Adsorption parts, molds, adsorption structures and coating devices

Abstract

The present application relates to an adsorption part, a mold, an adsorption structure and a coating device, wherein the adsorption part comprises: an adsorption body having a first surface and a first adsorption channel passing through the first surface; a plurality of abutting portions, the plurality of abutting portions being arranged at intervals on the first surface; an insulating portion, provided on the periphery of the first surface; the insulating portion and all the abutting portions having a side surface facing away from the adsorption body for abutting the part to be coated; when the part to be coated abuts against the insulating portion and all the abutting portions, an adsorption chamber is defined between the part to be coated, the insulating portion and the adsorption body. In the above-mentioned adsorption part, mold, adsorption structure and coating device, the insulating portion is provided so that the adsorption chamber is defined between the part to be coated, the insulating portion and the adsorption body, and the insulating portion can improve the sealing of the adsorption chamber; the plurality of abutting portions are provided so that the part to be coated is fixed on the adsorption part. The adsorption structure has a simple structure, which is conducive to saving assembly time of the adsorption structure and the part to be coated and improving coating efficiency.

Description

Technical Field

[0001] The present application relates to the field of film coating technology, and in particular to an adsorption component, a mold, an adsorption structure and a film coating device. Background Art

[0002] Before coating the surface of an object, it must be secured using vacuum adsorption technology. The vacuum adsorption structure and the object to be coated define a vacuum chamber. This chamber is then evacuated to hold the object to the vacuum adsorption structure. However, the airtightness of the vacuum chamber affects the adhesion of the object to be coated, and thus the coating quality.

[0003] In the related art, in order to improve the sealing of the vacuum chamber, a complex vacuum adsorption structure needs to be provided, which results in a long assembly time of the vacuum adsorption structure and the workpiece to be coated and low coating efficiency. Summary of the Invention

[0004] Based on this, it is necessary to provide an adsorption part, a mold, an adsorption structure and a coating device to simplify the structure of the adsorption part, thereby saving the assembly time of the adsorption structure and the part to be coated and improving the coating efficiency.

[0005] According to one aspect of the present application, there is provided an adsorption member, comprising:

[0006] an adsorption body having a first surface and a first adsorption channel running through the first surface;

[0007] a plurality of abutting portions, the plurality of abutting portions being arranged on the first surface at intervals; and

[0008] An isolation portion is provided on the periphery of the first surface; the isolation portion and all the abutting portions are configured to abut against a part to be coated on a side facing away from the adsorption body;

[0009] Wherein, when the part to be coated abuts against the isolation part and all the abutting parts, an adsorption chamber is defined between the part to be coated, the isolation part and the adsorption body; the orthographic projection of the isolation part on the first surface has an inner contour; the orthographic projection of the first adsorption channel on the first surface and the orthographic projections of the multiple abutting parts on the first surface are all located within the inner contour.

[0010] In one embodiment, a dimension of each of the abutting portions along the first direction is not greater than a dimension of the insulating portion along the first direction;

[0011] The first direction is perpendicular to the first surface.

[0012] In one embodiment, a difference between a dimension of the abutting portion along the first direction and a dimension of the isolating portion along the first direction is 0.1 mm to 3 mm.

[0013] In one embodiment, the adsorption body has a second surface facing away from the first surface along the first direction, and the isolation portion has a third surface facing away from the first surface along the first direction;

[0014] Along the first direction, a distance between the second surface and the third surface is less than 20 mm.

[0015] In one embodiment, the orthographic projection of the insulating portion on the first surface has an outer contour, and a maximum distance between the outer contour and the inner contour is less than 10 mm.

[0016] In one embodiment, the distance between the outer contour and the inner contour is equal.

[0017] In one embodiment, the distance between the outer contour and the inner contour is 2 mm.

[0018] In one embodiment, the insulating portion has a central axis, and a dimension of the inner contour along a reference direction ranges from 20 mm to 60 mm; the reference direction is perpendicular to the central axis.

[0019] In one embodiment, all of the abutting portions and the insulating portions are configured to undergo recoverable deformation in response to an external force.

[0020] In one embodiment, the contact portion and the isolation portion are both made of rubber; or

[0021] The materials of the abutting portion and the isolating portion are both silicone; or

[0022] The contact portion and the isolation portion are both made of acrylic.

[0023] In one embodiment, an outer contour of an orthographic projection of the adsorption body on the first surface coincides with an outer contour of an orthographic projection of the isolation portion on the first surface.

[0024] According to another aspect of the present application, the present application further provides a mold, which is used to manufacture the adsorption member in any of the above embodiments;

[0025] The mold is provided with a cavity, and the cavity is adapted to the outer shape of the adsorption component.

[0026] According to another aspect of the present application, the present application further provides an adsorption structure, comprising a fixing base and an adsorption member according to any one of the above embodiments, which are connected to each other, and the fixing base is located on a side of the adsorption body away from the first surface;

[0027] The fixing seat is penetrated by a second adsorption channel communicating with the first adsorption channel.

[0028] In one embodiment, the outer contour of the orthographic projection of the adsorption body on the first surface coincides with the outer contour of the orthographic projection of the fixing seat on the first surface; or

[0029] The outer contour of the orthographic projection of the adsorption body on the first surface is located within the outer contour of the orthographic projection of the fixing seat on the first surface; or

[0030] The outer contour of the orthographic projection of the adsorption body on the first surface is outside the outer contour of the orthographic projection of the fixing seat on the first surface.

[0031] According to another aspect of the present application, the present application also provides a coating device, including the adsorption structure in the above embodiment.

