A method for forming a quartz boat and a quartz boat formed using the method

Abstract

The application relates to a quartz boat forming method and a quartz boat prepared by using the method, and belongs to the technical field of semiconductor equipment preparation. The quartz boat forming method comprises the following steps: processing a groove rod and determining the size of the groove rod; determining the size of a top plate and a bottom plate and performing surface milling treatment on the top plate and the bottom plate; installing the groove rod, the bottom plate and the top plate, wherein the installation comprises an installation device, the installation device comprises a supporting plate, a positioning assembly for positioning the groove rod is arranged on the supporting plate, an installation assembly for installing the top plate is arranged at one end of the supporting plate, and a conveying assembly for installing the bottom plate is arranged at the other end of the supporting plate, a driving assembly for driving the installation assembly and the conveying assembly to simultaneously move is arranged between the installation assembly and the conveying assembly; and the top plate, the groove rod and the bottom plate are fixed to each other to form the quartz boat. The application has the effects of quickly positioning and installing the groove rod and improving work efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor device preparation, and in particular to a quartz boat forming method and a quartz boat formed using the method. BACKGROUND

[0002] When chemical vapor deposition is performed on the outer surface of a silicon wafer, a plurality of silicon wafers are usually inserted into a quartz boat, and the silicon wafers are moved into a quartz tube by the quartz boat to support the silicon wafers until the chemical vapor deposition process on the surface of the silicon wafers is completed. In the production process of the quartz boat, the commonly used production method is that a worker places a bottom plate on a workbench, inserts a groove rod into the bottom plate and fixes the groove rod to the bottom plate by welding, and then installs a top plate at the upper end of the groove rod and welds the top plate to the groove rod, thereby forming the quartz boat.

[0003] In the related art, when the quartz boat is manually installed, the groove rod is inserted and fixed at one end of the bottom plate, and then the other end of the groove rod is installed. Therefore, it is difficult to quickly align and insert the groove rod into the top plate during the installation of the groove rod, thereby affecting the work efficiency. SUMMARY

[0004] In order to quickly position and install the groove rod and improve work efficiency, the present application provides a quartz boat forming method and a quartz boat formed using the method.

[0005] In a first aspect, the present application provides a quartz boat forming method, which adopts the following technical solution:

[0006] 1. A quartz boat forming method, comprising the following steps:

[0007] S1, processing the groove rod and determining the size of the groove rod;

[0008] S2, determining the size of the top plate and the bottom plate and milling the surface of the top plate and the bottom plate;

[0009] S3, connecting the top plate and the bottom plate to each other through the groove rod, comprising an installation device for installing the top plate, the bottom plate and the groove rod, the installation device comprising a support plate, the upper side of the support plate being provided with a positioning assembly for positioning the groove rod, one end of the upper side of the support plate being provided with an installation assembly for installing the top plate, and the end of the support plate away from the installation assembly being provided with a transportation assembly for transporting the bottom plate, the installation assembly comprising a moving seat in sliding connection with the support plate, the top plate being detachably connected with the moving seat, the transportation assembly comprising a transportation seat having the same structure as the moving seat, and a driving assembly being arranged between the moving seat and the transportation seat for driving both to move simultaneously;

[0010] S4, fixing the connection between the top plate and the groove rod and the connection between the bottom plate and the groove rod, respectively, to form a quartz boat.

[0011] By adopting the technical scheme, after the groove bar is processed and the size is determined, the size of the top plate and the bottom plate is determined and the top plate and the bottom plate are milled, at this time, the top plate, the bottom plate and the groove bar are assembled by installing the equipment, during the assembly, the positioning assembly positions the installed groove bar, at this time, the moving seat of the installation assembly is installed on the moving seat through the fixing piece, and the bottom plate is fixed with the transport seat in the same way, at this time, the driving assembly drives the moving seat and the transport seat to move at the same time, until the groove bar is inserted at the two ends of the top plate and the bottom plate respectively, so that the groove bar is quickly positioned and installed, and the work efficiency is improved.

[0012] Optionally, the positioning assembly comprises a positioning seat arranged on the support plate and along the length direction of the support plate, a plurality of positioning holes corresponding to the groove bar and arranged along the length direction of the positioning seat are formed in the positioning seat, the positions of the positioning holes on the positioning seat correspond to the positions of the groove bar installed on the bottom plate, the positioning holes located in the middle are provided with clamping pieces for fixing the groove bar at both ends thereof, the remaining positioning holes are provided with fixing pieces for fixing the groove bar at both ends thereof, rotating rods are arranged at both ends of the positioning seat, one end of the rotating rod away from the positioning seat is fixedly connected with the support plate, and the other end of the rotating rod close to the positioning seat is rotatably connected with the same rotating shaft, the rotating shaft penetrates through the positioning seat and is fixedly connected with the positioning seat, and a positioning motor is arranged at one end of the rotating shaft.

[0013] By adopting the technical scheme, when the groove bar is positioned, the positioning motor drives the rotating shaft to rotate until the positioning holes are located on one side of the support plate, at this time, the groove bar is installed in the positioning hole close to the other side of the support plate, the fixing piece fixes the groove bar in the positioning hole, the rotating motor drives the rotating shaft to drive the positioning seat to rotate by a certain angle towards the other side of the support plate, and the groove bar is installed in the positioning hole adjacent to the positioning hole in which the groove bar is installed, the fixing piece is fixed, the positioning seat is continuously rotated until the groove bar is installed in the corresponding positioning hole, at this time, the positioning hole located in the middle is located on the side of the positioning seat away from the support plate, and the installation of the groove bar is completed, so that the worker can install the groove bar in the corresponding positioning hole at the same position, the possibility of the worker changing the position during the installation of the groove bar is reduced, the groove bar is further quickly positioned and installed, and the work efficiency is improved.

[0014] Optionally, the groove bar is provided in three, two groove bars are arranged oppositely, and the other groove bar is located on the center line of the connecting line between the two opposite groove bars, the fixing piece comprises a fixing rod inserted in the positioning seat on the side away from the positioning hole away from the positioning hole located in the middle, one end of the fixing rod away from the corresponding positioning hole is inserted in the positioning seat and is slidably connected with the positioning seat, and the positioning seat is provided with a driving piece for driving the fixing rod to move towards the positioning hole.

