A display panel, a preparation method of the display panel, and a display device

By setting some anodes in different layers in the display panel and using dry etching technology, the problems of low resolution and high power consumption are solved, achieving high-definition display and low-power display effect.

CN116347939BActive Publication Date: 2026-05-26SHANGHAI TIANMA MICRO ELECTRONICS CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI TIANMA MICRO ELECTRONICS CO LTD
Filing Date
2023-03-30
Publication Date
2026-05-26

AI Technical Summary

Technical Problem

Existing display panels have low resolution, making it impossible to achieve high-definition display. Furthermore, existing etching processes limit the anode size, resulting in high impedance, low luminous efficiency, and high power consumption.

Method used

By setting at least some anodes to be located in different layers, misconnection between adjacent anodes is avoided, and the anode distance is reduced in the arrangement direction of the light-emitting elements. Dry etching technology is used to reduce CD loss and increase the number of light-emitting elements per unit area.

Benefits of technology

The resolution and luminous efficiency of the display panel have been improved, while power consumption has been reduced, ensuring the reliability and display effect of the display panel.

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Abstract

This invention discloses a display panel, a method for fabricating the display panel, and a display device. The display panel includes: a substrate; multiple driving circuits located on one side of the substrate; multiple light-emitting elements located on the side of the driving circuits away from the substrate; the light-emitting elements are electrically connected to the driving circuits; each light-emitting element includes an anode, with at least some anodes located in different layers. By employing the above technical solution, misconnection between adjacent anodes is avoided, which is beneficial for accurate light emission from the display panel and improves its reliability. Furthermore, by adjusting the arrangement direction of the light-emitting elements, the distance between adjacent anodes can be reduced, increasing the number of light-emitting elements per unit area, thereby improving the resolution of the display panel and facilitating high-definition display.
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Description

Technical Field

[0001] This invention relates to the field of display technology, and in particular to a display panel, a method for manufacturing the display panel, and a display device. Background Technology

[0002] Virtual reality (VR) technology uses computer technology combined with optoelectronic sensing technology to generate a realistic virtual environment within a specific range, integrating sight, sound, touch, and smell. VR devices typically have built-in independent screens that can present VR resources to the user's left and right eyes, forming VR images. In near-eye display fields such as VR, a pixel density of at least 1500 PPI or even 2000 PPI is desired; however, existing display solutions have low resolution and cannot achieve high-definition display. Summary of the Invention

[0003] This invention provides a display panel, a method for manufacturing the display panel, and a display device to improve the resolution of the display panel and achieve high-definition display.

[0004] According to one aspect of the present invention, a display panel is provided, comprising:

[0005] Substrate;

[0006] Multiple driving circuits located on one side of the substrate;

[0007] Multiple light-emitting elements are located on the side of the driving circuit away from the substrate; the light-emitting elements are electrically connected to the driving circuit.

[0008] The light-emitting element includes an anode, and at least part of the anode is located in a different layer.

[0009] According to another aspect of the present invention, a method for manufacturing a display panel is provided, for manufacturing the above-mentioned display panel, the method comprising:

[0010] Provide substrate;

[0011] Multiple driving circuits are fabricated on one side of the substrate;

[0012] Multiple light-emitting elements are fabricated on the side of the driving circuit away from the substrate; the light-emitting elements are electrically connected to the driving circuit.

[0013] The light-emitting element includes an anode, and at least part of the anode is located in different layers.

[0014] According to another aspect of the present invention, a display device is provided, including the above-described display panel.

[0015] The technical solution of this invention, by setting at least some anodes in different layers in a direction parallel to the plane of the substrate, ensures that at least some anodes do not overlap, avoiding misconnection between adjacent anodes, which is beneficial for accurate light emission of the display panel and improves the reliability of the display panel. In the arrangement direction of the light-emitting elements, the distance between adjacent anodes can be reduced, increasing the number of light-emitting elements per unit area, thereby improving the resolution of the display panel and facilitating high-definition display. In addition, while increasing the number of light-emitting elements per unit area, there is no need to reduce the size of the anodes, ensuring the luminous efficiency of the light-emitting elements and contributing to low power consumption of the display panel.

[0016] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of a display panel provided in an embodiment of the present invention;

[0019] Figure 2 This is a schematic diagram of another display panel provided in an embodiment of the present invention;

[0020] Figure 3 This is a schematic diagram of another display panel provided in an embodiment of the present invention;

[0021] Figure 4 This is a top view structural diagram of a display panel provided in an embodiment of the present invention;

[0022] Figure 5 This is a schematic diagram of another display panel provided in an embodiment of the present invention;

[0023] Figure 6 This is a schematic diagram of another display panel provided in an embodiment of the present invention;

[0024] Figure 7 This is a schematic diagram of another display panel provided in an embodiment of the present invention;

[0025] Figure 8 This is a schematic diagram of another display panel provided in an embodiment of the present invention;

[0026] Figure 9 This is a top view structural diagram of another display panel provided in an embodiment of the present invention;

[0027] Figure 10 This is a schematic diagram of another display panel provided in an embodiment of the present invention;

[0028] Figure 11 This is a top view structural diagram of another display panel provided in an embodiment of the present invention;

[0029] Figure 12 This is a schematic diagram of another display panel provided in an embodiment of the present invention;

[0030] Figure 13 This is a flowchart illustrating a method for manufacturing a display panel according to an embodiment of the present invention;

[0031] Figure 14 This is a schematic diagram of the manufacturing process of a display panel according to an embodiment of the present invention;

[0032] Figure 15 This is a flowchart illustrating a method for preparing an anode for a display panel according to an embodiment of the present invention.

[0033] Figure 16 This is a schematic diagram of the fabrication process of the anode of a display panel according to an embodiment of the present invention;

[0034] Figure 17 This is a flowchart illustrating another method for preparing the anode of a display panel according to an embodiment of the present invention.