[0032] In the above-mentioned adsorption member, mold, adsorption structure and coating device, the adsorption member includes at least an adsorption body, a plurality of abutting portions and an insulating portion. By providing the insulating portion, the insulating portion is provided around all the abutting portions, and the side surface of the insulating portion facing away from the first surface also abuts against the workpiece to be coated, so that an adsorption chamber is defined between the workpiece to be coated, the insulating portion and the adsorption body, and the insulating portion can improve the sealing of the adsorption chamber. By providing a plurality of abutting portions and vacuuming the first adsorption channel, the side surface of the abutting portion facing away from the first surface adsorbs the workpiece to be coated, thereby fixing the workpiece to be coated on the adsorption member. The adsorption structure includes at least an adsorption member and a fixing seat connected to each other, and has a simple structure, which is conducive to saving assembly time of the adsorption structure and the workpiece to be coated and improving coating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 A schematic axial view of a vacuum adsorption structure in an embodiment of the related art is shown.

[0034] Figure 2 A schematic front view of a vacuum adsorption structure in an embodiment of the related art is shown.

[0035] Figure 3 A schematic top view of an adsorption component in an embodiment of the related art is shown.

[0036] Figure 4 A schematic diagram of the axial side of the assembly of the adsorption structure and the workpiece to be coated in one embodiment of the present application is shown.

[0037] Figure 5 A schematic front view of the assembly of the adsorption structure and the part to be coated in one embodiment of the present application is shown.

[0038] Figure 6 A schematic top view of an adsorption component in an embodiment of the present application is shown.

[0039] Figure 7 A schematic front view of the assembly of an adsorption structure and a workpiece to be coated in another embodiment of the present application is shown.

[0040] Figure 8 A schematic main view of the assembly of the adsorption structure and the part to be coated in another embodiment of the present application is shown.

[0041] Figure 9 A schematic front view of a mold in one embodiment of the present application is shown.

[0042] Figure 10 A schematic axial view of the assembly of multiple vacuum adsorption structures and a workpiece to be coated in an embodiment of the related art is shown.

[0043] Figure 11 A schematic axial view of the assembly of multiple adsorption structures and a workpiece to be coated in one embodiment of the present application is shown.

[0044] Description of Figure Numbers:

[0045] 10. Vacuum adsorption structure 11. Fixed seat

[0046] B2, second adsorption channel 12, adsorption member

[0047] 121. Adsorption body A, first surface

[0048] B1, first adsorption channel B3, gap

[0049] 122, adsorption part 13, isolation member

[0050] B. Vacuum chamber X, first direction

[0051] 3. Part to be coated D1, first size

[0052] D2, second size D3, third size;

[0053] 2. Coating device 20. Adsorption structure

[0054] 21. Fixed seat b2, second adsorption channel

[0055] f1, first mounting groove 22, adsorption member

[0056] 221, adsorption body a1, first surface

[0057] a2, second surface b1, first adsorption channel

[0058] f2, second mounting groove 222, abutment portion

[0059] b3, gap 223, isolation part

[0060] a3, third surface c1, inner contour

[0061] c2, outer contour b, adsorption chamber

[0062] b4, third adsorption channel X, first direction

[0063] d1, first size d2, second size

[0064] d3, third size d4, fourth size

[0065] d5, fifth size d6, sixth size

[0066] m, center axis n, reference direction

[0067] 30. Mold 31. Cavity

[0068] 40. Parts to be coated. DETAILED DESCRIPTION

[0069] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0070] In the description of this application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0071] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include at least one of such features. In the description of this application, if the term "plurality" appears, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0072] In this application, unless otherwise specified or limited, the terms "mounted," "connected," "connected," "fixed," etc., should be interpreted broadly. For example, these terms may refer to fixed connections, removable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediary; and internal communication between two components or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0073] In this application, unless otherwise expressly specified or limited, if a first feature is described as being "above" or "below" a second feature, or similar descriptions, this may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is described as being "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is described as being "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0074] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only embodiment.

[0075] To meet usage requirements, many components require a thin film coating on one side or two opposing sides during production, and there must be no ineffective areas on the edges of the components (ineffective areas refer to areas on the component surface that should be coated but are not). When coating one side of a component, the component must be fixed first, usually by bonding the other side with colloid or vacuum adsorption technology. However, colloid bonding will leave colloid residue on the surface of the component, which is difficult to clean, so vacuum adsorption technology is generally used to fix the component.

[0076] Figure 1 It shows an axial schematic diagram of a vacuum adsorption structure in an embodiment of the related art; Figure 2 A schematic front view of a vacuum adsorption structure in an embodiment of the related art is shown. Figure 1 In order to clearly show the connection relationship between the vacuum adsorption structure 10 and the object to be coated 3, the portion of the vacuum adsorption structure 10 blocked by the object to be coated 3 is shown with a dotted line.

