An adjustable dual-frequency vector impedance matching structure and device

Abstract

The application discloses a kind of adjustable dual-frequency vector impedance matching structure and device, the structure includes: high-frequency high-power path, high-frequency low-power path, adjustable dual-frequency vector impedance matching device and load;The high-frequency high-power path and high-frequency low-power path simultaneously provide power for load, the input end of the load has high-frequency high-power path for it to provide drive, also has high-frequency low-power path for it to provide drive;The adjustable dual-frequency vector impedance matching device simultaneously matches high-frequency vector impedance between high-frequency high-power path and load, between high-frequency low-power path and load, and is used to isolate high-frequency power from high-frequency high-power path, reduce its loading to high-frequency low-power path;The application reduces the high-frequency impedance matching cost of adjustable dual-frequency vector impedance matching structure, reduces the workload when debugging, improves safety.

Description

Technical Field

[0001] This invention relates to the field of electronic technology, and in particular to an adjustable dual-frequency vector impedance matching structure and device. Background Technology

[0002] Vector impedance loads that carry high-frequency power in industrial production and scientific research all have different, variable, and potentially difficult-to-estimate impedance characteristics. Sometimes, it is necessary to achieve impedance matching in dual-frequency mode. For example, a high-frequency semi-inductor antenna (load) used to drive the ionization of plasma inside a pulse ionization device has a huge difference in high-frequency vector impedance inside and outside the high-frequency, high-power pulse width. It is designed to be driven by high-frequency power amplifier links with different operating frequencies. Therefore, an adjustable dual-frequency vector impedance matching structure and device are required.

[0003] To implement an adjustable dual-frequency vector impedance matching structure and device, it is necessary to isolate high-frequency power from high-frequency high-power paths and reduce its loading onto high-frequency low-power paths, and vice versa. This is because both high-frequency high-power and high-frequency low-power paths are cascaded at the load input. If an impedance mismatch occurs between the high-frequency high-power path and the load, or between the high-frequency low-power path and the load, power reflection will occur on each. When power reflection occurs, since both are cascaded at the load input, the reflection from one will affect the other.

[0004] The difficulty in implementing an adjustable dual-frequency vector impedance matching structure and device lies in the fact that, as it is an adjustable dual-frequency vector impedance matching structure and device, its high-frequency impedance matching cost is higher compared to achieving high-frequency vector impedance matching with a single high-frequency power amplifier link and a single load. The amount of work required to debug and achieve impedance matching is usually large. At the same time, due to the actual needs and safety considerations in industrial production and scientific research, some high-frequency and high-power equipment needs to operate suspended at high voltage and / or negative high voltage potentials. Therefore, it is necessary to introduce a high-voltage isolation structure and / or device that can transmit high-frequency power. Summary of the Invention

[0005] This invention addresses the problems existing in the prior art by proposing an adjustable dual-frequency vector impedance matching structure and device. The aim is to reduce the high-frequency impedance matching cost of the adjustable dual-frequency vector impedance matching structure, reduce the workload during debugging, and improve safety.

[0006] To solve its technical problems, the present invention proposes the following technical solutions:

[0007] An adjustable dual-frequency vector impedance matching structure includes: a high-frequency high-power path 10, a high-frequency low-power path 20, an adjustable dual-frequency vector impedance matching device 30, and a load 40.

[0008] Its features are: the high-frequency high-power path 10 and the high-frequency low-power path 20 simultaneously provide power to the load 40, and the input terminal of the load 40 is driven by both the high-frequency high-power path 10 and the high-frequency low-power path 20.

[0009] The adjustable dual-frequency vector impedance matching device 30 includes an adjustable high-power vector impedance matching path 301 cascaded between the high-frequency high-power path 10 and the load 40, and an adjustable low-power high-isolation vector impedance matching path 302 cascaded between the high-frequency low-power path 20 and the load 40. The adjustable high-power vector impedance matching path 301 is used to match the high-frequency vector impedance between the high-frequency high-power path 10 and the load 40. The adjustable low-power high-isolation vector impedance matching path 302 is used to match the high-frequency vector impedance between the high-frequency low-power path 20 and the load 40, and to isolate the high-frequency power from the high-frequency high-power path 10, thereby reducing the load from the high-frequency high-power path 10 on the high-frequency low-power path 20.

[0010] Furthermore, the adjustable high-power vector impedance matching path 301 includes an isolation transformer 311, a parallel adjustable vacuum capacitor 321, an impedance transformer 331, a series adjustable vacuum capacitor 341, and a series compensation inductor 351; the isolation transformer 311, the parallel adjustable vacuum capacitor 321, the impedance transformer 331, the series adjustable vacuum capacitor 341, and the series compensation inductor 351 in the adjustable high-power vector impedance matching path 301 are cascaded sequentially from the high-frequency high-power path 10 to the load 40.

[0011] Furthermore, the adjustable low-power high-isolation vector impedance matching path 302 includes an impedance-isolation transformer 312, an adjustable vacuum capacitor 322 connected in series, an adjustable vacuum capacitor 332 connected in parallel, and a compensation inductor 342 connected in series.

[0012] The impedance-isolation transformer 312, series adjustable vacuum capacitor 322, parallel adjustable vacuum capacitor 332, and series compensation inductor 342 in the adjustable low-power high-isolation vector impedance matching path 302 are cascaded in sequence from the high-frequency low-power path 20 to the load 40.

[0013] Furthermore, the isolation transformer 311 in the adjustable high-power vector impedance matching path 301 allows the adjustable high-power vector impedance matching path 301 to operate suspended at a high voltage or negative high voltage potential; the impedance-isolation transformer 312 in the adjustable low-power high-isolation vector impedance matching path 302 allows the adjustable low-power high-isolation vector impedance matching path 302 to operate suspended at a high voltage or negative high voltage potential.

