A double cylinder furnace tube apparatus with good air tightness

Abstract

The application discloses a double-cylinder furnace tube equipment with good air tightness, and relates to the technical field of furnace tubes, which comprises a shell, one end of the shell is fixedly connected with a base, one end of the base is fixedly connected with a support column, the inside of the base is fixedly connected with a pressure plate, the bottom of the pressure plate is fixedly connected with an elastic plate, the inside of the base is provided with a groove, and the middle of the groove is fixedly connected with a buffer spring. The heat insulation layer, the buckle, the fixing block, the adsorption layer, the adsorption element, the separation layer and the separation hole are matched, the separation layer is provided with the separation hole in the middle, the granular dust can be adsorbed to the adsorption element in the adsorption layer, the problem that the furnace tube equipment is easy to enter the granular dust during work, the furnace tube equipment is blocked and the efficiency is reduced, and the service life of the furnace tube equipment is affected is solved, and the effect that the granular dust in the furnace tube can be adsorbed is achieved.

Description

Technical Field

[0001] This invention relates to a dual-cylinder furnace tube device with good airtightness, and to the field of furnace tube technology, specifically to a dual-cylinder furnace tube device with good airtightness. Background Technology

[0002] Diffusion is the most important doping process in semiconductor chip manufacturing. It involves diffusing elements like phosphorus and boron into the wafer at high temperatures to alter and control the type, concentration, and distribution of impurities within the semiconductor, thereby establishing different electrical characteristic regions. Currently, most diffusion processes are performed in batches, simultaneously placing hundreds of wafers from multiple batches into a diffusion furnace for diffusion treatment, which greatly improves production efficiency. However, a potential risk is that if equipment malfunctions or the process abnormalities occur, the number of affected wafers increases exponentially. Therefore, the management of the furnace equipment must be extremely strict to eliminate potential risks that could lead to process defects. Existing furnace equipment typically uses a single cylinder, resulting in air leakage when the furnace door closes. Converting to a dual-cylinder system improves the airtightness of the furnace door when closed. The following problems exist with the existing technology:

[0003] 1. Existing furnace tube equipment generally uses a single cylinder, which can easily cause air leakage when the furnace door is closed, affecting the sealing of the furnace tube equipment and leading to reduced efficiency.

[0004] 2. Existing furnace tube equipment is prone to fine dust particles entering its interior during operation, which can easily cause blockages, reduce efficiency, and affect the service life of the furnace tube equipment.

[0005] 3. When existing furnace tube equipment is placed vertically or horizontally on the ground, the vibration generated during the operation of the furnace tube equipment can easily cause the furnace tube equipment to shift or tilt and collapse, affecting the safety of the surrounding environment. Summary of the Invention

[0006] This invention provides a dual-cylinder furnace tube device with good airtightness to solve the problems existing in the background art.

[0007] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows:

[0008] A dual-cylinder furnace tube device with good airtightness includes a shell, a base is fixedly connected to one end of the shell, a bracket is fixedly connected to one side of the shell, a nut is rotatably connected to the outside of the bracket, a furnace door is fixedly connected to the other end of the shell, an air inlet pipe is fixedly connected to the outside of the shell, an air outlet pipe is fixedly connected to the outside of the shell, and a valve is movably connected to the top of the air inlet pipe.

[0009] A further improvement of the technical solution of the present invention is that: a threaded rod is rotatably connected to the top of the valve, a rotary valve is rotatably connected to the top of the threaded rod, an air cushion block is fixedly connected to the bottom of the valve, and a sealing sleeve is fixedly connected to one side of the valve.

[0010] Using the above technical solution, the rotary valve drives the threaded rod to rotate, thereby causing the air cushion block at the bottom of the valve and the sealing sleeve on one side to press down and block the air inlet and outlet pipes, thus achieving the effect of controlling the rate of air inlet and outlet.

[0011] A further improvement of the technical solution of the present invention is that: a cylinder is fixedly connected inside the shell, and a furnace tube is fixedly connected to one end of the cylinder.