[0015] By adopting the technical scheme, when the slot rod is installed on the positioning seat through the fixing member, the placing slot on the slot rod is aligned with the positioning hole, and the slot rod is moved towards the positioning hole until the slot rod is inserted into the positioning hole; at this time, the driving member drives the fixing rod to move towards the positioning hole until the upper end of the fixing rod is higher than the height of the rotating axis of the slot rod, and the side wall of the fixing rod abuts against the side wall of the slot rod, thereby fixing the slot rod and improving the stability of the slot rod.

[0016] Optionally, a plurality of placing slots for placing silicon wafers are formed in the side wall of the slot rod, positioning blocks which are adapted to the placing slots on the slot rod and are fixedly connected with the positioning seat are arranged at the two ends of the positioning hole, the driving member comprises driving blocks arranged on the sides of the positioning blocks which are away from each other, an accommodating slot which is adapted to the driving blocks is formed in the positioning seat, the driving blocks are inserted into the accommodating slot and are slidably connected with the side walls of the accommodating slot, driving springs are fixedly connected in the accommodating slot, the other ends of the driving springs are fixedly connected with the driving blocks, one end of the fixing rod inserted into the positioning seat is bent towards the direction that the two ends are close to each other, and the bent ends of the fixing rod are bent towards the positioning blocks and are inserted into the accommodating slot, the end of the fixing rod inserted into the accommodating slot and the side thereof which is away from the other end is inclined towards the direction that the two sides are close to each other and towards the side which is close to the supporting plate, and a fixing slot which is adapted to the fixing rod is formed in the positioning seat.

[0017] By adopting the technical scheme, when the slot rod is installed on the positioning seat through the fixing member, the placing slot on the slot rod is aligned with the positioning hole, and the slot rod is moved towards the positioning hole until the slot rod is inserted into the positioning hole; at this time, the driving member drives the fixing rod to move towards the positioning hole until the upper end of the fixing rod is higher than the height of the rotating axis of the slot rod, and the side wall of the fixing rod abuts against the side wall of the slot rod, thereby fixing the slot rod and improving the stability of the slot rod.

[0018] Optionally, the clamping member comprises clamping blocks arranged on the two sides of the positioning hole, the sides of the clamping blocks which are away from the rotating axis are inclined towards the direction that the two sides are away from each other and towards the side which is away from the rotating axis, clamping slots which are adapted to the clamping blocks are formed in the positioning seat, the ends of the clamping blocks which are away from each other are inserted into the corresponding clamping slots and are slidably connected with the side walls of the clamping slots, clamping springs are fixedly connected in the clamping slots, and the clamping springs are fixedly connected with the clamping blocks.

[0019] By adopting the technical scheme, when the groove bar is fixed in the positioning hole in the middle through the clamping piece, the placing groove of the groove bar is aligned with the positioning block and the groove bar is moved towards the positioning hole until the side wall of the groove bar abuts against the clamping block, the groove bar is continuously moved, at this time, the side wall of the groove bar extrudes the inclined surface of the clamping block and drives the clamping piece to move away from each other, at this time, the clamping spring is compressed, until the clamping block is completely inserted into the clamping groove, at this time, the groove bar is inserted into the positioning hole, the clamping spring restores the deformation and pushes the clamping block to move towards each other until the side of the clamping block close to the groove bar abuts against the side wall of the groove bar, thereby the groove bar is installed in the positioning hole without additional driving source, the groove bar is further quickly positioned and installed, and the work efficiency is improved.

[0020] Optionally, the moving seat is provided with a moving ring on which a mounting top plate is arranged, one side wall of the moving ring is provided with a moving block, the moving ring is provided with a moving groove which is adapted to the moving block, one end of the moving block is inserted into the moving groove and is in sliding connection with the side wall of the moving groove, a moving spring is fixedly connected in the moving groove, the other end of the moving spring is fixedly connected with the moving block, two sides of the end of the moving groove away from the moving block are both inserted into and in sliding connection with a moving rod, the end of the moving rod close to each other is provided as an inclined surface which is inclined towards the side close to the moving block and away from each other, the other end of the moving rod is provided with an abutting rod which is inclined towards the inner diameter of the moving ring, the abutting rod is inserted into the moving ring and is in sliding connection with the moving ring, the end of the abutting rod close to the moving rod is provided as an inclined surface which is inclined towards the side close to the moving rod and away from each other, and the end of the abutting rod inserted into the moving ring is fixedly connected with a pulling spring which is fixedly connected with the moving ring.

[0021] By adopting the technical scheme, when the top plate is mounted on the moving ring, the side wall of the top plate extrudes the moving block and drives the moving block to move towards the moving groove, at this time, the two sides of the end of the moving block in the moving groove are respectively in abutment with the inclined surfaces on the moving rods and push the moving rods away from each other along the inclined surfaces, at this time, the ends of the moving rods away from each other extrude the inclined surfaces of the abutting rods and push the abutting rods to move away from the moving rods and abut against the top plate, thereby the top plate is fixed in the moving ring, and the stability of the connection between the top plate and the moving ring is improved.

[0022] Optionally, the moving block is provided as a gear, a gear rack is inserted into and in sliding connection with one side of the moving ring, the gear rack is inserted into the moving groove and is in meshing connection with the moving block, the other end of the gear rack is located outside the moving ring, the side wall of the moving block is provided with an insertion hole which is adapted to the moving rod, and the side wall of the end of the moving rod close to the moving block is provided as an inclined surface, when the moving rod is inserted into the insertion hole, the moving block is rotated, at this time, the side wall of the insertion hole extrudes the inclined surface on the moving rod and pushes the moving rod out of the insertion hole.

[0023] By adopting the above technical solution, during the process of the top plate driving the moving block into the moving groove, the teeth on the side wall of the moving block mesh with the rack and slide with the rack. When the moving block moves to the point where it is completely inside the moving groove, the moving rod moves away from each other and pushes one end of the abutment rod to the outside of the moving ring. The pulling spring is compressed. When the moving seat drives the moving ring and the top plate to move to the point where the top plate is installed on the groove bar, the rack is pushed towards the inside of the moving ring. At this time, the moving block rotates under the drive of the rack until the insertion hole on the moving block and the moving rod are on the same straight line. At this time, the pulling spring returns to its deformation and pulls the abutment rod towards the moving rod and drives the end of the moving rod that is close to each other to be inserted into the insertion hole. At this time, the abutment rod is completely inserted into the moving ring, the top plate and the moving ring are released from fixation, thereby installing the top plate on the groove bar, further improving the installation efficiency.

