Large-angle motion end effector and dead angle-free wafer robot

Abstract

The application provides a large-angle motion end effector, which comprises a first end effector and a second end effector, a first transmission assembly and a second transmission assembly, the first transmission assembly comprises a first hollow rotating shaft, the second transmission assembly comprises a second hollow rotating shaft, the second hollow rotating shaft is sleeved on the first hollow rotating shaft, the first end effector and the second end effector are connected with the first hollow rotating shaft and the second hollow rotating shaft respectively, and the first limiting structure comprises a first arc-shaped limiting groove and a second arc-shaped limiting groove which are arranged on the first end effector and the second end effector, and a movable pin which is movably arranged at two ends of the first arc-shaped limiting groove and the second arc-shaped limiting groove respectively. The application solves the problem that the end effector in the prior art cannot provide a large-angle wrist rotation function required by a more and more complex semiconductor process, thereby affecting the production efficiency.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing process technology, and in particular to a large-angle motion end effector and a wafer robot with no blind spots. Background Technology

[0002] In the semiconductor industry, cutting tiny cells from wafers to create various circuit element structures and make them into integrated circuit products with specific electrical functions is a common method of chip production. At the same time, due to the requirements of dust-free and unmanned chip production, the entire chip production process is highly automated, so the movement of wafers relies heavily on the assistance of semiconductor robots.

[0003] Semiconductor robots are robots designed for the transfer and handling of silicon-based and non-silicon-based wafers in the field of semiconductor manufacturing processes. They can be used in all wafer-type manufacturing processes and equipment. They are systems designed for use in semiconductor manufacturing environments that require high cleanliness, high safety, high reliability, high consistency, high repeatability, and high positioning accuracy. They are precision semiconductor wafer transport systems that can be used in semiconductor laboratories, small-batch semiconductor manufacturing processes, or large-scale semiconductor manufacturing environments, and are suitable for all semiconductor manufacturing process applications.

[0004] In existing manufacturing processes, wafers need to be frequently transferred between hundreds of processes. Wafer production lines have concentrated processes and high processing speeds. In many cases, wafer transfer robotic arms need to be able to cover the entire work area with a wide angle and no blind spots. At the same time, due to the routing requirements of the internal electrical control cables of the wafer, the wafer transfer robotic arm cannot rotate completely freely to avoid tangling. Limits need to be set on the rotation path. However, the rotation angle of existing wafer transfer robotic arms is limited by their limiting structure. For example, the wafer robot provided by Chinese Patent CN114131589B can only provide a relative rotation angle of ±168.5° between its upper and lower wrists, which cannot meet the wafer handling requirements of increasingly complex semiconductor processes. Summary of the Invention

[0005] In view of the shortcomings of the prior art described above, the technical problem to be solved by the present invention is to provide a large-angle motion end effector and a wafer robot without blind spots, so as to solve the problem that the end effector in the prior art cannot provide the large-angle wrist rotation function required by increasingly complex semiconductor manufacturing processes, thereby affecting production efficiency.

[0006] To solve the above-mentioned technical problems, the present invention provides a large-angle motion end effector, comprising:

[0007] First end effector and second end effector;

[0008] A first transmission assembly and a second transmission assembly, the first transmission assembly including a first hollow rotating shaft, the second transmission assembly including a second hollow rotating shaft, the second hollow rotating shaft being sleeved on the first hollow rotating shaft, the first end effector and the second end effector being respectively connected to the first hollow rotating shaft and the second hollow rotating shaft, the first hollow rotating shaft and the second hollow rotating shaft respectively driving the first end effector and the second end effector to rotate around the axis, and the first end effector being disposed above the second end effector;

[0009] The first limiting structure includes a first arc-shaped limiting groove and a second arc-shaped limiting groove formed at the bottom of the first end effector and the top of the second end effector, and a movable pin with its two ends respectively movably disposed in the first arc-shaped limiting groove and the second arc-shaped limiting groove. The relative rotation between the first end effector and the second end effector is realized by controlling the movable pin to slide in the first arc-shaped limiting groove and the second arc-shaped limiting groove.

[0010] As a more preferred embodiment, the large-angle motion end effector further includes a first drive component and a second drive component, which are respectively connected to the first transmission component and the second transmission component and drive the first end effector and the second end effector to move through the first transmission component and the second transmission component.

[0011] In a more preferred embodiment, the second drive assembly includes a second active drive wheel, a second passive drive wheel, a second drive belt, and a second drive motor. The second passive drive wheel is connected to the second hollow shaft, and the second active drive wheel is connected to the second drive motor. The second active drive wheel and the second passive drive wheel are connected by a second drive belt. The second drive motor drives the second hollow shaft to rotate via the second drive belt, thereby driving the second end effector to move.

[0012] As a more preferred embodiment, the large-angle motion end effector further includes a second limiting structure. The second limiting structure includes a limiting pin disposed on the second active transmission wheel and a limiting pin fixedly disposed on the rotation path of the limiting pin. The limiting pin and the limiting pin limit the rotation angle of the second end effector, thereby avoiding the entanglement of the electrical control cable and ensuring the stable operation of the wafer robot without dead angles of the present invention.

