Bionic bristle airflow detection sensor device and airflow detection device

Abstract

The application discloses a bionic scorpion hair airflow detection sensor device and an airflow detection device, and belongs to the technical field of sensors.The airflow detection sensor comprises a bionic scorpion hair stem, a hemispherical cage seam unit and a packaging circuit base.The bionic scorpion hair stem is made through 3D printing, the surface of the bionic scorpion hair stem simulates the flat asymmetry and rotating geometric shape of a scorpion hair, can effectively reduce flow field resistance and inhibit flow field vortex-induced vibration, and the four-direction surface of the hemispherical cage seam unit is respectively coated with a metal conductive layer to super-sensitively perceive the vibration mode and posture of the scorpion hair in the flow field environment.The bionic scorpion hair stem is pressed through deflection of a ball cage, so that the resistance values of the metal conductive layers in four different directions on the surface of the ball cage change, therefore, the change mode of the resistance values can effectively reflect information such as the flow rate, flow speed and flow direction of the airflow.

Description

Technical Field

[0001] This invention relates to the field of sensor technology, and in particular to a biomimetic gu-hair airflow detection sensor device and an airflow detection device. Background Technology

[0002] With the rapid development of unmanned underwater vehicles and soft robots, miniaturized and flexible flow sensors have become crucial technologies in attitude control and flow field analysis. However, most mainstream hair-like sensors currently available are cylindrical hair rod structures. Even with uniform flow, eddy currents can detach from the cylindrical rod structure, generating suction on the rod and causing strong vibrations. This eddy-induced vibration generates considerable noise and reduces the signal-to-noise ratio of the flow sensor. Traditional artificial beard sensors are based on discrete strain gauges or displacement sensors, making them bulky and cumbersome to assemble.

[0003] Therefore, existing technologies still need further improvement and development. Summary of the Invention

[0004] In view of the shortcomings of the prior art, the purpose of this invention is to provide a biomimetic gu-hair airflow detection sensor device and an airflow detection device. This invention provides a highly sensitive and interference-resistant biomimetic gu-hair airflow detection sensor device, aiming to solve the problems of traditional mechanical sensors such as large size, low signal-to-noise ratio, and low sensitivity.

[0005] The technical solution of the present invention is as follows:

[0006] A biomimetic airflow detection sensor device, comprising:

[0007] The bionic gu hair stick is designed as an elliptical flat structure, and the elliptical flat structure is designed as an irregular twisted shape from top to bottom to sense airflow and make the bionic gu hair stick swing according to the sensed airflow.

[0008] The hemispherical cage-like unit has its top fixedly connected to the biomimetic gu-hair rod, and its two sides are configured as flexible thin-film slit structures that can be squeezed and deformed. The middle of the flexible thin-film slit structure is a hollow structure, and a conductive layer is provided on the outside of the hemispherical cage-like unit. The hemispherical cage-like unit is a three-dimensional hemispherical cage-shaped slit structure that gradually extends from top to bottom. When the top is subjected to the squeezing force of the biomimetic gu-hair rod swinging, the outer slit structure is stretched and closed, causing the bottom to be squeezed and deformed, thereby causing the resistance of the conductive layer to change. The bending angle of the gu-hair is detected based on the rate of change of the resistance of the conductive layer.

[0009] The encapsulation circuit base is disposed at the bottom of the hemispherical cage unit and connected to the bottom of the hollow structure of the hemispherical cage unit. The encapsulation circuit base is electrically connected to the conductive layer.

[0010] The biomimetic gu hair airflow detection sensor device, wherein the surface of the biomimetic gu hair shaft is configured to simulate the flat, asymmetrical, and rotating geometry of scorpion gu hair.

[0011] The aforementioned biomimetic gu-hair airflow detection sensor device, wherein the bottom of the biomimetic gu-hair rod is set as a plane, and the top of the hemispherical cage unit is set as a circular plane connected to the biomimetic gu-hair rod.

[0012] In the aforementioned biomimetic gu-hair airflow detection sensor device, the radius of the top circular plane of the hemispherical cage unit is 2mm, and the bottom circular cross-section of the hemispherical cage unit is 5mm.

