A motion module with precise operation in the Y-axis and Z-axis

Abstract

The present invention provides a motion module with precise operation in the Y-axis and Z-axis, which includes a bottom plate, an intermediate motion plate, and an upper motion plate. On the same side of the bottom plate, an inclined surface structure plate, a first linear motion module, and a second linear motion module are fixed; the intermediate motion plate is slidably connected to the inclined surface structure plate and can slide close to or away from the bottom plate along the inclined surface of the inclined surface structure plate, and the moving end of the first linear motion module contacts and can drive the intermediate motion plate to slide along the inclined surface; the upper motion plate is slidably connected to the intermediate motion plate, and the moving end of the second linear motion module contacts and can drive the upper motion plate to slide along the surface of the intermediate motion plate. In the present invention, the motions of the upper motion plate and the intermediate motion plate are independent of each other without interference; there is no superposition relationship between the linear motion modules, and their motions will not be transmitted to each other; the superposition motion error is eliminated, and precise motion in the Y-axis and Z-axis can be achieved to drive a load.

Description

Technical Field

[0001] The present invention relates to the technical field of planar motion modules, and particularly relates to a motion module with precise operation in the Y-axis and Z-axis. Background Art

[0002] The adjustment of motion in the vertical plane mainly relies on the way of module superposition. For example, to achieve the motion adjustment in the YZ direction of the vertical plane, generally, the method of stacking the Z-axis motion module on the mobile end of the Y-axis motion module is adopted. After the modules are stacked, the overall thickness increases, the lever arm becomes longer, and the load carried is limited, which is not conducive to being applied to equipment with a larger detection module and a heavier load, nor is it conducive to being applied to equipment with strict control over the installation space. Therefore, improvement is needed.

[0003] In product detection, it is necessary to adjust the minute change amount of the detection module for alignment, so it is necessary to control the high-precision motion of the detection module. For the situation after module superposition, obviously, due to the increase in the overall thickness and the lengthening of the lever arm, superposition motion errors will be brought, and the detection module cannot be accurately driven for high-precision motion. Summary of the Invention

[0004] The technical problem to be solved by the present invention is: in order to drive a load to perform precise motion in the Y-axis and Z-axis, a motion module with precise operation in the Y-axis and Z-axis is provided.

[0005] The technical solution of the present invention to solve the above technical problem is as follows:

[0006] The present invention provides a motion module with precise operation in the Y-axis and Z-axis, including a bottom plate, an intermediate motion plate, and an upper motion plate. On the same side of the bottom plate, an inclined surface structure plate, a first linear motion module, and a second linear motion module are fixed; the intermediate motion plate is slidably connected to the inclined surface structure plate and can slide close to or away from the bottom plate along the inclined surface of the inclined surface structure plate, and the moving end of the first linear motion module contacts and can drive the intermediate motion plate to slide along the inclined surface; the upper motion plate is slidably connected to the intermediate motion plate, and the moving end of the second linear motion module contacts and can drive the upper motion plate to slide along the surface of the intermediate motion plate.

[0007] The beneficial effects of the present invention are:

[0008] The present invention can drive a load to perform precise movements in the Y-axis and Z-axis directions. Specifically, since the upper moving plate is slidably connected to the middle moving plate, the movement of the upper moving plate along the surface of the middle moving plate and the movement of the middle moving plate along the inclined surface of the inclined surface structure plate are independent of each other and do not interfere with each other; the first linear motion module and the second linear motion module are both fixed on the bottom plate, and there is no superposition relationship between them, and their movements will not be transmitted to each other; at the same time, when the middle moving plate moves along the inclined surface, it will not transmit the movement component in its own Z-axis direction to the upper moving plate. Therefore, the superposition movement error is eliminated, and the ability to drive a load to perform precise movements in the Y-axis and Z-axis directions is achieved.

[0009] Based on the above technical solutions, the present invention can also be improved as follows.

[0010] Further, the length direction of the inclined surface structure plate, the movement direction of the first linear motion module, and the movement direction of the second linear motion module are all arranged along the Z-axis direction and are all parallel to the bottom plate.

