A clamping device for an evaporation boat

Abstract

The present invention provides a clamping device for an evaporation boat, which relates to the technical field of coating equipment, and comprises an anode and a common electrode, wherein the evaporation boat is clamped between the anode and the common electrode, and a vertical plate is provided at one end of the anode away from the evaporation boat, and an insulating sleeve is provided on the vertical plate so that the end of the anode can slide in the insulating sleeve; the invention also comprises an introduction electrode, one end of the introduction electrode passes through the insulating sleeve and is rigidly connected to the anode, and the introduction electrode is also connected to an adjustment component, through which the introduction electrode and the anode are pushed close to or away from the evaporation boat, so as to clamp or release the evaporation boat.

Description

Technical Field

[0001] The invention relates to the technical field of coating equipment, and in particular to a clamping device for an evaporation boat. Background Art

[0002] In the evaporation process of vacuum winding coating equipment, the evaporation source is the main component. The heating element used is generally a boron nitride ceramic crucible, which is used to melt the material to be plated under vacuum and vaporize it and then deposit it on the film to form a metal film. The evaporation boat is an important component of it, and its heating function is an important guarantee for determining the evaporation quality.

[0003] The existing application patent 202020292463.0 is a new type of evaporation boat clamping structure, including a water-cooled evaporation base plate, a support column arranged under the water-cooled evaporation base plate, and an evaporation tank arranged on the water-cooled evaporation base plate. Two rows of positive and negative electrode clamping assemblies with the same structure for clamping the evaporation boat are symmetrically staggered in the evaporation tank. The two groups of positive and negative electrode clamping assemblies both include an evaporation cathode and an evaporation anode. Two groups of elastic adjustment assemblies that can adjust the corresponding evaporation anode positions are arranged on the water-cooled evaporation base plate. Each elastic adjustment assembly includes a composite mounting frame for installing the evaporation anode and an elastic clamping mechanism installed under the water-cooled evaporation base plate for tightening the composite mounting frame. By placing the evaporation boat between the common cathode and the anode, the spring tightly clamps the evaporation boat through the transmission of the insulating sliding bearing seat and the clamping plate. The anode pressure cover is firmly connected to the clamping plate, and the clamping force of the spring is adjusted by the pull rod and the butterfly nut.

[0004] The above-mentioned patent application requires the addition of an additional clamping mechanism to clamp the evaporation boat. The structure is relatively complex, and it is found in actual use that the clamping force of the above-mentioned structure on the evaporation boat is relatively poor, resulting in poor conductive effect. The main reason is that the evaporation boat is not clamped in time. Summary of the invention

[0005] The object of the present invention is to provide an evaporation boat clamping device, so as to achieve the technical effect of providing a simpler and more cleverly designed clamping device, and being able to adjust the clamping force more timely, thereby ensuring the tightness of the contact.

[0006] The present invention is achieved through the following technical solutions:

[0007] It comprises an anode and a common electrode, an evaporation boat is sandwiched between the anode and the common electrode, a vertical plate is provided at one end of the anode away from the evaporation boat, and an insulating sleeve is provided on the vertical plate so that the end of the anode can slide in the insulating sleeve;

[0008] It also includes an introduction electrode, one end of which passes through the insulating sleeve and is rigidly connected to the anode. The introduction electrode is also connected to an adjustment component, through which the introduction electrode and the anode are pushed close to or away from the evaporation boat to clamp or loosen the evaporation boat.

[0009] In order to better implement the present invention, further, the adjustment component includes a pre-tensioning spring, which is sleeved on a portion of the outer wall of the introduction electrode, one end of the pre-tensioning spring is connected to an insulating connecting ring, and the other end of the pre-tensioning spring is connected to the outer wall of the introduction electrode.

[0010] In order to better realize the present invention, further, the adjustment component also includes a clamping electrode, which is arranged at the other end of the introduction electrode and is rigidly clamped to the introduction electrode. A cylinder is also provided on the clamping electrode, and the cylinder is used to push the introduction electrode to clamp the evaporation boat.

[0011] In order to better implement the present invention, further, the adjustment component also includes a mounting plate, a fixing sleeve is provided on the mounting plate, the introduction electrode passes through the fixing sleeve and is rigidly connected to the anode, and the preload spring is arranged between the fixing sleeve and the introduction electrode.

