Substrate Holding Manipulator and Substrate Handling Robot

Abstract

The substrate holding robot hand (1) includes: a frame (10); a plurality of blades (20) that respectively support a substrate (W); and a mounting member (30) that supports the plurality of blades and mounts the plurality of blades on the frame. The plurality of blades are arranged so as to be aligned in a direction perpendicular to the main surface (20a) of the blade, and it is possible to remove an intermediate blade from the mounting member in a state where an end blade located in a direction perpendicular to the main surface of the blade, that is, the end blade, is mounted on the mounting member.

Description

Technical Field

[0001] The present invention relates to a substrate holding robot hand and a substrate transfer robot, and to a substrate holding robot hand and a substrate transfer robot having a plurality of blades that respectively support a substrate. Background Art

[0002] Conventionally, a substrate holding robot hand having a plurality of blades that respectively support a substrate has been known. For example, such a robot hand is disclosed in Japanese Patent Application Laid-Open No. 2006-313865.

[0003] In Japanese Patent Application Laid-Open No. 2006-313865, a robot arm (substrate holding robot hand) for transferring a substrate is disclosed. The robot arm includes a plurality (five) of thin plate-shaped end effectors (blades) that respectively support a substrate. The plurality of end effectors are mounted on an end effector mounting plate so as to be arranged in a direction perpendicular to the main surface of the end effector.

[0004] In addition, although not explicitly described in Japanese Patent Application Laid-Open No. 2006-313865, it can be considered that a conventional robot arm as described in Japanese Patent Application Laid-Open No. 2006-313865 is configured such that when the end effector is removed from the end effector mounting plate, the end effector is sequentially removed from the end effector mounting plate from one side to the other side in a direction perpendicular to the main surface of the end effector. That is, it can be considered that in this conventional robot arm, the intermediate end effector cannot be removed from the end effector mounting plate unless the end effector located at the end in the direction perpendicular to the main surface of the end effector is removed from the end effector mounting plate.

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 2006-313865

[0006] However, in the above-described conventional robot arm, the intermediate end effector cannot be removed unless the end end effector is removed, and thus there is a problem that it is difficult to remove the intermediate end effector (blade) from the mounting member for maintenance (repair) or the like of the intermediate end effector (blade) while maintaining the level (horizontal state) of the end end effector (blade). Summary of the Invention

[0007] An object of the present invention is to provide a substrate holding robot hand and a substrate transfer robot that can remove an intermediate blade (a blade adjacent to the end blade) from a mounting member while maintaining the level (horizontal state) of the end blade to perform maintenance (repair) or the like on the intermediate blade (a blade adjacent to the end blade).

[0008] The substrate holding robot hand according to the first aspect of the present invention includes: a frame; a plurality of blades that respectively support a substrate; and a mounting member that supports the plurality of blades and mounts the plurality of blades on the frame. The plurality of blades are arranged in a direction perpendicular to the main surface of the blade, and it is possible to remove an intermediate blade from the mounting member in a state where an end blade located in the direction perpendicular to the main surface of the blade, that is, an end blade, is mounted on the mounting member.

[0009] The substrate holding robot hand according to the second aspect of the present invention includes: a frame; a plurality of blades that respectively support a substrate; and a mounting member that supports the plurality of blades and mounts the plurality of blades on the frame. The plurality of blades are arranged in a direction perpendicular to the main surface of the blade, and it is possible to remove an end blade located in the direction perpendicular to the main surface of the blade, that is, an end blade, and a blade adjacent to the end blade from the same side in the direction perpendicular to the main surface of the blade, and it is possible to remove a blade adjacent to the end blade from the mounting member in a state where the end blade is mounted on the mounting member.

[0010] The substrate transfer robot according to the third aspect of the present invention includes a substrate holding robot hand and an arm that moves the substrate holding robot hand. The substrate holding robot hand includes: a frame; a plurality of blades that respectively support a substrate; and a mounting member that supports the plurality of blades and mounts the plurality of blades on the frame. The plurality of blades are arranged in a direction perpendicular to the main surface of the blade, and it is possible to remove an intermediate blade from the mounting member in a state where an end blade located in the direction perpendicular to the main surface of the blade, that is, an end blade, is mounted on the mounting member.

[0011] According to the present invention, as described above, for a plurality of blades, it is possible to remove an intermediate blade (a blade adjacent to the end blade) from the mounting member in a state where an end blade located in the direction perpendicular to the main surface of the blade, that is, an end blade, is mounted on the mounting member. Thus, different from the case where a plurality of blades need to be removed together, since it is possible to remove an intermediate blade (a blade adjacent to the end blade) from the mounting member in a state where the end blade is mounted on the mounting member, it is possible to remove an intermediate blade (a blade adjacent to the end blade) from the mounting member while maintaining the level (horizontal state) of the end blade, and perform operations such as repair (maintenance) of the intermediate blade (a blade adjacent to the end blade). Description of the Drawings

[0012] Figure 1 It is a diagram showing the structure of a substrate transfer robot according to the first embodiment of the present invention.

[0013] Figure 2 It is a perspective view showing the structure of a substrate holding robot hand according to the first embodiment of the present invention.

[0014] Figure 3 It is a top view showing the structure of the substrate holding robot hand based on the first embodiment of the present invention.

[0015] Figure 4 It is an exploded perspective view showing the structure of the blade and the mounting member based on the first embodiment of the present invention.

[0016] Figure 5 It is a side view for explaining the structure of the blade and the mounting member based on the first embodiment of the present invention.

[0017] Figure 6 It is a side view for explaining the case of removing the middle blade from the mounting member based on the first embodiment of the present invention.

[0018] Figure 7 It is a perspective view showing the fastening member and the tool based on the first embodiment of the present invention.

[0019] Figure 8 It is a side view for explaining the case of removing the end blade from the mounting member based on the first embodiment of the present invention.

[0020] Figure 9 It is a perspective view showing the structure of the substrate holding robot hand based on the second embodiment of the present invention.

[0021] Figure 10 It is an exploded perspective view showing the structure of the blade and the mounting member based on the second embodiment of the present invention. Detailed Embodiment

[0022] Hereinafter, embodiments of the present invention in which the present invention is embodied will be described based on the drawings.

[0023] [First Embodiment]

[0024] Refer to Figures 1 to 8 The structure of the substrate transfer robot 100 based on the first embodiment will be described.