[0012] The above technical solution uses two cylinders inside the shell, which provides two parallel force points for the furnace door mechanism during the pushing process. Compared with a single cylinder, this provides an additional force point, making the furnace door close more reliably, increasing the overall airtightness of the furnace tube, improving the reliability of the furnace tube in the process, reducing the production of defective products, and increasing the overall yield. At the same time, the furnace tube at one end of the cylinder can work simultaneously.

[0013] A further improvement of the technical solution of the present invention is that: a magnet is fixedly connected to one end of the cylinder, the magnet is arc-shaped, an iron block is fixedly connected to one end of the furnace tube, an elastic connecting rod is fixedly connected to one side of the cylinder, and a shock-absorbing spring is fixedly connected inside the elastic connecting rod.

[0014] By adopting the above technical solution, the magnet and iron block can be tightly attached together through magnetic attraction, which enhances the sealing performance. The elastic connecting rod and shock-absorbing spring on one side of the cylinder ensure that the vibration generated during operation is reduced when the two cylinders are connected, thus enhancing practicality.

[0015] A further improvement of the technical solution of the present invention is that: a heat insulation layer is fixedly connected to the inner wall of the furnace tube, an adsorption layer is fixedly connected to one side of the heat insulation layer, an adsorption element is provided inside the adsorption layer, a fixing block is fixedly connected to one end of the adsorption layer, a buckle is fixedly connected to one end of the heat insulation layer, a separation layer is fixedly connected to one side of the adsorption layer, and a separation hole is provided in the middle of the separation layer.

[0016] Using the above technical solution, the separation layer in this solution can adsorb particulate dust onto the adsorption element in the adsorption layer through the separation hole opened in the middle. At the same time, the fixing block at one end of the adsorption layer can be rotated and locked onto the buckle at one end of the insulation layer. The adsorption layer can be pulled out to achieve the cleaning effect. Meanwhile, the insulation layer blocks the high temperature inside the furnace tube and avoids burns from external contact.

[0017] A further improvement of the technical solution of the present invention is that: a rotating rod is rotatably connected to one side of the nut, and a suction cup is fixedly connected to the bottom of the bracket, the bottom of the suction cup being concave arc-shaped.

[0018] Using the above technical solution, the nut rotates to drive the rotating rod to rotate and lock into the housing. The bottom suction cup, which is concave and arc-shaped, can be pressed against the ground to squeeze out the air in the concave part, thereby compressing the air and achieving a firm adhesion to the ground.

[0019] A further improvement of the technical solution of the present invention is that: a support rod is snapped onto one side of the bracket, a snap-fit ​​pattern is fixedly connected to the outside of the support rod, a snap-fit ​​groove is opened on one side of the bracket, and a groove is opened on the outside of the snap-fit ​​groove.

[0020] Using the above technical solution, the support rod on one side of the bracket can be inserted into the slots and grooves inside the bracket through the external grooves of the support rod, so that the furnace tube equipment can be placed horizontally and fixed firmly.

[0021] A further improvement of the technical solution of the present invention is that: a support column is fixedly connected to one end of the base, a pressure plate is fixedly connected inside the base, an elastic plate is fixedly connected to the bottom of the pressure plate, a groove is opened inside the base, and a buffer spring is fixedly connected to the middle of the groove.

[0022] By adopting the above technical solution, the support column at one end of the base can fix the furnace tube equipment when it is placed vertically. The pressure plate inside the base can rebound and recover its original state through the elastic plate at the bottom and the buffer spring in the middle of the groove. This can provide the furnace tube equipment with shock absorption and fixation when it is placed vertically.

