A method for optimizing the self-rotation angle of a stick crystal rod

Abstract

The application provides a method for optimizing the rotation angle of a stick crystal rod, which comprises the following steps: placing the crystal rod in a clamp, with the bottom of the clamp in contact with the first end surface of the crystal rod and the top end surface of the clamp parallel to the second end surface of the crystal rod; measuring and adjusting the crystal surface and direction angle of the crystal rod in the clamp to find the target crystal direction of the crystal rod, wherein the crystal direction of the crystal rod comprises a horizontal crystal direction and a vertical crystal direction, the values of the horizontal crystal direction and the vertical crystal direction both fall within the target crystal direction interval, and the second end surface of the adjusted crystal rod has an included angle with the top end surface of the clamp; grinding the second end surface to make the crystal direction value of the second end surface after grinding the target crystal direction value, and the top end surface of the clamp is parallel to the second end surface after grinding, so that the crystal direction of the crystal rod after grinding before the stick rod can be in the non-cleavage interval, the rotation angle of the stick rod is changed from random distribution to non-cleavage interval distribution, and the silicon wafer fragment rate is reduced.

Description

Technical Field

[0001] This invention relates to the field of positioning and bonding rod technology, and in particular to a method for optimizing the spin angle of a bonding rod crystal. Background Technology

[0002] Before cutting, the crystal ingots need to be bonded to a bonding machine. When the crystal ingots are bonded to the bonding machine, the rotation angles of the crystal ingots are randomly distributed. This random distribution of rotation angles will encounter the following problems: the anisotropy of silicon wafers has a significant impact on the mechanical properties of silicon wafers in subsequent processing. For example, the silicon wafers obtained after cutting are prone to cleavage along the crystal line direction, resulting in a high fragmentation rate. When the movement direction of the cutting line is parallel to the cleavage direction of the crystal ingot, the fragmentation rate of the silicon wafer is also very high. Summary of the Invention

[0003] The purpose of this invention is to provide a method for optimizing the spin angle of a sticky crystal rod, which can limit the distribution area of ​​the crystal rod spin angle so that the crystal rod spin angle avoids the cleavage region.

[0004] To address the above problems, this invention provides a method for optimizing the spin angle of sticky rod crystals, comprising the following steps:

[0005] Step S1: Place the crystal rod in the fixture. The crystal rod has a first end face and a second end face that are arranged opposite to each other. The bottom of the fixture is in contact with the first end face, and the top end face of the fixture is parallel to the second end face.

[0006] Step S2: Measure and adjust the crystal orientation angle of the crystal rod located in the fixture to find the target crystal orientation of the crystal rod. The crystal orientation of the crystal rod includes a horizontal crystal orientation and a vertical crystal orientation. The values ​​of the horizontal and vertical crystal orientations both fall within the target crystal orientation range. After adjustment, the second end face of the crystal rod has an angle with the top end face of the fixture; and

[0007] Step S3: Grind the second end face so that the crystal orientation of the ground second end face is the target crystal orientation value, and the top end face of the fixture is set parallel to the ground second end face.

[0008] Optionally, the fixture includes a main body and a rotary table.

[0009] The main body includes a bottom and a top, and the rotary table is rotatably connected to the end face of the bottom.

[0010] The rotary table is rotatably mounted on the bottom end face, and the first end face is located on the rotary table; and

[0011] When the crystal rod is placed in the fixture, the length of the crystal rod is greater than the length of the main body, so that the second end face extends out of the top.

[0012] Furthermore, a plurality of bolts are threaded onto the outer peripheral surface of the top, the bolts being radially retractable along the main body, and the crystal rod being fixed inside all the bolts.

[0013] Furthermore, step S1 includes:

[0014] The outer peripheral surface of the crystal rod is subjected to rolling grinding to ensure that the diameter of the crystal rod from the first end face to the second end face remains consistent.

[0015] The crystal rod is cut to obtain a crystal rod of a predetermined length;

[0016] The crystal rod is placed in the fixture, with the second end face and the top end face arranged parallel to each other.

[0017] Furthermore, the method for adjusting the horizontal crystal orientation to within the target crystal orientation range includes:

[0018] X-rays are emitted through a directional instrument and fall on the physical center point of the second end face;

[0019] The crystal plane orientation angle of the crystal rod is adjusted by rotating the bolt until the maximum value of the horizontal crystal orientation is found, and the value of the horizontal crystal orientation falls within the target crystal orientation range.