[0014] Furthermore, when the adjustable high-power vector impedance matching path 301 in the adjustable dual-frequency vector impedance matching device 30 fully achieves high-frequency vector impedance matching, the parallel adjustable vacuum capacitor (321) capacitor C1, the impedance transformer 331 turns ratio coefficient N, the series adjustable vacuum capacitor 341 capacitor C2, and the series compensation inductor 351 total inductance L are all connected in this path. 11 +L 12 The relationship given by formula (1) should be satisfied:

[0015]

[0016] Among them, Z L The vector impedance of the load (40) is composed of the following components as shown in formula (2):

[0017] Z L =R L +jωL L (2)

[0018] In formula (1), R L It is the equivalent resistance of the load of 40, L L ω is the equivalent inductance of load 40, and the values ​​of both vary depending on the different operating states of load 40; ω is the high-frequency angular frequency, which corresponds one-to-one with the high-frequency frequency f, as shown in formula (3):

[0019] ω=2πf (3)

[0020] N is the turns ratio coefficient of impedance transformer 331, which is given by the quotient of the number of turns of the primary and secondary coils of T2, as shown in formula (4):

[0021]

[0022] Z0 is the characteristic impedance of the high-frequency high-power path 10, and is usually also the characteristic impedance of the high-frequency low-power path 20. It is a known value because the high-frequency high-power path 10 and the high-frequency low-power path 20 usually use standard port outputs with characteristic impedances of 50, 75, or 100 ohms, and in most cases, they will have the same value. The high-frequency high-power operating angular frequency ω1 is a known value, ω1 = 2πf1, because f1, which corresponds to it, is a known value. The latter is the high-frequency operating frequency at which the high-frequency high-power path 10 wants to achieve high-frequency vector impedance matching with the load 40.

[0023] At a certain high-frequency operating frequency f1 and a load of 40, the high-frequency vector impedance Z L Within the range, the total inductance L of the appropriate series compensation inductor 351 can be selected. 11 +L 12Based on this, by adjusting the parallel adjustable vacuum capacitor 321 (capacitor C1) and the series adjustable vacuum capacitor 341 (capacitor C2) in the adjustable high-power vector impedance matching path 301, the impedance Z of the load 40Ω can be matched. L Matching.

[0024] At this point, by adjusting the capacitance C1 of the adjustable vacuum capacitor (321) connected in parallel, the impedance Z of the load (40) can be independently adjusted. L The equivalent resistance R L Matching.

[0025] Furthermore, the turns ratio coefficient of the impedance transformer 331 should preferably be selected as a value or an approximation that satisfies the relationship given by formula (5):

[0026]

[0027] At this point, by adjusting the series-connected adjustable vacuum capacitor 341 and capacitor C2, the impedance Z of the load 40Ω can be achieved independently or approximately independently. L Equivalent inductance L L Matching.

[0028] Furthermore, when the adjustable low-power high-isolation vector impedance matching path 302 in the adjustable dual-frequency vector impedance matching device 30 fully achieves high-frequency vector impedance matching, the total inductance L of the impedance-isolation transformer 312 turns ratio n, the series adjustable vacuum capacitor 322 capacitor C3, the parallel adjustable vacuum capacitor 332 capacitor C4, and the series compensation inductor (342) is... 21 +L 22 The relationship given by formula (6) should be satisfied:

[0029]

[0030] The turns ratio coefficient n is achieved by an impedance transformer T3 with high-voltage isolation function, and n is given by the quotient of the number of turns of the primary and secondary coils of T3, as shown in formula (7):

[0031]

[0032] At a certain high-frequency operating frequency f2 and the high-frequency vector impedance Z of the load (40), L Within the range, the total inductance L of the appropriate series compensation inductor 342 can be selected. 21 +L 22 Based on this, by adjusting the series adjustable vacuum capacitor 322 (C3) and the parallel adjustable vacuum capacitor 332 (C4) in the adjustable low-power, high-isolation vector impedance matching path 302, the impedance Z of the load 40Ω can be matched. L Matching.

[0033] Furthermore, the series-connected adjustable vacuum capacitor 322 and the parallel-connected adjustable vacuum capacitor 332 should each be implemented using a single commercially available adjustable vacuum capacitor. Their capacitance and withstand voltage performance should be comparable to those of commercially available adjustable vacuum capacitors, thereby reducing the manufacturing cost of the adjustable low-power high-isolation vector impedance matching path 302 and facilitating the debugging of the adjustable low-power high-isolation vector impedance matching path 302.

[0034] An adjustable dual-frequency vector impedance matching device is characterized in that: the adjustable dual-frequency vector impedance matching device 30 simultaneously matches the high-frequency vector impedance between the high-frequency high-power path 10 and the load 40, and between the high-frequency low-power path 20 and the load 40, and isolates the high-frequency power from the high-frequency high-power path 10, reducing its load on the high-frequency low-power path 20; specifically: the adjustable dual-frequency vector impedance matching device 30 is provided with an adjustable high-power vector impedance matching path 301 cascaded between the high-frequency high-power path 10 and the load 40, and an adjustable low-power high-isolation vector impedance matching path 302 cascaded between the high-frequency low-power path 20 and the load 40; the adjustable high-power vector impedance matching path 301 is used to match the high-frequency vector impedance between the high-frequency high-power path 10 and the load 40; the adjustable low-power high-isolation vector impedance matching path 302 is used to match the high-frequency vector impedance between the high-frequency low-power path 20 and the load 40, and isolates the high-frequency power from the high-frequency high-power path 10, reducing the load of the high-frequency high-power path 10 on the high-frequency low-power path 20.

