Five-axis displacement table for vacuum environment

Abstract

The application discloses a five-axis displacement table for a vacuum environment, which comprises a rotating table, the upper end of one side of the rotating table is fixedly connected with a rotating seat, the rotating seat is provided with a supporting frame on one side, the rotating seat is fixedly connected with a first rotating gear on one side, the first rotating gear is meshedly connected with a first turbine on the outside, the first turbine is fixedly connected with the output end of a first motor at the bottom, the supporting frame is symmetrically provided with a first fixing seat on one side, the first fixing seat is internally threadedly connected with an R shaft, a first ball screw motor is driven to rotate the Y shaft, the Y shaft drives the ball screw under the drive of the first ball screw motor, the sliding table is driven to move forward and backward, the R shaft is driven to rotate through the worm motor, at this time, the sliding table can be driven to move up and down and can be self-locked, the working efficiency of the five-axis displacement table can be effectively improved, the five-axis displacement table is compact in structure, light in weight and can be used in a vacuum.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of five-axis adjustment, and particularly relates to a five-axis displacement table for a vacuum environment. BACKGROUND

[0002] The five-axis displacement table, also known as a five-axis micro-displacement table, converts the rotation of a hand wheel into a displacement action, which is completed by a machine. There are various five-axis displacement tables, the simplest of which is a mechanical type, and all functions of which are completed by a mechanism. Another type is a piezoelectric type, which has high precision, can be controlled by a computer, and has fast response speed but a small stroke, and is used in high-precision positioning.

[0003] However, there is no five-axis displacement table with Z, Y, X and R axes in the domestic market, and the five-axis displacement table abroad has a complex structure, a large size, and a motor placed outside the vacuum. SUMMARY

[0004] The application aims to overcome the defects of the prior art and provide a five-axis displacement table for a vacuum environment, so as to solve the problems of the domestic market, the complex structure of the five-axis displacement table abroad, and the motor placed outside the vacuum.

[0005] To achieve the above-mentioned purpose, the application provides the following technical scheme: a five-axis displacement table for a vacuum environment, comprising a rotating table, an upper end of one side of the rotating table being fixedly connected with a rotating seat, the rotating seat being provided with a support frame on one side, the rotating seat being fixedly connected with a first rotating gear on one side, the first rotating gear being meshingly connected with a first turbine on the outer side, the first turbine being fixedly connected with the output end of a first motor at the bottom, the support frame being provided with a first fixing seat symmetrically on the upper and lower sides on one side, the first fixing seat being internally threadedly connected with an R shaft, the R shaft being fixedly connected with the output end of a worm motor at the bottom, a first ball screw motor being fixedly connected with the lower end in the support frame, the first ball screw motor being fixedly connected with a Y shaft at the output end, the rotating table being provided with a second fixing seat and a bearing fixing seat on the top, the Y shaft being provided with a moving plate on the top, the rotating table being fixedly connected with a first sliding rail on one side on the top, the moving plate being fixedly connected with a second ball screw motor on one side on the top, the second ball screw motor being fixedly connected with an X shaft at the output end, the X shaft being provided with a second sliding rail symmetrically on the two sides, the second sliding rail being provided with a workbench on the top, the workbench being fixedly connected with a second sliding block at the bottom, the workbench being fixedly connected with a fifth motor on one side, the fifth motor being fixedly connected with a second turbine at the output end, the second turbine being meshingly connected with a second rotating gear on the outer side.

[0006] Preferably, the first rotating gear is rotatably connected on one side of the support frame.

[0007] Preferably, the first fixed seat is fixedly connected to the five-axis moving table device by bolts.

[0008] Preferably, the second fixed seat and the bearing fixed seat are fixedly connected with the rotating table by bolts.

[0009] Preferably, the moving plate and the first sliding block are slidingly connected with the rotating table through the first sliding rail.

[0010] Preferably, one end of the X-axis outside is symmetrically connected with the bearing fixed seat.

[0011] Preferably, the workbench and the second sliding block are slidingly connected with the second sliding rail through the X-axis.

[0012] Preferably, the second rotating gear is located at the top of the workbench.