[0013] As a more preferred approach, the tooth ratio of the second active transmission wheel to the second passive transmission wheel is such that when the rotation angle limited by the second limiting structure on the second active transmission wheel is θ, since the tooth ratio of the second active transmission wheel to the second passive transmission wheel is 2:1, the corresponding rotation angle on the second passive transmission wheel is 2θ, that is, the rotation angle that the second end effector corresponding to the second passive transmission wheel can achieve is ±θ.

[0014] To address the aforementioned problems, the present invention also provides a wafer robot with no blind spots, comprising:

[0015] A fixed base, wherein a lifting mechanism is provided inside the fixed base;

[0016] The lower robotic arm is horizontally positioned, with one end rotatably mounted on the lifting mechanism.

[0017] The upper robotic arm is horizontally positioned, with one end rotatably mounted on the other end of the lower robotic arm. The other end of the upper robotic arm is provided with the aforementioned large-angle motion end effector. The upper robotic arm includes an inner cavity for accommodating the first transmission component and the second transmission component, and an extension port for the first end effector and the second end effector to extend out. The extension port is located on the other end of the upper robotic arm.

[0018] In a more preferred embodiment, the lower robotic arm includes a lower robotic arm body, a lower rotating shaft, and a lower drive assembly connected to the lower rotating shaft. The lower robotic arm body is connected to the lower rotating shaft, and the lower robotic arm body is driven to rotate through the lower rotating shaft.

[0019] As a more preferred embodiment, the lower robotic arm further includes a lower limiting structure. The lower limiting structure includes a lower limiting pin disposed at the end of the lower robotic arm body connected to the lower rotating shaft, and a lower limiting block fixedly disposed on the rotation path of the lower limiting pin. The rotation angle of the lower robotic arm is limited by the lower limiting pin and the lower limiting block, which avoids the entanglement of the electrical control cables disposed inside the lower robotic arm and ensures the stable operation of the wafer robot with no dead angle of the present invention.

[0020] As a more preferred embodiment, the upper robotic arm includes an upper robotic arm body and an upper drive assembly connected to the upper robotic arm body, the upper rotating shaft body is rotatably disposed at the other end of the lower robotic arm body, and the upper drive assembly is disposed in the inner cavity of the lower robotic arm.

[0021] As a more preferred embodiment, the upper robotic arm further includes an upper limit structure, which includes an upper limit pin disposed at the end where the lower robotic arm body connects to the upper robotic arm, and an upper limit block fixedly disposed on the rotation path of the upper limit pin. The rotation angle of the upper robotic arm is limited by the upper limit pin and the upper limit block, which avoids the entanglement of the internal electrical control cables and ensures the stable operation of the wafer robot with no dead angle of the present invention.

[0022] As described above, the large-angle motion end effector and the dead-angle-free wafer robot of the present invention have the following beneficial effects: When the large-angle motion end effector of the present invention is in use, if the arc angle corresponding to the first arc-shaped limiting groove is 2α, when the movable pin moves in the first arc-shaped limiting groove, the rotation angle that the second end effector can achieve is ±α; if the arc angle corresponding to the second arc-shaped limiting groove is 2β, when the movable pin moves in the second arc-shaped limiting groove, the rotation angle that the second end effector can achieve is ±β. That is, when the movable pin moves simultaneously in the first arc-shaped limiting groove and the second arc-shaped limiting groove, the relative rotation angle between the first end effector and the second end effector is ±(α+β), which increases the rotation angle of the end effector during the movement process. The invented wafer robot with no blind spots, through the aforementioned large-angle motion end effector, can provide a wider range of rotational handling angles when handling wafers, achieving more challenging motion trajectories and thus planning more efficient operating trajectories. The large-angle motion end effector and the wafer robot with no blind spots in this invention, through movable pins simultaneously positioned at both ends to limit the first and second arc-shaped limiting slots respectively, achieve a larger relative rotation angle between the first and second end effectors. This allows the corresponding wafer robot with no blind spots to plan more efficient operating trajectories when handling wafers, thereby solving the problem that existing end effectors cannot provide the large-angle wrist rotation function required by increasingly complex semiconductor processes, thus affecting production efficiency. Attached Figure Description

[0023] Figure 1 The image shown is a cross-sectional view of the dead-angle-free wafer robot of the present invention;

[0024] Figure 2 Displayed as Figure 1 A magnified view of a portion of region A in the middle;

[0025] Figure 3 The diagram shows the first hollow rotating shaft of the large-angle motion end effector of the present invention.

[0026] Figure 4 The diagram shown is a schematic of the dead-angle-free wafer robot of the present invention;

[0027] Figure 5 The diagram shows the lifting mechanism and upper and lower robotic arms of the wafer robot with no blind spots according to the present invention.

[0028] Figure 6 The diagram shows the upper limit structure of the large-angle motion end effector of the present invention.

