Correction device and correction method

Abstract

The disclosure provides a correction device and a correction method, and relates to the technical field of semiconductors. The correction device is used for correcting the relative position between an edge ring and a functional device of a semiconductor device, and comprises a support rod, a detection device and a controller. One end of the support rod is relatively fixed, and the other end is respectively installed in a plurality of mounting holes of the functional device, and the support rod is arranged obliquely. The detection device is arranged on the support rod one by one, and is used for detecting first distance information between the detection device and the edge ring. The controller is electrically connected with the detection device. The disclosure detects through the detection device on each support rod, obtains the first distance information between the detection device and the edge ring, and then corrects the position of the edge ring through the plurality of first distance information, effectively improves the measurement accuracy, and further ensures the consistency of the key size of the semiconductor structure, and effectively improves the yield of the semiconductor structure.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of semiconductor technology, and in particular, to a correction device and a correction method. BACKGROUND

[0002] In the process of a semiconductor structure, etching is needed for the semiconductor structure in different processes. Etching technology can be divided into wet etching and dry etching, and etching technology is an important step in semiconductor manufacturing process, microelectronic manufacturing process and micro-nano manufacturing process.

[0003] In the process of etching the semiconductor structure, the relative distance between the edge ring and the electrostatic chuck needs to be corrected and adjusted.

[0004] The current correction and adjustment method for the edge ring includes placing the edge ring by visual inspection, and measuring the relative distance between the edge of the edge ring and the edge of the electrostatic chuck by using a vernier caliper, so as to correct and adjust the position of the edge ring.

[0005] However, the above-mentioned correction and adjustment method of the relative position of the edge ring has measurement error, so that the critical dimension of the subsequent semiconductor structure is not easy to control, and thus the performance and yield of the semiconductor structure are reduced. SUMMARY

[0006] The following is a summary of the subject matter of the detailed description of the present disclosure. This summary is not intended to limit the scope of protection of the claims.

[0007] The present disclosure provides a correction device and a correction method.

[0008] A first aspect of the embodiments of the present disclosure provides a correction device for correcting the relative position between an edge ring and a functional device of a semiconductor device, the correction device comprising: a plurality of support rods, one end of the plurality of support rods being relatively fixed, the other end of the plurality of support rods being respectively installed in a plurality of mounting holes of the functional device, the support rods being inclined with respect to the functional device;

[0009] a plurality of detection devices, the detection devices being arranged on the support rods, the detection devices being arranged one by one corresponding to the support rods, the detection devices being used to detect first distance information between the detection devices and the edge ring;

[0010] a controller, respectively electrically connected with the plurality of detection devices.

[0011] According to some embodiments of the present disclosure, the detection device comprises a detection unit, the detection unit being capable of rotating with respect to the support rod, the detection unit being used to detect the first distance information between the detection unit and the edge ring.

[0012] According to some embodiments of the present disclosure, the detection unit comprises a laser ranging sensor.

[0013] According to some embodiments of the present disclosure, the detection device further comprises a display unit, which is in communication connection with the detection unit.

[0014] The display unit is configured to display the first distance information.

[0015] According to some embodiments of the present disclosure, the included angles between the plurality of support rods and the functional device are all the same.

[0016] According to some embodiments of the present disclosure, the ends of the plurality of support rods away from the functional device have a common intersection point; or,

[0017] The extension lines of the ends of the plurality of support rods away from the functional device have a common intersection point; or,

[0018] The normal projections of the plurality of support rods on the functional device have a common midpoint.

[0019] According to some embodiments of the present disclosure, the common intersection point or the common midpoint is located on a vertical line passing through the center point of the functional device.

[0020] According to some embodiments of the present disclosure, the correction device further comprises a fixing member, which is configured to fix the ends of the plurality of support rods away from the functional device.

[0021] According to some embodiments of the present disclosure, the fixing member comprises a fixing seat, which is provided with a plurality of insertion holes, and the ends of the plurality of support rods are respectively inserted into the plurality of insertion holes.

[0022] According to some embodiments of the present disclosure, the correction device further comprises a plurality of locking members, and the support rods are fixed to the fixing seat by the locking members.

[0023] According to some embodiments of the present disclosure, the number of support rods is at least three.

[0024] The second aspect of the present disclosure provides a correction method applied to the correction device as described above, and the correction method comprises:

[0025] Obtaining first distance information detected by each detection device, wherein the first distance information is used to represent the distance between each detection device and the edge ring;

[0026] Obtaining second distance information of each support rod, wherein the second distance information is used to represent the geometric positional relationship between the two ends of the support rod and the functional device.

[0027] determine a relative distance between the functional device and the edge ring in a region where the support rod is located according to the first distance information and the second distance information;

[0028] adjust the position of the edge ring according to a difference between the relative distances.

[0029] According to some embodiments of the present disclosure, the adjusting the position of the edge ring according to the difference between the relative distances comprises:

[0030] adjusting the position of the edge ring when the difference exceeds a preset threshold range.