[0035] Further, the adjustable high-power vector impedance matching path 301 includes an isolation transformer 311, a parallel adjustable vacuum capacitor 321, an impedance transformer 331, a series adjustable vacuum capacitor 341, and a series compensation inductor 351; the isolation transformer 311, the parallel adjustable vacuum capacitor 321, the impedance transformer 331, the series adjustable vacuum capacitor 341, and the series compensation inductor 351 in the adjustable high-power vector impedance matching path 301 are cascaded sequentially from the high-frequency high-power path 10 to the load 40; the adjustable low-power high-isolation vector impedance matching path 302 includes an impedance-isolation transformer 312, a series adjustable vacuum capacitor 322, a parallel adjustable vacuum capacitor 332, and a series... The adjustable low-power high-isolation vector impedance matching path 302 is connected to a compensation inductor 342; the impedance-isolation transformer 312, the series adjustable vacuum capacitor 322, the parallel adjustable vacuum capacitor 332, and the series compensation inductor 342 in the adjustable low-power high-isolation vector impedance matching path 302 are cascaded in sequence from the high-frequency low-power path 20 to the load 40; the isolation transformer 311 in the adjustable high-power vector impedance matching path 301 allows the adjustable high-power vector impedance matching path 301 to operate at a high voltage or negative high voltage potential; the impedance-isolation transformer 312 in the adjustable low-power high-isolation vector impedance matching path 302 allows the adjustable low-power high-isolation vector impedance matching path 302 to operate at a high voltage or negative high voltage potential.

[0036] Advantages and effects of the present invention

[0037] 1. In the adjustable dual-frequency vector impedance matching device 30 provided in this embodiment of the invention, compared with any other path structure consisting of a set of parallel adjustable vacuum capacitors, a set of series adjustable vacuum capacitors, and an impedance transformer with a suitable turns ratio, and any path structure consisting of a set of parallel adjustable vacuum capacitors and a set of series adjustable vacuum capacitors, the design of the isolation transformer 311, parallel adjustable vacuum capacitor 321, impedance transformer 331, series adjustable vacuum capacitor 341, and series compensation inductor 351 cascaded sequentially from the high-frequency high-power path 10 to the load 40, provided in this embodiment of the invention, is beneficial for achieving impedance matching between the high-frequency high-power path 10 and the load 40, and reducing the impedance of the parallel adjustable vacuum capacitor 321 and the series adjustable vacuum capacitor 351. The required capacitance and the number of adjustable vacuum capacitors that actually constitute the corresponding capacitor, the electrical parameters required for the balancing isolation transformer 311, the parallel adjustable vacuum capacitor 321, the impedance transformer 331, the series adjustable vacuum capacitor 341 and the series compensation inductor 351, as well as the requirements for their withstand voltage and current carrying performance, thereby reducing the cost of achieving high-frequency impedance matching between the high-frequency high-power path 10 and the load 40, and allowing the matching of the equivalent resistance of the load 40 to be achieved independently by adjusting the capacitor C1 of the parallel adjustable vacuum capacitor 321, and the matching of the equivalent inductance of the load 40 to be achieved independently or approximately independently by adjusting the capacitor C2 of the series adjustable vacuum capacitor 341, thereby reducing the workload of impedance matching debugging, and allowing the adjustable high-power vector impedance matching path 301 to operate floating at high voltage or negative high voltage potential;

[0038] 2. In the adjustable low-power high-isolation vector impedance matching path 302 provided in this embodiment of the invention, when the impedance-isolation transformer 312, series adjustable vacuum capacitor 322, parallel adjustable vacuum capacitor 332, and series compensation inductor 342 are cascaded sequentially from the high-frequency low-power path 20 to the load 40, it is beneficial to achieve impedance matching between the high-frequency low-power path 20 and the load 40. The capacitance required to control the series adjustable vacuum capacitor 322 and the parallel adjustable vacuum capacitor 332 is comparable to that of commonly available adjustable vacuum capacitors. Balancing the impedance-isolation transformer 312, series adjustable vacuum capacitor 322, and parallel adjustable vacuum capacitor 342... The electrical parameters required for capacitor 332 and series compensation inductor 342, as well as the requirements for their withstand voltage and current carrying performance, are determined to reduce the cost of high-frequency impedance matching between high-frequency low-power path 20 and load 40, reduce the workload of impedance matching debugging, and simultaneously meet the high-frequency power isolation requirements of high-frequency high-power path 10 cascaded to high-frequency low-power path 20 via adjustable high-power vector impedance matching path 301 and adjustable low-power high-isolation vector impedance matching path 302. Furthermore, the adjustable low-power high-isolation vector impedance matching path 302 is allowed to operate at high voltage or negative high voltage potential, that is, the adjustable dual-frequency vector impedance matching device 30 is allowed to operate at high voltage or negative high voltage potential. Attached Figure Description

[0039] Figure 1 This is a schematic diagram of an adjustable dual-frequency vector impedance matching structure according to the present invention;

[0040] Figure 2 This is a circuit diagram of an adjustable dual-frequency vector impedance matching device according to the present invention;

[0041] Figure 3 A structural schematic diagram was selected for this invention. Detailed Implementation

[0042] Design principle of the invention

[0043] 1. Design Challenges of this Invention: The challenge lies in finding the optimal matching structure for the adjustable dual-frequency vector impedance matching structure. The optimal matching structure must simultaneously meet three conditions: low cost for high-frequency impedance matching, ease of adjustment, and high safety.

[0044] To achieve impedance matching between load 40 and the high-frequency power path (10 or 20 in this case) at the lowest cost, this design employs a set of parallel adjustable capacitors (321 or 332, collectively referred to as "parallel capacitors", denoted as 321 and / or C). p ) and a set of series adjustable capacitors (341 or 322, collectively referred to as "series capacitors", denoted as 341 and / or C) sThis provides the simplest and lossless dual-capacitor adjustable matching structure, allowing for the cascading of an impedance transformer (331 or 312, collectively referred to as an "impedance transformer," denoted as 331, with its turns ratio factor denoted as n) at different topological locations within this structure, or without cascading any impedance transformer. (See attached instruction manual.) Figure 3 It can be seen that, based on the relative positions of the series and parallel capacitors in the above-mentioned adjustable matching structure with two capacitors and the presence or absence of an impedance transformer, there are a total of 8 possible combinations. Among these 8 combinations, only 2 are the optimal matching structures, while the other 6 are unacceptable. The difficulty lies in finding the optimal matching structure that simultaneously satisfies all three conditions.