[0020] Furthermore, the method for adjusting the vertical crystal orientation to within the target crystal orientation range includes:

[0021] The orientation instrument stops emitting X-rays, and the rotary table drives the crystal rod to rotate 90°.

[0022] X-rays are emitted through a directional instrument, and the X-rays fall at the intersection of all the screws;

[0023] The crystal plane orientation angle of the crystal rod is adjusted by rotating the bolt until the maximum value of the vertical crystal orientation is found, and the value of the vertical crystal orientation falls within the target crystal orientation range.

[0024] Optionally, before finding the target crystal orientation of the crystal rod and grinding the second end face, the process further includes:

[0025] Mark the second end face.

[0026] Furthermore, step S3 specifically includes:

[0027] The crystal rod fixed on the fixture is fixed on the grinding fixture, and the second end face is ground to remove the mark, so that the crystal orientation of the ground second end face is the target crystal orientation value. The top end face of the fixture is parallel to the ground second end face.

[0028] Optionally, after step S3, the following steps are also included:

[0029] The crystal rod is bonded to the rod bonding machine at a preset angle.

[0030] Compared with the prior art, the present invention has the following beneficial effects:

[0031] This invention provides a method for optimizing the spin angle of a crystal rod, comprising the following steps: Step S1: placing the crystal rod in a fixture, the crystal rod having a first end face and a second end face arranged opposite to each other, the bottom of the fixture contacting the first end face, and the top end face of the fixture being parallel to the second end face; Step S2: measuring and adjusting the crystal orientation angle of the crystal rod located in the fixture to find the target crystal orientation of the crystal rod, the crystal orientation of the crystal rod including a horizontal crystal orientation and a vertical crystal orientation, the values ​​of the horizontal crystal orientation and the vertical crystal orientation both falling within the target crystal orientation. Within the target crystal orientation range, the adjusted second end face of the crystal rod has an angle with the top end face of the fixture; and step S3: grinding the second end face so that the crystal orientation of the ground second end face is the target crystal orientation value, the top end face of the fixture and the ground second end face are set parallel to each other, wherein the grinding before sticking can make the crystal orientation of the ground crystal rod (relative to the sticking machine) in the non-cleavage range, realizing the sticking angle from random distribution to non-cleavage range distribution, thereby reducing the silicon wafer breakage rate. Attached Figure Description

[0032] Figure 1 This is a flowchart illustrating a method for optimizing the spin angle of a sticky crystal rod according to an embodiment of the present invention.

[0033] Figures 2-3 This is a schematic diagram of the structure of a clamp provided in an embodiment of the present invention.

[0034] Explanation of reference numerals in the attached figures:

[0035] 11-Main body; 12-Rotary table; 13-Pin; 20-Bolt; 21-Nut; 22-Screw. Detailed Implementation

[0036] The following will provide a more detailed description of a method for optimizing the spin angle of a sticky rod crystal according to the present invention. The invention will now be described in more detail with reference to the accompanying drawings, which illustrate preferred embodiments of the invention. It should be understood that those skilled in the art can modify the invention described herein while still achieving its advantageous effects. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit the invention.

[0037] For clarity, not all features of the actual embodiments are described. In the following description, well-known functions and structures are not detailed in detail, as they would obscure the invention with unnecessary detail. It should be understood that in the development of any actual embodiment, numerous implementation details must be made to achieve the developer's specific objectives, such as changes from one embodiment to another according to limitations related to the system or business. Furthermore, it should be understood that such development work may be complex and time-consuming, but is merely routine work for those skilled in the art.

[0038] To make the objectives and features of the present invention more apparent and understandable, the specific embodiments of the present invention will be further described below with reference to the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise ratios, and are only used to conveniently and clearly assist in illustrating the objectives of the embodiments of the present invention.

[0039] Figure 1 This is a flowchart illustrating a method for optimizing the spin angle of a sticky rod crystal in this embodiment.

[0040] like Figure 1 As shown, this embodiment provides a method for optimizing the spin angle of a sticky rod crystal, including the following steps:

[0041] Step S1: Place the crystal rod in the fixture. The crystal rod has a first end face and a second end face that are arranged opposite to each other. The bottom of the fixture is in contact with the first end face, and the top end face of the fixture is parallel to the second end face.

