High-density, high-plasticity molybdenum-nickel-titanium alloy target and preparation method thereof

Abstract

The present invention discloses a high-density, high-plasticity molybdenum-nickel-titanium alloy target and a preparation method thereof. The preparation method comprises: taking a set amount of molybdenum powder, nickel powder, and titanium powder, mixing to obtain a mixed powder; vacuum-sealing the mixed powder; cold isostatically pressing the vacuum-sealed mixed powder in a cold isostatic pressing mold to obtain a molybdenum-nickel-titanium green body; vacuum-sintering the obtained molybdenum-nickel-titanium green body; and hot isostatically pressing the vacuum-sintered molybdenum-nickel-titanium green body to obtain a high-density, high-plasticity molybdenum-nickel-titanium alloy target. The oxygen content in the molybdenum-nickel-titanium alloy target can be controlled, thereby increasing the density of the molybdenum-nickel-titanium alloy target, reducing the content of oxygen-containing solid solution, and improving the plasticity of the molybdenum-nickel-titanium alloy target, thereby obtaining a high-density, high-plasticity molybdenum-nickel-titanium alloy target.

Description

Technical Field

[0001] The present invention belongs to the technical field of sputtering target materials, and in particular relates to a high-density, high-plasticity molybdenum-nickel-titanium alloy target material and a preparation method thereof. Background Art

[0002] In recent years, with the increasing size and definition of flat-panel displays, the size of thin-film transistors (TFTs), the characteristic chips of integrated circuits used in panels, needs to be reduced as much as possible. The wiring film needs to have low resistance to ensure high signal transmission speeds, so copper with lower resistance is used instead of traditional aluminum.

[0003] Currently, TFTs use amorphous silicon semiconductor films. The copper used as the wiring layer in TFTs is in direct contact with the amorphous silicon semiconductor film. Thermal diffusion occurs during the heating process, degrading TFT characteristics. At temperatures above 350°C, copper diffuses significantly, and the higher the temperature, the more pronounced the diffusion. Therefore, a heat-resistant barrier layer is required between the copper and silicon to inhibit the thermal diffusion of copper. Molybdenum is the preferred material due to its high melting point, low thermal expansion coefficient, good electrical and thermal conductivity, excellent corrosion resistance, and non-toxicity.

[0004] During the TFT preparation process, because the copper film layer is difficult to etch, the etching rate of the molybdenum target material does not match that of copper. The wiring and electrodes prepared by the molybdenum target material also have problems in terms of corrosion resistance and bonding performance with the substrate. For example, the sputtered film is easy to peel off. The molybdenum nickel titanium target material can effectively improve the heat resistance, moisture resistance and close adhesion of the wiring film to the substrate, and its corrosion resistance is better than molybdenum, and its etching rate is more matched with copper.

[0005] In order to achieve large size, the molybdenum-nickel-titanium target needs to be rolled. The rolling performance of the molybdenum-nickel-titanium target has a crucial impact on the later sputtering performance of the target. Summary of the Invention

[0006] In view of this, some embodiments disclose a method for preparing a high-density, high-plasticity molybdenum-nickel-titanium alloy target, comprising:

[0007] Taking a set amount of molybdenum powder, nickel powder and titanium powder, and mixing them to obtain a mixed powder;

[0008] Vacuum packaging the mixed powder;

[0009] The vacuum-encapsulated mixed powder is cold isostatically pressed in a cold isostatic pressing mold to obtain a molybdenum-nickel-titanium green body;

[0010] The obtained molybdenum-nickel-titanium green body is vacuum sintered;

[0011] The vacuum sintered molybdenum-nickel-titanium green body is hot isostatically pressed to obtain a high-density and high-plasticity molybdenum-nickel-titanium alloy target.

[0012] Furthermore, in some embodiments of the preparation method of the high-density, high-plasticity molybdenum-nickel-titanium alloy target disclosed, in the mixed powder, the mass content of molybdenum powder is 30-80%, the mass content of nickel powder is 10-30%, and the mass content of titanium powder is 10-40%.

[0013] In the method for preparing a high-density, high-plasticity molybdenum-nickel-titanium alloy target disclosed in some embodiments, the pressure during the cold isostatic pressing process is set to 250 MPa and the pressing time is set to 10 minutes.