[0023] Due to the adoption of the above technical solution, the technical progress achieved by this invention compared to the prior art is as follows:

[0024] 1. This invention provides a dual-cylinder furnace tube device with good airtightness. It employs a combination of cylinders, furnace tubes, magnets, iron blocks, elastic connecting rods, and shock-absorbing springs. Two cylinders are installed inside the casing, providing two parallel force points on the furnace door during operation. Compared to a single-cylinder device, this additional force point makes the door closure more reliable, increases the overall airtightness of the furnace tube, improves the reliability of the furnace tube in the process, reduces defective products, and increases the overall yield. Simultaneously, the furnace tube at one end of each cylinder can operate. The magnet and iron block, through magnetic attraction, can be tightly adhered together, enhancing the seal. The elastic connecting rod and shock-absorbing spring on one side of the cylinders ensure that vibrations are reduced during operation when the two cylinders are connected, enhancing practicality. This invention solves the problem of existing furnace tube devices, which typically use a single cylinder, leading to air leakage when the furnace door closes, affecting the seal and reducing efficiency. This device achieves a significantly better sealing effect.

[0025] 2. This invention provides a dual-cylinder furnace tube device with good airtightness. It adopts a combination of a heat insulation layer, a buckle, a fixing block, an adsorption layer, an adsorption element, a separation layer, and a separation hole. The separation layer, through the separation hole in the middle, can adsorb particulate dust onto the adsorption element in the adsorption layer. At the same time, the fixing block at one end of the adsorption layer can be rotated and locked onto the buckle at one end of the heat insulation layer. The adsorption layer can be pulled out to achieve the cleaning effect. Meanwhile, the heat insulation layer blocks the high temperature inside the furnace tube, avoiding burns from external contact. This solves the problem that fine particulate dust easily enters the furnace tube during operation, which can easily cause blockage, reduce efficiency, and affect the service life of the furnace tube. This device can effectively adsorb particulate dust inside the furnace tube.

[0026] 3. This invention provides a dual-cylinder furnace tube device with good airtightness. It employs a rotating rod, suction cup, support rod, locking grooves, slots, grooves, support column, pressure plate, elastic plate, groove, and buffer spring. The nut rotates, causing the rotating rod to rotate and engage with the housing. The concave arc-shaped suction cup at the bottom can press against the ground, squeezing out the air in the recessed area to compress the air and thus firmly adhere to the ground. The support rod, through its external locking grooves, engages with the slots and grooves inside the support frame, ensuring the furnace tube device can be horizontally and securely fixed. The support column at one end of the base can fix the furnace tube equipment when it is placed vertically. The pressure plate inside the base, through the elastic plate at the bottom and the buffer spring in the middle of the groove, has the property of rebounding and restoring itself under force. This can provide the furnace tube equipment with a shock-absorbing and fixing effect when it is placed vertically. This solves the problem that the vibration generated by the furnace tube equipment during operation when it is placed vertically or horizontally on the ground can easily cause the furnace tube equipment to shift or tilt and collapse, affecting the safety of the surrounding environment. This equipment can ensure that the furnace tube equipment has a shock-absorbing and stable effect whether it is placed vertically or horizontally on the ground. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of the present invention;

[0028] Figure 2 This is a cross-sectional structural diagram of the present invention;

[0029] Figure 3 This is a schematic diagram of the cross-sectional structure of the cylinder of the present invention;

[0030] Figure 4 This is a schematic diagram of the cross-sectional structure of the furnace tube of the present invention;

[0031] Figure 5 This is a schematic diagram of the cross-sectional structure of the bracket of the present invention;

[0032] Figure 6 This is a schematic diagram of the cross-sectional structure of the base of the present invention.

[0033] In the diagram: 1. Shell; 2. Base; 3. Bracket; 4. Nut; 5. Furnace door; 6. Inlet pipe; 7. Outlet pipe; 8. Valve; 9. Threaded rod; 10. Rotary valve; 11. Air cushion block; 12. Sealing sleeve; 13. Cylinder; 14. Furnace tube; 15. Magnet; 16. Iron block; 17. Elastic connecting rod; 18. Shock-absorbing spring; 19. Heat insulation layer; 20. Buckle; 201. Fixing block; 21. Adsorption layer; 22. Adsorption element; 23. Separation layer; 24. Separation hole; 25. Rotating rod; 26. Suction cup; 27. Support rod; 28. Snap-fit; 29. ​​Snap-fit ​​groove; 30. Groove; 31. Support column; 32. Pressure plate; 33. Elastic plate; 34. Groove; 35. Buffer spring. Detailed Implementation