[0042] Step S2: Measure and adjust the crystal orientation angle of the crystal rod located in the fixture to find the target crystal orientation of the crystal rod. The crystal orientation of the crystal rod includes a horizontal crystal orientation and a vertical crystal orientation. The values ​​of the horizontal crystal orientation and the vertical crystal orientation both fall within the target crystal orientation range. After adjustment, there is an angle between the second end face of the crystal rod and the top end face of the fixture.

[0043] Step S3: Grind the second end face so that the crystal orientation of the ground second end face is the target crystal orientation value, and the top end face of the fixture is set parallel to the ground second end face.

[0044] The following combination Figures 2-3 This embodiment provides a detailed description of a method for optimizing the spin angle of a crystal rod before it adheres to the rod.

[0045] First, step S1 is performed, in which the crystal rod is placed in the fixture. The crystal rod has a first end face and a second end face that are arranged opposite to each other. The bottom of the fixture is in contact with the first end face, and the top end face of the fixture is parallel to the second end face.

[0046] like Figures 2-3As shown, the clamp is a cylindrical structure with one open end. The clamp includes a main body 11 and a rotary table 12. The main body 11 is a hollow cylindrical structure with openings at both ends, and has an elongated notch extending through at least one end in the length direction. The main body 11 includes a bottom and a top. The rotary table 12 is rotatably connected to the end face of the bottom of the main body. The outer circumferential surface of the bottom has four first through holes, with each pair of first through holes facing each other, and the line connecting them passing through the center point of the rotary table 12. The rotary table 12 has two second through holes that extend radially through it. The diameter of the first through holes is the same as the diameter of the second through holes. When one pair of first through holes (i.e., two facing first through holes) faces one second through hole, another pair of first through holes faces another second through hole. When one pair of first through holes faces one second through hole, a pin can be placed in the pair of first and second through holes to keep the rotary table 12 relatively stationary with respect to the main body.

[0047] The length of the crystal rod is greater than the length of the main body, such that the first end face is located on the rotary table 12, and the second end face extends out of the top of the main body. The top is uniformly provided with a plurality of third through holes along its circumference. Each third through hole has an internal thread, and each through hole is provided with a bolt 20, such as a hexagonal bolt. The bolt 20 has an external thread that matches the internal thread, allowing the bolt to extend and retract radially along the main body. The bolt 20 is threaded through the third through hole, and both ends of the bolt 20 are located outside the two openings of the third through hole, thus fixing the crystal rod inside all the bolts.

[0048] In detail, the bolt 20 includes a nut 21 and a screw 22. The screw 22 includes a connecting end and a free end. The connecting end connects to the nut 21. The length of the screw 22 is greater than the depth of the third through hole, such that the free end extends into the third through hole from the outside of the main body 11. After the thread passes through the third through hole, the free end is located inside the main body 11, and the nut 21 is located outside the main body 11. The crystal rod is located inside all the free ends of the screw 22, and at least most of the free ends of the screw 22 are in contact with the crystal rod. Since the opening of the notch faces the top, the position of the crystal rod in the fixture can be adjusted by rotating the nut 21. At the same time, the notch prevents damage to the crystal rod caused by physical compression from the fixture, and also changes the angle between the second end face and the top end face of the crystal rod, so that the crystal rod tilts in the fixture.

[0049] This step specifically includes the following steps:

[0050] First, the outer peripheral surface of the crystal rod is subjected to tumbling treatment so that the diameter of the crystal rod from the first end face to the second end face remains basically the same.

[0051] Next, the crystal rod is cut to obtain a crystal rod of a preset length, the crystal rod having a first end face and a second end face that are arranged opposite to each other.

[0052] Next, the crystal rod is placed in the fixture. The length of the crystal rod is greater than the length of the main body 11. The first end face is located on the rotary table, and the second end face extends out of the top of the main body 11. The bolts 20 threaded on the outer circumference of the top limit and fix the crystal rod between all the bolts 20. At this time, the center position of the second end face of the crystal rod is located at the center position of the screw extension position, and the included angle between the second end face of the crystal rod and the top end face is zero, that is, the second end face and the top end face are parallel.