[0035] Figure 18 This is a schematic diagram of the fabrication process of the anode of another display panel provided in an embodiment of the present invention;

[0036] Figure 19 This is a flowchart illustrating another method for preparing the anode of a display panel according to an embodiment of the present invention.

[0037] Figure 20 This is a schematic diagram of the fabrication process of the anode of another display panel provided in an embodiment of the present invention;

[0038] Figure 21 This is a schematic diagram of the structure of a display device provided in an embodiment of the present invention. Detailed Implementation

[0039] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0040] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0041] In existing technologies, the anode of light-emitting elements (LEDs) typically comprises indium tin oxide (ITO). A wet etching process is generally used to etch the ITO conductive layer, forming multiple anodes simultaneously. Wet etching uses liquid chemicals or etchants to remove excess conductive layer. Wet etching is usually isotropic, resulting in a larger critical dimension (CD) loss in the anodes formed by wet etching. Furthermore, due to the inherent properties of the material, anodes formed by dry etching also exhibit significant CD losses. Adjacent anodes cannot be too close together, otherwise there is a risk of misconnection, leading to larger spacing between adjacent anodes, fewer LEDs per unit area, lower display panel resolution, and difficulty in achieving clear display. If the number of LEDs per unit area is increased to improve resolution, the larger CD loss limits the anode size and also restricts the pixel aperture size, resulting in higher anode impedance and higher contact impedance between the anode and the LED's light-emitting layer. This leads to lower luminous efficiency and a higher required driving current for the LEDs, which is detrimental to low power consumption in display panels.

[0042] To address the aforementioned technical problems, embodiments of the present invention provide a display panel, comprising: a substrate; a plurality of driving circuits located on one side of the substrate; a plurality of light-emitting elements located on the side of the driving circuits away from the substrate; the light-emitting elements being electrically connected to the driving circuits; the light-emitting elements including an anode, at least a portion of which are located in different layers.

[0043] By adopting the above technical solution, at least some anodes are located in different layers in a direction parallel to the plane of the substrate, which prevents at least some anodes from overlapping and avoids misconnection between adjacent anodes. This is beneficial for accurate light emission of the display panel and improves the reliability of the display panel. In the arrangement direction of the light-emitting elements, the distance between adjacent anodes can be reduced, increasing the number of light-emitting elements per unit area, thereby improving the resolution of the display panel and facilitating high-definition display. In addition, while increasing the number of light-emitting elements per unit area, there is no need to reduce the size of the anodes, ensuring the luminous efficiency of the light-emitting elements and contributing to low power consumption of the display panel.

[0044] The above is the core idea of ​​this invention. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention. The technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings.

[0045] Figure 1 This is a schematic diagram of the structure of a display panel provided in an embodiment of the present invention. (Reference) Figure 1 The display panel 01 includes a substrate 10, a plurality of driving circuits 20 located on one side of the substrate 10, and a plurality of light-emitting elements 30 located on the side of the driving circuits 20 away from the substrate 10; the light-emitting elements 30 are electrically connected to the driving circuits 20; the light-emitting elements 30 include an anode 40, and at least a portion of the anodes 40 are located in different layers.

[0046] The anode 40 includes one or more conductive materials such as ITO, aluminum, magnesium, and silver. The embodiments of the present invention do not limit the material and structure of the anode 40.

[0047] For example, the display panel 01 further includes a pixel definition layer 60 located on the side of the anode 40 away from the substrate 10. The pixel definition layer 60 can cover the edge of the anode 40, and the pixel definition layer 60 also includes a pixel opening 61 that can expose the center of the anode 40. The light-emitting element 30 also includes a cathode 48 located on the side of the anode 40 away from the substrate 10, and a light-emitting layer 49 located between the anode 40 and the cathode 48. The position of the light-emitting layer 49 can be defined by the pixel opening 61, thereby defining a light-emitting area that can emit red light, green light, or blue light. The anode 40 of the light-emitting element 30 can receive a drive signal output from the drive circuit 20, and the cathode 48 of the light-emitting element 30 can receive a power supply signal with a fixed potential, so that a drive current formed by the drive signal and the power supply signal with a fixed potential is formed in the light-emitting layer 49 of the light-emitting element 30, driving the light-emitting layer 50 to emit light of a corresponding intensity. The display panel 01 also includes a thin film encapsulation layer 70 located on the side of the light-emitting element 30 away from the substrate 10. The thin film encapsulation layer 70 includes a first inorganic encapsulation layer 71, a second inorganic encapsulation layer 72, and an organic encapsulation layer 73, which are used to encapsulate the light-emitting element 30, protect the film structure of the light-emitting element 30 from the influence of moisture and oxygen, and extend the service life of the display panel 01.

[0048] Based on the above embodiments, the cathodes 48 of the light-emitting elements 30 can be interconnected. This reduces the connection between the cathodes 48 of the display panel 01 and the power lines with fixed potential, thereby reducing the number of overlapping vias, improving the space utilization of the display panel 01, and contributing to the high resolution of the display panel 01.