[0013] Compared with the prior art, the present application provides a five-axis displacement table for vacuum environment, which has the following advantages:

[0014] 1、The first turbine, the first motor R-axis, the worm motor, the ball screw motor, the Y-axis and the second ball screw motor are arranged, in the use process of the five-axis displacement table, the first turbine is driven to rotate by the first motor, the first turbine adopts a worm integrated motor, directly drives the turbine to make the rotating table complete 360° rotation, and can be self-locked, then the X-axis is driven to rotate by the second ball screw motor, the X-axis adopts a ball screw integrated motor, drives the sliding table to move left and right, further drives the first ball screw motor to make the Y-axis rotate, the Y-axis drives the ball screw under the drive of the first ball screw motor, drives the sliding table to move forward and backward, the R-axis is driven to rotate by the worm motor arranged, at this time, the driving sliding table can complete up and down movement, and can be self-locked, that is, the working efficiency of the five-axis displacement table can be effectively improved, so that the structure is compact, the quality is light, and the advantages of being used under vacuum can be achieved.

[0015] 2、The fifth motor, the workbench, the second rotating gear and the second turbine are arranged, in the process of machining the object by the five-axis displacement table, the second turbine is driven to rotate by the fifth motor, the second rotating gear is engaged and connected outside the second turbine, the second rotating gear is located at the top of the workbench, under the drive of the fifth motor, the object can be rotated on the second rotating gear, so that the machining efficiency of the five-axis displacement table is improved.

[0016] The parts not involved in the device are the same as or can be realized by the prior art, the structure of the present application is scientific and reasonable, safe and convenient to use, and provides great help for people. BRIEF DESCRIPTION OF DRAWINGS

[0017] The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the application. In the drawings:

[0018] Figure 1 A schematic diagram of the structure of one side of a five-axis displacement table for a vacuum environment according to the present application;

[0019] Figure 2 A schematic diagram of the structure of the other side of a five-axis displacement table for a vacuum environment according to the present application;

[0020] Figure 3 A schematic diagram of the structure of a five-axis displacement table for a vacuum environment according to the present application;

[0021] Figure 4 A schematic diagram of the structure of a five-axis displacement table for a vacuum environment according to the present application;

[0022] In the drawings: rotating table 1, rotating seat 2, first rotating gear 3, first turbine 4, first motor 5, first fixed seat 6, R-axis 7, worm motor 8, first ball screw motor 9, Y-axis 10, second fixed seat 11, bearing fixed seat 12, moving plate 13, first sliding block 14, support frame 15, first sliding rail 16, second ball screw motor 17, X-axis 18, second sliding rail 19, second sliding block 20, fifth motor 21, worktable 22, second rotating gear 23, second turbine 24. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those of ordinary skill in the art without any creative work fall within the protection scope of the present application.

[0024] Please refer to Figures 1-4The application provides a technical scheme: a five-axis displacement table for a vacuum environment, which comprises a rotating table 1, a rotating seat 2 fixedly connected to the upper end of one side of the rotating table 1, a supporting frame 15 arranged on one side of the rotating seat 2, a first rotating gear 3 fixedly connected to one side of the rotating seat 2, a first turbine 4 meshingly connected to the outer side of the first rotating gear 3, a first motor 5, the output end of which is fixedly connected to the bottom of the first turbine 4, a first fixing seat 6 symmetrically arranged on one side of the supporting frame 15, an R shaft 7 screwedly connected in the first fixing seat 6, a worm motor 8, the output end of which is fixedly connected to the bottom of the R shaft 7, a first ball screw motor 9 fixedly connected to the lower end in the supporting frame 15, a Y shaft 10 fixedly connected to the output end of the first ball screw motor 9, the first motor 5 is driven to rotate the first turbine 4, the first turbine 4 is a worm integrated motor, directly drives the turbine to make the rotating table 1 complete 360° rotation and can be self-locked, then the second ball screw motor 17 is driven to make the X shaft 18 rotate, the X shaft 18 is a ball screw integrated motor, drives the sliding table to move left and right, further drives the first ball screw motor 9 to make the Y shaft 10 rotate, the Y shaft 10 drives the ball screw under the drive of the first ball screw motor 9, drives the sliding table to move forward and backward, the rotating table 1 is separately provided with a second fixing seat 11 and a bearing fixing seat 12 on the top, the Y shaft 10 is provided with a moving plate 13 on the top, the rotating table 1 is symmetrically fixedly connected with a first sliding rail 16 on one side of the top, the moving plate 13 is fixedly connected with the second ball screw motor 17 on one side of the top, the second ball screw motor 17 is fixedly connected with the X shaft 18 at the output end, the X shaft 18 is symmetrically provided with a second sliding rail 19 on the two sides, the second sliding rail 19 is provided with a workbench 22 on the top, the workbench 22 is fixedly connected with a second sliding block 20 at the bottom, the workbench 22 is fixedly connected with a fifth motor 21 on one side, the fifth motor 21 is fixedly connected with a second turbine 24 at the output end, the second turbine 24 is meshingly connected with a second rotating gear 23 on the outer side, the second turbine 24 is driven to rotate, the second rotating gear 23 is meshingly connected on the outer side of the second turbine 24, the second rotating gear 23 is located on the top of the workbench 22, under the drive of the fifth motor 21, the object can be rotated on the second rotating gear 23, thereby improving the machining efficiency of the five-axis displacement table.