[0011] The movement directions of the first linear motion module and the second linear motion module are the Z-axis direction, which is convenient to identify during use; in addition, the direction in which the first linear motion module drives the middle moving plate is parallel to the direction in which the second linear motion module drives the upper moving plate, so that the moving end of the first linear motion module has only a relative movement in the Y-axis direction with respect to the middle moving plate, and the moving end of the second linear motion module also has only a relative movement in the Y-axis direction with respect to the upper moving plate, that is, the movement component of the middle moving plate in the Y-axis direction, avoiding the movement error in the third direction.

[0012] Further, the side surface of the inclined surface structure plate facing away from the bottom plate is inclined with respect to the bottom plate, and a wedge-shaped portion is provided on the side surface of the middle moving plate facing the inclined surface, and the wedge-shaped portion is slidably connected to the inclined surface portion of the inclined surface structure plate, so that the side surface of the middle moving plate facing away from the bottom plate is parallel to the bottom plate.

[0013] It is convenient to stably install the inclined surface structure plate on the bottom plate, and the inclined surface can provide the movement component of the middle moving plate in the Y-axis direction; the wedge-shaped portion ensures that the main body of the middle moving plate moves parallel to the bottom plate, avoiding movement errors. The inclined surface structure plate can be trapezoidal, wedge-shaped or triangular.

[0014] Further, two inclined surfaces with respect to the bottom plate are provided on the side of the inclined surface structure plate facing away from the bottom plate, the two inclined surfaces extend along the length direction of the inclined surface structure plate and are mirror-symmetrical to each other, and a middle moving plate is provided on each inclined surface, and each middle moving plate is independently in contact with the moving end of the first linear motion module and is driven by it.

[0015] It is convenient to expand the module function or improve the movement accuracy.

[0016] Further, the first linear motion module is provided with two moving ends, and each moving end contacts and can drive an intermediate motion plate to slide along the inclined plane where it is located.

[0017] It is convenient to expand the module function or improve the motion accuracy.

[0018] Further, the moving directions of the two moving ends of the first linear motion module are opposite, and the upper motion plate is simultaneously slidably connected to the two intermediate motion plates.

[0019] It is convenient to improve the motion accuracy. The two intermediate motion plates simultaneously transfer the motion components in the Y-axis direction to the upper motion plate, increasing the constraint points and restricting the deformation and vibration of the upper motion plate.

[0020] Further, the first linear motion module is a ball screw pair. The nut slider component of the ball screw pair is its own moving end, and both ends of its own screw are respectively connected with moving ends through reverse threads; its own screw is connected to the bottom plate through a bearing seat, and a servo motor for driving the screw is installed on the bottom plate.

[0021] Drive the two moving ends through reverse threads, with high motion accuracy, and the servo motor can achieve precise control. The second linear motion module can also adopt a ball screw pair.

[0022] Further, the inclined plane of the intermediate motion plate and the inclined plane structure plate are connected through a first guide rail; the upper motion plate and the intermediate motion plate are connected through a second guide rail.

[0023] Through the first guide rail and the second guide rail, it is ensured that the intermediate motion plate and the upper motion plate move smoothly when driven, reducing vibration and jamming.

[0024] Further, the moving end of the first linear motion module and the intermediate motion plate are connected through a crossed roller guide rail; the moving end of the second linear motion module and the upper motion plate are connected through a crossed roller guide rail; the crossed roller guide rail is fixed to the moving end of the first linear motion module (3) or the moving end of the second linear motion module (4) and is perpendicular to the bottom plate.

[0025] Through the crossed roller guide rail, while guiding the motion components of the intermediate motion plate and the upper motion plate in the Y-axis direction, it bears the loads of the first linear motion module relative to the intermediate motion plate and the second linear motion module relative to the upper motion plate in the Z-axis direction and the third axis direction, which is convenient for precise control and improves the motion accuracy.

[0026] Further, a photoelectric sensor for sensing the position of the intermediate motion plate is provided on the inclined plane structure plate, and the photoelectric sensor is electrically connected with a bundled quick-connect plug; a grating scale for measuring its own position relative to the inclined plane is provided on the intermediate motion plate.