[0024] Optionally, the top plate and the bottom plate have the same thickness. Both ends of one side of the support plate are provided with feeding grooves. The feeding grooves are located on the side of the moving ring away from the moving block. The width of the feeding groove is adapted to the thickness of the top plate. The side of the feeding groove near the moving ring is inclined downward, and the lower end of the feeding groove near the moving ring is equal to the lower end of the moving ring. The side of the moving ring near the feeding groove has a through hole with the same thickness as the top plate. The inner diameter of the moving ring is equal to the diameter of the top plate. The moving base is provided with a control component to drive the moving ring to rotate.

[0025] By adopting the above technical solution, multiple top plates are placed in the feeding trough. When the through hole on the moving ring is aligned with one end of the feeding trough, the top plate located at the end of the feeding trough near the moving ring rolls along the slope of the feeding trough towards the moving ring until it enters the moving ring through the through hole and abuts against the side wall of the moving ring. At this time, the moving block is fully inserted into the moving groove and drives the abutment rod to be located on both sides of the top plate and limit the top plate, reducing the possibility of the top plate detaching from the moving ring. At this time, the control component drives the moving ring to rotate on the moving seat until the top plate and the groove bar are aligned, thereby facilitating quick positioning and installation of the groove bar and improving work efficiency.

[0026] Optionally, the two positioning holes arranged oppositely are provided with fixing plates on one side close to the positioning hole in the middle, the positioning seat is provided with mounting grooves adapted to the fixing plates, the ends of the fixing plates close to each other are inserted into the mounting grooves and are in sliding connection with the mounting grooves, the ends of the fixing plates inserted into the mounting grooves are fixedly connected with mounting springs, the other ends of the mounting springs are fixedly connected with the inner walls of the mounting grooves, the mounting grooves are provided with control rods abutting against the side walls of the fixing plates at one end, the ends of the control rods close to each other are inclined towards the side close to the supporting plate, the positioning seat is provided with a screw rod penetrating and rotatingly connected with the control rods at the ends away from the fixing plates and fixedly connected with the control rods, and one end of the screw rod outside the positioning seat is threadedly connected with a nut.

[0027] By adopting the above technical scheme, when the top plate and the bottom plate are installed on the channel bar and fixed with the channel bar, the quartz boat needs to be taken off from the positioning seat, at this time, the screw rod is twisted in the direction away from each other, at this time, the control rods are rotated in the direction close to each other under the driving of the screw rod, at this time, the mounting springs are pulled in the direction close to each other, until the fixing plates completely enter the mounting grooves, at this time, the clamping blocks are moved in the direction away from each other and the quartz boat is moved upwards, until the quartz boat is taken out upwards, thereby facilitating the taking down of the quartz boat and improving the installation accuracy of the quartz boat.

[0028] In the second aspect, the application provides a quartz boat, which adopts the following technical scheme:

[0029] A quartz boat comprises a top plate and a bottom plate arranged oppositely, a plurality of channel bars are arranged between the top plate and the bottom plate, mounting holes adapted to the channel bars are formed in the top plate and the bottom plate, the channel bars are inserted into the mounting holes at both ends, placing grooves for placing lenses are formed in one side of the channel bars close to the central axis of the top plate, and the width of the placing groove on the side of the channel bar close to the top plate is smaller than the width of the placing groove on the side of the channel bar close to the bottom plate.

[0030] By adopting the above technical scheme, when the silicon wafer is placed, the quartz boat is arranged vertically, at this time, the silicon wafer with large thickness is placed in the placing groove on the side of the channel bar close to the bottom plate, and the silicon wafer with small thickness is placed in the placing groove on the side of the channel bar close to the top plate, thereby increasing the stability of the silicon wafer placed on the quartz boat, reducing the possibility of the silicon wafer falling due to the instability of the quartz boat, and improving the deposition efficiency.

[0031] In summary, the application has at least one of the following beneficial technical effects:

[0032] 1. After the groove rod is processed and the size is determined, the size of the top plate and the bottom plate is determined and the top plate and the bottom plate are milled, at this time the top plate, the bottom plate and the groove rod are assembled through the installation device, when assembling, the positioning assembly positions the installed groove rod, at this time the moving seat of the installation assembly is fixed on the moving seat through the fixing piece, and the bottom plate is fixed with the transport seat in the same way, at this time the driving assembly drives the moving seat and the transport seat to move at the same time until the groove rod is inserted at both ends of the top plate and the bottom plate respectively, so that the groove rod is quickly positioned and installed, and the work efficiency is improved;

[0033] 2. The placing groove on the groove rod is aligned with the positioning block, and the groove rod is moved towards the direction close to the positioning hole until the side wall of the groove rod abuts against the driving block, the groove rod is continuously moved towards the direction close to the positioning hole, at this time the driving block moves towards the direction close to the containing groove and extrudes the inclined surface on the fixing rod, so that the fixing rod moves away from the supporting plate until the groove rod is inserted into the positioning hole, at this time the positioning block is inserted into the placing groove, and the driving block completely enters the containing groove, so that the groove rod is fixed in the positioning hole through the fixing rod, and the groove rod is further quickly positioned and installed, and the work efficiency is improved;

[0034] 3. When the moving block moves to completely enter the moving groove, the moving rod moves away from each other and pushes one end of the abutting rod to the outside of the moving ring, and the compressed spring is pulled, when the moving seat drives the top plate to move until the top plate is installed on the groove rod, the end of the rack outside the moving ring abuts against the rotating seat and moves towards the inside of the moving ring under the extrusion of the rotating seat, the moving block rotates under the drive of the rack until the insertion hole on the moving block is located on the same straight line as the moving rod, the spring is restored to deformation and pulls the abutting rod to move towards the moving rod and drives the end of the moving rod close to each other to be inserted into the insertion hole, so that the top plate is installed on the groove rod, and the installation efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0035] Figure 1 It is the overall structure schematic diagram of the quartz boat in the embodiment of the application.

