A dual-degree-of-freedom anti-micro-vibration platform for large precision instruments

Abstract

The present invention provides a dual-degree-of-freedom anti-micro-vibration platform for large-scale precision instruments, comprising a top plate, a vertical drive device, a horizontal drive device, and support legs. The platform is characterized in that the four corners of the bottom of the top plate are respectively connected to the vertical drive device, the bottom of the vertical drive device is installed on the top of the support leg, a column is vertically installed in the middle of the bottom of the top plate, and the horizontal drive device is installed on the left, right, front, rear, and side of the column, respectively. A crossbeam is installed between the support legs, and the bottom of the horizontal drive device is vertically connected to the crossbeam. A position sensor and a speed sensor are also installed at the bottom of the top plate, and a controller is installed on the crossbeam. The present invention adopts active and passive parallel connection in both vertical and horizontal directions to expand the vibration isolation bandwidth, and can achieve lower frequency vibration control of 0.2Hz~250 Hz, reduce the load of the active vibration isolator, improve positioning accuracy, and extend the life of the system.

Description

Technical Field

[0001] The invention relates to the technical field of vibration isolation devices, in particular to a double-degree-of-freedom large-scale precision instrument micro-vibration prevention platform. Background Art

[0002] At present, the semiconductor industry is developing rapidly. The precision requirements of semiconductor production equipment are getting higher and higher. The equipment is becoming more and more sensitive to environmental requirements such as micro-vibration. A small amount of micro-vibration will reduce the output yield of the equipment or even cause the equipment to malfunction. Therefore, isolation of micro-vibration is becoming more and more important.

[0003] Microvibrations caused by external environmental vibrations and internal reaction forces within equipment are key factors limiting the measurement accuracy of ultra-precision instruments and the manufacturing precision of ultra-precision machining equipment. High-performance precision micro-vibration isolation technology has become a core technology in fields such as precision engineering and ultra-precision manufacturing, and research on this technology has significant practical significance and application value. The interfering vibration frequencies of ultra-precision measuring instruments and ultra-precision machining equipment primarily fall within the low-frequency range of 0.8 to 100 Hz. Passive vibration isolators, in principle, filter out external vibrations by reducing their natural frequency, and their effectiveness depends on the magnitude of their natural frequency. However, the natural frequency is proportional to the square root of the isolator's stiffness: the lower the natural frequency, the lower the stiffness. Passive vibration isolators are unable to suppress load-induced disturbances. Actively controlled vibration isolation systems are very effective for isolating ultra-low-frequency micro-vibrations. Choosing the right structure and control strategy can also suppress load-induced disturbances.

[0004] However, the environment in which precision instruments operate is complex, with not just low-frequency or high-frequency vibrations, but often both low-frequency and high-frequency vibrations coexisting. Traditional vibration isolation devices struggle to meet the vibration isolation requirements of such complex environments. They often occupy large spaces, have narrow isolation bands, and have weak isolation capabilities in complex vibration environments. This makes it particularly difficult to meet the load requirements of large precision instruments, resulting in unsatisfactory system positioning accuracy. Summary of the Invention

[0005] The purpose of the present invention is to provide a dual-degree-of-freedom large-scale precision instrument anti-micro-vibration platform to solve the problems existing in the above-mentioned background technology.

[0006] The technical solution of the present invention is achieved as follows:

[0007] The yoke is provided with a plurality of support legs and a plurality of support legs, and the support legs are provided with a plurality of support legs, and the support legs are provided with a plurality of support legs. The top of the linkage is connected with the top of the linkage, and the bottom of the linkage is connected with the top of the linkage.