[0049] For details, please refer to [link / reference]. Figure 1The display panel 01 includes anodes 40 of a plurality of light-emitting elements 40, wherein at least some anodes 40 are located on different layers, that is, at least some structures of anodes 40 are disposed on different layers from at least some structures of their adjacent anodes 40. For example, in the arrangement direction of the light-emitting elements 40, the portion of anode 40 closest to its adjacent anode 40 is disposed on a different layer from the portion of its adjacent anode 40 closest to that anode 40, and the portions of adjacent anodes 40 disposed on different layers are insulated from each other by an insulating layer 50. On the one hand, in the direction parallel to the plane of the substrate 10, the portion of the anode 40 closest to its neighbor can be designed so that the structure of the portion of the adjacent anode 40 close to that anode 40 does not overlap, thus avoiding misconnection between adjacent anodes 40. This is beneficial for the display panel 01 to emit light accurately and improve the reliability of the display panel 01. On the other hand, in the arrangement direction of the light-emitting elements 40, the distance between adjacent anodes 40 can be reduced, increasing the number of light-emitting elements 30 per unit area without reducing the size of the anode 40. In some embodiments, the size of the anode 40 can even be increased while increasing the number of light-emitting elements 30 per unit area, which can reduce the impedance of the anode 40, increase the aperture ratio of the display panel 01, and benefit the low power consumption and display effect of the display panel 01.

[0050] In an optional embodiment, the display panel 01 further includes spacer particles 62 located on the side of the pixel definition layer 60 away from the substrate 10. In a direction perpendicular to the plane of the substrate 10, the spacer particles 62 are located between the light-emitting layers 49 of adjacent light-emitting elements 30.

[0051] The spacer particles 62 may be made of the same material as the pixel definition layer 60 and prepared in the same process, or the spacer particles 62 and the pixel definition layer 60 may be made of different materials and prepared in different processes. This embodiment of the invention does not limit this.

[0052] Specifically, the spacer particles 62 are located on the side of the light-emitting layer 49 away from the substrate 10, and the spacer particles are located between the light-emitting layers 49 of adjacent light-emitting elements 30. They can block the direction of the light emitted from the light-emitting layer 49 towards the light emitted from the adjacent light-emitting elements 30, improve the light crosstalk problem between adjacent light-emitting elements 30, and thus ensure the contrast of the display panel 01 while achieving high-definition display and improving the display effect.

[0053] In this embodiment of the invention, by setting at least some anodes to be located in different layers in a direction parallel to the plane of the substrate, at least some anodes can be prevented from overlapping, avoiding misconnection between adjacent anodes, which is beneficial for accurate light emission of the display panel and improves the reliability of the display panel. In the arrangement direction of the light-emitting elements, the distance between adjacent anodes can be reduced, increasing the number of light-emitting elements per unit area, thereby improving the resolution of the display panel and facilitating high-definition display. In addition, while increasing the number of light-emitting elements per unit area, there is no need to reduce the size of the anodes, ensuring the luminous efficiency of the light-emitting elements and contributing to low power consumption of the display panel.

[0054] Optional, Figure 2 This is a schematic diagram of another display panel provided in an embodiment of the present invention. (Reference) Figure 2 The light-emitting element 30 includes an adjacent first light-emitting element 31 and a second light-emitting element 32; the first light-emitting element 31 and the second light-emitting element 32 are arranged along a first direction X; the first light-emitting element 31 includes a first anode 41; the second light-emitting element 32 includes a second anode 42; the first anode 41 and the second anode 42 are insulated from each other; the first anode 41 and the second anode 42 are located in different layers. The first direction X is parallel to the plane of the substrate 10.

[0055] For example, the first anode 41 and the second anode 42 are located in different film layer structures, with the first anode 41 located on the side of the second anode 42 closer to the substrate 10. The first anode 41 and the second anode 42 are insulated from each other by an insulating layer 50. The first anode 41 is located on the side of the insulating layer 50 closer to the substrate 10, and the second anode 42 is located on the side of the insulating layer 50 away from the substrate 10. The insulating layer 50 includes an opening for exposing the first anode 41. The anode 40 of the light-emitting element 30 has a double-layer anode structure. In the first direction X, adjacent first anodes 41 and second anodes 42 are not located in different layers. In this way, misconnection of adjacent first anodes 41 and second anodes 42 can be avoided. It can also reduce the distance between adjacent anodes 40 in the first direction X, increase the number of light-emitting elements 30 per unit area, and thus improve the resolution of the display panel 01, which is beneficial for achieving high-definition display.

[0056] To facilitate understanding and clearly illustrate the position and structure of the anode 40, some of the accompanying drawings of this embodiment of the invention do not show one or more of the structures such as the light-emitting layer 49, the cathode 48, and the pixel definition layer 60.

[0057] Based on the above embodiments, Figure 3 This is a schematic diagram of another display panel provided in an embodiment of the present invention. (Reference) Figure 3In a direction perpendicular to the plane of the substrate 10, the first anode 41 and the second anode 42 overlap. Thus, in a direction parallel to the plane of the substrate 10, the distance between the first anode 41 and the second anode 42 is zero, which can further reduce the distance between adjacent first anodes 41 and second anodes 42 and improve the resolution of the display panel 01.

[0058] Based on the above embodiments, continue to refer to Figure 3 The display panel 01 also includes a shielding electrode 80; the shielding electrode 80 is located between the first anode 41 and the second anode 42; in a direction perpendicular to the plane of the substrate 10, the shielding electrode 80 covers the overlapping area of ​​the first anode 41 and the second anode 42.

[0059] For example, in a direction perpendicular to the plane of the substrate 10, the insulating layer 50 located between the first anode 41 and the second anode 42 includes a first insulating layer 51 and a second insulating layer 52. The shielding electrode 80 is located between the first insulating layer 51 and the second insulating layer 52. The first insulating layer 51 and the insulating layer 52 may contain the same material but are fabricated in different processes. The shielding electrode 80 can receive an electrical signal with a fixed potential, preventing the driving signals of adjacent first anodes 41 and second anodes 42 from interfering with each other and causing inaccurate display on the display panel 01.

[0060] Furthermore, Figure 4 This is a top view structural diagram of a display panel provided in an embodiment of the present invention. (Reference) Figure 4 The shielding electrode 80 has a mesh structure.