[0025] As Figure 1 shown, the substrate transfer robot 100 includes a substrate holding robot hand 1 and an arm 2 that moves the substrate holding robot hand 1. As Figures 2 to 8As shown in the figure, the substrate holding robot 1 includes a frame 10, a plurality of (four) blades 20 that respectively support a substrate (semiconductor wafer) W, and a mounting member 30 that supports the plurality of blades 20 and mounts the plurality of blades 20 on the frame 10. The plurality of (four) blades 20 are arranged in a direction (Z direction) perpendicular to the main surface 20a of the blade 20, and the intermediate blade 20 (the second or third layer blade 20) can be removed from the mounting member 30 in a state where the end blade 20 (the first or fourth layer blade 20) located at the end in the direction (Z direction) perpendicular to the main surface 20a of the blade 20 is mounted on the mounting member 30.

[0026] According to the first embodiment, as described above, for the plurality of blades 20, the intermediate blade 20 can be removed from the mounting member 30 in a state where the end blade 20 located at the end in the direction (Z direction) perpendicular to the main surface 20a of the blade 20 is mounted on the mounting member 30. Therefore, different from the case where a plurality of blades 20 need to be removed together, the intermediate blade 20 can be removed from the mounting member 30 while maintaining the level (horizontal state) of the end blade 20, so as to perform operations such as maintenance on the intermediate blade 20.

[0027] As Figures 3 to 8 shown, the end blade 20 includes: an insertion hole portion 21 for inserting a fastening member 41 that fastens and fixes the end blade 20 to the mounting member 30; and an insertion hole portion 22 for inserting a fastening member 42 that fastens and fixes the intermediate blade 20 to the mounting member 30, and in the case of observing from the direction (Z direction) perpendicular to the main surface 20a of the blade 20, the fastening member 42 is exposed from the insertion hole portion 22. For the intermediate blade 20, by inserting a tool (hexagon wrench) T into the hexagonal hole 42a of the head of the fastening member 42 exposed through the insertion hole portion 22 in the case of observing from the direction (Z direction) perpendicular to the main surface 20a of the blade 20 and removing it through the insertion hole portion 22, the intermediate blade 20 can be removed from the mounting member 30 in a state where the end blade 20 is mounted on the mounting member 30 by the fastening member 41. In addition, the fastening members 41 and 42 are respectively an example of the "first fastening member" and the "second fastening member" in the claims. Further, the insertion hole portions 21 and 22 are respectively an example of the "first insertion hole portion" and the "second insertion hole portion" in the claims.

[0028] The insertion hole portion 22 has a size that can insert a tool (hexagon wrench) T for removing the fastening member 42.

[0029] The insertion through-hole portion 22 has a size capable of inserting the fastening member 42.

[0030] The fastening member 41 is exposed in a state of being inserted through the insertion through-hole portion 21. For the end blade 20, by inserting a tool (hexagon wrench) T into the hexagonal hole 41a of the head of the exposed fastening member 41, the end blade 20 can be removed, so that the end blade 20 can be removed from the mounting member 30 in a state where the intermediate blade 20 is mounted to the mounting member 30 by the fastening member 42.

[0031] The mounting member 30 includes a first support portion 31 that supports the end blade 20 and a second support portion 32 that supports the intermediate blade 20. The first support portion 31 has: a fastening hole portion 31a that is disposed at a position overlapping the insertion through-hole portion 21 in a direction (Z direction) perpendicular to the main surface 20a of the blade 20 and for fastening the fastening member 41 inserted through the insertion through-hole portion 21; and an insertion through-hole portion 31b that is disposed at a position overlapping the insertion through-hole portion 22 in a direction (Z direction) perpendicular to the main surface 20a of the blade 20 and for inserting the fastening member 42 together with the insertion through-hole portion 22. The second support portion 32 has a fastening hole portion 32a that is disposed at a position overlapping the insertion through-hole portion 22 and the insertion through-hole portion 31b in a direction (Z direction) perpendicular to the main surface 20a of the blade 20 and for fastening the fastening member 42. In addition, the fastening hole portion 31a, the insertion through-hole portion 31b, and the fastening hole portion 32a are examples of the "first fastening hole portion", the "third insertion through-hole portion", and the "second fastening hole portion" in the claims, respectively.

[0032] The second support portion 32 commonly supports the intermediate blades 20 adjacent in the direction (Z direction) perpendicular to the main surface 20a of the blade 20.

[0033] The insertion through-hole portion 21 includes a pair of insertion through-hole portions 21. The insertion through-hole portion 22 includes a pair of insertion through-hole portions 22. The pair of insertion through-hole portions 21 and the pair of insertion through-hole portions 22 are disposed at the corners of a rectangular shape and are disposed on different diagonals of the rectangle.

[0034] The substrate holding robot 1 further includes a plate member 50, and the plate member 50 includes: an insertion through-hole portion 51 that is disposed at a position overlapping the insertion through-hole portion 21 in a direction (Z direction) perpendicular to the main surface 20a of the blade 20 and for inserting the fastening member 41; and an insertion through-hole portion 52 that is disposed at a position overlapping the insertion through-hole portion 22 in a direction (Z direction) perpendicular to the main surface 20a of the blade 20 and for inserting the fastening member 42. The end blade 20 is fastened and fixed by the fastening member 41 via the plate member 50.

[0035] For a plurality of blades 20, on both sides in a direction (Z direction) perpendicular to the main surface 20a of the blade 20, i.e., one side (Z1 direction side) and the other side (Z2 direction side), the intermediate blade 20 can be removed from the mounting member 30 while the end blade 20 is mounted on the mounting member 30.

[0036] The intermediate blade 20 is a blade 20 adjacent to the end blade 20 in a direction (Z direction) perpendicular to the main surface 20a of the blade 20.

[0037] As Figure 1 shown, the arm 2 is a horizontal multi-joint robot arm. The arm 2 includes a first arm 2a and a second arm 2b. The first arm 2a is configured to be rotatable about one end relative to a base 3 described later. Specifically, one end of the first arm 2a is rotatably connected to the base 3 via a first joint. The second arm 2b is configured to be rotatable about one end relative to the first arm 2a. Specifically, one end of the second arm 2b is rotatably connected to the other end of the first arm 2a via a second joint. In addition, a substrate holding manipulator 1 is rotatably connected to the other end of the second arm 2b via a third joint. Drive mechanisms are provided at each of the first joint, the second joint, and the third joint. The drive mechanisms include a servo motor as a drive source for driving each joint to rotate the joint, a rotational position sensor for detecting the rotational position of the output shaft of the servo motor, and a power transmission mechanism for transmitting the output of the servo motor to the joint.