[0045] 2. This invention determines the optimal matching structure using four criteria: three termination conditions and one preferred reference condition. The three termination conditions mean that if a structure meets the condition of any one of them, it cannot be accepted. These three termination conditions are of equal priority, with each having the highest priority. The last preferred reference condition has the second highest priority. The condition for the optimal matching structure in this invention is: series capacitor C... s Or parallel capacitor C p The capacitance requirement does not fall under any of the three termination conditions; or the series capacitor C s Or parallel capacitor C p The capacitance requirement does not fall under any of the three termination items, and the series capacitor C s Or parallel capacitor C p One of them meets the criteria of the preferred reference item. The three termination items are: first, series capacitor C s Or parallel capacitor C p The capacitance requirement cannot be too large, because a large capacitor will result in a large size and high cost; secondly, the series capacitor C s Or parallel capacitor C p The capacitance requirement cannot be too small, because if the capacitor is too small, it cannot be purchased on the market, and corresponding components often need to be customized, resulting in high cost and long construction period. Alternatively, multiple adjustable vacuum capacitors can be purchased and connected in series to realize each group of capacitors, which costs more money and is not easy to adjust; third, the series capacitor C s Or parallel capacitor C p The withstand voltage cannot be too high, even with the series capacitor C s Or parallel capacitor C p The capacity requirement is neither too large nor too small, but excessively high withstand voltage is also undesirable. The reason for excessively high withstand voltage is due to certain combinations of 321, 331, 341 (or 312, 322, 332) structures, which can lead to excessively high withstand voltage. One preferred reference item is: the item being adjusted is singular, meaning it is simply adjusting to match the equivalent resistance R of the load 40. L (After optimization, only debugging remains to match the equivalent resistance R) LOr simply adjust to match the equivalent inductance L of the load 40. L (After optimization, only debugging remains to match the equivalent inductance L) L If the item being debugged is the equivalent resistance R L and equivalent inductance L L (If it cannot be optimized, then the two items to be debugged are not suitable for the preferred reference items.)

[0046] 3. Design principle of the adjustable high-power vector impedance matching path 301 of this invention: as follows Figure 3 As shown, structure ③ is the design of this invention 301, and its combination is as follows: parallel capacitor 321, impedance transformer 331 and series capacitor 341 are cascaded in sequence from high-frequency high-power path 10 to load 40. The qualitative analysis of this preferred design is as follows:

[0047] First, match the required series capacitor C. s Parallel capacitor C p The capacitance is lower than that of structure ①, among which the series capacitor C s Compared to structure ②, the capacitance is also lower; although it is lower than that of structures ① and ②, it is not the lowest, but rather relative to the largest capacitance. Therefore, the series capacitor C is lower. s Parallel capacitor C p All of them fall into the category of being neither too large nor too small, and none of them belong to the first two of the three termination items;

[0048] Secondly, this structure does not have very high pressure resistance, nor is it the last of the three termination items;

[0049] Third, match the required parallel capacitor C. p The capacity is only related to the equivalent resistance R of the load. L Related to this, it can independently match the equivalent resistance of the load; the series capacitance required for matching is almost identical to the equivalent inductance L. L Relatedly, it can also be matched almost independently to the equivalent inductance of the load. Based on the series capacitor C in structure ③ s In terms of capacity requirements, although the denominator includes the equivalent resistance R... L However, the second term in the denominator is negligible compared to the first term, so the series capacitor C needs to be adjusted. s It only depends on the equivalent inductance.

[0050] 4. The design principle of the adjustable low-power vector impedance matching path 302 of this invention, such as... Figure 3As shown, structure ⑥ is the design of this invention 302, and its combination is as follows: impedance transformer 331 (impedance-isolation transformer 312 in this embodiment 302), series capacitor 341 (322 in this embodiment 302), and parallel capacitor 321 (332 in this embodiment 302) are cascaded sequentially from the high-frequency low-power path 20 to the load 40. The qualitative analysis of this preferred configuration is as follows:

[0051] First, the required series and parallel capacitor capacitance for matching is further reduced based on structure ⑤, but it does not fall into the category of excessively low capacitance; rather, the capacitance is within a moderate range. The capacitor size is relatively small and the cost is low, which is one of the advantages.

[0052] Secondly, for high-frequency, low-power circuits, the required series and parallel capacitor values ​​and their voltage ratings are reasonably chosen and balanced, and can be easily achieved using common single adjustable vacuum capacitors available on the market. The voltage ratings are within a reasonable range, which is the second advantage.

[0053] Third, regarding the loss of independence in the matching of load resistance and equivalent inductance, although this condition does not fall within the scope of preferred reference conditions, since this condition is not the first priority, and none of the three termination items with the first priority have this structure, it meets the preferred conditions.

[0054] 5. The principle that the other six structures ①, ②, ④, ⑤, ⑦, and ⑧ are unacceptable. For example... Figure 3 As shown:

[0055] Structure ① requires an extremely large parallel capacitor (unacceptable), meeting the first termination condition; the required series capacitor is also very large, and its voltage withstand capability is also high, meeting the second termination condition, therefore it is not feasible. Further qualitative analysis: Although the structure is simple and requires no impedance transformer; the required parallel capacitor is only related to the equivalent resistance of the load and can be matched independently based on the equivalent resistance, the required parallel capacitor is extremely large (unacceptable); the required series capacitor is also very large, and its voltage withstand capability is also high; the matching condition cannot be met at higher frequencies and / or when the sum of the load inductance and the series compensation inductance is small.