[0036] Figure 2 It is the structure schematic diagram of the embodiment of the application, which embodies the position relationship between the installation device and the top plate.

[0037] Figure 3 It is the structure schematic diagram of the embodiment of the application, which embodies the position relationship between the positioning assembly and the transport assembly.

[0038] Figure 4 It is the structure schematic diagram of the embodiment of the application, which embodies the position relationship between the positioning assembly and the installation assembly.

[0039] Figure 5 It is the structure schematic diagram of the embodiment of the application, which embodies the position relationship between the installation assembly and the control piece.

[0040] Figure 6 is a structural schematic view of the installation assembly and the rack position relationship in the embodiment of the present application.

[0041] Figure 7 is Figure 5 is an enlarged view of the structure at A in

[0042] Figure 8 is a structural schematic view of the top plate and the control position relationship in the embodiment of the present application.

[0043] Figure 9 is a structural schematic view of the installation assembly and the fixed plate position relationship in the embodiment of the present application.

[0044] BRIEF DESCRIPTION OF DRAWINGS 1, top plate; 11, bottom plate; 12, slot bar; 121, placement slot; 13, mounting hole; 14, baffle; 2, support plate; 3, positioning assembly; 31, positioning seat; 311, positioning hole; 312, containing groove; 313, fixing groove; 314, clamping groove; 315, mounting groove; 32, rotating rod; 33, rotating shaft; 34, positioning motor; 35, positioning block; 36, fixing piece; 361, fixing rod; 3611, pushing groove; 362, driving spring; 37, clamping piece; 371, clamping block; 372, clamping spring; 38, driving block; 4, installation assembly; 41, moving seat; 42, moving ring; 421, through hole; 422, moving groove; 423, movable groove; 43, feeding groove; 44, moving block; 441, plug-in hole; 45, moving spring; 46, moving rod; 47, abutting rod; 48, pulling spring; 5, transportation assembly; 51, transportation seat; 6, driving assembly; 61, bidirectional screw; 62, driving motor; 7, rack; 8, control piece; 81, driving wheel; 82, control motor; 9, fixed plate; 91, mounting spring; 92, control rod; 93, screw. DETAILED DESCRIPTION

[0045] The present application will be further described in detail below with reference to the accompanying drawings.

[0046] The embodiment of the present application discloses a quartz boat. Referring to Figure 1A quartz boat comprises a top plate 1 and a bottom plate 11 arranged oppositely, and three groove rods 12 parallel to each other and perpendicular to the top plate 1 are arranged on the side of the top plate 1 and the bottom plate 11 close to each other. The top plate 1 is provided with mounting holes 13 corresponding to the groove rods 12, two of which are symmetrically arranged on the same diameter of the top plate 1, and the third one is arranged between the two opposite mounting holes 13, and the distance between the two opposite mounting holes 13 and the third one is equal. The bottom plate 11 is provided with three mounting holes 13 corresponding to the positions of the mounting holes 13 on the top plate 1, the groove rods 12 are respectively inserted into the corresponding mounting holes 13 and fixedly connected with the side walls of the mounting holes 13, and in the embodiment, the groove rods 12 are welded.

[0047] The side of the groove rod 12 close to the line of the rotation shaft 33 of the top plate 1 is provided with a plurality of placing grooves 121, and the side of the groove rod 12 close to the bottom plate 11 is fixedly connected with a baffle 14 parallel to the top plate 1, and the width of the placing grooves 121 close to the side of the baffle 14 close to the top plate 1 is smaller than that of the placing grooves 121 close to the side of the baffle 14 close to the bottom plate 11. When placing the silicon wafer, the quartz boat is arranged vertically, at this time, the silicon wafer with large thickness is placed in the placing grooves 121 close to the side of the groove rod 12 close to the bottom plate 11, and the silicon wafer with small thickness is placed in the placing grooves 121 close to the side of the groove rod 12 close to the top plate 1, thereby increasing the stability of the silicon wafer placed on the quartz boat and reducing the possibility of the silicon wafer falling due to the instability of the quartz boat.

[0048] The embodiment of the application further discloses a quartz boat forming method. Figure 1 The quartz boat forming method comprises the following steps:

[0049] S1, machining the groove rod 12 and determining the size of the groove rod 12;

[0050] S2, determining the size of the top plate 1 and the bottom plate 11 and milling the surface of the top plate 1 and the bottom plate 11;

[0051] S3, connecting the top plate 1 and the bottom plate 11 with each other through the groove rod 12, comprising a mounting device for mounting the top plate 1, the bottom plate 11 and the groove rod 12, referring to Figure 2 and Figure 3 The mounting device comprises a horizontal support plate 2, the middle part of the upper side of the support plate 2 is provided with a positioning assembly 3 for positioning the groove rod 12, one end of the side of the support plate 2 close to the positioning assembly 3 is provided with a mounting assembly 4 for mounting the top plate 1, the mounting assembly 4 comprises a vertical moving seat 41, the top plate 1 is inserted into the side of the moving seat 41 away from the support plate 2 and is detachably connected with the moving seat 41. The other end of the side of the support plate 2 close to the positioning assembly 3 is provided with a conveying assembly 5 for mounting the bottom plate 11, the conveying assembly 5 comprises a conveying seat 51 corresponding to the moving seat 41, and the bottom plate 11 is connected with the conveying seat 51 in the same way.

[0052] The mobile seat 41 and the transport seat 51 are inserted on the support plate 2 and are in sliding connection with the support plate 2 at one end of the support plate 2, and the support plate 2 is provided with a driving assembly 6, the driving assembly 6 comprises a bidirectional screw rod 61 which is inserted through the support plate 2 and is in rotating connection with the support plate 2, the mobile seat 41 and the transport seat 51 are inserted on the support plate 2 at one end and are sleeved on the bidirectional screw rod 61 and are in threaded connection with the bidirectional screw rod 61, and the bidirectional screw rod 61 is provided with a driving motor 62 at one end.

[0053] After the groove rod 12 is processed and the size is determined, the size of the top plate 1 and the bottom plate 11 is determined and the top plate 1 and the bottom plate 11 are milled, at this time, the top plate 1, the bottom plate 11 and the groove rod 12 are assembled through the installation equipment, when assembling, the positioning assembly 3 positions the installed groove rod 12, at this time, the top plate 1 is installed on the mobile seat 41, and the bottom plate 11 is installed on the transport seat 51, at this time, the driving motor 62 drives the bidirectional screw rod 61 to rotate, so that the mobile seat 41 and the transport seat 51 move towards each other at the same time, until the groove rod 12 is inserted on the top plate 1 and the bottom plate 11 at both ends respectively, and the quartz boat installation is completed.

