Light source module, light irradiation apparatus provided with the same, and cooling method for light source module

Abstract

Provided is a light source module that can handle a workpiece having a wide width and minimize the possibility of refrigerant adhering to the workpiece. The light source module (10) is composed of a plurality of light sources (12), a substrate (14) on the surface of which the light sources (12) are arranged, and a heat sink (16) arranged on the back surface of the substrate (14). A refrigerant flow-through pipe (50) through which a refrigerant (L) flows inside is embedded in a refrigerant flow-through pipe embedding groove (20) formed in the heat sink (16).

Description

TECHNICAL FIELD

[0001] The present application relates to a light source module for exposure of an alignment film such as exposure of an alignment film for a large liquid crystal panel or a phase difference film, or scanning exposure of a semiconductor or the like, a light irradiation device provided with the same, and a cooling method for the light source module. BACKGROUND

[0002] Conventionally, a light source module using an LED as a light source is used in scanning exposure of a semiconductor or the like (for example, Patent Literature 1). Moreover, by arranging and disposing a plurality of light source modules in a manner longer than the width of a workpiece W, one light irradiation device is constituted.

[0003] A light source such as an LED generates heat at the time of light emission, and when the light source becomes high temperature due to this heat, the light emission efficiency decreases. Therefore, the light source module needs to be cooled.

[0004] As a cooling method for the light source module, for example, in the cooling unit 1 shown in Patent Literature 1, the light source module M is contact-disposed. This cooling unit 1 is constituted by a main body portion 2, a refrigerant flow path 3 formed in the main body portion 2, and a pair of joint connecting portions 4 disposed at both end portions of the main body portion 2. Figure 8

[0005] The main body portion 2 is a substantially rectangular plate formed of aluminum or the like, and a plurality of refrigerant flow paths 3 are provided through the main body portion 2 in a manner that one side surface and the other side surface of the main body portion 2 communicate with each other using a drill or the like.

[0006] The joint connecting portion 4 has an internal flow path 6 that connects one end to the refrigerant flow path 3 and the other end to a joint 5 such as a flange. By disposing such a joint connecting portion 4 at both ends of the main body portion 2, the refrigerant L (for example, cooling water) that has entered the joint 5 disposed at one joint connecting portion 4 passes through the internal flow path 6 of the other joint connecting portion 4 and flows out from the other joint 5 via the internal flow path 6 of the other joint connecting portion 4. Moreover, a gasket (or O-ring) 9 is interposed at the joint surface of the main body portion 2 and the joint connecting portion 4, and leakage of the refrigerant L is prevented.

[0007] By contact-disposing a plurality of light source modules M to the main body portion 2, the heat generated from each light source module M is conducted to the main body portion 2, and the heat is exhausted by the refrigerant L flowing in the refrigerant flow path 3 of the main body portion 2, so that the light source of the light source module M can be prevented from becoming high temperature.

[0008] Moreover, regarding the structure of the main body portion 2, as described above, the refrigerant flow path 3 can be provided through using a drill or the like, but in the case where the main body portion 2 is in a long strip shape, it is difficult to perform processing using a drill or the like, and as described in Patent Literature 2, a structure in which a plurality of refrigerant flow paths 3 are formed in the main body portion 2 is used. Figure 9 ​As shown, the main body 2 can also be divided into two halves, and recesses 8 forming refrigerant flow paths 3 are formed on the surface of each part 7. In this case, a gasket (or O-ring) 9 is clamped between the two parts 7.

[0009] Existing technical documents

[0010] Patent documents

[0011] Patent Document 1: Japanese Patent Application Publication No. 2019-101361 Summary of the Invention

[0012] The problem that the invention aims to solve

[0013] However, existing cooling structures present problems related to refrigerant L leakage. That is, in... Figure 8 In the case of the cooling unit 1 shown, as described above, it is difficult to process it using a drill bit or the like, so the main body 2 cannot be made into a long strip shape. Therefore, if this cooling unit 1 is used for a wide workpiece W, when refrigerant L leaks between the main body 2 and the joint connection 4 due to defects in the gasket 9, the dripping refrigerant L may adhere to the workpiece W.

[0014] In addition, Figure 9 In the case of the cooling unit 1 shown, similarly, when refrigerant L leaks from between the parts 7 that divide the main body 2 into two halves due to defects in the gasket 9, the dripping refrigerant L may adhere to the workpiece W.

[0015] The present invention was made in view of the above-mentioned problems, and its object is to provide a light source module capable of handling wide workpieces W and minimizing the possibility of refrigerant L adhering to workpiece W, a light irradiation device having the same, and a cooling method for the light source module.

