A micro-vibration control system and method

Abstract

The present invention discloses a micro-vibration control system, which includes: a sealed cabin penetration vibration isolation module, a passive air-bearing vibration isolation module, and an active vibration isolation module. The sealed cabin penetration vibration isolation module includes: a test platform, support columns, flange interfaces, vacuum corrugated seal tubes, and support piers. The passive air-bearing vibration isolation module includes: acceleration sensors, a rigid platform, displacement sensors, springs, supports, gas storage tanks, gas circuits, control cabinets, and passive vibration isolation control systems. The active vibration isolation module mainly includes acceleration sensors, actuators, data collectors, controllers, and active vibration isolation control systems. Embodiments of the present invention can improve the vibration isolation efficiency and achieve high-efficiency vibration isolation in high and low temperature environments.

Description

Technical Field

[0001] The present invention relates to the field of aviation technology, and in particular to a micro-vibration control system and method. Background Art

[0002] With the rapid development of high-precision and high-reliability spacecraft, high-stability structures represented by deployable boom poles, joints, fixed surface antennas, camera integrated structures, payload reference structures, etc. are widely used in the development of high-end spacecraft products, and higher-precision requirements for micro-deformation measurement in ground-simulated vacuum high and low temperature environments are put forward to meet the high-precision requirements of spacecraft structures for long-term on-orbit operation.

[0003] In the process of micro-deformation measurement, environmental control is crucial. Especially for high-stability structures, their deformation amounts in high and low temperature environments are very small, and slight environmental interference will cause large deviations in test results, affecting the assessment of the stability index of the structure. As one of the main influencing factors, how to accurately control environmental micro-vibrations is a bottleneck problem that urgently needs to be broken through in the process of micro-deformation measurement of high-stability structures in vacuum high and low temperature environments. Therefore, effectively realizing efficient micro-vibration control in vacuum high and low temperature environments is of great significance.

[0004] Micro-vibrations in the process of high-precision micro-deformation measurement are mainly divided into two categories: one is the vibration generated by natural vibration sources, also known as ground pulsation, with a vibration frequency of about 2 - 3 Hz; the other is the vibration caused by the artificial environment, such as personnel walking, pipeline or motor vibration, building self-swinging, etc., with a vibration frequency of about 1 - 100 Hz. At present, the traditional vibration isolation method for high-load test platforms in vacuum high and low temperature environments mainly uses integral air spring vibration isolation. It arranges a high-rigidity air-floating vibration isolation platform under the vacuum chamber, which can effectively reduce high-frequency vibrations above 20 Hz, but the vibration isolation efficiency of the integral vibration isolation method is low, and it cannot isolate the low-frequency vibrations of the test platform in the chamber. Especially, the natural frequency of the air spring is usually about 1 Hz, which is close to the interference vibration frequency of ground pulsation, and it cannot effectively suppress the interference of low-frequency ground pulsation. Therefore, it is difficult to meet the environmental micro-vibration control requirements for high-precision micro-deformation measurement in vacuum high and low temperature environments. Summary of the Invention

[0005] The technical problem solved by the present invention is: overcoming the deficiencies of the prior art, and providing a micro-vibration control system and method.

[0006] The technical solution of the present invention is:

[0007] In a first aspect, an embodiment of the present invention provides a micro-vibration control system, and the system includes:

[0008] A sealed through-hull vibration isolation module, a passive air-bearing vibration isolation module, and an active vibration isolation module. The sealed through-hull vibration isolation module includes: a test platform, support columns, flange interfaces, a vacuum corrugated seal tube, and support piers. The passive air-bearing vibration isolation module includes: acceleration sensors, a rigid platform, displacement sensors, springs, supports, an air storage tank, an air circuit, a control cabinet, and a passive vibration isolation control system. The active vibration isolation module mainly includes acceleration sensors, actuators, data collectors, controllers, and an active vibration isolation control system. Among them,

[0009] One end of two of the supports is fixed to the vacuum chamber base, and the other end supports the rigid platform through two of the springs. Displacement sensors are fixedly connected to both ends of the rigid platform, and acceleration sensors are arranged on one side of the rigid platform away from the supports; the air circuit is arranged at the bottom of the vacuum chamber, and the air storage tank is connected to the air circuit;

[0010] Each of the two supports extends a support platform, and the support platform is connected to the rigid platform through the actuator;