[0056] Although structure ② has a lower series capacitor capacity, the required parallel capacitor capacity (321 or 332) for matching is larger than that of structure ①, making it the first termination item and therefore unacceptable. Further qualitative analysis: The required series capacitor capacity for matching is lower than that of structure ①; and similarly, the required parallel capacitor capacity is only related to the equivalent resistance of the load, allowing for independent matching based on the load's equivalent resistance. Furthermore, the required series capacitor capacity is almost entirely related to the equivalent inductance, allowing for almost independent matching based on the load's equivalent inductance as well. While matching can be performed independently based on the load's equivalent resistance, this is a second priority and therefore not a prerequisite. The required parallel capacitor capacity is larger than that of structure ①, making it the first termination item. Therefore, despite the ability to independently match the load's equivalent resistance, this structure remains undesirable.

[0057] Structure ④ has extremely high voltage withstand requirements for the series capacitor during matching, so it is also unacceptable and falls under the third termination category. Further qualitative analysis is as follows: The required series capacitors 341 or 322 and parallel capacitors 321 or 332 are lower than those of structure ①, with the series capacitor also lower than those of structures ② and ③, which is one advantage; the required parallel capacitor capacity is only related to the equivalent resistance of the load, allowing for independent matching based on the load's equivalent resistance, which is another advantage; the required series capacitor is almost entirely related to the equivalent inductance, allowing for almost independent matching based on the load's equivalent inductance, which is a third advantage. However, despite these three advantages, the extremely high voltage withstand requirements for the series capacitor during matching make it the third termination category and therefore unacceptable.

[0058] Structure ⑤ places extremely high voltage withstand requirements on the series and parallel capacitors during matching, falling under the third termination condition. Furthermore, it loses independence in matching load resistance and equivalent inductance, making debugging difficult and failing to meet the conditions of the fourth preferred reference condition. Further qualitative analysis is as follows: Although the structure is simple and requires no impedance transformer, and the matching conditions are easily achieved for most applications, and the required series and parallel capacitor capacities are greatly reduced, this structure still places extremely high voltage withstand requirements on the series and parallel capacitors during matching. Meeting one of the termination conditions disqualifies it from being a preferred condition. Additionally, the loss of independence in matching load resistance and equivalent inductance makes debugging difficult, thus it is also unacceptable.

[0059] Structure ⑦ has extremely high voltage requirements for the series capacitors 341 or 332 and the parallel capacitors 321 or 332 during matching, making it unacceptable for high-frequency, high-power paths. For high-frequency, low-power paths, the required capacitance of the series capacitors 341 or 332 and the parallel capacitors 321 or 332 is very low, often necessitating custom-made components (high cost, long lead time) or the purchase of multiple adjustable vacuum capacitors in series to achieve each group of capacitors (more expensive, difficult to adjust). Although the required series capacitor capacitance is further reduced compared to structure ⑤, it meets the third termination condition in some cases and the second termination condition in others, thus remaining unacceptable.

[0060] Structure ⑧ has extremely high voltage requirements for the series and parallel capacitors during matching, making it unacceptable for high-frequency, high-power paths. For high-frequency, low-power paths, the required parallel capacitor capacity is very low, often requiring custom-made components (high cost and long lead time), or purchasing multiple adjustable vacuum capacitors in series to achieve each group of capacitors (more expensive and difficult to adjust). Although the required parallel capacitor capacity is further reduced compared to structure ⑤, it meets the third termination condition in some cases and the second termination condition in others, so it is also unacceptable.

[0061] Based on the above principles, this invention designs an adjustable dual-frequency vector impedance matching structure, as follows: Figure 1 , Figure 2 As shown, it includes: a high-frequency high-power path 10, a high-frequency low-power path 20, an adjustable dual-frequency vector impedance matching device 30, and a load 40;

[0062] Its features are: the high-frequency high-power path 10 and the high-frequency low-power path 20 simultaneously provide power to the load 40, and the input terminal of the load 40 is driven by both the high-frequency high-power path 10 and the high-frequency low-power path 20.

[0063] The adjustable dual-frequency vector impedance matching device 30 includes an adjustable high-power vector impedance matching path 301 cascaded between the high-frequency high-power path 10 and the load 40, and an adjustable low-power high-isolation vector impedance matching path 302 cascaded between the high-frequency low-power path 20 and the load 40. The adjustable high-power vector impedance matching path 301 is used to match the high-frequency vector impedance between the high-frequency high-power path 10 and the load 40. The adjustable low-power high-isolation vector impedance matching path 302 is used to match the high-frequency vector impedance between the high-frequency low-power path 20 and the load 40, and to isolate the high-frequency power from the high-frequency high-power path 10, thereby reducing the load from the high-frequency high-power path 10 on the high-frequency low-power path 20.

[0064] Furthermore, the adjustable high-power vector impedance matching path 301 includes an isolation transformer 311, a parallel adjustable vacuum capacitor 321, an impedance transformer 331, a series adjustable vacuum capacitor 341, and a series compensation inductor 351; the isolation transformer 311, the parallel adjustable vacuum capacitor 321, the impedance transformer 331, the series adjustable vacuum capacitor 341, and the series compensation inductor 351 in the adjustable high-power vector impedance matching path 301 are cascaded sequentially from the high-frequency high-power path 10 to the load 40.

[0065] Furthermore, the adjustable low-power high-isolation vector impedance matching path 302 includes an impedance-isolation transformer 312, an adjustable vacuum capacitor 322 connected in series, an adjustable vacuum capacitor 332 connected in parallel, and a compensation inductor 342 connected in series.

[0066] The impedance-isolation transformer 312, series adjustable vacuum capacitor 322, parallel adjustable vacuum capacitor 332, and series compensation inductor 342 in the adjustable low-power high-isolation vector impedance matching path 302 are cascaded in sequence from the high-frequency low-power path 20 to the load 40.