[0031] According to some embodiments of the present disclosure, the obtaining the second distance information of each support rod, the second distance information being used to represent a geometric positional relationship between two end portions of the support rod and the functional device comprises:

[0032] obtaining a first length, the first length being used to represent a distance between the detection device and a mounting hole on the functional device;

[0033] obtaining an inclination angle of the support rod, the inclination angle being used to represent an acute angle between the support rod and the functional device;

[0034] obtaining a second length, the second length being used to represent a distance between the mounting hole and an edge of the functional device.

[0035] According to some embodiments of the present disclosure, the determining the relative distance between the functional device and the edge ring in the region where the support rod is located according to the first distance information and the second distance information comprises:

[0036] determining the relative distance according to the first distance information, the first length, the inclination angle and the second length.

[0037] The correction device and the correction method provided by the embodiments of the present disclosure can effectively improve the measurement accuracy by setting a detection device on each support rod, obtaining the first distance information between the detection device and the edge position of the edge ring by the detection device, and then correcting the relative position of the edge ring by comparing a plurality of first distance information, thereby ensuring the consistency of the key size of the semiconductor structure and improving the yield of the semiconductor structure.

[0038] Other aspects can become apparent from the following detailed description, taken in conjunction with the accompanying drawings, illustrating specifically as examples. BRIEF DESCRIPTION OF DRAWINGS

[0039] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the present disclosure and, together with the description, serve to explain the principles of the present disclosure. In the drawings, like reference numerals are used to represent like elements throughout. The accompanying drawings are of some embodiments of the present disclosure and not all embodiments. Other drawings can be derived from these drawings by those of ordinary skill in the art without paying creative effort.

[0040] Figure 1 is a schematic view of a correction device according to an exemplary embodiment.

[0041] Figure 2 is a schematic view of a fixing member of a correction device according to an exemplary embodiment.

[0042] Figure 3 is a schematic view of edge ring misalignment according to an exemplary embodiment.

[0043] Figure 4 is a schematic view of edge ring position alignment according to an exemplary embodiment.

[0044] Figure 5 is a schematic view of determining relative distance according to an exemplary embodiment.

[0045] Figure 6 is a flow chart of a correction method according to an exemplary embodiment.

[0046] Reference Signs:

[0047] 1, support rod; 2, detection device;

[0048] 3, controller; 4, fixing member;

[0049] 5, locking member; 10, edge ring;

[0050] 20, functional device; 21, detection unit;

[0051] 22, display unit; 41, fixing seat;

[0052] 42, insertion hole; 210, mounting hole;

[0053] a, first distance information; b, first length;

[0054] d, third length; e, second length;

[0055] f, fourth length; g, fifth length;

[0056] A, inclination angle; H1, first vertical height;

[0057] H2, second vertical height; L, relative spacing;

[0058] P, intersection point; P1, midpoint;

[0059] S is the length of the support rod. Detailed Implementation

[0060] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions in the disclosed embodiments will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this disclosure can be arbitrarily combined with each other.

[0061] In the manufacturing process of semiconductor structures, etching is required for different processes. Etching techniques can be divided into wet etching and dry etching, and etching is an important step in semiconductor manufacturing, microelectronics manufacturing, and micro / nanoscale manufacturing processes.

[0062] During the etching process of semiconductor structures, it is necessary to correct and adjust the relative spacing between the edge ring and the electrostatic chuck.

[0063] Current methods for calibrating and adjusting the edge ring include visually placing the edge ring and using vernier calipers to measure the relative distance between the edge of the edge ring and the edge of the electrostatic chuck, thereby calibrating and adjusting the position of the edge ring.

[0064] In the semiconductor structure manufacturing process, after the cleaning step, the edge ring is first placed on the edge of the electrostatic chuck. Then, a vernier caliper is used to measure the relative distance between the edge ring's edge and the electrostatic chuck's edge. Measurements are taken at several selected locations. When the relative gaps at these locations are all within a predetermined value, for example, 0.125 mm, it indicates that the edge ring is correctly positioned.

[0065] However, the method of correcting and adjusting the relative position of the aforementioned edge rings has measurement errors, which makes it difficult to control the critical dimensions of the subsequent semiconductor structure, thereby reducing the performance and yield of the semiconductor structure.

[0066] To address one of the aforementioned technical problems, exemplary embodiments of this disclosure provide a correction device. For example... Figure 1 As shown, Figure 1 A schematic diagram of a calibration apparatus according to an exemplary embodiment is shown below, in conjunction with...Figures 1 to 5 A correction device is introduced.

[0067] As Figures 1 to 4 shown in the figure, an exemplary embodiment of the present disclosure provides a correction device for correcting the relative position between an edge ring 10 and a functional device 20 of a semiconductor device. It should be noted that the functional device 20 can also be other structures in the semiconductor device, which is not limited herein. The correction device includes a plurality of support rods 1, a plurality of detection devices 2 and a controller 3.