[0029] Figure 7 The diagram shown is a schematic of the second arc-shaped limiting groove of the large-angle motion end effector of the present invention;

[0030] Figure 8 The diagram shown is a schematic of the first arc-shaped limiting groove of the large-angle motion end effector of the present invention;

[0031] Figure 9 The diagram shown is a schematic diagram of the second limiting structure of the large-angle motion end effector of the present invention.

[0032] Component designation explanation

[0033] 1. Fixed base

[0034] 11 Lifting Mechanism

[0035] 111 Lifting Base

[0036] 112 Lifting drive device

[0037] 113 Screw Structure

[0038] 113a lead screw

[0039] 113b Nut Seat

[0040] 114 Lifting reducer

[0041] 2. Lower robotic arm

[0042] 21 Lower robotic arm body

[0043] 211 Upper limit pin

[0044] 22 Lower shaft

[0045] 23. Driver Components

[0046] 231 Lower drive motor

[0047] 232 Lower Reducer

[0048] 3. Upper robotic arm

[0049] 31 Upper robotic arm body

[0050] 311 Upper Limit Block

[0051] 32 Upper Driver Components

[0052] 321 Upper drive motor

[0053] 322 Upper transmission belt

[0054] 323 Upper Reducer

[0055] 324 Upper drive wheel

[0056] 33 Rotary sealing mechanism

[0057] 331 Connecting flange

[0058] 332 First O-ring

[0059] 333, second O-ring

[0060] 4 Large-angle motion end effector

[0061] 41 First Drive Component

[0062] 411 First transmission wheel

[0063] 412 First transmission belt

[0064] 413 First drive motor

[0065] 42 First end effector

[0066] 421 First mounting bracket

[0067] 421a First arc-shaped limiting groove

[0068] 422 First end-effector wrist

[0069] 43 First transmission assembly

[0070] 431 First Hollow Shaft

[0071] 431a Bearing End

[0072] 431b Opening

[0073] 431c extension

[0074] 431d transmission end

[0075] 432 First Upper Bearing

[0076] 433 First O-ring

[0077] 434 First lower bearing

[0078] 435 First O-ring

[0079] 44 Bearing bracket

[0080] 441 Bearing Housing

[0081] 441a Second arc-shaped limiting groove

[0082] 442 First Bearing Cover Plate

[0083] 45 Second drive component

[0084] 451 Second Passive Drive Wheel

[0085] 452 Second transmission belt

[0086] 453 Second drive motor

[0087] 454 Second drive wheel

[0088] 454a Limit Pin

[0089] 454b limiting pin

[0090] 46 Second end effector

[0091] 461 Second mounting bracket

[0092] 462 Second end-effector wrist

[0093] 47 Second transmission assembly

[0094] 471 Second Hollow Shaft

[0095] 471a Bearing section

[0096] 471b Connecting part

[0097] 471c Transmission Unit

[0098] 472 Second Bearing

[0099] 473 Second O-ring

[0100] 48 Second bearing cover plate

[0101] 49 Activity Sales Detailed Implementation

[0102] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

[0103] It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings of this specification are merely for illustrative purposes to aid those skilled in the art and are not intended to limit the scope of the invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, without affecting the effectiveness and purpose of the invention, should still fall within the scope of the technical content disclosed in this invention. Furthermore, the terms such as "upper," "lower," "left," "right," "middle," and "one" used in this specification are merely for clarity and are not intended to limit the scope of the invention. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of the invention's implementation.

[0104] like Figures 1 to 9 As shown, the present invention provides a large-angle motion end effector 4, comprising:

[0105] First end effector 42 and second end effector 46;

[0106] A first transmission assembly 43 and a second transmission assembly 47 are included. The first transmission assembly 43 includes a first hollow rotating shaft 431, and the second transmission assembly 47 includes a second hollow rotating shaft 471. The second hollow rotating shaft 471 is sleeved on the first hollow rotating shaft 431. The first end effector 42 and the second end effector 46 are respectively connected to the first hollow rotating shaft 431 and the second hollow rotating shaft 471. The first hollow rotating shaft 431 and the second hollow rotating shaft 471 respectively drive the first end effector 42 and the second end effector 46 to rotate around the axis, and the first end effector 42 is disposed above the second end effector 46.

[0107] The first limiting structure includes a first arc-shaped limiting groove 421a and a second arc-shaped limiting groove 441a formed at the bottom of the first end effector 42 and the top of the second end effector 46, and a movable pin 49 whose two ends are respectively movably disposed in the first arc-shaped limiting groove 421a and the second arc-shaped limiting groove 441a. By controlling the movable pin 49 to slide in the first arc-shaped limiting groove 421a and the second arc-shaped limiting groove 441a, the relative rotation between the first end effector 42 and the second end effector 46 can be realized.