[0013] The biomimetic gu-hair airflow detection sensor device, wherein the four directional surfaces on the outer side of the hemispherical cage unit are prepared with vapor-deposited Au conductive layers using a metal production method.

[0014] The biomimetic gu-hair airflow detection sensor device, wherein the major axis of the elliptical flat structure of the biomimetic gu-hair rod is 2mm, the minor axis is 1mm, and the length of the entire rod is 15mm.

[0015] In the aforementioned biomimetic gu-hair airflow detection sensor device, the packaging circuit base is a PCB circuit board, on which a signal filtering and amplification module is disposed, and the signal filtering and amplification module is electrically connected to the conductive layer.

[0016] In the aforementioned biomimetic gu-hair airflow detection sensor device, the resistance value of the Au conductive layer deposited in four directions on the surface of the hemispherical cage-shaped slit structure changes in real time with the expansion and closure of the hemispherical cage corrugated slit structure caused by the vibration of the biomimetic gu-hair rod.

[0017] In the aforementioned biomimetic gu-hair airflow detection sensor device, the bottom plane of the biomimetic gu-hair rod is connected to the top plane of the hemispherical cage unit using acrylic resin adhesive.

[0018] An airflow detection device, comprising: a biomimetic gu-hair airflow detection sensor device as described in any of the preceding claims, wherein the biomimetic gu-hair airflow detection sensor device performs airflow detection by comprising the following steps:

[0019] The bionic gu hair rod senses the airflow and swings according to the sensed airflow.

[0020] The biomimetic gu-like hair rod deflects and squeezes the hemispherical cage unit, causing the resistance values ​​of the conductive layers in four different directions on the surface of the hemispherical cage unit to change.

[0021] By measuring the rate of change in the resistance of the conductive layer, information on the flow rate, velocity, and direction of the airflow can be obtained.

[0022] Beneficial Effects: This invention discloses a highly sensitive, interference-resistant biomimetic scorpion hair airflow detection sensor device, belonging to the field of sensor technology. The flow detection sensor includes: a biomimetic scorpion hair rod, a hemispherical cage unit, and a packaged circuit base. The biomimetic scorpion hair rod is manufactured by 3D printing, and its surface simulates the flat, asymmetrical, and rotating geometry of scorpion hair, effectively reducing flow field resistance and suppressing vortex-induced vibration. The hemispherical cage unit has metal conductive layers deposited on its four surfaces to ultra-sensitively detect the vibration mode and attitude of the scorpion hair in the flow field. The scorpion hair rod deflects and compresses the spherical cage, causing changes in the resistance values ​​of the metal conductive layers on the four different directions of the cage surface. Therefore, analyzing the resistance change pattern can effectively reflect information such as airflow rate, velocity, and direction. Based on the biomimetic scorpion hair rod structure, this invention suppresses vortex-induced oscillation and improves the sensor's signal-to-noise ratio. The hemispherical cage unit enhances sensor sensitivity, solving the problems of large size, low signal-to-noise ratio, and low sensitivity of traditional mechanical sensors. Attached Figure Description

[0023] Figure 1 This is a three-dimensional structural schematic diagram of a biomimetic gu-hair airflow detection sensor device according to an embodiment of the present invention.

[0024] Figure 2 This is a schematic diagram of the biomimetic gu-hair rod structure of a biomimetic gu-hair airflow detection sensor device according to an embodiment of the present invention.

[0025] Figure 3 A schematic diagram of the first structure of the hemispherical cage-like unit of a biomimetic airflow detection sensor device according to an embodiment of the present invention.

[0026] Figure 4 This is a schematic diagram of the second structure of the hemispherical cage-like unit of a biomimetic airflow detection sensor device according to an embodiment of the present invention.

[0027] Figure 5 This is a schematic diagram of the curved structure of a biomimetic gu-hair airflow detection sensor device according to an embodiment of the present invention.

[0028] Figure 6 This is a schematic diagram of the cross-sectional structure of a hemispherical cage-like unit of a biomimetic airflow detection sensor device according to an embodiment of the present invention.

