 9 can be locked to the substrate sub-plate 9 at the same time, improving work efficiency.

[0073] refer to Figure 12-14As shown, the transfer system 6 comprises a transfer base 61, a horizontal moving mechanism 62, a rotating mechanism 63 and a carrier transfer transport mechanism 64. The horizontal moving mechanism 62 comprises a horizontal moving driving assembly 621 and a horizontal moving support 622. The horizontal moving driving assembly 621 is arranged on the transfer base 61 and is in driving cooperation with the horizontal moving support 622 to drive the horizontal moving support 622 to move in a direction perpendicular to the transport direction of the carrier transport line 1. The rotating mechanism 63 is arranged on the horizontal moving support 622. The carrier transfer transport mechanism 64 is arranged at the output end of the rotating mechanism 63 and is used to drive the substrate carrier 7 to move in the transport direction of the carrier transport line 1. It can be understood that, in actual work, the horizontal moving mechanism 62 and the rotating mechanism 63 can transport the substrate carrier 7 to a designated transfer position. The carrier transfer transport mechanism 64 can receive the substrate carrier 7 from the carrier transport line 1 and transport it to the coating transport line 4, or transport the substrate carrier 7 on the coating transport line 4 to the carrier transport line 1, so as to realize the transfer of the substrate carrier 7 between the carrier transport line 1 and the substrate coating cavity system 3.

[0074] Reference Figure 14 As shown, the carrier transfer transport mechanism 64 comprises a carrier transfer frame 641, a transfer support assembly 642, a transfer positioning assembly 643 and a transfer power assembly 644. The structures of the transfer support assembly 642, the transfer positioning assembly 643 and the transfer power assembly 644 are the same as those of the transport support assembly 411, the transport positioning assembly 413 and the transfer power assembly 644 respectively, and will not be described here.

[0075] The working process of the coating equipment of the embodiment is as follows:

[0076] In the first step, the substrate is taken out of the basket by the loading guide piece mechanism 21 and is carried to a position to be loaded. The substrate is sucked up by the substrate loading mechanism 22 and is placed on the substrate sub-plate 9.

[0077] In the second step, the substrate sub-plate 9 is conveyed to the next station by the sub-plate transport line 8. The clamping point assembly 91 on the substrate sub-plate 9 is switched from the release position to the clamping position by the clamping point locking mechanism 23. The clamping point assembly 91 limits the substrate on the substrate sub-plate 9.

[0078] In the third step, the substrate sub-plate 9 is conveyed to the next station by the sub-plate transport line 8. The substrate sub-plate 9 is taken out of the sub-plate transport line 8 by the sub-plate loading mechanism 24 and is hung on the substrate carrier 7 transported by the carrier transport line 1.

[0079] In the fourth step, the substrate carrier 7 is driven to the next station by the carrier transport line 1 and enters the transfer system 6. The transfer system 6 receives the substrate carrier 7 at the docking position by the carrier transfer transport mechanism 64, divides the substrate carrier 7 into two according to the left and right, and then conveys the substrate carrier 7 to the docking position of the coating transport line 4 by the horizontal moving mechanism 62 of the transfer system 6.

[0080] The fifth step is that the two substrate carriers 7 are transported by the coating transport line 4 to the loading preheating chamber 311, the preheating heater is powered on to work, and the heat radiation of the preheating heater preheats the substrate on the substrate carrier 7 before the coating process;

[0081] The sixth step is that the two substrate carriers 7 are transported by the coating transport line 4 to a first coating working chamber 312, the first heating element 101 works, and the special gas released by the first spray pipe 102 is decomposed by the hot wire to coat the intrinsic amorphous silicon film on the first surface of the substrate;

[0082] The seventh step is that the two substrate carriers 7 are transported by the coating transport line 4 to another first coating working chamber 312, the first heating element 101 works, and the special gas released by the first spray pipe 102 is decomposed by the hot wire to coat the n-doped silicon-based film on the first surface of the substrate;

[0083] The eighth step is that the two substrate carriers 7 are transported by the coating transport line 4 to the carrier plate conversion chamber module 32, the distance between the two substrate carriers 7 is changed to the maximum by the distance changing mechanism 42, and then the two substrate carriers 7 are adjusted by the conversion mechanism in the carrier plate conversion chamber module 32. After the adjustment is completed, the two substrate carriers 7 are replaced in position, and the surfaces of the substrates on the substrate carriers 7 that have completed the coating are all directed outward of the chamber, and the uncoated surfaces are all directed to the hot wire side, so as to realize the subsequent coating.