[0067] Furthermore, the isolation transformer 311 in the adjustable high-power vector impedance matching path 301 allows the adjustable high-power vector impedance matching path 301 to operate suspended at a high voltage or negative high voltage potential; the impedance-isolation transformer 312 in the adjustable low-power high-isolation vector impedance matching path 302 allows the adjustable low-power high-isolation vector impedance matching path 302 to operate suspended at a high voltage or negative high voltage potential.

[0068] Furthermore, when the adjustable high-power vector impedance matching path 301 in the adjustable dual-frequency vector impedance matching device 30 fully achieves high-frequency vector impedance matching, the parallel adjustable vacuum capacitor (321) capacitor C1, the impedance transformer 331 turns ratio coefficient N, the series adjustable vacuum capacitor 341 capacitor C2, and the series compensation inductor 351 total inductance L are all connected in this path. 11 +L 12 The relationship given by formula (1) should be satisfied:

[0069]

[0070] Among them, Z L The vector impedance of the load (40) is composed of the following components as shown in formula (2):

[0071] Z L =R L +jωL L (2)

[0072] In formula (1), R L It is the equivalent resistance of the load of 40, LL ω is the equivalent inductance of load 40, and the values ​​of both vary depending on the different operating states of load 40; ω is the high-frequency angular frequency, which corresponds one-to-one with the high-frequency frequency f, as shown in formula (3):

[0073] ω=2πf (3)

[0074] N is the turns ratio coefficient of impedance transformer 331, which is given by the quotient of the number of turns of the primary and secondary coils of T2, as shown in formula (4):

[0075]

[0076] Z0 is the characteristic impedance of the high-frequency high-power path 10, and is usually also the characteristic impedance of the high-frequency low-power path 20. It is a known value because the high-frequency high-power path 10 and the high-frequency low-power path 20 usually use standard port outputs with characteristic impedances of 50, 75, or 100 ohms, and in most cases, they will have the same value. The high-frequency high-power operating angular frequency ω1 is a known value, ω1 = 2πf1, because f1, which corresponds to it, is a known value. The latter is the high-frequency operating frequency at which the high-frequency high-power path 10 wants to achieve high-frequency vector impedance matching with the load 40.

[0077] At a certain high-frequency operating frequency f1 and a load of 40, the high-frequency vector impedance Z L Within the range, the total inductance L of the appropriate series compensation inductor 351 can be selected. 11 +L 12 Based on this, by adjusting the parallel adjustable vacuum capacitor 321 (capacitor C1) and the series adjustable vacuum capacitor 341 (capacitor C2) in the adjustable high-power vector impedance matching path 301, the impedance Z of the load 40Ω can be matched. L Matching.

[0078] At this point, by adjusting the capacitance C1 of the adjustable vacuum capacitor (321) connected in parallel, the impedance Z of the load (40) can be independently adjusted. L The equivalent resistance R L Matching.

[0079] Furthermore, the turns ratio coefficient of the impedance transformer 331 should preferably be selected as a value or an approximation that satisfies the relationship given by formula (5):

[0080]

[0081] At this point, by adjusting the series-connected adjustable vacuum capacitor 341 and capacitor C2, the impedance Z of the load 40Ω can be achieved independently or approximately independently. L Equivalent inductance L L Matching.

[0082] Furthermore, when the adjustable low-power high-isolation vector impedance matching path 302 in the adjustable dual-frequency vector impedance matching device 30 fully achieves high-frequency vector impedance matching, the total inductance L of the impedance-isolation transformer 312 turns ratio n, the series adjustable vacuum capacitor 322 capacitor C3, the parallel adjustable vacuum capacitor 332 capacitor C4, and the series compensation inductor (342) is... 21 +L 22 The relationship given by formula (6) should be satisfied:

[0083]

[0084] The turns ratio coefficient n is achieved by an impedance transformer T3 with high-voltage isolation function, and n is given by the quotient of the number of turns of the primary and secondary coils of T3, as shown in formula (7):

[0085]

[0086] At a certain high-frequency operating frequency f2 and the high-frequency vector impedance Z of the load (40), L Within the range, the total inductance L of the appropriate series compensation inductor 342 can be selected. 21 +L 22 Based on this, by adjusting the series adjustable vacuum capacitor 322 (C3) and the parallel adjustable vacuum capacitor 332 (C4) in the adjustable low-power, high-isolation vector impedance matching path 302, the impedance Z of the load 40Ω can be matched. L Matching.

[0087] Furthermore, the series-connected adjustable vacuum capacitor 322 and the parallel-connected adjustable vacuum capacitor 332 should each be implemented using a single commercially available adjustable vacuum capacitor. Their capacitance and withstand voltage performance should be comparable to those of commercially available adjustable vacuum capacitors, thereby reducing the manufacturing cost of the adjustable low-power high-isolation vector impedance matching path 302 and facilitating the debugging of the adjustable low-power high-isolation vector impedance matching path 302.

[0088] An adjustable dual-frequency vector impedance matching device is characterized in that: the adjustable dual-frequency vector impedance matching device 30 simultaneously matches the high-frequency vector impedance between the high-frequency high-power path 10 and the load 40, and between the high-frequency low-power path 20 and the load 40, and isolates the high-frequency power from the high-frequency high-power path 10, reducing its load on the high-frequency low-power path 20; specifically: the adjustable dual-frequency vector impedance matching device 30 is provided with an adjustable high-power vector impedance matching path 301 cascaded between the high-frequency high-power path 10 and the load 40, and an adjustable low-power high-isolation vector impedance matching path 302 cascaded between the high-frequency low-power path 20 and the load 40; the adjustable high-power vector impedance matching path 301 is used to match the high-frequency vector impedance between the high-frequency high-power path 10 and the load 40; the adjustable low-power high-isolation vector impedance matching path 302 is used to match the high-frequency vector impedance between the high-frequency low-power path 20 and the load 40, and isolates the high-frequency power from the high-frequency high-power path 10, reducing the load of the high-frequency high-power path 10 on the high-frequency low-power path 20.