[0011] One side of the opening of the vacuum chamber is hermetically connected to the vacuum tank. The test platform is fixed inside the vacuum tank and is connected to the rigid platform through the flange interface, the vacuum corrugated seal tube, and the support pier in sequence. Acceleration sensors are arranged on the upper side of the test platform, and a micro-deformation measurement system is supported and arranged. A high-temperature stable structure to be measured is placed between the test platform and the micro-deformation measurement system;

[0012] The passive vibration isolation control system is electrically connected to the system through the control cabinet and the air circuit. The controller and the active vibration isolation control system are electrically connected to the data collector, and the data collector is electrically connected to the actuator.

[0013] In a second aspect, an embodiment of the present invention provides a micro-vibration control method, which is applied to the above micro-vibration control system. The method includes:

[0014] Controlling the micro-vibration control system to enter the working state;

[0015] Arranging the sample to be measured and the micro-deformation measurement system on the test platform inside the vacuum tank;

[0016] Calibrating the height and horizontal pose of the rigid platform in the micro-vibration control system;

[0017] Testing the test sample. During the test, after each passive vibration isolation position adjustment, real-time active vibration isolation is achieved during the micro-deformation detection of the test sample using the test system.

[0018] Optionally, controlling the micro-vibration control system to enter the working state includes:

[0019] Power on the micro-vibration control system, and after each component in the micro-vibration control system works normally, preheat the micro-vibration control system for a set duration;

[0020] Arrange laser displacement sensors at the four corners of the rigid platform of the micro-vibration control system;

[0021] Calibrate the zero position of the rigid platform.

[0022] Optionally, before calibrating the zero position of the rigid platform, it further includes:

[0023] Based on the laser displacement sensors, obtain the zero position.

[0024] Optionally, the obtaining the zero position based on the laser displacement sensors includes:

[0025] Read the current platform attitude according to the measured values of the laser displacement sensors at the four corners, and perform pose regulation on the difference between the measured values at the four corners and the preset height;

[0026] By adjusting the air intake in the air circuits corresponding to the springs, quickly control the spring expansion and contraction amount to the first preset interval with the first air intake;

[0027] Adjust the measured values at the four corners, and control the spring expansion and contraction with the second air intake so that the measured values at the four corners are all within the second set interval range; the second air intake is less than the first air intake;

[0028] Record the height of the rigid platform at this time as the zero position.

[0029] Optionally, after each passive vibration isolation position adjustment, during the process of using the test system to carry out micro-deformation detection on the test sample, realizing real-time active vibration isolation includes:

[0030] Install a vertical actuator and a horizontal actuator on the test platform, and install acceleration sensors at the corresponding positions;

[0031] Before using the test system to collect the image of the test sample, through the active vibration isolation control system, collect the full-process time-vibration motion curve of the test platform in the test chamber caused by the ground and the springs from the high-precision three-axis acceleration sensors arranged on the test platform, and use this curve as the control reference curve to implement active vibration isolation control;

[0032] Collect the motion state at least three times. For the motion curve response values collected in the corresponding acquisition time domain, extract three points of the control reference curve at equal time intervals, solve the corresponding variance, and use the curve part corresponding to the minimum variance as the current motion state for the final discrimination;

[0033] When using the test system to collect the image of the test sample, use the time interval from the start of the solution to the start of the acquisition as the input to calculate the motion state of the test platform during the image acquisition process;

[0034] Use the time interval between each image acquisition and the motion state curve to calculate the motion direction and speed of the test platform in the horizontal and vertical directions, and adjust the output of the horizontal and vertical actuators to apply the active control force for compensation to eliminate vibration.

[0035] The advantages of the present invention compared with the prior art are as follows: The present invention proposes a vibration frequency segmented control method for vibration isolation. By using a passive vibration isolation system to correct the platform pose and height in real time, vibrations above 20 Hz can be effectively eliminated. By using an active vibration isolation system to perform dynamic compensation in real time according to the platform motion state, vibrations around 1 Hz can be effectively eliminated. It has the advantages of real-time monitoring and active control, and can achieve precise suppression of vibrations in the full frequency range in a micro-vibration environment. Moreover, by adopting a method of spring air circuit partition control, each spring is equipped with a separate controller circuit, realizing rapid and stable adjustment of the height and horizontal pose of the high-rigidity platform. At the same time, the embodiment of the present invention adopts a decoupled design of the vibration isolation system. While the passive vibration isolation system and the active vibration isolation system are combined to achieve micro-vibration control in the full frequency domain, the two systems work independently for their respective control targets, improving the vibration isolation efficiency and achieving high-efficiency vibration isolation in high and low temperature environments. Description of the Drawings

[0036] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, other embodiments can be obtained based on these drawings without creative efforts.