[0054] Referring to Figure 2 and Figure 3 , the positioning assembly 3 comprises a positioning seat 31 which is arranged on the middle of the upper side of the support plate 2, the positioning seat 31 is arranged along the length direction of the support plate 2, the positioning seat 31 is provided with vertical rotating rods 32 at both ends, the lower end of the rotating rod 32 is fixedly connected with the support plate 2, and the upper end of the rotating rod 32 is provided with the same horizontal rotating shaft 33 which is inserted and rotatingly connected. The rotating shaft 33 passes through the positioning seat 31 and is fixedly connected with the positioning seat 31, the axis of the circular shaft center which is adapted to the cross section of the positioning seat 31 coincides with the rotating shaft 33, and the rotating shaft 33 is provided with a positioning motor 34 at one end.

[0055] The cross section of the positioning seat 31 in the vertical direction is arranged in the shape of an isosceles triangle, and the tip of the cross section of the positioning seat 31 in the vertical direction is arranged as a plane. And the positioning seat 31 is provided with three positioning holes 311 which are adapted to the groove rod 12 and are adapted to the length direction of the positioning seat 31. Two positioning holes 311 are oppositely arranged and located on the longer side of the vertical cross section of the positioning seat 31, and the third positioning hole 311 is located on the bisector of the connecting line between the two opposite positioning holes 311, and the two ends of the positioning hole 311 are fixedly connected with the positioning blocks 35 which are adapted to the placing groove 121 of the groove rod 12.

[0056] The two opposite positioning holes 311 are both open towards the side away from each other, and the two ends of the two opposite positioning holes 311 are both provided with the fixing groove 313 of the fixing piece 36 of the groove bar 12. The positioning hole 311 on the bisector between the two opposite positioning holes 311 is open towards the side away from the two opposite positioning holes 311, and the two ends of the positioning hole 311 on the bisector between the two opposite positioning holes 311 are provided with the clamping piece 37 of the groove bar 12.

[0057] When the groove bar 12 is positioned, the positioning motor 34 drives the rotating shaft 33 to rotate until the positioning holes 311 are all located on one side of the support plate 2. At this time, the groove bar 12 is installed in the positioning hole 311 close to the other side of the support plate 2, the fixing piece 36 fixes the groove bar 12 in the positioning hole 311, the rotating motor drives the rotating shaft 33 to drive the positioning seat 31 to rotate to the other side of the support plate 2 by a certain angle, and the groove bar 12 is installed in the positioning hole 311 in the middle and is fixed by the clamping piece 37. Continue to rotate the positioning seat 31 until the groove bar 12 is installed in the corresponding positioning hole 311, and the installation and positioning of the groove bar 12 are completed.

[0058] The fixing piece 36 includes a fixing rod 361 which is inserted and slidably connected on the side away from the third positioning hole 311 of the two opposite positioning holes 311. The positioning seat 31 is provided with a driving piece on both sides to drive the fixing rod 361 to move towards the side close to the groove bar 12. One end of the fixing rod 361 inserted in the positioning seat 31 is bent towards the side close to each other, and the bent end of the fixing rod 361 is bent towards the side close to the corresponding groove bar 12. The driving piece includes a driving block 38 provided on the side away from the groove bar 12 of the positioning block 35. The positioning seat 31 is provided with a receiving groove 312 on both sides which is adapted to the driving block 38. One end of the driving block 38 away from the positioning block 35 is inserted in the receiving groove 312 and slidably connected with the positioning seat 31.

[0059] The end of the fixing rod 361 close to the driving rod is provided with a pushing groove 3611, and the pushing groove 3611 close to the side of the positioning hole 311 on the bisector between the two opposite positioning holes 311 is provided as an inclined surface which is inclined towards the third positioning hole 311. The positioning seat 31 is provided with a fixing groove 313 on both sides which is in communication with the receiving groove 312. The fixing rod 361 is located in the fixing groove 313 and slidably connected with the fixing groove 313. The fixing groove 313 is fixedly connected with a driving spring 362 towards the fixing rod 361, and the other end of the driving spring 362 is fixedly connected with the fixing rod 361.

[0060] When the groove bar 12 is installed on the positioning seat 31 through the fixing piece 36, the placing groove 121 on the groove bar 12 is moved towards the positioning hole 311 and the groove 422 bar 12 is moved in the direction close to the positioning hole 311 until the side wall of the groove bar 12 abuts against the driving block 38, and the groove 422 bar 12 is continuously moved in the direction close to the positioning hole 311, at this time, the driving block 38 is moved in the direction close to the containing groove 312 and presses the inclined surface on the fixing rod 361, so that the fixing rod 361 is moved in the direction away from the support plate 2 until the groove bar 12 is inserted in the positioning hole 311, at this time, the positioning block 35 is inserted in the placing groove 121, and the driving block 38 completely enters the containing groove 312, so that the groove bar 12 is fixed in the positioning hole 311 through the fixing rod 361, and the fixing of the groove bar 12 is completed.

[0061] With reference to Figure 2 and Figure 4 The clamping piece 37 includes clamping blocks 371 arranged on both sides of the end of the positioning hole 311 located in the middle, the side away from the positioning block 35 of each clamping block 371 is inclined in the direction away from the positioning block 35 and the direction away from each other, the side wall on both sides of the positioning hole 311 is provided with a clamping groove 314 matched with the clamping block 371, and the end of each clamping block 371 away from each other is inserted in the clamping groove 314 and connected with the clamping groove 314 in a sliding mode. The clamping spring 372 is fixedly connected in the clamping groove 314, and the other end of the clamping spring 372 is fixedly connected with the clamping block 371.