[0038] In addition, the substrate transfer robot 100 further includes a base 3 to which the arm 2 is mounted, and an arm lifting mechanism 4 to which the base 3 is mounted. The base 3 is configured such that one end is connected to one end of the first arm 2a and the other end is connected to the arm lifting mechanism 4. The arm lifting mechanism 4 is configured to lift the arm 2 by lifting the base 3. The arm lifting mechanism 4 includes a servo motor as a drive source for lifting drive, a rotational position sensor for detecting the rotational position of the output shaft of the servo motor, and a power transmission mechanism for transmitting the output of the servo motor to the base 3 (arm 2).

[0039] As Figure 2 shown, a plurality (4) of blades 20 are provided on the substrate holding manipulator 1. That is, the substrate holding manipulator 1 is configured to be able to transfer (hold) a plurality (4) of substrates W.

[0040] As Figure 2 and Figure 3As shown in the figure, the substrate holding robot 1 includes a frame 10, a blade 20, and a mounting member 30. The frame 10 is a support body that supports the blade 20. The frame 10 includes a pair of side wall portions 10a and a base end portion 10b that connects the pair of side wall portions 10a. The pair of side wall portions 10a are separated from each other with their wall surfaces facing each other in a direction (X direction) parallel to the direction in which the pair of front support portions 23 of the blade 20 described later are arranged. In addition, the pair of side wall portions 10a are provided so as to extend in a direction (Y direction) orthogonal to the direction in which the pair of front support portions 23 are arranged and parallel to the main surface 20a of the blade 20. The base end portion 10b connects the respective base end portions (the portions on the Y2 direction side) of the pair of side wall portions 10a. The base end portion 10b has a shape that is curved convexly toward the base end side (Y2 direction side). The pair of side wall portions 10a and the base end portion 10b are provided so as to form a U shape when viewed from a direction (Z direction) perpendicular to the main surface 20a of the blade 20.

[0041] The blade 20 is a thin plate-shaped support plate that supports the substrate W. The blade 20 has a front support portion 23 provided on the front end portion 20b side (Y1 direction side) and a rear support portion 24 provided on the base end portion 20c side (Y2 direction side). In addition, the blade 20 has a shape that branches into two on the front end portion 20b side. In the blade 20, a pair of front support portions 23 are separately provided in the branched portions. The pair of front support portions 23 have a plurality (two) of support surfaces provided at different heights. In addition, the pair of rear support portions 24 have support surfaces provided at substantially the same height as the support surface on the lower side (Z2 direction side) of the pair of front support portions 23. In addition, the "height" refers to the distance from the main surface 20a of the blade 20 in a direction (Z direction) perpendicular to the main surface 20a of the blade 20.

[0042] The pair of front support portions 23 and the pair of rear support portions 24 are provided on the main surface 20a of the blade 20. The support surfaces of the pair of front support portions 23 and the pair of rear support portions 24 are configured to support the outer peripheral portion of the substantially circular substrate W from below on the back surface (the surface on the Z2 direction side).

[0043] In addition, as Figure 3 and Figure 4 shown, the blade 20 also has a fixing portion 25 that is provided with an insertion hole portion 21 and an insertion hole portion 22 and is mounted on the mounting member 30. The fixing portion 25 is provided at the base end portion 20c of the blade 20. In addition, the fixing portion 25 includes a pair of fixing portions 25. The pair of fixing portions 25 are provided on one side (X1 direction side) and the other side (X2 direction side) in the direction (X direction) in which the pair of front support portions 23 are arranged.

[0044] The mounting member 30 includes a pair of mounting members 30 in a manner corresponding to a pair of fixing portions 25. The pair of mounting members 30 are mounted on the side wall portion 10a of the frame 10 from the side. Specifically, the mounting member 30 on the X1 direction side is mounted on the portion on the front end side of the side wall portion 10a on the X1 direction side of the frame 10 from the outer side (X1 direction side). In addition, the fixing portion 25 on the X1 direction side of a plurality of vanes 20 is mounted on the mounting member 30 on the X1 direction side. Further, the mounting member 30 on the X2 direction side is mounted on the portion on the front end side of the side wall portion 10a on the X2 direction side of the frame 10 from the outer side (X2 direction side). In addition, the fixing portion 25 on the X2 direction side of a plurality of vanes 20 is mounted on the mounting member 30 on the X2 direction side.

[0045] In addition, as Figures 4 to 6 shown, two first support portions 31 and one second support portion 32 are provided on the mounting member 30. The first support portion 31 and the second support portion 32 are provided to extend from the frame 10 side (Y2 direction side) toward the front end portion 20b side (Y1 direction side) of the vane 20. In addition, the two first support portions 31 are provided on one side (Z1 direction side) and the other side (Z2 direction side) with respect to the second support portion 32 in the direction (Z direction) perpendicular to the main surface 20a of the vane 20. In addition, the upper (Z1 direction side) first support portion 31 supports the vane (the vane of the first layer) 20 at the upper end portion on the upper surface side. In addition, the lower (Z2 direction side) first support portion 31 supports the vane (the vane of the second layer) 20 at the lower end portion on the lower surface side. In addition, the second support portion 32 supports the intermediate vanes (the vanes of the second and third layers) 20 on the upper surface side and the lower surface side, respectively.

[0046] As Figure 5 and Figure 6 shown, when removing the intermediate vane (the vane of the second layer) 20 on the upper side (Z1 direction side) from the mounting member 30, from the upper side (Z1 direction side) toward the lower side (Z2 direction side), the tool T is inserted into the insertion hole portion 22 of the vane (the vane of the first layer) 20 at the upper end portion on the upper side (Z1 direction side) and the insertion hole portion 31b of the upper (Z1 direction side) first support portion 31 of the mounting member 30. And the front end portion of the tool T is inserted into the hexagonal hole 42a of the fastening member 42 in a state of being fastened to the fastening hole portion 32a of the second support portion 32 of the mounting member 30. In addition, before inserting the tool T into the insertion hole portion 22 and the insertion hole portion 31b, when observing from the upper side (Z1 direction side), the head of the fastening member 42 is exposed via the insertion hole portion 22 and the insertion hole portion 31b so that the removal operation based on the tool T can be performed.

[0047] Moreover, after performing the removal operation based on tool T (the operation of loosening the fastening member 42 to remove the fastening member 42 from the fastening hole portion 32a), the fastening member 42 is removed (extracted) from the lower side (Z2 direction side) toward the upper side (Z1 direction side) via the insertion hole portion 22 and the insertion hole portion 31b. Moreover, in a state where the intermediate blade 20 on the upper side (Z1 direction side) is fastened and fixed to the second support portion 32 of the mounting member 30 by the fastening member 42, the intermediate blade 20 on the upper side (Z1 direction side) is moved in a pulling manner. As a result, the intermediate blade (second layer blade) 20 on the upper side (Z1 direction side) can be removed from the second support portion 32 of the mounting member 30 in a state where the blade (first layer blade) 20 at the end on the upper side (Z1 direction side) is mounted on the first support portion 31 on the upper side (Z1 direction side) of the mounting member 30.