[0014] In the method for preparing a high-density, high-plasticity molybdenum-nickel-titanium alloy target disclosed in some embodiments, the vacuum degree of the molybdenum-nickel-titanium green body during vacuum sintering is set to 1×10 -3 Pa, the sintering temperature is set to 100-500 °C, and the sintering time is set to 0.5-2 h.

[0015] In some embodiments of the method for preparing a high-density, high-plasticity molybdenum-nickel-titanium alloy target, the temperature of the hot isostatic pressing process is set to 800-1100° C. and the holding time is 1-3 hours.

[0016] Some embodiments disclose a method for preparing a high-density, high-plasticity molybdenum-nickel-titanium alloy target material, in which nickel powder and titanium powder are used to prepare nickel-titanium alloy powder, and the obtained nickel-titanium alloy powder is mixed with molybdenum powder to obtain a mixed powder, wherein the Fisher particle size ratio of the nickel-titanium alloy powder to the molybdenum powder is set to 1:20-50.

[0017] Some embodiments disclose a method for preparing a high-density, high-plasticity molybdenum-nickel-titanium alloy target material. The process of mixing molybdenum powder, nickel powder, and titanium powder to obtain a mixed powder is carried out in a powder mixing device. The powder mixing device has an inert gas atmosphere and a pressure set to 0.1 to 0.3 MPa.

[0018] In some embodiments of the method for preparing a high-density, high-plasticity molybdenum-nickel-titanium alloy target, the Fritzing particle size ratio of titanium powder to molybdenum powder is set to 1:20-40, and the Fritzing particle size ratio of nickel powder to molybdenum powder is set to 1:10-40.

[0019] Some embodiments disclose a method for preparing a high-density, high-plasticity molybdenum-nickel-titanium alloy target material, wherein the molybdenum-nickel-titanium green body is vacuumed at 200-500° C. before hot isostatic pressing, and the vacuuming time is set to 2-6 hours.

[0020] On the other hand, some embodiments disclose a high-density, high-plasticity molybdenum-nickel-titanium alloy target material obtained by a method for preparing a high-density, high-plasticity molybdenum-nickel-titanium alloy target material.

[0021] The preparation method of the high-density and high-plasticity molybdenum-nickel-titanium alloy target disclosed in the embodiment of the present invention adopts a graded sintering process, vacuum sintering after cold isostatic pressing, and then hot isostatic pressing sintering. It can control the oxygen content in the molybdenum-nickel-titanium alloy target, improve the density of the molybdenum-nickel-titanium alloy target, and achieve a relative density of up to 99.5%. It reduces the content of oxygen-containing solid solution and improves the plasticity of the molybdenum-nickel-titanium alloy target. The solid solubility of nickel and titanium in molybdenum is small, approximately 5%. The molybdenum-nickel-titanium alloy has fine grains, approximately 5μm, and can be rolled. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 Surface morphology of molybdenum-nickel-titanium sintered blank in Example 1;

[0023] Figure 2 XRD pattern of molybdenum-nickel-titanium sintered compact of Example 1;

[0024] Figure 3 Grain map of molybdenum-nickel-titanium sintered compact in Example 1;

[0025] Figure 4 Example 1: SEM morphology of the fracture surface of the molybdenum-nickel-titanium sintered blank;

[0026] Figure 5 Example 1 Mapping element distribution diagram of molybdenum nickel titanium sintered compact;

[0027] Figure 6 Example 2: Element fixed-point analysis comparison chart of molybdenum-nickel-titanium sintered compact;

[0028] Figure 7 Comparison diagram of thermal simulation compression of molybdenum-nickel-titanium sintered blank in Example 2;

[0029] Figure 8 Thermal simulation compression curve of molybdenum-nickel-titanium sintered compact in Example 2. DETAILED DESCRIPTION

[0030] The term "embodiment" is used herein specifically to describe any embodiment as "exemplary," and should not be construed as superior or preferable to other embodiments. Performance indicators in the embodiments of the present invention were tested using conventional testing methods in the art, unless otherwise specified. It should be understood that the terms used in the embodiments of the present invention are intended solely to describe specific implementations and are not intended to limit the disclosure of the embodiments of the present invention.

[0031] Unless otherwise specified, the technical and scientific terms used herein have the same meanings as commonly understood by those skilled in the art to which the embodiments of the present invention pertain; any experimental methods and technical means not otherwise specified in the embodiments of the present invention refer to experimental methods and technical means commonly used by those skilled in the art.