[0061] For example, all the shielding electrodes 80 in the display panel 01 are a single, rectangular mesh structure. In a direction perpendicular to the plane of the substrate 10, the rectangular openings in the mesh structure overlap with the anode 40. By setting the shielding electrodes 80 as a mesh structure, it is easier to connect signal traces with fixed potentials, reducing the number of overlapping vias, improving the space utilization of the display panel 01, and ultimately improving the resolution of the display panel 01.

[0062] Optional, Figure 5 This is a schematic diagram of another display panel provided in an embodiment of the present invention. (Reference) Figure 5 The display panel 01 also includes a lap electrode 43; the second anode 42 is located on the side of the first anode 41 away from the substrate 10; the second anode 42 is electrically connected to the driving circuit 20 through the lap electrode 43.

[0063] For example, the overlapping electrode 43 is disposed in the same layer as the first anode 41, and in the direction parallel to the plane of the substrate 10, the size of the overlapping electrode 43 is smaller than the size of the first anode 41. This simplifies the process, reduces manufacturing costs, and also avoids misconnection between the overlapping electrode 43 and the first anode 41, improving the reliability of the display panel 01. By setting the overlapping electrode 42 between the second anode 42 and the driving circuit 20, on the one hand, it facilitates the electrical connection between the second anode 42 and the driving circuit 20, reduces the drilling depth when fabricating the overlapping via between the second anode 42 and the driving circuit 20, and reduces the process difficulty; on the other hand, by reducing the depth of the overlapping via between the second anode 42 and the driving circuit 20, the impedance of the second anode 42 can be reduced, preventing the luminous efficiency of the second light-emitting element 30 from being reduced due to the excessive depth of the overlapping via between the second anode 42 and the driving circuit 20.

[0064] Optional, Figure 6 This is a schematic diagram of another display panel provided in an embodiment of the present invention. (Reference) Figure 6 The second anode 42 includes a first electrode portion 401 and a second electrode portion 402; in the first direction X, the first electrode portion 401 overlaps with the first anode 41; the second electrode portion 402 is located on the side of the first anode 41 away from the substrate.

[0065] For example, the first anode 41 and the second anode 42 are insulated from each other by an insulating layer 50. The insulating layer 50 includes an opening for accommodating the second anode 42. In a direction perpendicular to the plane of the substrate 10, this opening does not overlap with the first anode 41, and the first electrode portion 401 is located within this opening. In a first direction X, the second electrode portion 402 is located on the side of the second anode 42 closer to the first anode 41; in a direction perpendicular to the plane of the substrate 10, the second electrode portion 402 is located on the side of the insulating layer 50 away from the substrate 10, and the first anode 41 is located on the side of the insulating layer 50 closer to the substrate. In this way, the spacing between adjacent anodes 40 can be reduced, the area of ​​the anodes 40 can be increased, the dark area of ​​adjacent light-emitting elements 30 can be reduced, and the display effect can be improved.

[0066] In addition, continue to refer to Figure 6Both the first electrode portion 401 and the first anode 401 are located on the side of the planarization layer 11 away from the substrate 10, and both the first electrode portion 401 and the first anode 401 are in contact with the surface of the planarization layer 11 away from the substrate. The first electrode portion 401 and the first anode 401 can be located in the same layer, but are manufactured in different processes. On the one hand, the size of the display panel 01 in the plane perpendicular to the substrate 10 can be reduced, which is beneficial to the thinning of the display panel 01. On the other hand, the step difference between the surface of the first light-emitting element 31 away from the substrate 10 and the surface of the second light-emitting element 32 away from the substrate 10 can be reduced, improving the uniformity of the surface height of the light-emitting element 30 away from the substrate 10, so that the distance from which the emitted light from the first light-emitting element 31 and the second light-emitting element 32 reaches the display surface of the display panel 01 is consistent, which is beneficial to uniform display.

[0067] Based on the above embodiments, Figure 7 This is a schematic diagram of another display panel provided in an embodiment of the present invention. (Reference) Figure 7 In a direction perpendicular to the plane of the substrate 10, the second electrode portion 402 overlaps with the first anode 41; the display panel 10 also includes a shielding electrode 80; the shielding electrode 80 is located between the second electrode portion 402 and the first anode 41; in a direction perpendicular to the plane of the substrate 10, the shielding electrode 80 covers the overlapping area of ​​the second electrode portion 402 and the first anode 41. This prevents the driving signals of adjacent first anodes 41 and second anodes 42 from interfering with each other, thus avoiding inaccurate display on the display panel 01.

[0068] Optional, Figure 8 This is a schematic diagram of another display panel provided in an embodiment of the present invention. (Reference) Figure 8 In the first direction X, the size of the second anode 42 is larger than the size of the first anode 41; the luminous efficiency of the first light-emitting element 31 is greater than the luminous efficiency of the second light-emitting element 32.

[0069] Specifically, the larger size of the second anode 42 facilitates carrier transport, resulting in lower impedance and improved luminous efficiency of the second light-emitting element 32. By setting the size of the second anode 42 of the less efficient second light-emitting element 32 to be larger than the size of the first anode 31 of the more efficient first light-emitting element 31, the imbalance in luminous efficiency between the first and second light-emitting elements 31 can be improved. This promotes uniformity in brightness between the first and second light-emitting elements 31 and 32, enhancing the display uniformity of the display panel 01.

[0070] Based on the above embodiments, the pixel definition layer 60 includes a first pixel opening 601 and a second pixel opening 602; in a direction perpendicular to the plane of the substrate 10, the first pixel opening 601 overlaps with the first anode 41, and the second pixel opening 602 overlaps with the second anode 42; the size of the second pixel opening 602 is larger than the size of the first pixel opening 601.