[0077] In a related art embodiment, please refer to Figure 1 and Figure 2In order to improve the sealing of the vacuum chamber B, the vacuum adsorption structure 10 is provided with an isolation member 13. That is, the vacuum adsorption structure 10 includes a fixing base 11, a suction member 12, and an isolation member 13. The suction member 12 includes an adsorption body 121 and a plurality of adsorption portions 122. The adsorption body 121 is provided on the fixing base 11. All the adsorption portions 122 are spaced apart on the first surface A of the adsorption body 121 on one side along the first direction X. In addition, along the first direction X, the adsorption body 121 is located between the adsorption portions 122 and the fixing base 11. The isolation member 13 surrounds the suction member 12 and is provided at one end of the fixing base 11 along the first direction X close to the suction member 12. The adsorption body 121 is provided with a first adsorption channel B1 along the first direction X, and the fixing base 11 is provided with a second adsorption channel B2 connected to the first adsorption channel B1 along the first direction X. When the workpiece 3 to be coated needs to be coated, the vacuum adsorption structure 10 and the workpiece 3 to be coated need to be assembled first. That is, the workpiece 3 to be coated is placed on the surface of the adsorption member 12 and the insulating portion along the first direction X away from the fixing base 11. At this time, the workpiece 3 to be coated, the insulating portion 13 and the fixing base 11 jointly define a vacuum chamber B. Vacuuming is performed through the first adsorption channel B1 and the second adsorption channel B2 so that the workpiece 3 to be coated, the insulating portion 13 and all the adsorption portions 122 are tightly adsorbed, thereby achieving the fixation of the workpiece 3 to be coated on the vacuum adsorption structure 10. In order to improve the quality of the coating, the airtightness of the vacuum chamber B needs to be checked after evacuation to determine whether the sealing of the vacuum chamber B meets the requirements. This results in a long assembly time of the vacuum adsorption structure 10 and the workpiece 3 to be coated, and low coating efficiency. Moreover, if the airtightness of the vacuum chamber B is not good, the plasma used to form the thin film will enter the medium vacuum chamber B during the coating process. Due to the characteristics of the plasma itself, the plasma will etch the adsorption part 12, thereby affecting the adsorption stability of the adsorption part 12 and the part to be coated 3, and further affecting the coating quality.

[0078] Figure 3 A schematic top view of an adsorption component in an embodiment of the related art is shown. Figure 3 In order to clearly show the gap B3 formed by the spacing between the plurality of adsorption portions 122 , the gap B3 is shown as a white line.

[0079] The inventors of this application note that, please refer to Figure 1 and Figure 2 In one embodiment of the related art, the adsorption member 12 and the isolation member 13 are two independent structures, which have production tolerances and assembly tolerances. This is also one of the main reasons that affect the airtightness of the vacuum chamber B after assembly. Figure 3 Since all the adsorption parts 122 are spaced apart on the adsorption body 121, and the gaps B3 between the adsorption parts 122 and the first adsorption channel B1 are interconnected, if the isolation member 13 is not provided (combined with the above reference Figure 1 and Figure 2), it is impossible to define the vacuum chamber B that meets the sealing requirements (combined with the reference above Figure 1 and Figure 2 ), and the plasma will easily enter the vacuum chamber B (combined with the reference above Figure 1 and Figure 2 ) to etch the adsorption member 12, affecting the adsorption member 12 and the film-coated member 3 (combined with the above reference Figure 1 and Figure 2 ) of the adsorption stability, resulting in the coating piece 3 (combined with the above reference Figure 1 and Figure 2 ) cannot be fixed, thus affecting the coating quality.

[0080] Figure 4 A schematic diagram of the axial side of the assembly of the adsorption structure and the workpiece to be coated in one embodiment of the present application is shown; Figure 5 A schematic front view of the assembly of the adsorption structure and the part to be coated in one embodiment of the present application is shown. Figure 4 In order to clearly show the connection relationship between the adsorption structure 20 and the object to be coated 40 , the portion of the adsorption structure 20 blocked by the object to be coated 40 is shown with a dotted line.

[0081] See Figure 4 and Figure 5 The present application provides an adsorption member 22, which includes an adsorption body 221, a plurality of abutting portions 222 and an isolating portion 223. The adsorption body 221 has a first surface a1 and a first adsorption channel b1 that passes through the first surface a1. All the abutting portions 222 are arranged at intervals on the first surface a1, and the isolating portion 223 is provided on the periphery of the first surface a1. The side surface of the isolating portion 223 and all the abutting portions 222 facing away from the adsorption body 221 is used to abut the part to be coated 40. When the part to be coated 40 abuts against the isolating portion 223 and all the abutting portions 222, an adsorption chamber b is defined between the part to be coated 40, the isolating portion 223 and the adsorption body 221; the orthographic projection of the isolating portion 223 on the first surface a1 has an inner contour c1; the orthographic projection of the first adsorption channel b1 on the first surface a1 and the orthographic projection of the plurality of abutting portions 222 on the first surface a1 are both located within the inner contour c1.

[0082] It is understood that the specific shape of the abutting portion 222 can be stripe-shaped, cylindrical, prism-shaped, or any other irregular pattern. The specific shape of all the abutting portions 222 can be consistent or different. The dimensions of all the abutting portions 222 along the first direction X can be consistent so that all the abutting portions 222 can abut against the object 40 to be coated during coating. To facilitate processing and manufacturing, the specific shape and dimensions along the first direction X of all the abutting portions 222 can be consistent, that is, all the abutting portions 222 are the same, thereby saving production costs. Moreover, when the adsorption member 22 is configured as an integrally formed structure, processing is facilitated.

[0083] The adsorbent 22 includes at least an adsorbent body 221, a plurality of abutting portions 222, and an insulating portion 223. By providing the insulating portion 223, when the workpiece 40 to be coated abuts against the insulating portion 223 and all of the abutting portions 222, the surface of the insulating portion 223 facing away from the first surface a1 abuts against the workpiece 40 to be coated, thereby defining an adsorbent chamber b between the workpiece 40 to be coated, the insulating portion 223, and the adsorbent body 221. In this way, the insulating portion 223 can improve the sealing performance of the adsorbent chamber b, allowing the workpiece 40 to be firmly adsorbed on the adsorbent 22 and, to a certain extent, preventing plasma from entering the adsorbent chamber b, thereby improving the quality of the coating. Furthermore, the insulating portion 223 is provided around all of the abutting portions 222, so that the insulating portion 223 can protect the abutting portions 222, thereby improving the situation where the abutting portions 222 are etched by plasma. By providing a plurality of abutting portions 222 and evacuating the first adsorption channel b1, the surface of the abutting portion 222 facing away from the first surface a1 is adsorbed onto the workpiece 40 to be coated, thereby fixing the workpiece 40 to be coated on the adsorption member 22. Furthermore, providing a plurality of abutting portions 222 can also improve the adsorption stability of the workpiece 40 to be coated.