[0108] like Figure 7 as well as Figure 8As shown, when the large-angle motion end effector 4 of the present invention is in use, if the arc angle corresponding to the first arc-shaped limiting groove 421a is 2α, when the movable pin 49 moves in the first arc-shaped limiting groove 421a, the rotation angle that the second end effector 46 can achieve is ±α; if the arc angle corresponding to the second arc-shaped limiting groove 441a is 2β, when the movable pin 49 moves in the second arc-shaped limiting groove 441a, the rotation angle that the second end effector 46 can achieve is ±β. That is, when the movable pin 49 moves simultaneously in the first arc-shaped limiting groove 421a and the second arc-shaped limiting groove 441a, the relative rotation angle between the first end effector 42 and the second end effector 46 is ±(α+β), which increases the rotation angle of the end effector during the movement process.

[0109] More specifically, in this embodiment, such as Figure 8 As shown, the arc angle corresponding to the first arc-shaped limiting groove 421a is 356°. When the movable pin 49 moves in the first arc-shaped limiting groove 421a, the second end effector 46 can achieve a rotation angle of ±178°. Figure 7 As shown, the arc angle corresponding to the second arc-shaped limiting groove 441a is 84°. When the movable pin 49 moves in the second arc-shaped limiting groove 441a, the rotation angle that the second end effector 46 can achieve is ±42°. That is, when the movable pin 49 moves simultaneously in the first arc-shaped limiting groove 421a and the second arc-shaped limiting groove 441a, the relative rotation angle between the first end effector 42 and the second end effector 46 is ±220°. The above rotation angle setting can improve the relative rotation angle between the first end effector 42 and the second end effector 46 without tangling the electrical control cable, thereby enriching the flexibility of the large-angle motion end effector 4 in this embodiment.

[0110] In this embodiment, the first end effector 42 includes a first end effector wrist 422. The first end effector 42 is rotatably mounted on the first transmission assembly 43. The first transmission assembly 43 includes a first hollow shaft 431, a first upper bearing 432, and a first lower bearing 434. The first hollow shaft 431 includes a cavity for accommodating an electrical control cable, and an opening for the electrical control cable to pass through is provided on the side wall of the cavity. The first upper bearing 432 and the first lower bearing 434 are respectively sleeved on the upper and lower sides of the opening. The first transmission assembly and the first drive... The components 41 are connected, and the first drive component 41 drives the first end effector wrist 422 to move through the first transmission component 43. Thus, the first drive component 41 drives the first end effector 42 to move. The cavity and opening provided on the first hollow shaft 431 of the present invention also meet the requirements for the passage of the electrical control cable. At the same time, the first upper bearing 432 and the first lower bearing 434 provided on the upper and lower sides of the opening reinforce the structure of the first hollow shaft 431, improve the load-bearing capacity, and reduce its deformation when bearing a large load, reduce rotational runout, and make the movement more reliable.

[0111] In this embodiment, as Figure 1 , Figure 2 as well as Figure 3 As shown, the first hollow rotating shaft 431 includes a bearing end 431a, an opening 431b, an extension 431c, and a transmission end 431d, which are integrally formed in sequence. The first end effector 42 is connected to the bearing end 431a. The opening is provided in the opening 431b. The transmission end 431d is connected to the first driving device. The first upper bearing 432 is sleeved on the bearing end 431a, and the first lower bearing 434 is sleeved on the extension 431c.

[0112] In this embodiment, as Figure 1 as well as Figure 2 As shown, the first end effector 42 further includes a first mounting bracket 421, which is connected to the bearing end 431a, and the first end effector wrist 422 is horizontally disposed on the mounting bracket; furthermore, in this embodiment, as Figure 8 As shown, the first arc-shaped limiting groove 421a is disposed at the bottom of the first mounting bracket 421.

[0113] In this embodiment, as Figure 1 as well as Figure 2As shown, the first drive assembly 41 includes a first transmission wheel 411, a first transmission belt 412, and a first drive motor 413. The first transmission wheel 411 is connected to the transmission end 431d. The first drive motor 413 drives the first hollow shaft 431 to rotate through the first transmission belt 412, thereby driving the first end effector 42 to move. Using the transmission wheel and transmission belt for transmission allows for more reasonable space planning, thus providing sufficient space to accommodate drive devices that can meet high load requirements.

[0114] In this embodiment, as Figure 1 as well as Figure 2 As shown, the large-angle motion end effector 4 of the present invention further includes a second drive component 45, a second transmission component 47 connected to the second drive component 45, and a second end effector 46 rotatably disposed on the second transmission component 47.

[0115] In this embodiment, as Figure 1 as well as Figure 2 As shown, the second transmission assembly 47 includes a second hollow rotating shaft 471 and a second bearing 472. The second hollow rotating shaft 471 is sleeved on the first hollow rotating shaft 431 and connected by the first lower bearing 434. The second bearing 472 is sleeved on the outside of the second hollow rotating shaft 471 and fixedly installed. The second transmission assembly 47 is connected to the second drive assembly 45. The second drive assembly 45 drives the second end effector 46 to move through the second transmission assembly 47. The first hollow rotating shaft 431 and the second hollow rotating shaft 471 are connected by the first lower bearing 434, realizing the free rotation of the first hollow rotating shaft 431 and the second hollow rotating shaft 471 without interference, thereby realizing the free movement of the first end effector 42 and the second end effector 46.