[0008] Furthermore, the compressive strength of the elastomer is 60-70 MPa, the elastomer is a polyurethane elastomer, and the polyurethane elastomer is made of the following raw materials by mass fraction: 8-10% polyisocyanate, 8-10% polyester polyol, 40-45% ceramsite, 8-10% cement, 2-4% polyurethane fiber, and 25-30% polyurethane particles. The polyurethane elastomer is prepared by the following steps:

[0009] (1) 40-45% ceramsite, 8-10% cement, 2-4% polyurethane fiber, and 25-30% polyurethane particles are mixed evenly to obtain a mixed dry material, and then water is added to the mixed dry material and stirred evenly to obtain a pre-mixed material with a water-cement ratio of 0.4-0.6;

[0010] (2) 8-10% of polyisocyanate and 8-10% of polyester polyol were mixed and stirred for 15-20 seconds, and then the prepared material in step (1) was added and stirred for 1.5-2 minutes, and then poured into a mold for molding, and naturally cured for 7 days to obtain a polyurethane elastomer.

[0011] Furthermore, the ceramsite is high-strength ceramsite with a compressive strength of 50MP and a ceramsite particle size of 1-3mm, and the cement is silicate cement with a grade of 62.5.

[0012] Furthermore, a pad is installed between the metal spring and the transverse plate.

[0013] Furthermore, a gap of 0.8 to 1.2 cm is left between the permanent magnet and the electromagnet to facilitate the up and down driving of the guide rod.

[0014] Furthermore, an inner lining plate is installed between the guide rod and the top of the cylinder.

[0015] Furthermore, the controller is connected to the position sensor, the speed sensor, the upper coil, the lower coil, and the electromagnet through cables.

[0016] Furthermore, the support legs are made of stainless steel plates to form a rectangular frame, transverse and longitudinal steel bars are arranged in the rectangular frame, and grade 600 concrete is poured in the support legs and the crossbeams.

[0017] The beneficial effects of the present invention are:

[0018] The present invention achieves vertical high-frequency vibration reduction through rubber pads and polyurethane elastomers. The ultra-high-strength polyurethane elastomer can meet the load-bearing requirements of 2000kg large-scale precision instruments, has a wide hardness range, and has good elasticity to achieve high-frequency vibration reduction. Vertical high-precision positioning and low-frequency vibration reduction are achieved by arranging four vertical drive devices, namely 16 magnetic levitation devices. High-frequency vibration reduction is achieved horizontally through metal springs, and low-frequency vibration reduction is achieved through magnetic drive.

[0019] The present invention adopts active and passive parallel connection in both vertical and horizontal directions to expand the vibration isolation bandwidth, which can achieve lower frequency vibration control of 0.2Hz~250Hz, reduce the load of active vibration isolators, improve positioning accuracy, and extend system life. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of the present invention.

[0021] Figure 2 It is a structural schematic diagram of the vertical drive device of the present invention.

[0022] Figure 3 It is a schematic structural diagram of the horizontal driving device of the present invention.

[0023] In the figure, 1-top plate, 2-vertical driving device, 201-support plate, 202-spherical hinge, 203-support column, 204-connecting rod, 205-rubber pad, 206-magnetic levitation device, 2061-housing, 2062-vertical rod, 2063-upper coil, 2064-lower coil, 2065-magnetic ring, 2066-opening, 207-elastic body, 208-pad, 209-support rod, 2010-base, 3-horizontal driving device, 301-cylinder, 302-guide rod, 303-cross plate, 304-metal spring, 305-pad, 306-permanent magnet, 307-electromagnet, 308-inner lining plate, 4-support leg, 5-column, 6-crossbeam, 7-position sensor, 8-speed sensor, 9-controller. Implementation Method