[0032] As used herein, the terms "substantially" and "approximately" are used to describe small fluctuations. For example, they can refer to less than or equal to ±5%, such as less than or equal to ±2%, such as less than or equal to ±1%, such as less than or equal to ±0.5%, such as less than or equal to ±0.2%, such as less than or equal to ±0.1%, such as less than or equal to ±0.05%. Numerical data expressed or presented in range format herein are used for convenience and brevity only and should therefore be interpreted flexibly to include not only the values explicitly listed as the limits of the range, but also all independent values or subranges contained within the range. For example, a numerical range of "1-5%" should be interpreted to include not only the explicitly listed values of 1% to 5%, but also the independent values and subranges within the indicated range. Thus, included in this numerical range are independent values such as 2%, 3.5%, and 4%, and subranges such as 1% to 3%, 2% to 4%, and 3% to 5%, etc. This principle also applies to ranges that only list a single value. Furthermore, this interpretation applies regardless of the width of the range or the characteristics described.

[0033] Throughout this document, including in the claims, transitional terms such as "comprises," "includes," "with," "having," "contains," "involving," and "accommodating" are understood to be open-ended, meaning "including but not limited to." Only the transitional terms "consisting of" and "composed of" are closed transitional terms.

[0034] In order to better illustrate the present invention, numerous specific details are provided in the following specific examples. It should be understood by those skilled in the art that the present invention can be practiced without certain specific details. In the examples, some methods, means, instruments, and equipment well known to those skilled in the art are not described in detail in order to highlight the main purpose of the present invention.

[0035] Under the premise of no conflict, the technical features disclosed in the embodiments of the present invention can be arbitrarily combined, and the resulting technical solutions belong to the contents disclosed in the embodiments of the present invention.

[0036] In some embodiments, some examples disclose a method for preparing a high-density, high-plasticity molybdenum-nickel-titanium alloy target, comprising:

[0037] Take a set amount of molybdenum powder, nickel powder and titanium powder, and mix them to obtain a mixed powder; usually, the powders are weighed in proportion in a dust-free operation room, and central air conditioning can be used to keep the environment dry, or a small sun can be used to dry the air, but note that the room temperature cannot be higher than 40°C. The operator must wear a dust-free suit, mask, and dust cap throughout the process, and weigh the corresponding proportions of molybdenum powder, nickel powder and titanium powder; usually, the symmetrically taken molybdenum powder, nickel powder and titanium powder are mixed in a dust-free operation room, and the powder mixing equipment is dried in advance, and a hair dryer can be used for high-temperature baking, or a small sun can be used for baking, and the molybdenum powder, nickel powder and titanium powder are poured into the powder mixing equipment, evacuated to negative pressure, and then filled with argon to 0.1-0.3MPa, and repeated three times, and finally the pressure is maintained at 0.1-0.3MPa, and the air is kept dry during the mixing;

[0038] The mixed powder is vacuum packaged; usually, after the powder mixing process is completed, the mixed powder is obtained in a dry environment and the mixed powder is vacuum packaged in time. For example, the vacuum packaging machine can be dried with a hair dryer or a small sun in advance, and the vacuum packaging is performed 2 to 3 times;

[0039] The vacuum-encapsulated mixed powder is cold isostatically pressed in a cold isostatic pressing mold to obtain a molybdenum-nickel-titanium green body; the cold isostatic pressing mold can usually be ultrasonically cleaned and dried in a vacuum drying oven for 4 to 8 hours. The vacuum-encapsulated mixed powder is taken out and placed in a cold isostatic pressing mold, and the cold isostatic pressing mold is vacuum-encapsulated and then cold isostatically pressed to obtain a green body.

[0040] The obtained molybdenum-nickel-titanium green body is vacuum sintered;

[0041] The vacuum sintered molybdenum-nickel-titanium green body is hot isostatically pressed to obtain a high-density and high-plasticity molybdenum-nickel-titanium alloy target.

[0042] In some embodiments, the mass content of the molybdenum powder in the mixed powder is 30-80%, the mass content of the nickel powder is 10-30%, and the mass content of the titanium powder is 10-40%.

[0043] In some embodiments, molybdenum powder, nickel powder, and titanium powder are poured into a powder mixing device, evacuated to negative pressure, and then filled with argon gas to 0.1-0.3 MPa, and this process is repeated three times, and the pressure is finally maintained at 0.2 MPa. The air is kept dry during the mixing process.

