Coil clamping device for semiconductor equipment

Abstract

The present invention provides a coil clamping device for semiconductor equipment, which belongs to the field of semiconductor equipment technology. A cylindrical member is provided on the bottom plate of the semiconductor equipment, and a coil is provided outside the cylindrical member. After the coil wraps around the cylindrical member, the two ends intersect. One end is fixedly connected to a first fixed block, and the other end is fixedly connected to a second fixed block. The first fixed block and the second fixed block are respectively slidably connected to the bottom plate. The two opposite side surfaces of the first fixed block and the second fixed block are non-parallel smooth planes. A clamping block of matching shape is fitted between the two side surfaces. The clamping block is connected to the bottom plate via an elastic reset mechanism. The present invention can effectively solve the problem of coil clamping. Even if the length of the coil changes due to temperature, it can be automatically adjusted by the spring force so that the coil is always in close contact with the cylindrical member, ensuring heat transfer efficiency and heating effect, and helping to improve the working efficiency of the equipment.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor equipment, and in particular relates to a coil clamping device for semiconductor equipment. Background Art

[0002] In semiconductor equipment, such as etching equipment, a component called a dome is mounted above the base plate of the device. The lower end of its outer surface is cylindrical, and is generally referred to herein as the "cylindrical member." Due to process requirements, the cylindrical member is generally made of ceramic material and needs to be heated (for example, from room temperature to 200 degrees Celsius). To this end, a coil is arranged around the outside of the cylindrical member in contact with it. Current is passed through the coil to generate heat, thereby heating the cylindrical member through contact heat conduction. In existing technical solutions, the coil is basically clamped to the cylindrical member solely by its own diameter, which makes it impossible to completely fix it tightly. There is a gap between the coil and the cylindrical member, and the contact area is small, resulting in low heat transfer efficiency and poor heating effect. In particular, as the coil temperature rises, the copper wire that constitutes it will expand and increase in length, further widening the gap. The ceramic cylindrical member and the metal coil have different expansion coefficients, so it is impossible to directly fix the two together. Therefore, a clamping device for this structure is needed. Summary of the Invention

[0003] Based on the technical problems existing in the prior art, the present invention provides a coil clamping device for semiconductor equipment, which clamps the coil on a cylindrical part to ensure that the coil and the cylindrical part are in full contact, avoiding the problem of poor heating effect caused by loose fixation and the existence of gaps.

[0004] According to the technical solution of the present invention, the present invention provides a coil clamping device for semiconductor equipment, a cylindrical part is provided on the base plate of the semiconductor equipment, a coil is provided outside the cylindrical part, and the two ends of the coil are crossed after it wraps around the cylindrical part, one end is fixedly connected to the first fixed block, and the other end is fixedly connected to the second fixed block, and the first fixed block and the second fixed block are respectively slidably connected to the base plate; the two opposite side surfaces of the first fixed block and the second fixed block are non-parallel smooth planes, and a clamping block of matching shape is fitted between the two side surfaces, and the clamping block is connected to the base plate through an elastic reset mechanism.

[0005] In one embodiment, the distance between the two opposite side surfaces of the first fixing block and the second fixing block gradually decreases in a direction away from the cylindrical member.

[0006] Furthermore, the elastic reset mechanism includes a fixing seat, which is located on the side of the clamping block away from the cylindrical member, and is fixedly connected to the base plate; a connecting through hole is provided on the fixing seat, and a clamping bolt is inserted into the connecting through hole; a screw hole is provided on the clamping block on the side away from the cylindrical member; one end of the clamping bolt close to the cylindrical member is threadedly connected to the screw hole of the clamping block, and the other end of the clamping bolt is a bolt head, and a spring is arranged between the bolt head and the fixing seat.

[0007] Furthermore, the fixing seat is in the shape of a plate with an L-shaped cross section, the horizontal section of the L-shaped fixing seat is fixedly connected to the bottom plate by bolts, and a connecting through hole is provided on the vertical section of the L-shaped fixing seat.

[0008] Preferably, the first fixed block has a first strip hole that passes through the top and bottom on the side away from the cylindrical member, a first limiting member is slidably connected in the first strip hole, and the first limiting member is fixedly connected to the base plate; the second fixed block has a second strip hole that passes through the top and bottom on the side away from the cylindrical member, a second limiting member is slidably connected in the second strip hole, and the second limiting member is fixedly connected to the base plate.

[0009] Furthermore, the first limiting member and the second limiting member are both bolts; and the first strip-shaped hole and the second strip-shaped hole are both stepped holes.

[0010] Preferably, the angle between the two crossed ends of the coil is an obtuse angle; the angle between the first strip hole and the second strip hole in the length direction is an obtuse angle and is greater than the angle between the two crossed ends of the coil.