[0034] The present invention will be further described in detail below with reference to embodiments:

[0035] Example 1

[0036] like Figure 1-4 As shown, the present invention provides a dual-cylinder furnace tube device with good airtightness, including a housing 1, a base 2 fixedly connected to one end of the housing 1, a bracket 3 fixedly connected to one side of the housing 1, a nut 4 rotatably connected to the outside of the bracket 3, a furnace door 5 fixedly connected to the other end of the housing 1, an air inlet pipe 6 fixedly connected to the outside of the housing 1, an air outlet pipe 7 fixedly connected to the outside of the housing 1, a valve 8 movably connected to the top of the air inlet pipe 6, a threaded rod 9 rotatably connected to the top of the valve 8, a rotary valve 10 rotatably connected to the top of the threaded rod 9, an air cushion block 11 fixedly connected to the bottom of the valve 8, and a sealing sleeve 12 fixedly connected to one side of the valve 8.

[0037] In this embodiment, two cylinders 13 are provided inside the housing 1. During the pushing process, the furnace door 5 has two parallel force points, which is one more force point than a single cylinder 13. This makes the furnace door 5 close more reliably, increases the overall airtightness of the furnace tube 14, improves the reliability of the furnace tube 14 in the process, reduces the output of defective products, and improves the overall yield. At the same time, the furnace tube 14 at one end of the cylinder 13 can work simultaneously. The rotating valve 10 drives the threaded rod 9 to rotate, thereby driving the air cushion block 11 at the bottom of the valve 8 and the sealing sleeve 12 on one side to press down and block the air inlet pipe 6 and the air outlet pipe 7, which can achieve the effect of controlling the air inlet and outlet rates.

[0038] Example 2

[0039] like Figure 1-4 As shown, based on Embodiment 1, the present invention provides a technical solution: Preferably, a cylinder 13 is fixedly connected inside the housing 1, a furnace tube 14 is fixedly connected to one end of the cylinder 13, a magnet 15 is fixedly connected to one end of the cylinder 13, the magnet 15 is arc-shaped, an iron block 16 is fixedly connected to one end of the furnace tube 14, an elastic connecting rod 17 is fixedly connected to one side of the cylinder 13, and a shock-absorbing spring 18 is fixedly connected inside the elastic connecting rod 17.

[0040] In this embodiment, the magnet 15 and the iron block 16 can be tightly attached together by magnetic attraction, which enhances the sealing performance. The elastic connecting rod 17 and the shock-absorbing spring 18 on one side of the cylinder 13 ensure that the vibration generated during operation is reduced when the two cylinders 13 are connected, which enhances practicality. This solves the problem that the existing furnace tube 14 equipment generally uses a single cylinder 13, which causes air leakage when the furnace door 5 is closed, affecting the sealing performance of the furnace tube 14 equipment and leading to reduced efficiency. This device achieves a better sealing performance.

[0041] Example 3

[0042] like Figure 1-4 As shown, based on Embodiment 1, the present invention provides a technical solution: Preferably, a heat insulation layer 19 is fixedly connected to the inner wall of the furnace tube 14, an adsorption layer 21 is fixedly connected to one side of the heat insulation layer 19, an adsorption element 22 is provided inside the adsorption layer 21, a fixing block 201 is fixedly connected to one end of the adsorption layer 21, a buckle 20 is fixedly connected to one end of the heat insulation layer 19, a separation layer 23 is fixedly connected to one side of the adsorption layer 21, and a separation hole 24 is provided in the middle of the separation layer 23.

[0043] In this embodiment, the separation layer 23, through the separation hole 24 in the middle, can adsorb particulate dust onto the adsorption element 22 in the adsorption layer 21. At the same time, the fixing block 201 at one end of the adsorption layer 21 can be rotated and locked onto the buckle 20 at one end of the heat insulation layer 19. The adsorption layer 21 can be pulled out to achieve its cleaning effect. Meanwhile, the heat insulation layer 19 blocks the high temperature inside the furnace tube 14, preventing burns from external contact. This solves the problem that fine particulate dust easily enters the furnace tube 14 during operation, which can easily cause blockage and reduced efficiency of the furnace tube 14, affecting the service life of the furnace tube 14. This device can adsorb particulate dust inside the furnace tube 14.