[0029] Figure 7This is a schematic diagram showing the resistance distribution and installation position of the metal Au conductive layer in a biomimetic airflow detection sensor device according to an embodiment of the present invention.

[0030] Figure 8 This is a schematic diagram of an equivalent 1-DOF linear oscillator for a biomimetic gu-hair airflow detection sensor device according to an embodiment of the present invention.

[0031] Figure 9 This is a schematic diagram of the elliptical cross-section of the hair shaft structure of a biomimetic hair flow detection sensor device according to an embodiment of the present invention.

[0032] Explanation of reference numerals in the attached figures: 1- Bionic hair rod, 3- Elliptical flat asymmetrical structure of the hair rod, 2- Hemispherical cage slot unit, 4- Encapsulation circuit base, 5- Conductive layer, 6- Hemispherical cage cavity, 23- Top platform of the hemispherical cage, 8- Schematic diagram of airflow velocity direction, 9- Schematic diagram of equivalent system of sensor device, 10- Location of resistance distribution of conductive layer. Detailed Implementation

[0033] This invention provides a biomimetic gu-hair airflow detection sensor device and an airflow detection device. To make the objectives, technical solutions, and effects of this invention clearer and more explicit, the invention is further described in detail below. It should be understood that the specific embodiments described herein are only for explaining the invention and are not intended to limit the invention.

[0034] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of this invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0035] It should be noted that in the description of this invention, the terms "upper," "lower," "both sides," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention. The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated.

[0036] Scorpion bristles, with their elliptical, flat shape, possess an extremely keen ability to sense even the slightest airflow. Furthermore, the scorpion's slit receptors can amplify minute stresses many times over. Therefore, fabricating bristle-shaped receptors based on the unique shape of scorpion bristles can improve sensitivity, suppress noise, and achieve miniaturization, which is of significant academic importance for airflow sensors.

[0037] Therefore, the present invention provides a biomimetic scorpion hair airflow detection sensor device, which offers high sensitivity and anti-interference capabilities, belonging to the field of sensor technology. The flow detection sensor includes: a biomimetic scorpion hair rod, a hemispherical cage unit, and a packaged circuit base. The biomimetic scorpion hair rod is manufactured using 3D printing, and its surface simulates the flat, asymmetrical, and rotating geometry of scorpion hair, effectively reducing flow field resistance and suppressing vortex-induced vibrations. The hemispherical cage unit has metal conductive layers deposited on its four surfaces to ultra-sensitively detect the vibration mode and attitude of the scorpion hair in the flow field. The scorpion hair rod deflects and compresses the cage, causing changes in the resistance values ​​of the metal conductive layers on the cage surface in four different directions. Therefore, analyzing the resistance change pattern can effectively reflect information such as airflow rate, velocity, and direction.

[0038] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

[0039] like Figure 1 and Figure 2 As shown, the present invention discloses a biomimetic gu-hair airflow detection sensor device, comprising:

[0040] 1. Bionic gu-shaped hair rod; 3. Hemispherical cage-like unit; 4. Encapsulated circuit base;

[0041] Among them, such as Figure 1 As shown, the biomimetic gu-like hairy rod 1 is designed as an elliptical, flat structure. Figure 9 This is a schematic diagram of the elliptical cross-section of the bristle structure of a biomimetic bristle airflow detection sensor device according to an embodiment of the present invention. The elliptical flat structure is irregularly twisted from top to bottom to sense airflow 8, and the bristle structure oscillates according to the sensed airflow. Figure 5 As shown, label 9 illustrates the structure when the bionic gu hair rod undergoes a swinging change. In this embodiment, the bottom of the bionic gu hair rod 1 is set as a flat surface to facilitate connection with the top of the hemispherical cage unit 3; in a preferred embodiment, the major axis of the elliptical flat structure of the bionic gu hair rod 1 is 2mm, the minor axis is 1mm, the entire hair rod is 15mm long, and the whole is directly printed by a 3D printer, as shown. Figure 2 As shown.