[0011] Preferably, the first fixing block and the second fixing block both include a base and a cover plate; a base groove is provided on the upper surface of the base, and a cover plate groove is provided on the lower surface of the cover plate; the cover plate is detachably arranged on the base, and the base groove and the cover plate groove jointly clamp the coil.

[0012] Preferably, the base and the cover are detachably fixedly connected by screws.

[0013] Preferably, the structures of the first fixing block and the second fixing block are symmetrical, and the axis of symmetry is a line connecting the clamping block and the center of the cylindrical member.

[0014] Compared with the prior art, the beneficial technical effects of the present invention are as follows:

[0015] 1. The present invention's coil clamping device for semiconductor equipment secures the coil's outer extension with first and second fixing blocks, with a clamping block positioned between them. The spring's elastic restoring force exerts an outward pull on the clamping blocks, which in turn pushes the two fixing blocks inward, tightening the ends of the coil. This effectively solves the coil clamping problem. Even if the coil's length fluctuates due to temperature, the spring's elastic force automatically adjusts, ensuring the coil remains firmly against the cylindrical component, ensuring efficient heat transfer and heating, thereby improving equipment operating efficiency.

[0016] 2. In the coil clamping device for semiconductor equipment of the present invention, the clamping bolt is threadedly connected to the clamping block, which can conveniently adjust the distance between the bolt head and the clamping block and fix it at any position, thereby adjusting the compression degree of the spring and the force of tightening the coil to adapt to different usage and installation conditions.

[0017] 3. The coil clamping device for semiconductor equipment of the present invention can be used based on existing equipment. It only needs to add a few screw holes on its bottom plate. It has a simple and clever structure, is easy to assemble and disassemble, and is low in cost and high in practical value. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 2 is a schematic diagram of a top view of the structure of an embodiment of the present invention.

[0019] Figure 2 yes Figure 1 A partial enlarged view of .

[0020] Figure 3 yes Figure 1 Schematic diagram of the AA section.

[0021] Figure 4 It is a schematic cross-sectional view of a clamping block and an elastic reset mechanism according to an embodiment of the present invention.

[0022] Figure 5 It is a schematic cross-sectional structural diagram of the first fixing block portion according to an embodiment of the present invention.

[0023] Description of reference numerals in the accompanying drawings:

[0024] 1. Base plate; 2. Cylindrical part; 3. Coil; 4. First fixing block; 5. Second fixing block; 6. Clamping block; 7. Fixing seat; 8. Connecting through hole; 9. Clamping bolt; 10. Bolt head; 11. Spring; 12. First strip hole; 13. First limiting member; 14. Second strip hole; 15. Second limiting member; 16. Base; 17. Cover plate; 18. Base groove; 19. Cover plate groove. DETAILED DESCRIPTION

[0025] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0026] It should also be noted that, for ease of description, only the parts related to the invention are shown in the drawings. In the absence of conflict, the embodiments and features of the embodiments of the present invention may be combined with each other.

[0027] It should be noted that the concepts of "first" and "second" mentioned in the present invention are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0028] It should be noted that the modifications of "one" and "multiple" mentioned in the present invention are illustrative rather than restrictive. Those skilled in the art should understand that unless otherwise clearly indicated in the context, it should be understood as "one or more".

[0029] The present invention relates to a coil clamping device for semiconductor equipment, belonging to the technical field of semiconductor equipment. A cylindrical member is provided on the bottom plate of the semiconductor equipment, and a coil is provided outside the cylindrical member. After the coil wraps around the cylindrical member, the two ends intersect. One end is fixedly connected to a first fixed block, and the other end is fixedly connected to a second fixed block. The first fixed block and the second fixed block are respectively slidably connected to the bottom plate. The two opposite side surfaces of the first fixed block and the second fixed block are non-parallel smooth planes. A clamping block of matching shape is fitted between the two side surfaces. The clamping block is connected to the bottom plate via an elastic reset mechanism. The present invention can effectively solve the problem of coil clamping. Even if the length of the coil changes due to temperature, it can be automatically adjusted by the spring force so that the coil is always in close contact with the cylindrical member, ensuring heat transfer efficiency and heating effect, and helping to improve the working efficiency of the equipment.

[0030] See also Figure 1 、 Figure 3 The semiconductor device involved in the coil clamping device for semiconductor equipment of the present invention, such as an etching device, comprises a base plate 1, on which a cylindrical member 2 (dome) is disposed, and a coil 3 is disposed outside the cylindrical member 2. Existing technical solutions generally achieve fixation only by the size of the coil 3, resulting in loose fixation and loose fit, resulting in low heat conduction efficiency and poor heating effect. To address this, the present invention improves the method of clamping the coil 3 to the cylindrical member 2. The component structures including the coil 3 and the cylindrical member 2 are the same as those of existing equipment, so they will not be described in detail.