[0116] In this embodiment, as Figure 1 as well as Figure 2 As shown, the second hollow rotating shaft 471 includes a bearing portion 471a, a connecting portion 471b, and a transmission portion 471c, which are integrally formed in sequence. The second end effector 46 is connected to the bearing portion 471a. The connecting portion 471b is connected to the outer side of the first lower bearing 434. The second hollow rotating shaft 471 is connected to the inner side of the second bearing 472 through the support portion.

[0117] In this embodiment, as Figure 1 as well as Figure 2As shown, the second drive assembly 45 includes a second passive drive wheel 451, a second active drive wheel 454, a second drive belt 452, and a second drive motor 453. The second passive drive wheel 451 is connected to the second hollow shaft 471, and the second active drive wheel 454 is connected to the second drive motor 453. The second active drive wheel 454 and the second passive drive wheel 451 are connected by the second drive belt 452. The second drive motor 453 drives the second hollow shaft 471 to rotate through the second drive belt 452, thereby driving the second end effector 46 to move. By using drive wheels and drive belts for transmission, space can be planned more rationally, thus providing sufficient space to accommodate drive devices that can meet high load requirements.

[0118] In this embodiment, as Figure 9 As shown, the large-angle motion end effector 4 also includes a second limiting structure. The second limiting structure includes a limiting pin 454a disposed on the second active transmission wheel 454 and a limiting pin 454b fixedly disposed on the rotation path of the limiting pin 454a. The limiting pin 454a and the limiting pin 454b limit the rotation angle of the second end effector 46, avoiding the entanglement of the electrical control cable and ensuring the stable operation of the wafer robot without dead angles of the present invention.

[0119] Furthermore, in this embodiment, as Figure 9 As shown, the gear ratio of the second active transmission wheel 454 to the second passive transmission wheel 451 is 2:1. When the rotation angle limited by the second limiting structure on the second active transmission wheel 454 is θ, since the gear ratio of the second active transmission wheel 454 to the second passive transmission wheel 451 is 2:1, the corresponding rotation angle on the second passive transmission wheel 451 is 2θ. That is, the rotation angle that the second end effector 46 corresponding to the second passive transmission wheel 451 can achieve is ±θ. If the limiting structure is only set on the second passive transmission wheel 451, the maximum rotation angle it can achieve is ±180°. In this embodiment, the gear ratio is controlled and the limiting structure is set on the second active transmission wheel 451. The second limiting structure of wheel 454 can exceed the above-mentioned limit rotation angle; more specifically, in this embodiment, the rotation angle limited by the second limiting structure on the second active transmission wheel 454 is ±175°. When the gear ratio of the second active transmission wheel 454 to the second passive transmission wheel 451 is 2:1, the rotation angle that the second end effector 46 corresponding to the second passive transmission wheel 451 can achieve is ±350°. At the same time, the rotation angle that the second end effector 46 can achieve can be quickly adjusted by adjusting the gear ratio of the second active transmission wheel 454 to the second passive transmission wheel 451, which further enriches the flexibility of the large-angle motion end effector 4 in this embodiment.

[0120] In this embodiment, as Figure 1 As shown, the second end effector 46 includes a second mounting bracket 461 and a second end effector wrist 462. The second mounting bracket 461 is disposed on the support portion 471a, and the second end effector wrist 462 is horizontally disposed and connected to the second mounting bracket 461 at one end. The second mounting bracket 461 is directly disposed on the support portion 471a, and the second end effector 46 is driven to rotate through the support portion 471a of the second hollow rotating shaft 471.

[0121] In this embodiment, as Figure 1 as well as Figure 2 As shown, the second mounting bracket 461 is also provided with a first bearing bracket 44, which includes a bearing seat 441 and a first bearing cover plate 442. The outer ring of the first upper bearing 432 is fixed to the bearing seat 441, and the first upper bearing 432 is covered from above by the bearing cover plate. By cleverly setting the bearing bracket 44 for fixing the first upper bearing 432 on the second mounting bracket 461, the overall structure of the large-angle motion end effector 4 provided by the present invention is more compact and the space utilization is more efficient. At the same time, in this embodiment, as Figure 7 As shown, the second arc-shaped limiting groove 441a is disposed on the bearing seat 441, and the bearing seat 441 is provided with a wiring port that communicates with the opening on the opening 431b. The second arc-shaped limiting groove 441a is disposed on the top cover of the bearing seat 441 corresponding to the wiring port. The arc angles of the second arc-shaped limiting groove 441a and the wiring port are consistent, so that when the movable pin 49 moves in the second arc-shaped limiting groove 441a, the first end effector 42 can rotate relative to the second end effector 46 by a corresponding rotation angle. Furthermore, in this embodiment, the arc angle of the second arc-shaped limiting groove 441a and the wiring port is 84°. This angle takes into account the mechanical strength of the bearing seat 441 after the wiring port is provided, and at the same time increases the relative rotation angle between the first end effector 42 and the second end effector 46.