[0068] Referring to Figures 1 to 4 shown in the figure, in some embodiments, the number of support rods 1 is multiple. The position of one end of any one of the plurality of support rods 1 is relatively fixed, wherein the relatively fixed end of the support rod 1 can be the upper end or the lower end of the support rod 1. In this embodiment, the upper end of the support rod 1 is fixed. The other end of the plurality of support rods 1 is respectively installed in a plurality of mounting holes 210 of the functional device 20 (such as an electrostatic chuck), and the number of mounting holes 210 is the same as the number of support rods 1. At the same time, each support rod 1 is inclinedly arranged relative to the top surface of the functional device 20.

[0069] In some embodiments, the upper end of each of the plurality of support rods 1 is fixedly connected. The fixedly connected manner can be that the upper ends of any two support rods 1 are fixedly overlapped, or the upper ends of the plurality of support rods 1 are fixedly connected through a fixing piece, thereby forming a support frame structure, wherein the fixing piece can include a fixing block or a connecting rod, etc.

[0070] As Figures 1 to 4 shown in the figure, the plurality of detection devices 2 are one-to-one correspondingly arranged on the plurality of support rods 1, and the support rods 1 are inclinedly arranged. The detection device 2 can be arranged at any position of the support rod 1. The detection device 2 is used to detect the first distance information between the detection end of the detection device 2 on each support rod 1 and the edge of the edge ring 10. It should be noted that the edge of the edge ring 10 referred to in this embodiment refers to the inner edge of the edge ring 10, and in other embodiments, the distance between the detection end of the detection device 2 and the inner edge of the edge ring 10 can also be taken as the first distance information.

[0071] In some embodiments, in order to facilitate subsequent rapid acquisition of the first distance information and facilitate installation and positioning, the detection device 2 can be arranged at a position of one-half of the effective length of the support rod 1. It should be noted that the effective length of the support rod 1 is used to represent the length between the surface of the functional device 20 and the top end fixed position of the support rod 1. In this embodiment, the detection device 2 is arranged at a position of one-half of the effective length of the support rod 1, and the support rod 1 is arranged in an inclined manner. Thus, the support rod 1, the vertical distance between the support rod 1 and the functional device 20, and the surface of the functional device 20 are connected to each other to form a triangle or a right triangle, so that the first information can be rapidly acquired according to the similar triangle theorem, the Pythagorean theorem, etc., the correction time of the edge ring 10 is saved, the correction efficiency is improved, and the productivity of the semiconductor structure is improved.

[0072] Referring to Figure 1 As shown in the figure, in some embodiments, the correction device further comprises a controller 3, and the controller 3 is electrically connected with the plurality of detection devices 2. The controller 3 can comprise a programmable logic controller (PLC), which uses a programmable memory to store instructions for performing logical operations, sequential control, timing, counting, and arithmetic operations, etc., and controls various types of mechanical equipment or production processes through digital or analog input and output. Alternatively, the controller 3 can also comprise a single-chip microcomputer, etc.

[0073] In this embodiment, one detection device is arranged on each support rod, and the first distance information of the edge position corresponding to the detection device and the edge ring is accurately acquired by using the detection device. Then, the relative position of the edge ring is corrected through comparison of the plurality of first distance information, so that the measurement accuracy is effectively improved, the consistency of the key dimension of the semiconductor structure is ensured, and the yield of the semiconductor structure is improved.

[0074] As shown in the figure, Figure 1 In some embodiments, the detection device 2 comprises a detection unit 21, and the detection unit 21 is capable of rotating relative to the support rod 1. The detection unit 21 is used to detect the first distance information between the detection unit and the inner edge of the edge ring 10.

[0075] In this embodiment, the detection angle of the detection end of the detection unit 21 can be adjusted through the relative rotation of the detection unit 21, so that the detection data (i.e., the first distance information) of the corresponding detection unit 21 can be directly acquired subsequently.

[0076] In another aspect, the detection angle of the detection unit 21 can be adjusted according to the different positions of the mounting hole 210 on the functional device 20. For example, the detection angle of the detection end of the detection unit can be adjusted according to the positions of the chuck pin holes (i.e., the mounting hole 210) in the electrostatic chuck (i.e., the functional device 20) of different sizes, so as to facilitate the operation and use of the detection device 2 and save the detection period.

[0077] As shown in Figure 1 some embodiments, the detection unit 21 includes a laser ranging sensor. After the detection angle of the detection end of the laser ranging sensor is adjusted, a plurality of first distance information between the inner edge of the edge ring 10 and the outer edge of the functional device 20 is detected by a plurality of laser ranging sensors. Based on the plurality of first distances, a plurality of relative distances between the outer edge of the functional device 20 and the inner edge of the edge ring 10 is derived, and then whether the position of the edge ring 10 needs to be corrected is determined according to the plurality of relative distance differences. Thus, in this embodiment, the electronic laser ranging sensor is used to effectively improve the accuracy of the detection result, reduce the detection error caused by manual measurement, and also avoid the particle pollution and other problems caused by manual measurement of the semiconductor equipment, thereby effectively ensuring and improving the consistency and yield of the key dimensions of the subsequent semiconductor structure.