[0084] The ninth step is that the two substrate carriers 7 are transported by the coating transport line 4 to a second coating working chamber 331, the second heating element 103 works, and the special gas released by the second spray pipe 104 is decomposed by the hot wire to coat the intrinsic amorphous silicon film on the second surface of the substrate;

[0085] The tenth step is that the two substrate carriers 7 are transported by the coating transport line 4 to another second coating working chamber 331, the second heating element 103 works, and the special gas released by the second spray pipe 104 is decomposed by the hot wire to coat the p-doped silicon-based film on the second surface of the substrate;

[0086] The eleventh step is that the two substrate carriers 7 are transported by the coating transport line 4 to the unloading heat dissipation chamber 332, and the normal temperature gas is provided in the unloading heat dissipation chamber 332 to dissipate heat and cool down;

[0087] The twelfth step is that the two substrate carriers 7 are transported by the coating transport line 4 to the transfer system 6, the substrate carriers 7 are received by the carrier transfer transport mechanism 64 of the transfer system 6 at the docking position, and then are transmitted by the transverse movement mechanism 62 of the transfer system 6 to the docking position of the carrier transport line 1;

[0088] The thirteenth step is that the substrate carrier 7 is driven by the carrier transport line 1 to the next station, the substrate sub-plate 9 is taken out from the substrate carrier 7 by the substrate sub-plate unloading mechanism 54, and is placed on the unloading position on the sub-plate transport line 8.

[0089] The fourteenth step is that the base substrate 9 is driven to the next station by the substrate transport line 8, and the clamping point assembly 91 on the base substrate 9 is switched from the clamping position to the release position by the clamping point release mechanism 53, so as to facilitate subsequent picking of the substrate;

[0090] The fifteenth step is that the base substrate 9 is driven to the next station by the substrate transport line 8, and the base substrate is sucked up by the base substrate unloading mechanism 52 and placed in the unloading position, the substrate is taken out from the unloading position by the unloading guide piece mechanism 51 and carried to the flower basket, and the collection of the plated film is completed.

[0091] The sixteenth step is that the base substrate 9 is driven to the next station by the substrate transport line 8, and the first step is continued to be performed, so as to realize the whole circulation.

[0092] In the description of the present specification, the description of the terms "some embodiments", "other embodiments", and the like means that the specific features, structures, materials or characteristics described in connection with the embodiments or examples are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0093] The above is only the preferred embodiment of the present application, and for those skilled in the art, the specific implementation and application range can be changed according to the idea of the present application, and the content of the present specification should not be understood as the limitation of the present application.

Claims

1. Coating equipment, characterized in that, include: A carrier transport line, the carrier transport line being used to transport substrate carriers; A loading and unloading system, connected to the carrier transport line and used to realize the loading and unloading of substrates on the substrate carrier; A substrate coating chamber system, the substrate coating chamber system being connected to the carrier transport line and being used to achieve double-sided coating of the substrate; A transfer system, the transfer system being connected to the substrate coating chamber system, the transfer system being used to transfer the substrate carrier between the carrier transport line and the substrate coating chamber system; The loading and unloading system includes a substrate loading system and a substrate unloading system; the substrate loading system is arranged in parallel with the carrier transport line and is used to load the substrate onto the substrate carrier; the substrate unloading system is arranged in parallel with the carrier transport line and is arranged in line with the substrate loading system, and the substrate unloading system removes the substrate from the substrate carrier after the coating is completed; There are two transfer systems, one of which is used to receive the substrate carrier output by the substrate loading system, and the other transfer system is used to transport the substrate carrier to the substrate unloading system; The loading and unloading system, the carrier transport line, the transfer system and the substrate coating cavity system can form an annular closed loop arrangement.

2. The coating equipment according to claim 1, characterized in that: The substrate coating chamber system includes a first coating chamber module, a carrier conversion chamber module and a second coating chamber module connected in sequence. The first coating chamber module is used to coat the first surface of the substrate, the carrier conversion chamber module is used to flip the substrate carrier, and the second coating chamber module is used to coat the second surface of the substrate.

3. The coating equipment according to claim 2, characterized in that: The first coating chamber module includes a loading and preheating chamber and at least one first coating working chamber arranged in sequence. A first valve chamber is provided between the loading and preheating chamber and the first coating working chamber and between two adjacent first coating working chambers.