[0089] Further, the adjustable high-power vector impedance matching path 301 includes an isolation transformer 311, a parallel adjustable vacuum capacitor 321, an impedance transformer 331, a series adjustable vacuum capacitor 341, and a series compensation inductor 351; the isolation transformer 311, the parallel adjustable vacuum capacitor 321, the impedance transformer 331, the series adjustable vacuum capacitor 341, and the series compensation inductor 351 in the adjustable high-power vector impedance matching path 301 are cascaded sequentially from the high-frequency high-power path 10 to the load 40; the adjustable low-power high-isolation vector impedance matching path 302 includes an impedance-isolation transformer 312, a series adjustable vacuum capacitor 322, a parallel adjustable vacuum capacitor 332, and a series... The adjustable low-power high-isolation vector impedance matching path 302 is connected to a compensation inductor 342; the impedance-isolation transformer 312, the series adjustable vacuum capacitor 322, the parallel adjustable vacuum capacitor 332, and the series compensation inductor 342 in the adjustable low-power high-isolation vector impedance matching path 302 are cascaded in sequence from the high-frequency low-power path 20 to the load 40; the isolation transformer 311 in the adjustable high-power vector impedance matching path 301 allows the adjustable high-power vector impedance matching path 301 to operate at a high voltage or negative high voltage potential; the impedance-isolation transformer 312 in the adjustable low-power high-isolation vector impedance matching path 302 allows the adjustable low-power high-isolation vector impedance matching path 302 to operate at a high voltage or negative high voltage potential.

[0090] It should be emphasized that the above specific embodiments are merely explanations of the present invention and are not intended to limit the present invention. After reading this specification, those skilled in the art can make modifications to the above embodiments without contributing any inventive step, but as long as they are within the scope of the claims of the present invention, they are protected by patent law.

Claims

1. An adjustable dual-frequency vector impedance matching structure, comprising: High-frequency high-power path (10), high-frequency low-power path (20), adjustable dual-frequency vector impedance matching device (30) and load (40); The feature is that the high-frequency high-power path (10) and the high-frequency low-power path (20) simultaneously provide power to the load (40), and the input terminal of the load (40) is driven by both the high-frequency high-power path (10) and the high-frequency low-power path (20). The adjustable dual-frequency vector impedance matching device (30) is provided with an adjustable high-power vector impedance matching path (301) cascaded between the high-frequency high-power path (10) and the load (40), and an adjustable low-power high-isolation vector impedance matching path (302) cascaded between the high-frequency low-power path (20) and the load (40); the adjustable high-power vector impedance matching path (301) is used to match the high-frequency vector impedance between the high-frequency high-power path (10) and the load (40); the adjustable low-power high-isolation vector impedance matching path (302) is used to match the high-frequency vector impedance between the high-frequency low-power path (20) and the load (40), and to isolate the high-frequency power from the high-frequency high-power path (10), thereby reducing the load of the high-frequency high-power path (10) on the high-frequency low-power path (20).

2. The adjustable dual-frequency vector impedance matching structure according to claim 1, characterized in that: The adjustable high-power vector impedance matching path (301) includes an isolation transformer (311), a parallel adjustable vacuum capacitor (321), an impedance transformer (331), a series adjustable vacuum capacitor (341), and a series compensation inductor (351); the isolation transformer (311), the parallel adjustable vacuum capacitor (321), the impedance transformer (331), the series adjustable vacuum capacitor (341), and the series compensation inductor (351) in the adjustable high-power vector impedance matching path (301) are cascaded in sequence from the high-frequency high-power path (10) to the load (40).

3. The adjustable dual-frequency vector impedance matching structure according to claim 1, characterized in that: The adjustable low-power high-isolation vector impedance matching path (302) includes an impedance-isolation transformer (312), a series-connected adjustable vacuum capacitor (322), a parallel-connected adjustable vacuum capacitor (332), and a series-connected compensating inductor (342); the impedance-isolation transformer in the adjustable low-power high-isolation vector impedance matching path (302) is... The isolation transformer (312), the series adjustable vacuum capacitor (322), the parallel adjustable vacuum capacitor (332), and the series compensation inductor (342) are cascaded in sequence from the high-frequency low-power path (20) to the load (40).

4. The adjustable dual-frequency vector impedance matching structure according to claim 1, characterized in that, The isolation transformer (311) in the adjustable high-power vector impedance matching path (301) allows the adjustable high-power vector impedance matching path (301) to operate at a high voltage or negative high voltage potential; the impedance-isolation transformer (312) in the adjustable low-power high-isolation vector impedance matching path (302) allows the adjustable low-power high-isolation vector impedance matching path (302) to operate at a high voltage or negative high voltage potential.