[0024] The following will clearly and completely describe the technical solutions of the present invention in conjunction with the embodiments. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0025] like Figure 1-3As shown, a dual-degree-of-freedom large-scale precision instrument anti-micro-vibration platform includes a top plate 1, a vertical drive device 2, a horizontal drive device 3 and support legs 4. The four corners of the bottom of the top plate 1 are respectively connected to the vertical drive device 2, and the bottom of the vertical drive device is installed on the top of the support leg 4. A column is vertically installed in the middle of the bottom of the top plate 1, and the horizontal drive device 3 is installed on the left, right, front, rear and side of the column 5 respectively. A crossbeam 6 is installed between the support legs 4, and the bottom of the horizontal drive device 3 is vertically connected to the crossbeam 6. The vertical drive device 2 includes a support plate 201, a support column 203, a magnetic levitation device 206 and a base. 2010, a spherical hinge 202 is vertically connected to the middle of the bottom of the support plate 201, and the bottom of the spherical hinge 202 is connected to the top of the support column 203. The front, rear, left and right sides of the lower part of the support column 203 are vertically connected with connecting rods 204 in a cross shape. The bottom of the support column 203 is connected to a rubber pad 205, and the top of the connecting rod 204 is respectively connected to the magnetic levitation device 206. The magnetic levitation device 206 includes a shell 20061, and a vertical rod 2062 is vertically installed in the middle of the shell 2061. The upper and lower ends of the vertical rod 2062 are respectively equipped with an upper coil 2063 and a lower coil 2064. A magnetic ring 2065 is slidably connected in the middle of the rod 2062. An opening 2066 is vertically opened on the side of the housing 2061 close to the connecting rod 204. The top of the connecting rod 204 passes through the opening 2066 and is connected to the magnetic ring 2065. The magnetic levitation device 206 is respectively installed on the elastic body 207. A pad 208 is further connected between the magnetic levitation device 206 and the elastic body 207. A cross-shaped support rod 209 is connected between the pads 208. The rubber pad 205 is installed in the middle top of the support rod 209. The bottom of the elastic body 207 is installed on the base 2010. The horizontal drive device 3 includes a cylinder 3 01, the top of the cylinder 301 is slidably connected to a guide rod 302, and a horizontal plate 303 is vertically installed on the upper inner part of the cylinder 301. The guide rod 302 vertically passes through the top of the cylinder 301 and is inserted into the cylinder 301 through the horizontal plate 303. A metal spring 304 is set between the inner side of the top of the cylinder 301 and the horizontal plate 303 and the outer side of the guide rod 302. The bottom of the guide rod 302 is vertically connected to a permanent magnet 306. An electromagnet 307 is installed on the same vertical line as the permanent magnet 306 on the inner side of the bottom of the cylinder 301. A position sensor 7 and a speed sensor 8 are also installed at the bottom of the top plate 1, and a controller 9 is installed on the beam 6.

[0026] The elastic body 207 is a polyurethane elastomer.

[0027] A spacer block 305 is installed between the metal spring 304 and the transverse plate 303 .

[0028] A gap of 0.8 to 1.2 cm is left between the permanent magnet 306 and the electromagnet 307 to facilitate the upward and downward driving of the guide rod 302 .

[0029] An inner lining plate 308 is installed between the guide rod 302 and the top of the cylinder 301 .

[0030] The controller 9 is connected to the position sensor 7 , the speed sensor 8 , the upper coil 2063 , the lower coil 2064 , and the electromagnet 307 via cables.

[0031] The support legs 4 are made of stainless steel plates into a rectangular frame, and transverse and longitudinal steel bars are arranged in the rectangular frame. The support legs 4 and the crossbeam 6 are poured with grade 600 concrete. Example

[0032] The polyurethane elastomer of this embodiment is made of the following raw materials by mass fraction: 8% polyisocyanate, 8% polyester polyol, 40% ceramsite, 10% cement, 4% polyurethane fiber, and 30% polyurethane particles. The polyurethane elastomer is prepared by the following steps:

[0033] (1) 40% ceramsite, 10% cement, 4% polyurethane fiber, and 30% polyurethane particles are mixed evenly to obtain a mixed dry material, and then water is added to the mixed dry material and stirred evenly to obtain a pre-material, wherein the water-cement ratio is 0.6, the ceramsite is high-strength ceramsite with a compressive strength of 50 MPa and a ceramsite particle size of 1 to 3 mm, and the cement is silicate cement with a grade of 62.5;

[0034] (2) 8% of polyisocyanate and 8% of polyester polyol were mixed and stirred for 15 seconds, and then the prepared material in step (1) was added and stirred for 1.5 minutes, and then poured into a mold for molding, and naturally cured for 7 days to obtain a polyurethane elastomer.