[0071] Specifically, if the size of the second pixel opening 602 is larger, the contact area between the light-emitting layer 49 of the second light-emitting element 30 and the second anode 42 is also larger, the contact resistance between the light-emitting layer 49 of the second light-emitting element 30 and the second anode 42 is smaller, and the current transmission rate is larger. This is beneficial to improve the light-emitting efficiency of the second light-emitting element 32, which has a lower light-emitting efficiency. It can further improve the problem of uneven light-emitting efficiency between the first light-emitting element 31 and the second light-emitting element 32, and improve the display uniformity of the display panel 01.

[0072] Based on the above embodiments, Figure 9 This is a top view structural diagram of another display panel provided in an embodiment of the present invention. (Reference) Figure 9 The display panel 01 includes a plurality of light-emitting elements (not shown in the figure) arranged in an array. Each light-emitting element includes an anode 40, and the anode 40 includes adjacent first anodes 41 and second anodes 42. The first anodes 41 and second anodes 42 are arranged along a first direction X. This embodiment can reduce the spacing between adjacent anodes 30 arranged along the first direction X. The first anodes 41 and second anodes 42 arranged along the first direction X can overlap in a direction perpendicular to the plane of the substrate 10, which can further reduce the spacing between adjacent anodes 40 arranged along the first direction X, thus improving the resolution of the display panel 01.

[0073] However, the first anode 41 and the second anode 42 arranged along the second direction Y cannot overlap in the direction perpendicular to the plane of the substrate 10. Due to the significant CD loss of the anode 40, the distance between the first anode 41 and the second anode 42 arranged along the second direction Y cannot be too close, otherwise it will lead to misconnection between adjacent second anodes 42 that are misaligned along the second direction Y. The first direction X intersects the second direction Y, and both the first direction X and the second direction Y are parallel to the plane of the substrate 10.

[0074] In order to reduce the distance between adjacent anodes 40 arranged along the second direction Y, Figure 10 This is a schematic diagram of another display panel provided in an embodiment of the present invention. (Reference) Figure 10The anodes 40 of adjacent light-emitting elements 30 arranged along the second direction Y are disposed in the same layer; the display panel 01 also includes a third inorganic insulating layer 53 located on the side of the anode away from the substrate 10; the inorganic insulating layer 53 includes a first opening 501 and a second opening 502; in the direction perpendicular to the plane of the substrate 10, the first opening 501 does not overlap with the anode 40, and the second opening 502 overlaps with the anode 40.

[0075] For example, Figure 11 This is a top view structural diagram of another display panel provided in an embodiment of the present invention. (Reference) Figure 11 The adjacent first anodes 41 and second anodes 42 arranged along the first direction X are at least partially disposed in different layers, while the adjacent anodes 40 arranged along the second direction Y are disposed in the same layer. Taking the first direction X as the row direction and the second direction Y as the column direction as an example, the first anodes 41 and second anodes 42 located in different rows are respectively disposed, and the first anodes 41 or second anodes 42 arranged along the second direction Y are disposed in the same layer.

[0076] Specifically, by setting a third inorganic insulating layer 53 on the side of the anodes 40 arranged along the second direction Y away from the substrate 10, and ensuring that the first opening 501 of the third inorganic insulating layer 53 does not overlap with the anodes 40, the conductive layer containing the anodes 40 can be simultaneously etched during the etching process of the third inorganic insulating layer 53 to form the first opening 501, thereby forming multiple anodes 40 arranged along the second direction Y and disposed in the same layer. The second opening 502 is used to expose the anodes 40, allowing the light-emitting layer 49 prepared in subsequent processes to be electrically connected to the anodes 40. Compared to conventional wet etching, dry etching has higher etching precision and less CD loss. Furthermore, the third inorganic insulating layer 53 can prevent direct dry etching of the conductive layer containing the anodes 40, which could lead to corrosion or detachment of the anodes 40 during the etching process, thus reducing CD loss. In this case, in the second direction Y, adjacent anodes 40 are separated by a first distance d1; the value of the first distance d1 is in the range of 0.75μm≤d1≤1.5μm. In this way, the distance between adjacent anodes 40 arranged in the second direction Y can be reduced, further increasing the number of light-emitting elements 30 per unit area, which is beneficial to the ultra-high resolution of the display panel 01.

[0077] Optional, Figure 12 This is a schematic diagram of another display panel provided in an embodiment of the present invention. (Reference) Figure 12 The pixel definition layer 60 includes a blocking portion 06 and an opening portion 07; in a direction perpendicular to the plane of the substrate 10, the blocking portion 06 covers the first opening 501, and the opening portion 07 overlaps with the second opening 502; in the second direction Y, the size of the opening portion 07 is less than or equal to the size of the second opening 502.

[0078] For example, in the second direction Y, when the size of the opening 07 is smaller than the size of the second opening 502, the contact area between the light-emitting layer 49 of the light-emitting element 30 and the anode 40 depends on the size of the opening 07. In this case, the contact area between the light-emitting layer 49 and the anode 40 can be controlled by setting the size of the opening 07, thus balancing the luminous efficiency of different light-emitting elements 30 and improving luminous uniformity. In the second direction Y, when the size of the opening 07 is equal to the size of the second opening 502, the contact area between the light-emitting layer 49 and the anode 40 can be maximized, which can improve the luminous efficiency of the light-emitting element 30, which is beneficial to the low power consumption of the display panel 01. It can also increase the aperture ratio of the display panel 01, reduce the dark areas that do not emit light, and improve the display effect. In addition, when forming the second opening 502 of the third inorganic insulating layer 53, the pixel definition layer 60 can be used as a mask to form the second opening 502, thus reducing the number of processes and improving production efficiency.