[0062] The placing groove 121 of the groove bar 12 is aligned with the positioning block 35 and the groove 422 bar 12 is moved in the direction close to the positioning hole 311 until the side wall of the groove bar 12 abuts against the clamping block 371, and the groove 422 bar 12 is continuously moved, at this time, the side wall of the groove bar 12 presses the inclined surface of the clamping block 371 and drives the clamping piece 37 to move in the direction away from each other, at this time, the clamping spring 372 is compressed, until the clamping block 371 completely enters the clamping groove 314, at this time, the groove bar 12 enters the positioning hole 311, the clamping spring 372 restores the deformation and drives the clamping block 371 to move in the direction close to each other until the side of the clamping block 371 close to the groove bar 12 abuts against the side wall of the groove bar 12, and the installation of the groove bar 12 is completed.

[0063] With reference to Figure 3 , Figure 5 and Figure 6The upper side of the moving base 41 is provided with a moving ring 42 with an inner diameter equal to that of the top plate 1, the lower side of the moving ring 42 is inserted into the moving base 41, a through hole 421 with a thickness suitable for the top plate 1 is formed in one side of the moving ring 42 and is used for installing the top plate 1 in the inner diameter of the moving ring 42, and a vertical feeding groove 43 facing the moving ring 42 is fixedly connected to the side of the supporting plate 2 close to the through hole 421, the groove width of the feeding groove 43 is equal to the thickness of the top plate 1, and the groove bottom of the feeding groove 43 close to the moving ring 42 is inclined downward to the end close to the moving ring 42, and the height of the groove bottom of the feeding groove 43 close to the moving ring 42 is equal to the height of the lower side of the inner diameter of the moving ring 42.

[0064] Referring to Figure 5 and Figure 7 , a moving block 44 is inserted and slidably connected to the inner side wall of the side of the moving ring 42 opposite to the through hole 421, a moving groove 422 suitable for the moving block 44 is formed in the moving ring 42, a moving spring 45 is fixedly connected in the moving groove 422, and the other end of the moving spring 45 is fixedly connected to the end of the moving block 44 inserted in the moving groove 422. Moving rods 46 are inserted and slidably connected to the two sides of the moving groove 422, and the ends of the moving rods 46 close to each other are inclined to the side close to the moving block 44 and to the direction away from each other.

[0065] The ends of the moving rods 46 away from each other abut against abutting rods 47 perpendicular to the moving rods 46, and the ends of the abutting rods 47 close to the moving rods 46 are inclined to the end close to the moving rods 46 and to the side away from each other. The two sides of the moving ring 42 are provided with movable grooves 423 suitable for the inserted rods, the ends of the abutting rods 47 close to the moving rods 46 are inserted into the movable grooves 423, and pulling springs 48 are fixedly connected in the movable grooves 423, and the other ends of the pulling springs 48 are fixedly connected to the abutting rods 47.

[0066] When the top plate 1 is installed on the moving ring 42, the side wall of the top plate 1 extrudes the moving block 44 and drives the moving block 44 to move to the direction close to the moving groove 422, at this time, the two sides of the end of the moving block 44 in the moving groove 422 abut against and push the inclined surfaces on the moving rods 46 away from each other, at this time, the ends of the moving rods 46 away from each other extrude the inclined surfaces of the abutting rods 47 and push the abutting rods 47 to move away from the moving rods 46 and abut against the top plate 1, thereby fixing the top plate 1 in the moving ring 42 and improving the stability of the connection between the top plate 1 and the moving ring 42.

[0067] Referring to Figure 5 , Figure 6 and Figure 7The moving block 44 is provided as a cylindrical gear, one side of the moving ring 42 is provided with a rack 7, one end of the rack 7 is inserted into the moving groove 422 and is in sliding connection with the moving ring 42, the rack 7 is in mesh with the outer side wall of the moving block 44, one end of the moving block 44 inserted into the moving groove 422 is provided with an insertion hole 441 adapted to the moving rod 46, and the side of the moving rod 46 close to the moving block 44 is provided as an inclined surface close to the end of the moving block 44 and inclined to each other. When the end of the moving rod 46 close to each other is inserted into the insertion hole 441, the moving block 44 is rotated, the moving block 44 extrudes the inclined surface of the moving rod 46 and pushes the moving rod 46 out of the insertion hole 441. The transport seat 51 fixes the bottom plate 11 on the transport seat 51 in the same way.

[0068] The plurality of top plates 1 are placed in the feeding groove 43, when the through hole 421 on the moving ring 42 is aligned with one end of the feeding groove 43, the top plate 1 located at one end of the feeding groove 43 close to the moving ring 42 rolls along the inclined surface of the feeding groove 43 to the direction close to the moving ring 42, until it enters the moving ring 42 through the through hole 421 and abuts against the side wall of the moving ring 42, at this time the top plate 1 drives the moving block 44 to enter the moving groove 422, the teeth on the side wall of the moving block 44 are in mesh with and in sliding connection with the rack 7.

[0069] When the moving block 44 moves completely into the moving groove 422, the moving rod 46 moves away from each other and pushes one end of the abutting rod 47 to the outside of the moving ring 42, the spring 48 is compressed by pulling, when the moving seat 41 drives the moving ring 42 and the top plate 1 to move to the position that the top plate 1 is installed on the groove rod 12, the rack 7 is pushed to the direction close to the inside of the moving ring 42, at this time the moving block 44 is rotated under the drive of the rack 7, until the insertion hole 441 on the moving block 44 is located on the same straight line with the moving rod 46, at this time the spring 48 restores the deformation and pulls the abutting rod 47 to move to the direction close to the moving rod 46 and drives the end of the moving rod 46 close to each other to be inserted into the insertion hole 441, at this time the abutting rod 47 completely enters the moving ring 42, the top plate 1 is released from the fixing with the moving ring 42, so as to install the top plate 1 on the groove rod 12.

[0070] Referring to Figure 5 and Figure 8 The moving seat 41 is provided with a control member 8 for driving the moving ring 42 to rotate, the moving ring 42 is provided as a driven wheel, and the moving seat 41 is inserted and rotationally connected with a driving wheel 81 engaged with the moving ring 42, one side of the rotating seat is provided with a control motor 82, the output shaft of the control motor 82 penetrates through the moving seat 41 and is fixedly connected with the shaft center of one side of the driving shaft. The transport seat 51 drives the bottom plate 11 to rotate in the same structure. The control electrode drives the driving shaft to drive the moving ring 42 to rotate on the moving seat 41, until the position of the top plate 1 corresponds to the groove rod 12, so as to facilitate quick positioning and installation of the groove 315 rod 12, and improve the work efficiency.