[0035] The compressive strength of the elastomer prepared in this embodiment can reach 60 MPa, which can meet the vibration control requirements of 0.2 Hz to 230 Hz for 1800 kg large precision instruments. Example

[0036] The polyurethane elastomer of this embodiment is made of the following raw materials by mass fraction: 9% polyisocyanate, 9% polyester polyol, 43% ceramsite, 9% cement, 3% polyurethane fiber, and 27% polyurethane particles. The polyurethane elastomer is prepared by the following steps:

[0037] (1) 9% ceramsite, 9% cement, 3% polyurethane fiber, and 27% polyurethane particles are mixed evenly to obtain a mixed dry material, and then water is added to the mixed dry material and stirred evenly to obtain a pre-material, wherein the water-cement ratio is 0.5, the ceramsite is high-strength ceramsite with a compressive strength of 50 MPa and a ceramsite particle size of 1 to 3 mm, and the cement is silicate cement with a grade of 62.5;

[0038] (2) 9% of polyisocyanate and 9% of polyester polyol were mixed and stirred for 18 seconds, and then the prepared material in step (1) was added and stirred for 1.8 minutes, and then poured into a mold for molding, and naturally cured for 7 days to obtain a polyurethane elastomer.

[0039] The compressive strength of the elastomer prepared in this embodiment can reach 66 MPa, which can meet the vibration control requirements of 0.2 Hz to 240 Hz for a 1900 kg large precision instrument. Example

[0040] The polyurethane elastomer of this embodiment is made of the following raw materials by mass fraction: 10% polyisocyanate, 10% polyester polyol, 45% ceramsite, 8% cement, 2% polyurethane fiber, and 25% polyurethane particles. The polyurethane elastomer is prepared by the following steps:

[0041] (1) 45% ceramsite, 8% cement, 2% polyurethane fiber, and 25% polyurethane particles are mixed evenly to obtain a mixed dry material, and then water is added to the mixed dry material and stirred evenly to obtain a pre-material, wherein the water-cement ratio is 0.4, the ceramsite is high-strength ceramsite with a compressive strength of 50 MPa and a ceramsite particle size of 1 to 3 mm, and the cement is silicate cement with a grade of 62.5;

[0042] (2) 10% polyisocyanate and 10% polyester polyol were mixed and stirred for 20 seconds, and then the prepared material in step (1) was added and stirred for 2 minutes, and then poured into a mold for molding, and naturally cured for 7 days to obtain a polyurethane elastomer.

[0043] The compressive strength of the elastomer prepared in this embodiment can reach 60 MPa, which can meet the vibration control requirements of 0.2 Hz to 250 Hz for 1800 kg large precision instruments.

[0044] During operation, the precision instrument is placed on the top plate 1, and the vibration signal of the top plate 1 is collected through the position sensor 7 and the speed sensor 8, and the vibration signal is transmitted to the controller 9. When the vibration source is vertically high-frequency, vertical high-frequency vibration reduction is achieved through the rubber pad 205 and the elastic body 207; when the vibration source is vertically low-frequency, the magnetic field strength of the upper coil 2063 and the lower coil 2064 is controlled by the controller 9 to increase the attraction, drive the magnetic ring 2065 to move, thereby driving the connecting rod 204 and the support column 203 to move, and achieve vertical low-frequency vibration reduction; when the vibration source is horizontally high-frequency, horizontal high-frequency vibration reduction is achieved through the metal spring 304 in the horizontal drive device 3; when the vibration source is horizontally low-frequency, the magnetic field strength of the electromagnet 307 is controlled by the controller 9 to increase the repulsion, drive the permanent magnet 306 and the guide rod 302 to move, and achieve horizontal low-frequency vibration reduction.