[0078] As shown in Figure 1 some embodiments, the detection device 2 further includes a display unit 22 for displaying the first distance information. The display unit 22 is in communication connection with the detection unit 21, and the display unit 22 is arranged on the support rod 1. The display unit 22 can include, but is not limited to, an electronic display screen, a tablet, a mobile phone, a computer display, etc.

[0079] It should be noted that in one example, the display unit 22 adopts an electronic display screen. The number of electronic display screens is at least one. When the number of electronic display screens is one, the plurality of detection units 21 are in communication connection with the electronic display screen.

[0080] Alternatively, one electronic display screen is arranged on each support rod 1, that is, the number of electronic display screens is consistent with the number of detection units 21. The electronic display screen can be arranged at any position on the support rod 1. In order to facilitate the detection of the detection unit 21, the electronic display screen can be arranged above the detection unit 21 on the support rod 1. In some embodiments, the length of the electronic display screen can be 30 mm, and the width can be 20 mm, so as to facilitate the reading of the detection result and the detection of the detection unit 21.

[0081] In this embodiment, the display unit 22 can more intuitively read the detection result of each detection unit 21, thereby improving the detection efficiency.

[0082] AsFigure 1 As shown, in some embodiments, the included angles formed between the multiple support rods 1 and the functional device 20 are all the same. That is, the multiple support rods 1, together with the surface of the functional device 20, form a regular pyramid structure. The perpendicular line from the vertex of this regular pyramid to the surface of the functional device 20 passes through the center of the functional device 20, thereby enabling rapid and accurate acquisition of the first distance information, simplifying the subsequent calculation and derivation process of the relative distance between the functional device 20 and the edge ring 10, and improving detection efficiency.

[0083] like Figures 1 to 5 As shown, in some embodiments, the ends of the multiple support rods 1 furthest from the functional device 20 have an intersection point P. The end of the support rod 1 furthest from the functional device 20 is its upper end. The upper ends of the multiple support rods 1 can be fixed by connecting rods or fixing blocks to ensure that the length of each support rod 1 above the functional device 20 is the same. Then, multiple laser rangefinders are fixed one-to-one at the same position on the multiple support rods 1. This allows the laser rangefinders to quickly detect the first distance information and accurately determine the relative distance between the inner edge of the edge ring 10 and the outer edge of the functional device 20, thereby determining whether the relative position of the edge ring 10 needs correction.

[0084] Alternatively, the extension lines of the ends of the multiple support rods 1 furthest from the functional device 20 intersect at point P. That is, the upper ends of the multiple support rods 1 can be fixedly connected by a fixing block. In one example, the upper ends of the multiple support rods 1 are all inserted into the fixing block, while the lower ends of the multiple support rods 1 are installed in the multiple mounting holes 210 of the functional device 20. Thus, the multiple support rods 1 are stably fixed between the functional device 20 and the fixing block, thereby improving the detection accuracy of the laser rangefinder sensor, and consequently improving the accuracy and efficiency of the detection results.

[0085] Alternatively, the projection pattern formed by the orthographic projections of the multiple support rods 1 onto the functional device 20 has a midpoint P1. That is, the orthographic projection of the intersection of the multiple support rods 1 coincides with the midpoint of the projection pattern. This structure facilitates the installation of the multiple support rods 1 onto the functional device 20 and ensures the stability of the multiple support rods 1 during the ranging process. The laser ranging sensor can be positioned at a predetermined location below the intersection of the support rods, thereby enabling rapid detection of the first distance information and improving the accuracy of the detection results.

[0086] like Figure 5As shown in some embodiments, the intersection or midpoint in the above examples is located on a vertical line passing through the center point of the functional device 20. That is, the intersection or midpoint of the projection of the plurality of support rods 1 is located directly above the center point of the functional device 20. The plurality of support rods 1 cooperates with the top surface of the functional device 20 to form a right pyramid structure, thereby facilitating subsequent rapid detection of a plurality of first distance information by the detection unit 21. Then, the placement position of the edge ring 10 is judged whether it needs to be corrected by using the plurality of first distance information. At the same time, the right pyramid structure has good stability, which can improve the accuracy of the detection result of the detection unit 21, improve the detection efficiency and detection accuracy, and further ensure and improve the consistency and yield of the key dimensions of the semiconductor structure.

[0087] As shown in some embodiments, Figure 1 and Figure 2 As shown in some embodiments, the correction device further comprises a fixing member 4. The fixing member 4 is used to fix one end of the plurality of support rods 1 away from the functional device 20. In this embodiment, the upper end of the plurality of support rods 1 is fixed by the fixing member 4, thereby improving the stability of the detection unit 21 during detection, and further improving the accuracy of the detection result.