[0044] Example 4

[0045] like Figure 1-4 As shown, based on Embodiment 1, the present invention provides a technical solution: Preferably, a rotating rod 25 is rotatably connected to one side of the nut 4, a suction cup 26 is fixedly connected to the bottom of the bracket 3, the bottom of the suction cup 26 is concave arc-shaped, a support rod 27 is snapped onto one side of the bracket 3, a groove 28 is fixedly connected to the outside of the support rod 27, a slot 29 is opened on one side of the bracket 3, a groove 30 is opened on the outside of the slot 29, a support column 31 is fixedly connected to one end of the base 2, a pressure plate 32 is fixedly connected to the inside of the base 2, an elastic plate 33 is fixedly connected to the bottom of the pressure plate 32, a groove 34 is opened inside the base 2, and a buffer spring 35 is fixedly connected to the middle of the groove 34.

[0046] In this embodiment, rotating the nut 4 drives the rotating rod 25 to rotate and engage inside the housing 1. The concave arc-shaped suction cup 26 at the bottom can press against the ground to squeeze out the air in the concave part, thereby compressing the air and achieving a firm adhesion to the ground. The support rod 27 can be engaged in the slot 29 and groove 30 inside the bracket 3 through the external groove 28, achieving the effect of horizontally and firmly fixing the furnace tube 14. The pillar 31 at one end of the base 2 can fix the furnace tube 14 when it is vertically placed. The pressure plate 32 inside the base 2 has the property of rebounding and restoring itself under the force of the elastic plate 33 at the bottom and the buffer spring 35 in the middle of the groove 34, which can provide shock absorption and fixation when the furnace tube 14 is vertically placed. This solves the problem that the vibration generated by the furnace tube 14 when it is vertically or horizontally placed on the ground can easily cause the furnace tube 14 to shift or tilt and collapse, affecting the safety of the surrounding environment. This device can ensure that the furnace tube 14 is stable and shock-absorbing whether it is vertically or horizontally placed on the ground.

[0047] The working principle of this airtight double-cylinder furnace tube equipment will be explained in detail below.

[0048] like Figure 1-4As shown, when using this device, the rotating rod 25 can be rotated and inserted into the housing 1 by rotating the nut 4. The concave arc-shaped suction cup 26 at the bottom can be pressed against the ground to squeeze out the air in the concave part, thereby achieving the effect of compressed air and adhering firmly to the ground. The support rod 27 can be inserted into the slot 29 and groove 30 inside the bracket 3 through the external groove 28 of the support rod 27, so that the furnace tube 14 can be placed horizontally and fixed firmly. The pillar 31 at one end of the base 2 can fix the furnace tube 14 when it is placed vertically. The pressure plate 32 inside the base 2 has the property of rebounding and restoring itself under the force of the elastic plate 33 at the bottom and the buffer spring 35 in the middle of the groove 34, so that the furnace tube 14 can be fixed horizontally and firmly. When placed vertically, this device provides shock absorption and stability, solving the problem that existing furnace tube 14 equipment, when placed vertically or horizontally on the ground, is prone to displacement or tilting and collapse due to vibrations during operation, affecting the safety of the surrounding environment. This device ensures the furnace tube 14 equipment provides shock absorption and stability whether placed vertically or horizontally. Furthermore, the internal cylinder 13 of the housing 1 is configured with two cylinders, providing two parallel force points for the furnace door 5 during operation. Compared to a single cylinder 13, this additional force point makes the furnace door 5 close more reliably, increases the overall airtightness of the furnace tube 14, improves the reliability of the furnace tube 14 in the process, reduces the production of defective products, and improves the overall efficiency. The product yield is improved. Simultaneously, the furnace tube 14 at one end of cylinder 13 can operate. Rotating valve 10 drives threaded rod 9 to rotate, thereby causing the air cushion block 11 at the bottom of valve 8 and the sealing sleeve 12 on one side to press down and block the inlet pipe 6 and outlet pipe 7, achieving control over the inlet and outlet rates. Magnet 15 and iron block 16 can be tightly joined together through magnetic attraction, enhancing sealing. The elastic connecting rod 17 and shock-absorbing spring 18 on one side of cylinder 13 ensure that vibrations are reduced when the two cylinders 13 are connected, enhancing practicality. This solves the problem that existing furnace tube 14 equipment typically uses a single cylinder 13, which easily leads to air leakage when the furnace door 5 is closed, affecting the sealing performance of the furnace tube 14 equipment. This addresses the issue of reduced efficiency caused by the previous method. This device achieves better sealing by using a separation layer 23 with a separation hole 24 in the middle to adsorb particulate dust onto the adsorption element 22 in the adsorption layer 21. Simultaneously, a fixing block 201 at one end of the adsorption layer 21 can be rotated and secured to a clip 20 at one end of the insulation layer 19. The adsorption layer 21 can be pulled out to achieve cleaning. Furthermore, the insulation layer 19 blocks the high temperature inside the furnace tube 14, preventing burns from external contact. This solves the problem of fine particulate dust easily entering the furnace tube 14 during operation, causing blockages, reduced efficiency, and affecting its lifespan. This device effectively adsorbs particulate dust from inside the furnace tube 14.