4. The coating equipment according to claim 2, characterized in that: The second coating chamber module includes at least one second coating working chamber and a discharging and heat dissipation chamber arranged in sequence. A second valve chamber is provided between the discharging and heat dissipation chamber and the second coating working chamber and between two adjacent second coating working chambers.

5. The coating equipment according to claim 2, characterized in that: The coating equipment further includes a coating transport line for transporting the substrate carrier so that the substrate carrier passes through the first coating chamber module, the carrier conversion chamber module and the second coating chamber module in sequence.

6. The coating equipment according to claim 5, characterized in that: The substrate carrier includes a carrier frame and a substrate sub-plate installed on the carrier frame, and the substrate sub-plate is used to load multiple substrates; each of the coating transport lines includes multiple coating transport mechanisms, and the multiple coating transport mechanisms are respectively arranged in the first coating chamber module, the carrier conversion chamber module, and the second coating chamber module; each of the coating transport mechanisms includes a transport support component, a transport power component and a transport positioning component, the transport support component is used to support the carrier frame, the transport power component is used to drive the carrier frame to move along the transport direction of the coating transport line, and the transport positioning component is used to guide the carrier frame to slide.

7. The coating equipment according to claim 6, characterized in that: Each of the coating transport lines includes multiple distance-changing mechanisms and multiple sliding mechanisms. Each of the coating transport mechanisms is arranged corresponding to the distance-changing mechanism and the sliding mechanism. The distance-changing mechanism is used to drive the coating transport mechanism to move in a direction perpendicular to the transport direction of the substrate carrier.

8. The coating equipment according to claim 7, characterized in that: The coating equipment also includes a sub-plate transport line, which is arranged in parallel with the carrier transport line and is used to transport the substrate sub-plate. The substrate sub-plate is used to load the substrate and can be loaded onto the substrate carrier. The substrate sub-plate is provided with a card point component for clamping the substrate.

9. The coating equipment according to claim 8, characterized in that: The substrate loading system includes a loading guide mechanism, a substrate loading mechanism, a card point locking mechanism and a sub-plate loading mechanism, and the substrate unloading system includes a unloading guide mechanism, a substrate unloading mechanism, a card point releasing mechanism and a sub-plate unloading mechanism.

10. The coating equipment according to claim 9, characterized in that: The sub-board loading mechanism and the sub-board unloading mechanism have the same structure and both include a sub-board handling robot and a sub-board adsorption component. The sub-board adsorption component is arranged at the movable end of the sub-board handling robot. The sub-board adsorption component includes multiple sub-board adsorption heads to adsorb the base sub-board.

11. The coating equipment according to claim 9, characterized in that: The substrate loading mechanism and the substrate unloading mechanism have the same structure and both include a substrate adsorption assembly, a transverse movement assembly and a lifting assembly. The substrate adsorption assembly includes multiple substrate adsorption heads to adsorb the substrate. The lifting assembly is connected to the substrate adsorption assembly to drive the substrate adsorption assembly to rise and fall. The transverse movement assembly is connected to the lifting assembly to drive the lifting assembly and the substrate adsorption assembly to reciprocate between the loading guide mechanism and the sub-plate transport line or between the unloading guide mechanism and the sub-plate transport line.

12. The coating equipment according to claim 9, characterized in that: The base sub-plate is provided with a plurality of base accommodating positions, and the card point components are multiple and are arranged in one-to-one correspondence with the plurality of base accommodating positions. Each of the card point components includes four card point parts located at the corners of the base accommodating positions. The card point parts are rotatably provided on the base sub-plate, and the card point parts are provided with a stop part for locking the base and a driving part cooperating with the card point locking mechanism or the card point releasing mechanism.

13. The coating device according to any one of claims 1 to 12, characterized in that: The transfer system includes: Transfer base: A transverse movement mechanism, the transverse movement mechanism comprising a transverse movement drive assembly and a transverse movement bracket, the transverse movement drive assembly being disposed on the transfer base and engaging with the transverse movement bracket to drive the transverse movement bracket to move in a direction perpendicular to the transport direction of the carrier transport line; A rotating mechanism, the rotating mechanism being arranged on the transverse moving bracket; A carrier transfer and transportation mechanism is provided at the output end of the rotating mechanism, and is used to drive the substrate carrier to move along the transportation direction of the carrier transportation line.

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