[0012] In order to better implement the present invention, further, a telescopic bellows is connected to the end of the fixing sleeve, and the free end of the telescopic bellows is connected to the introduction electrode.

[0013] In order to better implement the present invention, further, a shielding cover is provided between the mounting plate and the vertical plate.

[0014] In order to better implement the present invention, further, the insulating connecting ring is arranged on the mounting plate, the insulating connecting ring is arranged between the fixing sleeve and the preload spring, and the end of the insulating connecting ring is fixedly connected to the end of the fixing sleeve.

[0015] In order to better implement the present invention, further, the outer wall of the anode is also provided with a shielding plate, and the shielding plate is arranged close to the vertical plate to prevent the evaporation material from being deposited on the insulating sleeve during evaporation to cause a short circuit.

[0016] In order to better implement the present invention, further, the insulating sleeve is made of insulating material, and the end of the anode is arranged in the insulating sleeve.

[0017] In order to better implement the present invention, further, it also includes a straight plate, and one end of the common electrode away from the evaporation boat is fixedly arranged on the straight plate;

[0018] An evaporation cover is also provided between the straight plate and the vertical plate.

[0019] The beneficial effects of the present invention are:

[0020] When the clamping force of the evaporation boat needs to be adjusted, the self-elastic force of the pre-tightening spring is preferentially used to move the evaporation boat toward the anode, so that the evaporation boat is pre-clamped. When the evaporation boat is installed, only a small force is needed to place it in the correct position, which makes the operation easier and more efficient. When all the evaporation boats are installed in place, the cylinder is started to drive the clamping electrode and the introduction electrode to be pushed toward the anode, thereby ensuring the effective clamping of the evaporation boat.

[0021] The present invention provides a telescopic bellows in the mechanism, the purpose of which is that the telescopic bellows has good telescopicity, the introduction electrode is introduced into the vacuum chamber through the vacuum chamber wall, and a good vacuum seal is required, but the introduction electrode needs to be telescopic to facilitate the installation of the evaporation boat. If a sealing ring is provided between the introduction electrode and the mounting plate, a dynamic seal will be formed, causing the sealing ring to wear and fail quickly. The provision of the telescopic bellows can effectively convert the dynamic seal into a static seal, and can effectively ensure the reliability of the vacuum seal.

[0022] The device has an ingenious structural design and can clamp the evaporation boat timely, effectively, orderly and forcefully, thus ensuring good contact and improving service life and work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solution of the present invention, the accompanying drawings required for use in the present invention will be briefly introduced below. It should be understood that the following accompanying drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these accompanying drawings without paying creative work.

[0024] Figure 1 A schematic diagram of the structure of the evaporation boat clamping device provided by the present invention;

[0025] icon:

[0026] 10-anode, 11-shielding plate, 20-common electrode, 21-straight plate, 22-evaporation enclosure, 30-evaporation boat, 40-vertical plate, 41-insulating sliding sleeve, 50-introduction electrode, 60-preload spring, 70-clamping electrode, 71-cylinder, 80-mounting plate, 81-fixing sleeve, 82-telescopic bellows, 83-insulating connecting ring, 90-shielding cover, 91-vacuum chamber. DETAILED DESCRIPTION

[0027] The technical solution of the present invention will be described below in conjunction with the accompanying drawings of the present invention.

[0028] It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. At the same time, in the description of the present invention, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0029] Please see Figure 1 The present invention provides an evaporation boat clamping device, which mainly includes an evaporation boat 30, a common electrode 20 arranged at one end of the evaporation boat 30 and an anode 10 arranged at the other end of the evaporation boat 30. In order to ensure the stability of the structure, a straight plate 21 and a vertical plate 40 are also provided, wherein the free end of the common electrode 20 is fixedly connected to the straight plate 21, and the free end of the anode 10 is slidably connected to the vertical plate 40. Specifically, an insulating sleeve 41 is provided on the vertical plate 40, and the free end of the anode 10 is slidably placed in the insulating sleeve 41. As shown in the figure, the insulating sleeve The sleeve 41 is made of insulating material, and the free end of the anode 10 can move in the insulating sleeve 41, so that it can clamp or loosen the evaporation boat 30. Taking the direction in the figure as an example, when the anode 10 moves to the left, the evaporation boat 30 is clamped to ensure good contact. When the anode 10 moves to the right, the evaporation boat 30 is loosened. At this time, the evaporation boat 30 can be replaced. In order to prevent the evaporation material from being deposited on the insulating sleeve 41 during evaporation and causing a short circuit, a shielding plate 11 is also provided on the outer wall of the anode 10 to ensure the continuity of the evaporation process.