[0053] Next, step S2 is performed to measure and adjust the crystal orientation angle of the crystal rod located in the fixture in order to find the target crystal orientation of the crystal rod. The crystal orientation of the crystal rod includes a horizontal crystal orientation and a vertical crystal orientation. The values ​​of the horizontal crystal orientation and the vertical crystal orientation both fall within the target crystal orientation range. The adjusted second end face of the crystal rod has an angle with the top end face of the fixture.

[0054] This step specifically includes the following steps:

[0055] First, an X-ray is emitted through a directional instrument, and the X-ray falls on the physical center point of the second end face of the crystal rod;

[0056] Next, the crystal plane orientation angle of the crystal rod is adjusted by rotating the bolt until the maximum value of the horizontal crystal orientation is found. At this time, the intersection of all the screws 22 is not the physical center point of the crystal rod, and the crystal rod is tilted after adjustment.

[0057] Next, the bolts are rotated to adjust the crystal plane orientation angles of the crystal rod, so that the horizontal crystal orientation value falls within the target crystal orientation range. The target crystal orientation range is not a cleavage range of the crystal rod, where the cleavage range is the angle range in which the crystal rod may crack along a certain crystallization direction. At this point, after adjustment, the crystal rod tilts again.

[0058] Next, the orientation instrument stops emitting X-rays and pulls the pin out of the first and second through holes. The rotary table 12 drives the crystal rod to rotate 90° and inserts the pin into a pair of first through holes and their corresponding second through holes to lock the rotary table 12, so that the rotary table cannot drive the crystal rod to rotate.

[0059] Next, an X-ray is emitted through a directional instrument, falling at the intersection of all screws 22. The crystal orientation angle of the crystal rod is adjusted by rotating the bolts until the maximum value of the perpendicular crystal orientation is found. At this point, after adjustment, the crystal rod is tilted again.

[0060] Next, the screw is rotated to adjust the crystal plane orientation angle of the crystal rod so that the value of the perpendicular crystal orientation falls within the target crystal orientation range. At this time, the center position of the screw is the center position of the crystal axis. After adjustment, the crystal rod is further tilted so that the second end face and the top end face are not parallel. That is, the second end face and the top end face intersect, that is, there is an acute angle between the two end faces.

[0061] Next, the second end face is marked so that it can be fully ground during subsequent grinding. In this embodiment, a marker is used to color the second end face of the crystal rod. This colored portion needs to be completely removed in subsequent processes to prevent insufficient grinding of the crystal rod.

[0062] Next, the pins are inserted into both pairs of first through holes and their corresponding second through holes to lock all the pins in place.

[0063] Next, step S3 is performed to grind the second end face so that the crystal orientation of the ground second end face is the target crystal orientation value, and the top end face of the fixture is set parallel to the ground second end face.

[0064] In detail, the crystal rod fixed on the fixture is fixed on the grinding fixture, and the second end face is ground to remove the mark, so that the crystal orientation of the ground second end face is the target crystal orientation value, and the top end face of the main body is parallel to the ground second end face.

[0065] Following step S3, the following is also included:

[0066] The crystal rod is bonded to the bonding machine at a preset angle. At this time, the crystal orientation of the crystal rod on the bonding machine is located within the target crystal orientation range, so that the bonding angle changes from random distribution to distribution within the target crystal orientation range.

[0067] In summary, this invention provides a method for optimizing the spin angle of a crystal rod before it is attached to the rod, comprising the following steps: Step S1: placing the crystal rod in a fixture, the crystal rod having a first end face and a second end face arranged opposite to each other, the bottom of the fixture being in contact with the first end face, and the top end face of the fixture being parallel to the second end face; Step S2: measuring and adjusting the crystal orientation angle of the crystal plane of the crystal rod located in the fixture to find the target crystal orientation of the crystal rod, the crystal orientation of the crystal rod including a horizontal crystal orientation and a vertical crystal orientation, the horizontal crystal orientation and the vertical crystal orientation being taken as... The values ​​all fall within the target crystal orientation range, and the adjusted second end face of the crystal rod has an angle with the top end face of the fixture; and step S3: grind the second end face so that the crystal orientation of the ground second end face is the target crystal orientation value, and the top end face of the fixture is parallel to the ground second end face. The grinding before sticking the rod can make the crystal orientation of the ground crystal rod (relative to the sticking machine) in the non-cleavage range, and realize that the sticking angle changes from random distribution to non-cleavage range distribution, thereby reducing the silicon wafer breakage rate.