[0027] The position information is fed back in real time through the photoelectric sensor and the grating scale, facilitating the process of controlling the high-precision adjustment of the movement; the electrical circuits of the photoelectric sensors are bundled using quick-connect plugs, facilitating quick position docking and information transmission.

[0028] Furthermore, it further includes a housing which covers the floor and is connected to the bottom plate, and the housing is open in the direction facing the bottom plate, facilitating the protection of internal components. Description of the Drawings

[0029] Figure 1 It is a schematic structural diagram of the present invention.

[0030] Figure 2 It is a schematic semi-sectional view of the present invention.

[0031] Figure 3 It is an exploded schematic view of the present invention.

[0032] Figure 4 It is an assembly schematic view on the bottom plate of the present invention.

[0033] In the drawings, the technical features represented by the respective reference numerals are as follows:

[0034] 1 - bottom plate; 2 - inclined surface structure plate; 3 - first linear motion module; 4 - second linear motion module; 5 - intermediate motion plate; 6 - upper motion plate; 7 - first guide rail; 8 - wedge-shaped part; 9 - bearing seat; 10 - servo motor; 11 - second guide rail; 12 - crossed roller guide rail; 13 - photoelectric sensor; 14 - quick-connect plug; 15 - grating scale; 16 - housing. Detailed Embodiment

[0035] The principles and features of the present invention are described below. The examples given are only used to explain the present invention and are not intended to limit the scope of the present invention.

[0036] The present invention is described with reference to Figures 1-4 .

[0037] The present invention provides a motion module for precise operation of the Y-axis and Z-axis, including a bottom plate 1, an intermediate motion plate 5, and an upper motion plate 6. On the same side of the bottom plate 1, an inclined surface structure plate 2, a first linear motion module 3, and a second linear motion module 4 are fixed; the intermediate motion plate 5 is slidably connected to the inclined surface structure plate 2 and can slide closer to or away from the bottom plate 1 along the inclined surface of the inclined surface structure plate 2, and the moving end of the first linear motion module 3 contacts and can drive the intermediate motion plate 5 to slide along the inclined surface; the upper motion plate 6 is slidably connected to the intermediate motion plate 5, and the moving end of the second linear motion module 4 contacts and can drive the upper motion plate 6 to slide along the surface of the intermediate motion plate 5.

[0038] Principle:

[0039] Taking the application in product detection as an example, during use, the detection module can be installed on the upper moving plate 6, and the upper moving plate 6 can drive the control detection module (load) to perform precise movements in the Y-axis and Z-axis directions. When the first linear motion module 3 drives the intermediate moving plate 5 to slide along the inclined surface of the inclined surface structure plate 2, the intermediate moving plate 5 has a moving component (the moving component in the Y-axis direction) of approaching or moving away from the bottom plate 1, so that the intermediate moving plate 5 can drive the upper moving plate 6 to perform Y-axis movement; when the moving end of the second linear motion module 4 drives the upper moving plate 6 to slide, that is, it drives the upper moving plate 6 to move along the Z-axis.

[0040] Since the upper moving plate 6 is slidably connected to the intermediate moving plate 5, the movement of the upper moving plate 6 along the surface of the intermediate moving plate 5 and the movement of the intermediate moving plate 5 along the inclined surface of the inclined surface structure plate 2 are independent of each other and do not interfere; the first linear motion module 3 and the second linear motion module 4 are both fixed on the bottom plate 1, and there is no superposition relationship between them, and their movements will not be transmitted to each other; at the same time, when the intermediate moving plate 5 moves along the inclined surface, it will not transmit its own moving component in the Z-axis direction to the upper moving plate 6. Therefore, the superposition movement error is eliminated, and the ability to drive the load to perform precise movements in the Y-axis and Z-axis directions is achieved.

[0041] Further, the length direction of the inclined surface structure plate 2, the movement direction of the first linear motion module 3, and the movement direction of the second linear motion module 4 are all arranged along the Z-axis direction and are all parallel to the bottom plate (1).