[0088] As shown in some embodiments, Figure 2 As shown in some embodiments, the fixing member 4 comprises a fixing seat 41, and a plurality of insertion holes 42 are arranged on the bottom surface of the fixing seat 41. One end (such as the upper end) of the plurality of support rods 1 is respectively inserted into the plurality of insertion holes 42. It should be noted that the insertion holes 42 can be inclinedly arranged on the fixing seat 41, so as to facilitate the insertion of the support rods 1. In this embodiment, the insertion holes on the fixing seat facilitate the rapid assembly or disassembly of the support rods between the functional device and the fixing seat, thereby improving the installation and disassembly efficiency, and further improving the stability of the detection unit while improving the detection efficiency.

[0089] It should be noted that in some embodiments, the correction device further comprises a locking member 5. The number of the locking members 5 is multiple, and the plurality of locking members 5 correspond to the plurality of support rods 1 one by one. One end of the locking member 5 penetrates through one side wall of the fixing seat 41 and extends into the insertion hole 42, so as to fix the support rod 1 on the fixing seat 41, thereby improving the stability of the connection between the fixing seat 41 and the support rod 1.

[0090] In one example, the locking member 5 comprises a locking bolt, and the locking bolt is threadedly connected to the side wall of the fixing seat, wherein the side wall of the fixing seat is perpendicular to the bottom surface of the fixing seat.

[0091] As shown in some embodiments, Figure 1 As shown in some embodiments, the number of the support rods 1 is at least three, such as three, four or more.

[0092] When there are three support rods 1, a regular triangular pyramid structure can be constructed. Correspondingly, the three mounting holes 210 can be set at the three vertices of the equilateral triangle. The perpendicular line from the vertex of the regular triangular pyramid to the surface of the functional device 20 passes through the center of the functional device 20 and the center of the equilateral triangle, so that the detection device 2 can quickly obtain three first distance information and use the first distance information to determine whether the placement position of the edge ring 10 is correct.

[0093] It should be noted that in some embodiments, the three support rods 1 can also be constructed into a triangular pyramid structure, and the perpendicular line from the vertex of the pyramid to the surface of the functional device 20 may not pass through the center of the functional device 20. Therefore, based on the tilt angle of each support rod 1, the length of the support rod 1, and the position and height of the detection device 2 on the support rod 1, multiple first distance information can be obtained using the Pythagorean theorem and the similar triangle theorem, and the first distance information can be used to determine whether the position of the edge ring 10 needs correction.

[0094] When there are four or more support rods 1, a multi-faceted pyramid structure can be constructed, such as a regular square pyramid or a regular hexagonal pyramid. The perpendicular line passing through the vertex of the regular pyramid passes through the center of the functional device 20, or the perpendicular line passing through the vertex of the multi-faceted pyramid structure does not pass through the center of the functional device 20. Therefore, the calculation process for determining whether the position of the edge ring 10 needs correction in this embodiment can refer to the calculation process for three support rods 1.

[0095] It should be noted that the process of calculating and determining whether the position of the edge ring 10 needs to be corrected using multiple support rods 1 and multiple detection devices 2 will be described in the following correction method.

[0096] In this embodiment, a regular pyramidal structure or a multi-pyramidal structure is constructed by multiple support rods 1. By utilizing similar triangle theorems, Pythagorean theorem, etc., the first distance information between the detection device 2 and the inner edge of the edge ring 10 can be quickly detected, thereby improving detection efficiency and accuracy, and thus ensuring and improving the consistency and yield of key dimensions of the semiconductor structure.

[0097] like Figure 6 As shown, an exemplary embodiment of this disclosure provides a correction method applied to the aforementioned correction device. The correction method of this embodiment includes:

[0098] S100: Obtain the first distance information detected by each detection device. The first distance information is used to characterize the distance between each detection device and the edge ring.

[0099] Step S200: Obtain the second distance information for each support rod. The second distance information is used to characterize the geometric positional relationship between the two ends of the support rod and the functional device.

[0100] Step S300: determining the relative distance between the functional device and the edge ring in the area where the support rod is located according to the first distance information and the second distance information.

[0101] Step S400: adjusting the position of the edge ring according to the difference between the relative distances.

[0102] In this embodiment, the detection device is used to obtain a plurality of first distance information, and then the plurality of first distance information and the second distance information of each support rod are used to determine a plurality of relative distances between the functional device and the edge ring. Then, the difference between the relative distances is used to determine whether the position of the edge ring needs to be adjusted. The above correction method is simple to operate and can effectively ensure and improve the consistency and yield of the key size of the subsequent semiconductor structure.

[0103] According to an example embodiment, this embodiment is a further description of step S100 above.