[0031] See also Figure 2The coil 3 wraps around the cylindrical member 2 for at least one circle and then crosses at both ends. One end is fixedly connected to the first fixing block 4, and the other end is fixedly connected to the second fixing block 5. The first fixing block 4 and the second fixing block 5 are respectively slidably connected to the base plate 1; the two opposite sides of the first fixing block 4 and the second fixing block 5 are non-parallel smooth planes, and a clamping block 6 of matching shape is fitted between the two side surfaces. The clamping block 6 is connected to the base plate 1 through an elastic reset mechanism.

[0032] In a specific embodiment, the distance between the two opposite sides of the first fixing block 4 and the second fixing block 5 gradually decreases in the direction away from the cylindrical member 2, presenting a Figure 2 The clamping block 6 is in an inverted trapezoidal shape.

[0033] Please also see Figure 4 The elastic reset mechanism includes a fixing seat 7, which is located on the side of the clamping block 6 away from the cylindrical member 2, and the fixing seat 7 is fixedly connected to the base plate 1. For example, the fixing seat 7 is a plate with an L-shaped cross-section, and the horizontal section of the L-shaped fixing seat 7 is fixedly connected to the base plate 1 by bolts, and a connecting through-hole 8 is provided on the vertical section of the L-shaped fixing seat 7. A clamping bolt 9 is inserted into the connecting through-hole 8, and the clamping block 6 is provided with a screw hole on the side away from the cylindrical member 2. One end of the clamping bolt 9 close to the cylindrical member 2 is threadedly connected to the screw hole of the clamping block 6, and the other end of the clamping bolt 9 is a bolt head 10, and a spring 11 is arranged between the bolt head 10 and the fixing seat 7. In this embodiment, the spring 11 is a round wire coil spring and a compression spring (compression spring). The structures of the first fixing block 4 and the second fixing block 5 are symmetrical, and the axis of symmetry is the line connecting the clamping block 6 to the center of the cylindrical member 2.

[0034] The working principle of the above embodiment of the present invention is (direction based on Figure 2 (Description) Spring 11 is compressed between bolt head 10 and mounting base 7, providing an elastic restoring force that pushes clamping bolt 9 downward. Clamping bolt 9 pulls clamping block 6 downward, which in turn pushes first and second mounting blocks 4 and 5, which are in contact with either side of clamping block 6, toward each side. This tensions the ends of coil 3 and secures it snugly to cylindrical member 2. Even if the length of coil 3 fluctuates due to temperature, the elastic force of spring 11 automatically adjusts, ensuring that coil 3 remains firmly attached to cylindrical member 2, ensuring efficient heat transfer and heating. This eliminates the issue of direct fixation due to the different thermal expansion coefficients of the ceramic cylindrical member 2 and the metal coil 3. Furthermore, clamping bolt 9 is threadedly connected to clamping block 6, and the threads can withstand axial tension, providing a stable connection. Simply turning clamping bolt 9 allows for convenient adjustment of the distance between bolt head 10 and clamping block 6, automatically securing the connection at any desired position. This allows for adjustable compression of spring 11 and, consequently, the force required to tighten coil 3, to accommodate varying usage and installation conditions.

[0035] In order to ensure that the first fixing block 4 and the second fixing block 5 can stably slide in the desired direction, a limiting guide structure is provided between them and the bottom plate 1. Figure 2 、 Figure 5 In the illustrated embodiment, the first fixing block 4 has a first strip hole 12 extending vertically on the side away from the cylindrical member 2, a first limiting member 13 being slidably connected in the first strip hole 12, and the first limiting member 13 is fixedly connected to the base plate 1; the second fixing block 5 has a second strip hole 14 extending vertically on the side away from the cylindrical member 2, a second limiting member 15 being slidably connected in the second strip hole 14, and the second limiting member 15 is fixedly connected to the base plate 1. Preferably, the first limiting member 13 and the second limiting member 15 are both bolts, thereby minimizing the cost and difficulty of assembly; the first strip hole 12 and the second strip hole 14 are both stepped holes, corresponding to the bolts, and are both T-shaped, to prevent the first fixing block 4 and the second fixing block 5 from tilting up and detaching from the clamping block 6. Preferably, the angle between the two intersecting ends of the coil 3 is an obtuse angle, and the angle in the length direction of the first strip hole 12 and the second strip hole 14 is an obtuse angle and is greater than the angle between the two ends of the coil 3, so that the coil 3 is better tightened and can be achieved as follows. Figure 2 The guide function is achieved by using only one bolt as a stopper. It is conceivable that two bolts can be arranged side by side in the strip hole, or a square block can be provided to enhance the guide function; or a guide rail-slider method can be used to achieve a sliding connection between the fixed block and the base plate 1.