[0016] Technical solutions for solving the problem

[0017] According to one aspect of the present invention, a light source module is provided, comprising: a plurality of light sources; a substrate on which the light sources are disposed on a surface; and a heat sink disposed on the back side of the substrate, wherein a refrigerant flow pipe embedding groove is formed on the heat sink for embedding a refrigerant flow pipe into which refrigerant flows internally.

[0018] Preferably, a plurality of refrigerant flow pipe embedding grooves are formed parallel to each other on the radiator.

[0019] Preferably, the refrigerant flow pipe embedding groove is formed on the surface of the heat sink opposite to the substrate, and the light source module further includes a retainer that clamps and holds the refrigerant flow pipe between itself and the heat sink.

[0020] According to another aspect of the present invention, a light irradiation device is provided, which includes the above-described light source module and the refrigerant flow pipe.

[0021] Preferably, the light irradiation device includes a plurality of refrigerant flow tubes, and a plurality of refrigerant flow tube embedding slots are formed on the heat sink of the light source module for the refrigerant flow tubes to be embedded in each other in parallel. The light irradiation device also includes a refrigerant flow tube rotation unit, which adjusts the irradiation angle of the light source module by rotating the remaining refrigerant flow tubes with any one of the refrigerant flow tubes as the central axis.

[0022] According to another aspect of the present invention, a cooling method for a light source module is provided, the light source module comprising: a plurality of light sources; a substrate on which the light sources are disposed on a surface; and a heat sink disposed on the back side of the substrate, wherein a refrigerant flow pipe embedding groove is formed on the heat sink for embedding a refrigerant flow pipe into which refrigerant flows internally, and the cooling method for the light source module cools the light source module by allowing the refrigerant to flow inside the refrigerant flow pipe.

[0023] Invention Effects

[0024] According to the light source module of the present invention, a refrigerant flow tube embedding groove is formed on a heat sink mounted on a substrate on which a light source is disposed, for embedding a refrigerant flow tube. By allowing refrigerant to flow through the refrigerant flow tube, heat generated by the light source can be recovered and the light source cooled. Even when many light source modules are arranged in a row to accommodate a wide workpiece W, refrigerant leakage from the refrigerant flow tube is easily prevented, thus minimizing the possibility of refrigerant adhering to the workpiece. Attached Figure Description

[0025] Figure 1 This is a diagram illustrating a light irradiation device 100 according to an embodiment of the present invention.

[0026] Figure 2 The diagram shows the light source module 10 according to the embodiment of the present invention, (a) is the front view and (b) is the right side view.

[0027] Figure 3 The diagram shows the light source module 10 involved in the modified example 1. (a) is the front view and (b) is the right side view.

[0028] Figure 4 This is a right-side view of the light source module 10 involved in Modified Example 2.

[0029] Figure 5is a drawing showing the light source module 10 and the refrigerant flow pipe rotating unit 72 according to the modification 3, (a) is a front view, and (b) is a right side view.

[0030] Figure 6 is a drawing showing the light source module 10 and the refrigerant flow pipe rotating unit 72 according to the modification 3, (a) is a front view, and (b) is a right side view.

[0031] Figure 7 is a drawing showing the light source module 10 and the like according to the modification 4.

[0032] Figure 8 is a drawing showing the light source module M and the cooling unit 1 according to the related art.

[0033] Figure 9 is a drawing showing the light source module M and the cooling unit 1 according to the related art. DETAILED DESCRIPTION

[0034] (Configuration of the light irradiation apparatus 100)

[0035] Hereinafter, the light source module 10 according to the embodiment for applying the present application will be described. As shown in Figure 1 , the light irradiation apparatus 100 according to an example involves roughly a plurality of light source modules 10, a refrigerant flow pipe 50, and a refrigerant flow device 60.

[0036] As shown in Figure 2 , the light source module 10 roughly involves a light source 12, a substrate 14, a heat sink 16, and a holding member 18.

[0037] The light source 12 radiates light of a given wavelength by accepting supply of electric power, and in the present embodiment, an LED (Light Emitting Diode) is used. In addition, as the kind of the light source 12, it is not limited to the LED, and an LD (Laser Diode) such as a VCSEL element or the like can be used.

[0038] The substrate 14 is a substantially rectangular plate material in which a plurality of light sources 12 are arranged on a surface thereof. In addition, on the surface of the substrate 14, in addition to the light sources 12, a power supply terminal and a power supply circuit for supplying electric power to the light sources 12 are arranged.

[0039] The heat sink 16 is a plate-shaped member having a thickness formed of a material having high thermal conductivity such as copper / stainless steel / aluminum or the like. In the case of the heat sink 16 according to the present embodiment, on the surface side, the back surface of the substrate 14 is arranged in abutment, and on the back surface side (a surface opposite to the surface on which the substrate 14 is arranged), two refrigerant flow pipe insertion grooves 20 are formed in a mutually parallel manner.