[0044] In some embodiments, the cold isostatic pressing mold is ultrasonically cleaned and dried in a vacuum drying oven for 4 to 8 hours to ensure that the mold is dry. The pressure of the cold isostatic pressing process is set to 250 MPa and the pressing time is set to 10 minutes.

[0045] In some embodiments, the vacuum degree of the vacuum sintering process of the molybdenum nickel titanium green body is set to 1×10-3 Pa, the sintering temperature is set to 100-500 °C, and the sintering time is set to 0.5-2 h.

[0046] In some embodiments of the method for preparing a high-density, high-plasticity molybdenum-nickel-titanium alloy target, the temperature of the hot isostatic pressing process is set to 800-1100° C. and the holding time is 1-3 hours.

[0047] In the preparation method of high-density, high-plasticity molybdenum-nickel-titanium alloy target disclosed in some embodiments, nickel powder and titanium powder are used to prepare nickel-titanium alloy powder, and the obtained nickel-titanium alloy powder is mixed with molybdenum powder to obtain a mixed powder, wherein the Fisher particle size ratio of the nickel-titanium alloy powder to the molybdenum powder is set to 1:20-50. The inventors found that the best effect is achieved by first preparing nickel powder and titanium powder into alloy powder, and then mixing molybdenum powder with nickel-titanium alloy powder, and the Fisher particle size ratio of the nickel-titanium alloy powder to the molybdenum powder meets 1:20-50. The obtained molybdenum-nickel-titanium alloy has better performance, lower oxygen content after sintering, less solid solubility of titanium element matrix, less Ni3Ti phase content, and better plastic deformation ability. The preparation of nickel-titanium alloy powder can usually be achieved by smelting method and mechanical alloying method.

[0048] In some embodiments, the molybdenum powder, nickel powder, and titanium powder are mixed to obtain a mixed powder in a powder mixing device, which is an inert gas atmosphere with a pressure set to 0.1 to 0.3 MPa. The mixing device is a V-shaped mixer, model XBF-20.

[0049] Some embodiments disclose methods for preparing high-density, high-plasticity molybdenum-nickel-titanium alloy targets, wherein the Fischer-Strauss ratio of titanium powder to molybdenum powder is set at 1:20-40, and the Fischer-Strauss ratio of nickel powder to molybdenum powder is set at 1:10-40. The inventors have discovered that strictly controlling the particle size ratios of molybdenum powder to titanium powder and molybdenum powder to nickel powder during the preparation of molybdenum-nickel-titanium alloy by mixing molybdenum powder, nickel powder, and titanium powder can reduce oxygenation in the sintered target, reduce solid solution of the titanium element in the matrix, and reduce the formation of Ni3Ti brittle phases during the preparation process, thereby significantly improving the plastic processing properties of the molybdenum-nickel-titanium alloy target. In a more preferred embodiment, the Fischer-Strauss ratio of titanium powder to molybdenum powder is set at 1:20-40, and the Fischer-Strauss ratio of nickel powder to molybdenum powder is set at 1:10-40. This results in lower oxygen content, less solid solution of the titanium element in the matrix, less Ni3Ti phase content, and better plastic deformation ability after sintering.

[0050] In some embodiments, the molybdenum-nickel-titanium green body is subjected to a degassing treatment at 200-500°C for 2-6 hours before hot isostatic pressing. This degassing treatment typically removes impurities from the gas, reducing impurities in the final product, lowering the content of oxygen-containing solid solutions, and improving the plasticity of the final molybdenum-nickel-titanium alloy target.

[0051] Some embodiments disclose a high-density, high-plasticity molybdenum-nickel-titanium alloy target material obtained by a method for preparing a high-density, high-plasticity molybdenum-nickel-titanium alloy target material.

[0052] The preparation method of the high-density and high-plasticity molybdenum-nickel-titanium alloy target disclosed in the embodiment of the present invention adopts a graded sintering process, vacuum sintering after cold isostatic pressing, and then hot isostatic pressing sintering. It can control the oxygen content in the molybdenum-nickel-titanium alloy target, improve the density of the molybdenum-nickel-titanium alloy target, and achieve a relative density of up to 99.5%. It reduces the content of oxygen-containing solid solution and improves the plasticity of the molybdenum-nickel-titanium alloy target. The solid solubility of nickel and titanium in molybdenum is small, approximately 5%. The molybdenum-nickel-titanium alloy has fine grains, approximately 5μm, and can be rolled.