[0079] Based on the same inventive concept, embodiments of the present invention also provide a method for preparing a display panel, used to prepare the display panel provided in any embodiment of the present invention. Figure 13 This is a flowchart illustrating a method for manufacturing a display panel according to an embodiment of the present invention. (Refer to...) Figure 13 The preparation methods include:

[0080] S10, Provide substrate.

[0081] S20. Multiple driving circuits are fabricated on one side of the substrate.

[0082] S30. A plurality of light-emitting elements are fabricated on the side of the driving circuit away from the substrate; the light-emitting elements are electrically connected to the driving circuit; wherein the light-emitting elements include an anode, and at least a portion of the anode is located in different layers.

[0083] For example, Figure 14 This is a schematic diagram of the manufacturing process of a display panel according to an embodiment of the present invention, for reference. Figure 14 Multiple driving circuits 20 are fabricated on one side of the substrate 10. Each driving circuit 20 includes at least one thin-film transistor 21. Before fabricating multiple light-emitting elements 30 on the side of the driving circuit 20 away from the substrate 10, a planarization layer 11 is fabricated on the side of the driving circuit 20 away from the substrate 10 to facilitate the subsequent fabrication of the light-emitting elements 30. When fabricating the light-emitting elements 30, the anodes 40 of some of the light-emitting elements 30 can be fabricated first, then an insulating layer 50 can be fabricated, and then the anodes 40 of some of the light-emitting elements 30 can be fabricated on the side of the insulating layer 50 away from the substrate 10. The insulating layer 50 allows adjacent anodes 40 located on different layers to be insulated from each other.

[0084] After all the anodes 40 of the light-emitting elements 30 are prepared, a pixel definition layer 60 is prepared on the side of the anode 40 away from the substrate. The pixel definition layer 60 is patterned to form a pixel opening 61, so as to define the position of the light-emitting layer 49 when the light-emitting layer 49 of the light-emitting elements 30 is prepared in the subsequent process. The spacer particles 62 located on the side of the pixel definition layer 61 away from the substrate 10 can be prepared in the same process as the pixel definition layer 60.

[0085] Continue to refer to Figure 14 A cathode 48 is prepared on the side of the light-emitting layer 49 of the light-emitting element 30 away from the substrate 10. The entire cathode layer can be prepared directly. In the display panel 01, the cathodes 48 of the light-emitting element 30 can be connected to each other to form an integral structure and are connected to a power supply line with a fixed potential.

[0086] In this embodiment of the invention, by setting at least some anodes to be located in different layers in a direction parallel to the plane of the substrate, at least some anodes can be made to not overlap, avoiding misconnection between adjacent anodes, which is beneficial for accurate light emission of the display panel and improves the reliability of the display panel. In the arrangement direction of the light-emitting elements, the distance between adjacent anodes can be reduced, increasing the number of light-emitting elements per unit area, thereby improving the resolution of the display panel and facilitating clear display. In addition, while increasing the number of light-emitting elements per unit area, there is no need to reduce the size of the anodes, ensuring the luminous efficiency of the light-emitting elements and contributing to low power consumption of the display panel.

[0087] Optionally, the light-emitting element includes an adjacent first light-emitting element and a second light-emitting element; the first light-emitting element and the second light-emitting element are arranged along a first direction; the first light-emitting element includes a first anode; the second light-emitting element includes a second anode; the first anode and the second anode are insulated from each other; Figure 15 This is a flowchart illustrating a method for preparing the anode of a display panel according to an embodiment of the present invention. (Refer to...) Figure 15 The preparation methods include:

[0088] S311. Prepare a first anode on the side of the driving circuit away from the substrate.

[0089] S312. An insulating layer is prepared on the side of the first anode away from the substrate; the insulating layer covers the opening of the first electrode.

[0090] S313. A second anode is prepared at the opening of the first electrode and on the side of the insulating layer away from the substrate.

[0091] For example, Figure 16 This is a schematic diagram of the fabrication process of the anode of a display panel according to an embodiment of the present invention. (Refer to...) Figure 16First, a full-layer first anode conductive layer is prepared on the side of the planarization layer 11 away from the substrate 10. Then, the first anode conductive layer is etched by a conventional wet etching process to form a plurality of spaced first anodes 41. On the side of the first anodes 41 away from the substrate 10, a full-layer insulating layer 50 is prepared, wherein the insulating layer 50 includes an inorganic insulating material. The insulating layer 50 is etched by a dry etching process to form a first electrode opening 051. In the direction perpendicular to the plane of the substrate 10, the first electrode opening 051 and the first anodes 41 do not overlap, and the first electrode opening 051 and the first anodes 41 are separated by the insulating layer 50. On the side of the first electrode opening 051 and the insulating layer 50 away from the substrate 10, a full-layer second anode conductive layer is prepared. Then, the second anode conductive layer is etched by a conventional wet etching process to form a plurality of spaced second anodes 42. The second anode 41 includes a first electrode portion 401 and a second electrode portion 402. The first electrode portion 401 is located within the first electrode opening 051, and overlaps with the first anode 41 in the first direction X. The second electrode portion 402 is located on the side of the first anode 41 away from the substrate 10. After the second anode 42 is fabricated, an opening is etched in the insulating layer 50 directly above the first anode 41 to expose the first anode 41.

[0092] In this way, the spacing between adjacent electrodes 40 can be reduced, the area of ​​anode 40 can be increased, the dark area of ​​adjacent light-emitting elements 30 can be reduced, and the display effect can be improved. In addition, the area of ​​the second anode 42 can be larger than the area of ​​the first anode 41, which is beneficial to improve the light efficiency of the second light-emitting element 32 with lower light efficiency, improve the problem of uneven light efficiency between the first light-emitting element 31 and the second light-emitting element 32, and improve the display uniformity of the display panel 01.