[0040] The refrigerant flow pipe insertion groove 20 is a groove in which the refrigerant flow pipe 50 is inserted. Further, as shown in the drawing, the refrigerant flow pipe 50 can be directly inserted with respect to the refrigerant flow pipe insertion groove 20, or a lubricant, a sheet, or the like having high thermal conductivity can be interposed between the surface of the refrigerant flow pipe insertion groove 20 and the surface of the refrigerant flow pipe 50.

[0041] The holding member 18 is a plate member having a function of interposing and holding the refrigerant flow pipe 50 inserted in the refrigerant flow pipe insertion groove 20 between the heat sink 16, and in the present embodiment, is fixed with respect to the heat sink 16 by means of a screw 19 or the like.

[0042] Returning Figure 1 The refrigerant flow pipe 50 is a pipe formed of a material having high thermal conductivity such as copper / stainless steel / aluminum, and through which the refrigerant L flows. In the present embodiment, two refrigerant flow pipes 50 are inserted in the refrigerant flow pipe insertion grooves 20 of the heat sink 16 of each light source module 10 in parallel with each other. Further, the kind of the refrigerant L is not particularly limited, and tap water, purified water (distilled water, ion-exchange water, pure water), or a refrigerant such as ethanol, ethylene glycol, propylene glycol, or the like diluted with water can be considered.

[0043] The refrigerant flow device 60 is a device for circulating the refrigerant L with respect to each refrigerant flow pipe 50, and in the present embodiment, generally includes a cooler 62, a refrigerant supply manifold 64, and a refrigerant recovery manifold 66.

[0044] The cooler 62 is a device that receives and cools the refrigerant L heated by recovering heat from each light source module 10, and supplies the refrigerant L again to each light source module 10. Further, in the case where the cooled refrigerant L can be used as, for example, a factory circulating water, the cooler 62 need not be provided.

[0045] The refrigerant supply manifold 64 is a member having a function of supplying the refrigerant L supplied from the cooler 62 via a supply pipe 68 to each refrigerant flow pipe 50, and the supply pipe 68 is connected to each refrigerant flow pipe 50.

[0046] In the present embodiment, the plurality of light source modules 10 are divided into two groups, and five light source modules 10 are arranged in a line in each group. Since two refrigerant flow pipes 50 are provided in each group, four refrigerant flow pipes 50 are connected to the refrigerant supply manifold 64. Further, in each refrigerant flow pipe 50 in one group, the refrigerant L flows in a manner of facing each other.

[0047] The refrigerant recovery manifold 66 is a member having a function of collecting the refrigerant L returned from each refrigerant flow pipe 50 and returning the refrigerant L to the cooler 62 via a recovery pipe 70, and the recovery pipe 70 is connected to each refrigerant flow pipe 50.

[0048] As described above, in this embodiment, there are two groups with five light source modules 10, and each group is equipped with two refrigerant flow pipes 50. Therefore, four refrigerant flow pipes 50 are connected to the refrigerant recovery manifold 66.

[0049] (Features of the light irradiation device 100)

[0050] In the light source module 10 of this embodiment, a refrigerant flow pipe insertion groove 20 is formed on the heat sink 16 mounted on the substrate 14 on which the light source 12 is disposed. By allowing the refrigerant L cooled by the cooler 62 to flow through each refrigerant flow pipe 50, the heat generated by the light source 12 can be recovered and the light source 12 can be cooled. Even when many light source modules 10 are arranged in a row to accommodate a wide workpiece W, it is easy to prevent the refrigerant from leaking from the refrigerant flow pipe 50, thus minimizing the possibility of the refrigerant L adhering to the workpiece W.

[0051] (Variation Example 1)

[0052] In the light source module 10 described in the above embodiments, two refrigerant flow pipe embedding grooves 20 are formed in a parallel manner on the back side of the heat sink 16 (the side opposite to the side on which the substrate 14 is disposed). However, the number of refrigerant flow pipe embedding grooves 20 formed on a heat sink 16 can be one or more.

[0053] For example, when three refrigerant flow pipe embedding slots 20 are formed on a heat sink 16, that is, when three refrigerant flow pipes 50 are installed in a group for a light source module 10, it becomes Figure 3 The arrangement is shown. In this case, regarding the flow direction of refrigerant L in each refrigerant flow pipe 50, it is preferable that it is in the same direction in two refrigerant flow pipes 50 and in the opposite direction in the remaining refrigerant flow pipe 50. Of course, it is also possible for refrigerant L to flow in the same direction in all three refrigerant flow pipes 50.