[0037] Figure 1 It is a schematic structural diagram of a micro-vibration control system provided by an embodiment of the present invention;

[0038] Figure 2 It is a flowchart of the steps of a micro-vibration control method provided by an embodiment of the present invention;

[0039] Reference Signs:

[0040] 1 - Vacuum tank; 2 - Micro - deformation measurement device; 3 - High - stability structure to be measured; 4 - Acceleration sensor; 5 - Test platform; 6 - Support column; 7 - Flange interface; 8 - Vacuum corrugated seal tube; 9 - Support pier; 10 - Acceleration sensor; 11 - Rigid platform; 12 - Displacement sensor; 13 - Actuator; 14 - Spring; 15 - Support member; 16 - Gas storage tank; 17 - Gas path; 18 - Control cabinet; 19 - Passive vibration isolation control system; 20 - Data collector; 21 - Controller; 22 - Active vibration isolation control system. Specific implementation mode

[0041] Embodiment 1

[0042] Refer to Figure 1 , which shows a structural schematic diagram of a micro - vibration control system provided by an embodiment of the present invention. As Figure 1 shown, the system may include: a sealed through - cabin vibration isolation module, a passive air - floating vibration isolation module, and an active vibration isolation module. Among them,

[0043] The sealed through - cabin vibration isolation module mainly includes a test platform 5, a support column 6, a flange interface 7, a vacuum corrugated seal tube 8, and a support pier 9. Through through - cabin support, the vibration isolation efficiency is improved and the influence of high - frequency vibration of the pump group is filtered.

[0044] The passive air - floating vibration isolation module mainly includes an acceleration sensor 10, a high - rigidity platform 11, a displacement sensor 12, a spring 14, a support member 15, a gas storage tank 16, a gas path 17, a control cabinet 18, and a passive vibration isolation control system 19. Through air - floating passive vibration isolation, a stable high - rigidity platform support is provided.

[0045] The active vibration isolation module may include an acceleration sensor 10, an actuator 13, a data collector 20, a controller 21, and an active vibration isolation control system 22. Through active compensation vibration isolation by the actuator, low - frequency vibration interference is effectively suppressed, and precise control of the micro - vibration environment is achieved.

[0046] In the embodiment of the present invention, one end of the two support members may be fixed on the vacuum chamber base, and the other end may support the rigid platform through the two springs. The displacement sensors are fixedly connected to both ends of the rigid platform, and the acceleration sensor is arranged on one side of the rigid platform away from the support member; the gas path is arranged at the bottom of the vacuum chamber, and the gas storage tank is connected to the gas path.

[0047] In the embodiment of the present invention, the method of spring - gas path partition control is adopted, and each spring is configured with a separate controller loop, realizing rapid and stable adjustment of the height and horizontal pose of the high - rigidity platform

[0048] Each of the two support members extends a support platform, and the support platform is connected to the rigid platform through the actuator.

[0049] One side of the opening of the vacuum chamber is hermetically connected to the vacuum tank. The test platform is fixed inside the vacuum tank and is successively connected to the rigid platform through the flange interface, the vacuum corrugated seal pipe and the support pier. An acceleration sensor is arranged on the upper side of the test platform, and a micro-deformation measurement system is supported and arranged. A high-temperature stable structure to be tested is placed between the test platform and the micro-deformation measurement system.

[0050] The passive vibration isolation control system can be electrically connected to the system through the control cabinet and the gas circuit. The controller and the active vibration isolation control system are electrically connected to the data collector, and the data collector is electrically connected to the actuator.

[0051] In the embodiment of the present invention, the passive vibration isolation system can correct the platform pose and height in real time to effectively eliminate vibrations above 20 Hz. The active vibration isolation system can perform dynamic compensation in real time according to the platform motion state to effectively eliminate vibrations around 1 Hz. It has the advantages of real-time monitoring and active control, and can achieve precise suppression of vibrations in the full frequency range in a micro-vibration environment. At the same time, when the passive vibration isolation system and the active vibration isolation system are combined to achieve micro-vibration control in the full frequency domain, the two systems work independently for their respective control targets, improving the vibration isolation efficiency.