[0042] In the embodiment of the present invention, the biomimetic scorpion hair rod 1 is manufactured by 3D printing. The surface of the biomimetic scorpion hair rod 1 is made into a flat, asymmetrical and rotating geometric shape that simulates the hair of a scorpion. This reduces flow field resistance and suppresses vortex-induced vibration in the flow field. It effectively distinguishes between self-induced vibration and vibration induced by the characteristics of the oncoming wake, reduces measurement noise generated by its own vibration, and perceives complex flow details, including flow velocity, flow rate, vortex-induced vibration, etc.

[0043] like Figure 1 As shown, the top of the hemispherical cage unit 2 is fixedly connected to the bionic gu-like hair rod 1. The two sides of the hemispherical cage unit 2 are configured as flexible, compressible film seam structures 21. This structure is more conducive to generating compressive deformation based on the swinging motion of the bionic gu-like hair rod 1. Figure 4 and Figure 6 As shown, the flexible film slit structure has a hollow structure in the middle, also called a hemispherical cage cavity 6. A conductive layer 5 is provided on the outside of the hemispherical cage slit unit 2. The hemispherical cage slit unit 2 is a three-dimensional hemispherical cage slit structure that gradually extends from top to bottom. When the top is subjected to the squeezing force of the bionic gu hair rod swinging, the outer hemispherical cage slit structure can easily be stretched and closed in conjunction, causing the bottom to be squeezed and deformed, which leads to the change in resistance of the conductive layer 5. The bending angle of the bionic gu hair rod can be detected based on the rate of change in resistance of the conductive layer 5. The detection is simple and convenient and easy to implement.

[0044] The encapsulation circuit base 4 is disposed at the bottom of the hemispherical slotted unit 3 and connected to the bottom of the hollow structure of the hemispherical slotted unit 2. The encapsulation circuit base 4 is electrically connected to the conductive layer 5. The resistance change signal of the conductive layer 5 is amplified and filtered by the circuit on the encapsulation circuit base 4, and then the amplified and filtered signal is converted to obtain the flow rate, velocity, and direction information of the airflow.

[0045] When using the biomimetic gu-hair airflow detection sensor device of this invention, as in the following ways... Figure 7 As shown, the bionic gu-like hairy rod 1 senses the airflow and oscillates accordingly. The hairy rod 1 deflects and compresses the hemispherical cage unit 2, causing changes in the resistance values ​​of the conductive layers 5 on the surface of the hemispherical cage unit 2 in four different directions. The rate of change in the resistance values ​​of the conductive layers is used to obtain information about the flow rate, velocity, and direction of the airflow. Figure 8 The diagram shows an equivalent 1-DOF linear oscillator of a highly sensitive, interference-resistant biomimetic goat-hair airflow detection sensor device according to the present invention. In this embodiment, the biomimetic goat-hair rod 1 is configured as an elliptical flat structure, with the elliptical flat structure forming an irregularly twisted shape from top to bottom. This reduces flow field resistance and suppresses vortex-induced vibrations, effectively distinguishing between self-induced vibrations and vibrations induced by the characteristics of the oncoming wake, thus reducing noise and improving the signal-to-noise ratio.

[0046] In embodiments of the present invention, such as Figure 1 and Figure 4 As shown, the bottom of the bionic gu hair rod 1 is set as a plane, and the top of the hemispherical cage unit 2 is set as a circular plane connected to the bionic gu hair rod 1, as shown. Figure 4As shown, in the hemispherical cage unit 3, preferably, the top circular 23 has a plane radius of 2mm, and the bottom circular 24 has a cross-section of 5mm. Figure 3 As shown. In this embodiment of the invention, Au conductive layers 5 are deposited on both sides of the hemispherical slotted unit 3, serving to connect the circuit. The Au conductive layers are prepared using a metal growth method. Preferably, Au conductive layers 5 are deposited on the surfaces of the hemispherical slotted unit 3 in four directions, such as... Figure 3 As shown, the bending angle of the gu hair is detected based on the change rate of the conductive layer resistance. With the support of the slit structure, the tiny vibrations of the gu hair can be detected more sensitively.