[0036] Both the first fixing block 4 and the second fixing block 5 include a base 16 and a cover plate 17. A base groove 18 is defined on the upper surface of the base 16, and a cover plate groove 19 is defined on the lower surface of the cover plate 17. The cover plate 17 is removably mounted on the base 16, for example, by screws or clamps, so that the base groove 18 and the cover plate groove 19 jointly clamp the coil 3, providing stable and removable clamping. The base groove 18 and the cover plate groove 19 may be, for example, arc-shaped, or may be polygonal star-shaped or have anti-slip grooves or protrusions to further ensure the fixing effect.

[0037] In another embodiment, Figure 2 The difference of the structure shown is that the two opposite surfaces of the first fixed block 4 and the second fixed block 5 are in a regular eight-shaped shape, the clamping block 6 is in an upright trapezoid, and the spring 11 is still a compression spring but is instead arranged between the clamping block 6 and the fixed seat 7, thereby pushing the clamping block 6 upward, and also achieving the effect of causing the first fixed block 4 and the second fixed block 5 to be forced to tighten the coil 3 on both sides.

[0038] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A coil clamping device for semiconductor equipment, wherein a cylindrical member (2) is provided on a bottom plate (1) of the semiconductor equipment, and a coil (3) is provided outside the cylindrical member (2), characterized in that: The coil (3) is wound around the cylindrical member (2) and then intersects at both ends, one end of which is fixedly connected to a first fixing block (4) and the other end of which is fixedly connected to a second fixing block (5), and the first fixing block (4) and the second fixing block (5) are respectively slidably connected to the base plate (1); the two opposite side surfaces of the first fixing block (4) and the second fixing block (5) are non-parallel smooth planes, and a clamping block (6) of matching shape is fitted between the two side surfaces, and the clamping block (6) is connected to the base plate (1) via an elastic reset mechanism; The elastic reset mechanism includes a fixing seat (7), the fixing seat (7) is located on the side of the clamping block (6) away from the cylindrical member (2), and the fixing seat (7) is fixedly connected to the base plate (1); a connecting through hole (8) is provided on the fixing seat (7), and a clamping bolt (9) is inserted into the connecting through hole (8); the clamping block (6) is provided with a screw hole on the side away from the cylindrical member (2); one end of the clamping bolt (9) close to the cylindrical member (2) is threadedly connected to the screw hole of the clamping block (6), and the other end of the clamping bolt (9) is a bolt head (10), and a spring (11) is provided between the bolt head (10) and the fixing seat (7).

2. The coil clamping device for semiconductor devices according to claim 1, wherein: The distance between the two opposite side surfaces of the first fixing block (4) and the second fixing block (5) gradually decreases in a direction away from the cylindrical member (2).

3. The coil clamping device for semiconductor devices according to claim 1, wherein: The fixing seat (7) is in the shape of a plate with an L-shaped cross section. The horizontal section of the L-shaped fixing seat (7) is fixedly connected to the bottom plate (1) by bolts, and the connecting through hole (8) is provided on the vertical section of the L-shaped fixing seat (7).

4. The coil clamping device for semiconductor devices according to claim 1, wherein: The first fixing block (4) has a first strip hole (12) extending vertically on a side away from the cylindrical member (2), a first limiting member (13) being slidably connected in the first strip hole (12), and the first limiting member (13) is fixedly connected to the bottom plate (1); The second fixing block (5) has a second strip hole (14) extending vertically on a side away from the cylindrical member (2), a second limiting member (15) is slidably connected in the second strip hole (14), and the second limiting member (15) is fixedly connected to the bottom plate (1).

5. The coil clamping device for semiconductor devices according to claim 4, wherein: The first limiting member (13) and the second limiting member (15) are both bolts; the first strip-shaped hole (12) and the second strip-shaped hole (14) are both stepped holes.

6. The coil clamping device for semiconductor devices according to claim 4, wherein: The angle between the two crossed ends of the coil (3) is an obtuse angle; the angle between the first strip hole (12) and the second strip hole (14) in the length direction is an obtuse angle and is greater than the angle between the two ends of the coil (3).

7. The coil clamping device for semiconductor equipment according to any one of claims 1 to 6, wherein: The first fixing block (4) and the second fixing block (5) both comprise a base (16) and a cover plate (17); a base groove (18) is provided on the upper surface of the base (16), and a cover plate groove (19) is provided on the lower surface of the cover plate (17); the cover plate (17) is detachably arranged on the base (16), and the base groove (18) and the cover plate groove (19) jointly clamp the coil (3).

8. The coil clamping device for semiconductor devices according to claim 7, wherein: The base (16) and the cover plate (17) are detachably fixedly connected via screws.

9. The coil clamping device for semiconductor devices according to any one of claims 1 to 6, wherein: The structures of the first fixing block (4) and the second fixing block (5) are symmetrical, and the axis of symmetry is a line connecting the clamping block (6) and the center of the cylindrical member (2).

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