[0084] It should be noted that the first surface a1 refers to a side surface of the adsorption body 221 along the first direction X. A plurality of abutting portions 222 and insulating portions 223 are provided on the first surface a1. The first adsorption channel b1 refers to a channel through which gas flows. The first adsorption channel b1 can be evacuated to allow adsorption of the object 40 to be coated and the adsorption structure 20. Alternatively, the first adsorption channel b1 can be filled with gas at a certain pressure to break the vacuum, thereby separating the object 40 to be coated and the adsorption structure 20. The abutting portion 222 refers to a side surface of the abutting portion 222 facing away from the adsorption body 221 along the first direction X that can abut against the object 40 to be coated after the adsorption chamber b is evacuated during coating. In other words, the object 40 to be coated can be adsorbed on the abutting portion 222. The insulating portion 223 refers to a structure disposed on the first surface a1 that surrounds the entire abutting portion 222. The insulating portion 223, the adsorption body 221, and the object 40 to be coated can collectively define the adsorption chamber b. The periphery refers to the circumferential edge of the adsorption body 221, that is, the isolation portion 223 is provided on the first surface a1 around all the abutting portions 222, and is located at the circumferential edge of the first surface a1. The orthographic projection of the isolation portion 223 on the first surface a1 has an inner contour c1, which means that the isolation portion 223 is constructed as an annular structure, so it has an inner contour c1. The orthographic projection of the first adsorption channel b1 on the first surface a1 and the orthographic projections of all the abutting portions 222 on the first surface a1 are both located within the inner contour c1, which means that the isolation portion 223 is provided around the first adsorption channel b1 and all the abutting portions 222. The adsorption chamber b refers to a chamber where gas flows, including the first adsorption channel b1 in this application, the gap b3 between all the isolation portions 223, the second adsorption channel b2 and the third adsorption channel b4. The gas in the adsorption chamber b is squeezed out by vacuuming, so that the part to be coated 40 is adsorbed on the adsorption part 22.

[0085] Continue reading Figure 5 In some embodiments, the dimension of each abutting portion 222 along the first direction X is not greater than the dimension of the isolating portion 223 along the first direction X. The first direction X is perpendicular to the first surface a1; the dimension of the abutting portion 222 along the first direction X is recorded as the fifth dimension d5, and the dimension of the isolating portion 223 along the first direction X is recorded as the sixth dimension d6. Figure 5 In the schematic diagram of an embodiment shown, the fifth dimension d5 and the sixth dimension d6 are equal and therefore marked at the same location.

[0086] In this way, during coating, the isolation portion 223 can define an adsorption chamber b that meets the airtightness requirements together with the adsorption body 221 and the workpiece 40 to be coated, thereby facilitating the fixation of the workpiece 40 to be coated and improving the coating quality.

[0087] It is understood that since the insulating portion 223 primarily serves to isolate the contact portion 222 from the plasma and, together with the adsorption body 221 and the object to be coated 40, define the adsorption chamber b, during coating, the surface of the insulating portion 223 facing away from the adsorption body 221 along the first direction X must abut against the object to be coated 40. In other words, if the dimension of the abutting portion 222 along the first direction X is larger than the dimension of the insulating portion 223 along the first direction X, the insulating portion 223 may not abut against the object to be coated 40, thereby failing to define a satisfactory adsorption chamber b together with the adsorption body 221 and the object to be coated 40, thus affecting the coating quality. To facilitate manufacturing, the fifth dimension d5 and the sixth dimension d6 can be made equal, thereby ensuring that the adsorption chamber b meets airtightness requirements while reducing manufacturing complexity and saving manufacturing costs.

[0088] Continue reading Figure 5 In some embodiments, the difference between the dimension of the contact portion 222 along the first direction X and the dimension of the isolation portion 223 along the first direction X is 0.1 mm to 3 mm. That is, the difference between the fifth dimension d5 and the sixth dimension d6 is 0.1 mm to 3 mm.

[0089] It is understood that the difference between the dimension of the abutting portion 222 along the first direction X and the dimension of the insulating portion 223 along the first direction X can be determined based on the materials of the abutting portion 222 and the insulating portion 223. For abutting portions 222 and insulating portions 223 made of different materials, the difference between the fifth dimension d5 and the sixth dimension d6 will also vary. That is, if the materials of the abutting portion 222 and the insulating portion 223 are relatively soft, the difference between the fifth dimension d5 and the sixth dimension d6 can be set slightly larger. If the materials of the abutting portion 222 and the insulating portion 223 are relatively hard, the difference between the fifth dimension d5 and the sixth dimension d6 needs to be set slightly smaller. This ensures that when the object 40 to be coated abuts the insulating portion 223 and all of the abutting portions 222, the third surface a3 of the insulating portion 223 and the side surface of the abutting portion 222 along the first direction X facing away from the first surface a1 can both abut the object 40 to be coated, thereby ensuring that the sealing performance of the adsorption chamber b meets the requirements and improving the coating quality.

[0090] Continue reading Figure 5 In some embodiments, the adsorption body 221 has a second surface a2 facing away from the first surface a1 along the first direction X, and the isolation portion 223 has a third surface a3 facing away from the first surface a1 along the first direction X. Along the first direction X, the distance between the second surface a2 and the third surface a3 is less than 20 mm. The distance between the second surface a2 and the third surface a3 is referred to as a fourth dimension d4; that is, the fourth dimension d4 is less than 20 mm.