[0042] The movement directions of the first linear motion module 3 and the second linear motion module 4 are the Z-axis direction, which is convenient to identify during use; in addition, the movement direction of the first linear motion module 3 driving the intermediate moving plate 5 is parallel to the direction of the second linear motion module 4 driving the upper moving plate 6, so that the moving end of the first linear motion module 3 has only a relative movement in the Y-axis direction with respect to the intermediate moving plate 5, and the moving end of the second linear motion module 4 also has only a relative movement in the Y-axis direction with respect to the upper moving plate 6, that is, the moving component of the intermediate moving plate 5 in the Y-axis direction, avoiding the movement error in the third direction.

[0043] Further, the side surface of the inclined surface structure plate 2 facing away from the bottom plate 1 is inclined with respect to the bottom plate 1, and a wedge-shaped portion 8 is provided on the side surface of the intermediate moving plate 5 facing the inclined surface, and the wedge-shaped portion 8 is slidably connected to the inclined surface portion of the inclined surface structure plate 2, so that the side surface of the intermediate moving plate 5 facing away from the bottom plate is parallel to the bottom plate 1.

[0044] It is convenient to stably install the inclined surface structure plate 2 on the bottom plate 1, and the inclined surface can provide the moving component of the intermediate moving plate 5 in the Y-axis direction; the wedge-shaped portion 8 ensures that the main body of the intermediate moving plate 5 moves parallel to the bottom plate 1, avoiding movement errors. The inclined surface structure plate 2 can be trapezoidal, wedge-shaped or triangular.

[0045] Furthermore, the side of the inclined structural plate 2 facing away from the bottom plate 1 is provided with two inclined surfaces relative to the bottom plate 1, the two inclined surfaces extend along the length direction of the inclined structural plate 2 and are mirror-symmetrical to each other, and each inclined surface is provided with an intermediate moving plate 5, and each intermediate moving plate 5 independently contacts with the moving end of the first linear motion module 3 and is driven thereby.

[0046] It is convenient to expand the module function or improve the motion accuracy. For example, if an upper motion plate 6 is connected to each intermediate motion plate 5, it is possible to simultaneously control the high-precision synchronous motion of two loads; if the first linear motion module 3 is provided with two motion ends and moves in opposite directions, the two motion ends drive an intermediate motion plate 5 respectively, and the two intermediate motion plates 5 are slidably connected to the same upper motion plate 6, it is possible to limit the deformation and vibration of the upper motion plate 6 and improve the motion accuracy.

[0047] Furthermore, the first linear motion module 3 is provided with two motion ends, each of which contacts and can drive an intermediate motion plate 5 to slide along the inclined plane where the intermediate motion plate 5 is located.

[0048] It is convenient to expand the module function or improve the motion accuracy. For example, if an upper motion plate 6 is connected to each intermediate motion plate 5, it is possible to simultaneously control the high-precision motion of two loads.

[0049] Furthermore, the two moving ends of the first linear motion module 3 move in opposite directions, and the upper moving plate 6 is slidably connected to the two intermediate moving plates 5 at the same time.

[0050] In order to improve the movement accuracy, the two middle moving plates 5 simultaneously transmit the movement component in the Y-axis direction to the upper moving plate 6, which increases the constraint points and limits the deformation and vibration of the upper moving plate 6.

[0051] Furthermore, the first linear motion module 3 is a ball screw pair, the nut slider component of the ball screw pair is its own moving end, and the two ends of its own screw are respectively connected to the moving ends through reverse threads; the own screw is connected to the base plate 1 through a bearing seat 9, and a servo motor 10 for driving the screw is installed on the base plate 1.

[0052] By driving the two moving ends with reverse threads, the moving precision is high, and the servo motor 10 can achieve precise control. The second linear motion module 4 can also use a ball screw pair.

[0053] Further, such as Figure 3 , 4 As shown: the middle moving plate 5 is connected to the inclined surface of the inclined structure plate 2 via a first guide rail 7; the upper moving plate 6 is connected to the middle moving plate 5 via a second guide rail 11.