[0093] In order to reduce the distance between adjacent anodes 40 arranged along the second direction Y, Figure 17 This is a flowchart illustrating another method for preparing the anode of a display panel according to an embodiment of the present invention. (Refer to...) Figure 17 The preparation methods include:

[0094] S321. Prepare a conductive layer on the side of the driving circuit away from the substrate.

[0095] S322. Prepare a third inorganic insulating layer on the side of the conductive layer away from the substrate.

[0096] S323. In the same dry etching process, a third inorganic insulating layer and a conductive layer are etched to form a first opening and an anode arranged along a second direction; in a direction perpendicular to the plane of the substrate, the first opening does not overlap with the anode.

[0097] S324. Anneal the anode.

[0098] S325. After anodic annealing, the third inorganic insulating layer is etched to form multiple second openings; in a direction perpendicular to the plane of the substrate, the second openings overlap with the anode.

[0099] For example, Figure 18 This is a schematic diagram of the fabrication process of the anode of another display panel provided in an embodiment of the present invention, for reference. Figure 18 A full-layer conductive layer 04 is prepared on the side of the driving circuit layer 20 away from the substrate 10. The conductive layer 04 is not annealed. A full-layer third inorganic insulating layer 53 is prepared on the side of the unannealed conductive layer 04 away from the substrate 10. Then, the third inorganic insulating layer 53 and the conductive layer 04 are etched using a dry etching process to form a first opening 501 and multiple anodes 40 arranged along the second direction. The third inorganic insulating layer 53 can protect the unannealed conductive layer 04 from corrosion or detachment during the dry etching process. The exposed conductive layer 04 is difficult to withstand multiple photolithography cleanings during the dry etching process, which would affect the structure of the anodes 40. The dry etching of the conductive layer 04 is then completed. After etching, annealing is performed to reduce residual stress in the anode 40 and improve its stability. This makes the anode 40 less susceptible to etching during the subsequent etching of the third inorganic insulating layer 53 to form the second opening 502. A mask is used to etch the third inorganic insulating layer 53 to form the second opening 502, exposing the anode 40. The mask includes a cutout area corresponding to the anode 40. Finally, a pixel definition layer 60 is prepared on the side of the inorganic insulating layer 53 away from the substrate 10. The pixel definition layer 60 includes a shielding portion 06 and an opening portion 07. In a direction perpendicular to the plane of the substrate 10, the shielding portion 06 overlaps with the first opening 501, and the opening portion 07 overlaps with the anode 40.

[0100] In this way, the anode 40 can be formed by dry etching, which results in a smaller CD loss and reduces the spacing between adjacent anodes 40. This can increase the number of light-emitting elements 30 per unit area, which is beneficial to the ultra-high resolution of the display panel 01.

[0101] Optional, Figure 19 This is a flowchart illustrating another method for preparing the anode of a display panel according to an embodiment of the present invention. (Refer to...) Figure 19 The preparation methods include:

[0102] S331. Prepare a conductive layer on the side of the driving circuit away from the substrate.

[0103] S332. Prepare a third inorganic insulating layer on the side of the conductive layer away from the substrate.

[0104] S333. In the same dry etching process, the third inorganic insulating layer and the conductive layer are etched to form a first opening and an anode arranged along the second direction; in the direction perpendicular to the plane of the substrate, the first opening does not overlap with the anode.

[0105] S334. Anneal the anode.

[0106] S335. After anodic annealing, a pixel definition layer is prepared on the side of the inorganic insulating layer away from the substrate. The pixel definition layer is patterned to form a shielding portion and an opening portion. In a direction perpendicular to the plane of the substrate, the opening portion overlaps with the anode.

[0107] S336. Using the pixel definition layer as a mask, etch the third inorganic insulating layer to form multiple second openings; in a direction perpendicular to the plane of the substrate, the second openings overlap with the anode.

[0108] For example, Figure 20 This is a schematic diagram of the fabrication process of the anode of another display panel provided in an embodiment of the present invention, for reference. Figure 20 After annealing at the anode 40, a pixel definition layer 60 is first prepared. The pixel definition layer 60 includes a shielding portion 06 and an opening portion 07. Using the pixel definition layer 60 as a mask, the third inorganic insulating layer 53 is etched directly, forming multiple second openings 502 in the region corresponding to the opening portion 07 in the third inorganic insulating layer 53. This eliminates the need for a mask plate to form the second openings 502, simplifying the process and improving production efficiency.

[0109] The display panel manufacturing method provided in this embodiment of the invention is used to manufacture the display panel provided in any embodiment of the invention. It has the corresponding technical features and beneficial effects of the display panel. For contents not described in detail in the embodiments of the display panel manufacturing method, please refer to the description of the display panel above, and will not be repeated here. Similarly, the display panel of this embodiment of the invention also has functional modules and beneficial effects that can perform the display panel manufacturing method provided in this embodiment of the invention. For contents not described in detail in the embodiments of the display panel, please refer to the description of the display panel manufacturing method above, and will not be repeated here.

[0110] Based on the same inventive concept, embodiments of the present invention also provide a display device. Figure 21 This is a schematic diagram of the structure of a display device provided in an embodiment of the present invention, such as... Figure 21 The display device 001 includes a display panel 01 provided in any embodiment of the present invention. The display device 001 provided in the embodiments of the present invention can be... Figure 21 The mobile phone shown can also be any electronic product with a display function, including but not limited to the following categories: televisions, laptops, desktop monitors, tablets, digital cameras, smart bracelets, smart glasses, in-vehicle displays, medical devices, industrial control equipment, touch interactive terminals, etc. This embodiment of the invention does not impose any special limitations on these categories.