5. The adjustable dual-frequency vector impedance matching structure according to claim 1, characterized in that: When the adjustable high-power vector impedance matching path (301) in the adjustable dual-frequency vector impedance matching device (30) fully achieves high-frequency vector impedance matching, the parallel adjustable vacuum capacitor (321) capacitor C1, the impedance transformer (331) turns ratio coefficient N, the series adjustable vacuum capacitor (341) capacitor C2, and the series compensation inductor (351) total inductance L are all connected in this path. 11 +L 12 The relationship given by formula (1) should be satisfied: Among them, Z L The vector impedance of the load (40) is composed of the following components as shown in formula (2): Z L =R L +jωL L (2) In formula (1), R L L is the equivalent resistance of the load (40). L ω is the equivalent inductance of the load (40), and the values ​​of both vary depending on the different operating states of the load (40); ω is the high-frequency angular frequency, which corresponds one-to-one with the high-frequency frequency f, as shown in formula (3): ω=2πf (3) N is the turns ratio coefficient of the impedance transformer (331), which is given by the quotient of the number of turns of the primary and secondary coils of T2, as shown in formula (4): Z0 is the characteristic impedance of the high-frequency high-power path (10), and is usually also the characteristic impedance of the high-frequency low-power path (20). It is a known number because the high-frequency high-power path (10) and the high-frequency low-power path (20) use standard port outputs with characteristic impedances of 50, 75 or 100 ohms. The high-frequency high-power operating angular frequency ω1 is a known number, ω1 = 2πf1, because f1, which corresponds to it, is a known number. The latter is the high-frequency operating frequency at which the high-frequency high-power path (10) wants to achieve high-frequency vector impedance matching with the load (40). At a certain high-frequency operating frequency f1 and the high-frequency vector impedance Z of the load (40), L Within the range, the total inductance L of the selected series compensation inductor (351) can be determined. 11 +L 12 Based on this, by adjusting the parallel adjustable vacuum capacitor (321) C1 and the series adjustable vacuum capacitor (341) C2 in the adjustable high-power vector impedance matching path (301), the impedance Z of the load (40) can be adjusted. L Matching; At this point, by adjusting the capacitance C1 of the adjustable vacuum capacitor (321) connected in parallel, the impedance Z of the load (40) can be independently adjusted. L The equivalent resistance R L Matching.

6. The adjustable dual-frequency vector impedance matching structure according to claim 2, characterized in that: The turns ratio coefficient of the impedance transformer (331) should preferably be selected as a value or an approximation that satisfies the relationship given by formula (5): At this point, by adjusting the capacitance C2 of the series-connected adjustable vacuum capacitor (341), the impedance Z of the load (40) can be adjusted independently or approximately independently. L Equivalent inductance L L Matching.

7. The adjustable dual-frequency vector impedance matching structure according to claim 1, characterized in that: When the adjustable low-power high-isolation vector impedance matching path (302) in the adjustable dual-frequency vector impedance matching device (30) fully achieves high-frequency vector impedance matching, the total inductance L of the impedance-isolation transformer (312) turns ratio n, the series adjustable vacuum capacitor (322) capacitor C3, the parallel adjustable vacuum capacitor (332) capacitor C4, and the series compensation inductor (342) is as follows: 21 +L 22 The relationship given by formula (6) should be satisfied: The turns ratio n is achieved by an impedance transformer T3 with high-voltage isolation function, and is given by the quotient of the number of turns of the primary and secondary coils of T3, as shown in formula (7): At a certain high-frequency operating frequency f2 and the high-frequency vector impedance Z of the load (40), L Within the range, the total inductance L of the selected series compensation inductor (342) can be determined. 21 +L 22 Based on this, by adjusting the series adjustable vacuum capacitor (322) C3 and the parallel adjustable vacuum capacitor (332) C4 in the adjustable low-power high-isolation vector impedance matching path (302), the impedance Z of the load (40) can be matched. L Matching.

8. The adjustable dual-frequency vector impedance matching structure according to claim 1, characterized in that: The series-connected adjustable vacuum capacitor (322) and the parallel-connected adjustable vacuum capacitor (332) should each be implemented using a single commercially available adjustable vacuum capacitor. Their capacitance and withstand voltage performance should be comparable to those of commercially available adjustable vacuum capacitors, thereby reducing the manufacturing cost of the adjustable low-power high-isolation vector impedance matching path (302) and facilitating the debugging of the adjustable low-power high-isolation vector impedance matching path (302).

9. An adjustable dual-frequency vector impedance matching device for use in any one of claims 1-8, characterized in that: The adjustable dual-frequency vector impedance matching device (30) simultaneously matches the high-frequency vector impedance between the high-frequency high-power path (10) and the load (40), and between the high-frequency low-power path (20) and the load (40), and isolates the high-frequency power from the high-frequency high-power path (10) to reduce its loading onto the high-frequency low-power path (20): Specifically, the adjustable dual-frequency vector impedance matching device (30) is provided with an adjustable high-power vector impedance matching path (301) cascaded between the high-frequency high-power path (10) and the load (40), and a path cascaded between the high-frequency low-power path (20) and the load (40). An adjustable low-power high-isolation vector impedance matching path (302) between the high-frequency high-power path (10) and the load (40); the adjustable high-power vector impedance matching path (301) is used to match the high-frequency vector impedance between the high-frequency high-power path (10) and the load (40); the adjustable low-power high-isolation vector impedance matching path (302) is used to match the high-frequency vector impedance between the high-frequency low-power path (20) and the load (40), and to isolate the high-frequency power from the high-frequency high-power path (10), thereby reducing the load of the high-frequency high-power path (10) on the high-frequency low-power path (20).

10. The adjustable dual-frequency vector impedance matching device (30) according to claim 9, characterized in that: The adjustable high-power vector impedance matching path (301) includes an isolation transformer (311), a parallel adjustable vacuum capacitor (321), an impedance transformer (331), a series adjustable vacuum capacitor (341), and a series compensation inductor (351); the isolation transformer (311), the parallel adjustable vacuum capacitor (321), the impedance transformer (331), the series adjustable vacuum capacitor (341), and the series compensation inductor (351) in the adjustable high-power vector impedance matching path (301) are cascaded sequentially from the high-frequency high-power path (10) to the load (40); the adjustable low-power high-isolation vector impedance matching path (302) includes an impedance-isolation transformer (312), a series adjustable vacuum capacitor (322), and a parallel adjustable vacuum capacitor (332). The series compensation inductor (342) in the adjustable low-power high-isolation vector impedance matching path (302) is cascaded in sequence from the high-frequency low-power path (20) to the load (40); the isolation transformer (311) in the adjustable high-power vector impedance matching path (301) allows the adjustable high-power vector impedance matching path (301) to operate at a high voltage or negative high voltage potential; the impedance-isolation transformer (312) in the adjustable low-power high-isolation vector impedance matching path (302) allows the adjustable low-power high-isolation vector impedance matching path (302) to operate at a high voltage or negative high voltage potential.

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