[0091] It can be understood that the distance between the second surface a2 and the third surface a3 along the first direction X is the thickness of the adsorption member 22 along the first direction X. The larger the distance between the second surface a2 and the third surface a3 along the first direction X, the higher the cost of the adsorption member 22, and the coating device 2 (in conjunction with the following reference) Figure 11 ) The space of the coating cavity (not shown in the figure) for setting the adsorption structure 20 is limited. If the thickness of the adsorption component 22 along the first direction X is too large, the adsorption structure 20 may not be set in the coating cavity.

[0092] Figure 6 A schematic top view of an adsorption component in an embodiment of the present application is shown. Figure 6 In order to clearly show the gaps b3 and the third adsorption channels b4 formed by the spacing between the plurality of abutting portions 222 , the gaps b3 and the third adsorption channels b4 are shown as white lines.

[0093] See Figure 6 All abutment portions 222 are spaced apart on the first surface a1, and the gaps b3 between the abutment portions 222 communicate with the first adsorption channel b1. To facilitate gas flow, all abutment portions 222 collectively define four third adsorption channels b4, each connected to the first adsorption channel b1. All third adsorption channels b4 extend along a straight line, and the angle between any two adjacent third adsorption channels b4 is 90 degrees. It will be appreciated that the number, location, and extension direction of the third adsorption channels b4 can be customized as needed.

[0094] Thus, by providing the third adsorption channel b4, it is beneficial to shorten the vacuuming time and improve the efficiency of the coating. In addition, providing the third adsorption channel b4 can also improve the efficiency of the coating workpiece 40 (combined with the above reference). Figure 4 and Figure 5 ) and the adsorption stability of the adsorption member 22, thereby improving the coating quality.

[0095] Continue reading Figure 6 In some embodiments, the orthographic projection of the isolation portion 223 on the first surface a1 has an outer contour c2, and the maximum distance between the outer contour c2 and the inner contour c1 is less than 10 mm. The distance between the outer contour c2 and the inner contour c1 is denoted as the second dimension d2. In other words, the maximum value of the second dimension d2 is less than 10 mm.

[0096] It can be understood that if the distance between the outer contour c2 and the inner contour c1 is too large, the surface area of ​​the third surface a3 of the isolation portion 223 will be large, resulting in the isolation portion 223 and the object to be coated 40 (combined with the above reference) Figure 4 and Figure 5) between the contact area is large, which will lead to a large adsorption force between the isolation portion 223 and the to-be-coated member 40, which is not conducive to separating the to-be-coated member 40 after the coating is completed (combined with the above reference Figure 4 and Figure 5 ) and adsorption member 22.

[0097] It should be noted that the orthographic projection of the isolation portion 223 on the first surface a1 having an outer contour c2 means that the isolation portion 223 is constructed as an annular structure, and therefore has an outer contour c2. The abutting portion 222 can typically be reused less than 1,000 times, while the isolation portion 223 will also be subject to wear and tear during repeated use. The isolation portion 223 will also be etched by plasma. Over time, both the abutting portion 222 and the isolation portion 223 will fail. Therefore, when designing the spacing between the inner contour c1 and the outer contour c2 of the isolation portion 223, the primary goal is to ensure that the number of uses of the isolation portion 223 and the number of uses of the abutting portion 222 are consistent as much as possible, so as to fully utilize the number of uses of the abutting portion 222 while also avoiding cost increases due to an excessively large spacing between the inner contour c1 and the outer contour c2 of the isolation portion 223.

[0098] Continue reading Figure 6 In some embodiments, the distance between the outer contour c2 and the inner contour c1 is equal. That is, the isolation portion 223 is configured in a ring shape.

[0099] It should be noted that the term "annular" refers to a closed loop structure, and the spacing between the outer contour c2 and the inner contour c1 is the ring width. However, the term "annular" does not mean that the ring width is uniform along the circumference of the insulating portion 223. The structure of the insulating portion 223 can be flexibly configured according to actual usage. If the ring width of the insulating portion 223 is uniform throughout, for example, the insulating portion 223 is configured as a circular ring with a uniform ring width, it is more convenient to manufacture the insulating portion 223 and also facilitates the installation and fixation of the adsorbent 22.

[0100] Continue reading Figure 6 In some embodiments, when the insulating portion 223 is configured as a ring, the distance between the outer contour c2 and the inner contour c1 is 2 mm, that is, the second dimension d2 is 2 mm.

[0101] Continue reading Figure 4 and Figure 5 In some embodiments, the isolation portion 223 has a central axis m and an inner contour c1 (combined with the above reference Figure 6 ) along the reference direction n is in the range of 20 mm to 60 mm, and the reference direction n is perpendicular to the central axis m. Figure 6 ) The dimension along the reference direction n is recorded as the third dimension d3, that is, the range of the third dimension d3 is 20 mm to 60 mm.

[0102] It should be noted that the central axis m of the isolating portion 223 refers to a line passing through the center point of the isolating portion 223. For example, when the isolating portion 223 is constructed in a circular ring shape, the central axis m of the isolating portion 223 refers to a line passing through the center of the circle of the isolating portion 223; for another example, when the isolating portion 223 is constructed in a ring-shaped parallelogram, the central axis m of the isolating portion 223 refers to a line passing through the intersection of the two diagonals of the parallelogram; when the isolating portion 223 is constructed in an irregular shape, the central axis m is approximately a line passing through the geometric center of the isolating portion 223, and the geometric center refers to the geometric center of a certain cross section of the isolating portion 223. The reference direction n refers to a direction perpendicular to the central axis m of the isolating portion 223, but there are many directions perpendicular to the central axis m ( Figures 4 to 6 The reference direction n shown in FIG is only one of the reference directions n, which is only an example), that is, the inner contour c1 (combined with the reference to the above Figure 6 ) intersects the central axis m, then the line connecting the two points is parallel to the reference direction n, and the inner contour c1 (combined with the above reference Figure 6 ) along the reference direction n refers to the inner contour c1 (combined with the above reference Figure 6 ) The line connecting any two points on the surface intersects with the central axis m, and the dimension of the line segment between the two points in the corresponding reference direction n parallel to the line connecting the two points is the third dimension d3.