[0047] After the Au conductive layer 5 is grown, factors such as layout accuracy and particle diffusion may cause the Au layer to not strictly match the size design. Precision processing of the Au layer is carried out by wet etching. The excess Au layer is etched away by a corrosive solution. Due to the diffusion effect, the reactants in the solution generate an extremely thin boundary layer, which can precisely control the etching position. The Au layer in contact with the boundary layer solution reacts chemically with the boundary layer solution, enters the solution and is then discharged.

[0048] In embodiments of the present invention, such as Figure 1 As shown, the bottom plane of the bionic gu hair rod 1 is bonded to the top plane of the hemispherical cage unit 3 using acrylic resin adhesive. That is, the top plane of the hemispherical cage unit 3 is bonded to the bottom plane of the bionic gu hair rod 1 using acrylic resin adhesive. As the hair rod vibrates, it compresses the outer seam structure. The overall manufacturing method is as follows:

[0049] The hemispherical cage slot unit 3 is a conductive layer of gold (Au) vapor-deposited onto the corrugated slot structure in four directions on the surface of the overall cage, such as... Figure 6 As shown, the hemispherical slotted unit 3 is entirely based on a PDMS (polydimethylsiloxane) base, with a conductive layer of gold (Au) deposited on the slotted structure in four vertical directions, presenting as strip-shaped metal bands, such as... Figure 7 The reference numeral 10 indicates the location of the conductive layer resistance distribution in this invention. In a preferred embodiment of this invention, the hemispherical cage-like slotted unit 3 is formed by casting resin into a corresponding mold to obtain a PDMS (polydimethylsiloxane) substrate with microchannels on its surface. The monomer curing agent of the PDMS (polydimethylsiloxane) solution is mixed at a weight ratio of 10:1, degassed in a vacuum chamber to remove air bubbles, and finally poured into a multi-slotted cage mold. The poured solution is heated at 60°C for 4 hours, and then the solid PDMS (polydimethylsiloxane) structure is peeled off to form the hemispherical cage-like slotted unit 3, as shown below. Figure 6 As shown. The bottom of the cavity within the hemispherical slotted unit 3 is connected to the encapsulation circuit mounting base.

[0050] like Figure 5As shown, the resistance of the Au conductive layer in the hemispherical cage unit is distributed in four directions. The wind speed and direction of the incoming flow are identified by the change in resistance value of different resistances.

[0051] The hemispherical corrugated seam structure used in this embodiment of the invention is a three-dimensional spherical cage-shaped seam structure that gradually extends from top to bottom. When subjected to the squeezing force of the top plane, the outer seam structure is stretched and closed.

[0052] The bottom plane of the biomimetic gu-like hair rod is connected to the top plane of the hemispherical cage unit with acrylic resin adhesive, making the connection more secure.

[0053] The resistance value of the Au conductive layer 5 deposited in the four directions on the surface of the hemispherical cage-shaped slit structure changes in real time with the vibration of the burr rod, causing the expansion and closure of the hemispherical cage corrugated slit structure, which can achieve a very sensitive detection effect.

[0054] The biomimetic gu-like hair rod 1 has an elliptical cross-sectional shape, and the overall cylindrical surface is flat and includes irregular rotation around the center point of the cross-section, such as... Figure 1 The label 3 indicates a flat, asymmetrical elliptical structure. Compared to a cylinder, when vortices detach, the cylinder experiences an oscillating lateral force. This lateral force corresponds to the vortex shedding frequency, which can be changed to synchronize with the motion frequency. The fluid and structure operate in a feedback loop because the structural force reduces the intensity of the vortices, thereby reducing the lift and drag on the elliptical cylinder. This reduces its own vibration amplitude and suppresses vortex-induced vibration.

[0055] The hemispherical cage unit 3 contains a cavity bottom that is connected to the encapsulation circuit mounting base.