[0071] Referring to Figure 4 and Figure 9 The positioning seat 31 includes the fixing plates 9 symmetrically arranged on both sides of the positioning seat 31 and used for fixing the groove rod 12, and mounting grooves 315 corresponding to the fixing plates 9 are arranged on both sides of the positioning seat 31. The fixing plates 9 are inserted into the mounting grooves 315 on the side close to each other and are in sliding connection with the mounting grooves 315. The mounting grooves 315 are fixedly connected with the mounting springs 91, and the other ends of the mounting springs 91 are fixedly connected with the fixing plates 9. The control rods 92 abutting against the side walls of the fixing plates 9 are arranged in the mounting grooves 315. The control rods 92 are inclined to the side close to each other and away from the third positioning hole 311 on the end away from the fixing rods 361. The threaded rods 93 are inserted into and rotationally connected with the positioning seat 31 on both sides. The threaded rods 93 pass through the ends close to each other of the control rods 92 and are fixedly connected with the control rods 92 on the one end. The nuts (not shown in the figure) are threadedly connected with the ends of the threaded rods 93 on the outer side of the positioning seat 31.

[0072] When the top plate 1 and the bottom plate 11 are fixed on the groove rod 12, the quartz boat needs to be taken off from the positioning seat 31. At this time, the threaded rods 93 are twisted to the direction away from each other. At this time, the control rods 92 are rotated to the direction close to each other under the driving of the threaded rods 93. At this time, the mounting springs 91 are pulled to the direction close to each other. Until the fixing plates 9 are completely inserted into the mounting grooves 315. At this time, the clamping blocks 371 are moved to the direction away from each other and the quartz boat is moved upward. Until the quartz boat is taken out upward.

[0073] S4, the connection between the top plate 1 and the groove rod 12 and the connection between the bottom plate 11 and the groove rod 12 are fixed, and the top plate 1 and the groove rod 12 are fixed on both sides to form a quartz boat.

[0074] The implementation principle of the quartz boat forming method in the embodiment of the application is as follows: after the size of the groove rod 12 is processed and determined, the size of the top plate 1 and the bottom plate 11 is determined and the top plate 1 and the bottom plate 11 are milled. At this time, the top plate 1, the bottom plate 11 and the groove rod 12 are assembled by the installation equipment. When assembling, the groove rod 12 is installed in the positioning hole 311 on the positioning seat 31. At this time, the top plate 1 is installed on the moving seat 41, and the bottom plate 11 is installed on the conveying seat 51. At this time, the top plate 1 and the bottom plate 11 are rotated by controlling the motor 82 to drive. Until the mounting holes 13 on the top plate 1 and the bottom plate 11 correspond to the groove rod 12. At this time, the bidirectional lead screw 61 drives the top plate 1 and the bottom plate 11 to move to the direction close to each other. Until the top plate 1 and the bottom plate 11 are inserted into the groove rod 12. The installation of the quartz boat is completed.

[0075] The above are the preferred embodiments of the application, which do not limit the protection scope of the application. Therefore, any equivalent changes made on the basis of the structure, shape and principle of the application should be covered by the protection scope of the application.

Claims

1. A method for forming a quartz boat, characterized in that: Includes the following steps: S1. Machining the grooved bar (12) and determining the dimensions of the grooved bar (12); S2. Determine the dimensions of the top plate (1) and bottom plate (11) and perform milling on the top plate (1) and bottom plate (11); S3. The top plate (1) and the bottom plate (11) are connected to each other by the grooved bar (12), including an installation device for installing the top plate (1), the bottom plate (11) and the grooved bar (12). The installation device includes a support plate (2). The upper side of the support plate (2) is provided with a positioning component (3) for positioning the grooved bar (12). One end of the upper side of the support plate (2) is provided with an installation component (4) for installing the top plate (1), and the end of the support plate (2) away from the installation component (4) is provided with a transport component (5) for transporting the bottom plate (11). The installation component (4) includes a movable seat (41) that is slidably connected to the support plate (2). The top plate (1) is detachably connected to the movable seat (41). The transport component (5) includes a transport seat (51) with the same structure as the movable seat (41). A drive component (6) for driving both to move simultaneously is provided between the movable seat (41) and the transport seat (51). S4. Fix the connection between the top plate (1) and the groove bar (12) and the connection between the bottom plate (11) and the groove bar (12) respectively to form a quartz boat; The positioning component (3) includes a positioning seat (31) disposed on the support plate (2) and arranged along the length direction of the support plate (2). The positioning seat (31) has multiple positioning holes (311) corresponding to the slotted rod (12) and arranged along the length direction of the positioning seat (31). The positions of the positioning holes (311) on the positioning seat (31) correspond to the positions of the slotted rod (12) mounted on the support plate (2). Both ends of the positioning hole (311) located in the middle are provided with snap-fit ​​pieces (37) for fixing the slotted rod (12). The remaining... The positioning hole (311) is provided with a fixing member (36) for fixing groove bar (12) at both ends. The positioning seat (31) is provided with a rotating rod (32) at both ends. The end of the rotating rod (32) away from the positioning seat (31) is fixedly connected to the support plate (2). The end of the rotating rod (32) close to the positioning seat (31) is provided with the same rotating shaft (33) which is rotatably connected. The rotating shaft (33) passes through the positioning seat (31) and is fixedly connected to the positioning seat (31). A positioning motor (34) is installed at one end of the rotating shaft (33). The slotted bars (12) are set to three, with two slotted bars (12) set opposite each other and the other slotted bar (12) located on the center line of the line connecting the two opposite slotted bars (12).

2. The method for forming a quartz boat according to claim 1, characterized in that: The fixing member (36) includes a fixing rod (361) inserted into the side of the positioning hole (311) away from the center of the opposite positioning hole (311). One end of the fixing rod (361) away from the corresponding positioning hole (311) is inserted into the positioning seat (31) and slidably connected to the positioning seat (31). The positioning seat (31) is provided with a driving member to drive the fixing rod (361) to move closer to the positioning hole (311).