[0103] Continue reading Figure 6 In some embodiments, when the isolating portion 223 is configured as a circular ring, the size of the outer contour c2 of the isolating portion 223 is 35 mm, and the size of the outer contour c2 of the isolating portion 223 is recorded as the first dimension d1, that is, the first dimension d1 is 35 mm.

[0104] It should be noted that the inner diameter of the insulating portion 223 is calculated based on the outer diameter of the insulating portion 223 and the ring width of the insulating portion 223. For example, when the insulating portion 223 is annular, the outer diameter of the insulating portion 223 is 35 mm, and the ring width of the insulating portion 223 is 2 mm, then the inner diameter of the insulating portion 223 is 31 mm. It is understood that the size of the insulating portion 223 can be flexibly set according to actual needs.

[0105] See again Figure 2 In one embodiment of the related art, the adsorption member 12, the insulating member 13, and the fixing base 11 are all constructed as a rotating body structure. The outer diameter of the adsorption member 12 is recorded as a first dimension D1, which is 31 mm. The outer diameter of the insulating member 13 is recorded as a second dimension D2, which is 55 mm. The inner diameter of the insulating member 13 is recorded as a third dimension D3, which is 35 mm. Figure 5In one embodiment of the present application, the adsorption member 22 and the fixing seat 21 are both constructed as a rotating body structure. The outer diameter of the adsorption member 22 is 35 mm, that is, the outer diameters of the adsorption body 221 and the isolation portion 223 are equal. The first dimension d1 is 35 mm (can be combined with reference to Figure 6 That is, when the fixing base 21 and the workpiece 40 to be coated remain the same, the overall size of the adsorption structure 20 in this embodiment of the present application is reduced by about 36% compared to the overall size of the vacuum adsorption structure 10 in the first embodiment of the related art (the comparison here is that the maximum outer diameter of the vacuum adsorption structure 10 in the related art is 55 mm, while the maximum outer diameter of the adsorption structure 20 in the present application is 35 mm). As a result, the overall size of the adsorption structure 20 of the present application is smaller and the overall weight is lighter.

[0106] Continue reading Figure 4 and Figure 5 In some embodiments, all of the abutting portions 222 and the insulating portions 223 are configured to undergo recoverable deformation in response to an external force. That is, the abutting portions 222 and the insulating portions 223 are both soft enough to undergo a certain degree of deformation under the action of an external force.

[0107] It should be noted that softness refers to the ability of the abutting portion 222 and the insulating portion 223 to undergo a certain degree of recoverable deformation under the action of an external force. Although the abutting portion 222 and the insulating portion 223 can undergo a recoverable deformation under the action of an external force, this deformation is relatively small and is different from the larger deformation produced by the deformation of a commonly used spring.

[0108] In this way, by configuring the abutment portion 222 and the isolation portion 223 to be able to undergo recoverable deformation in response to external force, when assembling the adsorption structure 20 and the part to be coated 40, an external force can be applied to the part to be coated 40 while vacuuming, so that the part to be coated 40 and the abutment portion 222 abut against the isolation portion 223, which is also beneficial for squeezing the gas in the adsorption chamber b out of the adsorption chamber b, so that the part to be coated 40 can be more stably adsorbed on the adsorption part 22.

[0109] In some embodiments, the contact portion 222 and the insulating portion 223 are both made of rubber. Optionally, the contact portion 222 and the insulating portion 223 are both made of fluorine-containing rubber, which has better high temperature resistance and vacuum performance than fluorine-free rubber.

[0110] In some embodiments, the contact portion 222 and the isolation portion 223 are both made of silicone.

[0111] In some embodiments, the materials of the abutting portion 222 and the isolating portion 223 are both acrylic.

[0112] It should be noted that the material of the adsorption body 221 can also be the same as the material of the abutting portion 222 and the insulating portion 223. The specific material of the abutting portion 222 and the insulating portion 223 is not limited to rubber, fluororubber, silicone, and acrylic, and can also be other materials with a certain degree of softness. The materials of the abutting portion 222, the insulating portion 223, and the adsorption body 221 can be flexibly set according to actual usage. Acrylic is another name for acrylic. Raw materials of different proportions and formulas can be adjusted as needed to obtain acrylics of different hardness. In other words, the acrylic used in this application is a material with a certain degree of softness. It can undergo recoverable deformation under the action of external force. In addition, the acrylic material does not generate gas due to heating, which is also conducive to improving the quality of the coating.

[0113] Continue reading Figure 4 and Figure 5 In some embodiments, the outer contour of the orthographic projection of the adsorption body 221 on the first surface a1 (not shown in the figure) and the outer contour c2 of the orthographic projection of the isolation portion 223 on the first surface a1 (see above) Figure 6 That is, the outer shape and outer circumference of the adsorption body 221 are the same as the outer shape and outer circumference of the isolation portion 223. This facilitates the processing and manufacturing of the adsorption member 22.

[0114] It should be noted that the outer contour of the positive projection of the adsorption body 221 on the first surface a1 is not shown in the drawings of this application, but can be referred to Figure 4 and Figure 5 The outer contour of the orthographic projection of the adsorption body 221 on the first surface a1 (not shown in the figure) and the outer contour c2 of the orthographic projection of the isolation portion 223 on the first surface a1 are determined according to the positional relationship between the outer circumference of the adsorption body 221 and the outer circumference of the isolation portion 223 (see the above reference). Figure 6 ) whether to overlap settings.