[0056] The encapsulation circuit base 4 is preferably a PCB circuit board, on which a signal filtering and amplification module is provided and electrically connected to the metal gold (Au) conductive layer 5; the encapsulation circuit base 4 provides filtering and amplification circuits and is encapsulated at the bottom of the base.

[0057] In embodiments of the present invention, such as Figure 1 As shown, the cross-sectional shape of the bionic gu hair rod 1 is elliptical, and the overall cylindrical surface (i.e. the overall surface) is flat and includes irregular rotation along the center point of the cross-section. The whole is directly printed by a 3D printer.

[0058] The device of the present invention includes the following steps when performing detection: when the bionic gu hair rod 1 is vibrated by the flow field pressure, the deflection of the bionic gu hair rod 1 causes the hemispherical cage structure unit 3 to be squeezed, which in turn affects the resistance change of the vapor-deposited metallic gold Au conductive layer 5. Complex flow details can be perceived from the resistance changes in four directions. Since the resistance of the conductive layer is distributed in four different directions, the detection of airflow velocity and direction can be achieved by analyzing the change patterns of different resistance values.

[0059] The principle by which the biomimetic worm hair rod structure described in this embodiment of the invention suppresses vortex-induced oscillations is as follows:

[0060] An object in a uniform flow can be simply represented as a 1-DOF linear oscillator, such as... Figure 8 As shown. The free flow approaches with velocity U, resulting in a frequency of f. s The eddy currents detach. The fluid force acting on the cylinder in the y-direction is L, and the system can be expressed as:

[0061] The transverse hydrodynamic force is divided into a component in the same direction as the velocity and a component in the same direction as the acceleration, and thus:

[0062]

[0063] φ is the phase angle between motion and forced function, and ω = 2πf is the frequency at which the object is excited.

[0064] The mass and damping of this free-vibrating system depend on the fluid forces, and the specific interactions are expressed by the following formulas for response amplitude and frequency:

[0065]

[0066] m * It is the mass ratio, C m It is the effective added quality coefficient, f * =f / f n ζ is the frequency ratio, κ is the lateral force coefficient multiplied by a constant, and ζ is the damping ratio. Two key features in these formulas are damping and effective added mass; in the schematic diagram of the elliptical cross-section of the hump, the solid line represents the case where α = 0, and the dashed line represents the case where α > 0. Projection diameter (d) * () refers to the length perpendicular to the water flow, which approaches the velocity U. The drag coefficient C d The calculation method is as follows:

[0067]

[0068]

[0069] The above formula yields the vibration frequency f of the ellipse. * Vibration amplitude A * and the corresponding resistance C d All of them are smaller than the corresponding cylinders, therefore the described vegetative worm hair rod structure has an anti-interference effect.

[0070] Based on the above embodiments of the biomimetic gu-hair airflow detection sensor device, the present invention further provides an airflow detection device, comprising: the biomimetic gu-hair airflow detection sensor device as described in any of the above embodiments, wherein the biomimetic gu-hair airflow detection sensor device performs airflow detection by comprising the following steps:

[0071] The bionic gu hair rod senses the airflow and swings according to the sensed airflow.

[0072] The biomimetic gu-like hair rod deflects and squeezes the hemispherical cage unit, causing the resistance values ​​of the conductive layers in four different directions on the surface of the hemispherical cage unit to change.

[0073] By measuring the rate of change in the resistance of the conductive layer, information on the flow rate, velocity, and direction of the reaction airflow can be obtained, as described above.

[0074] In summary, this invention realizes a highly sensitive, interference-resistant biomimetic scorpion hair airflow detection sensor and detection device. The device has a compact structure, integrating a biomimetic scorpion hair rod, a hemispherical cage unit, and a packaged circuit base. The biomimetic scorpion hair rod is 3D printed, and its surface simulates the flat, asymmetrical, and rotating geometry of scorpion hair, greatly reducing drag and suppressing vortex-induced vibration. The hemispherical cage unit has Au conductive layers deposited on its four surfaces in four directions for more sensitive sensing of the vibration mode and attitude of the scorpion hair under the influence of the flow field. Under the influence of the flow field, the scorpion hair deflects and compresses the spherical cage. Due to the electron tunneling effect, the resistance of the Au conductive layer on the surface of the spherical cage changes, and the resistance is distributed in four different directions. Ultrasensitive sensing of airflow velocity and direction is achieved by detecting the changes in resistance values.