[0030] During the use of the evaporation boat 30 , in order to provide a better working environment and avoid the influence of the external environment, an evaporation cover 22 is further arranged between the straight plate 21 and the vertical plate 40 .

[0031] The force for the left and right movement of the anode 10 in the insulating sleeve 41 mainly comes from the adjustment component and the introduction electrode 50. One end of the introduction electrode 50 is inserted into the anode 10. As shown in the figure, the anode 10 is provided with an inwardly concave groove toward one end of the introduction electrode 50, so that the contact between the introduction electrode 50 and the anode 10 is better. Under the action of the introduction electrode 50, the anode 10 is subjected to relevant pressure-boosting and other operations, so that the evaporation boat 30 can be heated and act on the coating material. The use of the evaporation boat 30 is a prior art and will not be elaborated on in detail here.

[0032] The adjusting assembly is used to push the electrode 50 , and then push the anode 10 to move left and right in the insulating sleeve 41 , so as to achieve a clamping or loosening state of the evaporation boat 30 .

[0033] The adjustment component includes a pre-tightening spring 60. As shown in the figure, the pre-tightening spring 60 is sleeved on the outer wall of the introduction electrode 50. One end of the pre-tightening spring 60 is connected to the insulating connecting ring 83, and the other end of the pre-tightening spring 60 is connected to the outer wall of the introduction electrode 50. When the evaporation boat 30 is placed between the anode 10 and the common electrode 20, the anode 10 will move to the right, so that the pre-tightening spring 60 is compressed. When the evaporation boat 30 is in use, the clamping force of the anode 10 is gradually released to the evaporation boat 30 under the action of the pre-tightening spring 60, so that it can further strengthen the clamping of the evaporation boat 30, thereby ensuring the stability of the contact.

[0034] In order to better clamp the evaporation boat 30, a clamping electrode 70 is further provided at the other end of the introduction electrode 50, and a cylinder 71 is provided on the clamping electrode 70. The cylinder 71 is used to push the introduction electrode 50 to clamp the evaporation boat 30. During use, the clamping electrode 70 is pushed to the left by the power of the cylinder 71, thereby driving the introduction electrode 50 to move to the left, and the anode 10 to move to the left, thereby clamping the evaporation boat 30.

[0035] During use, in order to ensure the stability of the device and reduce errors, a mounting plate 80 is provided, on which a fixing sleeve 81 is provided. The introduction electrode 50 passes through the fixing sleeve 81 and the anode 10, and the preload spring 60 is provided between the fixing sleeve 81 and the introduction electrode 50.

[0036] In order to increase the service life of the clamping mechanism and reduce the failure rate, a telescopic bellows is provided in the mechanism. The purpose is: the telescopic bellows has good elasticity. The introduced electrode is introduced into the vacuum chamber through the vacuum chamber wall, which requires a good vacuum seal, but the introduced electrode needs to be telescopic to facilitate the installation of the evaporation boat. If a sealing ring is provided between the introduced electrode and the mounting plate, a dynamic seal will be formed, causing the sealing ring to wear and fail quickly. The provision of a telescopic bellows can effectively convert the dynamic seal into a static seal, which can effectively ensure the reliability of the vacuum seal.

[0037] Under the coordinated action of the telescopic bellows 82 , the preload spring 60 and the cylinder 71 , the evaporation boat 30 can be better adapted to be clamped, so that the evaporation boat 30 can be clamped forcefully, with tension and in an orderly manner.

[0038] In order to make the use of the device more perfect, a barrier cover is also provided between the mounting plate 80 and the vertical plate 40, which can effectively reduce the pollution to the device during the evaporation process and make cleaning and maintenance more convenient and efficient.