[0068] Furthermore, it should be noted that, unless otherwise specified or indicated, the terms "first" and "second" in the specification are used only to distinguish the various components, elements, steps, etc. in the specification, and are not used to indicate the logical or sequential relationships between the various components, elements, steps, etc.

[0069] It is understood that although the present invention has been disclosed above with reference to preferred embodiments, these embodiments are not intended to limit the present invention. For any person skilled in the art, many possible variations and modifications can be made to the technical solutions of the present invention based on the disclosed technical content, or equivalent embodiments can be modified accordingly, without departing from the scope of the present invention. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the present invention shall still fall within the protection scope of the present invention.

Claims

1. A method for optimizing the spin angle of a sticky rod crystal, characterized in that, Includes the following steps: Step S1: Place the crystal rod in the fixture. The crystal rod has a first end face and a second end face that are arranged opposite to each other. The bottom of the fixture is in contact with the first end face, and the top end face of the fixture is parallel to the second end face. The fixture includes a main body and a rotary table. The main body includes a bottom and a top. A plurality of bolts are threaded on the outer circumferential surface of the top. The bolts are retractable and expandable along the radial direction of the main body. The crystal rod is fixed inside all the bolts. Step S2: Measure and adjust the crystal orientation angle of the crystal rod located in the fixture to find the target crystal orientation of the crystal rod. The crystal orientation of the crystal rod includes a horizontal crystal orientation and a vertical crystal orientation. The values ​​of the horizontal crystal orientation and the vertical crystal orientation both fall within the target crystal orientation range. After adjustment, there is an angle between the second end face of the crystal rod and the top end face of the fixture. The method for adjusting the horizontal crystal orientation to the target crystal orientation range includes: emitting X-rays through an orientation instrument, the X-rays falling on the physical center point of the second end face; adjusting the crystal orientation angle of the crystal rod by rotating the bolt until the maximum value of the horizontal crystal orientation is found, and the value of the horizontal crystal orientation falls within the target crystal orientation range; The method for adjusting the vertical crystal orientation to within the target crystal orientation range includes: the orientation instrument stops emitting X-rays, and the rotary table rotates the crystal rod by 90°; X-rays are emitted through the orientation instrument, and the X-rays fall at the intersection of all screws; the crystal orientation angle of the crystal rod is adjusted by rotating the bolts until the maximum value of the vertical crystal orientation is found, and the vertical crystal orientation value falls within the target crystal orientation range; and Step S3: Grind the second end face so that the crystal orientation of the ground second end face is the target crystal orientation value, and the top end face of the fixture is set parallel to the ground second end face.

2. The method for optimizing the spin angle of a sticky rod crystal as described in claim 1, characterized in that, The rotary table is rotatably connected to the end face of the bottom. The rotary table is rotatably mounted on the bottom end face, and the first end face is located on the rotary table; and When the crystal rod is placed in the fixture, the length of the crystal rod is greater than the length of the main body, so that the second end face extends out of the top.

3. The method for optimizing the spin angle of a sticky rod crystal as described in claim 1, characterized in that, Step S1 includes: The outer peripheral surface of the crystal rod is subjected to rolling grinding to ensure that the diameter of the crystal rod from the first end face to the second end face remains consistent. The crystal rod is cut to obtain a crystal rod of a predetermined length; The crystal rod is placed in the fixture, with the second end face and the top end face arranged parallel to each other.

4. The method for optimizing the spin angle of a sticky rod crystal as described in claim 1, characterized in that, Before finding the target crystal orientation of the crystal rod and grinding the second end face, the following steps are also included: Mark the second end face.

5. The method for optimizing the spin angle of a sticky rod crystal as described in claim 4, characterized in that, Step S3 specifically includes: The crystal rod fixed on the fixture is fixed on the grinding fixture, and the second end face is ground to remove the mark, so that the crystal orientation of the ground second end face is the target crystal orientation value. The top end face of the fixture is parallel to the ground second end face.

6. The method for optimizing the spin angle of a sticky rod crystal as described in claim 1, characterized in that, Following step S3, the following is also included: The crystal rod is bonded to the rod bonding machine at a preset angle.

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