[0054] (Variation Example 2)

[0055] Furthermore, in the light source module 10 described in the above embodiment, a retaining member 18 is used, which serves to sandwich and hold the refrigerant flow pipe 50 embedded in the refrigerant flow pipe embedding groove 20 between the heat sink 16 and the refrigerant flow pipe. However, for example, such as Figure 4 As shown, when a refrigerant passage hole 22 for inserting the refrigerant passage pipe 50 is formed on the radiator 16, or when the refrigerant passage pipe 50 is disposed between the radiator 16 and the substrate 14 (not shown), the retainer 18 is not required.

[0056] (Modified example 3)

[0057] Further, as Figure 5 indicated, in the light irradiation device 100, a refrigerant flow pipe rotating unit 72 can also be provided, which rotates the remaining refrigerant flow pipes 50 by taking any one of the refrigerant flow pipes 50 as a center axis, thereby adjusting the irradiation angle of the light source module 10. In this Figure 5 case, the case where two refrigerant flow pipes 50 are installed for one group of light source modules 10 is shown.

[0058] By the refrigerant flow pipe rotating unit 72, the refrigerant flow pipes 50 on the upper side in the figure are rotated by taking the refrigerant flow pipes 50 on the lower side in the figure as a center axis, thereby adjusting the irradiation angle of the light source module 10.

[0059] Further, in the case where three refrigerant flow pipes 50 are installed for one group of light source modules 10, as Figure 6 indicated, by taking the refrigerant flow pipes 50 on the lowermost side in the figure as a center axis, the refrigerant flow pipes 50 on the middle side in the figure and the refrigerant flow pipes 50 on the uppermost side in the figure are rotated at the same angle, respectively, thereby adjusting the irradiation angle of the light source module 10.

[0060] (Modified example 4)

[0061] Further, in the case where the irradiation angle of the light source module 10 can be adjusted as explained in the modified example 3, in addition thereto, as Figure 7 indicated, it can also be made possible to adjust the positions of the polarizer A, the light-transmissive plate B, the optical filter C, the glass cover D, and the like, which are used in the exposure of the workpiece W, to be parallel with respect to the arrangement surface of the workpiece W.

[0062] It should be considered that the embodiments disclosed this time are illustrative in all respects but not restrictive. The scope of the present application is not represented by the above-described explanation but by the scope of the patent request, and it is intended to include all modifications within the meaning and the scope equivalent to the patent request.

[0063] Explanation of symbols

[0064] 10... light source module; 12... light source; 14... substrate; 16... heat sink; 18... holder; 19... screw

[0065] 20... refrigerant flow pipe insertion groove; 22... refrigerant flow pipe insertion hole

[0066] 50... refrigerant flow pipe

[0067] 60... refrigerant flow passage device; 62... cooler; 64... refrigerant supply manifold; 66... refrigerant recovery manifold; 68... supply pipe; 70... recovery pipe; 72... refrigerant flow passage pipe rotating unit 100... light irradiation device

[0068] L... refrigerant; W... workpiece; A... polarizer; B... light-transmissive plate; C... optical filter; D... glass cover.

Claims

1. A light irradiation device comprising a light source module and a plurality of refrigerant flow pipes, wherein the light source module comprises: Multiple light sources; A substrate having the light source disposed on its surface; and A heat sink is disposed on the back side of the substrate. The radiator has multiple refrigerant flow pipe insertion slots for embedding multiple refrigerant flow pipes that allow refrigerant to flow internally. The radiator has parallel grooves for embedding each of the refrigerant flow pipes. The light irradiation device also includes a refrigerant flow pipe rotation unit, which adjusts the irradiation angle of the light source module by rotating the remaining refrigerant flow pipes with any one of the refrigerant flow pipes as the central axis.

2. The light irradiation device according to claim 1, wherein, In the light source module, The refrigerant flow pipe embedment groove is formed on the surface of the radiator opposite to the substrate. The light source module also includes a retainer that clamps and holds the refrigerant flow pipe between itself and the heat sink.

3. A cooling method for a light source module, utilizing a light irradiation device, the light irradiation device comprising the light source module and a plurality of refrigerant flow pipes, the light source module comprising: Multiple light sources; A substrate having the light source disposed on its surface; and A heat sink is disposed on the back side of the substrate, and a refrigerant flow pipe embedding groove is formed on the heat sink for embedding the refrigerant flow pipe into which the refrigerant flows. The radiator has a plurality of refrigerant flow pipe embedding slots formed parallel to each other for each of the refrigerant flow pipes to be embedded in. In the cooling method of the light source module, the light irradiation device is used. The light source module is cooled by circulating the refrigerant inside the refrigerant flow pipe. Furthermore, the illumination angle of the light source module is adjusted by rotating the remaining refrigerant flow pipes with any one of the refrigerant flow pipes as the central axis.

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