[0053] The technical details are further illustrated below with reference to embodiments.

[0054] Example 1

[0055] Take a set amount of molybdenum powder, nickel powder and titanium powder and mix them to obtain a mixed powder; the mass content of molybdenum powder in the mixed powder is 30%, the mass content of nickel powder is 30%, and the mass content of titanium powder is 40%; pour the molybdenum powder, nickel powder and titanium powder into a powder mixing equipment, evacuate to negative pressure, and then fill with argon to 0.3MPa, repeat this process three times, and finally maintain the pressure at 0.2MPa. Keep the air dry during the mixing process;

[0056] After the powder mixing process is completed, the mixed powder is obtained in a dry environment and vacuum-sealed in time for 3 times;

[0057] The cold isostatic pressing mold was ultrasonically cleaned and dried in a vacuum drying oven for 8 hours to ensure that the mold was dry. The pressure of the cold isostatic pressing process was set to 250 MPa and the pressing time was set to 10 minutes.

[0058] The obtained molybdenum nickel titanium green body was vacuum sintered; the vacuum degree of the vacuum sintering process was set to 1×10 -3 Pa, the sintering temperature was set to 500 °C, and the sintering time was set to 0.5 h;

[0059] The vacuum sintered molybdenum-nickel-titanium green body was hot isostatically pressed at a temperature of 800°C for 3 hours to obtain a high-density, high-plasticity molybdenum-nickel-titanium alloy target.

[0060] The high-density, high-plasticity molybdenum-nickel-titanium alloy target obtained in Example 1 was subjected to performance testing and analysis. Figure 1 This is a surface morphology diagram of the molybdenum-nickel-titanium sintered blank disclosed in Example 1. Figure 2 This is the XRD pattern of the molybdenum-nickel-titanium sintered compact of Example 1, Figure 3 This is the grain map of the molybdenum-nickel-titanium sintered blank of Example 1, Figure 4This is the SEM morphology of the fracture of the molybdenum-nickel-titanium sintered blank of Example 1. Figure 5 This is the mapping element distribution diagram of the molybdenum-nickel-titanium sintered blank in Example 1.

[0061] Example 2

[0062] The Fischer-Strauss ratio of titanium powder to molybdenum powder is set to 1:20-40, and the Fischer-Strauss ratio of nickel powder to molybdenum powder is set to 1:10-40. A predetermined amount of molybdenum powder, nickel powder, and titanium powder are mixed to obtain a mixed powder; the mass content of the mixed powder is 30% by mass of molybdenum powder, 30% by mass of nickel powder, and 40% by mass of titanium powder. The molybdenum powder, nickel powder, and titanium powder are poured into a powder mixing device, evacuated to a negative pressure, and then filled with argon to 0.3 MPa. This process is repeated three times, and the pressure is finally maintained at 0.2 MPa. The air is kept dry during the mixing process.

[0063] After the powder mixing process is completed, the mixed powder is obtained in a dry environment and vacuum-sealed in time for 3 times;

[0064] The cold isostatic pressing mold was ultrasonically cleaned and dried in a vacuum drying oven for 8 hours to ensure that the mold was dry. The pressure of the cold isostatic pressing process was set to 250 MPa and the pressing time was set to 10 minutes.

[0065] The obtained molybdenum nickel titanium green body was vacuum sintered; the vacuum degree of the vacuum sintering process was set to 1×10 -3 Pa, the sintering temperature was set to 500 °C, and the sintering time was set to 0.5 h;

[0066] The vacuum sintered molybdenum-nickel-titanium green body was hot isostatically pressed at a temperature of 800°C for 3 hours to obtain a high-density, high-plasticity molybdenum-nickel-titanium alloy target.

[0067] As a comparative example of this embodiment 2, the Fischer-Tropsch ratio of titanium powder to molybdenum powder was set to 1:10, and the Fischer-Tropsch ratio of nickel powder to molybdenum powder was set to 1:6. Other conditions were the same as those in embodiment 2 to prepare a high-density, high-plasticity molybdenum-nickel-titanium alloy target.