[0052] Embodiment Two

[0053] Refer to Figure 2 , which shows a step flowchart of a micro-vibration control method provided by an embodiment of the present invention. As Figure 2 shown, the method may include the following steps:

[0054] Step 201: Control the micro-vibration control system to enter the working state.

[0055] The embodiment of the present invention can be applied to the micro-vibration control system provided in the above Embodiment One.

[0056] In specific implementation, during testing, the micro-vibration control system can be controlled to enter the working state.

[0057] Specifically, this step 201 may include the following steps:

[0058] Sub-step A1: Power on the micro-vibration control system, and after each component in the micro-vibration control system works normally, preheat the micro-vibration control system for a set duration.

[0059] In this embodiment, the micro-vibration control system can be powered on first, and after each component in the micro-vibration control system works normally, preheat the micro-vibration control system for a set duration, such as preheating the system for at least one hour before conducting the test, etc.

[0060] After preheating the micro-vibration control system for a set duration, perform sub-step A2.

[0061] Sub-step A2: Arrange laser displacement sensors at the four corners of the rigid platform of the micro-vibration control system.

[0062] Sub-step A3: Calibrate the zero position of the rigid platform.

[0063] After preheating the micro-vibration control system for a set duration, laser displacement sensors can be arranged at the four corners of the rigid platform of the micro-vibration control system. Then, the zero position of the rigid platform can be calibrated.

[0064] In practical applications, high-precision laser displacement sensors are arranged at the four corners of the high-rigidity platform to detect the distance D from the rigid platform to the ground i (i = 1, 2, 3, 4).

[0065] The process of zero-point calibration in combination with the displacement sensor is as follows. First, the zero position can be obtained based on the laser displacement sensor. The specific implementation process can include: 1. Read the current platform attitude according to the measured values of the laser displacement sensors at the four corners, and perform pose adjustment on the difference between the measured values at the four corners and the preset height; 2. Control the spring expansion and contraction amount quickly to the first preset interval by adjusting the intake air volume in the air circuits corresponding to the springs with the first intake air volume; 3. Adjust the measured values at the four corners, and control the spring expansion and contraction by the second intake air volume so that the measured values at the four corners are all within the second set interval range; the second intake air volume is less than the first intake air volume; 4. Record the height of the rigid platform at this time as the zero position.

[0066] In practical applications, the current platform attitude can be read according to the measured values of the displacement sensors at the four corners, and pose adjustment is performed on the difference between the measured values at the four corners and the preset height H; by adjusting the intake air volume in the air circuits corresponding to the springs, the spring expansion and contraction amount is quickly controlled to the first intake air volume so that the measured values at the four corners reach [0.9H, 1.1H]. On this basis, the measured values at the four corners are finely adjusted, and the spring expansion and contraction are controlled by the small air flow rate so that the measured values D i (i = 1, 2, 3, 4) are all within the interval range of [0.998H, 1.002H]. Record the platform height at this time as the platform zero position.

[0067] Step 202: Arrange the sample to be measured and the micro-deformation measurement system on the test platform in the vacuum chamber.

[0068] After completing the above preparatory work, the sample to be tested and the micro-deformation measurement system can be arranged on the test platform inside the vacuum chamber. Specifically, for the installation of the sample to be tested with a high-stability structure and the measurement equipment, it can be: installing the sample to be tested with a high-stability structure and the high-precision micro-deformation measurement equipment on the test platform inside the vacuum chamber according to the requirements.

[0069] In this embodiment, the sample to be tested with a high-stability structure is a carbon fiber structure board with a size of 500mm×500mm, which has the characteristic of high thermal stability. The micro-deformation measurement equipment selects the Q400 measurement system with a protection device and fixes it on the test platform inside the vacuum chamber.

[0070] After arranging the sample to be tested and the micro-deformation measurement system on the test platform inside the vacuum chamber, step 203 is executed.

[0071] Step 203: Calibrate the height and horizontal pose of the rigid platform in the micro-vibration control system.