[0048] The same procedure applies when removing the intermediate blade (third layer blade) 20 on the lower side (Z2 direction side) from the mounting member 30. That is, from the lower side (Z2 direction side) toward the upper side (Z1 direction side), the tool T is inserted into the insertion hole portion 22 of the blade (fourth layer blade) 20 at the end on the lower side (Z2 direction side) and the insertion hole portion 31b of the first support portion 31 on the lower side (Z2 direction side) of the mounting member 30. And the front end portion of the tool T is inserted into the hexagonal hole 42a of the fastening member 42 in a state where the fastening member 42 is fastened in the fastening hole portion 32a of the second support portion 32 of the mounting member 30. In addition, before inserting the tool T into the insertion hole portion 22 and the insertion hole portion 31b, the head of the fastening member 42 is exposed via the insertion hole portion 22 and the insertion hole portion 31b when viewed from the lower side (Z2 direction side) so that the removal operation based on the tool T can be performed.

[0049] Moreover, after performing the removal operation based on tool T (the operation of loosening the fastening member 42 to remove the fastening member 42 from the fastening hole portion 32a), the fastening member 42 is removed (extracted) from the upper side (Z1 direction side) toward the lower side (Z2 direction side) via the insertion hole portion 22 and the insertion hole portion 31b. Moreover, in a state where the intermediate blade 20 on the lower side (Z2 direction side) is fastened and fixed to the second support portion 32 of the mounting member 30 by the fastening member 42, the intermediate blade 20 on the lower side (Z2 direction side) is moved in a pulling manner. As a result, the intermediate blade (third layer blade) 20 on the lower side (Z2 direction side) can be removed from the second support portion 32 of the mounting member 30 in a state where the blade (fourth layer blade) 20 at the end on the lower side (Z2 direction side) is mounted on the first support portion 31 on the lower side (Z2 direction side) of the mounting member 30. In addition, the second layer blade 20 and the third layer blade 20 can be removed independently of each other.

[0050] In addition, as Figures 4 to 6As shown, the substrate holding robot 1 includes boards 61 to 63 in addition to the board member 50. The board member 50 is disposed between the head of the fastening member 41 and the blade 20 at the end in a direction (Z direction) perpendicular to the main surface 20a of the blade 20. The board 61 is disposed between the blade 20 at the end and the first support portion 31 of the mounting member 30 in a direction (Z direction) perpendicular to the main surface 20a of the blade 20. The board 62 is disposed between the head of the fastening member 42 and the intermediate blade 20 in a direction (Z direction) perpendicular to the main surface 20a of the blade 20. The board 63 is disposed between the intermediate blade 20 and the second support portion 32 of the mounting member 30 in a direction (Z direction) perpendicular to the main surface 20a of the blade 20. Although detailed description is omitted, through holes for inserting the fastening member 41 or 42 are provided in each of the boards 61 to 63.

[0051] As Figure 2 and Figure 3 shown, the substrate holding robot 1 further includes a movable support unit 71 for supporting the substrate W to move forward and backward, and a first movable pressing unit 72 and a second movable pressing unit 73 for pressing the substrate W to move forward and backward. The movable support unit 71 has a pair of support members 71a for supporting the substrate W, and a cylinder 71b as an actuator for moving the pair of support members 71a forward and backward in the Y direction. The movable support unit 71 is configured to be able to move the pair of support members 71a forward in the Y1 direction by the cylinder 71b and dispose them at the support position for supporting the substrate W. In addition, the movable support unit 71 is configured to be able to move the pair of support members 71a backward in the Y2 direction by the cylinder 71b and dispose them at the retracted position where the substrate W is not supported. In addition, the pair of support members 71a has a support surface provided at substantially the same height as the support surface on the upper side (Z1 direction side) of the pair of front support portions 23. Each support surface of the pair of support members 71a is configured to support the back surface (surface on the Z2 direction side) of the outer peripheral portion of the substantially circular substrate W from below.

[0052] The first movable pressing unit 72 has a pair of pressing members 72a for pressing the substrate W, and a cylinder 72b as an actuator for moving the pair of pressing members 72a forward and backward in the Y direction. The first movable pressing unit 72 is configured to be able to press the substrate W by moving the pair of pressing members 72a forward in the Y1 direction by the cylinder 72b. In addition, the first movable pressing unit 72 is configured to be able to move the pair of pressing members 72a backward in the Y2 direction by the cylinder 72b and dispose them at the retracted position where the substrate W is not pressed.

[0053] The second movable pressing unit 73 includes a pair of pressing members 73a that press the substrate W, and a cylinder 73b that serves as an actuator for moving the pair of pressing members 73a forward and backward in the Y direction. The second movable pressing unit 73 is configured to be able to press the substrate W by moving the pair of pressing members 73a forward in the Y1 direction through the cylinder 73b. In addition, the second movable pressing unit 73 is configured to be able to move the pair of pressing members 73a backward in the Y2 direction through the cylinder 73b and position them at a retracted position where the substrate W is not pressed.

[0054] In the substrate holding robot 1, the support surfaces on the upper side (Z1 direction side) of the pair of front support portions 23 and the support surfaces of the pair of support members 71a of the movable support unit 71 support the processed (cleaned) substrate W. Moreover, the pair of pressing members 72a of the first movable pressing unit 72 press the processed (cleaned) substrate W supported by the support surfaces on the upper side (Z1 direction side) of the pair of front support portions 23 and the support surfaces of the pair of support members 71a of the movable support unit 71.

[0055] In addition, in the substrate holding robot 1, the support surfaces on the lower side (Z2 direction side) of the pair of front support portions 23 and the support surfaces of the pair of rear support portions 24 support the substrate W before processing (before cleaning). Moreover, the pair of pressing members 73a of the second movable pressing unit 73 press the substrate W before processing (before cleaning) supported by the support surfaces on the lower side (Z2 direction side) of the pair of front support portions 23 and the support surfaces of the pair of rear support portions 24. The pair of front support portions 23, the pair of rear support portions 24, the movable support unit 71, the first movable pressing unit 72, and the second movable pressing unit 73 are used separately for the substrate W before processing (before cleaning) and the substrate W after processing (after cleaning).