[0049] The present invention has been described in detail above. However, modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, any modifications or improvements that do not depart from the spirit of the present invention are within the scope of protection of the present invention.

Claims

1. A double-cylinder furnace tube device with good airtightness, comprising a shell (1), characterized in that: One end of the housing (1) is fixedly connected to a base (2), one side of the housing (1) is fixedly connected to a bracket (3), the outside of the bracket (3) is rotatably connected to a nut (4), the other end of the housing (1) is fixedly connected to a furnace door (5), the outside of the housing (1) is fixedly connected to an air inlet pipe (6), the outside of the housing (1) is fixedly connected to an air outlet pipe (7), and the top of the air inlet pipe (6) is movably connected to a valve (8). A threaded rod (9) is rotatably connected to the top of the valve (8), a rotary valve (10) is rotatably connected to the top of the threaded rod (9), an air cushion block (11) is fixedly connected to the bottom of the valve (8), and a sealing sleeve (12) is fixedly connected to one side of the valve (8). A cylinder (13) is fixedly connected inside the shell (1), and a furnace tube (14) is fixedly connected to one end of the cylinder (13). A magnet (15) is fixedly connected to one end of the cylinder (13). The magnet (15) is arc-shaped. An iron block (16) is fixedly connected to one end of the furnace tube (14). An elastic connecting rod (17) is fixedly connected to one side of the cylinder (13). A shock-absorbing spring (18) is fixedly connected inside the elastic connecting rod (17). The inner wall of the furnace tube (14) is fixedly connected to a heat insulation layer (19), and an adsorption layer (21) is fixedly connected to one side of the heat insulation layer (19). An adsorption element (22) is provided inside the adsorption layer (21). A fixing block (201) is fixedly connected to one end of the adsorption layer (21). A buckle (20) is fixedly connected to one end of the heat insulation layer (19). A separation layer (23) is fixedly connected to one side of the adsorption layer (21). A separation hole (24) is opened in the middle of the separation layer (23). A rotating rod (25) is rotatably connected to one side of the nut (4), and a suction cup (26) is fixedly connected to the bottom of the bracket (3). The bottom of the suction cup (26) is concave arc-shaped. A support rod (27) is snapped onto one side of the bracket (3), and a snap groove (28) is fixedly connected to the outside of the support rod (27). A slot (29) is opened on one side of the bracket (3), and a groove (30) is opened on the outside of the slot (29). One end of the base (2) is fixedly connected to a support column (31), a pressure plate (32) is fixedly connected inside the base (2), an elastic plate (33) is fixedly connected to the bottom of the pressure plate (32), a groove (34) is opened inside the base (2), and a buffer spring (35) is fixedly connected to the middle of the groove (34).

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