[0115] See again Figure 4 and Figure 5 The present application also provides an adsorption structure 20, which includes a fixing seat 21 and an adsorption member 22 connected to each other, and the fixing seat 21 is located on the side of the adsorption body 221 away from the first surface a1, and the fixing seat 21 is penetrated by a second adsorption channel b2 connected to the first adsorption channel b1.

[0116] It is understandable that the adsorption body 221 and the fixing seat 21 can be bonded together by tape or glue, or can be connected by other connection methods or connecting parts, and no further restrictions are made here.

[0117] The above-mentioned adsorption structure 20 at least includes an adsorption member 22 and a fixing seat 21 connected to each other. The structure is simple, which is beneficial to saving the assembly time of the adsorption structure 20 and the object to be coated 40, thereby improving the coating efficiency.

[0118] Continue reading Figure 4 and Figure 5 In some embodiments, the outer contour of the orthographic projection of the adsorption body 221 on the first surface a1 (not shown in the figure) coincides with the outer contour of the orthographic projection of the fixing seat 21 on the first surface a1 (not shown in the figure).

[0119] It should be noted that the outer contour of the positive projection of the adsorption body 221 on the first surface a1 is not shown in the drawings of this application, and the outer contour of the positive projection of the fixing seat 21 on the first surface a1 is not shown in the drawings of this application, but can be referred to Figure 4 and Figure 5 According to the positional relationship between the outer peripheral surface of the adsorption body 221 and the outer peripheral surface of the fixing seat 21, it is determined whether the outer contour of the positive projection of the adsorption body 221 on the first surface a1 (not shown in the figure) and the outer contour of the positive projection of the fixing seat 21 on the first surface a1 (not shown in the figure) are arranged to overlap.

[0120] Figure 7 A schematic front view of the assembly of an adsorption structure and a workpiece to be coated in another embodiment of the present application is shown.

[0121] See Figure 7 In some embodiments, the outer contour of the orthographic projection of the adsorption body 221 on the first surface a1 (not shown in the figure) is located within the outer contour of the orthographic projection of the fixing base 21 on the first surface a1 (not shown in the figure). Specifically, in this embodiment, the fixing base 21 is provided with a first mounting groove f1 at one end thereof that is close to the adsorption member 22 along the first direction X, and the end of the adsorption body 221 that is away from the first surface a1 along the first direction X is located within the first mounting groove f1. It will be understood that the outer shape and size of the first mounting groove f1 and the end of the adsorption body 221 that is away from the first surface a1 along the first direction X are compatible.

[0122] Figure 8 A schematic main view of the assembly of the adsorption structure and the part to be coated in another embodiment of the present application is shown.

[0123] See Figure 8In some embodiments, the outer contour of the orthographic projection of the adsorption body 221 on the first surface a1 (not shown) is outside the outer contour of the orthographic projection of the fixing base 21 on the first surface a1 (not shown). Specifically, in this embodiment, the adsorption body 221 is provided with a second mounting groove f2 at one end thereof, which faces away from the first surface a1, along the first direction X. The adsorption body 221 is mounted on the fixing base 21 via the second mounting groove f2. It will be understood that the outer shape and size of the second mounting groove f2 match the outer shape and size of the end of the fixing base 21, which is located near the adsorption member 22, along the first direction X.

[0124] It should be noted that the specific shape and structure of the portion where the adsorption body 221 and the fixing seat 21 are connected is not limited to the above-mentioned embodiment of the present application, and can also be set as needed.

[0125] Figure 9 A schematic front view of a mold 30 in one embodiment of the present application is shown.

[0126] See Figure 9 The present application also provides a mold 30, which is used to manufacture the adsorption member 22 in the above embodiment. The mold 30 is provided with a cavity 31, which is adapted to the outer shape of the adsorption member 22. In this way, the desired adsorption member 22 can be manufactured.

[0127] It is understood that the adsorption member 22 can be an integrally formed structure formed by pouring the mold 30, and the specific shape structure of the mold 30 and the cavity 31 can be set according to the external shape of the adsorption member 22, and is not limited to the present application. Figure 9 The mold 30 is shown.

[0128] It should be noted that Figure 9 The mold 30 and the adsorbent 22 shown in the figure are for illustration only. The object to be coated 40 mentioned in this application can be a flat structure or a curved structure. The object to be coated 40 can be used for vehicle-mounted display screens or other electronic devices such as mobile phones.

[0129] Figure 10 The figure shows an axial side view of the assembly of multiple vacuum adsorption structures and a workpiece to be coated in an embodiment of the related art. For ease of explanation, only the content related to the embodiment of the related art is shown.

[0130] See Figure 10In one embodiment of the related art, to more stably adsorb the workpiece 3 to be coated, multiple vacuum adsorption structures 10 are spaced apart within the coating cavity of the coating apparatus to collectively adsorb the workpiece 3 to be coated. Because multiple vacuum adsorption structures 10 are provided, each vacuum adsorption structure 10 and the workpiece 3 to be coated define a vacuum chamber B. When two vacuum adsorption structures 10 are provided, the volume of the two vacuum chambers B is approximately 791 cubic millimeters. This requires a long time to evacuate the chambers, resulting in low coating efficiency.

[0131] Figure 11 The following is a schematic diagram of an axial side view of an assembly of multiple adsorption structures and a workpiece to be coated in an embodiment of the present application. For ease of explanation, only the content related to the embodiment of the present application is shown.