[0072] After arranging the sample to be tested and the micro-deformation measurement system on the test platform inside the vacuum chamber, the height and horizontal pose of the rigid platform can be calibrated in real time. Specifically, the real-time measured values D i (i = 1, 2, 3, 4) of the four-corner displacement sensors during the test detection process can be monitored, and the spring expansion amount can be adjusted by the difference from the zero height D until the difference between the measurement value of the four-corner displacement sensor and the zero height D is within the preset threshold range, and the threshold is set manually by the operator in the passive control system according to the specific test detection requirements.

[0073] After calibrating the height and horizontal pose of the rigid platform in the micro-vibration control system, step 204 is executed.

[0074] Step 204: Test the test sample. During the test, during each adjustment of the passive vibration isolation position, real-time active vibration isolation is achieved during the micro-deformation detection of the test sample using the test system.

[0075] After calibrating the height and horizontal pose of the rigid platform in the micro-vibration control system, the test sample can be tested. During the test, during each adjustment of the passive vibration isolation position, real-time active vibration isolation is achieved during the micro-deformation detection of the test sample using the test system. The specific implementation process can be:

[0076] 1. Install actuators in the vertical direction and actuators in the horizontal direction on the test platform, and install acceleration sensors at the corresponding positions;

[0077] 2. Before using the test system to collect images of the test specimen, the active vibration isolation control system collects the full-process time-vibration motion curve of the test platform caused by the ground and springs in the test chamber through a high-precision triaxial acceleration sensor arranged on the test platform, and uses this curve as the control reference curve to implement active vibration isolation control;

[0078] 3. Conduct at least three acquisitions of the motion state, corresponding to the response values of the motion curves collected in the time domain. Extract three points of the control reference curve at equal time intervals, solve the variance correspondingly, and use the local part of the curve corresponding to the minimum variance as the currently discriminated motion state;

[0079] 4. When using the test system to collect images of the test specimen, use the time interval from the start of the calculation to the start of the acquisition as the input to calculate the motion state of the test platform during the image acquisition process;

[0080] 5. Calculate the motion directions and speeds of the test platform in the horizontal and vertical directions based on the time intervals between each image acquisition and the motion state curve, and adjust the output of the horizontal and vertical actuators to apply the corresponding active control force for compensation to eliminate vibration.

[0081] In practical applications, the test system can be a Q400 test system. During the process of using the Q400 test system to conduct micro-deformation detection on the test piece, real-time active vibration isolation is achieved, specifically as follows:

[0082] 1) First, install a vertical Lorentz force actuator and a horizontal Lorentz force actuator on the test platform, and install high-precision acceleration sensors at the corresponding positions.

[0083] 2) Before using the Q400 to collect images of the test piece, the active vibration isolation system collects the full-process time-vibration motion curve of the test platform caused by the ground and springs in the test chamber through a high-precision triaxial acceleration sensor arranged on the test platform, and uses this curve as the control reference curve to implement active vibration isolation control.

[0084] 3) Before using the Q400 to collect images of the test piece, conduct at least three acquisitions of the motion state, corresponding to the response values of the motion curves collected in the time domain. Extract three points of the control reference curve at equal time intervals, solve the variance correspondingly, and use the local part of the curve corresponding to the minimum variance as the currently discriminated motion state.

[0085] 4) When using the Q400 to collect images of the test piece, use the time interval from the start of the calculation to the start of the acquisition as the input to calculate the motion state of the test platform during the image acquisition process.

[0086] 5) Calculate the horizontal and vertical movement directions and speeds of the test platform based on the time interval between each image acquisition and the motion state curve, and adjust the active control forces output by the horizontal and vertical actuators correspondingly for compensation, so as to achieve vibration elimination.

[0087] The specific embodiments described in the present invention can enable those skilled in the art to understand the present invention more comprehensively, but do not limit the present invention in any way. Therefore, those skilled in the art should understand that they can still make modifications or equivalent replacements to the present invention; and all technical solutions and their improvements that do not depart from the spirit and technical essence of the present invention should be covered by the protection scope of the present invention patent.

[0088] The content not described in detail in the specification of the present invention belongs to the well-known technology of those skilled in the art.