[0122] Furthermore, in this embodiment, as Figure 1 as well as Figure 2As shown, the bottom of the bearing housing 441 is pressed against the connecting portion 471b of the second hollow rotating shaft 471, while limiting the first lower bearing 434. A first lower O-ring 435 is provided in the gap between the bottom of the bearing housing 441 and the first hollow rotating shaft 431 to provide the sealing performance of the entire device and prevent dust generated during the rotation of the first lower bearing 434 from overflowing from the gap between the bearing housing 441 and the first hollow rotating shaft 431. At the same time, a first upper O-ring 433 is provided in the gap between the top of the bearing housing 441 and the first hollow rotating shaft 431 to improve the sealing performance and prevent dust generated during the rotation of the first upper bearing 432 from overflowing from the gap between the bearing housing 441, the first bearing cover plate 442, and the first hollow rotating shaft 431. Furthermore, in this embodiment, the first upper bearing 432 is fixed above the first upper O-ring 433.

[0123] like Figure 4 As shown, the present invention also provides a wafer robot with no blind spots, comprising:

[0124] A fixed base 1, wherein a lifting mechanism 11 is provided inside the fixed base 1;

[0125] The lower robotic arm 2 is horizontally positioned, with one end rotatably mounted on the lifting mechanism 11.

[0126] The upper robotic arm 3 is horizontally positioned, with one end rotatably mounted at the other end of the lower robotic arm 2. The other end of the upper robotic arm 3 is provided with the aforementioned large-angle motion end effector 4. The upper robotic arm 3 includes an inner cavity for accommodating the first transmission component 43 and the second transmission component 47, and an extension port for the first end effector 42 and the second end effector 46 to extend out. The extension port is located at the other end of the upper robotic arm 3.

[0127] The wafer robot of the present invention, through the aforementioned large-angle motion end effector 4, can provide a wider range of rotational handling angles when handling wafers, and achieve more challenging motion trajectories, that is, it can plan more efficient running trajectories.

[0128] In this embodiment, as Figure 1 as well as Figure 2As shown, the wafer robot with no blind spots also includes the aforementioned second end effector 46, as well as the second drive assembly 45 and the second transmission assembly 47 connected to the second drive assembly 45. The second transmission assembly 47 is connected to the second end effector 46. The second transmission assembly 47 includes a second hollow shaft 471 and a second bearing 472. The second hollow shaft 471 is sleeved on the first hollow shaft 431 and connected through the first lower bearing 434. The second bearing 472 is sleeved on the outside of the second hollow shaft 471 and fixedly installed. Further, in this embodiment, the second bearing 472 is fixed to the extension of the upper robotic arm 3.

[0129] Furthermore, in this embodiment, as Figure 1 as well as Figure 2 As shown, the second hollow rotating shaft 471 includes a bearing portion 471a, a connecting portion 471b, and a transmission portion 471c, which are integrally formed in sequence. The outer contour of the second hollow rotating shaft 471 has a trumpet-shaped diffusion structure. The corresponding shaft radius increases from the transmission portion 471c and the connecting portion 471b to the bearing portion 471a. A step is provided at the connection between the transmission portion 471c and the connecting portion 471b. The step is mounted on the second bearing 472. At the same time, a second bearing cover plate 48 is provided above the second bearing 472 to limit the second bearing 472. A second O-ring 473 is provided in the gap between the second bearing cover plate 48 and the connecting portion 471b to improve the airtightness of the entire device and prevent dust generated during the rotation of the second bearing 472 from overflowing from the gap between the second bearing cover plate 48 and the second hollow rotating shaft 471.

[0130] Furthermore, in this embodiment, as Figure 1 As shown, the first drive assembly 41 and the second drive assembly 45 are located in the middle of the inner cavity of the upper robotic arm 3. They transmit driving force to the first drive wheel 411 and the second drive wheel through the first drive belt 412 and the second drive belt 452, respectively, thereby driving the first end effector 42 and the second end effector 46 to move. This structure makes reasonable use of the inner cavity space of the upper robotic arm 3, thus providing sufficient space to accommodate the first drive motor 413 and the second drive motor 453, which can meet the requirements of large loads.

[0131] In this embodiment, as Figure 5As shown, the lifting mechanism 11 includes a lifting base 111, a lifting drive device 112, and a lead screw structure 113. The lead screw structure 113 includes a lead screw 113a and a nut seat 113b disposed on the lead screw 113a. The lead screw 113a is connected to the lifting drive device 112, the lifting base 111 is connected to the nut seat 113b, and the lower robotic arm 2 is connected to the lifting base 111. The lifting drive device 112 drives the lead screw 113a to rotate clockwise or counterclockwise, thereby driving the lifting base 111 to rise or fall, thus controlling the vertical movement of the corresponding first end effector 42 and second end effector 46. Furthermore, in this embodiment, the lifting mechanism 11 also includes a lifting reducer 114 connected to the lifting drive device 112.