[0045] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A dual-degree-of-freedom large-scale precision instrument anti-micro-vibration platform, comprising a top plate, a vertical drive device, a horizontal drive device and support legs, characterized in that: The four corners of the bottom of the top plate are respectively connected to the vertical driving device, the bottom of the vertical driving device is installed on the top of the supporting legs, and the middle of the bottom of the top plate is vertically installed with a column, and the left, right, front, rear and side of the columns are respectively installed with a horizontal driving device. A cross beam is installed between the support legs, and the bottom of the horizontal driving device is vertically connected to the cross beam. The vertical driving device includes a support plate, a support column, a magnetic levitation device and a base, and the middle of the bottom of the support plate is vertically connected with a spherical hinge, and the bottom of the spherical hinge is connected to the top of the support column in a cross shape. The front, rear, left and right sides of the lower part of the support column are vertically connected with a connecting rod, the bottom of the support column is connected to a rubber pad, and the top of the connecting rod is respectively connected to the magnetic levitation device, and the magnetic levitation device includes a shell, a vertical rod is vertically installed in the middle of the shell, and the upper and lower ends of the vertical rod are respectively provided with an upper coil and a lower coil. The middle sliding rod of the vertical rod The cam is mounted on a link rod and has a bottom surface mounted on the link rod, the cam being mounted on a link rod with a top end mounted on the link rod and a bottom surface mounted on the link rod.

2. A dual-degree-of-freedom large precision instrument anti-micro-vibration platform according to claim 1, characterized in that: The compressive strength of the elastomer is 60-70 MPa. The elastomer is a polyurethane elastomer, which is made of the following raw materials by mass fraction: 8-10% polyisocyanate, 8-10% polyester polyol, 40-45% ceramsite, 8-10% cement, 2-4% polyurethane fiber, and 25-30% polyurethane particles. The polyurethane elastomer is prepared by the following steps: (1) 40-45% ceramsite, 8-10% cement, 2-4% polyurethane fiber, and 25-30% polyurethane particles are mixed evenly to obtain a mixed dry material, and then water is added to the mixed dry material and stirred evenly to obtain a pre-mixed material with a water-cement ratio of 0.4-0.6; (2) 8-10% of polyisocyanate and 8-10% of polyester polyol were mixed and stirred for 15-20 seconds, and then the prepared material in step (1) was added and stirred for 1.5-2 minutes, and then poured into a mold for molding, and naturally cured for 7 days to obtain a polyurethane elastomer.

3. A dual-degree-of-freedom large precision instrument anti-micro-vibration platform according to claim 2, characterized in that: The ceramsite is high-strength ceramsite with a compressive strength of 50MP and a particle size of 1-3mm. The cement is silicate cement with a grade of 62.

5.

4. The dual-degree-of-freedom large-scale precision instrument anti-micro-vibration platform according to claim 1, characterized in that: A cushion block is also installed between the metal spring and the transverse plate.

5. The dual-degree-of-freedom large-scale precision instrument anti-micro-vibration platform according to claim 1, characterized in that: A gap of 0.8 to 1.2 cm is left between the permanent magnet and the electromagnet to facilitate the up and down driving of the guide rod.

6. The dual-degree-of-freedom large-scale precision instrument anti-micro-vibration platform according to claim 1, characterized in that: An inner lining plate is also installed between the guide rod and the top of the cylinder.

7. The dual-degree-of-freedom large-scale precision instrument anti-micro-vibration platform according to claim 1, characterized in that: The controller is connected with the position sensor, the speed sensor, the upper coil, the lower coil and the electromagnet through cables.

8. The dual-degree-of-freedom large-scale precision instrument anti-micro-vibration platform according to claim 1, characterized in that: The support legs are made of stainless steel plates into a rectangular frame, and transverse and longitudinal steel bars are arranged in the rectangular frame. The dual-degree-of-freedom large-scale precision instrument anti-micro-vibration platform according to claim 1 is characterized in that The support legs and cross beams are poured with 600 grade concrete.

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