[0054] Through the first guide rail 7 and the second guide rail 11, the smooth movement of the intermediate moving plate 5 and the upper moving plate 6 is ensured when they are driven, reducing vibration and jamming.

[0055] Furthermore, the moving end of the first linear motion module 3 is connected to the intermediate moving plate 5 through a crossed roller guide rail 12; the moving end of the second linear motion module 4 is connected to the upper moving plate 6 through a crossed roller guide rail 12; the crossed roller guide rail 12 is fixed to the moving end of the first linear motion module 3 or the moving end of the second linear motion module 4 and is perpendicular to the bottom plate 1.

[0056] While guiding the movement components of the intermediate moving plate 5 and the upper moving plate 6 in the Y-axis direction through the crossed roller guide rail 12, it bears the loads of the first linear motion module 3 relative to the intermediate moving plate 5 and the second linear motion module 4 relative to the upper moving plate 6 in the Z-axis direction and the third axis direction, facilitating precise control and improving the motion accuracy.

[0057] Furthermore, an optoelectronic sensor 13 for sensing the position of the intermediate moving plate 5 is provided on the inclined surface structure plate 2, and the optoelectronic sensor 13 is electrically connected to a bundled quick-connect plug 14; a grating scale 15 for measuring the position of the intermediate moving plate 5 relative to the inclined surface is provided on the intermediate moving plate 5.

[0058] By the real-time feedback of the position information by the optoelectronic sensor 13 and the grating scale 15, it is convenient to control the process of high-precision adjustment of the movement; the bundled electrical lines of the optoelectronic sensor 13 are adopted by the quick-connect plug 14, which is convenient for quick position docking and information transmission.

[0059] Furthermore, it further includes a housing 16, the housing 16 covers the floor and is connected to the bottom plate 1, and the housing 16 is open in the direction facing the bottom plate 1. It is convenient to protect the internal components.

[0060] In the description of the present invention, it should be understood that if descriptive terms indicating orientation, direction or position relationship appear, such as: "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., the orientation or position relationship indicated in this specification is based on the orientation or position relationship shown in the drawings, and is only for the convenience of understanding the present invention and simplifying the description, rather than indicating or implying that the indicated part, element or whole must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention.

[0061] In addition, if ordinal description terms such as "first", "second", etc. appear, their use in this specification is for the convenience of understanding or simplifying the description. For example, in order to distinguish multiple technical features of the same type or function and when it is necessary to mention them separately, this specification may use the method of prefixing or suffixing ordinal description terms to distinguish them. Therefore, it should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.

[0062] In the present invention, if structural relative function relationship description terms such as "installed", "connected", "joined", "fixed", etc. are used, unless otherwise clearly specified and limited, they should be understood in a broad sense. For example, "installed", "connected", "joined", etc. can be a fixed connection, a detachable connection, or integrated; can be a mechanical connection or an electrical connection; can be directly connected or indirectly connected through an intermediate medium, and can be the communication inside two components or the interaction relationship between two components; "fixed" can be a fixed connection formed as a whole or a detachable fixed connection through fasteners; can be directly fixed or fixed through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above description terms in the present invention can be understood according to specific circumstances, the context, the coherence of the context before and after, etc.

[0063] In the present invention, if description terms containing an affiliated or connection meaning appear, such as the first feature is "on" or "under" the second feature, unless otherwise clearly specified and limited, it should not be understood in a limiting sense. For example, "on" or "under" can be that the first and second features are in direct contact, or the first feature and the second feature are indirectly in contact through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above description terms in the present invention can be understood according to specific circumstances, the context, the coherence of the context before and after, etc.

[0064] Furthermore, the first feature being "above", "over" and "on top of" the second feature can be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature can be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0065] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms are not necessarily directed to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments, examples, and the features of different embodiments and examples described in this specification, and these combinations or combinations should fall within the scope encompassed by the present invention.

[0066] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the information available through their public channels, in combination with the technical inspiration given in this application document.