[0056] In addition, the cylinder 71b of the movable support unit 71, the cylinder 72b of the first movable pressing unit 72, and the cylinder 73b of the second movable pressing unit 73 are arranged inside the frame 10. In addition, the cylinder 71b of the movable support unit 71, the cylinder 72b of the first movable pressing unit 72, and the cylinder 73b of the second movable pressing unit 73 are arranged in a direction (Z direction) perpendicular to the main surface 20a of the blade 20 inside the frame 10. Specifically, when viewed from the direction (Z direction) perpendicular to the main surface 20a of the blade 20, the cylinder 71b of the movable support unit 71, the cylinder 72b of the first movable pressing unit 72, and the cylinder 73b of the second movable pressing unit 73 are arranged in an overlapping manner. As a result, the cylinders 71b, 72b, and 73b are not arranged in the width direction (X direction) of the frame 10, so that the cylinders 71b, 72b, and 73b can be arranged compactly in the width direction (X direction) of the frame 10.

[0057] In addition, the substrate holding robot 1 further includes a cover (outer shell) 80 that is separately provided from the frame 10 (refer to Figure 2 ). The cover 80 is provided to cover a part of the frame 10, the movable support unit 71, the first movable pressing unit 72, and the second movable pressing unit 73 (the part disposed inside the frame 10).

[0058] [Effects of the First Embodiment]

[0059] In the first embodiment, the following effects can be obtained.

[0060] In the first embodiment, as described above, for the plurality of blades 20, the intermediate blade 20 can be removed from the mounting member 30 in a state where the end blade 20 located in the direction perpendicular to the main surface 20a of the blade 20 is mounted on the mounting member 30. Therefore, different from the case where a plurality of blades 20 need to be removed together, since the intermediate blade 20 can be removed from the mounting member 30 in a state where the end blade 20 is mounted on the mounting member 30, the intermediate blade 20 can be removed from the mounting member 30 while maintaining the level (horizontal state) of the end blade 20 to perform operations such as maintenance (repair) of the intermediate blade 20.

[0061] In addition, in the first embodiment, as described above, the end blade 20 includes: an insertion hole portion 21 through which a fastening member 41 for fastening and fixing the end blade 20 to the mounting member 30 is inserted; and an insertion hole portion 22 through which a fastening member 42 for fastening and fixing the intermediate blade 20 to the mounting member 30 is inserted, and when viewed from a direction perpendicular to the main surface 20a of the blade 20, the fastening member 42 protrudes from the insertion hole portion 22. In addition, by removing the fastening member 42 that protrudes from the insertion hole portion 22 when viewed from a direction perpendicular to the main surface 20a of the blade 20 through the insertion hole portion 22, the intermediate blade 20 can be removed from the mounting member 30 in a state where the end blade 20 is mounted on the mounting member 30 by the fastening member 41. Thus, by simply removing the fastening member 42 through the insertion hole portion 22, the intermediate blade 20 can be easily removed from the mounting member 30, and thus operations such as maintenance of the intermediate blade 20 can be easily performed.

[0062] In addition, in the first embodiment, as described above, the insertion hole portion 22 has a size that allows a tool T for removing the fastening member 42 to be inserted. Thus, the tool T for removing the fastening member 42 can be easily inserted into the insertion hole portion 22, and thus the fastening member 42 can be easily removed by the tool T inserted into the insertion hole portion 22.

[0063] In addition, in the first embodiment, as described above, the insertion through-hole portion 22 has a size that allows the fastening member 42 to be inserted therethrough. Thus, when the intermediate blade 20 is attached to the mounting member 30, the fastening member 42 can be easily inserted into the insertion through-hole portion 22. Further, when the intermediate blade 20 is removed from the mounting member 30, the fastening member 42 can be easily removed from the insertion through-hole portion 22. As a result, the intermediate blade 20 can be easily attached to the mounting member 30 and removed from the mounting member 30.

[0064] In addition, in the first embodiment, as described above, the fastening member 41 protrudes in a state of being inserted through the insertion through-hole portion 21. Further, by removing the protruding fastening member 41, the end blade 20 can be removed from the mounting member 30 in a state where the intermediate blade 20 is attached to the mounting member 30 by the fastening member 42. Thus, since the end blade 20 can be removed from the mounting member 30 in a state where the intermediate blade 20 is attached to the mounting member 30, operations such as maintenance of the end blade 20 can be performed by removing the end blade 20 from the mounting member 30 while maintaining the level (horizontal state) of the intermediate blade 20.

[0065] In addition, in the first embodiment, as described above, the mounting member 30 includes a first support portion 31 that supports the end blade 20 and a second support portion 32 that supports the intermediate blade 20. Further, the first support portion 31 has: a fastening hole portion 31a that is disposed at a position overlapping the insertion through-hole portion 21 in a direction perpendicular to the main surface 20a of the blade 20 and that fastens the fastening member 41 inserted through the insertion through-hole portion 21; and an insertion through-hole portion 31b that is disposed at a position overlapping the insertion through-hole portion 22 in a direction perpendicular to the main surface 20a of the blade 20 and that, together with the insertion through-hole portion 22, is used for inserting the fastening member 42. Further, the second support portion 32 has a fastening hole portion 32a that is disposed at a position overlapping the insertion through-hole portion 22 and the insertion through-hole portion 31b in a direction perpendicular to the main surface 20a of the blade 20 and that fastens the fastening member 42. Thus, the fastening member 42 can be removed via the insertion through-hole portion 22 and the insertion through-hole portion 31b. Therefore, the intermediate blade 20 can be removed from the second support portion 32 of the mounting member 30 in a state where the end blade 20 is attached to the first support portion 31 of the mounting member 30.

[0066] In addition, in the first embodiment, as described above, the second support portion 32 commonly supports the intermediate blade 20 adjacent in the direction perpendicular to the main surface 20a of the blade 20. Accordingly, unlike the case where the support portions for the intermediate blades 20 adjacent in the direction perpendicular to the main surface 20a of the blade 20 are provided independently for each intermediate blade 20, there is no need to separately provide support portions for the intermediate blades 20, and thus the structure of the mounting member 30 can be simplified.

[0067] In addition, in the first embodiment, as described above, the insertion hole portion 21 includes a pair of insertion hole portions 21. In addition, the insertion hole portion 22 includes a pair of insertion hole portions 22. In addition, the pair of insertion hole portions 21 and the pair of insertion hole portions 22 are arranged at the corner portions of a rectangular shape and are arranged on different diagonals of the rectangle. Accordingly, the pair of fastening members 41 corresponding to the pair of insertion hole portions 21 and the pair of fastening members 42 corresponding to the pair of insertion hole portions 22 can be arranged at the corner portions of a rectangular shape and on different diagonals of the rectangle to fasten and fix the end blade 20 and the intermediate blade 20 to the mounting member 30, and thus the end blade 20 and the intermediate blade 20 can be fastened and fixed with good balance.