[0075] It should be understood that the application of the present invention is not limited to the examples above. Those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A biomimetic airflow detection sensor device, characterized in that, include: The bionic gu hair stick is designed as an elliptical flat structure, and the elliptical flat structure is designed as an irregular twisted shape from top to bottom to sense airflow and make the bionic gu hair stick swing according to the sensed airflow. The hemispherical cage-like unit has its top fixedly connected to the biomimetic gu-like hair rod, and its sides are configured as flexible, deformable thin-film slit structures. The middle of the flexible thin-film slit structure is hollow, and a conductive layer is provided on the outer side of the hemispherical cage-like unit. The hemispherical cage-like unit is a three-dimensional hemispherical cage-shaped slit structure that gradually extends from top to bottom. When the top is subjected to the squeezing force of the biomimetic gu-like hair rod swinging, the outer slit structure stretches and closes, causing the bottom to be squeezed and deformed, thereby causing a change in the resistance of the conductive layer. The bending angle of the gu-like hair is detected based on the rate of change of the resistance of the conductive layer. The diameter of the hemispherical cage-like unit gradually increases from top to bottom, and its cross-section is arranged in a trapezoidal shape. The four outer surfaces of the hemispherical cage-like unit are prepared with vapor-deposited Au conductive layers using metal production methods. The encapsulation circuit base is disposed at the bottom of the hemispherical cage unit and connected to the bottom of the hollow structure of the hemispherical cage unit. The encapsulation circuit base is electrically connected to the conductive layer.

2. The biomimetic gu-hair airflow detection sensor device according to claim 1, characterized in that, The surface of the biomimetic gu hair shaft is set to a flat, asymmetrical, and rotating geometry that mimics the hair of a scorpion.

3. The biomimetic gu-hair airflow detection sensor device according to claim 1, characterized in that, The bottom of the bionic gu hair rod is set as a plane, and the top of the hemispherical cage unit is set as a circular plane connected to the bionic gu hair rod.

4. The biomimetic gu-hair airflow detection sensor device according to claim 1, characterized in that, The top circular plane radius of the hemispherical cage unit is 2mm, and the bottom circular cross-section of the hemispherical cage unit is 5mm.

5. The biomimetic gu-hair airflow detection sensor device according to claim 1, characterized in that, The biomimetic gu-like hair rod has an elliptical flat structure with a major axis of 2mm, a minor axis of 1mm, and a total length of 15mm.

6. The biomimetic gu-hair airflow detection sensor device according to claim 1, characterized in that, The base of the packaging circuit is a PCB circuit board, on which a signal filtering and amplification module is provided, and the signal filtering and amplification module is electrically connected to the conductive layer.

7. The biomimetic gu-hair airflow detection sensor device according to claim 1, characterized in that, The resistance values ​​of the Au conductive layers deposited in the four directions on the surface of the hemispherical cage-shaped slot structure change in real time with the expansion and closure of the hemispherical cage corrugated slot structure due to the vibration of the biomimetic hair rod.

8. The biomimetic gu-hair airflow detection sensor device according to claim 1, characterized in that, The bottom plane of the biomimetic gu-like hair rod is connected to the top plane of the hemispherical cage unit with acrylic resin adhesive.

9. An airflow detection device, characterized in that, include: The biomimetic gu-hair airflow detection sensor device according to any one of claims 1-8, wherein the biomimetic gu-hair airflow detection sensor device performs airflow detection by comprising the following steps: The bionic gu hair rod senses the airflow and swings according to the sensed airflow. The biomimetic gu-like hair rod deflects and squeezes the hemispherical cage unit, causing the resistance values ​​of the conductive layers in four different directions on the surface of the hemispherical cage unit to change. By measuring the rate of change in the resistance of the conductive layer, information on the flow rate, velocity, and direction of the airflow can be obtained.

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