[0025] In the application, preferably, the first rotating gear 3 is rotatably connected to one side of the supporting frame 15.

[0026] In the application, preferably, the first fixing seat 6 is fixedly connected to the five-axis displacement table device by bolts.

[0027] In the application, preferably, the second fixing seat 11 and the bearing fixing seat 12 are fixedly connected with the rotating table 1 by bolts.

[0028] In the application, preferably, the moving plate 13 and the first sliding block 14 are slidably connected with the rotating table 1 through the first sliding rail 16.

[0029] In the application, preferably, one end of the outer side of the X-axis 18 is symmetrically connected with a bearing fixing seat 12.

[0030] In the application, preferably, the workbench 22 and the second sliding block 20 are connected with the second sliding rail 19 through the X-axis 18.

[0031] In the application, preferably, the second rotating gear 23 is located at the top of the workbench 22.

[0032] Embodiment one

[0033] A five-axis displacement table for vacuum environment comprises a rotating table 1, an upper end of one side of the rotating table 1 is fixedly connected with a rotating seat 2, a support frame 15 is arranged on one side of the rotating seat 2, a first rotating gear 3 is fixedly connected on one side of the rotating seat 2, a first turbine 4 is meshingly connected on the outer side of the first rotating gear 3, the bottom of the first turbine 4 is fixedly connected with the output end of a first motor 5, a first fixing seat 6 is symmetrically arranged on one side of the support frame 15, an R-axis 7 is threadedly connected in the first fixing seat 6, the bottom of the R-axis 7 is fixedly connected with the output end of a worm motor 8, a first ball screw motor 9 is fixedly connected with the lower end in the support frame 15, a Y-axis 10 is fixedly connected with the output end of the first ball screw motor 9, the first motor 5 is driven to make the first turbine 4 rotate, the first turbine 4 is a worm integrated motor, directly drives the turbine to make the rotating table 1 complete 360° rotation, and can be self-locked, then the second ball screw motor 17 is driven to make the X-axis 18 rotate, the X-axis 18 is a ball screw integrated motor, drives the sliding table to move left and right, further drives the first ball screw motor 9 to make the Y-axis 10 rotate, the Y-axis 10 drives the ball screw under the drive of the first ball screw motor 9, drives the sliding table to move forward and backward, the rotating table 1 is respectively provided with a second fixing seat 11 and a bearing fixing seat 12 on the top, a moving plate 13 is arranged on the top of the Y-axis 10, a first sliding rail 16 is fixedly connected with one side of the top of the rotating table 1 in symmetry, a second ball screw motor 17 is fixedly connected with one side of the top of the moving plate 13, an X-axis 18 is fixedly connected with the output end of the second ball screw motor 17, second sliding rails 19 are symmetrically arranged on both sides of the X-axis 18, a workbench 22 is arranged on the top of the second sliding rail 19, a second sliding block 20 is fixedly connected with the bottom of the workbench 22, a fifth motor 21 is fixedly connected with one side of the workbench 22, a second turbine 24 is fixedly connected with the output end of the fifth motor 21, a second rotating gear 23 is meshingly connected with the outer side of the second turbine 24, the second turbine 24 is driven to rotate, the second rotating gear 23 is meshingly connected with the outer side of the second turbine 24, the second rotating gear 23 is located at the top of the workbench 22, under the drive of the fifth motor 21, the object can be rotated on the second rotating gear 23, thereby improving the processing efficiency of the five-axis displacement table.

[0034] Embodiment two

[0035] The five-axis displacement table for vacuum environment, first rotating gear 3 is located on one side of support frame 15 and is rotatably connected, first fixed seat 6 is fixedly connected to five-axis mobile table equipment through bolts, second fixed seat 11 and bearing fixed seat 12 are fixedly connected with rotating table 1 through bolts, moving plate 13 and first sliding block 14 are slidably connected with rotating table 1 through first sliding rail 16, one end of X-axis 18 outside is symmetrically rotatably connected with bearing fixed seat 12, workbench 22 and second sliding block 20 are slidably connected with second sliding rail 19 through X-axis 18, and second rotating gear 23 is located on the top of workbench 22.