[0068] In addition, in the first embodiment, as described above, the substrate holding robot 1 further includes a plate member 50, and the plate member 50 includes: an insertion hole portion 51 which is arranged at a position overlapping with the insertion hole portion 21 in the direction perpendicular to the main surface 20a of the blade 20 and through which the fastening member 41 is inserted; and an insertion hole portion 52 which is arranged at a position overlapping with the insertion hole portion 22 in the direction perpendicular to the main surface 20a of the blade 20 and through which the fastening member 42 is inserted. In addition, the end blade 20 is fastened and fixed via the plate member 50 by the fastening member 41. Accordingly, since the end blade 20 can be fastened and fixed via the plate member 50 by the fastening member 41, the force of fastening and fixing by the fastening member 41 can be prevented from being directly applied to the end blade 20. In addition, when the end blade 20 is fastened and fixed via the plate member 50 by the fastening member 41, the fastening member 42 can also be removed via the insertion hole portion 22 and the insertion hole portion 52, and thus the intermediate blade 20 can be removed from the mounting member 30 in a state where the end blade 20 is mounted on the mounting member 30.

[0069] In addition, in the first embodiment, as described above, the plurality of blades 20 are configured such that the intermediate blades 20 can be removed from the mounting member 30 while the end blades 20 are mounted on the mounting member 30 on both sides, i.e., one side and the other side, in the direction perpendicular to the main surface 20a of the blade 20. Thus, on both sides in the direction perpendicular to the main surface 20a of the blade 20, the intermediate blades 20 can be removed from the mounting member 30 while the end blades 20 are mounted on the mounting member 30, so that operations such as maintenance of the intermediate blades 20 can be performed more easily.

[0070] In addition, in the first embodiment, as described above, the intermediate blade 20 is the blade 20 adjacent to the end blade 20 in the direction perpendicular to the main surface 20a of the blade 20. Thus, the blade 20 adjacent to the end blade 20 can be removed from the mounting member 30 while the end blade 20 is mounted on the mounting member 30, so that the blade 20 adjacent to the end blade 20 can be removed from the mounting member 30 while maintaining the level (horizontal state) of the end blade 20, and operations such as maintenance of the blade 20 adjacent to the end blade 20 can be performed.

[0071] [Second Embodiment]

[0072] Next, with reference to Figure 9 and Figure 10 , the structure of the substrate holding robot 101 according to the second embodiment will be described. In addition, for the same structures as those in the first embodiment described above, the same reference numerals are given in the drawings and detailed descriptions are omitted.

[0073] As Figure 9 shown, the substrate holding robot 101 includes a frame 10, a plurality of (two) blades 20 that respectively support the substrate W, and a mounting member 130 that supports the plurality of blades 20 and mounts the plurality of blades 20 on the frame 10. The plurality of (two) blades 20 are arranged in the direction (Z direction) perpendicular to the main surface 20a of the blade 20, and the end blade 20 (the blade 20 of the first layer) located at the end in the direction (Z direction) perpendicular to the main surface 20a of the blade 20 and the blade 20 (the blade 20 of the second layer) adjacent to the end blade 20 can be removed from the same side (Z1 direction side, upper side) in the direction (Z direction) perpendicular to the main surface 20a of the blade 20, and the blade 20 adjacent to the end blade 20 can be removed from the mounting member 130 while the end blade 20 is mounted on the mounting member 130.

[0074] According to the second embodiment, as described above, for the plurality of blades 20, in a state where the end blade 20 located in the direction (Z direction) perpendicular to the main surface 20a of the blade 20 is mounted on the mounting member 130, the blade 20 adjacent to the end blade 20 can be removed from the mounting member 130. Thus, different from the case where a plurality of blades 20 need to be removed together, since the blade 20 adjacent to the end blade 20 can be removed from the mounting member 130 in a state where the end blade 20 is mounted on the mounting member 130, the blade 20 adjacent to the end blade 20 can be removed from the mounting member 130 while maintaining the level (horizontal state) of the end blade 20 to perform maintenance operations on the blade 20 adjacent to the end blade 20.

[0075] As Figure 10 shown, the end blade 20 includes: an insertion hole portion 21 for inserting a fastening member 41 for fastening and fixing the end blade 20 to the mounting member 130; and an insertion hole portion 22 for inserting a fastening member 42 for fastening and fixing the blade 20 adjacent to the end blade 20 to the mounting member 130, and when viewed from the direction (Z direction) perpendicular to the main surface 20a of the blade 20, the fastening member 42 is exposed from the insertion hole portion 22. By inserting a tool (hexagon wrench) T into the hexagonal hole 42a of the head of the fastening member 42 exposed through the insertion hole portion 22 when viewed from the direction (Z direction) perpendicular to the main surface 20a of the blade 20 and removing the fastening member 42 through the insertion hole portion 22, the blade 20 adjacent to the end blade 20 can be removed from the mounting member 130 in a state where the end blade 20 is mounted on the mounting member 130 by the fastening member 41.

[0076] As Figure 9 and Figure 10 shown, a plurality of (two) blades 20 are provided on the substrate holding robot 101. That is, the substrate holding robot 101 is configured to be able to carry (hold) a plurality of (two) substrates W.

[0077] The order of removing the blade (the blade of the second layer) 20 adjacent to the blade (the blade of the first layer) 20 at the end from the mounting member 130 is the same as that in the first embodiment described above. That is, from the upper side (Z1 direction side) toward the lower side (Z2 direction side), the tool T is inserted into the insertion hole portion 22 of the blade (the blade of the first layer) 20 at the end and the insertion hole portion 31b of the first support portion 31 of the mounting member 130. And the front end portion of the tool T is inserted into the hexagonal hole 42a of the fastening member 42 in a state where the fastening member 42 is fastened in the fastening hole portion 32a of the second support portion 32 of the mounting member 130. In addition, before inserting the tool T into the insertion hole portion 22 and the insertion hole portion 31b, when viewed from the upper side (Z1 direction side), the head of the fastening member 42 is exposed via the insertion hole portion 22 and the insertion hole portion 31b so that the removal operation based on the tool T can be performed.

[0078] Moreover, after performing the removal operation based on the tool T (the operation of loosening the fastening member 42 to remove the fastening member 42 from the fastening hole portion 32a), the fastening member 42 is removed (taken out) from the lower side (Z2 direction side) toward the upper side (Z1 direction side) via the insertion hole portion 22 and the insertion hole portion 31b. And in a state where the fastening member 42 has released the state of fastening and fixing the blade 20 adjacent to the blade 20 at the end to the second support portion 32 of the mounting member 130, the blade 20 adjacent to the blade 20 at the end is moved in a pulling manner. As a result, it is possible to remove the blade (the blade of the second layer) 20 adjacent to the blade 20 at the end from the second support portion 32 of the mounting member 130 in a state where the blade (the blade of the first layer) 20 at the end is mounted on the first support portion 31 of the mounting member 130.