[0132] In this embodiment, as Figure 1 as well as Figure 5 As shown, the lower robotic arm 2 includes a lower robotic arm body 21, a lower rotating shaft 22, and a lower drive assembly 23 connected to the lower rotating shaft 22. The lower robotic arm body 21 is connected to the lower rotating shaft 22, and the lower robotic arm body 21 is driven to rotate through the lower rotating shaft 22. The lower drive assembly 23 is disposed on the lifting base 111. The rotation of the lower drive assembly 23 drives the lower rotating shaft 22 to rotate, thereby driving the lower robotic arm 2 to rotate in the horizontal direction, thereby achieving the effect of controlling the movement of the corresponding first end effector 42 and second end effector 46 in the horizontal direction. Further, in this embodiment, the lower drive assembly 23 includes a lower drive motor 231 and a lower reducer 232 connected to the lower drive motor 231. The lower drive motor 231 is connected to the lower rotating shaft 22 through the lower reducer 232.

[0133] In this embodiment, the lower robotic arm 2 further includes a lower limiting structure. The lower limiting structure includes a lower limiting pin disposed at the end of the lower robotic arm body 21 connected to the lower rotating shaft 22, and a lower limiting block fixedly disposed on the rotation path of the lower limiting pin. The lower limiting block is fixed inside the fixed base 1. The rotation angle of the lower robotic arm 2 is limited by the lower limiting pin and the lower limiting block, which avoids the entanglement of the electrical control cables disposed inside the lower robotic arm 2 and ensures the stable operation of the wafer robot without dead angles of the present invention. Specifically, in this embodiment, the rotation angle of the lower robotic arm 2 is ±171°, which can provide a wider range of rotation and handling angles. The wafer robot without dead angles of this embodiment can also plan a more efficient running trajectory accordingly.

[0134] In this embodiment, as Figure 1 as well as Figure 5As shown, the upper robotic arm 3 includes an upper robotic arm body 31 and an upper drive assembly 32 connected to the upper robotic arm body 31. The upper rotating shaft body is rotatably disposed at the other end of the lower robotic arm body 21. The upper drive assembly 32 is disposed in the inner cavity of the lower robotic arm 2. The upper drive assembly 32 includes an upper reducer 323, an upper transmission wheel 324, an upper drive motor 321, and an upper transmission belt 322. The upper robotic arm body 31 is connected to the transmission belt. The upper drive motor 321 drives the upper transmission wheel 324 through the upper reducer 323 connected to the upper transmission belt 322, thereby driving the upper robotic arm 3 to rotate in the horizontal direction, thereby achieving the effect of controlling the movement of the corresponding first end effector 42 and second end effector 46 in the horizontal direction.

[0135] In this embodiment, as Figure 5 As shown, the upper robotic arm 3 also includes a rotary sealing mechanism 33, which includes a connecting flange 331, an upper first O-ring 332, and an upper second O-ring 333. The upper first O-ring 332 and the upper second O-ring 333 are used to seal the gaps between the connecting flange 331 and the upper robotic arm 3 and the lower robotic arm 2, respectively. The connecting flange 331 is connected to the upper reducer, and the upper reducer is fixed to the upper robotic arm 3 through the connecting flange 331.

[0136] In this embodiment, as Figure 6 As shown, the upper robotic arm 3 also includes an upper limit structure. The upper limit structure includes an upper limit pin 211 disposed at the end where the lower robotic arm body 21 connects to the upper robotic arm 3, and an upper limit block 311 fixedly disposed on the rotation path of the upper limit pin 211. The upper limit block 311 is fixed on the upper robotic arm body 31. The rotation angle of the upper robotic arm 3 is limited by the upper limit pin 211 and the upper limit block 311, which avoids the entanglement of the electrical control cables disposed inside the upper robotic arm 3 and ensures the stable operation of the wafer robot without dead angles of the present invention. Specifically, in this embodiment, the rotation angle of the upper robotic arm 3 is ±176°, which can provide a wider range of rotation and handling angles. The wafer robot without dead angles of this embodiment can also plan a more efficient running trajectory accordingly.