[0068] The performance of the molybdenum nickel titanium alloy target sample obtained in Example 2 was tested and analyzed, with the results of the sample with the Feldspar particle size ratio of titanium powder to molybdenum powder set at 1:20 and the Feldspar particle size ratio of nickel powder to molybdenum powder set at 1:10 as an example. Figure 6 、 7 , 8, where Figure 6 、 7 In the figure, a represents a molybdenum-nickel-titanium alloy target sample with the Fisher particle size ratio of titanium powder to molybdenum powder set to 1:20 and the Fisher particle size ratio of nickel powder to molybdenum powder set to 1:10, and b represents a comparative example sample.

[0069] Figure 6 This is a comparison chart of elemental fixed-point analysis of Example 2 and its comparative example. From the experimental results, it can be seen that sample a has lower oxygen content, smaller solid solution degree of titanium element matrix, and less Ni3Ti phase content; Figure 7 This is a comparison of the thermal simulation compression of Example 2 and its comparative example. The results show that under the same experimental conditions, sample a remains intact, while sample b breaks, indicating that sample a has better plasticity. Figure 8 This is a thermal simulation compression curve diagram of Example 2 and its comparative example. The results show that sample a maintains a good true stress platform within a longer true strain range, while sample b has almost no true stress platform. In the process of increasing true strain, the true stress reaches the maximum and then quickly decreases, indicating that sample a has better plastic deformation ability than sample b.

[0070] The preparation method of the high-density and high-plasticity molybdenum-nickel-titanium alloy target disclosed in the embodiment of the present invention adopts a graded sintering process, vacuum sintering after cold isostatic pressing, and then hot isostatic pressing sintering. It can control the oxygen content in the molybdenum-nickel-titanium alloy target, improve the density of the molybdenum-nickel-titanium alloy target, and achieve a relative density of up to 99.5%. It reduces the content of oxygen-containing solid solution and improves the plasticity of the molybdenum-nickel-titanium alloy target. The solid solubility of nickel and titanium in molybdenum is small, approximately 5%. The molybdenum-nickel-titanium alloy has fine grains, approximately 5μm, and can be rolled.

[0071] The technical solutions and technical details disclosed in the embodiments of the present invention are merely illustrative of the inventive concept of the present invention and do not constitute a limitation on the technical solutions of the embodiments of the present invention. Any conventional changes, replacements or combinations of the technical details disclosed in the embodiments of the present invention have the same inventive concept as the present invention and are within the scope of protection of the claims of the present invention.

Claims

1. A method for preparing a high-density, high-plasticity molybdenum-nickel-titanium alloy target, characterized in that: include: Taking set amounts of molybdenum powder, nickel powder and titanium powder to obtain a mixed powder; wherein the mass content of the molybdenum powder is 30-80%, the mass content of the nickel powder is 10-30%, and the mass content of the titanium powder is 10-40%; the Fisher particle size ratio of the titanium powder to the molybdenum powder is set to 1:20-40, and the Fisher particle size ratio of the nickel powder to the molybdenum powder is set to 1:10-40; the process of mixing the molybdenum powder, nickel powder and titanium powder to obtain the mixed powder is carried out in a powder mixing equipment, the powder mixing equipment is in an inert gas atmosphere, and the atmosphere pressure is set to 0.1-0.3 MPa; Vacuum packaging the mixed powder; The vacuum-encapsulated mixed powder is cold isostatically pressed in a cold isostatic pressing mold to obtain a molybdenum-nickel-titanium green body; wherein the cold isostatic pressing process has a pressure of 250 MPa, a pressing time of 5 to 15 minutes, and a pressing temperature of 20 to 50° C.; The obtained molybdenum nickel titanium green body is vacuum sintered; the vacuum degree of the vacuum sintering process of the molybdenum nickel titanium green body is 1×10 -3 ~1×10 -2 Pa, the sintering temperature is set to 100-500 °C, and the sintering time is set to 0.5-2 h; The molybdenum-nickel-titanium green body after vacuum sintering is first subjected to vacuum treatment and then to hot isostatic pressing to obtain a high-density, high-plasticity molybdenum-nickel-titanium alloy target; wherein, the vacuum treatment is carried out at 200-500°C, and the vacuum treatment time is set to 2-6h; the pressure of the hot isostatic pressing process is set to 200-300MPa, the temperature is set to 800-1100°C, and the holding time is set to 1-3h.

2. High density, high plasticity molybdenum nickel titanium alloy target, characterized by: Obtained by the preparation method according to claim 1.

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