[0104] Referring to FIG. 1, Figure 4 In some embodiments, the first distance information a can be detected by the detection device 2. The detection device 2 includes a detection unit 21 and a display unit 22. The detection unit 21 can be a laser ranging sensor, which is communicatively connected to the display unit 22.

[0105] In the process of obtaining the first distance information a, the laser ranging sensor is first installed at a predetermined position of the support rod 1, and the angle of the detection end of the laser ranging sensor is adjusted. The detection light emitted by the detection end of the laser ranging sensor is projected on the functional device 20 on the same straight line as the projection of the support rod 1 on the functional device 20, which means that the detection angle of the laser ranging sensor is adjusted. Then, the laser ranging sensor is turned on, and the detection light emitted by the laser ranging sensor is reflected back to the laser ranging sensor after touching the inner edge of the edge ring 10, thereby quickly detecting the first distance information a. Finally, the display unit 22 displays the first distance information a.

[0106] In this embodiment, the detection light emitted by the detection end of the laser ranging sensor is projected on the functional device 20 on the same straight line as the projection of the support rod 1 on the functional device 20, which can simplify the calculation process of the relative distance between the edge ring 10 and the functional device 20, thereby improving the detection efficiency.

[0107] It should be noted that in some embodiments, the orthographic projection of the detection light emitted by the laser rangefinder on the functional device 20 and the orthographic projection of the support rod 1 on the functional device 20 may not be on the same straight line. In this embodiment, the relative distance between the edge ring 10 and the functional device 20 can be calculated simply by deflecting the detection ends of multiple laser rangefinders in the same direction and rotating them by the same angle. For example, the detection ends of multiple laser rangefinders can all be deflected by the same angle clockwise or counterclockwise. Then, the relative distance between the edge ring 10 and the functional device 20 can be calculated using the similar triangle theorem, the Pythagorean theorem, etc.

[0108] According to an exemplary embodiment, this embodiment is a further explanation of step S200 above.

[0109] like Figure 3 and Figure 4 As shown, in some embodiments, the second distance information is used to characterize the geometric positional relationship between the two ends of the support rod 1 and the functional device 20. The process of obtaining the second distance information for each support rod 1 is as follows:

[0110] A first length b is obtained, which characterizes the distance between the detection device 2 and the mounting hole 210 on the functional device 20. The first length b can be directly measured. In some embodiments, the two ends of the support rod 1 are respectively installed in the mounting hole 210 and the insertion hole of the fixing seat. In this case, the length of the support rod 1 between the mounting hole 210 and the bottom surface of the fixing seat is S. The detection device 2 is installed at any position on the support rod 1. For example, the ratio of the first length b to the length S of the support rod 1 is b:S = 1:(2~5). In other embodiments, since the position of the mounting hole 210 is preset, the first length b can also be pre-stored in the controller and directly recalled when needed.

[0111] The tilt angle A of the support rod 1 is obtained, which characterizes the acute angle between the support rod 1 and the functional device 20. This acute angle can be quickly measured using an angle measuring instrument, or it can be determined based on the specifications of the functional device 20. For example, the specifications of the functional device 20 are determined according to the semiconductor manufacturing process requirements, thereby determining the third length d. The third length d characterizes the distance from the mounting hole 210 on the functional device 20 to the center of the functional device 20. In one example, the length S of the support rod 1 can be set to twice the third length d. When the orthographic projection of the top of the support rod 1 onto the functional device 20 coincides with the center of the functional device 20, the tilt angle A is 60 degrees.

[0112] The second length e is obtained, which is used to characterize the distance between the mounting hole 210 and the edge of the functional device 20. The actual value of the second length e can be obtained after the usage specifications of the functional device 20 are determined.

[0113] It should be noted that the second distance information includes the first length b, the tilt angle A, the second length e, and the third length d. In this embodiment, the second length e and the third length d can be directly obtained using the specifications of the functional device, the tilt angle A can be directly obtained using a measuring tool such as an angle measuring instrument, and the length of the support rod 1 can be calculated and manufactured. This effectively improves the acquisition rate of the second distance information, thereby improving the efficiency of subsequent edge ring position correction.

[0114] According to an exemplary embodiment, this embodiment is a further explanation of step S300 above.

[0115] Reference Figure 3 and Figure 4 As shown, based on the first distance information a and the second distance information, the relative distance L between the functional device 20 and the edge ring 10 within the area where the support rod 1 is located is determined.

[0116] In determining the relative distance L, it is necessary to use the parameters of the first distance information a, the first length b, the length S of the support rod 1, the tilt angle A, and the second length e to calculate according to preset rules.

[0117] In one example, the specific calculation process for the relative distance L can be carried out using the following method:

[0118] First, a first distance information 'a' is detected and obtained using a laser rangefinder.

[0119] Then, the second length e and the third length d are determined according to the specifications of the functional device 20 used; the length S of the support rod 1 is directly measured and obtained, and the first length b is determined by measurement or derivation based on the installation position of the laser rangefinder sensor.