[0036] The working principle and use flow of the application are as follows: in use, in the use process of the five-axis displacement table, the first turbine 4 is driven to rotate by driving the first motor 5, the first turbine 4 is a worm integrated motor, directly drives the turbine to make the rotating table 1 complete 360° rotation and can be self-locked, then the X-axis 18 is driven to rotate by driving the second ball screw motor 17, the X-axis 18 is a ball screw integrated motor, drives the sliding table to move left and right, further drives the first ball screw motor 9 to make the Y-axis 10 rotate, the Y-axis 10 drives the ball screw under the drive of the first ball screw motor 9, drives the sliding table to move forward and backward, the R-axis 7 is driven to rotate by the set worm motor 8, at this time, the driving sliding table can complete up-down movement and can be self-locked, that is, the working efficiency of the five-axis displacement table can be effectively improved, so that the structure is compact, the quality is light, and the advantages of being used under vacuum can be achieved, during the machining of the five-axis displacement table on the object, the second turbine 24 is driven to rotate by driving the fifth motor 21, the second rotating gear 23 is engaged and connected outside the second turbine 24, the second rotating gear 23 is located on the top of the workbench 22, under the drive of the fifth motor 21, the object can be rotated on the second rotating gear 23, so that the machining efficiency of the five-axis displacement table is improved.

[0037] Although the embodiments of the application have been shown and described, it is to be understood that various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the application, and the scope of the application is defined by the appended claims and their equivalents.

Claims

1. A five-axis displacement stage for vacuum environments, comprising a rotary stage (1), characterized in that: A rotating seat (2) is fixedly connected to the upper end of one side of the rotating table (1). A support frame (15) is provided on one side of the rotating seat (2). A first rotating gear (3) is fixedly connected to one side of the rotating seat (2). A first turbine (4) is meshed with the outer side of the first rotating gear (3). The bottom of the first turbine (4) is fixedly connected to the output end of the first motor (5). A first fixed seat (6) is symmetrically arranged on one side of the support frame (15). An R-axis (7) is threaded inside the first fixed seat (6). The bottom of the R-axis (7) is fixedly connected to the output end of the worm motor (8). A first ball screw motor (9) is fixedly connected to the lower end inside the support frame (15). A Y-axis (10) is fixedly connected to the output end of the first ball screw motor (9). A second fixed seat (11) and a bearing fixed seat (12) are respectively provided on the top of the rotating table (1). The top of the Y-axis (10) is provided with... A movable plate (13) is provided. A first slide rail (16) is symmetrically fixedly connected to one side of the top of the rotating table (1). A second ball screw motor (17) is fixedly connected to one side of the top of the movable plate (13). An X-axis (18) is fixedly connected to the output end of the second ball screw motor (17). A second slide rail (19) is symmetrically arranged on both sides of the X-axis (18). A worktable (22) is provided on the top of the second slide rail (19). A second slider (20) is fixedly connected to the bottom of the worktable (22). A fifth motor (21) is fixedly connected to one side of the worktable (22). A second turbine (24) is fixedly connected to the output end of the fifth motor (21). A second rotating gear (23) is meshed with the outer side of the second turbine (24). The first rotating gear (3) is rotatably connected to one side of the support frame (15). The first fixed seat (6) is fixedly connected to the five-axis movable table equipment by bolts.

2. The five-axis displacement stage for a vacuum environment according to claim 1, characterized in that: The second fixed seat (11) and the bearing fixed seat (12) are fixedly connected to the rotating table (1) by bolts.

3. The five-axis displacement stage for a vacuum environment according to claim 1, characterized in that: The movable plate (13) and the first slider (14) are slidably connected to the rotating table (1) via the first slide rail (16).

4. A five-axis displacement stage for a vacuum environment according to claim 1, characterized in that: One end of the X-axis (18) is symmetrically rotatably connected to a bearing mounting seat (12).

5. A five-axis displacement stage for a vacuum environment according to claim 1, characterized in that: The worktable (22) and the second slider (20) are slidably connected to the second slide rail (19) via the X-axis (18).

6. A five-axis displacement stage for a vacuum environment according to claim 1, characterized in that: The second rotating gear (23) is located on top of the worktable (22).

Images