[0039] As shown in the figure, in order to ensure the stability of the structure, an insulating connecting ring 83 is also provided on the mounting plate 80. The insulating connecting ring 83 is provided between the fixing sleeve 81 and the preload spring 60. The end of the insulating connecting ring 83 is movably connected to the end of the fixing sleeve 81.

[0040] The workflow of the present invention is as follows:

[0041] When the evaporation boat 30 needs to be replaced, the self-elastic force of the pre-tightening spring 60 is first used to push it toward the anode 10 to pre-clamp the evaporation boat 30 to ensure the accurate position of the evaporation boat 30. The spring force does not need to be very large to make the operation easier, faster, more efficient and safer. When all the evaporation boats are replaced, the cylinder 71 is started to drive the clamping electrode 70 and the introduction electrode 50 to be pushed toward the anode 10, thereby ensuring the effective clamping of the evaporation boat 30. In order to ensure that the cylinder 71 does not damage the evaporation boat 30 during the pushing process, the size of the clamping force can be achieved by adjusting the size of the compressed air pressure in the cylinder.

[0042] The device has an ingenious structural design and can timely, effectively, orderly and powerfully clamp the evaporation boat 30, thereby ensuring good contact and improving service life and work efficiency.

[0043] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A clamping device for an evaporation boat, characterized in that: The invention comprises an anode (10) and a common electrode (20), an evaporation boat (30) being sandwiched between the anode (10) and the common electrode (20), a vertical plate (40) being provided at one end of the anode (10) away from the evaporation boat (30), and an insulating sliding sleeve (41) being provided on the vertical plate (40) so that the end of the anode (10) can slide in the insulating sliding sleeve (41); It also includes an introduction electrode (50), one end of which passes through the insulating sleeve (41) and is rigidly connected to the anode (10), and the introduction electrode (50) is also connected to an adjustment component, through which the introduction electrode (50) and the anode (10) are pushed close to or away from the evaporation boat (30) to clamp or release the evaporation boat (30); The adjustment component comprises a preload spring (60), the preload spring (60) is sleeved on a portion of the outer wall of the introduction electrode (50), one end of the preload spring (60) is connected to an insulating connection ring (83), and the other end of the preload spring (60) is connected to the outer wall of the introduction electrode (50); The adjustment component further comprises a clamping electrode (70), wherein the clamping electrode (70) is arranged at the other end of the introduction electrode (50) and is rigidly clamped to the introduction electrode (50), and a cylinder (71) is also arranged on the clamping electrode (70), and the cylinder (71) is used to push the introduction electrode (50) to clamp the evaporation boat (30); The adjustment assembly further comprises a mounting plate (80), a fixing sleeve (81) being provided on the mounting plate (80), the introduction electrode (50) passing through the fixing sleeve (81) and being rigidly connected to the anode (10), and the preload spring (60) being arranged between the fixing sleeve (81) and the introduction electrode (50); A telescopic bellows (82) is also connected to the end of the fixed sleeve (81), and a free end of the telescopic bellows (82) is connected to the introduction electrode (50); The outer wall of the anode (10) is also provided with a shielding plate (11), and the shielding plate (11) is arranged close to the vertical plate (40) to prevent the evaporation material from being deposited on the insulating sleeve (41) during evaporation and causing a short circuit; The insulating sleeve (41) is made of insulating material, and the end of the anode (10) is arranged in the insulating sleeve (41).

2. The clamping device for an evaporation boat according to claim 1, characterized in that: A shielding cover (90) is also provided between the mounting plate (80) and the vertical plate (40).

3. The clamping device for an evaporation boat according to claim 1, characterized in that: The insulating connection ring (83) is arranged on the mounting plate (80), the insulating connection ring (83) is arranged between the fixing sleeve (81) and the preload spring (60), and the end of the insulating connection ring (83) is fixedly connected to the end of the fixing sleeve (81).

4. The clamping device for an evaporation boat according to claim 1, characterized in that: It also includes a straight plate (21), and one end of the common electrode (20) away from the evaporation boat (30) is fixedly arranged on the straight plate (21); An evaporation enclosure (22) is also provided between the straight plate (21) and the vertical plate (40).

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