[0120] Then, the first step: using the length S of the support rod 1 and the third length d, the first vertical height H1 can be determined by the Pythagorean theorem. The first vertical height H1 is used to characterize the vertical distance between the top of the support rod 1 and the functional device 20; or, the first vertical height H1 is used to characterize the vertical distance between the intersection of multiple support rods 1 and the functional device 20.

[0121] Second step: through the first vertical height H1 and the first length b, the fourth length f and the second vertical height H2 are determined by using the similar triangle theorem and the Pythagorean theorem, wherein the fourth length f is used to represent the straight-line distance between the orthographic projection of the detection unit 21 on the functional device 20 and the mounting hole 210, and the second vertical height H2 is used to represent the vertical distance between the position height of the detection unit 21 and the functional device 20.

[0122] Third step: through the first distance information a and the second vertical height H2, the fifth length g is determined by using the Pythagorean theorem, and the fifth length g is used to represent the distance between the orthographic projection of the detection unit 21 on the functional device 20 and the inner edge of the edge ring 10.

[0123] Finally, the relative distance L is determined by using the fifth length g, the fourth length f and the second length e. That is, the remaining value is the relative distance L by directly subtracting the fourth length f and the second length e from the fifth length g.

[0124] In another example, the specific calculation process of the relative distance L can also use the following method:

[0125] Firstly, the second length e is determined according to the specification of the functional device 20 used; the length S of the support rod 1 is directly measured and obtained, and the first length b is determined by measuring or deducing according to the installation position of the laser ranging sensor; the inclination angle A is obtained by using a measuring tool; and the first distance information a is detected and obtained by using the laser ranging sensor.

[0126] Then, through the inclination angle A and the first length b, the fourth length f and the second vertical height H2 are determined by using the sine theorem or the cosine theorem, wherein the fourth length f is used to represent the straight-line distance between the orthographic projection of the detection unit 21 on the functional device 20 and the mounting hole 210, and the second vertical height H2 is used to represent the vertical distance between the position height of the detection unit 21 and the functional device 20.

[0127] Then, through the first distance information a and the second vertical height H2, the fifth length g is determined by using the Pythagorean theorem, and the fifth length g is used to represent the distance between the orthographic projection of the detection unit 21 on the functional device 20 and the inner edge of the edge ring 10,

[0128] Finally, the relative distance L is determined by using the fifth length g, the fourth length f and the second length e. That is, the remaining value is the relative distance L by directly subtracting the fourth length f and the second length e from the fifth length g.

[0129] In the above embodiment, after the relevant parameters of the geometric positional relationship are obtained, the relative distance between the inner edge of the edge ring and the outer edge of the functional device can be accurately calculated according to the above parameters and the first distance information a and by using a preset rule such as the similar triangle theorem, the Pythagorean theorem and the cosine theorem, and then the position of the edge ring 10 is judged by the difference between the plurality of relative distances.

[0130] According to an example embodiment, the embodiment is a further description of step S400 in the above.

[0131] Referring to Figure 2 and Figure 3 In some embodiments, the following method can be used in the process of adjusting the position of the edge ring 10 according to the difference between the plurality of relative distances L.

[0132] After the plurality of relative distances L are determined, when the difference between any two relative distances L exceeds a preset threshold range, the position of the edge ring 10 is adjusted. It should be noted that the preset threshold range can be 0mm-0.05mm.

[0133] In one example, three support rods 1 are uniformly distributed on the functional device 20. Therefore, in the process of correcting the position of the edge ring 10, the three relative distances L, i.e. the relative distance L1, the relative distance L2 and the relative distance L3, can be determined by using the laser ranging sensor and the implementation of the above correction method.

[0134] Further, the difference between the relative distance L1 and the relative distance L2, the difference between the relative distance L2 and the relative distance L3, and the difference between the relative distance L1 and the relative distance L3 are determined, and when the above three differences are within 0.05mm, it indicates that the position of the edge ring 10 is correct.

[0135] However, when the difference between the relative distance L1 and the relative distance L2 is greater than 0.05mm, or the difference between the relative distance L1 and the relative distance L3 is greater than 0.05mm, or the difference between the relative distance L2 and the relative distance L3 is greater than 0.05mm, it indicates that the position of the edge ring 10 is not correct, and the position of the edge ring 10 needs to be corrected.

[0136] In the embodiment, according to the first distance information a and the second distance information, a plurality of relative distances L between the edge ring 10 and the functional device 20 are derived, the difference of any two relative distances L is compared with a preset threshold range, when the difference exceeds the preset threshold range, the position of the edge ring 10 needs to be corrected, when the difference is within the preset threshold range, it indicates that the position of the edge ring 10 has been positioned, and the position of the edge ring 10 does not need to be adjusted. The above method is simple to operate, and the electronic laser ranging sensor is used, which can effectively improve the accuracy of the detection result, reduce the detection error caused by manual measurement, and also avoid the particle pollution caused by the semiconductor equipment during manual measurement, thereby effectively ensuring and improving the consistency and yield of the key size of the subsequent semiconductor structure.