3. The method for forming a quartz boat according to claim 2, characterized in that: The slot bar (12) has multiple placement slots (121) for placing silicon wafers on its sidewall. Both ends of the positioning hole (311) are provided with positioning blocks (35) that are adapted to the placement slots (121) on the slot bar (12) and fixedly connected to the positioning seat (31). The driving component includes a driving block (38) disposed on one side of the positioning blocks (35) away from each other. The positioning seat (31) has a receiving groove (312) adapted to the driving block (38). The driving block (38) is inserted into the receiving groove (312) and slidably connected to the sidewall of the receiving groove (312). A driving spring is fixedly connected to each receiving groove (312). 362), the other end of the drive spring (362) is fixedly connected to the drive block (38), the end of the fixing rod (361) inserted into the positioning seat (31) is bent toward each other, and the bent end of the fixing rod (361) is bent toward the positioning block (35) and inserted into the receiving groove (312). The side of the fixing rod (361) inserted into the receiving groove (312) and away from each other is provided with an inclined surface that is inclined toward the support plate (2) and toward the side that is close to each other. The positioning seat (31) is provided with a fixing groove (313) that is adapted to the fixing rod (361).

4. The method for forming a quartz boat according to claim 1, characterized in that: The snap-fit ​​component (37) includes snap-fit ​​blocks (371) disposed on both sides of the positioning hole (311). The snap-fit ​​block (371) is inclined in the direction away from the rotating shaft (33) and in the direction away from the rotating shaft (33). The positioning seat (31) is provided with snap-fit ​​grooves (314) adapted to the snap-fit ​​block (371). The ends of the snap-fit ​​blocks (371) that are away from each other are inserted into the corresponding snap-fit ​​grooves (314) and are slidably connected to the side wall of the snap-fit ​​grooves (314). Snap-fit ​​springs (372) are fixedly connected in the snap-fit ​​grooves (314). The snap-fit ​​springs (372) are fixedly connected to the snap-fit ​​blocks (371).

5. The method for forming a quartz boat according to claim 1, characterized in that: The movable base (41) is provided with a movable ring (42) for mounting the top plate (1). A movable block (44) is provided on one side wall inside the movable ring (42). A movable groove (422) adapted to the movable block (44) is opened on the movable ring (42). One end of the movable block (44) is inserted into the movable groove (422) and slidably connected to the side wall of the movable groove (422). A movable spring (45) is fixedly connected in the movable groove (422). The other end of the movable spring (45) is fixedly connected to the movable block (44). Movable rods (46) are inserted into and slidably connected on both sides of the movable groove (422) away from the movable block (44). The ends of the rods (46) that are close to each other are set as inclined surfaces that are closer to the moving block (44) and further away from each other. The other end of the moving rod (46) abuts against a contact rod (47) that is directed toward the inner diameter of the moving ring (42). The contact rod (47) is inserted into the moving ring (42) and slidably connected to the moving ring (42). The ends of the contact rods (47) that are close to the moving rod (46) are all set as inclined surfaces that are closer to the moving rod (46) and further away from each other. The end of the contact rod (47) that is inserted into the moving ring (42) is fixedly connected to a tension spring (48) that is fixedly connected to the moving ring (42).

6. The method for forming a quartz boat according to claim 5, characterized in that: The movable block (44) is configured as a gear. A rack (7) is inserted into and slidably connected to one side of the movable ring (42). The rack (7) is inserted into the movable groove (422) and meshes with the movable block (44). The other end of the rack (7) is located outside the movable ring (42). A insertion hole (441) adapted to the movable rod (46) is provided on the side wall of the movable block (44). The side wall of the movable rod (46) near the end of the movable block (44) is configured as an inclined surface. When the movable rod (46) is inserted into the insertion hole (441), the movable block (44) is rotated. At this time, the side wall of the insertion hole (441) presses the inclined surface on the movable rod (46) and pushes the movable rod (46) out of the insertion hole (441).

7. The method for forming a quartz boat according to claim 6, characterized in that: The top plate (1) and the bottom plate (11) have the same thickness. Both ends of one side of the bottom plate (11) are provided with feeding grooves (43). The feeding grooves (43) are located on the side of the moving ring (42) away from the moving block (44). The width of the feeding groove (43) is adapted to the thickness of the top plate (1). The side of the feeding groove (43) close to the moving ring (42) is inclined downward. The lower end height of the feeding groove (43) close to the moving ring (42) is equal to the lower end height of the moving ring (42). The side of the moving ring (42) close to the feeding groove (43) is provided with a through hole (421) with the same thickness as the top plate (1). The inner diameter of the moving ring (42) is equal to the diameter of the top plate (1). The moving seat (41) is provided with a control component (8) to drive the moving ring (42) to rotate.

8. The method for forming a quartz boat according to claim 1, characterized in that: Two positioning holes (311) are positioned opposite each other, and a fixing plate (9) is provided on one side of the positioning hole (311) located in the middle. The positioning seat (31) has a mounting groove (315) adapted to the fixing plate (9). The ends of the fixing plates (9) that are close to each other are inserted into the mounting groove (315) and are slidably connected to the mounting groove (315). The ends of the fixing plates (9) that are inserted into the mounting groove (315) are fixedly connected to a mounting spring (91). The other end of the mounting spring (91) is connected to the mounting plate (91). The inner wall of the mounting groove (315) is fixedly connected. Each mounting groove (315) is provided with a control rod (92) with one end abutting against the side wall of the fixing plate (9). The ends of the control rods (92) that are close to each other are inclined towards the side of the support plate (2). A screw (93) passes through the end of the control rod (92) away from the fixing plate (9) and is fixedly connected to the control rod (92) on the positioning seat (31). A nut is threadedly connected to the end of the screw (93) located outside the positioning seat (31).

9. A quartz boat prepared using the quartz boat forming method according to claim 1, characterized in that: The system includes a top plate (1) and a bottom plate (11) arranged opposite to each other. A plurality of grooved rods (12) are provided between the top plate (1) and the bottom plate (11). Mounting holes (13) adapted to the grooved rods (12) are provided on both the top plate (1) and the bottom plate (11). Both ends of the grooved rods (12) are inserted into the mounting holes (13). A placement groove (121) for placing a lens is provided on the side of the grooved rod (12) near the central axis of the top plate (1). The width of the placement groove (121) on the side of the grooved rod (12) near the top plate (1) is smaller than the width of the placement groove (121) on the side of the grooved rod (12) near the bottom plate (11).

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