[0132] See Figure 11 The present application also provides a coating device 2, including the adsorption structure 20 in the above embodiment. It can be understood that the coating device 2 has all the advantages of the adsorption structure 20 in the present application, which will not be repeated here.

[0133] Continue reading Figure 11 In some embodiments, the coating device 2 includes a plurality of adsorption structures 20. All adsorption structures 20 are spaced apart within a coating cavity (not shown) of the coating device 2 and are used to collectively adsorb the object 40 to be coated. Each adsorption structure 20 and the object 40 to be coated define an adsorption chamber b.

[0134] It is understood that the number of vacuum structures can be set based on the overall size of the object 40 to be coated, and adjacent vacuum structures can be spaced apart or not. For example, when two adsorption structures 20 are provided, the volume of the two adsorption chambers b is approximately 377 cubic millimeters. Compared with the two vacuum chambers B defined in the first embodiment of the related art, the volume of the two adsorption chambers b defined in the present application is reduced by approximately half. This means that the adsorption structures 20 provided in the present application require less time to evacuate the vacuum, resulting in higher coating efficiency.

[0135] In some embodiments, the coating device 2 further includes a temperature measuring element, which is disposed on the adsorption element 22 and is used to measure the real-time temperature of the adsorption element 22 during the coating process. For example, if the object 40 to be coated is made of a plastic material with poor heat resistance, the temperature measuring element can be used to indirectly measure the coating status of the object 40 to be coated, thereby preventing damage to the object 40 due to high temperatures to a certain extent, thereby improving the coating quality.

[0136] In this way, the real-time temperature of the adsorption member 22 is obtained through the temperature measuring member, so as to indirectly obtain the real-time temperature of the part to be coated 40 during the coating process, thereby being able to monitor the coating condition of the part to be coated 40 .

[0137] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0138] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. An adsorption element, characterized in that: include: an adsorption body having a first surface and a first adsorption channel running through the first surface; a plurality of abutting portions, the plurality of abutting portions being arranged on the first surface at intervals; and An isolation portion is provided on the periphery of the first surface; the isolation portion and all the abutting portions are configured to abut against a part to be coated on a side facing away from the adsorption body; When the object to be coated abuts against the isolation portion and all the abutting portions, an adsorption chamber is defined between the object to be coated, the isolation portion, and the adsorption body; the orthographic projection of the isolation portion on the first surface has an inner contour; the orthographic projection of the first adsorption channel on the first surface and the orthographic projections of the plurality of abutting portions on the first surface are all located within the inner contour; Wherein, the adsorption chamber includes the first adsorption channel and the gaps between all the isolation parts. The gaps are located between the isolation parts and the multiple abutment parts, and between the multiple abutment parts. The gaps are connected to the first adsorption channel, and the adsorption part is an integrally formed structure.

2. The adsorption element according to claim 1, characterized in that: The dimension of each abutting portion along the first direction is not greater than the dimension of the insulating portion along the first direction; The first direction is perpendicular to the first surface.

3. The adsorption member according to claim 2, characterized in that: A difference between a dimension of the abutting portion along the first direction and a dimension of the isolating portion along the first direction is 0.1 mm to 3 mm.

4. The adsorption member according to claim 1, characterized in that: The adsorption body has a second surface facing away from the first surface along a first direction, and the isolation portion has a third surface facing away from the first surface along the first direction; Along the first direction, a distance between the second surface and the third surface is less than 20 mm.

5. The adsorption element according to any one of claims 1 to 4, characterized in that: An orthographic projection of the insulating portion on the first surface has an outer contour, and a maximum distance between the outer contour and the inner contour is less than 10 mm.

6. The adsorption element according to claim 5, characterized in that: The outer contour and the inner contour have equal spacing.

7. The adsorption element according to claim 6, characterized in that: The distance between the outer contour and the inner contour is 2 mm.

8. The adsorption element according to any one of claims 1 to 4, characterized in that: The insulating portion has a central axis, and a dimension of the inner contour along a reference direction ranges from 20 mm to 60 mm; the reference direction is perpendicular to the central axis.

9. The adsorption element according to any one of claims 1 to 4, characterized in that: All of the abutting portions and the insulating portions are configured to undergo recoverable deformation in response to an external force.

10. The adsorption element according to any one of claims 1 to 4, characterized in that: The contact portion and the insulating portion are both made of rubber; or The contact portion and the insulating portion are both made of silicone; or The contact portion and the isolation portion are both made of acrylic.

11. The adsorption element according to any one of claims 1 to 4, characterized in that: An outer contour of an orthographic projection of the adsorption body on the first surface coincides with an outer contour of an orthographic projection of the isolation portion on the first surface.

12. A mold, characterized in that: The mold is used to manufacture the adsorption component according to any one of claims 1 to 11; The mold is provided with a cavity, and the cavity is adapted to the outer shape of the adsorption component.

13. An adsorption structure, characterized in that: comprising a fixing base and the adsorption member according to any one of claims 1 to 11 that are connected to each other, wherein the fixing base is located on a side of the adsorption body away from the first surface; The fixing seat is penetrated by a second adsorption channel communicating with the first adsorption channel.

14. The adsorption structure according to claim 13, characterized in that: The outer contour of the orthographic projection of the adsorption body on the first surface coincides with the outer contour of the orthographic projection of the fixing seat on the first surface; or The outer contour of the orthographic projection of the adsorption body on the first surface is located within the outer contour of the orthographic projection of the fixing seat on the first surface; or The outer contour of the orthographic projection of the adsorption body on the first surface is outside the outer contour of the orthographic projection of the fixing seat on the first surface.

15. A film coating device, characterized in that: Comprising the adsorption structure according to claim 13 or 14.

Images