[0137] The embodiments or implementations in the specification are described in a progressive manner, and each embodiment focuses on the difference from other embodiments. The same or similar parts between the embodiments can be referred to each other.

[0138] In the description of the specification, the description of the terms "embodiment", "exemplary embodiment", "some implementations", "illustrative implementation", "example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the implementation or example are included in at least one implementation or example of the present disclosure.

[0139] In the specification, the illustrative description of the above terms does not necessarily refer to the same implementation or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more implementations or examples in a suitable manner.

[0140] In the description of the present disclosure, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present disclosure.

[0141] It can be understood that the terms "first", "second", etc. used in the present disclosure can be used in the present disclosure to describe various structures, but these structures are not limited by these terms. These terms are only used to distinguish the first structure from another structure.

[0142] In one or more accompanying drawings, the same elements are represented by similar reference numerals. For clarity, many parts in the drawings are not drawn to scale. Furthermore, certain well-known parts may not be shown. For simplicity, a structure obtained after several steps may be depicted in a single drawing. Many specific details of this disclosure, such as the structure, materials, dimensions, processing methods, and techniques of the devices, are described below to provide a clearer understanding of the disclosure. However, as those skilled in the art will understand, this disclosure may be implemented without adhering to these specific details.

[0143] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this disclosure, and are not intended to limit them. Although this disclosure has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this invention.

Claims

1. A correction method applied to a correction device, characterized in that, The application relates to a correction device for correcting the relative position between an edge ring and a functional device of a semiconductor device, the correction device comprising: a plurality of support rods, one end of the plurality of support rods being relatively fixed, the other end of the plurality of support rods being respectively installed in a plurality of mounting holes of the functional device, and the support rods being arranged obliquely relative to the functional device; a plurality of detection devices arranged on the support rods, the detection devices being arranged one by one with the support rods, and the detection devices being used for detecting first distance information between the detection devices and the edge ring; and a controller electrically connected with the plurality of detection devices respectively. The correction method comprises the following steps: obtaining the first distance information detected by each detection device, the first distance information being used for representing the distance between each detection device and the edge ring; obtaining second distance information of each support rod, the second distance information being used for representing the geometric position relationship between the two end portions of the support rod and the functional device; determining the relative spacing between the functional device and the edge ring in the area where the support rod is located according to the first distance information and the second distance information; adjusting the position of the edge ring according to the difference between the relative spacings. The detection device comprises a detection unit capable of rotating relative to the support rod, and the detection unit is used for detecting the first distance information between the detection unit and the edge ring. The detection unit comprises a laser ranging sensor.

2. The correction method of claim 1, wherein The detection device further comprises a display unit in communication connection with the detection unit.

3. The correction method of claim 2, wherein The display unit is used for displaying the first distance information.

4. The correction method of claim 2, wherein The included angles formed between the plurality of support rods and the functional device are all the same. The ends of the plurality of support rods away from the functional device have an intersection point; or 5. The correction method of claim 1, wherein The extension lines of the ends of the plurality of support rods away from the functional device have an intersection point; or 6. The correction method of claim 1, wherein The orthographic projection of the plurality of support rods on the functional device has a midpoint. The intersection point or the midpoint is located on a vertical line passing through the center point of the functional device. The correction device further comprises a fixing member used for fixing the ends of the plurality of support rods away from the functional device.

7. The correction method of claim 6, wherein, The fixing member comprises a fixing seat provided with a plurality of plug-in holes, wherein the ends of the plurality of support rods are respectively plugged into the plurality of plug-in holes.

8. The correction method of claim 1, wherein, The correction device further comprises a plurality of locking members, and the support rods are fixed to the fixing seat through the locking members.

9. The correction method of claim 8, wherein, The number of the support rods is at least three.

10. The correction method of claim 9, wherein, The adjustment of the position of the edge ring according to the difference between the relative spacings comprises the following steps:

11. The correction method according to any one of claims 1 to 10, characterized in that, when the difference exceeds a preset threshold range, the position of the edge ring is adjusted.

12. The correction method of claim 1, wherein, The obtaining of the second distance information of each support rod, the second distance information being used for representing the geometric position relationship between the two end portions of the support rod and the functional device, comprises the following steps: a first length is obtained, the first length being used for representing the distance between the detection device and the mounting hole on the functional device; 13. The correction method of claim 1, wherein ​ ​ obtaining an inclination angle of the support rod, the inclination angle being used to represent an acute angle between the support rod and the functional device; obtaining a second length, the second length being used to represent a distance between the mounting hole and the edge of the functional device.

14. The correction method of claim 13, wherein, determining, according to the first distance information and the second distance information, a relative spacing between the functional device and the edge ring in a region where the support rod is located, comprising: determining the relative spacing according to the first distance information, the first length, the inclination angle, and the second length.

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