Claims

1. A micro-vibration control system, characterized in that, The system includes: a sealed through-hull vibration isolation module, a passive air-bearing vibration isolation module, and an active vibration isolation module. The sealed through-hull vibration isolation module includes: a test platform, support columns, flange interfaces, vacuum corrugated seal pipes, and support piers. The passive air-bearing vibration isolation module includes: acceleration sensors, a rigid platform, displacement sensors, springs, supports, gas storage tanks, gas circuits, control cabinets, and a passive vibration isolation control system. The active vibration isolation module mainly includes acceleration sensors, actuators, data collectors, controllers, and an active vibration isolation control system. Among them, One end of two of the supports is fixed to the vacuum chamber base, and the other end supports the rigid platform through two of the springs. The displacement sensors are fixedly connected to both ends of the rigid platform, and the acceleration sensors are arranged on one side of the rigid platform away from the supports; the gas circuit is arranged at the bottom of the vacuum chamber, and the gas storage tank is connected to the gas circuit; Each of the two supports extends a support platform, and the support platform is connected to the rigid platform through the actuator; The open side of the vacuum chamber is hermetically connected to the vacuum tank. The test platform is fixed inside the vacuum tank and is connected to the rigid platform through the flange interface, the vacuum corrugated seal pipe, and the support pier in sequence. Acceleration sensors are arranged on the upper side of the test platform, and a micro-deformation measurement system is supported and arranged. A high-temperature stable structure to be tested is placed between the test platform and the micro-deformation measurement system; The passive vibration isolation control system is electrically connected to the system through the control cabinet and the gas circuit. The controller and the active vibration isolation control system are electrically connected to the data collector, and the data collector is electrically connected to the actuator.

2. A micro-vibration control method, applied to the micro-vibration control system according to claim 1, characterized in that The method includes: Controlling the micro-vibration control system to enter the working state; Arranging the test specimen and the micro-deformation measurement system on the test platform inside the vacuum tank; Calibrating the height and horizontal pose of the rigid platform in the micro-vibration control system; Testing the test specimen. During the test, after each adjustment of the passive vibration isolation position, real-time active vibration isolation is achieved during the micro-deformation detection of the test specimen using the test system.

3. The method according to claim 2, wherein The controlling the micro-vibration control system to enter the working state includes: Powering on the micro-vibration control system, and after each component in the micro-vibration control system works normally, preheating the micro-vibration control system for a set duration; Arranging laser displacement sensors at the four corners of the rigid platform of the micro-vibration control system; Calibrating the zero position of the rigid platform.

4. The method according to claim 3, wherein Before the calibrating the zero position of the rigid platform, it further includes: Based on the laser displacement sensors, obtaining the zero position.

5. The method according to claim 4, characterized in that, The based on the laser displacement sensors, obtaining the zero position includes: Reading the current platform pose according to the measured values of the laser displacement sensors at the four corners, and performing pose regulation on the difference between the measured values at the four corners and the preset height; By adjusting the intake air volume in the gas circuits corresponding to the springs, quickly controlling the spring expansion and contraction amount to the first intake air volume until the measured values at the four corners reach within the first preset interval; Adjust the four-corner measurement values so that the four-corner measurement values are all within the second set range by controlling the spring expansion and contraction with the second intake air volume; the second intake air volume is less than the first intake air volume; Record the height of the rigid platform at this time as the zero position.

6. The method according to claim 3, characterized in that After each passive vibration isolation position adjustment, real-time active vibration isolation is achieved during the micro-deformation detection of the test sample using the test system, including: Install actuators in the vertical direction and actuators in the horizontal direction on the test platform, and install acceleration sensors at corresponding positions; Before using the test system to collect images of the test sample, the active vibration isolation control system collects the full-process time-vibration motion curve of the test platform in the test chamber caused by the ground and springs from the high-precision three-axis acceleration sensors arranged on the test platform, and uses this curve as the control reference curve to implement active vibration isolation control; Collect at least three motion states, corresponding to the motion curve response values collected in the time domain, extract three points of the control reference curve at equal time intervals, solve the variance correspondingly, and use the local part of the curve with the minimum variance as the current motion state for final discrimination; When using the test system to collect images of the test sample, use the time interval from the start of the calculation to the start of the collection as the input to calculate the motion state of the test platform during the image collection process; Calculate the motion direction and speed of the test platform in the horizontal and vertical directions based on the time interval between each image collection and the motion state curve, and adjust the output of the horizontal and vertical actuators to correspond to the active control force for compensation to eliminate vibration.

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