[0137] In summary, the large-angle motion end effector and the dead-angle-free wafer robot of the present invention, through the simultaneous movable pins 49 at both ends, limit the first arc-shaped limiting groove 421a and the second arc-shaped limiting groove 441a respectively, achieving a larger relative rotation angle between the first end effector 42 and the second end effector 46. This allows the corresponding dead-angle-free wafer robot to plan a more efficient running trajectory when handling wafers, thus solving the problem that existing end effectors cannot provide the large-angle wrist rotation function required by increasingly complex semiconductor processes, thereby affecting production efficiency. Therefore, the present invention effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0138] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A large angle motion end effector characterized by, Comprise: First end effector (42) and second end effector (46); First transmission assembly (43) and second transmission assembly (47), the first transmission assembly (43) comprises first hollow shaft (431), the second transmission assembly (47) comprises second hollow shaft (471), the second hollow shaft (471) is set on the first hollow shaft (431), the first end effector (42) and second end effector (46) are connected with the first hollow shaft (431) and second hollow shaft (471) respectively, the first hollow shaft (431) and second hollow shaft (471) drive the first end effector (42) and second end effector (46) to rotate around the axis respectively, and the first end effector (42) is arranged above the second end effector (46); First limiting structure, the first limiting structure comprises first arc-shaped limiting slot (421a) and second arc-shaped limiting slot (441a) that are opened in the bottom of the first end effector (42) and the top of the second end effector (46), and movable pin (49) that is movably arranged in the first arc-shaped limiting slot (421a) and the second arc-shaped limiting slot (441a) respectively, the relative rotation between the first end effector (42) and the second end effector (46) is realized by controlling the movable pin (49) to slide in the first arc-shaped limiting slot (421a) and the second arc-shaped limiting slot (441a) respectively;The corresponding arc angle of first arc-shaped limiting slot (421a) is 2α, when the movable pin (49) moves in the first arc-shaped limiting slot (421a), the corresponding rotation angle that the second end effector (46) can realize is ±α;If the corresponding arc angle of second arc-shaped limiting slot (441a) is 2β, when the movable pin (49) moves in the second arc-shaped limiting slot (441a), the corresponding rotation angle that the second end effector (46) can realize is ±β, that is, when the movable pin (49) moves in the first arc-shaped limiting slot (421a) and the second arc-shaped limiting slot (441a) simultaneously, the relative rotation angle between the first end effector (42) and the second end effector (46) is ± (α+β).

2. The large angle motion end effector of claim 1, wherein: The large-angle motion end effector mechanism (4) further comprises first drive assembly (41) and second drive assembly (45), the first drive assembly (41) and the second drive assembly (45) are connected with the first transmission assembly (43) and the second transmission assembly (47) respectively and drive the first end effector (42) and the second end effector (46) to act through the first transmission assembly (43) and the second transmission assembly (47).

3. The large angle motion end effector of claim 2, wherein: The second driving assembly (45) comprises a second driving motor (453), a second driving wheel (454), a second driven wheel (451) and a second transmission belt (452), the second driven wheel (451) is connected with the second hollow rotating shaft (471), the second driving wheel (454) is connected with the second driving motor (453), the second driving wheel (454) and the second driven wheel (451) are connected through the second transmission belt (452), and the second driving motor (453) drives the second hollow rotating shaft (471) to rotate through the second transmission belt (452), so as to drive the second end effector (46) to act.

4. The large angle motion end effector of claim 3, wherein: The large-angle motion end effector (4) further comprises a second limiting structure, the second limiting structure comprises a limiting pin (454a) arranged on the second driving wheel (454) and a limiting nail (454b) fixedly arranged on a rotating path of the limiting pin (454a).

5. The large angle motion end effector of claim 4, wherein: The gear ratio of the second driving wheel (454) to the second driven wheel (451) is 2:

1.

6. A dead corner free wafer robot, characterized by, It comprises: A fixed base (1) is provided with a lifting mechanism (11) inside; A lower mechanical arm (2) is horizontally arranged, and one end thereof is rotationally arranged on the lifting mechanism (11); An upper mechanical arm (3) is horizontally arranged, and one end thereof is rotationally arranged on the other end of the lower mechanical arm (2), and the large-angle motion end effector (4) of any one of claims 1 to 5 is arranged at the other end of the upper mechanical arm (3), the upper mechanical arm (3) comprises an inner cavity accommodating the first driving assembly (43) and the second driving assembly (47) and an outlet through which the first end effector (42) and the second end effector (46) extend, and the outlet is arranged at the other end of the upper mechanical arm (3).

7. The no-dead-zone wafer robot of claim 6, wherein: The lower mechanical arm (2) comprises a lower mechanical arm body (21), a lower rotating shaft (22) and a lower driving assembly (23) connected with the lower rotating shaft (22), the lower mechanical arm body (21) is connected with the lower rotating shaft (22) and is driven to rotate by the lower rotating shaft (22).

8. The no-dead-zone wafer robot of claim 7, wherein: The lower mechanical arm (2) further comprises a lower limiting structure, the lower limiting structure comprises a lower limiting pin arranged at one end of the lower mechanical arm body (21) connected with the lower rotating shaft (22) and a lower limiting block fixedly arranged on a rotating path of the lower limiting pin.

9. The no-dead-zone wafer robot of claim 7, wherein: The upper mechanical arm (3) comprises an upper mechanical arm body (31) and an upper driving assembly (32) connected with the upper mechanical arm body (31), the upper mechanical arm body (31) is rotationally arranged at the other end of the lower mechanical arm body (21), and the upper driving assembly (32) is arranged in the inner cavity of the lower mechanical arm (2).

10. The no-dead-zone wafer robot of claim 9, wherein: The upper mechanical arm (3) further comprises an upper limiting structure, which comprises an upper limiting pin (211) arranged at the end of the lower mechanical arm body (21) connected with the upper mechanical arm (3), and an upper limiting block (311) fixedly arranged on the rotating path of the upper limiting pin (211).

Images