Claims

1. A motion module with precise operation on the Y-axis and Z-axis, characterized in that: It includes a bottom plate (1), an intermediate moving plate (5), and an upper moving plate (6). On the same side of the bottom plate (1), an inclined surface structure plate (2), a first linear motion module (3), and a second linear motion module (4) are fixed. The intermediate moving plate (5) is slidably connected to the inclined surface structure plate (2) and can slide closer to or away from the bottom plate (1) along the inclined surface of the inclined surface structure plate (2). The moving end of the first linear motion module (3) contacts and can drive the intermediate moving plate (5) to slide along the inclined surface. The upper moving plate (6) is slidably connected to the intermediate moving plate (5), and the moving end of the second linear motion module (4) contacts and can drive the upper moving plate (6) to slide along the surface of the intermediate moving plate (5).

2. The motion module with precise Y-axis and Z-axis operation according to claim 1, characterized in that: The length direction of the inclined surface structure plate (2), the moving direction of the first linear motion module (3), and the moving direction of the second linear motion module (4) are all arranged along the Z-axis direction and are all parallel to the bottom plate (1).

3. A motion module with precise operation in the Y-axis and Z-axis according to claim 1 or 2, characterized in that: The side surface of the inclined surface structure plate (2) facing away from the bottom plate (1) is inclined with respect to the bottom plate (1). A wedge-shaped part (8) is provided on the side surface of the intermediate moving plate (5) facing the inclined surface. The wedge-shaped part (8) is slidably connected to the inclined surface part of the inclined surface structure plate (2), so that the side surface of the intermediate moving plate (5) facing away from the bottom plate is parallel to the bottom plate (1).

4. The motion module with precise operation in the Y-axis and Z-axis according to claim 3, characterized in that: On the side of the inclined surface structure plate (2) facing away from the bottom plate (1), there are two inclined surfaces with respect to the bottom plate (1). The two inclined surfaces extend along the length direction of the inclined surface structure plate (2) and are mirror-symmetrical to each other. An intermediate moving plate (5) is provided on each inclined surface. Each intermediate moving plate (5) independently contacts the moving end of the first linear motion module (3) and is driven by it.

5. A motion module with precise operation of the Y-axis and Z-axis according to claim 4, characterized in that: The first linear motion module (3) has two moving ends, and each moving end respectively contacts and can drive an intermediate moving plate (5) to slide along the inclined surface where it is located.

6. The motion module with precise operation in the Y-axis and Z-axis according to claim 5, characterized in that: The moving directions of the two moving ends of the first linear motion module (3) are opposite, and the upper moving plate (6) is simultaneously slidably connected to the two intermediate moving plates (5).

7. The motion module with precise Y-axis and Z-axis operation according to claim 6, characterized in that: The first linear motion module (3) is a ball screw pair. The nut slider component of the ball screw pair is its own moving end, and the two ends of its own screw are respectively connected with moving ends through reverse threads. Its own screw is connected to the bottom plate (1) through a bearing seat (9), and a servo motor (10) for driving the screw is installed on the bottom plate (1).

8. A motion module with precise operation on the Y-axis and Z-axis according to claim 1 or 2, characterized in that: The intermediate moving plate (5) is connected to the inclined surface of the inclined surface structure plate (2) through a first guide rail (7); the upper moving plate (6) is connected to the intermediate moving plate (5) through a second guide rail (11).

9. A motion module with precise operation in the Y-axis and Z-axis according to claim 1 or 2, characterized in that: The moving end of the first linear motion module (3) is connected to the intermediate moving plate (5) through a crossed roller guide rail (12); the moving end of the second linear motion module (4) is connected to the upper moving plate (6) through a crossed roller guide rail (12); the crossed roller guide rail (12) is fixed to the moving end of the first linear motion module (3) or the moving end of the second linear motion module (4) and is perpendicular to the bottom plate (1).

10. The motion module with precise operation in the Y-axis and Z-axis according to claim 1, characterized in that: The inclined surface structure plate (2) is provided with a photoelectric sensor (13) for sensing the position of the intermediate moving plate (5), and the photoelectric sensor (13) is electrically connected with a bundled quick-connect plug (14); the intermediate moving plate (5) is provided with a grating ruler (15) for measuring its own position relative to the inclined surface.

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