[0111] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. A display panel, characterized in that, include: Substrate; Multiple driving circuits located on one side of the substrate; Multiple light-emitting elements located on the side of the driving circuit away from the substrate; The light-emitting element is electrically connected to the driving circuit; The light-emitting element includes an adjacent first light-emitting element and a second light-emitting element; the first light-emitting element and the second light-emitting element are arranged along a first direction; The first light-emitting element includes a first anode; the second light-emitting element includes a second anode; the first anode and the second anode are insulated from each other; The second anode includes a first electrode portion and a second electrode portion; The first electrode portion is disposed in the same layer as the first anode; the second electrode portion is located on the side of the first anode away from the substrate.

2. The display panel according to claim 1, characterized in that, The first anode and the second anode are formed in different processes.

3. The display panel according to claim 2, characterized in that, In a direction perpendicular to the plane of the substrate, the first anode overlaps with the second anode.

4. The display panel according to claim 3, characterized in that, Also includes: Shielding electrode; The shielding electrode is located between the first anode and the second anode; In a direction perpendicular to the plane of the substrate, the shielding electrode covers the overlapping area of ​​the first anode and the second anode.

5. The display panel according to claim 4, characterized in that, The shielding electrode has a mesh structure.

6. The display panel according to claim 4, characterized in that, Also includes: Overlapping electrodes; The second anode is located on the side of the first anode away from the substrate; The second anode is electrically connected to the drive circuit through the lap electrode.

7. The display panel according to claim 1, characterized in that, In a direction perpendicular to the plane of the substrate, the second electrode portion overlaps with the first anode; The display panel further includes a shielding electrode; the shielding electrode is located between the second electrode portion and the first anode. In a direction perpendicular to the plane of the substrate, the shielding electrode covers the overlapping area of ​​the second electrode portion and the first anode.

8. The display panel according to claim 1, characterized in that, In the first direction, the size of the second anode is larger than the size of the first anode; The luminous efficiency of the first light-emitting element is greater than that of the second light-emitting element.

9. The display panel according to claim 8, characterized in that, The display panel further includes a pixel definition layer; the pixel definition layer is located on the side of the first anode and the second anode away from the substrate; The pixel definition layer includes a first pixel opening and a second pixel opening; in a direction perpendicular to the plane of the substrate, the first pixel opening overlaps with the first anode, and the second pixel opening overlaps with the second anode; The size of the second pixel opening is larger than the size of the first pixel opening.

10. The display panel according to claim 1, characterized in that, The anodes of adjacent light-emitting elements arranged along the second direction are disposed in the same layer; The display panel also includes a third inorganic insulating layer located on the side of the anode away from the substrate; The inorganic insulating layer includes a first opening and a second opening; In a direction perpendicular to the plane of the substrate, the first opening does not overlap with the anode, while the second opening overlaps with the anode.

11. The display panel according to claim 10, characterized in that, In the second direction, adjacent anodes are separated by a first distance d1; the value of the first distance d1 is in the range of 0.75μm≤d1≤1.5μm.

12. The display panel according to claim 10, characterized in that, Also includes: Pixel definition layer; The pixel definition layer is at least partially located on the side of the third inorganic insulating layer away from the substrate; The pixel definition layer includes an occlusion portion and an opening portion; In a direction perpendicular to the plane of the substrate, the shielding portion covers the first opening, and the opening portion overlaps with the second opening; In the second direction, the size of the opening is less than or equal to the size of the second opening.

13. A method for manufacturing a display panel, used to manufacture the display panel according to any one of claims 1-12, characterized in that, include: Provide substrate; Multiple driving circuits are fabricated on one side of the substrate; Multiple light-emitting elements are fabricated on the side of the driving circuit away from the substrate; The light-emitting element is electrically connected to the driving circuit; The light-emitting element includes an anode, and at least a portion of the anode is located in different layers.

14. The preparation method according to claim 13, characterized in that, The light-emitting element includes an adjacent first light-emitting element and a second light-emitting element; the first light-emitting element and the second light-emitting element are arranged along a first direction; the first light-emitting element includes a first anode; the second light-emitting element includes a second anode; The first anode and the second anode are insulated from each other; Multiple light-emitting elements are fabricated on the side of the driving circuit away from the substrate, including: A first anode is prepared on the side of the driving circuit away from the substrate; An insulating layer is formed on the side of the first anode away from the substrate; the insulating layer includes a first electrode opening; A second anode is formed at the first electrode opening and on the side of the insulating layer away from the substrate; The second anode includes a first electrode portion and a second electrode portion; in the first direction, the first electrode portion overlaps with the first anode; the second electrode portion is located on the side of the first anode away from the substrate.

15. The preparation method according to claim 13, characterized in that, The anodes of adjacent light-emitting elements arranged along the second direction are disposed in the same layer; Multiple light-emitting elements are fabricated on the side of the driving circuit away from the substrate, including: A conductive layer is prepared on the side of the driving circuit away from the substrate; A third inorganic insulating layer is prepared on the side of the conductive layer away from the substrate; The third inorganic insulating layer and the conductive layer are etched in the same dry etching process to form a first opening and an anode arranged along a second direction; in a direction perpendicular to the plane of the substrate, the first opening does not overlap with the anode; Anneal the anode; After the anode annealing, the third inorganic insulating layer is etched to form a plurality of second openings; in a direction perpendicular to the plane of the substrate, the second openings overlap with the anode.

16. The preparation method according to claim 15, characterized in that, The third inorganic insulating layer is etched to form a plurality of second openings, including: A pixel definition layer is prepared on the side of the inorganic insulating layer away from the substrate, and the pixel definition layer is patterned to form a shielding portion and an opening portion; in a direction perpendicular to the plane of the substrate, the opening portion overlaps with the anode. Using the pixel definition layer as a mask, the third inorganic insulating layer is etched to form multiple second openings.

17. A display device, characterized in that, Includes the display panel as described in any one of claims 1-12.