[0079] In addition, other structures of the second embodiment are the same as those of the first embodiment described above.

[0080] [Effects of the Second Embodiment]

[0081] In the second embodiment, the following effects can be obtained.

[0082] In the second embodiment, as described above, for the plurality of blades 20, it is possible to remove the blade 20 adjacent to the blade 20 at the end from the mounting member 130 in a state where the blade 20 at the end located in the direction perpendicular to the main surface 20a of the blade 20 is mounted on the mounting member 130. Thus, different from the case where it is necessary to remove a plurality of blades 20 together, since it is possible to remove the blade 20 adjacent to the blade 20 at the end from the mounting member 130 in a state where the blade 20 at the end is mounted on the mounting member 130, it is possible to remove the blade 20 adjacent to the blade 20 at the end from the mounting member 130 while maintaining the level (horizontal state) of the blade 20 at the end to perform operations such as maintenance on the blade 20 adjacent to the blade 20 at the end.

[0083] In addition, in the second embodiment, as described above, the blade 20 at the end includes: an insertion hole portion 21 through which a fastening member 41 for fastening and fixing the blade 20 at the end to the mounting member 130 is inserted; and an insertion hole portion 22 through which a fastening member 42 for fastening and fixing the blade 20 adjacent to the blade 20 at the end to the mounting member 130 is inserted. When viewed from a direction perpendicular to the main surface 20a of the blade 20, the fastening member 42 protrudes from the insertion hole portion 22. Further, by removing the fastening member 42 that protrudes from the insertion hole portion 22 when viewed from a direction perpendicular to the main surface 20a of the blade 20 through the insertion hole portion 22, the blade 20 adjacent to the blade 20 at the end can be removed from the mounting member 130 in a state where the blade 20 at the end is mounted on the mounting member 130 by the fastening member 41. Thus, by simply removing the fastening member 42 through the insertion hole portion 22, the blade 20 adjacent to the blade 20 at the end can be simply removed from the mounting member 130, and thus operations such as maintenance of the blade 20 adjacent to the blade 20 at the end can be easily performed.

[0084] In addition, other effects of the second embodiment are the same as those of the first embodiment described above.

[0085] [Modification Example]

[0086] In addition, all points of the embodiments disclosed this time should be considered as illustrative and not as limitations on the present invention. The scope of the present invention is not limited by the description of the above embodiments, but is represented by the claims, and also includes meanings equivalent to the claims and all changes (modification examples) within its scope.

[0087] For example, in the first and second embodiments described above, an example in which the arm is a horizontal multi-joint robot arm is shown, but the present invention is not limited thereto. For example, the arm may also be an arm other than a horizontal multi-joint robot arm, such as a vertical multi-joint robot arm.

[0088] In addition, in the first embodiment described above, an example in which four blades are provided in the substrate holding robot hand is shown, but the present invention is not limited thereto. For example, a plurality of blades other than four may also be provided in the substrate holding robot hand.

[0089] In addition, in the first and second embodiments described above, an example in which the blade has a bifurcated shape is shown, but the present invention is not limited thereto. For example, the blade may also have a shape other than a bifurcated shape.

[0090] In addition, in the above-described first and second embodiments, an example is shown in which the blade is configured to be able to support two substrates at mutually different heights, but the present invention is not limited thereto. For example, the blade may also be configured to be able to support only one substrate (able to support the substrate at only one height).

[0091] In addition, in the above-described first and second embodiments, an example is shown in which a movable support unit is provided, but the present invention is not limited thereto. For example, the movable support unit may not be provided.

[0092] In addition, in the above-described first and second embodiments, an example is shown in which the movable support unit includes a pair of support members, but the present invention is not limited thereto. For example, the movable support unit may also include one support member.

[0093] In addition, in the above-described first and second embodiments, an example is shown in which two pressing units, i.e., a first movable pressing unit and a second movable pressing unit, are provided, but the present invention is not limited thereto. For example, only one movable pressing unit may be provided.

[0094] In addition, in the above-described first and second embodiments, an example is shown in which the movable pressing unit includes a pair of pressing members, but the present invention is not limited thereto. For example, the movable pressing unit may also include only one pressing member.

[0095] In addition, in the above-described first embodiment, an example is shown in which the intermediate blade is a blade (adjacent one blade) adjacent to the end blade in a direction perpendicular to the main surface of the blade, but the present invention is not limited thereto. For example, the intermediate blade may also include a blade (adjacent one blade) adjacent to the end blade in a direction perpendicular to the main surface of the blade and two or more adjacent blades. That is, it may also be configured such that, in a state where the end blade is mounted on the mounting member, each of the adjacent one blade and two or more adjacent blades can be removed from the same side (e.g., the upper side) in the direction perpendicular to the main surface of the blade.

[0096] In addition, in the above-described first embodiment, an example is shown in which the mounting member includes a second support portion that commonly supports the intermediate blade adjacent in the direction perpendicular to the main surface of the blade, but the present invention is not limited thereto. For example, the mounting member may also include a plurality of second support portions that respectively support the intermediate blade.

[0097] In addition, in the above-described first and second embodiments, an example is shown in which a pair (two) of insertion hole portions (first insertion hole portions) for inserting fastening members (first fastening members) for fastening and fixing the end blades and insertion hole portions (second insertion hole portions) for inserting fastening members (second fastening members) for fastening and fixing the intermediate blades are provided, but the present invention is not limited thereto. For example, one or more than three first insertion hole portions (first fastening members) and second insertion hole portions (second fastening members) may be provided.

[0098] In addition, in the above-described first and second embodiments, an example is shown in which the end blades are fastened and fixed via a plate by a fastening member, but the present invention is not limited thereto. For example, the end blades may be fastened and fixed by a fastening member without passing through a plate.

[0099] In addition, in the above-described first embodiment, an example is shown in which a plurality of blades can be removed from the mounting member in a state where the end blade is mounted on the mounting member on both sides, i.e., one side and the other side in a direction perpendicular to the main surface of the blade, but the present invention is not limited thereto. For example, it may be configured such that a plurality of blades can be removed from the mounting member in a state where the end blade is mounted on the mounting member on only any one of one side and the other side in a direction perpendicular to the main surface of the blade.

[0100] Description of Reference Numerals

[0101] 1... Substrate holding robot; 2... Arm; 10... Frame; 20... Blade; 20a... Main surface; 21... Insertion hole portion (first insertion hole portion); 22... Insertion hole portion (second insertion hole portion); 30, 130... Mounting member; 31... First support portion; 31a... Fastening hole portion (first fastening hole portion); 31b... Insertion hole portion (third insertion hole portion); 32... Second support portion; 32a... Fastening hole portion (second fastening hole portion); 41... Fastening member (first fastening member); 42... Fastening member (second fastening member); 50... Plate; 51... Insertion hole portion (fourth insertion hole portion); 52... Insertion hole portion (fifth insertion hole portion); 100... Substrate transfer robot; W... Substrate.

Claims

1. A substrate holding manipulator, characterized in that, Comprising: A frame; A plurality of blades, each of which supports a substrate; and A mounting member for supporting the plurality of blades and mounting the plurality of blades to the frame, The plurality of blades are arranged in a direction perpendicular to the main surface of the blade, and the intermediate blade can be removed from the mounting member in a state where the end blade located in the direction perpendicular to the main surface of the blade, i.e., the end blade, is mounted to the mounting member. The end blade includes: a first insertion hole portion for inserting a first fastening member for fastening and fixing the end blade to the mounting member; and a second insertion hole portion for inserting a second fastening member for fastening and fixing the intermediate blade to the mounting member, and in a view from a direction perpendicular to the main surface of the blade, the second fastening member protrudes from the second insertion hole portion.

2. The substrate holding manipulator according to claim 1, characterized in that, By removing the second fastening member that protrudes through the second insertion hole portion in a view from a direction perpendicular to the main surface of the blade via the second insertion hole portion, the intermediate blade can be removed from the mounting member in a state where the end blade is mounted to the mounting member by the first fastening member.

3. The substrate holding manipulator according to claim 2, characterized in that, The second insertion hole portion has a size capable of inserting a tool for removing the second fastening member.

4. The substrate holding manipulator according to claim 3, characterized in that, The second insertion hole portion has a size capable of inserting the second fastening member.

5. The substrate holding manipulator according to claim 2, characterized in that, The first fastening member protrudes in a state of being inserted through the first insertion hole portion. By removing the exposed first fastening member, the end blade can be removed from the mounting member in a state where the intermediate blade is mounted to the mounting member by the second fastening member.

6. The substrate holding manipulator according to claim 2, characterized in that, The mounting member includes a first support portion for supporting the end blade and a second support portion for supporting the intermediate blade. The first support portion has: a first fastening hole portion arranged at a position overlapping the first insertion hole portion in a direction perpendicular to the main surface of the blade and for fastening the first fastening member inserted through the first insertion hole portion; and a third insertion hole portion arranged at a position overlapping the second insertion hole portion in a direction perpendicular to the main surface of the blade and for inserting the second fastening member together with the second insertion hole portion. The second support portion has a second fastening hole portion arranged at a position overlapping the second insertion hole portion and the third insertion hole portion in a direction perpendicular to the main surface of the blade and for fastening the second fastening member.

7. The substrate holding manipulator according to claim 6, characterized in that, The second support portion commonly supports the intermediate blades adjacent in a direction perpendicular to the main surface of the blade.

8. The substrate holding manipulator according to claim 2, characterized in that, The first insertion hole portion includes a pair of first insertion hole portions. The second insertion hole portion includes a pair of second insertion hole portions. The pair of first insertion hole portions and the pair of second insertion hole portions are arranged at the corners of a rectangular shape and are located on different diagonals of the rectangle.

9. The substrate holding manipulator according to claim 2, characterized in that, It also has a plate member, which includes: a fourth insertion through-hole portion that is disposed at a position overlapping the first insertion through-hole portion in a direction perpendicular to the main surface of the blade and is for inserting the first fastening member therethrough; and a fifth insertion through-hole portion that is disposed at a position overlapping the second insertion through-hole portion in a direction perpendicular to the main surface of the blade and is for inserting the second fastening member therethrough. The blade at the end portion is fastened and fixed via the plate member by the first fastening member.

10. The substrate holding manipulator according to claim 1, characterized in that, The plurality of blades are configured such that on both sides, i.e., one side and the other side in a direction perpendicular to the main surface of the blade, the intermediate blades can be removed from the mounting member while the end blade is mounted on the mounting member.

11. The substrate holding manipulator according to claim 1, characterized in that, The intermediate blade is a blade adjacent to the end blade in a direction perpendicular to the main surface of the blade.

12. A substrate holding manipulator, characterized in that, It includes: a frame; a plurality of blades that respectively support a substrate; and a mounting member that is for supporting the plurality of blades and mounting the plurality of blades on the frame, The plurality of blades are arranged in a direction perpendicular to the main surface of the blade. The end blade, i.e., the blade at the end in the direction perpendicular to the main surface of the blade, and the blade adjacent to the end blade can be removed from the same side in the direction perpendicular to the main surface of the blade. And the blade adjacent to the end blade can be removed from the mounting member while the end blade is mounted on the mounting member. The end blade includes: a first insertion through-hole portion that is for inserting the first fastening member for fastening and fixing the end blade to the mounting member therethrough; and a second insertion through-hole portion that is for inserting the second fastening member for fastening and fixing the blade adjacent to the end blade to the mounting member therethrough. And when observed from a direction perpendicular to the main surface of the blade, the second fastening member protrudes from the second insertion through-hole portion.

13. The substrate holding manipulator according to claim 12, characterized in that, By removing the second fastening member that protrudes from the second insertion through-hole portion when observed from a direction perpendicular to the main surface of the blade through the second insertion through-hole portion, the blade adjacent to the end blade can be removed from the mounting member while the end blade is mounted on the mounting member by the first fastening member.

14. A substrate handling robot, characterized in that, It includes: a substrate holding manipulator; and an arm for moving the substrate holding manipulator, The substrate holding manipulator includes: a frame; a plurality of blades that respectively support a substrate; and a mounting member that is for supporting the plurality of blades and mounting the plurality of blades on the frame, The plurality of blades are arranged in a direction perpendicular to the main surface of the blade. The intermediate blade can be removed from the mounting member while the end blade, i.e., the blade at the end in the direction perpendicular to the main surface of the blade, is mounted on the mounting member. The blades at the end portion include: a first insertion through-hole portion for inserting a first fastening member that fastens and fixes the blades at the end portion to the mounting member; and a second insertion through-hole portion for inserting a second fastening member that fastens and fixes the intermediate blades to the mounting member, and in a view from a direction perpendicular to the main surface of the blade, the second fastening member protrudes from the second insertion through-hole portion.

Images